EP3509792A2 - Dispositif de polissage par vibration - Google Patents

Dispositif de polissage par vibration

Info

Publication number
EP3509792A2
EP3509792A2 EP17762110.9A EP17762110A EP3509792A2 EP 3509792 A2 EP3509792 A2 EP 3509792A2 EP 17762110 A EP17762110 A EP 17762110A EP 3509792 A2 EP3509792 A2 EP 3509792A2
Authority
EP
European Patent Office
Prior art keywords
polishing
vibration
plate
drive
pan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP17762110.9A
Other languages
German (de)
English (en)
Other versions
EP3509792B1 (fr
Inventor
Michael Kley
Matthias Höfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atm Qness GmbH
Original Assignee
Atm GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atm GmbH filed Critical Atm GmbH
Publication of EP3509792A2 publication Critical patent/EP3509792A2/fr
Application granted granted Critical
Publication of EP3509792B1 publication Critical patent/EP3509792B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/06—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving oscillating or vibrating containers
    • B24B31/073—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving oscillating or vibrating containers involving a bowl being ring- or spiral-shaped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/06—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving oscillating or vibrating containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Definitions

  • the invention relates to a vibration polishing apparatus for generating an oscillating vibration for a circulating conveying movement of samples to be polished, a polishing plate which is fixedly connected to the vibration drive and can be driven by this, and a polishing trough, which is for receiving a polishing medium and to be polished Samples is formed and coupled to the polishing plate for driving.
  • Such a vibration polishing apparatus has become known from US 3,137,977 and comprises a revolving motor which drives eccentric weights and thereby vibrates the housing thereof.
  • the housing is connected to a drive plate which is permanently connected via rubber-elastic elements with a trough-like component, which is supported via a base housing to a table top or the like.
  • a vibration plate is not disassembled integrated in the device and can be brought over a handle for frictional engagement with the drive plate to be taken in their vibrations.
  • the vibrating plate is provided with a polishing or polishing cloth and has an annular rim so that it can be considered as a polishing pan.
  • the samples to be polished are inserted into the polishing trough by means of a sample holder and are subject to orbital motion during operation as a result of the vibration caused by the imbalance drive
  • Polishing plate which forms a polishing trough, only cumbersome and time-consuming by disassembly of the device possible.
  • the invention has for its object to provide a vibration polishing, in which little or no harmful vibrations are delivered to the supporting environment of the device.
  • Another aspect of the invention is to design a polishing trough, which is designed to receive a polishing medium and the samples to be polished, so that the Polished tub simply removed from the vibratory polisher and can be easily replaced with another polishing pan, possibly with other polishing medium.
  • the vibration drive as a unit drives an additional polishing plate with which it is firmly connected.
  • a polishing trough is coupled coupled for driving.
  • the polishing pan is designed to receive a polishing medium and the samples to be polished.
  • the samples to be polished can be used in sample holders.
  • the special feature is the use of a vibration drive with a fixed base part and two mutually driven equipment parts, which form aellesschwingteil and a vibration plate.
  • the vibrating plate is fixedly connected to a polishing plate, and a polishing pan for receiving a polishing medium and the samples to be polished is detachably coupled to the polishing plate.
  • Coupled device parts form inertial mass driven according to a direction of rotation, and the Schwarzschwingteil with this connected device parts form another, driven in the other direction of rotation activity mass, so that the total mass center in the operation of the device in principle remains at a constant position and it does not cause vibration excitation to the fixed base part comes.
  • an extraordinarily smooth running of the new vibration polishing apparatus is achieved, while in the prior art strong vibration vibrations are released to the environment.
  • Each of these vibration systems can show their own resonance frequencies.
  • resonant frequencies occur, the smooth running of the vibratory polishing device is disturbed.
  • This disturbance can be detected by an acceleration sensor whose signals are fed back to a control part of the vibration polishing apparatus and processed there to come out of the disturbed operation.
  • the oscillating vibration preferably results in a batchwise, obliquely upward tangential movement of the samples to be polished with respect to the sample circulation within the polishing pan, and thus in particular to hopping orbital conveyance of the samples to be polished within the polishing pan relative to the polishing medium, causing the samples to slide on the polishing medium and to polish the samples on their underside.
  • polishing medium a polishing cloth and polishing agent in a suspension is preferable.
  • Other polishing media are also useful, such as fine abrasive or fine abrasive and / or polishing paper.
  • a magnetic adhesion of the polishing trough to the polishing plate is preferred, which achieves an easily detachable vertical or axial magnetic attachment of the polishing trough to the polishing plate.
  • a magnetic plate or magnetic film may be adhered to the top of the polishing pad or on the underside of the polishing pan.
  • a sheet steel or magnetic sheet can be glued to the underside of the polishing pan or on top of the polishing plate. This represents a simple but effective releasable attachment.
  • centering and indexing means may be provided laterally form-fitting form-fitting engagement parts forming centering and indexing means and preferably comprise a centering hub and index pins to centering and indexing the
  • polishing pan made of a plastic material with a
  • the carrier material may be a polishing cloth.
  • the polishing pan has a circumferential sidewall with a groove extending over the bottom wall of the polishing pan in height according to the thickness of the carrier material and receiving a rubbery elastic ring, which presses the carrier material at the bottom of the polishing pan and thus prevents polishing agent suspension under the carrier material device.
  • the polishing trough is designed as a container for the polishing cloth and polish suspension and is sealed with a lid and equipped with a carrying handle to be deposited as a container or closed vessel on the polishing plate or to be lifted from the polishing plate can.
  • a variety of polishing pans or containers may be available, which can be easily changed on the polishing machine and their specification easily made recognizable by inscriptions are.
  • the polishing troughs or containers are expediently designed to be stackable. In the polishing work to be performed, different polishing pans or containers having different degrees of grain size of the polishing agent can be successively applied without causing complications in the processing of the samples to be polished.
  • the samples can namely be cleaned between the individual processing steps to
  • the containers are easy to clean.
  • the vibrating plate is fixed to the polishing plate by screwing.
  • the base part and the Schmidtschwingteil are annular or disc-shaped and connected via first leaf springs.
  • Leaf springs extend in accordance with radial helical surfaces around the central axis of the device and guide the torsional vibration movements of the counter-oscillating part relative to the base part.
  • the vibration plate of the vibration drive is connected to the base part via second leaf springs, which extend like the first leaf springs according to radial fferchtllitis about the central axis of the device.
  • An electric motor drive is between
  • Vibrating plate to produce in operation counter-rotating oscillatory torsional vibration movements between this counter-vibration member and the vibrating plate by the electromagnet is turned on and off, the magnet armature can relax or relax the leaf springs.
  • the vibration plate lifts off a little from the Jacobschwingteil when the leaf springs are tensioned by the drive, and when the drive is briefly turned off, the vibrating plate moves back to the
  • the vibration drive with base part, counter-oscillating part and vibration plate, which are connected in pairs via the first and the second leaf springs, allow a vibrational force compensation, in which little vibration energy is radiated into the environment, compared with an imbalance drive, as is the case with previous vibrating polishers.
  • FIG. 5 is a perspective view from above of a polishing pan
  • FIG. 6 is a perspective view from below of a polishing pan
  • FIG. 7 is a perspective view from above of a polishing Wannedeckel
  • FIG. 8 is a perspective view of a vibratory drive with attached polishing pan from below
  • FIG. 10 is an overall perspective view of a vibration polishing apparatus.
  • the main parts of the vibration polishing apparatus are a vibration drive 1, a polishing plate 2 and a polishing pan 3.
  • the device also comprises a control part 4 and a
  • the electromotive vibration drive 1 (FIG. 4) comprises an annular or disc-shaped base part 11, an annular or disc-shaped counter-oscillating part 12, a vibrating plate 13 and an electromotive drive with a first drive part 14 and a second drive part 15.
  • the base part 11 is connected to the counter-oscillating part 12 connected via first leaf springs 16. Furthermore, the base part 11 via second leaf springs 17 with the
  • Vibrating plate 13 connected.
  • the leaf springs 16 and 17 each form three spring packs which are arranged distributed around the circumference of the device.
  • the vibratory drive 1 can be associated with a central axis or axis of symmetry 10, to which the leaf springs 16 and 17, like gangways of a multi-start, very steep screw, form spiral helical surfaces which extend radially extend to the central axis 10 and occupy an inclination angle to the central axis 10 of 18 °.
  • the structure of the vibration actuator 1 is described in detail in DE 10 2004 034 481 B4 or US 7 143 891 B2, to which reference is hereby made and which are hereby incorporated by reference into the subject of the present disclosure.
  • the polishing plate 2 with the vibratory drive 1 is fixed, namely screwed to the vibrating plate 13 at 24 and indexed at 25.
  • the polishing plate 2 On its upper side, the polishing plate 2 as a first ferromagnetic layer a
  • Magnetic plate or a magnetic sheet 21 (Fig. 3), which is attached to the top of the polishing plate 2, glued in this example.
  • Head bolts 23, which engage in engagement holes 33 of the polishing pan 3, can be regarded as form-fitting engagement parts of a quick coupling.
  • the polishing pan 3 preferably made of plastic, is coupled to the polishing plate 2 for entrainment and has for this purpose on its underside a magnetic foil plate or sheet steel plate 31 as a second ferromagnetic layer and can be glued to the underside of the polishing pan 3.
  • a magnetic foil plate or sheet steel plate 31 as a second ferromagnetic layer and can be glued to the underside of the polishing pan 3.
  • polishing pan 3 is taken in the oscillating oscillation of the polishing plate 2.
  • the polishing plate 2 is fixed by means of a central screw 24 and a centering disc 22 on the upper side of the vibrating plate 13 and is arranged by eccentrically
  • the centering disc 22 engages in a central recess 32 in the bottom wall of the polishing pan 3 to center the polishing pan 3.
  • the head bolts 23 engage in corresponding bottom recesses 33 of the polishing pan 3, to a positive engagement against relative rotation between the vibration drive 1 and the polishing plate 2 and the polishing pan
  • the polishing pan 3 is shown in perspective in Figures 5 and 6 and shows the
  • the polishing pan 3 has a
  • the side wall 34 has a circumferential keyway 36, below which there is a receiving space for a polishing cloth 6 (FIG. 3).
  • the edge of the polishing cloth 6 is clamped by a rubber-elastic ring 37 which engages in the keyway 36 and the edge of the polishing cloth 6 down holds.
  • Finger openings 38 on the side wall 34 facilitate the removal of the elastic ring 37 from the groove 36 and thus the change of the polishing cloth 6, which is provided on its underside with magnetized, ferromagnetic means to lie well and adhere. It is preferred to manufacture the polishing pan of a plastic material.
  • the polishing cloth 6 is a substrate to which a polishing agent suspension is applied.
  • the polishing trough 3 can be closed with a lockable lid 7 (FIGS. 6, 7), so that a closable container for the polishing cloth and the polishing agent suspension is produced.
  • the lid 7 has projections 72 and 73 which fit into the bottom recesses 32 and 33 of the polishing trough, so that closed polishing troughs 3 (FIGS. 6, 7) can be stacked one above the other. It is envisaged to provide a number of such polishing troughs (FIGS. 6, 7) for a vibratory polishing machine, which includes polishing agent suspensions
  • the vibratory polishing device as a fine grinding device for samples to be polished and then as a final polishing device.
  • Polishing tub 3 an edge gap 29, in which a tool can engage to lift the polishing pan 3 gently from the polishing plate 2.
  • the gentle lifting can be mechanized by e.g. a handle with cams at the front end into the gap 29 engages (not shown), wherein by turning the tool, the cam extends the gap 29 and thus gently lifts the polishing pan 3 against the magnetic adhesion force from the polishing plate 2. It is also sufficient to gently lift the polishing pan by the handles 35.
  • the vibration drive 1, the polishing plate 2 and the polishing pan 3 form a first unit, which is arranged in the protective housing 5 next to the control part 4 as a second unit.
  • the protective housing 5 has a total of a wedge-shaped shape with truncated wedge tip 51, within which the control part 4 is housed.
  • the top of the protective housing 5 in the region of the truncated wedge tip 51 is as
  • Operation panel designed and may have a touch screen 52.
  • a housing cover 53 serves to cover the vibrating polishing device.
  • Fig. 8 shows the vibration drive 1 with attached polishing trough 3 and with an acceleration sensor 18, which is to measure the accelerations between the polishing plate 2 and polishing pan 3 and to be able to form acceleration signals. These signals will be returned to the control part 4 to regulate intervene in the vibration drive supplied voltage, current and pulsing.
  • FIG. 9 shows a sectional view through a sample 8 and a sample holder, with which the sample 8 can be clamped to fit with the underside 8 on the polishing cloth 6.
  • the operation of the vibration polisher is as follows.
  • a plurality of samples 8 to be polished are prepared for the polishing process. This means in most cases that the samples are positioned in sample holders 9 so that the surface 81 to be polished protrudes from the sample holder.
  • the controller 4 is turned on to output electric currents of predetermined frequency and intensity to set the vibratory drive 1 in motion.
  • the vibrations generated on the vibrating plate 13 are oscillating and cause the samples 8 located on the polishing trough to be polished and bumped in bouncing movement and thereby being driven circumferentially in the polishing trough 3.
  • the first or second drive member 14, 15 move relative to each other and thus the counter-vibration member 12 to the vibrating plate 13, whereby the leaf springs 16 and 17 are tensioned, and when the voltage pulse decreases, the leaf springs 16 and 17, the device parts to their original position back.
  • the polishing plate 2 is fixedly connected to the vibration plate 13 and thus makes their movements. However, this also applies to the polishing trough 3, since it is taken along mechanically and / or magnetically.
  • the index pins 25 prevent unwanted rotational movement of the polishing pan 3 to the polishing plate. 2
  • Movements can be overlaid. There may be provided two first drive parts and two second drive parts whose generated movements are superimposed in order to favor the circulation of the samples to be polished in the pot-shaped polishing trough. With three first and second drive parts an even more favorable result can be achieved.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

L'invention concerne un appareil de polissage par vibration comprenant : un organe d'entraînement vibratoire (1) destiné à produire une oscillation afin de polir des échantillons, un disque de polissage (2) raccordé à l'organe d'entraînement vibratoire (1) et pouvant être entraîné par ce dernier, et une cuve de polissage (3) destinée à recevoir un moyen de polissage et les échantillons à polir et accouplée au disque de polissage (2) de façon à être entraînée par ce dernier. L'organe d'entraînement par vibration (1) est pourvu d'un élément de base (11), d'un élément de contre-oscillation (12), d'une plaque vibratoire et d'éléments d'entraînement (14, 15) pour entraîner de manière oscillante l'élément de contre-oscillation (12) et la plaque vibratoire (13) à l'encontre de la force de ressorts à lames (16, 17).
EP17762110.9A 2016-09-06 2017-09-05 Dispositif de polissage par vibration Active EP3509792B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016116676.6A DE102016116676A1 (de) 2016-09-06 2016-09-06 Vibrationspoliergerät
PCT/EP2017/072199 WO2018046480A2 (fr) 2016-09-06 2017-09-05 Dispositif de polissage par vibration

Publications (2)

Publication Number Publication Date
EP3509792A2 true EP3509792A2 (fr) 2019-07-17
EP3509792B1 EP3509792B1 (fr) 2021-07-14

Family

ID=59799374

Family Applications (1)

Application Number Title Priority Date Filing Date
EP17762110.9A Active EP3509792B1 (fr) 2016-09-06 2017-09-05 Dispositif de polissage par vibration

Country Status (8)

Country Link
US (1) US11407080B2 (fr)
EP (1) EP3509792B1 (fr)
JP (1) JP6744498B2 (fr)
CN (1) CN109689292B (fr)
DE (1) DE102016116676A1 (fr)
DK (1) DK3509792T3 (fr)
ES (1) ES2886092T3 (fr)
WO (1) WO2018046480A2 (fr)

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1171303B (de) 1957-08-17 1964-05-27 Struers Chemiske Lab H Vorrichtung zum Nassschleifen metallo-graphischer Probestuecke
US3137977A (en) 1963-01-24 1964-06-23 Buehler Ltd Polishing method and apparatus
GB1018759A (en) 1964-06-11 1966-02-02 Joachim Anton Besuch Improvements in or relating to vibrational devices for the surface working of small components
JPS4814689Y1 (fr) 1968-01-21 1973-04-23
US3552593A (en) * 1969-05-29 1971-01-05 Alexander Szopo Nestable container
US3978622A (en) * 1975-07-23 1976-09-07 Solid State Measurements, Inc. Lapping and polishing apparatus
JPS58202764A (ja) 1982-05-21 1983-11-26 Tipton Mfg Corp 振動バレル加工機の振動制御方法および装置
US4916865A (en) * 1985-04-05 1990-04-17 Carrier Vibrating Equipment, Inc. Apparatus for surface treating a workpiece
US4991360A (en) * 1988-07-25 1991-02-12 Carrier Vibrating Equipment, Inc. Method and apparatus for surface treating a workpiece
US5109633A (en) * 1990-08-09 1992-05-05 Carrier Vibrating Equipment, Inc. Workpeice tumbling and conveying apparatus
DE102004034482A1 (de) 2004-07-15 2006-02-16 Feintool International Holding Vibrationswendelförderer
DE102004034481B4 (de) 2004-07-15 2006-08-31 Feintool International Holding Antriebseinheit für einen Vibrationswendelförderer
GB2421015A (en) * 2004-12-11 2006-06-14 Reckitt Benckiser Nv A stackable container
DE102009044234A1 (de) * 2009-10-12 2011-05-12 Walther Trowal Gmbh & Co. Kg Vorrichtung und Verfahren zur Oberflächenbearbeitung von Werkstücken
JP5123997B2 (ja) 2010-07-20 2013-01-23 新菱冷熱工業株式会社 空調制御システム及びそのプログラム
EP2638992B1 (fr) * 2012-03-13 2019-10-02 Hyperion Materials & Technologies (Sweden) AB Procédé de durissement de surface
CN104690634B (zh) * 2015-03-23 2017-03-08 黄尚进 一种振动研磨抛光机

Also Published As

Publication number Publication date
US20210276142A1 (en) 2021-09-09
ES2886092T3 (es) 2021-12-16
DK3509792T3 (da) 2021-10-18
CN109689292B (zh) 2021-10-22
EP3509792B1 (fr) 2021-07-14
CN109689292A (zh) 2019-04-26
US11407080B2 (en) 2022-08-09
DE102016116676A1 (de) 2018-03-08
WO2018046480A3 (fr) 2018-05-24
WO2018046480A2 (fr) 2018-03-15
JP2019529148A (ja) 2019-10-17
JP6744498B2 (ja) 2020-08-19

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