EP3489518B1 - Vacuum pump and assembly and method for handling and/or assembly of a vacuum pump - Google Patents

Description

The present invention relates to a vacuum pump, in particular a turbomolecular pump, and to an arrangement and a method for handling and / or assembling a vacuum pump.

Vacuum pumps are often used in systems that require the respective vacuum pump to be attached horizontally. This applies in particular to turbomolecular pumps in pumping speed classes greater than 1000 l / s. In the present case, the volumetric flow is regarded as the pumping speed, which can be promoted per unit of time through a cross-sectional area or a pump-effective section. Such pumps can have a high weight due to their size. Therefore, such pumps are usually only lifted with a lifting aid. Likewise, the alignment of the pump as well as its attachment to a particular system requires a suitable lifting aid.

It is known from the prior art to lift pumps with a high dead weight by folding a loop. Hoists, such as manually operated cranes, can be used. However, lifting a pump with the help of a folded loop is risky. This can cause the pump to slip out of the loop and fall, causing serious damage or even injury.

Furthermore, and for example from EP1293682 A2 , It is known to provide at least one thread in the housing of a pump into which an eye screw can be screwed. A hook of the hoist can then be placed in the eye bolt for the respective lifting and assembly process be latched. This ensures a relatively safe lifting process. To assemble the pump, however, it is not only necessary to lift it, but also to align the pump in the room. This can only be accomplished with great difficulty with a fixed position of the eyebolts on the housing. In particular, considerable manual force is required for this, which in turn complicates the damage-free assembly of the pump in its desired end position.

Against this background, it is an object of the present invention to provide a vacuum pump which can be raised, aligned and / or assembled with reduced handling effort. The task also consists in specifying an arrangement and a method for handling and / or assembling a vacuum pump.

With regard to a vacuum pump, this object has been achieved with the features of claim 1. An arrangement according to the invention is the subject of claim 13 and a method according to the invention is specified in claim 14. Advantageous embodiments are specified in the dependent claims and are discussed below.

A vacuum pump according to the invention, which can in particular be a turbomolecular pump, has a pump body and a fastening device formed thereon, which has at least one engagement structure for connecting a fastening element to the pump body. The fastening element can, for example, be a sliding block (see here, for example, DIN 508), which is inserted into the engagement structure and enables the screwing in of a so-called eye screw or eye bolt (see, for example, DIN 580). According to the invention, the engagement structure on the outer circumference of the pump body extends at least in sections at an angle to its longitudinal extent. The structure of the intervention therefore runs not or at least not exactly along the longitudinal extent of the pump body but at an angle to it. This makes it possible for the pump body to be aligned around the longitudinal extent in the raised state when a fastening element is displaced within the engagement structure.

It is now provided according to the invention that a position and / or arrangement of the fastening device along the longitudinal extent, that is to say in the axial direction, of the pump body is selected as a function of the center of gravity of the pump body. By selecting the position and / or arrangement of the fastening device along the longitudinal extent of the pump body depending on the center of gravity, it can be ensured that the desired inclination of the pump body in space can be maintained even with little effort by the respective operator. The handling and thus ultimately the assembly of the vacuum pump are thus made easier overall.

According to the invention, there is therefore the possibility of arranging a fastening element in or on the engagement structure, in particular in a form-fitting connection, in order, for example, to establish a connection to a hoist by means of an eyebolt. In the raised state, a rotation of the pump body about the longitudinal axis can then be accomplished without the maintenance of the position of the longitudinal axis of the pump body in space requiring a great effort. Accordingly, the rotational position of the pump body about the longitudinal axis or longitudinal extent can be adjusted precisely and without the risk of the fastening element used in each case tilting in or on the engagement structure. The entire handling and assembly effort can therefore be done with little manual effort.

According to the invention, the engagement structure is designed for the displaceable guidance of a fastening element, in particular for a displaceable guidance along a circumferential orientation of the pump body. Due to the displaceable guide, the rotational position of the pump body can be aligned in the raised state easily and without the risk of incorrect operation or injury. In particular, the displaceable guide ensures that the fastening means does not tilt during rotation of the pump body about the longitudinal axis and the associated displacement of a fastening means in or on the engagement structure.

According to an advantageous embodiment, the at least one engagement structure runs along a circumferential orientation of the pump body, in particular orthogonally or essentially orthogonally to the longitudinal extent of the pump body. In this way, an alignment of the pump body about the longitudinal axis or about the longitudinal extent can be carried out in a manner that is particularly easy to handle.

The engagement structure can run around the outer circumference of the pump body in sections or completely. An engagement structure provided in sections enables an alignment between two critical angle positions, so that the position of the engagement structure formed in sections can provide an orientation specification for the final assembly position. With a completely circumferential engagement structure, the pump body can be rotated completely about its own longitudinal axis in the raised state, so that all rotational positions can be set for the final assembly position.

The engagement structure advantageously runs continuously around the outer circumference. Accordingly, the engagement structure is introduced in a ring shape in the outer circumference of the pump body or is provided on the latter and is therefore endless educated. In the latter embodiment, the beginning and end of the intervention structure therefore merge seamlessly.

In a particularly preferred manner, the at least one engagement structure is positioned axially at the height of the center of gravity of the pump body. Accordingly, the at least one engagement structure is arranged with respect to the longitudinal extension or longitudinal axis of the pump body in a position which corresponds to the position of the center of gravity of the pump body along the longitudinal extension or longitudinal axis. In this way, handling-friendly assembly can be ensured with only one engagement structure. This arrangement of the engagement structure ensures that an essentially horizontal alignment of the pump body in the raised state of the vacuum pump can be maintained without additional support effort by the operator.

According to an advantageous embodiment of the vacuum pump according to the invention, the fastening device has a plurality of engagement structures. A plurality of engagement structures can increase the fastening security for the respective lifting means and also the positional stability when the pump is raised.

In this case, at least two engagement structures are advantageously positioned axially on both sides of the center of gravity of the pump body. In particular, the two engagement structures axially enclose the center of gravity. Seen along the longitudinal axis of the pump body, an engagement structure is thus arranged in front of the center of gravity and another engagement structure is located behind the center of gravity. An undesirable inclination of the longitudinal axis in space during the lifting and / or mounting of the vacuum pump can be reliably avoided in this way.

In a particularly advantageous manner, the axial distance of an engagement structure from the center of gravity is selected to match the axial distance from another engagement structure from the center of gravity. This ensures a uniform loading of the load-carrying or lifting means used in each case and / or the respective suspension means of the hoist. It is also possible for the engagement structure to have different axial distances from the center of gravity, as a result of which there is greater design freedom in the choice of the position of the individual engagement structures.

The engagement structure is further preferably designed as a groove-like depression and / or for receiving at least one sliding block. A sliding block can preferably be displaceable within the groove-like recess. The use of sliding blocks and the corresponding design of the engagement structure as a groove-like recess allows the pump body to be lifted in a time-saving and easy-to-use manner, since any sliding blocks can be connected to such an engagement structure in just a few steps. The groove-like depression is preferably a T-groove. Accordingly, the groove has a T-shape in cross section, as a result of which a form-fitting coupling with a fastening element, which is designed in particular as a sliding block, can be produced in a particularly simple manner.

It can also be advantageous if the at least one engagement structure is designed as a web-like projection and / or for guiding a complementarily shaped fastening element, in particular a sliding block with a groove-like recess formed therein, which engages around a T-shaped bridge, for example. Such web-like projections can be easily manufactured and also permit secure fastening and suitable guidance for complementarily shaped fastening elements.

Furthermore, it can be advantageous if the engagement structure has an insertion section for a fastening element and / or wherein the insertion section is designed to insert a fastening element transversely to the longitudinal profile of the engagement structure. Thus, the respective fastening element can only be introduced into the engagement structure or be connected to it for carrying out the respective handling and assembly task. After the handling and assembly task, the fastening element can be removed again from the engagement structure and, if necessary, reused.

The insertion section can be formed by an interruption in the cross-sectional shape, in particular by an interruption in a T-shaped cross-section and / or by omitting projections for the positive engagement behind a fastening element. For example, in the case of a groove-like depression, the insertion section can be formed by a groove section which has a merely rectangular cross section without projections or without a T-shape.

If an insertion section is present, the engagement structure can advantageously have a projection and / or a shoulder for narrowing and / or reducing the cross-sectional area of the engagement structure. Such a projection and / or shoulder can preferably be provided in front of or behind the insertion section, for example by a shoulder in the surface of the circumferential engagement structure. A sliding block can thus be guided through the engagement structure without load. Under load, i.e. with the pump attached to it, however, a separately applied counterforce or a slight tilting is required in order to overcome the corresponding constriction. Such a configuration prevents the accidental loss and an unintentional fall of the hanging load when the sliding block is moved into the region of an insertion section.

In order to keep the manufacturing outlay for an engagement structure according to the invention low, it can be produced by machining, preferably by turning and / or milling. In the case of the engagement structure being designed as a T-slot, a T-slot milling cutter is preferably to be used for the production, which can be accomplished inexpensively.

In this case, the engagement structure can be introduced into the pump body in particular by machining. Correspondingly, for example, part of the pump body can be produced in its basic form by means of original and / or reshaping methods, and then the engagement structure can be introduced into or produced on the outer circumference of the pump body by a machining process. This can be achieved with only a small manufacturing outlay.

According to an advantageous embodiment of the vacuum pump according to the invention, the pump body is formed by a housing and at least one pump component arranged in and / or on the housing. In particular, a plurality of pump components are arranged in and / or on the housing. Since the center of gravity of the entire pump body, which includes the housing and the at least one pump component, is decisive for the position and / or arrangement of the fastening device, the balance of the entire pump body can also be maintained in the raised state with particularly little manual effort. In particular, this can prevent individual components of the vacuum pump from creating an imbalance in the raised state, as a result of which the inclination of the longitudinal axis in space is unfavorable or undesirable in the raised position.

The housing of the vacuum pump can advantageously be constructed in several parts, which simplifies the assembly of the individual parts of the pump or increases the design scope.

At least one pump component can be designed as a rotor and the housing can form a stator or can be connected to a stator, thereby ensuring a space-saving construction. In a further preferred manner, the rotor of the vacuum pump is mounted rotatably about an axis of rotation which runs along the longitudinal extent of the pump body and / or through its center of gravity, in particular coincides with a center of gravity of the pump body. Such an arrangement allows the pump body to be aligned around the axis of rotation of the rotor in a particularly simple manner. The respective pump inlet or outlet of the vacuum pump can thus be easily aligned to the respective systems in order to then carry out the required assembly work.

According to an advantageous embodiment of the vacuum pump according to the invention, the housing has a longitudinal extent and / or a rectangular and / or essentially round outer circumference, preferably a circular outer circumference. In this way, the respective pump components can be accommodated within a compact housing with only a small installation space. In the case of a round outer circumference, the respective pump rotor can be accommodated in a space-saving housing designed as a stator.

Furthermore, it can be advantageous if the longitudinal extent of the housing is larger than a housing diameter, in particular as a medium and / or as the largest or smallest housing diameter. In this case, the housing has an elongated shape overall, as a result of which a plurality of pump stages or rotors can be arranged in the housing and a high pump output can thus be achieved.

In a further advantageous manner, the pump body, in particular the housing of the pump, can have a reinforcement adjacent to the at least one engagement structure. The reinforcement stability can be increased by such a reinforcement. In particular, this can prevent a fastening element from being deformed by undesired deformation of the regions of the pump body adjoining the engagement structure and thereby being detached from the engagement structure. The risk of the pump falling down is thus reduced. Such reinforcement of the pump body can be achieved by providing a greater wall thickness in the area of and / or adjacent to the engagement structure than in the other pump body sections, in particular housing sections.

According to a further aspect of the present invention, an arrangement for handling and / or assembling a vacuum pump is provided, with a lifting tool having a suspension element and with a vacuum pump described above. Furthermore, at least one fastening element, preferably a sliding block, which is displaceably positioned in or on the engagement structure (e.g. a groove or a web) and a load-carrying means are provided, which is connected to the fastening element or formed in one piece and preferably designed as an eyebolt. The load suspension device is preferably connected to the suspension device, either directly or indirectly via a lifting device, for example in the form of a carrying or lifting belt.

Such an arrangement allows a vacuum pump described above to be lifted, handled and finally installed in the desired end position on the respective system with little effort and with a high degree of safety. In the raised state, the pump body can be rotated about the longitudinal extent or longitudinal axis with only a small amount of manual force, and thus the desired alignment or rotational position of the pump body can be set in space, for this purpose the fastening element is arranged, for example, in a groove-like recess or on a projection of the pump body and thus supports the rotational movement during handling.

Another aspect of the present invention relates to a method for handling and / or assembling a vacuum pump, preferably a vacuum pump described above. Such a method can preferably be carried out with an arrangement described above. According to the invention, the vacuum pump is lifted by a hoist, then aligned in space by rotation about a longitudinal axis, in particular a rotor axis, with at least one fastening element, preferably a sliding block, being guided on and / or in the engagement structure of the vacuum pump by the rotation of the vacuum pump in space is moved. Controlled rotation of the pump body about the longitudinal axis is made possible by the guided displacement of the fastening element, so that precise alignment in space can be ensured with little manual effort.

According to an advantageous embodiment, the insertion section is designed as a branching groove for the circumferential engagement structure, in particular in the form of an insertion channel. Such an insertion channel can, for example, emerge from an end face of the pump body and / or open into an insertion section that is axially offset from the engagement structure. A load suspension device can either be inserted directly axially or inserted by immersion.

If such an insertion channel is provided, the circumferential positionability of the load suspension device along the circumferential engagement structure can take place without interruption since the load suspension device is prevented from falling out of the axially offset insertion section. At the same time, the manufacture of the engagement structure can be simplified since it cuts in a circumferential manner Process, for example, can be manufactured by turning. Paragraphs in the contour of the engagement structure, which are intended to prevent an undesired loss of the load-carrying means at the insertion section and thus to prevent the pump from falling, can be omitted. Furthermore, any insertion channel can advantageously be produced through the end face of the pump body with a tool in only one process and without complicated axial immersion of the tool.

In the case of a plurality of engagement structures, an insertion channel can be continued through an engagement structure to a further engagement structure or a plurality of insertion channels can each be guided from different directions to the engagement structures. Such an insertion channel can also be arranged at different angles to the longitudinal axis of the pump or can be designed by displacements or angles so that it advantageously makes it difficult or impossible to lose or unintentionally move out of the load-carrying means.

An insertion channel can be formed within only one component of the pump body, so that it is possible to insert the load suspension means before the components, for example the lower part and the housing, are assembled. After the components have been joined, such an insertion channel can be covered or blocked by the respectively adjacent part, so that the load suspension means cannot be removed and thus cannot be lost and is permanently inserted in the engagement structure so that it can move. Such blocking of the insertion section or insertion channel is also possible by inserting, pressing in, gluing and / or the one-time and / or permanent fastening of a blocking agent in the insertion section or insertion channel.

The above statements regarding the vacuum pump according to the invention also apply correspondingly to the arrangement according to the invention and the method for handling and / or mounting a vacuum pump.

Fig. 1

eine perspektivische Ansicht einer Turbomolekularpumpe,

Fig. 2

eine Ansicht der Unterseite der Turbomolekularpumpe von Fig. 1,

Fig. 3

einen Querschnitt der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie A-A,

Fig. 4

eine Querschnittsansicht der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie B-B,

Fig. 5

eine Querschnittsansicht der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie C-C,

Fig. 6

eine Seitenansicht einer Turbomolekularpumpe gemäß einer Ausführungsform der Erfindung,

Fig. 7

einen Querschnitt längs der in Fig. 6 gezeigten Turbomolekularpumpe,

Fig. 8

einen Detailquerschnitt der in Fig. 6 gezeigten Turbomolekularpumpe,

Fig. 9

einen Detailquerschnitt der in Fig. 6 gezeigten Turbomolekularpumpe mit eingefügten Nutenstein und befestigter Augenschraube,

Fig. 10

einen Querschnitt längs der in Fig. 6 gezeigten Turbomolekularpumpe mit eingefügtem Nutenstein und befestigter Augenschraube,

Fig. 11

eine Seitenansicht einer Turbomolekularpumpe gemäß einer weiteren Ausführungsform der Erfindung.

The invention is described below by way of example using advantageous embodiments with reference to the accompanying figures. Each shows schematically:

Fig. 1

a perspective view of a turbomolecular pump,

Fig. 2

a bottom view of the turbomolecular pump of FIG Fig. 1 .

Fig. 3

a cross section of the turbomolecular pump along the in Fig. 2 shown section line AA,

Fig. 4

a cross-sectional view of the turbomolecular pump along the in Fig. 2 shown section line BB,

Fig. 5

a cross-sectional view of the turbomolecular pump along the in Fig. 2 shown section line CC,

Fig. 6

2 shows a side view of a turbomolecular pump according to an embodiment of the invention,

Fig. 7

a cross section along the in Fig. 6 turbomolecular pump shown,

Fig. 8

a detailed cross section of the in Fig. 6 turbomolecular pump shown,

Fig. 9

a detailed cross section of the in Fig. 6 shown turbomolecular pump with inserted sliding block and attached eyebolt,

Fig. 10

a cross section along the in Fig. 6 shown turbomolecular pump with inserted sliding block and attached eyebolt,

Fig. 11

a side view of a turbomolecular pump according to a further embodiment of the invention.

In the Fig. 1 The turbomolecular pump 111 shown comprises a pump inlet 115 surrounded by an inlet flange 113, to which a recipient, not shown, can be connected in a manner known per se. The gas from the recipient can be sucked out of the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117, to which a backing pump, such as a rotary vane pump, can be connected.

The inlet flange 113 forms in accordance with the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111. The housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged on the side. Electrical and / or electronic components of the vacuum pump 111 are accommodated in the electronics housing 123, for example for operating an electric motor 125 arranged in the vacuum pump. Several connections 127 for accessories are provided on the electronics housing 123. In addition, a data interface 129, for example in accordance with the RS485 standard, and a power supply connection 131 are arranged on the electronics housing 123.

A flood inlet 133, in particular in the form of a flood valve, is provided on the housing 119 of the turbomolecular pump 111, via which the vacuum pump 111 can be flooded. In the area of the lower part 121 there is also a sealing gas connection 135, which is also referred to as a purge gas connection, via which purge gas to protect the electric motor 125 from the one pumped by the pump Gas can be brought into the engine compartment 137, in which the electric motor 125 is housed in the vacuum pump 111. Furthermore, two coolant connections 139 are arranged in the lower part 121, one of the coolant connections being provided as an inlet and the other coolant connection being provided as an outlet for coolant, which can be guided into the vacuum pump for cooling purposes.

The lower side 141 of the vacuum pump can serve as a standing surface, so that the vacuum pump 111 can be operated standing on the underside 141. However, the vacuum pump 111 can also be attached to a recipient via the inlet flange 113 and can thus be operated in a manner of hanging. In addition, the vacuum pump 111 can be designed so that it can also be operated if it is aligned in a different way than in FIG Fig. 1 is shown. Embodiments of the vacuum pump can also be realized, in which the underside 141 cannot be arranged facing downwards, but turned to the side or directed upwards.

At the bottom 141, which in Fig. 2 is shown, various screws 143 are also arranged, by means of which components of the vacuum pump, which are not further specified here, are fastened to one another. For example, a bearing cover 145 is attached to the underside 141.

Fastening bores 147 are also arranged on the underside 141, via which the pump 111 can be fastened, for example, to a support surface.

In the Figures 2 to 5 A coolant line 148 is shown in which the coolant introduced and discharged via the coolant connections 139 can circulate.

Like the sectional views of the Figures 3 to 5 show, the vacuum pump comprises a plurality of process gas pump stages for conveying the process gas present at the pump inlet 115 to the pump outlet 117.

A rotor 149 is arranged in the housing 119 and has a rotor shaft 153 rotatable about an axis of rotation 151.

The turbomolecular pump 111 comprises a plurality of turbomolecular pump stages connected in series with one another in a pumping manner, with a plurality of radial rotor disks 155 fastened to the rotor shaft 153 and stator disks 157 arranged between the rotor disks 155 and fixed in the housing 119. A rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one pump stage. The stator disks 157 are held at a desired axial distance from one another by spacer rings 159.

The vacuum pump also comprises Holweck pump stages which are arranged one inside the other in the radial direction and have a pumping effect and are connected in series with one another. The rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylindrical jacket-shaped Holweck rotor sleeves 163, 165 fastened to and supported by the rotor hub 161, which are oriented coaxially to the axis of rotation 151 and nested one inside the other in the radial direction. Furthermore, two cylindrical jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the axis of rotation 151 and are nested one inside the other in the radial direction.

The pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, that is to say by the radial inner and / or outer surfaces, of the Holweck rotor sleeves 163, 165 and of the Holweck stator sleeves 167, 169. The radial inner surface of the outer Holweck stator sleeve 167 lies against the radial outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171 opposite and forms with this the first Holweck pump stage following the turbomolecular pumps. The radial inner surface of the outer Holweck rotor sleeve 163 faces the radial outer surface of the inner Holweck stator sleeve 169 with the formation of a radial Holweck gap 173 and forms a second Holweck pump stage with the latter. The radial inner surface of the inner Holweck stator sleeve 169 lies opposite the radial outer surface of the inner Holweck rotor sleeve 165, forming a radial Holweck gap 175, and forms the third Holweck pumping stage therewith.

At the lower end of the Holweck rotor sleeve 163, a radially extending channel can be provided, via which the radially outer Holweck gap 171 is connected to the central Holweck gap 173. In addition, a radially extending channel can be provided at the upper end of the inner Holweck stator sleeve 169, via which the central Holweck gap 173 is connected to the radially inner Holweck gap 175. As a result, the nested Holweck pump stages are connected in series. At the lower end of the radially inner Holweck rotor sleeve 165, a connection channel 179 to the outlet 117 can also be provided.

The aforementioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running spirally around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive the vacuum pump 111 in the Holweck grooves.

For the rotatable mounting of the rotor shaft 153, a roller bearing 181 is provided in the area of the pump outlet 117 and a permanent magnet bearing 183 in the area of the pump inlet 115.

In the area of the roller bearing 181, a conical spray nut 185 is provided on the rotor shaft 153 with an outer diameter increasing toward the roller bearing 181. The injection nut 185 is in sliding contact with at least one scraper of an operating fluid reservoir. The operating medium storage comprises a plurality of absorbent disks 187 stacked one on top of the other, which are provided with an operating medium for the rolling bearing 181, e.g. are soaked with a lubricant.

During the operation of the vacuum pump 111, the operating medium is transferred by capillary action from the operating medium storage via the wiper to the rotating spray nut 185 and, as a result of the centrifugal force along the spray nut 185, is conveyed in the direction of the increasing outer diameter of the spray nut 92 to the roller bearing 181, where it eg fulfills a lubricating function. The roller bearing 181 and the operating fluid reservoir are enclosed in the vacuum pump by a trough-shaped insert 189 and the bearing cover 145.

The permanent magnet bearing 183 comprises a bearing half 191 on the rotor side and a bearing half 193 on the stator side, each of which comprises an annular stack of a plurality of permanent magnetic rings 195, 197 stacked on one another in the axial direction. The ring magnets 195, 197 lie opposite one another to form a radial bearing gap 199, the rotor-side ring magnets 195 being arranged radially on the outside and the stator-side ring magnets 197 being arranged radially on the inside. The magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause the rotor shaft 153 to be supported radially. The rotor-side ring magnets 195 are carried by a carrier section 201 of the rotor shaft 153, which radially surrounds the ring magnets 195 on the outside. The stator-side ring magnets 197 are carried by a stator-side carrier section 203 which extends through the ring magnets 197 and is suspended from radial struts 205 of the housing 119. The ring magnets 195 on the rotor side are parallel to the axis of rotation 151 through a cover element coupled to the carrier section 203 207 set. The stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203. A plate spring 213 can also be provided between the fastening ring 211 and the ring magnet 197.

An emergency or catch bearing 215 is provided within the magnetic bearing, which runs empty without contact during normal operation of the vacuum pump 111 and only comes into engagement with an excessive radial deflection of the rotor 149 relative to the stator in order to provide a radial stop for the rotor 149 form, since a collision of the rotor-side structures with the stator-side structures is prevented. The catch bearing 215 is designed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator, which causes the catch bearing 215 to be disengaged in normal pumping operation. The radial deflection at which the catch bearing 215 engages is dimensioned large enough that the catch bearing 215 does not engage during normal operation of the vacuum pump, and at the same time is small enough so that the rotor-side structures collide with the stator-side structures under all circumstances is prevented.

The vacuum pump 111 comprises the electric motor 125 for rotatingly driving the rotor 149. The armature of the electric motor 125 is formed by the rotor 149, the rotor shaft 153 of which extends through the motor stator 217. A permanent magnet arrangement can be arranged radially on the outside or embedded on the section of the rotor shaft 153 which extends through the motor stator 217. Between the motor stator 217 and the section of the rotor 149 which extends through the motor stator 217, an intermediate space 219 is arranged which comprises a radial motor gap over which the the motor stator 217 and the permanent magnet arrangement for transmitting the drive torque can influence each other magnetically.

The motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125. A sealing gas, which is also referred to as a purge gas and which can be, for example, air or nitrogen, can enter the engine compartment 137 via the sealing gas connection 135. The electric motor 125 can be used before the process gas, e.g. protected against corrosive parts of the process gas. The engine compartment 137 can also be evacuated via the pump outlet 117, i.e. in the engine compartment 137 there is at least approximately the vacuum pressure caused by the backing pump connected to the pump outlet 117.

A so-called labyrinth seal 223, which is known per se, can also be provided between the rotor hub 161 and a wall 221 delimiting the motor space 137, in particular in order to achieve a better seal of the motor space 217 with respect to the radially outside Holweck pump stages.

The turbomolecular pumps of the Fig. 6 and 11 form vacuum pumps according to the invention. The 6 to 11 show details, which also with a turbomolecular pump according to the 1 to 5 can be provided, even if they are not expressly shown there.

Fig. 6 shows a side view of a turbomolecular pump according to an embodiment of the invention. The in the Figure 6 The turbomolecular pump 111 shown has an engagement structure 225. The engagement structure 225 is introduced into the outer circumference of the housing 119 as a groove-like depression, in particular as a T-groove. The engagement structure 225 extends at an angle to the longitudinal axis 227 of the pump housing 119. The engagement structure 225 and the longitudinal axis 227 of the pump housing 119 thus close in FIG Fig. 6 shown representation an angle with each other. In particular, the engagement structure 225 extends around the longitudinal axis 227. The engagement structure 225 runs in a particularly advantageous manner along a plane that is oriented orthogonally to the longitudinal axis 227 of the housing 119.

According to the invention, the position of the engagement structure 225 along the longitudinal axis 227 of the housing 119 is now selected as a function of a center of gravity 229 of the pump body of the turbomolecular pump 111. The center of gravity is determined according to all components of the turbomolecular pump 111, namely in particular the pump housing 119 and all pump components arranged in and on the housing 119, in particular in the configuration present when the pump 111 is installed on a recipient. In this way, the turbomolecular pump 111 can be raised in a particularly advantageous manner by means of a fastening element in the engagement structure 225 and aligned in the raised position by rotation about the longitudinal axis 227, without any special effort being required to maintain the desired inclined position of the longitudinal axis 227 in space Operator is required.

The engagement structure 225 can be equipped with an insertion section 231 for introducing a fastening means into the engagement structure 225. The insertion section can, for example, by interrupting a T-shape and / or by omitting projections 235 for the positive engagement behind a fastening element - as in FIG Fig. 8 shown and detailed below - be formed. A fastening element can thus be introduced into the engagement structure 225 in the region of the insertion section 231 and then brought into positive engagement with the latter by displacement along the course of the engagement structure 225.

Fig. 7 shows a cross section along the in Fig. 6 turbomolecular pump 111 and shown Fig. 8 shows a detailed cross section of the in Fig. 6 shown turbomolecular pump 111. In the Fig. 7 and 8th It can be seen that the engagement structure 225 in the present exemplary embodiment is a groove-like depression with a T-shaped cross section 233. In particular, the engagement structure in this case has the projections 235, which can positively engage behind an inserted fastening element, such as a sliding block. In the area of the insertion section 231, the T-shaped cross section 233 can be interrupted by omitting the projections 235, so that a fastening element, such as a sliding block, can be inserted in a manner that is easy to handle.

Fig. 9 shows a detailed cross section of the in Fig. 6 The turbomolecular pump 111 shown with the sliding block 237 inserted and the eyebolt 239 fastened or integrally formed with the sliding block 237. It can be seen that the fastening element 237 designed as a sliding block is inserted into the engagement structure 225 and engages in the projections 235 or the projections 235 in the fastening element 237 intervention.

In a direction transverse to the longitudinal axis 227 of the housing 119, the fastening element 237 designed as a sliding block is thus positively connected to the engagement structure 225. At the same time, the fastening element 237 can be displaced along the course of the engagement structure 225, in particular along a circumferential orientation or circumferential direction of the pump body or the housing 119, so that when the vacuum pump 111 is in the raised state, a handling-friendly rotation about the longitudinal axis 227 can take place. The rotational movement about the longitudinal axis 227 is suitably supported by the targeted guidance of the fastening element 237 within the engagement structure 225. A load-carrying device 239, such as an eyebolt, can be screwed into the fastening element 237.

The load suspension device 239 can be used for connection to a suspension device of a hoist or a separate lifting device.

Fig. 10 shows a cross section along the in Fig. 6 Turbomolecular pump 111 shown with inserted fastening element 237 and fastened load-bearing means 239. It can be seen that the fastening element 237 designed as a sliding block is inserted into the engagement structure 225 and a positive connection is established between the fastening element 237 and the engagement structure 225. At the same time, a load-carrying means 239 designed as an eyebolt is screwed into the fastening element 237, it also being possible to form the components 237 and 239 in one piece. A suspension device of a hoist or a separate lifting device can be attached to the load suspension device 239. Again Fig. 10 It can be seen that the force application point formed by the load suspension device 239 for a lifting device or for a suspension device of a hoist is located along the longitudinal axis 227 of the housing 119 at a height of the center of gravity 229 of the pump body.

The Fig. 11 shows a side view of a turbomolecular pump according to a further embodiment of the invention. The in the Fig. 11 The turbomolecular pump 111 shown has a total of two engagement structures 225, which likewise run in the circumferential direction of the housing 119 on its outer circumference. Each engagement structure 225 runs along a plane which is arranged orthogonally to the longitudinal axis 227 of the housing 119 or the pump body of the turbomolecular pump 111. Each engagement structure 225 is in turn designed as a groove-like depression, in particular with a T-shape, and moreover has an insertion section 231 in which the T-shape is interrupted.

The Fig. 11 it can also be seen that the center of gravity 229 of the pump body along the longitudinal axis 227 between the two engagement structures 225 is arranged. The two engagement structures 225 are accordingly arranged axially on both sides of the center of gravity 229. The engagement structures 225 have different axial distances from the center of gravity 229. It is also possible for the axial distance of an engagement structure 225 to the center of gravity 229 to match the axial distance of a further engagement structure 225 to the center of gravity 229 ((quasi) equidistant arrangement), which is not shown here.

The in the 6 to 11 Engagement structures 225 shown by way of example and the concepts generally described in the introduction to the description can also be used in the embodiments according to FIGS 1 to 5 be provided, although not shown or explained there. This applies to all details relating to the arrangement and / or configuration of the engagement structure on the pump body or the pump housing 119 of the turbomolecular pump 111. Likewise, all or individual details of those shown in FIGS 1 to 5 Turbomolecular pump 111 shown and described accordingly also in the in the 6 to 11 Embodiments of the turbomolecular pump 111 shown can be provided.

LIST OF REFERENCE NUMBERS

111

Turbo molecular pump

113

inlet flange

115

pump inlet

117

pump outlet

119

casing

121

lower part

123

electronics housing

125

electric motor

127

accessory port

129

Data Interface

131

Power connector

133

flood inlet

135

Sealing gas connection

137

engine compartment

139

Coolant connection

141

bottom

143

screw

145

bearing cap

147

mounting hole

148

Coolant line

149

rotor

151

axis of rotation

153

rotor shaft

155

rotor disc

157

stator

159

spacer ring

161

rotor hub

163

Holweck rotor sleeve

165

Holweck rotor sleeve

167

Holweck stator

169

Holweck stator

171

Holweck gap

173

Holweck gap

175

Holweck gap

179

connecting channel

181

roller bearing

183

Permanent magnetic bearings

185

spray mother

187

disc

189

commitment

191

half of the bearing on the rotor side

193

stator side bearing half

195

ring magnet

197

ring magnet

199

bearing gap

201

support section

203

support section

205

radial strut

207

cover element

209

support ring

211

fixing ring

213

Belleville spring

215

Emergency or catch camp

217

motor stator

219

gap

221

wall

223

labyrinth seal

225

engagement structure

227

longitudinal axis

229

Center of gravity

231

insertion

233

T-shaped cross section

235

head Start

237

fastener

239

Load handling devices

Claims (14)

1. A vacuum pump (111), in particular a turbomolecular pump, comprising a pump body and a fastening apparatus formed thereat for handling and/or installing the vacuum pump (111), wherein the fastening apparatus has at least one engagement structure (225) for connecting a fastening element (237) to the pump body; wherein the engagement structure (225) extends at the outer periphery of the pump body at least section-wise at an angle to its longitudinal extent (227); and
   wherein a position and/or an arrangement of the fastening apparatus along the longitudinal extent (227) of the pump body is/are selected in dependence on the center of gravity (229) of the pump body, characterized in that the engagement structure (225) is configured to displaceably guide the fastening element (237).
2. A vacuum pump (111) in accordance with claim 1,
   characterized in that
   the engagement structure (225) is configured to displaceably guide a fastening element (237) along a peripheral orientation of the pump body.
3. A vacuum pump (111) in accordance with claim 1 or claim 2,
   characterized in that
   the at least one engagement structure (225) extends along a peripheral orientation of the pump body, in particular orthogonally or substantially orthogonally to the longitudinal extent (227) of the pump body, and/or with the engagement structure (225) running around the outer periphery of the pump body section-wise or completely and/or continuously.
4. A vacuum pump (111) in accordance with at least one of the preceding claims,
   characterized in that
   the at least one engagement structure (225) is axially positioned at the level of the center of gravity (229) of the pump body.
5. A vacuum pump (111) in accordance with at least one of the preceding claims,
   characterized in that
   the fastening apparatus has a plurality of engagement structures (225), and/or with at least two engagement structures (225) being positioned axially at both sides of the center of gravity (229) of the pump body, in particular axially encompassing the center of gravity (229) of the pump body, and/or with the axial spacing of an engagement structure (225) from the center of gravity (229) coinciding with the axial spacing of a further engagement structure (225) from the center of gravity (229), and/or with the engagement structures (225) having different axial spacings from the center of gravity (229).
6. A vacuum pump (111) in accordance with at least one of the preceding claims,
   characterized in that
   the engagement structure (225) is configured as a groove-like depression, preferably as a T-slot, and/or is configured to receive at least one slot nut, and/or with a slot nut being displaceable within the groove-like depression.
7. A vacuum pump (111) in accordance with at least one of the claims 1 to 5,
   characterized in that
   the at least one engagement structure is configured as a web-like projection and/or is configured to guide a fastening element formed in a complementary manner, in particular a slot nut having a groove-like depression formed therein.
8. A vacuum pump (111) in accordance with at least one of the preceding claims,
   characterized in that
   the engagement structure (225) has an introduction section (231) for a fastening element (237), and/or with the introduction section (231) being configured to introduce a fastening element (237) transversely to the longitudinal extent of the engagement structure (225), and/or with the introduction section (231) being formed by an interruption of a cross-sectional shape (233), in particular by an interruption of a T-shaped cross-section and/or by an omission of projections (235) for a shape-matched engagement behind a fastening element (237).
9. A vacuum pump (111) in accordance with at least one of the preceding claims,
   characterized in that
   the at least one engagement structure (225) is produced by machining, preferably by turning and/or milling, further preferably by a T-slot milling cutter, and/or with the engagement structure (225) being formed into the pump body by a chip-forming processing thereof.
10. A vacuum pump (111) in accordance with at least one of the preceding claims,
    characterized in that
    the pump body is formed by a housing (119, 121) and by least one pump component arranged in and/or at the housing (119, 121), in particular by a plurality of pump components, and/or with the housing (119, 121) being configured in multiple parts, and/or with at least one pump component being configured as a rotor (149), and/or with the housing (119, 121) forming a stator or being connected to a stator, and/or with the rotor (149) being rotatingly supported about an axis of rotation (151) which extends along the longitudinal extent of the pump body and/or through its center of gravity (229) and which in particular coincides with a centroidal axis of the pump body.
11. A vacuum pump (111) in accordance with claim 10,
    characterized in that
    the fastening apparatus is formed at the housing (119, 121), and/or with the housing (119, 121) encompassing the at least one pump component, and/or with the housing (119, 121) having a longitudinal extent and/or an angular and/or substantially round outer periphery, preferably a circular outer periphery, and/or with the longitudinal extent of the housing (119, 121) being larger than a housing diameter, in particular than a mean housing diameter and/or than the largest or smallest housing diameter.
12. A vacuum pump (111) in accordance with at least one of the preceding claims,
    characterized in that
    the pump body, in particular the housing (119, 121), has a reinforcement in the region of and/or adjacent to the at least one engagement structure (225), and/or with the housing (119, 121) having a larger wall thickness in the region of and/or adjacent to the engagement structure (225) than in the remaining housing sections.
13. An arrangement for handling and/or installing a vacuum pump (111) having a lifting tool comprising a carrying means; having a vacuum pump (111) in accordance with at least one of the preceding claims; having at least one fastening element (237), preferably a slot nut, displaceably positioned in or at the engagement structure (225); and having a load receiving means (239) which is connected to the fastening element (237) and which is preferably configured as an eye bolt, with the load receiving means (239) preferably being connected to the carrying means.
14. A method of handling and/or installing a vacuum pump (111), preferably in accordance with any one of the claims 1 to 12 or using an arrangement in accordance with claim 13,

    - in which a lifting tool is connected to the vacuum pump (111) via a fastening element (237) arranged in and/or at an engagement structure (225) of the vacuum pump (111);

    - in which the vacuum pump (111) is raised by the lifting tool;

    - in which the vacuum pump (111) is oriented in space by rotation about a longitudinal axis (227), in particular about a rotor axis and/or a centroidal axis; and

    - in which the fastening element (237) is displaced guided in and/or at the engagement structure (225) of the vacuum pump (111) by the rotation of the vacuum pump (111) in space.

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