EP3509792A2

EP3509792A2 - Vibration polishing device

Info

Publication number: EP3509792A2
Application number: EP17762110.9A
Authority: EP
Inventors: Michael Kley; Matthias Höfer
Original assignee: Atm GmbH
Current assignee: Atm Qness GmbH
Priority date: 2016-09-06
Filing date: 2017-09-05
Publication date: 2019-07-17
Anticipated expiration: 2037-09-05
Also published as: ES2886092T3; US11407080B2; WO2018046480A2; EP3509792B1; DK3509792T3; DE102016116676A1; JP2019529148A; US20210276142A1; CN109689292B; JP6744498B2; CN109689292A; WO2018046480A3

Abstract

The invention relates to a vibration polishing device comprising: a vibration drive (1) for generating an oscillating vibration for polishing samples, a polishing disc (2) which is connected to the vibration drive (1) and can be driven thereby, and a polishing tray (3) which is designed to receive a polishing medium and the samples which are to be polished, and is coupled to the polishing disc (2) to be driven therewith. The vibration drive (1) comprises a base part (11), a counter-oscillating part (12), a vibration plate and drive parts (14, 15), in order to drive in an oscillating manner, the counter-oscillating part (12) and the vibration plate (13) counter to the force of the blade springs (16, 17).

Description

Vibration polisher

description

Field of the invention

The invention relates to a vibration polishing apparatus for generating an oscillating vibration for a circulating conveying movement of samples to be polished, a polishing plate which is fixedly connected to the vibration drive and can be driven by this, and a polishing trough, which is for receiving a polishing medium and to be polished Samples is formed and coupled to the polishing plate for driving.

Background and general description of the invention

Such a vibration polishing apparatus has become known from US 3,137,977 and comprises a revolving motor which drives eccentric weights and thereby vibrates the housing thereof. The housing is connected to a drive plate which is permanently connected via rubber-elastic elements with a trough-like component, which is supported via a base housing to a table top or the like. A vibration plate is not disassembled integrated in the device and can be brought over a handle for frictional engagement with the drive plate to be taken in their vibrations. The vibrating plate is provided with a polishing or polishing cloth and has an annular rim so that it can be considered as a polishing pan. The samples to be polished are inserted into the polishing trough by means of a sample holder and are subject to orbital motion during operation as a result of the vibration caused by the imbalance drive

Rotation. However, such an imbalance drive gives off strong harmful vibrations to the supporting environment of the vibrating polisher. Furthermore, the exchange of the

Polishing plate, which forms a polishing trough, only cumbersome and time-consuming by disassembly of the device possible.

The invention has for its object to provide a vibration polishing, in which little or no harmful vibrations are delivered to the supporting environment of the device.

Another aspect of the invention is to design a polishing trough, which is designed to receive a polishing medium and the samples to be polished, so that the Polished tub simply removed from the vibratory polisher and can be easily replaced with another polishing pan, possibly with other polishing medium.

The object of the invention is solved by the subject matter of the independent claims. Advantageous developments of the invention are defined in the subclaims.

In particular, there is a vibration drive for generating an oscillating

Oscillation for a circulating movement of samples to be polished, wherein the vibration drive as a unit drives an additional polishing plate with which it is firmly connected. On the polishing plate a polishing trough is coupled coupled for driving. The polishing pan is designed to receive a polishing medium and the samples to be polished. As usual, the samples to be polished can be used in sample holders.

The special feature is the use of a vibration drive with a fixed base part and two mutually driven equipment parts, which form a Gegenschwingteil and a vibration plate. The vibrating plate is fixedly connected to a polishing plate, and a polishing pan for receiving a polishing medium and the samples to be polished is detachably coupled to the polishing plate. The vibrating plate and associated with this or

Coupled device parts form inertial mass driven according to a direction of rotation, and the Gegenschwingteil with this connected device parts form another, driven in the other direction of rotation activity mass, so that the total mass center in the operation of the device in principle remains at a constant position and it does not cause vibration excitation to the fixed base part comes. As a result, an extraordinarily smooth running of the new vibration polishing apparatus is achieved, while in the prior art strong vibration vibrations are released to the environment.

The drive of the vibration plate and the Gegenschwingteils takes place against the force of leaf springs. With the inertial mass of the vibrating plate and connected or coupled with this device parts is a first vibration system, and with the inertial mass of the counter-oscillating part together with connected device parts is a second, counteracting

Oscillation system formed. Each of these vibration systems can show their own resonance frequencies. When resonant frequencies occur, the smooth running of the vibratory polishing device is disturbed. This disturbance can be detected by an acceleration sensor whose signals are fed back to a control part of the vibration polishing apparatus and processed there to come out of the disturbed operation. The oscillating vibration preferably results in a batchwise, obliquely upward tangential movement of the samples to be polished with respect to the sample circulation within the polishing pan, and thus in particular to hopping orbital conveyance of the samples to be polished within the polishing pan relative to the polishing medium, causing the samples to slide on the polishing medium and to polish the samples on their underside.

As a polishing medium, a polishing cloth and polishing agent in a suspension is preferable. Other polishing media are also useful, such as fine abrasive or fine abrasive and / or polishing paper.

For the purpose of coupling the polishing trough to the polishing plate, a magnetic adhesion of the polishing trough to the polishing plate is preferred, which achieves an easily detachable vertical or axial magnetic attachment of the polishing trough to the polishing plate.

A magnetic plate or magnetic film may be adhered to the top of the polishing pad or on the underside of the polishing pan. A sheet steel or magnetic sheet can be glued to the underside of the polishing pan or on top of the polishing plate. This represents a simple but effective releasable attachment.

In addition to the magnetic coupling may be provided laterally form-fitting form-fitting engagement parts forming centering and indexing means and preferably comprise a centering hub and index pins to centering and indexing the

Effect polishing pan.

It is preferred that the polishing pan made of a plastic material with a

To make carrier material for a separately handled polish on the bottom inside. The carrier material may be a polishing cloth. The polishing pan has a circumferential sidewall with a groove extending over the bottom wall of the polishing pan in height according to the thickness of the carrier material and receiving a rubbery elastic ring, which presses the carrier material at the bottom of the polishing pan and thus prevents polishing agent suspension under the carrier material device.

Advantageously, the polishing trough is designed as a container for the polishing cloth and polish suspension and is sealed with a lid and equipped with a carrying handle to be deposited as a container or closed vessel on the polishing plate or to be lifted from the polishing plate can. Thus, for a vibratory polishing machine, a variety of polishing pans or containers may be available, which can be easily changed on the polishing machine and their specification easily made recognizable by inscriptions are. The polishing troughs or containers are expediently designed to be stackable. In the polishing work to be performed, different polishing pans or containers having different degrees of grain size of the polishing agent can be successively applied without causing complications in the processing of the samples to be polished. The samples can namely be cleaned between the individual processing steps to

To avoid spreading of different grain size of the polishing medium between individual containers. Apart from that, the containers are easy to clean.

With regard to the construction of the vibration drive, the vibrating plate is fixed to the polishing plate by screwing. The base part and the Gegenschwingteil are annular or disc-shaped and connected via first leaf springs. These

Leaf springs extend in accordance with radial helical surfaces around the central axis of the device and guide the torsional vibration movements of the counter-oscillating part relative to the base part.

The vibration plate of the vibration drive is connected to the base part via second leaf springs, which extend like the first leaf springs according to radial Schraubwendelflächen about the central axis of the device. An electric motor drive is between

Gegenschwingteil and vibrating plate arranged and preferably comprises a magnetic coil or an electromagnet on the counter-oscillating part and a magnetic armature on the

Vibrating plate to produce in operation counter-rotating oscillatory torsional vibration movements between this counter-vibration member and the vibrating plate by the electromagnet is turned on and off, the magnet armature can relax or relax the leaf springs. In this case, the vibration plate lifts off a little from the Gegenschwingteil when the leaf springs are tensioned by the drive, and when the drive is briefly turned off, the vibrating plate moves back to the

Gegenschwingteil back. By a periodic switching on and off of the drive thus a rotational vibration movement of the vibrating plate can be generated to the counter-oscillating part.

The vibration drive with base part, counter-oscillating part and vibration plate, which are connected in pairs via the first and the second leaf springs, allow a vibrational force compensation, in which little vibration energy is radiated into the environment, compared with an imbalance drive, as is the case with previous vibrating polishers.

Since the inertial masses in the new vibration polishing oscillate opposite to each other, the center of mass remains at rest, so that the supporting forces on the Location of the vibratory polisher remain approximately constant and hardly any vibrations are emitted to the environment. Thus, an extraordinarily smooth running is achieved with the vibration polishing device according to the invention.

Brief description of the figures

In the following an embodiment will be described with reference to the drawings. Showing:

1 is a schematic longitudinal section through a vibration polishing,

2 shows a schematic cross section through the vibration device,

3 is an enlarged detail of Figure 2,

4 shows a vibration drive in side view, partially in section,

5 is a perspective view from above of a polishing pan,

6 is a perspective view from below of a polishing pan,

7 is a perspective view from above of a polishing Wannedeckel,

8 is a perspective view of a vibratory drive with attached polishing pan from below,

9 is a sectional view of a sample holder, and

10 is an overall perspective view of a vibration polishing apparatus.

Detailed Description of the Embodiments

The main parts of the vibration polishing apparatus are a vibration drive 1, a polishing plate 2 and a polishing pan 3. In addition, the device also comprises a control part 4 and a

Protective housing 5.

The electromotive vibration drive 1 (FIG. 4) comprises an annular or disc-shaped base part 11, an annular or disc-shaped counter-oscillating part 12, a vibrating plate 13 and an electromotive drive with a first drive part 14 and a second drive part 15. The base part 11 is connected to the counter-oscillating part 12 connected via first leaf springs 16. Furthermore, the base part 11 via second leaf springs 17 with the

Vibrating plate 13 connected. The leaf springs 16 and 17 each form three spring packs which are arranged distributed around the circumference of the device. The vibratory drive 1 can be associated with a central axis or axis of symmetry 10, to which the leaf springs 16 and 17, like gangways of a multi-start, very steep screw, form spiral helical surfaces which extend radially extend to the central axis 10 and occupy an inclination angle to the central axis 10 of 18 °. The structure of the vibration actuator 1 is described in detail in DE 10 2004 034 481 B4 or US 7 143 891 B2, to which reference is hereby made and which are hereby incorporated by reference into the subject of the present disclosure.

As shown in Figures 1 and 2, the polishing plate 2 with the vibratory drive 1 is fixed, namely screwed to the vibrating plate 13 at 24 and indexed at 25. On its upper side, the polishing plate 2 as a first ferromagnetic layer a

Magnetic plate or a magnetic sheet 21 (Fig. 3), which is attached to the top of the polishing plate 2, glued in this example. Head bolts 23, which engage in engagement holes 33 of the polishing pan 3, can be regarded as form-fitting engagement parts of a quick coupling.

The polishing pan 3, preferably made of plastic, is coupled to the polishing plate 2 for entrainment and has for this purpose on its underside a magnetic foil plate or sheet steel plate 31 as a second ferromagnetic layer and can be glued to the underside of the polishing pan 3. When the polishing pan 3 has been placed on the polishing plate 2, the ferromagnetic layers for coupling the polishing pan 3 with the polishing plate act

2 together, whereby the polishing pan 3 is taken in the oscillating oscillation of the polishing plate 2.

The polishing plate 2 is fixed by means of a central screw 24 and a centering disc 22 on the upper side of the vibrating plate 13 and is arranged by eccentrically

Index pins 25 indexed.

The centering disc 22 engages in a central recess 32 in the bottom wall of the polishing pan 3 to center the polishing pan 3. Likewise, the head bolts 23 engage in corresponding bottom recesses 33 of the polishing pan 3, to a positive engagement against relative rotation between the vibration drive 1 and the polishing plate 2 and the polishing pan

3 to give.

The polishing pan 3 is shown in perspective in Figures 5 and 6 and shows the

Sheet steel washer 31 at the bottom of the bottom wall. The polishing pan 3 has a

Side wall 34 with attached carrying handle 35. As can be seen in FIGS. 3 and 5, the side wall 34 has a circumferential keyway 36, below which there is a receiving space for a polishing cloth 6 (FIG. 3). The edge of the polishing cloth 6 is clamped by a rubber-elastic ring 37 which engages in the keyway 36 and the edge of the polishing cloth 6 down holds. Finger openings 38 on the side wall 34 facilitate the removal of the elastic ring 37 from the groove 36 and thus the change of the polishing cloth 6, which is provided on its underside with magnetized, ferromagnetic means to lie well and adhere. It is preferred to manufacture the polishing pan of a plastic material. The polishing cloth 6 is a substrate to which a polishing agent suspension is applied.

The polishing trough 3 can be closed with a lockable lid 7 (FIGS. 6, 7), so that a closable container for the polishing cloth and the polishing agent suspension is produced. The lid 7 has projections 72 and 73 which fit into the bottom recesses 32 and 33 of the polishing trough, so that closed polishing troughs 3 (FIGS. 6, 7) can be stacked one above the other. It is envisaged to provide a number of such polishing troughs (FIGS. 6, 7) for a vibratory polishing machine, which includes polishing agent suspensions

different grit can take. In this way it is possible to do that

First use the vibratory polishing device as a fine grinding device for samples to be polished and then as a final polishing device.

As best seen in Figure 3, located between the polishing plate 2 and the

Polishing tub 3, an edge gap 29, in which a tool can engage to lift the polishing pan 3 gently from the polishing plate 2. The gentle lifting can be mechanized by e.g. a handle with cams at the front end into the gap 29 engages (not shown), wherein by turning the tool, the cam extends the gap 29 and thus gently lifts the polishing pan 3 against the magnetic adhesion force from the polishing plate 2. It is also sufficient to gently lift the polishing pan by the handles 35.

As shown in Figure 1, the vibration drive 1, the polishing plate 2 and the polishing pan 3 form a first unit, which is arranged in the protective housing 5 next to the control part 4 as a second unit. The protective housing 5 has a total of a wedge-shaped shape with truncated wedge tip 51, within which the control part 4 is housed. The top of the protective housing 5 in the region of the truncated wedge tip 51 is as

Operation panel designed and may have a touch screen 52. A housing cover 53 serves to cover the vibrating polishing device.

Fig. 8 shows the vibration drive 1 with attached polishing trough 3 and with an acceleration sensor 18, which is to measure the accelerations between the polishing plate 2 and polishing pan 3 and to be able to form acceleration signals. These signals will be returned to the control part 4 to regulate intervene in the vibration drive supplied voltage, current and pulsing.

FIG. 9 shows a sectional view through a sample 8 and a sample holder, with which the sample 8 can be clamped to fit with the underside 8 on the polishing cloth 6.

The operation of the vibration polisher is as follows.

First, a plurality of samples 8 to be polished are prepared for the polishing process. This means in most cases that the samples are positioned in sample holders 9 so that the surface 81 to be polished protrudes from the sample holder.

The controller 4 is turned on to output electric currents of predetermined frequency and intensity to set the vibratory drive 1 in motion. The vibrations generated on the vibrating plate 13 are oscillating and cause the samples 8 located on the polishing trough to be polished and bumped in bouncing movement and thereby being driven circumferentially in the polishing trough 3. At each

Surge, the first or second drive member 14, 15 move relative to each other and thus the counter-vibration member 12 to the vibrating plate 13, whereby the leaf springs 16 and 17 are tensioned, and when the voltage pulse decreases, the leaf springs 16 and 17, the device parts to their original position back. The polishing plate 2 is fixedly connected to the vibration plate 13 and thus makes their movements. However, this also applies to the polishing trough 3, since it is taken along mechanically and / or magnetically. The index pins 25 prevent unwanted rotational movement of the polishing pan 3 to the polishing plate. 2

The described embodiment is to be evaluated by way of example. There are many variations possible. Movements can be overlaid. There may be provided two first drive parts and two second drive parts whose generated movements are superimposed in order to favor the circulation of the samples to be polished in the pot-shaped polishing trough. With three first and second drive parts an even more favorable result can be achieved.

It will be apparent to those skilled in the art that the features, whether disclosed in the specification, claims, figures or otherwise, also individually define essential components of the invention, even if described together with other features.

Claims

claims

A vibration polishing apparatus comprising:

a vibration drive (1) having a base part (11), a counter-oscillating part (12), a vibration plate (13), a first drive part (14) and a second drive part (15), wherein the base part (11) and the counter-oscillating part (12) are connected via first leaf springs (16), the main planes of which are grouped according to radial helical surfaces about a central axis (10),

the base part (11) and the vibration plate (13) being connected by second leaf springs (17) whose main planes are grouped around the central axis (10) in accordance with helical spiral surfaces, and

wherein the first drive part (14) is supported on the counter-oscillating part (12) and the second drive part (15) is supported on the vibrating plate (13) to oscillate in opposite directions during operation of the vibratory drive (1)

Torsional vibration movements between the counter-vibration part (12) and

To produce vibration plate (13)

further comprising:

a polishing plate (2) which is fixedly connected to the vibration drive (1), and a polishing trough (3), which is designed to receive a polishing medium and the samples to be polished (8) and is coupled to the polishing plate (2).

2. The vibration polishing apparatus according to claim 1, further comprising:

a control part (4) for supplying power to the first and second drive parts in terms of voltage, current and pulse formation, and

- An acceleration sensor (18) occurring during operation of the device

Measures accelerations on the Gegenschwingteil (12) and on the vibration plate (13) and thus also to the polishing plate (2) and the polishing pan (3) and from it

Acceleration signals forms, which are returned to the control part (4).

3. vibration polishing apparatus according to claim 1 or 2,

wherein the polishing medium comprises a carrier material and polishing agent.

4. vibration polishing apparatus according to claim 3,

wherein the carrier material is a polishing cloth (6) and the polishing agent is present in a polishing agent suspension.

5. vibration polishing apparatus according to any one of claims 1 to 4,

wherein the polishing pan (3) is detachably coupled to the polishing plate (2).

6. vibration polishing apparatus according to claim 5,

wherein the removable coupling of the polishing trough (3) on the polishing plate (2) takes place by means of magnetic holding force.

7. vibration polishing apparatus according to claim 6,

wherein ferromagnetic layers or parts are mounted on top of the polishing pad (2) and the underside of the polishing pan (3).

8. vibration polishing apparatus according to any one of claims 5 - 7,

wherein the polishing trough (3) is designed as a plastic container for the carrier material and polishing agent suspension and can be closed with a cover (7) and has a carrying handle (35) to be deposited as a closed vessel on the polishing plate (2) or of the polishing plate ( 2) to be lifted.

9. vibration polishing apparatus according to claim 8,

wherein closed vessels are stackable on each other.

10. vibration polishing apparatus according to claim 9,

wherein the polishing trough (3) at its bottom a central recess (32) and the lid (7) on its upper side a central elevation (72), so that stacked vessels with their respective central recess (32) on the respective underlying Survey (72) are pluggable.

11. vibration polishing apparatus according to any one of claims 1 to 10, wherein centering and / or indexing means (22, 32, 23, 33) are arranged between the polishing plate (2) and the polishing trough (3).

12. vibration polishing apparatus according to any one of claims 1 - 11,

the polishing pan (3) having a bottom wall with a polishing medium receiving space and a peripheral side wall (34) with a keyway (36) for receiving a rubbery ring (37) arranged to clamp the edge of a polishing cloth (6) Part of the polishing medium forms.