JP6824238B2 - Methods and equipment for handling and / or assembling vacuum pumps and vacuum pumps - Google Patents

Description

The present invention relates to vacuum pumps, in particular turbo molecular pumps, and methods and devices for handling and / or assembling vacuum pumps.

Vacuum pumps are often used in equipment where each vacuum pump needs to be fixed horizontally. This is especially true for turbomolecular pumps with suction performance classes higher than 1000 l / s. In this case, the volumetric flow rate that can be conveyed every unit time through the cross-sectional area or the portion that exerts the pumping effect is seen as the suction performance. Such pumps can be heavy due to their structural size. Therefore, such pumps are usually lifted only with lever assistance. Similarly, the alignment of the pump and its fixation in each intended device also requires appropriate lever assistance.

From the prior art, it is known to lift a heavy pump by wrapping a loop. At that time, it is possible to use a lifting device such as a crane that is manually operated, for example. However, lifting the pump by wrapping the loop is risky. The pump slides out of the loop and falls, which can cause severe damage and injury.

Further, it is known to provide at least one thread in the housing of the pump. An eye screw can be screwed into this screw thread. Then, for each has up process, and assembly process, the hooks have up device is fitted into the eye screw. This guarantees a relatively reliable lifting process. However, in order to assemble the pump, it is necessary not only to lift it but also to adjust the direction of the pump in the space. This can only be done with significant difficulty in the fixed predetermined position of the eye screw in the housing. In particular, this purpose requires the use of significant manual force , which makes it even more difficult to assemble the pump in its final state without damage.

European Patent Application Publication No. 1293682

Against this background, an object of the present invention is to provide a vacuum pump that is easy to handle and can be lifted, oriented, and / or assembled. Another object is to provide equipment for handling the vacuum pump, and / or assembly, and a method.

With respect to the vacuum pump, this problem is solved by the feature according to claim 1. Engaging Ru equipment to the invention are the subject of claim 13, and method according to the invention are described in claim 14. Advantageous embodiments are described in the dependent claims and are described in detail below.

The vacuum pump according to the invention can be a turbo molecular pump in particular, but has a pump body and a fixing device formed therein. The fixing device has at least one engaging structure for connecting the fixing element to the pump body. The fixed element can be, for example, a channel stone (see eg DIN508). Channel stones are inserted into the engagement structure and allow so-called eye screws, or ring screws (see, eg, DIN 580) to be screwed in. According to the invention, the engaging structure extends at an angle to its longitudinal extension, at least in part, on the outer circumference of the pump body. The engaging structure is not along, or at least not exactly, along the longitudinal extension of the pump body, with an angle to it. This allows the pump body to be lifted and directed around a longitudinal extension as the fixation element slides within the engagement structure.

According to the invention, the position and / or arrangement of the fixing device is selected along the longitudinal extension of the pump body, i.e. axially, according to the weight center of gravity of the pump body. Each desired tilt of the pump body in space is maintained with little effort by each operator, depending on the position and / or placement of the anchoring device along the longitudinal extension of the pump body according to the center of gravity. It can be guaranteed that it is possible. This makes the handling of the vacuum pump and thus the assembly easier as a whole.

According the invention, a fixing element, in particular form-fitting connection, in the engagement structure, or provided in the engagement structure, if example embodiment, via the eye screw, may make up the connection to the lifting device there. After that, it is possible to rotate the pump body about the longitudinal axis in the lifted state, but at that time, it is very difficult to maintain the position of the longitudinal axis of the pump body in the space. No effort is required. Correspondingly easily, within the engagement structure, or without the risk of tilting each fixing element used in the engagement structure, of the rotational position of the pump body around the longitudinal axis or longitudinal extension. Accurate adjustment is possible. The overall handling effort, as well as the assembly effort, can thus be done with less manual effort.

Advantageously, an engaging structure is formed for the slidable guidance of the fixing element. This is especially for sliding guidance along the circumferential direction of the pump body. The slidable guides allow for easy alignment of the rotational state of the pump body in the lifted state without the risk of handling errors or injury. In particular, the slidable guide prevents the fixing means from tilting during the rotation of the pump body around the longitudinal axis, and with the accompanying sliding of the fixing means, in the engaging structure, or in the engaging structure. Is guaranteed.

According to an advantageous embodiment, the at least one engaging structure extends along the circumferential direction of the pump body, in particular at right angles to the longitudinal extension of the pump body, or essentially at right angles. In this way, the longitudinal axis or orienting in the longitudinal direction of extending around the pump body, can be particularly easily performed.

The engaging structure can orbit the outer circumference of the pump body partially or completely. The partially provided engagement structure then allows orientation between the two critical angular positions, so the position of the partially provided engagement structure is a directional reference for the final assembly position. Can be achieved. In a fully orbiting engaging structure, the pump body rotates completely about its longitudinal axis in the lifted state, so that all rotational positions are adjusted relative to the final assembly position. It is possible.

Advantageously, the engaging structure then extends seamlessly to the outer circumference. Correspondingly, the engaging structure is provided or provided in a ring shape within the outer circumference of the pump body, and is thus formed endlessly. That is, the beginning and end of the engaging structure seamlessly transition to each other in the latter aspect.

Particularly preferably, at least one engaging structure is arranged axially at the height of the weight center of gravity of the pump body. Correspondingly, at least one engaging structure is located at a position that coincides with the longitudinal extension of the pump body, or with respect to the longitudinal axis, the longitudinal extension, or the position of the center of gravity of the pump body along the longitudinal axis. Have been placed. In this way, easy assembly can be guaranteed with only one engaging structure. Thus, this arrangement of engaging structures allows the basically horizontal orientation of the pump body to be maintained in the lifted state of the vacuum pump without additional supporting effort by the operator.

According to an advantageous aspect of the vacuum pump according to the invention, the fixing device has a plurality of engaging structures. The multiple engagement structures increase the fixation certainty of each lifting means and also enhance the position stability of the pump in the lifted state.

At that time, at least two engaging structures are advantageously arranged on both sides of the weight center of gravity of the pump body in the axial direction. In particular, the two engaging structures axially surround the center of gravity of the weight. Thus, along the longitudinal axis of the pump body, one engaging structure is located before the weight center of gravity and the other engaging structure is located behind the weight center of gravity. Unwanted tilting of the longitudinal axis in the space between lifting and / or assembling the vacuum pump can be reliably prevented in this way.

Particularly advantageously, the axial spacing of one engaging structure with respect to the center of gravity is chosen to match the axial spacing of the other engaging structure with respect to the center of gravity. This ensures a uniform load of each load receiving means or stopper means and / or each supporting means of the lifting device used. Similarly, it is possible for multiple engagement structures to have different axial spacings with respect to the center of gravity of weight, which provides greater degree of freedom in selecting the position of the individual engagement structures. To do.

More preferably, the engagement structure is formed as a grooved recess and / or to accommodate at least one channel stone. In doing so, preferably the channel stones may be slidable within the grooved depressions. The use of channel stones and the formation of an engaging structure as a corresponding grooved recess make it possible to save and facilitate the time of lifting the pump body. This is because channel stones can be connected to such an engaging structure in a few steps. The groove-shaped depression is preferably a T-shaped groove. Correspondingly, the groove has a T-shaped cross section. This makes it possible to make a shape-bonding connection with a fixing element (particularly a fixing element formed as a channel stone) particularly easily.

Similarly, at least one engaging structure is formed as a web- like protrusion and / or for guiding complementaryly formed fixing elements, especially channel stones with grooved indentations formed inside. It can be advantageous if it is done. The indentation surrounds, for example, a T-shaped web. Such web- like protrusions can be easily manufactured, and similarly, secure fixation and proper guidance of complementaryly formed fixing elements can be achieved.

Furthermore, the engagement structure having an insertion portion for the fixing element, and / or, for that case, the insertion portion is inserted in a direction transverse to the fixation element with respect to the longitudinal direction of extension of the engagement structure It can be advantageous if it is formed. Thus, each fixing element can be brought into or connected to the engaging structure only for the performance of each handling and assembly operation. After handling and assembling operations, the fixing element can be pulled away from the engaging structure again and, in some cases, reused.

The insertion portion can be formed by a break in the cross section, especially by a break in the T-shaped cross, and / or by omission of protrusions for shape-coupling engagement of the fixing element. .. For example, in the case of a groove-like depression, the insertion portion can be formed by the groove portion. This groove portion simply has a rectangular cross section and has no protrusions or a T-shape.

When the insert is present, the engagement structure is advantageously projections, and / or及beauty / or Ru narrowing the cross section of the engagement structure can have a step for shrink. Such protrusions and / or steps can preferably be provided in front of or behind the insertion portion, for example by steps in the cross section of the orbiting engaging structure. This allows the channel stone to be guided through the engagement structure without any load. However, under load, that is, with a pump suspended from it, special additional counterforce and slight tilt are required. This is to overcome the corresponding narrowing. Such an embodiment prevents inadvertent loss of the suspended load and unwanted fall when the channel stone slides into the area of the insertion portion.

In order to keep the manufacturing cost (manufacturing effort) for the engaging structure according to the invention low, it can be manufactured by cutting, preferably turning, and / or milling. When the engaging structure is formed as a T-groove, preferably a T-groove milling cutter can be used for manufacturing. This can be achieved inexpensively.

At that time, the engaging structure can be provided therein, especially by cutting the pump body. Correspondingly, for example, a part of the pump body can be made by a primary molding process and / or a molding process in its basic shape, and subsequently the engaging structure is a cutting process on the outer circumference of the pump body. Can be provided or made to this. This can be achieved with only a small manufacturing technology cost (labor).

According to an advantageous aspect of the vacuum pump according to the invention, the pump body is formed of a housing and / or at least one component provided in and / or in the housing. In particular, multiple pump components are provided within and / or in the housing. The balance of the entire pump body in the lifted state is particularly important, as the weight center of gravity point of the housing and the entire pump body including at least one pump component is critical to the position and / or placement of the anchoring device. It can be maintained with less manual force. In particular, this causes the individual components of the vacuum pump to become unbalanced in the lifted state, which unfavorably or undesirably adjusts the tilt of the longitudinal axis in the lifted space. Is prevented.

Advantageously, the housing of the vacuum pump can be formed in a multi-part style (multi-piece) . This simplifies the assembly of the individual members of the pump or increases the structural margin.

At least one pump component can be formed as a rotor, and the housing can form a stator or be connected to a stator. This guarantees a space-saving structure. More preferably, the rotor of the vacuum pump is supported to rotate about a rotation axis. The axis of rotation extends along the longitudinal extension of the pump body and / or through its weight center of gravity. This is particularly consistent with the axis of the center of gravity of the pump body (German: Schwerachse). With such an arrangement, it is possible to align the pump body around the rotation axis of the rotor particularly easily. Each pump inlet, or pump outlet, of the vacuum pump can therefore be easily oriented to each device to perform the necessary assembly work thereafter.

According to an advantageous aspect of the vacuum pump according to the invention, the housing has a longitudinal extension and / or a rectangular outer circumference and / or a essentially round outer circumference, preferably a circular outer circumference. In this way, each pump components can be brought only in the interior of the compact housing construction space have little. With a rounded perimeter, each pump rotor can be brought into a housing formed as a stator to save space.

Further, it may be advantageous for the longitudinal extension of the housing to be greater than the housing diameter, in particular greater than the average housing diameter and / or the maximum or minimum housing diameter. In this case, the housing as a whole has a long shape. This allows multiple pump stages or rotors to be placed within the housing, thus achieving high pump performance.

Advantageously, the pump body, especially the pump housing, can have reinforcements adjacent to at least one engaging structure. With such a reinforcing portion, it is possible to enhance the fixing stability. In particular, this makes it possible to prevent the fixing element from being deformed by unwanted deformation of the region of the pump body adjacent to the engaging structure, thereby disengaging from the engaging structure. This reduces the risk of the pump falling. Such reinforcements of the pump body are intended to have a thicker wall thickness in the area of the engagement structure and / or in the area adjacent to the engagement structure than in other pump body parts, especially the housing part. Achieved.

According to another aspect of the present invention, equipment for handling and / or assembly of the vacuum pump it is intended. It has a lifting tool with supporting means and the vacuum pump described above. In addition, there is at least one fixed element, preferably a channel stone, that is slidably arranged within or into the engaging structure (eg, groove or web) and load receiving means. The load receiving means is connected to or integrally formed with a fixed element, and is preferably formed as an eye screw. At that time, the load receiving means is preferably connected to the supporting means, which is directly or indirectly connected via the stopper means. This is, for example, in the form of a carrier belt or a lifting belt.

Such equipment, a vacuum pump less effort described above, and a high degree, securely lifted, handled, and subsequently can be assembled to each facility in the desired final position. In the lifted state, by applying only a small manual force, it is possible to extend in the longitudinal direction or rotate the pump body about the longitudinal axis, and thus the desired orientation of the pump body in space. , Or the rotation position can be adjusted. In doing so, the fixing element is slidably arranged, for example, in a groove-like recess or in a protrusion of the pump body, thus supporting rotational movement during handling.

Another aspect of the invention relates to a method for handling and / or assembling a vacuum pump. The vacuum pump is preferably the vacuum pump described above. Preferably, such a method can be performed using the above-described equipment. At that time, the vacuum pump according to the invention is lifted by a lifting device and then oriented in space by rotation about a longitudinal axis and / or a rotor axis. In doing so, the rotation of the vacuum pump in space causes at least one fixed element, preferably a channel stone, to be guided and slid in and / or within the engaging structure of the vacuum pump. The guided slide of the fixed element allows for controlled rotation of the pump body around the longitudinal axis, so accurate orientation in space can be guaranteed with little manual effort. ..

According to another aspect of the invention, the insertion portion is formed as a branched groove with respect to the orbiting engaging structure, especially in the form of an insertion channel. Such insertion channels can, for example, exit (open) in front of the pump body and / or open into an insertion portion axially offset with respect to the engaging structure. The load receiving means can be inserted directly axially or by burial.

When providing such an insertion channel, the orbiting disposition of the load receiving means can be uninterrupted along the orbiting engagement structure. This is because the load receiving means is prevented from falling off from the insertion portion shifted in the axial direction. At the same time, the manufacture of the engagement structure can be simplified. This is because it can be manufactured in a purely orbiting cutting process, for example in turning. Unwanted loss of the load receiving means at the insertion site and steps in the contour of the engaging structure to prevent the pump from falling can be omitted. Further, advantageously, the insertion channel can be manufactured through the front of the pump body by the tool in only one step, without burial in the complex axial direction of the tool.

In a plurality of engagement structures, the insertion channel can penetrate the engagement structure and continue to another engagement structure, or multiple insertion channels in different directions are engaged. It is also possible to be guided to the structure. Such insertion channels can also be located at different angles with respect to the longitudinal axis of the pump, or offsets, or angles, are less likely to cause loss or unwanted dropout of the load receiving means. It can be configured to be or be prevented.

The insertion channel can be formed within only one component of the pump body. As a result, the load receiving means can be inserted before the plurality of components, such as the lower member, and the housing are put together. Since such insertion channels can be covered or blocked by each adjacent member after joining the plurality of components, the load receiving means is irretrievable and thus lost. It remains movable within the engagement structure for long periods of time. Such blocking of the insertion part, or insertion channel, is such that the blocking means is inserted into the insertion part, or insertion channel, press-fitted, affixed, and / or fixed once, and / or over a long period of time. It is possible by fixing.

The above description for the vacuum pump according to the invention applies correspondingly to the apparatus according to the invention and the method for handling and / or clinging the vacuum pump.

Hereinafter, the present invention will be described based on an advantageous embodiment with reference to the accompanying drawings. The figure briefly shows the following.

Perspective view of turbo molecular pump Lower view of the turbo molecular pump of FIG. Sectional view of turbo molecular pump along line AA shown in FIG. Sectional view of the turbo molecular pump along line BB shown in FIG. Sectional view of the turbo molecular pump along the line CC shown in FIG. Side view of a turbo molecular pump according to one embodiment of the present invention Sectional view of the turbo molecular pump shown in FIG. Detailed cross-sectional view of the turbo molecular pump shown in FIG. A detailed cross-sectional view of the turbo molecular pump shown in FIG. 6, the turbo molecular pump has an inserted sliding block and a fixed eye screw. Sectional view along the turbo molecular pump shown in FIG. 6, the turbo molecular pump has an inserted sliding block and a fixed eye screw. Side view of a turbo molecular pump according to another embodiment of the present invention

The turbo molecular pump 111 shown in FIG. 1 has a pump inlet 115 surrounded by an inlet flange 113. Recipients (not shown) can be connected to the pump inlet by known methods. Gas from the recipient can be drawn from the recipient via the pump inlet 115 and transported through the pump to the pump outlet 117. A pre-vacuum pump (eg, a rotary vane pump) can be connected to the pump outlet.

The inlet flange 113 forms the upper end of the housing 119 of the vacuum pump 111 in the orientation of the vacuum pump of FIG. Housing 119 has a lower portion 121. It is provided with an electronics housing 123 on the side. The electrical and / or electronic components of the vacuum pump 111 are housed within the electronics housing 123. These are, for example, for operating an electric motor 125 arranged in a vacuum pump. The electronics housing 123 is provided with a plurality of connections 127 for accessories. Further, a data interface 129 (e.g., according to RS485 standard) and a power supply connection 131 are provided in the electronics housing 123.

The housing 119 of the turbo molecular pump 111 is provided with a flow inlet 133, especially in the form of a flow valve. Through this, the vacuum pump 111 can receive overflow. A seal gas connection portion 135 (also referred to as a cleaning gas connection portion) is further provided in the region of the lower portion 121. Through this, the cleaning gas can be taken into the motor chamber 137 in order to protect the electric motor 15 against the gas conveyed by the pump. The electric motor 125 of the vacuum pump 111 can be housed in the motor chamber. Two more cooling medium connecting portions 139 are provided in the lower portion 121. At that time, one cooling medium connection portion is provided as an inlet of the cooling medium, and the other cooling medium connection portion is provided as an outlet. The cooling medium can be guided into the vacuum pump for cooling purposes.

Since the lower surface of the vacuum pump can be used as an upright surface, the vacuum pump 111 can be operated upright on the lower side surface 141. However, the vacuum pump 111 can also be fixed to the recipient via the inlet flange 113, which allows it to be suspended and operated, so to speak. Further, the vacuum pump 111 can be configured so that it can be operated even when it is oriented differently from that shown in FIG. It is also possible to realize an embodiment of a vacuum pump in which the lower side surface 141 is arranged to be sideways or upwards rather than downwards.

Various screws 143 are further provided on the lower side surface 141 shown in FIG. By these, the members of the vacuum pump, which are not specified here in detail, are fixed to each other. For example, bearing cover 145 is fixed to the lower surface 14 1.

The lower side surface 141 is further provided with a fixing hole 147. Through this, the pump 111 can be fixed to, for example, a mounting surface.

FIGS. 2 to 5 show the cooling medium pipe 148. It is possible that the cooling medium introduced or derived via the cooling medium connecting portion 139 circulates therein.

As shown in the cross-sectional views of FIGS. 3-5, the vacuum pump has a plurality of process gas pump stages. This is for transporting the process gas reaching the pump inlet 115 to the pump outlet 117.

A rotor 149 is arranged in the housing 119. This rotor has a rotor shaft 153 that can rotate around the rotation shaft 151.

Turbomolecular pump 111 includes a plurality of turbomolecular pump stages connected serially to each other physician that Sosu the pumping effect. These pump stages have a plurality of radial rotor discs 155 fixed to the rotor shaft 153 and stator discs 157 arranged between the rotor discs 155 and fixed within the housing 119. At that time, one rotor disc 155 and one stator disc 157 adjacent thereto each form one turbo molecular pump stage. The stator discs 157 are held by spacer rings 159 at desired axial spacings from each other.

The vacuum pumps also have Holbeck pump stages that are radially spaced together and serially connected to each other to perform pumping action. The rotor side of the Holbeck pump stage has a rotor hub 161 provided on the rotor shaft 153 and two Holbeck rotor sleeves 163,165 in a cylinder side shape fixed to and supported by the rotor hub 161. There is. They are oriented coaxially with the axis of rotation 151 and are nested together in the radial direction. Further, two Holbeck stator sleeves 167 and 169 having a cylinder side shape are provided. They are also oriented coaxially with respect to the axis of rotation 151 and are nested to each other in the radial direction.

The surface of the Holbeck pump stage that exerts the pumping effect is formed by the sides, i.e., the radial inner and / or outer surfaces of the Holbeck rotor sleeves 163,165 and the Holbeck stator sleeves 167,169. The radial inner surface of the outer Holbæk stator sleeve 167 faces the radial outer surface of the outer Holbæk rotor sleeve 163, forming a radial Holbæk gap 171 and with this to the turbomolecular pump. A subsequent first Holbæk pump stage is formed. The radial inner surface of the outer Holbæk rotor sleeve 163 faces the radial outer surface of the inner Holbæk stator sleeve 169, forming a radial Holbæk gap 173, and this and the second hol. Form a Beck pump stage. The radial inner surface of the inner Holbæk stator sleeve 169 faces the radial outer surface of the inner Holbæk rotor sleeve 165, forming a radial Holbæk gap 175, and this and the third hol. Form a Beck pump stage.

The lower end of the Holbeck rotor sleeve 163 may be provided with a channel extending in the radial direction. Through this, the Holbaek gap 171 located on the outer side in the radial direction is connected to the Holbaek gap 173 in the center. Further, the upper end of the Holbeck stator sleeve 169 may be provided with a channel extending in the radial direction. Through this, the central Holbæk gap 173 is connected to the Holbæk gap 175 located inward in the radial direction. This allows a plurality of nested Holbeck pump stages to be serially connected to each other. A connection channel 179 to the outlet 117 may be further provided at the lower end of the Holbeck rotor sleeve 165 located radially inward.

The surfaces of the Holbaek stator sleeves 163 and 165 that exert the pumping effect as described above each have a plurality of Holbaek grooves extending in the axial direction while orbiting around the rotating shaft 151 in a spiral shape. On the other hand, the opposite sides of the Holbaek rotor sleeves 163, 165 are smoothly formed and drive gas for the operation of the vacuum pump 111 into the Holbaek groove.

A roller bearing 181 is provided in the area of the pump inlet 117 and a permanent magnet bearing 183 is provided in the area of the pump outlet 115 for the rotatable bearing of the rotor shaft 153.

In the area of the roller bearing portion 181, a conical splash nut 185 is provided on the rotor shaft 153. It has an outer diameter that increases towards the roller bearing 181. The splash nut 185 is in sliding contact with at least one scraping member of the working medium storage. The working medium reservoir has a plurality of absorbent discs 187 stacked on top of each other. These discs are immersed in a working medium for the roller bearings 181 such as a lubricant.

During the operation of the vacuum pump 111, the working medium is transmitted from the working medium storage to the rotating splash nut 185 via the scraping member by the capillary effect, and by centrifugal force along the splash nut 185, the splash nut 92. It is conveyed toward the roller support portion 181 in the direction of the increasing outer diameter of the. There, for example, a lubrication function is exhibited. The roller support 181 and the working medium storage are surrounded by a tank-shaped insert 189 and a support cover 145 in a vacuum pump.

The permanent magnet bearing portion 183 has a bearing half portion 191 on the rotor side and a bearing half portion 193 on the stator side. Each of these has one ring laminate. The ring laminated portion is composed of a plurality of rings 195 and 197 of permanent magnets laminated with each other in the axial direction. The ring magnets 195 and 197 face each other while forming a radial bearing gap 199, in which case the rotor side ring magnet 195 is radially outward and the stator side ring magnet 197 is radially inward. It is provided in. The magnetic field present in the bearing gap 199 causes a magnetic repulsive force between the ring magnets 195 and 197. This provides radial bearings for the rotor shaft 153. The ring magnet 195 on the rotor side is supported by the carrier portion 201 of the rotor shaft 153. It surrounds the ring magnet 195 on the outside in the radial direction. The ring magnet 197 on the stator side is supported by the carrier portion 203 on the stator side. It extends through the ring magnet 197 and is suspended from the radial support 205 of the housing 119. A ring magnet 195 on the rotor side is fixed by a cover element 207 connected to the carrier portion 203 in parallel with the rotation shaft 151. The ring magnet 197 on the stator side is fixed by a fixing ring 209 connected to the carrier portion 203 in one direction and by a fixing ring 211 connected to the carrier portion 203 in parallel with the rotating shaft 151. Moreover, a Belleville spring 213 may be provided between the fixed ring 211 and the ring magnet 197.

An emergency or safety bearing 215 is provided inside the magnet bearing. This leads to non-contact idling during normal operation of the vacuum pump and only when the rotor 149 is excessively displaced radially with respect to the stator. This is to form a radial stopper for the rotor 149. This is because the structure on the rotor side is prevented from colliding with the structure on the stator side. The safety bearing device 215 is formed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator. This relationship provides that the safety bearing 215 does not operate during normal pump operation. The radial gap leading to the action of the safety bearings is sized sufficiently large that the safety bearings 215 do not act during normal operation of the vacuum pump, and at the same time are small enough that the rotor It is prevented in all situations that the side structure collides with the stator side structure.

The vacuum pump 111 has an electric motor 125 for rotationally driving the rotor 149. The armature of the electric motor 125 is formed by a rotor 149. The rotor shaft 153 extends through the motor stator 217. Permanent magnet devices may be provided in the portion of the rotor shaft 153 that extends through the motor stator 217, either radially outward or embedded. An intermediate space 219 is provided between the portion of the rotor 149 extending through the motor stator 217 and the motor stator 217. It has a radial motor gap. Through this, the motor stator 217 and the permanent magnet device can be magnetically affected due to the drive torque transmission.

The motor stator 217 is fixed in the housing inside a motor chamber 137 provided for the electric motor 125. Through the seal gas connection 135, seal gas (also referred to as cleaning gas, which can be, for example, air or nitrogen) reaches into the motor chamber 137. Through the seal gas, the electric motor 125 can be protected against a process gas, eg, a corrosive portion of the process gas. Motor chamber 137 is capable of being evacuated even through the pump outlet 117, i.e. the motor chamber 137, at least approximately,予真empty implemented by pre vacuum pump connected to the pump outlet 117 It has become.

It is possible that a so-called known labyrinth seal 223 is further provided between the wall portion 221 that defines the motor chamber 137 and the rotor hub 161. In particular, it is to achieve better sealing of the motor chamber 217 with respect to the Holbeck pump stage located on the outer side in the radial direction.

The turbo molecular pumps of FIGS. 1 to 5 form the vacuum pump according to the invention. 6-11 show details that are also intended for the turbomolecular pumps of FIGS. 1-5, even if they are not explicitly shown therein.

FIG. 6 shows a side view of a turbomolecular pump according to one embodiment of the present invention. The turbo molecular pump 111 shown in FIG. 6 has an engaging structure 225. The engaging structure 225 is provided on the outer periphery of the housing 119 as a groove-shaped recess, particularly as a T-groove. At that time, the engaging structure 225 extends at an angle with respect to the longitudinal axis 227 of the pump housing 119. Therefore, the engaging structure 225 and the longitudinal axis 227 of the pump housing 119 form an angle with each other in the figure shown in FIG. In particular, the engagement structure 225 extends around the longitudinal axis 227. The engaging structure 225 then extends, particularly advantageously, along a plane oriented at right angles to the longitudinal axis 227 of the housing 119.

According to the invention, only the position of the engagement structure 225 is selected along the longitudinal axis 227 of the housing 119, depending on the weight center of gravity point 229 of the pump body of the turbomolecular pump 111. At that time, the center of gravity point is set according to all the members of the turbo molecular pump 111, that is, especially when assembling the pump housing 119 and all the parts arranged in the housing 119 and in the housing 119, especially the pump 111. Determined according to the pump component in the configuration present in the recipient. In this way, the turbomolecular pump 111 can be lifted, particularly advantageously, via a fixing element within the engagement structure 225, and in the lifted position, centered on the longitudinal axis 227. Aligned by rotation. Alignment is performed without the need for special operator effort to maintain each desired tilted state of the longitudinal axis 227 in space.

To bring the fastening means into the engagement structure 225, the engagement structure 225 may be provided to insert 231. The insertion portion is shown in FIG. 8 and / or omits the protrusion 235 for shape-coupling engagement of the fixed element, for example by a T-shaped break, as described in detail below. It is possible that it is formed by. Thus, the fixed element can be inserted into the engaging structure 225 in the region of the insertion portion 231 and then by a slide along the extension of the engaging structure 225 to engage in shape coupling. It can be brought to a state of consensus.

FIG. 7 shows a cross section along the turbo molecular pump 111 shown in FIG. 6, and FIG. 8 shows a detailed cross section of the turbo molecular pump 111 shown in FIG. FIG 7 and 8, the engagement structure 225, in this embodiment, and even seen in groove-shaped recesses having a cross-section 233 of the T-shape. In particular, at that time, the engaging structure has a protrusion 235. This inserted fixation element, for example like channels Storr down, that it is possible to form-engage. In the region of the engaging portion 231 the T-shaped cross section 233 can be interrupted by omission of the protrusion 235, so that fixed elements, such as channel stones, are easily inserted. It is possible.

FIG. 9 shows a detailed cross-sectional view of the turbo molecular pump 111 shown in FIG. The turbo molecular pump 111 has an inserted channel stone 237 and an eye screw 239 fixed or integrally formed with the channel stone 237. It can be seen that the fixing element 237 formed as a channel stone is inserted into the engaging structure 225 and engages within the protrusion 235, or the protrusion 235 engages within the fixing element 237.

Therefore, the fixing element 237 formed as a channel stone is formally connected to the engaging structure 225 in the direction crossing the longitudinal axis 227 of the housing 119. At the same time, the fixing element 237 can be slid along the extension of the engagement structure 225, in particular along the perimeter or perimeter of the pump body or housing 119 so that the vacuum pump 111 In the lifted state, rotation can be easily performed about the longitudinal axis 227. The guided mode of the fixing element 237 within the engagement structure 225 shown adequately supports rotational motion about a longitudinal axis. A load receiving means 239, such as an eye screw, can be screwed into the fixing element 237 at that time. Load receiving means 239, this time, it can be used for connection with carrying means, or a special stopper means raising device has.

FIG. 10 shows a cross section along the turbo molecular pump 111 shown in FIG. The turbo molecular pump 111 has an inserted fixing element 237 and a fixed load receiving means 239. It can be seen that the fixing element 237 formed as a channel stone is inserted into the engaging structure 225, and a shape-coupling connection is made between the fixing element 237 and the engaging element 225. At the same time, the load receiving means 239 formed as an eye screw is screwed into the fixing element 237. At that time, the components 237 and 239 can be integrally formed. The load receiving means 239 can be fixed with a supporting means of a lifting device or a special stopper means. At that time, as can be seen in FIG. 10, the point of action of the force formed by the load receiving means 239 for the stopper means or the supporting means of the lifting device is along the longitudinal axis 227 of the housing 119. It exists at the height of the weight center of gravity point 229.

FIG. 11 shows a side view of a turbomolecular pump according to another embodiment of the present invention. The turbo molecular pump 111 shown in FIG. 11 has two engaging structures 225 as a whole. These also extend in the circumferential direction of the housing 119 along its perimeter. At that time, each engaging structure 225 extends along a plane arranged at right angles to the longitudinal axis 227 of the housing 119 or the pump body of the turbo molecular pump 111. Each engaging structure 225 is also formed as a groove-shaped recess, and in particular has a T-shape. Moreover, each engaging structure 225 has an insertion portion 231. In this, the T-shape is interrupted.

Further, it can be seen in FIG. 11 that the weight center of gravity point 229 of the pump body is arranged along the longitudinal axis 227 between both of these engaging structures 225. Both engagement structures 225 are therefore located on both axial sides of the center of gravity point 229. The engagement structure 225 then has a different axial spacing from the weight center of gravity point 229. Similarly, the axial spacing of one engaging structure 225 with respect to the weight center of gravity point 229 can match the axial spacing of the other engaging structure 225 with respect to the weight center of gravity point 229 (so to speak, the same spacing arrangement). (Not shown).

The engagement structure 225 normatively shown in FIGS. 6 to 11 and the concept described at the beginning of the specification are not expressed in detail in the embodiment according to FIGS. 1 to 5 as well. , Or even if not explained, can be intended. This also applies to all details relating to the arrangement and / or formation of the engagement structure in the pump body and / or in the pump housing 119 of the turbomolecular pump 111. Similarly, the overall or individual details of the turbo molecular pump 111 represented and correspondingly described in FIGS. 1 to 5 are also shown in FIGS. 6 to 11 of the turbo molecular pump 111. It can also be intended in the embodiment.

111 Turbo molecular pump 113 Inlet flange 115 Pump inlet 117 Pump outlet 119 Housing 121 Lower part 123 Electronics housing 125 Electric motor 127 Accessory connection 129 Data interface 131 Power supply connection 133 Flow inlet 135 Seal gas connection 137 Motor chamber 139 Cooling medium Connection 141 Lower side 143 Screw 145 Bearing cover 147 Fixing hole 148 Cooling medium piping 149 Rotor 151 Rotor shaft 153 Rotor shaft 155 Rotor disc 157 Stator disc 159 Spacer ring 161 Rotor hub 163 Holbeck rotor sleeve 165 Holbeck rotor sleeve 167 Hol Beck stator sleeve 169 Holbeck stator sleeve 171 Holbeck gap 173 Holbeck gap 175 Holbeck gap 179 Connection channel 181 Roller bearing 183 Permanent magnet bearing 185 Splash nut 187 Disc 189 Insert 191 Rotor side bearing half 193 Steor side bearing half 195 Ring magnet 197 Ring magnet 199 Bearing gap 201 Supporting part 203 Supporting part 205 Radial column 207 Cover element 209 Support ring 211 Fixing ring 213 Bearing spring 215 Emergency or safety bearing 217 Motor stator 219 Intermediate space 221 Wall 223 Labyrinth seal 225 Engagement structure 227 Longitudinal axis 229 Weight center of gravity 231 Insertion part 233 T-shaped cross section 235 Projection part 237 Fixed element 239 Load receiving means

Claims (13)

A vacuum pump (111), or turbo molecular pump, comprising a pump body and a fixing device formed therein, the fixing device at least one for connecting a fixing element (237) to the pump body. It has an engaging structure (225), the engaging structure (225) is formed as a T-groove for accommodating the T-stone, and the fixing element (237) is formed as a T-stone. , This T-stone is slidable in the T-groove, and the engaging structure (225) is at least partially perpendicular to the longitudinal extension (227) of the pump body on the outer circumference of the pump body. In the extending vacuum pump (111), the position and / or arrangement of the fixing device along the longitudinal extension of the pump body is selected according to the weight center of gravity point (229) of the pump body. A featured vacuum pump (111). The vacuum pump (111) according to claim 1, wherein the engaging structure (225) orbits the outer periphery of the pump body partially or completely. The vacuum pump (111) according to claim 1 or 2, wherein at least one engaging structure (225) is arranged at a height of the center of gravity point (229) of the pump body in the axial direction. At least two engaging structures (225) are arranged on either side of the center of gravity point (229) of the pump body in the axial direction, or surround the center of gravity point (229) of the pump body in the axial direction and. The axial spacing of one engagement structure (225) to the center of gravity point (229) coincides with the axial spacing of another engagement structure (225) to the center of gravity point (229), or these engagements. The vacuum pump (111) according to claim 1, wherein the structure (225) has a different axial distance from the center of gravity point (229). The vacuum pump (111) according to claim 1, wherein the engaging structure (225) has an insertion portion (231) for a fixing element (237). The vacuum according to claim 5, wherein the insertion portion (231) is formed to insert the fixing element (237) in a direction crossing the longitudinal extension of the engaging structure (225). Pump (111). The insertion portion (231) is formed by interruption of the T-shaped cross section or by omission of a protrusion (235) for shape-coupling engagement of the fixing element (237). The vacuum pump (111) according to claim 5 or 6. Claims 1 to 7, wherein at least one engaging structure (225) is manufactured by cutting, or the engaging structure (225) is provided therein by a turning process of the pump body. The vacuum pump (111) according to item 1 . The pump body is formed by a housing (119,121) and at least one pump component provided in or in the housing (119,121) or in the housing (119,121). , Formed in a multi-part system, with at least one pump component as the rotor (149) and the housing (119,121) forming the stator or being connected to the stator, the rotor (149). It is supported to rotate about a rotating shaft (151), which extends along the longitudinal extension of the pump body and through its weight center of gravity (229), or the pump. The vacuum pump (111) according to claim 1, wherein the vacuum pump (111) is aligned with the axis of the center of gravity of the body. A fixing device is formed in the housing (119,121), the housing (119,121) surrounds at least one pump component, and the housing (119,121) has a longitudinal extension and is angular. Has an outer circumference, a essentially round outer circumference, or a circular outer circumference, and the longitudinal extension of the housing (119,121) is longer than the housing diameter, or the average housing diameter, maximum housing diameter, or minimum housing. The vacuum pump (111) according to claim 9, wherein the vacuum pump (111) is longer than the diameter. The pump body has a reinforcement in the region of the engaging structure (225) or in a region adjacent to at least one engaging structure (225), or the housing (119, 121) has an engaging structure (119, 121). 225) The aspect of claims 1 to 10, characterized in having a thicker wall thickness in the region of 225) or in the region adjacent to the engaging structure (225) than in other housing portions. Vacuum pump (111). A device for handling or assembling the vacuum pump (111), wherein the device is a lifting device having a carrying means, the vacuum pump (111) according to claim 1 to 11, and an engaging structure (225). ), Or slidably arranged on it, with at least one fixed element (237) and a load receiving means (239), the load receiving means being connected to and connected to the fixed element (237). A device formed as an eye screw, wherein the load receiving means (239) is connected to a carrying means. A method for handling or assembling the vacuum pump (111), wherein the vacuum pump is the one according to any one of claims 1 to 11, or a method using the apparatus according to claim 12. In, the vacuum pump (111) is lifted by a lifting device, the vacuum pump (111) is oriented by rotation about a longitudinal axis, a rotor axis, or a center of gravity axis (227), and a vacuum pump in space. A method characterized in that at least one fixing element (237) is guided and slid into an engaging structure (225) of a vacuum pump (225) by rotation of (111).

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