EP3509792B1 - Vibration polishing device - Google Patents

Vibration polishing device Download PDF

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Publication number
EP3509792B1
EP3509792B1 EP17762110.9A EP17762110A EP3509792B1 EP 3509792 B1 EP3509792 B1 EP 3509792B1 EP 17762110 A EP17762110 A EP 17762110A EP 3509792 B1 EP3509792 B1 EP 3509792B1
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EP
European Patent Office
Prior art keywords
polishing
vibration
drive
bowl
plate
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EP17762110.9A
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German (de)
French (fr)
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EP3509792A2 (en
Inventor
Michael Kley
Matthias Höfer
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Atm Qness GmbH
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ATM Qness GmbH
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/102Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/06Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving oscillating or vibrating containers
    • B24B31/073Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving oscillating or vibrating containers involving a bowl being ring- or spiral-shaped
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/06Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving oscillating or vibrating containers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/12Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/10Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Definitions

  • the invention relates to a vibration polishing device for generating an oscillating vibration for a revolving conveying movement of samples to be polished, a polishing plate which is firmly connected to the vibration drive and can be driven by it, and a polishing tub which is used to hold a polishing medium and the polishing medium to be polished Samples is formed and is coupled to the polishing plate for taking along.
  • Such a vibratory polisher is by the U.S. 3,137,977 has become known and comprises a rotating motor which drives eccentric weights and which causes the housing to vibrate.
  • the housing is connected to a drive plate which is permanently connected to a trough-like component via rubber-elastic elements, which is supported on a table top or the like via a base housing.
  • a vibration plate is integrated in the device in such a way that it cannot be dismantled and can be brought into frictional engagement with the drive plate via a handle in order to be carried along in its vibrations.
  • the vibrating plate is provided with a polishing agent or polishing cloth and has an annular rim so that it can be viewed as a polishing tub.
  • the specimens to be polished are inserted into the polishing tub using specimen holders and are subject to an orbital movement and a rotary movement at the same time as a result of the vibrations caused by the unbalance drive.
  • an unbalance drive emits strong, harmful vibrations to the supporting environment of the vibration polishing device.
  • the exchange of the polishing plate, which forms a polishing bath is only possible in a laborious and time-consuming manner by dismantling the device.
  • the DE 10 2009 044234 A1 a device for surface processing with a working container for receiving workpieces to be processed and auxiliary material for surface processing and a vibratory drive device.
  • the working container can be placed on a plate-shaped electromagnet so that, when the electromagnet is activated, an attractive force is exerted on the working container in order to couple the working container to the oscillating drive device in a vibration-proof manner.
  • U.S. 3,978,622 A a device for grinding workpieces, wherein the workpiece is arranged on an abrasive material in a polishing bowl, which in turn is carried by a carrier plate which is set in eccentric rotational movement.
  • the invention is based on the object of creating a vibration polishing device in which little or no harmful vibrations are given off to the supporting surroundings of the device.
  • a further aspect of the invention consists in designing a polishing trough, which is designed to hold a polishing medium and the samples to be polished, so that the polishing trough is simply removed from the vibration polishing device and simply exchanged for another polishing trough, possibly with a different polishing medium can.
  • vibration drive for generating an oscillating vibration for an orbital movement of samples to be polished
  • the vibration drive as a unit driving an additional polishing plate to which it is firmly connected.
  • a polishing tub is attached to the polishing plate and is coupled to take with you.
  • the polishing trough is designed to hold a polishing medium and the samples to be polished.
  • the samples to be polished can be inserted in sample holders.
  • the special feature is the use of a vibration drive with a fixed base part and two device parts driven against each other, which form a counter-oscillating part and a vibration plate.
  • the vibration plate is firmly connected to a polishing plate, and a polishing trough for receiving a polishing medium and the samples to be polished is detachably coupled to the polishing plate.
  • the vibration plate and the device parts connected or coupled to it form inertia mass driven in one direction of rotation, and the counter-vibrating part with this Connected device parts form a further activity mass driven in the other direction of rotation, so that the total center of gravity in principle remains at a constant point during operation of the device and there is no excitation of vibrations on the fixed base part.
  • the new vibration polishing device runs extremely smoothly, while the state of the art emits strong vibrations into the environment.
  • the vibration plate and the counter-vibrating part are driven against the force of leaf springs.
  • a first vibration system With the inertia mass of the vibration plate and the associated or Coupled device parts is a first vibration system, and with the inertial mass of the counter-vibrating part together with connected device parts, a second, counteracting vibration system is formed.
  • Each of these oscillation systems can show its own resonance frequencies. If resonance frequencies occur, the smooth running of the vibration polishing device is disturbed. This disturbance can be detected by an acceleration sensor, the signals of which are fed back to a control part of the vibration polishing device and processed there in order to get out of the disturbed operation.
  • the oscillating oscillation preferably leads to an intermittent, inclined upwardly directed tangential movement of the samples to be polished with respect to the sample circulation within the polishing tank and thus in particular to the hopping circulation of the samples to be polished within the polishing tank relative to the polishing medium, which leads to the samples slipping on the polishing medium and leads to polishing of the samples on their underside.
  • polishing cloth and polishing agent in a suspension are preferred as the polishing medium.
  • Other polishing media can also be used, for example fine abrasive or fine abrasive and / or polishing paper.
  • magnetic adhesion of the polishing tub to the polishing plate is preferred, which achieves an easily detachable vertical or axial magnetic attachment of the polishing tub to the polishing plate.
  • a magnetic plate or magnetic foil can be glued to the top of the polishing plate or to the underside of the polishing tub.
  • a sheet steel disk or magnetic film disk can be glued to the underside of the polishing bath or to the top of the polishing plate. This is a simple but effective detachable type of attachment.
  • form-locking engagement parts which act laterally in a form-locking manner can also be provided, which form centering and indexing means and preferably comprise a centering hub and index pins in order to center and index the polishing bath.
  • the polishing trough from a plastic material with a carrier material for a separately handleable polishing agent on the inside of the floor.
  • the carrier material can be a polishing cloth.
  • the polishing trough has a circumferential side wall with a groove which extends above the bottom wall of the polishing trough at a height according to the thickness of the carrier material and which receives a rubber-elastic ring that holds the carrier material on Firmly presses the bottom of the polishing tub and thus prevents the polishing agent suspension from getting under the carrier material.
  • the polishing tub is advantageously designed as a container for the polishing cloth and polishing agent suspension and can be tightly closed with a lid and is equipped with a handle so that it can be placed on the polishing plate as a container or closed vessel or lifted off the polishing plate.
  • a large number of polishing tubs or containers can thus be available for a vibration polishing device, which can be easily changed on the polishing device and whose specifications are made easily recognizable by means of labels.
  • the polishing tubs or containers are expediently designed to be stackable.
  • different polishing tubs or containers with different degrees of grain size of the polishing agent can be used one after the other without this leading to complications in the processing of the samples to be polished.
  • the samples can namely be cleaned between the individual processing steps in order to avoid carryover of different grain sizes of the polishing medium between individual containers. Apart from that, the containers are also easy to clean.
  • the vibration plate is fastened to the polishing plate by screwing.
  • the base part and the counter-oscillating part are ring-shaped or disk-shaped and connected via first leaf springs. These leaf springs extend according to radial helical helical surfaces around the central device axis and guide the torsional vibration movements of the counter-vibrating part relative to the base part.
  • the vibration plate of the vibration drive is connected to the base part via second leaf springs which, like the first leaf springs, extend around the central axis of the device according to radial helical surfaces.
  • An electromotive drive is arranged between the counter-vibrating part and the vibrating plate and preferably comprises a magnetic coil or an electromagnet on the counter-vibrating part and a magnet armature on the vibrating plate in order to generate opposing, oscillating rotary vibration movements between this counter-vibrating part and the vibrating plate during operation by turning the electromagnet on and off, whereby the magnet armature tensions or relaxes the leaf springs.
  • the vibration plate lifts a little from the counter-vibrating part when the leaf springs are tensioned by the drive, and when the drive is briefly switched off, the vibration plate moves back onto the Counter-oscillating part back.
  • a rotary oscillation movement of the vibration plate relative to the counter-oscillating part can be generated.
  • the vibration drive with base part, counter-vibrating part and vibration plate, which are connected to each other in pairs via the first and second leaf springs, enable vibration force compensation, in which little vibration energy is radiated into the environment, compared to an unbalance drive, as is the case with previous vibration polishing devices.
  • the main parts of the vibration polishing device are a vibration drive 1, a polishing plate 2 and a polishing bath 3.
  • the device also comprises a control part 4 and a protective housing 5.
  • the electromotive vibration drive 1 ( Fig. 4 ) comprises an annular or disk-shaped base part 11, an annular or disk-shaped counter-vibrating part 12, a vibration plate 13 and an electric motor drive with a first drive part 14 and a second drive part 15.
  • the base part 11 is connected to the counter-vibrating part 12 via first leaf springs 16. Furthermore, the base part 11 is connected to the vibration plate 13 via second leaf springs 17.
  • the leaf springs 16 and 17 each form three spring assemblies which are distributed around the circumference of the device.
  • a central or symmetry axis 10 can be assigned to the vibration drive 1, to which the leaf springs 16 and 17 form helical surfaces like threads of a multi-start, very steep screw, which extend radially to the central axis 10 and assume an angle of inclination to the central axis 10 of 18 °.
  • the structure of the vibration drive 1 is detailed in DE 10 2004 034 481 B4 or US 7 143 891 B2 described, to which reference is hereby made in this regard and which are hereby made the subject matter of the present disclosure by reference.
  • the polishing plate 2 is firmly connected to the vibration drive 1, namely screwed to the vibration plate 13 at 24 and indexed at 25.
  • the polishing plate 2 On its upper side, the polishing plate 2 has a magnetic plate or a magnetic film 21 as a first ferromagnetic layer ( Fig. 3 ), which is attached to the top of the polishing plate 2, is glued in this example.
  • Head bolts 23, which engage in engagement openings 33 of the polishing bath 3, can be viewed as form-fit engagement parts of a quick-release coupling.
  • the ferromagnetic layers interact to couple the polishing tub 3 with the polishing plate 2, whereby the polishing tub 3 is entrained in the oscillating vibration of the polishing plate 2.
  • the polishing plate 2 is fastened by means of a central screw 24 and a centering disk 22 on the upper side of the vibration plate 13 and is indexed by eccentrically arranged index pins 25.
  • the centering disk 22 engages in a central recess 32 in the bottom wall of the polishing bath 3 in order to center the polishing bath 3.
  • the head bolts 23 likewise engage in corresponding bottom recesses 33 of the polishing tub 3 in order to produce a form fit against relative rotation between the vibration drive 1 or the polishing plate 2 and the polishing tub 3.
  • the polishing tub 3 is in Figure 5 and 6th shown in perspective and shows the sheet steel disk 31 on the underside of the bottom wall.
  • the polishing tub 3 has a side wall 34 with a handle 35 attached to it. How out Figure 3 and 5 As can be seen, the side wall 34 has a circumferential keyway 36, under which there is a space for a polishing cloth 6 ( Figure 3 ) is located. The edge of the polishing cloth 6 is clamped by a rubber elastic ring 37 which engages in the keyway 36 and holds the edge of the polishing cloth 6 down.
  • Finger openings 38 on the side wall 34 facilitate the removal of the elastic ring 37 from the groove 36 and thus the change of the polishing cloth 6, which is provided on its underside with magnetized, ferromagnetic means in order to fit and adhere well. It is preferred to manufacture the polishing tub from a plastic material.
  • the polishing cloth 6 is a carrier material onto which a polishing agent suspension is applied.
  • the polishing bath 3 can be equipped with a lockable cover 7 ( Fig. 6 , 7th ) are closed, so that a closable container for the polishing cloth and the polishing agent suspension is created.
  • the cover 7 has projections 72 and 73 which fit into the base recesses 32 and 33 of the polishing tub, so that closed polishing tubs 3 ( Fig. 6 , 7th ) are stackable on top of each other.
  • a certain number of such polishing tanks ( Fig. 6 , 7th ) that can hold polishing agent suspensions with different grain sizes. In this way it is possible to use the vibration polishing device first as a fine grinding device for samples to be polished and then as a final polishing device.
  • edge gap 29 between the polishing plate 2 and the polishing pan 3, into which a tool can engage in order to gently lift the polishing pan 3 from the polishing plate 2.
  • the gentle lifting can be mechanized, for example, by engaging a handle with cams at the front end in the gap 29 (not shown), whereby by turning the tool the cam widens the gap 29 and thus the polishing bath 3 gently against the magnetic adhesive force of the polishing plate 2 takes off. It is also sufficient to gently lift the polishing tub by the handles 35.
  • the vibration drive 1, the polishing plate 2 and the polishing tub 3 form a first unit, which is in the protective housing 5 next to the control part 4 as the second Unit is arranged, the protective housing 5 overall has a wedge-shaped shape with truncated wedge tip 51, within which the control part 4 is housed.
  • the top of the protective housing 5 in the area of the truncated wedge tip 51 is designed as a control panel and can have a touchscreen 52.
  • a housing cover 53 is used to cover the vibration polisher,
  • Fig. 8 shows the vibration drive 1 with the polishing bath 3 attached and with an acceleration sensor 18 which is able to measure the accelerations between the polishing plate 2 and the polishing bath 3 and to generate acceleration signals therefrom. These signals are fed back to the control part 4 in order to intervene in a regulating manner in the voltage, current strength and pulse output supplied to the vibration drive.
  • Fig. 9 shows a sectional view through a sample 8 and a sample holder with which the sample 8 can be appropriately clamped in order to be placed with the underside 8 on the polishing cloth 6.
  • the operation of the vibratory polisher is as follows.
  • samples 8 to be polished are prepared for the polishing process. In most cases this means that the samples are positioned in sample holders 9 in such a way that the surface 81 to be polished protrudes from the sample holder.
  • the control device 4 is switched on for the delivery of electrical currents of predetermined frequency and strength in order to set the vibration drive 1 in motion.
  • the vibrations generated on the vibrating plate 13 are oscillating and cause the samples 8 located on the polishing bath and to be polished to start jumping in batches and thereby being driven in a rotating manner in the polishing bath 3.
  • the first or second drive part 14,15 move relative to one another and thus also the counter-oscillation part 12 to the vibration plate 13, whereby the leaf springs 16 and 17 are tensioned, and when the voltage pulse decreases, the leaf springs 16 and 17 lead the device parts in their original position back.
  • the polishing plate 2 is firmly connected to the vibration plate 13 and thus makes its movements with it. However, this also applies to the polishing bath 3, since it is taken along mechanically and / or magnetically.
  • the index pins 25 prevent an undesired rotary movement of the polishing bath 3 in relation to the polishing plate 2.

Description

Gebiet der ErfindungField of invention

Die Erfindung bezieht sich auf ein Vibrationspoliergerät zur Erzeugung einer oszillierenden Schwingung für eine umlaufende Förderbewegung von zu polierenden Proben, einen Polierteller, der mit dem Vibrationsantrieb fest verbunden ist und von diesem antreibbar ist, und eine Polierwanne, die zur Aufnahme eines Poliermediums sowie der zu polierenden Proben ausgebildet ist und mit dem Polierteller zur Mitnahme gekoppelt ist.The invention relates to a vibration polishing device for generating an oscillating vibration for a revolving conveying movement of samples to be polished, a polishing plate which is firmly connected to the vibration drive and can be driven by it, and a polishing tub which is used to hold a polishing medium and the polishing medium to be polished Samples is formed and is coupled to the polishing plate for taking along.

Hintergrund und allgemeine Beschreibung der ErfindungBackground and general description of the invention

Ein solches Vibrationspoliergerät ist durch die US 3,137,977 bekannt geworden und umfasst einen umlaufenden Motor, der exzentrische Gewichte antreibt und dessen Gehäuse dadurch in Schwingungen gerät. Das Gehäuse ist mit einer Antriebsplatte verbunden, die über gummielastische Elemente mit einem wannenartigen Bauteil dauerhaft verbunden ist, der über ein Basisgehäuse sich an einer Tischplatte oder dergleichen abstützt. Eine Vibrationsplatte ist an sich nicht demontierbar in dem Gerät integriert und kann über einen Griff zum Reibschluss mit der Antriebsplatte gebracht werden, um in deren Schwingungen mitgenommen zu werden. Die Vibrationsplatte ist mit einem Poliermittel oder Poliertuch versehen und weist einen ringförmigen Rand auf, so dass sie als eine Polierwanne angesehen werden kann. Die zu polierenden Proben werden mittels Probenhalter in die Polierwanne eingesetzt und unterliegen infolge der Vibrationen durch den Unwuchtantrieb im Betrieb einer Orbitalbewegung und gleichzeitig einer Drehbewegung. Ein solcher Unwuchtantrieb gibt jedoch starke schädliche Vibrationen an die abstützende Umgebung des Vibrationspoliergerätes ab. Ferner ist der Austausch des Poliertellers, der eine Polierwanne bildet, nur umständlich und zeitraubend durch Demontage des Gerätes möglich.Such a vibratory polisher is by the U.S. 3,137,977 has become known and comprises a rotating motor which drives eccentric weights and which causes the housing to vibrate. The housing is connected to a drive plate which is permanently connected to a trough-like component via rubber-elastic elements, which is supported on a table top or the like via a base housing. A vibration plate is integrated in the device in such a way that it cannot be dismantled and can be brought into frictional engagement with the drive plate via a handle in order to be carried along in its vibrations. The vibrating plate is provided with a polishing agent or polishing cloth and has an annular rim so that it can be viewed as a polishing tub. The specimens to be polished are inserted into the polishing tub using specimen holders and are subject to an orbital movement and a rotary movement at the same time as a result of the vibrations caused by the unbalance drive. However, such an unbalance drive emits strong, harmful vibrations to the supporting environment of the vibration polishing device. Furthermore, the exchange of the polishing plate, which forms a polishing bath, is only possible in a laborious and time-consuming manner by dismantling the device.

Ferner zeigt die DE 10 2009 044234 A1 eine Vorrichtung zur Oberflächenbearbeitung mit einem Arbeitsbehälter zur Aufnahme zu bearbeitender Werkstücke und von Hilfsmaterial für die Oberflächenbearbeitung und einer Schwingantriebseinrichtung. Der Arbeitsbehälter kann dabei auf einem plattenförmigen Elektromagneten abgestellt werden, so dass, wenn der Elektromagnet aktiviert ist, eine Anziehungskraft auf den Arbeitsbehälter ausgeübt wird, um den Arbeitsbehälter schwingungsfest mit der Schwingantriebseinrichtung zu koppeln.Furthermore, the DE 10 2009 044234 A1 a device for surface processing with a working container for receiving workpieces to be processed and auxiliary material for surface processing and a vibratory drive device. The working container can be placed on a plate-shaped electromagnet so that, when the electromagnet is activated, an attractive force is exerted on the working container in order to couple the working container to the oscillating drive device in a vibration-proof manner.

Ferner zeigt die US 3 978 622 A eine Vorrichtung zum Schleifen von Werkstücken, wobei das Werkstück auf einem Schleifmaterial in einer Polierschale angeordnet ist, welche wiederum von einer Trägerplatte getragen wird, welche in exzentrische Rotationsbewegung versetzt wird.Furthermore, the U.S. 3,978,622 A a device for grinding workpieces, wherein the workpiece is arranged on an abrasive material in a polishing bowl, which in turn is carried by a carrier plate which is set in eccentric rotational movement.

Der Erfindung liegt die Aufgabe zugrunde, ein Vibrationspoliergerät zu schaffen, bei dem wenig oder keine schädlichen Vibrationen an die abstützende Umgebung des Gerätes abgegeben werden.The invention is based on the object of creating a vibration polishing device in which little or no harmful vibrations are given off to the supporting surroundings of the device.

Ein weiterer Aspekt der Erfindung besteht darin, eine Polierwanne, die zur Aufnahme eines Poliermediums sowie der zu polierenden Proben ausgebildet ist, so zu gestalten, dass die Polierwanne einfach von dem Vibrationspoliergerät abgenommen und einfach gegen eine andere Polierwanne, gegebenenfalls mit anderem Poliermedium, ausgetauscht werden kann.A further aspect of the invention consists in designing a polishing trough, which is designed to hold a polishing medium and the samples to be polished, so that the polishing trough is simply removed from the vibration polishing device and simply exchanged for another polishing trough, possibly with a different polishing medium can.

Die Aufgabe der Erfindung wird durch den Gegenstand des unabhängigen Anspruchs 1 gelöst. Vorteilhafte Weiterbildungen der Erfindung sind in den Unteransprüchen definiert.The object of the invention is achieved by the subject matter of independent claim 1. Advantageous further developments of the invention are defined in the subclaims.

Im Einzelnen gibt es einen Vibrationsantrieb zur Erzeugung einer oszillierenden Schwingung für eine Umlaufbewegung von zu polierenden Proben, wobei der Vibrationsantrieb als eine Einheit einen zusätzlichen Polierteller, mit dem er fest verbunden ist, antreibt. Auf den Polierteller wird eine Polierwanne zur Mitnahme gekoppelt aufgesetzt. Die Polierwanne ist zur Aufnahme eines Poliermediums sowie der zu polierenden Proben ausgebildet. Wie üblich können die zu polierenden Proben in Probenhaltern eingesetzt sein.Specifically, there is a vibration drive for generating an oscillating vibration for an orbital movement of samples to be polished, the vibration drive as a unit driving an additional polishing plate to which it is firmly connected. A polishing tub is attached to the polishing plate and is coupled to take with you. The polishing trough is designed to hold a polishing medium and the samples to be polished. As usual, the samples to be polished can be inserted in sample holders.

Die Besonderheit liegt in dem Einsatz eines Vibrationsantriebes mit einem feststehendem Basisteil und zwei gegeneinander angetriebenen Geräteteilen, die ein Gegenschwingteil und eine Vibrationsplatte bilden. Die Vibrationsplatte ist mit einem Polierteller fest verbunden, und eine Polierwanne zur Aufnahme eines Poliermediums sowie der zu polierenden Proben ist abnehmbar an den Polierteller gekoppelt Die Vibrationsplatte und die mit dieser verbundenen bzw. gekoppelten Geräteteile bilden nach einer Drehrichtung angetriebene Trägheitsmasse, und das Gegenschwingteil mit diesem verbundene Geräteteile bilden eine weitere, in der anderen Drehrichtung angetriebene Tätigkeitsmasse, so dass der Gesamt-Masseschwerpunkt im Betrieb des Gerätes im Prinzip an konstanter Stelle bleibt und es zu keiner Schwingungsanregung an den feststehenden Basisteil kommt. Dadurch wird ein außerordentlich ruhiger Lauf des neuen Vibrationspoliergerätes erzielt, während beim Stand der Technik starke Vibrationsschwingungen an die Umgebung abgeben werden.The special feature is the use of a vibration drive with a fixed base part and two device parts driven against each other, which form a counter-oscillating part and a vibration plate. The vibration plate is firmly connected to a polishing plate, and a polishing trough for receiving a polishing medium and the samples to be polished is detachably coupled to the polishing plate.The vibration plate and the device parts connected or coupled to it form inertia mass driven in one direction of rotation, and the counter-vibrating part with this Connected device parts form a further activity mass driven in the other direction of rotation, so that the total center of gravity in principle remains at a constant point during operation of the device and there is no excitation of vibrations on the fixed base part. As a result, the new vibration polishing device runs extremely smoothly, while the state of the art emits strong vibrations into the environment.

Der Antrieb der Vibrationsplatte und des Gegenschwingteils erfolgt gegen die Kraft von Blattfedern. Mit der Trägheitsmasse der Vibrationsplatte und der mit dieser verbundenen bzw. gekoppelten Geräteteile wird ein erstes Schwingungssystem, und mit der Trägheitsmasse des Gegenschwingteils nebst verbundener Geräteteile wird ein zweites, gegenwirkendes Schwingsystem gebildet. Jedes dieser Schwingsysteme kann eigene Resonanzfrequenzen zeigen. Bei auftretenden Resonanzfrequenzen wird der ruhige Lauf des Vibrationspoliergerätes gestört. Diese Störung kann durch einen Beschleunigungssensor festgestellt werden, dessen Signale an einem Steuerteil des Vibrationspoliergerätes rückgeführt und dort verarbeitet werden, um aus dem gestörten Betrieb herauszukommen.The vibration plate and the counter-vibrating part are driven against the force of leaf springs. With the inertia mass of the vibration plate and the associated or Coupled device parts is a first vibration system, and with the inertial mass of the counter-vibrating part together with connected device parts, a second, counteracting vibration system is formed. Each of these oscillation systems can show its own resonance frequencies. If resonance frequencies occur, the smooth running of the vibration polishing device is disturbed. This disturbance can be detected by an acceleration sensor, the signals of which are fed back to a control part of the vibration polishing device and processed there in order to get out of the disturbed operation.

Die oszillierende Schwingung führt vorzugsweise zu einer schubweisen, schräg aufwärts gerichteten Tangentialbewegung der zu polierenden Proben bezüglich des Probenumlaufs innerhalb der Polierwanne und damit insbesondere zur hüpfenden Umlaufförderung der zu polierenden Proben innerhalb der Polierwanne relativ zu dem Poliermedium, was zum Rutschen der Proben auf dem Poliermedium und zum Polieren der Proben an ihrer Unterseite führt.The oscillating oscillation preferably leads to an intermittent, inclined upwardly directed tangential movement of the samples to be polished with respect to the sample circulation within the polishing tank and thus in particular to the hopping circulation of the samples to be polished within the polishing tank relative to the polishing medium, which leads to the samples slipping on the polishing medium and leads to polishing of the samples on their underside.

Als Poliermedium wird ein Poliertuch und Poliermittel in einer Suspension bevorzugt Es sind auch andere Poliermedien brauchbar, beispielsweise feines Schleifmittel oder feines Schleif- und/oder Polierpapier.A polishing cloth and polishing agent in a suspension are preferred as the polishing medium. Other polishing media can also be used, for example fine abrasive or fine abrasive and / or polishing paper.

Zur Kopplung der Polierwanne an den Polierteller wird eine magnetische Anhaftung der Polierwanne an dem Polierteller bevorzugt, was eine leicht lösbare vertikale oder axiale magnetische Befestigung der Polierwanne an dem Polierteller erzielt.To couple the polishing tub to the polishing plate, magnetic adhesion of the polishing tub to the polishing plate is preferred, which achieves an easily detachable vertical or axial magnetic attachment of the polishing tub to the polishing plate.

Eine Magnetplatte oder Magnetfolie kann auf der Oberseite des Poliertellers oder auf der Unterseite der Polierwanne aufgeklebt sein. Eine Stahlblechscheibe oder Magnetfolienscheibe kann auf der Unterseite der Polierwanne oder auf der Oberseite des Poliertellers aufgeklebt sein. Dies stellt eine einfache, aber wirksame lösbare Befestigungsart dar.A magnetic plate or magnetic foil can be glued to the top of the polishing plate or to the underside of the polishing tub. A sheet steel disk or magnetic film disk can be glued to the underside of the polishing bath or to the top of the polishing plate. This is a simple but effective detachable type of attachment.

Zusätzlich zu der magnetischen Kopplung können noch lateral formschlüssig wirkende Formschlusseingriffsteile vorgesehen sein, die Zentrier- und Indexmittel bilden und vorzugsweise eine Zentriernabe und Indexstifte umfassen, um eine Zentrierung und Indexierung der Polierwanne zu bewirken.In addition to the magnetic coupling, form-locking engagement parts which act laterally in a form-locking manner can also be provided, which form centering and indexing means and preferably comprise a centering hub and index pins in order to center and index the polishing bath.

Es wird bevorzugt, die Polierwanne aus einem Kunststoffmaterial mit einem Trägermaterial für ein separat handhabbares Poliermittel auf der Bodeninnenseite zu gestalten. Das Trägermaterial kann ein Poliertuch sein. Die Polierwanne hat eine umlaufende Seitenwand mit einer Nut, die sich über der Bodenwand der Polierwanne in Höhe gemäß der Dicke des Trägermaterials erstreckt und einen gummielastischen Ring aufnimmt, der das Trägermaterial am Boden der Polierwanne festdrückt und damit verhindert, dass Poliermittel-Suspension unter das Trägermaterial gerät.It is preferred to design the polishing trough from a plastic material with a carrier material for a separately handleable polishing agent on the inside of the floor. The carrier material can be a polishing cloth. The polishing trough has a circumferential side wall with a groove which extends above the bottom wall of the polishing trough at a height according to the thickness of the carrier material and which receives a rubber-elastic ring that holds the carrier material on Firmly presses the bottom of the polishing tub and thus prevents the polishing agent suspension from getting under the carrier material.

Vorteilhaft ist die Polierwanne als Behälter für das Poliertuch und Poliermittel-Suspension ausgebildet und ist mit einem Deckel dicht verschließbar sowie mit einem Tragegriff ausgestattet, um als Behälter oder geschlossenes Gefäß auf dem Polierteller abgesetzt beziehungsweise von dem Polierteller abgehoben werden zu können. Für ein Vibrationspoliergerät können somit eine Vielzahl von Polierwannen oder Behältern zur Verfügung stehen, die leicht am Poliergerät gewechselt werden können und deren Spezifikation durch Aufschriften leicht erkennbar gemacht sind. Die Polierwannen oder Behälter sind zweckmäßigerweise stapelbar gestaltet Bei den durchzuführenden Polierarbeiten können unterschiedliche Polierwannen oder Behälter mit unterschiedlichen Graden der Körnung des Poliermittels nacheinander angewendet werden, ohne dass dies zu Komplikationen in der Bearbeitung der zu polierenden Proben führt. Die Proben können nämlich zwischen den einzelnen Bearbeitungsschritten gesäubert werden, um Verschleppen von unterschiedlicher Körnung des Poliermediums zwischen einzelnen Behältern zu vermeiden. Abgesehen davon sind auch die Behälter leicht reinigbar.The polishing tub is advantageously designed as a container for the polishing cloth and polishing agent suspension and can be tightly closed with a lid and is equipped with a handle so that it can be placed on the polishing plate as a container or closed vessel or lifted off the polishing plate. A large number of polishing tubs or containers can thus be available for a vibration polishing device, which can be easily changed on the polishing device and whose specifications are made easily recognizable by means of labels. The polishing tubs or containers are expediently designed to be stackable. During the polishing work to be carried out, different polishing tubs or containers with different degrees of grain size of the polishing agent can be used one after the other without this leading to complications in the processing of the samples to be polished. The samples can namely be cleaned between the individual processing steps in order to avoid carryover of different grain sizes of the polishing medium between individual containers. Apart from that, the containers are also easy to clean.

Hinsichtlich der Konstruktion des Vibrationsantriebes ist die Vibrationsplatte an dem Polierteller durch Verschraubung befestigt. Das Basisteil und das Gegenschwingteil sind ringförmig oder scheibenförmig ausgebildet und über erste Blattfedern verbunden. Diese Blattfedern erstrecken sich gemäß radiale Schraubwendelflächen um die zentrale Geräteachse und führen die Drehschwingungsbewegungen des Gegenschwingteils relativ zum Basisteil.With regard to the construction of the vibration drive, the vibration plate is fastened to the polishing plate by screwing. The base part and the counter-oscillating part are ring-shaped or disk-shaped and connected via first leaf springs. These leaf springs extend according to radial helical helical surfaces around the central device axis and guide the torsional vibration movements of the counter-vibrating part relative to the base part.

Die Vibrationsplatte des Vibrationsantriebes ist mit dem Basisteil über zweite Blattfedern verbunden, welche sich wie die ersten Blattfedern gemäß radiale Schraubwendelflächen um die zentrale Achse des Gerätes erstrecken. Ein elektromotorischer Antrieb ist zwischen Gegenschwingteil und Vibrationsplatte angeordnet und umfasst vorzugsweise eine Magnetspule oder einen Elektromagneten am Gegenschwingteil sowie einen Magnetanker an der Vibrationsplatte, um im Betrieb gegenläufige, oszillierende Drehschwingungsbewegungen zwischen diesem Gegenschwingungsteil und der Vibrationsplatte zu erzeugen, indem der Elektromagnet ein und ausgeschaltet wird, wobei der Magnetanker die Blattfedern spannt beziehungsweise entspannen lässt. Dabei hebt sich die Vibrationsplatte ein wenig von dem Gegenschwingteil ab, wenn die Blattfedern durch den Antrieb gespannt werden, und wenn der Antrieb kurzzeitig ausgeschaltet wird, bewegt sich die Vibrationsplatte wieder auf das Gegenschwingteil zurück. Durch ein periodisches Ein- und Ausschalten des Antriebes kann somit eine Drehschwingungsbewegung der Vibrationsplatte zum Gegenschwingteil erzeugt werden.The vibration plate of the vibration drive is connected to the base part via second leaf springs which, like the first leaf springs, extend around the central axis of the device according to radial helical surfaces. An electromotive drive is arranged between the counter-vibrating part and the vibrating plate and preferably comprises a magnetic coil or an electromagnet on the counter-vibrating part and a magnet armature on the vibrating plate in order to generate opposing, oscillating rotary vibration movements between this counter-vibrating part and the vibrating plate during operation by turning the electromagnet on and off, whereby the magnet armature tensions or relaxes the leaf springs. The vibration plate lifts a little from the counter-vibrating part when the leaf springs are tensioned by the drive, and when the drive is briefly switched off, the vibration plate moves back onto the Counter-oscillating part back. By periodically switching the drive on and off, a rotary oscillation movement of the vibration plate relative to the counter-oscillating part can be generated.

Der Vibrationsantrieb mit Basisteil, Gegenschwingteil und Vibrationsplatte, die paarweise über die ersten und die zweiten Blattfedern miteinander verbunden sind, ermöglichen einen Schwingkräfteausgleich, bei dem wenig Vibrationsenergie in die Umgebung abgestrahlt wird, verglichen mit einem Unwuchtantrieb, wie diese bei bisherigen Vibrationspoliergeräten der Fall ist.The vibration drive with base part, counter-vibrating part and vibration plate, which are connected to each other in pairs via the first and second leaf springs, enable vibration force compensation, in which little vibration energy is radiated into the environment, compared to an unbalance drive, as is the case with previous vibration polishing devices.

Da die Trägheitsmassen bei dem neuen Vibrationspoliergerät einander entgegengesetzt schwingen, bleibt der Masseschwerpunkt in etwa in Ruhe, so dass die Abstützkräfte auf den Standort des Vibrationspoliergeräts in etwa konstant bleiben und kaum Vibrationen auf die Umgebung abgegeben werden. Somit wird mit dem erfindungsgemäßen Vibrationspoliergerät ein außerordentlich ruhiger Lauf erzielt.Since the inertial masses in the new vibration polisher oscillate in opposite directions, the center of gravity remains more or less at rest, so that the support forces on the location of the vibration polisher remain approximately constant and hardly any vibrations are emitted into the environment. An extremely smooth run is thus achieved with the vibration polishing device according to the invention.

Kurzbeschreibung der FigurenBrief description of the figures

Im Folgenden wird ein Ausführungsbeispiel anhand der Zeichnungen beschrieben. Dabei zeigen:

Fig. 1
einen schematischen Längsschnitt durch ein Vibrationspoliergerät,
Fig. 2
einen schematischen Querschnitt durch das Vibrationsgerät,
Fig. 3
eine vergrößerte Einzelheit aus Figur 2,
Fig. 4
einen Vibrationsantrieb in Seitenansicht, teilweise geschnitten,
Fig. 5
eine perspektivische Ansicht von oben auf eine Polierwanne,
Fig. 6
eine perspektivische Ansicht von unten auf eine Polierwanne,
Fig. 7
eine perspektivische Ansicht von oben auf einen Polierwannedeckel,
Fig. 8
eine perspektivische Ansicht eines Vibrationsantriebs mit aufgesetzter Polierwanne von unten,
Fig. 9
eine Schnittansicht eines Probehalters, und
Fig. 10
eine perspektivische Gesamtansicht eines Vibrationspoliergeräts.
An exemplary embodiment is described below with reference to the drawings. Show:
Fig. 1
a schematic longitudinal section through a vibration polishing device,
Fig. 2
a schematic cross section through the vibration device,
Fig. 3
an enlarged detail Figure 2 ,
Fig. 4
a vibration drive in side view, partly in section,
Fig. 5
a perspective view from above of a polishing bath,
Fig. 6
a perspective view from below of a polishing bath,
Fig. 7
a perspective view from above of a polishing tub lid,
Fig. 8
a perspective view of a vibration drive with an attached polishing pan from below,
Fig. 9
a sectional view of a sample holder, and
Fig. 10
Fig. 3 is an overall perspective view of a vibratory polisher.

Detaillierte Beschreibung der AusführungsbeispieleDetailed description of the exemplary embodiments

Die Hauptteile des Vibrationspoliergerätes sind ein Vibrationsantrieb 1, ein Polierteller 2 und eine Polierwanne 3. Außerdem umfasst das Gerät noch einen Steuerteil 4 und ein Schutzgehäuse 5.The main parts of the vibration polishing device are a vibration drive 1, a polishing plate 2 and a polishing bath 3. The device also comprises a control part 4 and a protective housing 5.

Der elektromotorische Vibrationsantrieb 1 (Fig. 4) umfasst ein ringförmiges oder scheibenförmiges Basisteil 11, ein ringförmiges oder scheibenförmiges Gegenschwingteil 12, eine Vibrationsplatte 13 sowie einen elektromotorischen Antrieb mit einem ersten Antriebsteil 14 und einem zweiten Antriebsteil 15. Das Basisteil 11 ist mit dem Gegenschwingteil 12 über erste Blattfedern 16 verbunden. Ferner ist das Basisteil 11 über zweite Blattfedern 17 mit der Vibrationsplatte 13 verbunden. Die Blattfedern 16 und 17 bilden jeweils drei Federpakete, die um den Umfang des Gerätes verteilt angeordnet sind. Dem Vibrationsantrieb 1 kann eine Mittel- oder Symmetrieachse 10 zugeordnet werden, zu der die Blattfedern 16 und 17 wie Gangstücke einer mehrgängigen, sehr steil verlaufenden Schraube Schraubwendelflächen bilden, die sich radial zur Mittelachse 10 erstrecken und einen Neigungswinkel zur Mittelachse 10 von 18° einnehmen. Die Struktur des Vibrationsantriebes 1 ist ausführlich in DE 10 2004 034 481 B4 oder US 7 143 891 B2 beschrieben, auf die diesbezüglich hiermit Bezug genommen wird und die hiermit durch Referenz zum Gegenstand der vorliegenden Offenbarung gemacht werden.The electromotive vibration drive 1 ( Fig. 4 ) comprises an annular or disk-shaped base part 11, an annular or disk-shaped counter-vibrating part 12, a vibration plate 13 and an electric motor drive with a first drive part 14 and a second drive part 15. The base part 11 is connected to the counter-vibrating part 12 via first leaf springs 16. Furthermore, the base part 11 is connected to the vibration plate 13 via second leaf springs 17. The leaf springs 16 and 17 each form three spring assemblies which are distributed around the circumference of the device. A central or symmetry axis 10 can be assigned to the vibration drive 1, to which the leaf springs 16 and 17 form helical surfaces like threads of a multi-start, very steep screw, which extend radially to the central axis 10 and assume an angle of inclination to the central axis 10 of 18 °. The structure of the vibration drive 1 is detailed in DE 10 2004 034 481 B4 or US 7 143 891 B2 described, to which reference is hereby made in this regard and which are hereby made the subject matter of the present disclosure by reference.

Wie Figur 1 und 2 zeigen, ist der Polierteller 2 mit dem Vibrationsantrieb 1 fest verbunden, und zwar an die Vibrationsplatte 13 bei 24 angeschraubt und bei 25 indexiert. Auf seiner Oberseite weist der Polierteller 2 als eine erste ferromagnetische Schicht eine Magnetplatte oder eine Magnetfolie 21 (Fig. 3) auf, die an die Oberseite des Poliertellers 2 befestigt, in diesem Beispiel angeklebt ist. Kopfbolzen 23, die in Eingriffsöffnungen 33 der Polierwanne 3 eingreifen, können als Formschluss-Eingriffsteile einer Schnellkupplung angesehen werden.How Figure 1 and 2 show, the polishing plate 2 is firmly connected to the vibration drive 1, namely screwed to the vibration plate 13 at 24 and indexed at 25. On its upper side, the polishing plate 2 has a magnetic plate or a magnetic film 21 as a first ferromagnetic layer ( Fig. 3 ), which is attached to the top of the polishing plate 2, is glued in this example. Head bolts 23, which engage in engagement openings 33 of the polishing bath 3, can be viewed as form-fit engagement parts of a quick-release coupling.

Die Polierwanne 3, vorzugsweise aus Kunststoff, ist mit dem Polierteller 2 zur Mitnahme gekoppelt und weist zu diesem Zweck an ihrer Unterseite eine Magnetfolienscheibe oder Stahlblechscheibe 31 als eine zweite ferromagnetische Schicht auf und kann an der Unterseite der Polierwanne 3 angeklebt sein. Wenn die Polierwanne 3 auf den Polierteller 2 gesetzt worden ist, wirken die ferromagnetischen Schichten zur Kopplung der Polierwanne 3 mit dem Polierteller 2 zusammen, wodurch die Polierwanne 3 in die oszillierende Schwingung des Poliertellers 2 mitgenommen wird.The polishing trough 3, preferably made of plastic, is coupled to the polishing plate 2 to be carried along and for this purpose has a magnetic foil disk or sheet steel disk 31 as a second ferromagnetic layer on its underside and can be glued to the underside of the polishing trough 3. When the polishing tub 3 has been placed on the polishing plate 2, the ferromagnetic layers interact to couple the polishing tub 3 with the polishing plate 2, whereby the polishing tub 3 is entrained in the oscillating vibration of the polishing plate 2.

Der Polierteller 2 ist mittels einer zentralen Schraube 24 und einer Zentrierscheibe 22 auf der Oberseite der Vibrationsplatte 13 befestigt und wird durch exzentrisch angeordnete Indexstifte 25 indexiert.The polishing plate 2 is fastened by means of a central screw 24 and a centering disk 22 on the upper side of the vibration plate 13 and is indexed by eccentrically arranged index pins 25.

Die Zentrierscheibe 22 greift in eine zentrale Aussparung 32 in der Bodenwand der Polierwanne 3 ein, um die Polierwanne 3 zu zentrieren. Desgleichen greifen die Kopfbolzen 23 in entsprechende Bodenaussparungen 33 der Polierwanne 3 ein, um einen Formschluss gegen relative Drehung zwischen dem Vibrationsantrieb 1 bzw. dem Polierteller 2 und der Polierwanne 3 zu ergeben.The centering disk 22 engages in a central recess 32 in the bottom wall of the polishing bath 3 in order to center the polishing bath 3. The head bolts 23 likewise engage in corresponding bottom recesses 33 of the polishing tub 3 in order to produce a form fit against relative rotation between the vibration drive 1 or the polishing plate 2 and the polishing tub 3.

Die Polierwanne 3 ist in Figur 5 und 6 perspektivisch dargestellt und zeigt die Stahlblechscheibe 31 an der Unterseite der Bodenwand. Die Polierwanne 3 weist eine Seitenwand 34 mit daran angebrachten Tragegriff 35 auf. Wie aus Figur 3 und 5 ersichtlich, weist die Seitenwand 34 eine umlaufende Keilnut 36 auf, unter der sich ein Aufnahmeraum für ein Poliertuch 6 (Figur 3) befindet. Der Rand des Poliertuches 6 wird durch einen gummielastischen Ring 37 festgeklemmt, der in die Keilnut 36 eingreift und den Rand des Poliertuches 6 niederhält. Fingeröffnungen 38 an der Seitenwand 34 erleichtern die Entnahme des elastischen Ringes 37 aus der Nut 36 und damit den Wechsel des Poliertuches 6, das an seiner Unterseite mit magnetisierten, ferromagnetischen Mitteln versehen ist, um gut anzuliegen und zu haften. Es wird bevorzugt, die Polierwanne aus einem Kunststoffmaterial zu fertigen. Das Poliertuch 6 ist ein Trägermaterial, auf das eine Poliermittel-Suspension aufgegeben wird.The polishing tub 3 is in Figure 5 and 6th shown in perspective and shows the sheet steel disk 31 on the underside of the bottom wall. The polishing tub 3 has a side wall 34 with a handle 35 attached to it. How out Figure 3 and 5 As can be seen, the side wall 34 has a circumferential keyway 36, under which there is a space for a polishing cloth 6 ( Figure 3 ) is located. The edge of the polishing cloth 6 is clamped by a rubber elastic ring 37 which engages in the keyway 36 and holds the edge of the polishing cloth 6 down. Finger openings 38 on the side wall 34 facilitate the removal of the elastic ring 37 from the groove 36 and thus the change of the polishing cloth 6, which is provided on its underside with magnetized, ferromagnetic means in order to fit and adhere well. It is preferred to manufacture the polishing tub from a plastic material. The polishing cloth 6 is a carrier material onto which a polishing agent suspension is applied.

Die Polierwanne 3 kann mit einem verriegelbaren Deckel 7 (Fig. 6, 7) verschlossen werden, so dass ein verschließbarer Behälter für das Poliertuch und die Poliermittel-Suspension entsteht. Der Deckel 7 weist Vorsprünge 72 und 73 auf, die in die Bodenaussparungen 32 und 33 der Polierwanne passen, so dass verschlossene Polierwannen 3 (Fig. 6, 7) übereinander stapelbar sind. Es ist vorgesehen, zu einem Vibrationspoliergerät eine gewisse Anzahl von solchen Polierwannen (Fig. 6, 7) bereitzustellen, die Poliermittel-Suspensionen mit unterschiedlicher Körnung fassen können. Auf diese Weise wird ermöglicht, das Vibrationspoliergerät zunächst als Feinschliffgerät für zu polierende Proben und anschließend als Endpoliergerät zu nutzen.The polishing bath 3 can be equipped with a lockable cover 7 ( Fig. 6 , 7th ) are closed, so that a closable container for the polishing cloth and the polishing agent suspension is created. The cover 7 has projections 72 and 73 which fit into the base recesses 32 and 33 of the polishing tub, so that closed polishing tubs 3 ( Fig. 6 , 7th ) are stackable on top of each other. A certain number of such polishing tanks ( Fig. 6 , 7th ) that can hold polishing agent suspensions with different grain sizes. In this way it is possible to use the vibration polishing device first as a fine grinding device for samples to be polished and then as a final polishing device.

Wie am besten aus Figur 3 ersichtlich, befindet sich zwischen dem Polierteller 2 und der Polierwanne 3 ein Randspalt 29, in den ein Werkzeug eingreifen kann, um die Polierwanne 3 sanft von dem Polierteller 2 abzuheben. Das sanfte Abheben kann mechanisiert werden, indem z.B. ein Griff mit Nocken am vorderen Ende in den Spalt 29 eingreift (nicht gezeigt), wobei durch Drehen des Werkzeugs der Nocken den Spalt 29 erweitert und damit die Polierwanne 3 gegen die magnetische Anhaftkraft vom Polierteller 2 sanft abhebt. Es genügt auch, die Polierwanne an den Griffen 35 sanft anzuheben.How best to look Figure 3 As can be seen, there is an edge gap 29 between the polishing plate 2 and the polishing pan 3, into which a tool can engage in order to gently lift the polishing pan 3 from the polishing plate 2. The gentle lifting can be mechanized, for example, by engaging a handle with cams at the front end in the gap 29 (not shown), whereby by turning the tool the cam widens the gap 29 and thus the polishing bath 3 gently against the magnetic adhesive force of the polishing plate 2 takes off. It is also sufficient to gently lift the polishing tub by the handles 35.

Wie gemäß Figur 1 ersichtlich, bilden der Vibrationsantrieb 1, der Polierteller 2 und die Polierwanne 3 eine erste Einheit, die in dem Schutzgehäuse 5 neben dem Steuerteil 4 als zweite Einheit angeordnet ist, Das Schutzgehäuse 5 weist insgesamt eine keilförmige Gestalt mit abgestumpfter Keilspitze 51 auf, innerhalb welcher der Steuerteil 4 untergebracht ist. Die Oberseite des Schutzgehäuses 5 im Bereich der abgestumpften Keilspitze 51 ist als Bedienungspanel gestaltet und kann einen Touchscreen 52 aufweisen. Ein Gehäusedeckel 53 dient zur Abdeckung des Vibrationspoliergerätes,How according to Figure 1 As can be seen, the vibration drive 1, the polishing plate 2 and the polishing tub 3 form a first unit, which is in the protective housing 5 next to the control part 4 as the second Unit is arranged, the protective housing 5 overall has a wedge-shaped shape with truncated wedge tip 51, within which the control part 4 is housed. The top of the protective housing 5 in the area of the truncated wedge tip 51 is designed as a control panel and can have a touchscreen 52. A housing cover 53 is used to cover the vibration polisher,

Fig. 8 zeigt den Vibrationsantrieb 1 mit aufgesetzter Poiierwanne 3 sowie mit einem Beschleunigungssensor 18, der die Beschleunigungen zwischen Polierteller 2 und Polierwanne 3 zu messen und daraus Beschleunigungssignale zu bilden in der Lage ist. Diese Signale werden zu dem Steuerteil 4 rückgeführt, um regelnd in die dem Vibrationsantrieb zugeführte Spannung, Stromstärke und Impulsgabe einzugreifen. Fig. 8 shows the vibration drive 1 with the polishing bath 3 attached and with an acceleration sensor 18 which is able to measure the accelerations between the polishing plate 2 and the polishing bath 3 and to generate acceleration signals therefrom. These signals are fed back to the control part 4 in order to intervene in a regulating manner in the voltage, current strength and pulse output supplied to the vibration drive.

Fig. 9 zeigt eine Schnittaussicht durch eine Probe 8 und einen Probehalter, mit dem die Probe 8 passend festgeklemmt werden kann, um mit der Unterseite 8 auf das Poliertuch 6 aufgesetzt zu werden. Fig. 9 shows a sectional view through a sample 8 and a sample holder with which the sample 8 can be appropriately clamped in order to be placed with the underside 8 on the polishing cloth 6.

Der Betrieb des Vibrationspoliergeräts geht wie folgt vor sich.The operation of the vibratory polisher is as follows.

Zunächst werden mehrere zu polierende Proben 8 für den Poliervorgang vorbereitet. Dies bedeutet in den meisten Fällen, dass die Proben in Probenhaltern 9 so positioniert werden, dass die zu polierende Fläche 81 von dem Probenhalter vorsteht.First, several samples 8 to be polished are prepared for the polishing process. In most cases this means that the samples are positioned in sample holders 9 in such a way that the surface 81 to be polished protrudes from the sample holder.

Das Steuergerät 4 wird zur Abgabe von elektrischen Strömen vorgegebener Frequenz und Stärke eingeschaltet, um den Vibrationsantrieb 1 in Gang zu setzen. Die erzeugten Schwingungen an der Vibrationsplatte 13 sind oszillierend und führen dazu, dass die auf der Polierwanne befindlichen und zu polierenden Proben 8 in schubweise hüpfende Bewegung geraten und dabei umlaufend in der Polierwanne 3 angetrieben werden. Bei jedem Spannungsstoß bewegen sich der erste oder zweite Antriebsteil 14,15 relativ zueinander und damit auch der Gegenschwingungsteil 12 zu der Vibrationsplatte 13, wodurch die Blattfedern 16 und 17 gespannt werden, und wenn der Spannungsimpuls zurückgeht, führen die Blattfedern 16 und 17 die Geräteteile in ihre Ausgangslage zurück. Der Polierteller 2 ist mit der Vibrationsplatte 13 fest verbunden und macht so deren Bewegungen mit. Dies gilt aber auch für die Polierwanne 3, da diese mechanisch und/oder magnetisch mitgenommen wird. Die Indexstifte 25 verhindern eine ungewollte Drehbewegung der Polierwanne 3 zu dem Polierteller 2.The control device 4 is switched on for the delivery of electrical currents of predetermined frequency and strength in order to set the vibration drive 1 in motion. The vibrations generated on the vibrating plate 13 are oscillating and cause the samples 8 located on the polishing bath and to be polished to start jumping in batches and thereby being driven in a rotating manner in the polishing bath 3. With each voltage surge, the first or second drive part 14,15 move relative to one another and thus also the counter-oscillation part 12 to the vibration plate 13, whereby the leaf springs 16 and 17 are tensioned, and when the voltage pulse decreases, the leaf springs 16 and 17 lead the device parts in their original position back. The polishing plate 2 is firmly connected to the vibration plate 13 and thus makes its movements with it. However, this also applies to the polishing bath 3, since it is taken along mechanically and / or magnetically. The index pins 25 prevent an undesired rotary movement of the polishing bath 3 in relation to the polishing plate 2.

Die beschriebene Ausführungsform ist beispielhaft zu werten. Es sind mannigfaltige Abwandlungen möglich. Bewegungen können bekanntlich überlagert werden. Es können zwei erste Antriebsteile und zwei zweite Antriebsteile vorgesehen sein, deren erzeugte Bewegungen überlagert werden, um den Umlauf des zu polierenden Proben in der topfförmigen Polierwanne zu begünstigen. Mit drei ersten und zweiten Antriebsteilen kann ein noch günstigeres Ergebnis erzielt werden.The embodiment described is to be assessed as an example. Various modifications are possible. As is well known, movements can be superimposed. There can be two first drive parts and two second drive parts, their generated movements be superimposed in order to promote the circulation of the sample to be polished in the cup-shaped polishing trough. An even more favorable result can be achieved with three first and second drive parts.

Claims (12)

  1. A vibration polishing device comprising:
    - a vibration drive (1);
    - a polishing disc (2) firmly connected to the vibration drive (1); and
    - a polishing bowl (3) adapted to receive a polishing medium and the samples (8) to be polished, and which is coupled to the polishing disc (2);
    characterized in that the vibration drive (1) comprises
    a base part (11), a counter-oscillating part (12), a vibration plate (13), a first drive part (14), and a second drive part (15);
    wherein the base part (11) and the counter-oscillating part (12) are coupled by first leaf springs (16) having their main planes grouped around a central axis (10) in accordance with radial helical surfaces;
    wherein the base part (11) and the vibration plate (13) are coupled by second leaf springs (17) having their main planes grouped around the central axis (10) in accordance with radial helical surfaces; and
    wherein the first drive part (14) is arranged so as to be supported on the counter-oscillating part (12), and the second drive part (15) is arranged so as to be supported on the vibration plate (13), for generating oppositely oscillating rotational oscillatory movements between the counter-oscillating part (12) and the vibration plate (13) when the vibration drive (1) is in operation.
  2. The vibration polishing device according to claim 1, further comprising;
    - a control unit (4) for power supply to the first and second drive parts in terms of voltage, current, and pulse formation; and
    - an acceleration sensor (18) which measures accelerations occurring when the device is in operation, on the counter-oscillating part (12) and on the vibration plate (13) and thus also to the polishing disc (2) and to the polishing bowl (3) and which generates acceleration signals based thereon, which are fed back to the control unit (4).
  3. The vibration polishing device according to claim 1 or 2,
    wherein the polishing medium comprises a carrier material and polishing agent.
  4. The vibration polishing device according to claim 3,
    wherein the carrier material is a polishing cloth (6) and the polishing agent is provided in the form of a polishing agent suspension.
  5. The vibration polishing device according to any one of claims 1 to 4,
    wherein the polishing bowl (3) is coupled to the polishing disc (2) so as to be detachable.
  6. The vibration polishing device according to claim 5,
    wherein the detachable coupling of the polishing bowl (3) to the polishing disc (2) is by magnetic holding force.
  7. The vibration polishing device according to claim 6,
    wherein ferromagnetic layers or parts are attached on the upper side of the polishing disc (2) and on the underside of the polishing bowl (3).
  8. The vibration polishing device according to any one of claims 5 to 7,
    wherein the polishing bowl (3) is in the form of a plastic container for the carrier material and for the polishing agent suspension and can be closed with a lid (7) and has a carrying handle (35) to be placed on the polishing disc (2) and lifted from the polishing disc (2) as a closed container.
  9. The vibration polishing device according to claim 8,
    wherein closed containers are stackable one above the other.
  10. The vibration polishing device according to claim 9,
    wherein the polishing bowl (3) has a central recess (32) at its underside and the lid (7) has a central projection (72) on its upper side such that containers to be stacked one above the other can be fitted with their respective central recess (32) onto the respective underlying projection (72).
  11. The vibration polishing device according to any one of claims 1 to 10,
    wherein centring and/or indexing means (22, 32; 23, 33) are provided between the polishing disc (2) and the polishing bowl (3).
  12. The vibration polishing device according to any one of claims 1 to 11,
    wherein the polishing bowl (3) has a base wall with a receiving space for the polishing medium and a circumferential lateral wall (34) with a spline groove (36) for receiving a rubber-elastic ring (37) which is adapted to clamp the edge of a polishing cloth (6) that forms part of the polishing medium.
EP17762110.9A 2016-09-06 2017-09-05 Vibration polishing device Active EP3509792B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016116676.6A DE102016116676A1 (en) 2016-09-06 2016-09-06 Vibration polisher
PCT/EP2017/072199 WO2018046480A2 (en) 2016-09-06 2017-09-05 Vibration polishing device

Publications (2)

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EP3509792A2 EP3509792A2 (en) 2019-07-17
EP3509792B1 true EP3509792B1 (en) 2021-07-14

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EP17762110.9A Active EP3509792B1 (en) 2016-09-06 2017-09-05 Vibration polishing device

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US (1) US11407080B2 (en)
EP (1) EP3509792B1 (en)
JP (1) JP6744498B2 (en)
CN (1) CN109689292B (en)
DE (1) DE102016116676A1 (en)
DK (1) DK3509792T3 (en)
ES (1) ES2886092T3 (en)
WO (1) WO2018046480A2 (en)

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GB2421015A (en) * 2004-12-11 2006-06-14 Reckitt Benckiser Nv A stackable container
DE102009044234A1 (en) * 2009-10-12 2011-05-12 Walther Trowal Gmbh & Co. Kg Device and method for the surface treatment of workpieces
JP5123997B2 (en) 2010-07-20 2013-01-23 新菱冷熱工業株式会社 Air conditioning control system and program thereof
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Also Published As

Publication number Publication date
US11407080B2 (en) 2022-08-09
EP3509792A2 (en) 2019-07-17
CN109689292B (en) 2021-10-22
ES2886092T3 (en) 2021-12-16
JP6744498B2 (en) 2020-08-19
DK3509792T3 (en) 2021-10-18
DE102016116676A1 (en) 2018-03-08
US20210276142A1 (en) 2021-09-09
WO2018046480A3 (en) 2018-05-24
JP2019529148A (en) 2019-10-17
WO2018046480A2 (en) 2018-03-15
CN109689292A (en) 2019-04-26

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