EP3489518A1 - Vacuum pump and assembly and method for handling and/or assembly of a vacuum pump - Google Patents

Abstract

Vacuum pump, in particular turbomolecular pump, with a pump body and a fastening device formed thereon, which has at least one engagement structure for connecting a fastening element to the pump body, the engagement structure on the outer circumference of the pump body running at least in sections at an angle to its longitudinal extent, a position and / or Arrangement of the fastening device along the longitudinal extent of the pump body is selected depending on the center of gravity of the pump body.

Description

The present invention relates to a vacuum pump, in particular a turbomolecular pump, and to an arrangement and a method for handling and / or mounting a vacuum pump.

Vacuum pumps are often used in systems that require a horizontal mounting of the respective vacuum pump. This applies in particular to turbomolecular pumps in pumping capacity classes greater than 1000 l / s. In the present case, the volume flow which can be conveyed per unit time through a cross-sectional area or a pump-effective section is regarded as the pumping speed. Such pumps may have a high weight due to the size of the construction. Therefore, such pumps are usually raised only with a lifting aid. Similarly, the orientation of the pump and its attachment to a respective system requires a suitable lifting aid.

From the prior art it is known to lift pumps with a high weight by flipping a loop. Hoists, such as manually operated cranes, can be used. However, lifting a pump with the help of a folded loop is risky. This will allow the pump to slip out of the loop and fall, causing serious damage or even injury.

Furthermore, it is known to provide at least one thread in the housing of a pump into which an eyebolt can be screwed. For the respective lifting and assembly process can then be a hook of the hoist in the eye bolt be latched. This ensures a relatively safe lifting operation. However, mounting the pump requires not only lifting, but also the orientation of the pump in the room. This can be accomplished at a fixed predetermined position of the eyebolts on the housing only with great difficulty. In particular, this considerable manual power input is required, whereby the damage-free installation of the pump in its desired end position is in turn difficult.

Against this background, an object of the present invention is to provide a vacuum pump, which can be raised, aligned and / or mounted with reduced handling costs. Likewise, the object is to provide an arrangement and a method for handling and / or mounting a vacuum pump.

With regard to a vacuum pump, this object has been achieved with the features of claim 1. An arrangement according to the invention is subject matter of claim 13 and a method according to the invention is specified in claim 14. Advantageous embodiments are specified in the dependent claims and will be discussed below.

A vacuum pump according to the invention, which may be in particular a turbomolecular pump, has a pump body and a fastening device formed thereon, which has at least one engagement structure for connecting a fastening element to the pump body. The fastening element can be, for example, a sliding block (see, for example, DIN 508), which is introduced into the engagement structure and allows the screwing in of a so-called eye bolt or eyebolt (see, for example, DIN 580). According to the invention, the engagement structure on the outer circumference of the pump body extends at least in sections at an angle to its longitudinal extent. The engagement structure thus runs not or at least not exactly along the longitudinal extent of the pump body but at an angle to this. This allows the pump body to be oriented in the raised state about the longitudinal extent when a fastener is displaced within the engagement structure.

According to the invention, it is now provided that a position and / or arrangement of the fastening device along the longitudinal extent, ie in the axial direction, of the pump body is selected as a function of the center of gravity of the pump body. By choosing the position and / or arrangement of the fastening device along the longitudinal extension of the pump body in dependence on the center of gravity can be ensured that the respectively desired inclination of the pump body in space can be maintained with little effort of the respective operator. The handling and thus ultimately the assembly of the vacuum pump are thus facilitated overall.

According to the invention, there is thus the possibility of arranging a fastening element in or on the engagement structure, in particular in a positive connection, in order, for example, to establish a connection to a hoist via an eye bolt. In the raised state, a rotation of the pump body about the longitudinal axis can then be accomplished without the maintenance of the position of the longitudinal axis of the pump body in the room requires a lot of effort. Accordingly, easily and without the risk of tilting of the respectively used fastener in or on the engagement structure, the rotational position of the pump body about the longitudinal axis or longitudinal extent can be precisely adjusted. The entire handling and assembly effort can therefore be done with little manual effort.

Advantageously, the engagement structure is designed for the displaceable guidance of a fastening element, in particular for a displaceable guide along a circumferential orientation of the pump body. Due to the sliding guide, the orientation of the rotational position of the pump body in the raised state can be done easily and without the risk of incorrect operation or injury. In particular, it is ensured by the displaceable guide that during a rotation of the pump body about the longitudinal axis and the associated displacement of a fastening means in or on the engagement structure, the fastening means does not tilt.

According to an advantageous embodiment, the at least one engagement structure extends along a circumferential orientation of the pump body, in particular orthogonal or substantially orthogonal to the longitudinal extension of the pump body. In this way, an alignment of the pump body about the longitudinal axis or about the longitudinal extent can be made particularly easy to handle.

The engagement structure may partially or completely circumscribe the outer circumference of the pump body. An engagement structure provided in sections permits alignment between two critical angle positions, so that an orientation specification for the final assembly position can be created by the position of the engagement structure formed in sections. In a fully encircling engagement structure, the pump body in the raised state can be completely rotated about its own longitudinal axis, so that all rotational positions can be adjusted for the final assembly position.

In an advantageous manner, the engagement structure runs around the outer circumference. Accordingly, the engagement structure is annularly introduced into the outer periphery of the pump body or provided on this and thus endless educated. The beginning and end of the intervention structure are thus seamlessly merged in the latter embodiment.

In a particularly preferred manner, the at least one engagement structure is positioned axially at the height of the center of gravity of the pump body. Accordingly, the at least one engagement structure with respect to the longitudinal extent or longitudinal axis of the pump body is arranged in a position which coincides with the position of the center of gravity of the pump body along the longitudinal extent or longitudinal axis. In this way, a handling-friendly installation can be ensured with only one engagement structure. Thus, this arrangement of the engagement structure ensures that a substantially horizontal alignment of the pump body in the raised state of the vacuum pump can be maintained without additional support effort by the operator.

According to an advantageous embodiment of the vacuum pump according to the invention, the fastening device has a plurality of engagement structures. By a plurality of engagement structures, the fastening security for the respective lifting means and also the positional stability can be increased in the raised state of the pump.

In this case, at least two engagement structures are positioned axially on both sides of the center of gravity of the pump body in an advantageous manner. In particular, the two engagement structures axially grasp the center of gravity. Seen along the longitudinal axis of the pump body is thus arranged an engagement structure in front of the center of gravity and another engagement structure behind the center of gravity. An undesirable inclination of the longitudinal axis in space during lifting and / or mounting of the vacuum pump can be safely avoided in this way.

In a particularly advantageous manner, the axial distance of an engagement structure to the center of gravity is selected to coincide with the axial distance of a further engagement structure to the center of gravity. This ensures a uniform load on the respectively used load-receiving or lifting means and / or the respective suspension means of the hoist. It is also possible that the engagement structure have different axial distances to the center of gravity, whereby a greater freedom of design in the choice of the position of the individual engagement structures.

More preferably, the engagement structure is designed as a groove-like depression and / or for receiving at least one sliding block. In this case, a sliding block may preferably be displaceable within the groove-like depression. The use of sliding blocks and the corresponding formation of the engagement structure as a groove-like recess allows a time-saving and handling-friendly lifting of the pump body, since any sliding blocks can be connected in only a few steps with such an engagement structure. The groove-like depression is preferably a T-slot. Accordingly, the groove has a T-shape in cross-section, whereby in a particularly simple manner a positive coupling with a fastening element, which is designed in particular as a sliding block, can be generated.

It may also be advantageous if the at least one engagement structure is designed as a web-like projection and / or for guiding a complementary shaped fastener, in particular a sliding block with formed therein groove-like depression which engages around an example T-shaped web. Such web-like projections can be easily manufactured and also allow a secure attachment and appropriate guidance for complementary shaped fasteners.

Furthermore, it may be advantageous if the engagement structure has an insertion section for a fastening element and / or wherein the insertion section for insertion of a fastening element is formed transversely to the longitudinal course of the engagement structure. Thus, the respective fastening element can only be introduced into the engagement structure for the implementation of the respective handling and assembly task or can be arranged to connect to it. After the handling and assembly task, the fastener can be removed again from the engagement structure and optionally reused.

The insertion section may be formed by an interruption of the cross-sectional shape, in particular by an interruption of a T-shaped cross section and / or by omitting projections for the form-fitting engagement of a fastening element. For example, in the case of a groove-like depression, the insertion section may be formed by a groove section which has a merely rectangular cross-section without projections or without a T-shape.

In the presence of an insertion section, the engagement structure may advantageously have a projection and / or a step for narrowing and / or reducing the cross-sectional area of the engagement structure. Such a projection and / or shoulder may preferably be provided in front of or behind the insertion section, for example by a shoulder in the surface of the circumferential engagement structure. Thus, a sliding block can indeed be guided without load through the engagement structure. However, under load, ie with a pump attached to it, a separately supplied opposing force or slight tilting is required in order to overcome the corresponding constriction. Such a design prevents the accidental loss and accidental fall of the hanging load when moving the sliding block in the region of an insertion.

In order to keep the production costs low for an engagement structure according to the invention, this can be produced by machining, preferably by turning and / or milling. In the case of the formation of the engagement structure as a T-slot, it is preferable to use a T-slot milling cutter for production, which is inexpensive to accomplish.

In this case, the engagement structure can be introduced in particular by machining the pump body in this. Accordingly, for example, a part of the pump body can be produced by primary shaping and / or forming processes in its basic form and then introduce the engagement structure into the outer circumference of the pump body by means of a machining process or generate it. This can be realized with little manufacturing effort.

According to an advantageous embodiment of the vacuum pump according to the invention, the pump body is formed by a housing and at least one pump component arranged in and / or on the housing. In particular, a plurality of pump components is arranged in and / or on the housing. Since the center of gravity of the entire pump body, which includes the housing and the at least one pump component, is decisive for the position and / or arrangement of the fastening device, and the balance of the entire pump body in the raised state with very little manual force application can be maintained. In particular, this can be avoided that individual components of the vacuum pump create an imbalance in the raised state, which adjusts the inclination of the longitudinal axis in the room unfavorable or undesirable in the raised position.

Advantageously, the housing of the vacuum pump can be formed in several parts, whereby the assembly of the individual parts of the pump simplified or the structural design freedom is increased.

At least one pump component may be formed as a rotor and the housing may form a stator or be connected to a stator, whereby a space-saving construction is ensured. In a further preferred manner, the rotor of the vacuum pump is rotatably mounted about an axis of rotation which runs along the longitudinal extent of the pump body and / or through its center of gravity, in particular coincides with a gravity axis of the pump body. Such an arrangement makes it possible to align the pump body about the axis of rotation of the rotor in a particularly simple manner. The respective pump inlet or outlet of the vacuum pump can thus be aligned in a simple manner to the respective equipment, in order subsequently to carry out the necessary assembly work.

According to an advantageous embodiment of the vacuum pump according to the invention, the housing has a longitudinal extension and / or a rectangular and / or substantially round outer periphery, preferably a circular outer periphery. In this way, the respective pump components can be accommodated within a compact housing with only a small space. In the case of a round outer periphery of the respective pump rotor can be accommodated in a space-saving designed as a stator housing.

Furthermore, it may be advantageous if the longitudinal extent of the housing is greater than a housing diameter, in particular as a middle and / or as the largest or smallest housing diameter. In this case, the housing has an overall elongated shape, whereby a plurality of pumping stages or rotors can be arranged in the housing and thus a high pumping capacity can be achieved.

In a further advantageous manner, the pump body, in particular the housing of the pump, adjacent to the at least one engagement structure have a gain. By such a reinforcement, the attachment stability can be increased. In particular, this can be avoided that a fastener is deformed by undesirable deformation of the adjoining the engagement structure areas of the pump body and thereby dissolved out of the engagement structure. The risk of falling of the pump is thus reduced. Such a reinforcement of the pump body can be achieved by providing a greater wall thickness in the region of and / or adjacent to the engagement structure than in the remaining pump body sections, in particular housing sections.

According to a further aspect of the present invention, there is provided an arrangement for handling and / or assembling a vacuum pump, comprising a lifting tool having a carrying means and having a vacuum pump as described above. Furthermore, at least one fastening element displaceably positioned in or on the engagement structure (for example a groove or a web), preferably a sliding block, and a load receiving means are provided which are connected or integrally formed with the fastening element and are preferably designed as eyebolts. In this case, the load-receiving means is preferably connected to the support means, either directly or indirectly via a stop means, for example in the form of a carrying or sling.

By such an arrangement, a vacuum pump described above can be raised with little effort and with a high degree of security, handle and finally mounted in the desired end position to the respective system. In the raised state, a rotation of the pump body about the longitudinal extension or longitudinal axis can be made with only a slight manual application of force and thus the desired orientation or rotation position of the pump body are set in space, for this purpose, the fastener is arranged displaceably, for example, in a groove-like depression or on a projection of the pump body and thus supports the rotational movement during handling.

Another aspect of the present invention relates to a method for handling and / or mounting a vacuum pump, preferably a vacuum pump described above. Preferably, such a method can be carried out with a previously described arrangement. In this case, according to the invention, the vacuum pump lifted by a hoist, then aligned by rotation about a longitudinal and / or rotor axis in space, wherein by the rotation of the vacuum pump in space at least one fastener, preferably a sliding block, on and / or in the engagement structure of the vacuum pump is moved led. The guided displacement of the fastener allows a controlled rotation of the pump body about the longitudinal axis, so that precise alignment in space can be ensured with little manual effort.

According to a further aspect of the present invention, the insertion section is formed as a branching groove to the circumferential engagement structure, in particular in the form of an insertion channel. Such an insertion channel can emerge, for example, on an end face of the pump body and / or open into an insertion section axially offset from the engagement structure. A load handling device can either be inserted directly axially or inserted by immersion.

When providing such an insertion channel, the circumferential positionability of the load receiving means along the circumferential engagement structure can be carried out without interruption, since falling out of the load receiving means is avoided from the axially offset insertion section. At the same time, the production of the engagement structure can be simplified, since they are machined in a purely circumferential manner Process, for example, can be made by turning. Paragraphs in the contour of the engagement structure, which should prevent an unwanted loss of the load-receiving means at the insertion and thus the fall of the pump, can be omitted. Further, any insertion channel can be advantageously made through the face of the pump body with a tool in one operation and without complicated axial dipping of the tool.

In the case of a plurality of engagement structures, an insertion channel can be continued through an engagement structure to form a further engagement structure, or a plurality of insertion channels can each be guided from different directions to the engagement structures. Such an insertion channel may also be arranged at different angles to the pump longitudinal axis or be designed by dislocations or angles so that it advantageously impedes the loss or unwanted migration of load-receiving means or prevented.

An insertion channel can be formed within only one component of the pump body, so that prior to assembly of the components, for example, the lower part and the housing, insertion of the load-receiving means is possible. Such an insertion channel may be covered or blocked after joining the components by the respectively adjacent part, so that the load-receiving means is not removable and thus remains permanently inserted into the engagement structure movable. Such a blockage of the insertion or insertion channel is also possible by the insertion, pressing, gluing and / or the unique and / or permanent attachment of a blocking agent in the insertion or insertion.

The above statements on the vacuum pump according to the invention also apply correspondingly to the arrangement according to the invention and to the method for handling and / or mounting a vacuum pump.

Fig. 1

eine perspektivische Ansicht einer Turbomolekularpumpe,

Fig. 2

eine Ansicht der Unterseite der Turbomolekularpumpe von Fig. 1,

Fig. 3

einen Querschnitt der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie A-A,

Fig. 4

eine Querschnittsansicht der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie B-B,

Fig. 5

eine Querschnittsansicht der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie C-C,

Fig. 6

eine Seitenansicht einer Turbomolekularpumpe gemäß einer Ausführungsform der Erfindung,

Fig. 7

einen Querschnitt längs der in Fig. 6 gezeigten Turbomolekularpumpe,

Fig. 8

einen Detailquerschnitt der in Fig. 6 gezeigten Turbomolekularpumpe,

Fig. 9

einen Detailquerschnitt der in Fig. 6 gezeigten Turbomolekularpumpe mit eingefügten Nutenstein und befestigter Augenschraube,

Fig. 10

einen Querschnitt längs der in Fig. 6 gezeigten Turbomolekularpumpe mit eingefügtem Nutenstein und befestigter Augenschraube,

Fig. 11

eine Seitenansicht einer Turbomolekularpumpe gemäß einer weiteren Ausführungsform der Erfindung.

The invention will be described by way of example with reference to advantageous embodiments with reference to the accompanying figures. It show, each schematically:

Fig. 1

a perspective view of a turbomolecular pump,

Fig. 2

a view of the bottom of the turbomolecular pump from Fig. 1 .

Fig. 3

a cross section of the turbomolecular pump along in Fig. 2 shown section line AA,

Fig. 4

a cross-sectional view of the turbomolecular pump along in Fig. 2 shown section line BB,

Fig. 5

a cross-sectional view of the turbomolecular pump along in Fig. 2 shown section line CC,

Fig. 6

a side view of a turbomolecular pump according to an embodiment of the invention,

Fig. 7

a cross section along in Fig. 6 shown turbomolecular pump,

Fig. 8

a detail cross section of in Fig. 6 shown turbomolecular pump,

Fig. 9

a detail cross section of in Fig. 6 shown turbomolecular pump with inserted sliding block and attached eyebolt,

Fig. 10

a cross section along in Fig. 6 shown turbomolecular pump with inserted sliding block and attached eyebolt,

Fig. 11

a side view of a turbomolecular pump according to another embodiment of the invention.

In the Fig. 1 shown turbomolecular pump 111 comprises a pump inlet 115 surrounded by an inlet flange 113, to which in a conventional manner, a non-illustrated recipient can be connected. The gas from the recipient may be drawn from the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, may be connected.

The inlet flange 113 forms according to the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111. The housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally. Housed in the electronics housing 123 are electrical and / or electronic components of the vacuum pump 111, eg for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123. In addition, a data interface 129, for example, according to the RS485 standard, and a power supply terminal 131 on the electronics housing 123 are arranged.

On the housing 119 of the turbomolecular pump 111, a flood inlet 133, in particular in the form of a flood valve, is provided, via which the vacuum pump 111 can be flooded. In the region of the lower part 121, a sealing gas connection 135, which is also referred to as purge gas connection, is furthermore arranged, via which purge gas for protecting the electric motor 125 from being conveyed by the pump Gas in the engine compartment 137, in which the electric motor 125 is housed in the vacuum pump 111, can be brought. In the lower part 121 two coolant connections 139 are further arranged, wherein one of the coolant connections is provided as an inlet and the other coolant connection as an outlet for coolant, which can be passed for cooling purposes in the vacuum pump.

The lower side 141 of the vacuum pump can serve as a base, so that the vacuum pump 111 can be operated standing on the bottom 141. However, the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and thus be operated to a certain extent suspended. In addition, the vacuum pump 111 can be designed so that it can also be put into operation, if it is aligned differently than in Fig. 1 is shown. Embodiments of the vacuum pump can also be implemented in which the lower side 141 can not be turned down but can be turned to the side or directed upwards.

At the bottom 141, the in Fig. 2 is shown, various screws 143 are still arranged, by means of which here unspecified components of the vacuum pump are attached to each other. For example, a bearing cap 145 is attached to the bottom 141.

On the bottom 141 also mounting holes 147 are arranged, via which the pump 111 can be attached, for example, to a support surface.

In the FIGS. 2 to 5 For example, a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.

Like the sectional views of the FIGS. 3 to 5 1, the vacuum pump comprises a plurality of process gas pumping stages for conveying the process gas pending at the pump inlet 115 to the pump outlet 117.

In the housing 119, a rotor 149 is arranged, which has a about a rotation axis 151 rotatable rotor shaft 153.

Turbomolecular pump 111 includes a plurality of turbomolecular pump stages operatively connected in series with a plurality of rotor disks 155 mounted on rotor shaft 153 and stator disks 157 disposed between rotor disks 155 and housed in housing 119. A rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one pump stage. The stator disks 157 are held by spacer rings 159 at a desired axial distance from each other.

The vacuum pump further comprises Holweck pumping stages which are arranged one inside the other in the radial direction and which are pumpingly connected to one another in series. The rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder shell-shaped Holweck rotor sleeves 163, 165 fastened to the rotor hub 161 and oriented coaxially with the rotation axis 151 and nested in the radial direction. Furthermore, two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the rotation axis 151 and, as seen in the radial direction, are nested one inside the other.

The pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and / or outer surfaces, the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169. The radially inner surface of the outer Holweck stator sleeve 167 rests against the radially outer surface of the outer Holweck rotor sleeve 163 forming a radial Holweck gap 171 and forms with this the turbomolecular pumps subsequent first Holweck pumping stage. The radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 forming a radial Holweck gap 173 and forms with this a second Holweck pumping stage. The radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and forms with this the third Holweck pumping stage.

At the lower end of the Holweck rotor sleeve 163, a radially extending channel may be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173. In addition, at the upper end of the inner Holweck stator sleeve 169, a radially extending channel may be provided, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175. As a result, the nested Holweck pump stages are connected in series. Furthermore, a connecting channel 179 to the outlet 117 may be provided at the lower end of the radially inner Holweck rotor sleeve 165.

The above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.

For rotatably supporting the rotor shaft 153, a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided.

In the area of the roller bearing 181, a conical spray nut 185 with an outer diameter increasing toward the rolling bearing 181 is provided on the rotor shaft 153. The spray nut 185 is in sliding contact with at least one scraper of a resource storage. The resource storage comprises a plurality of stackable absorbent discs 187 provided with a rolling bearing bearing means 181, e.g. with a lubricant, soaked.

During operation of the vacuum pump 111, the operating means is transferred by capillary action of the resource storage on the scraper on the rotating sprayer nut 185 and due to the centrifugal force along the spray nut 185 in the direction of increasing outer diameter of the injection nut 92 to the roller bearing 181 out promoted, where eg fulfills a lubricating function. The rolling bearing 181 and the resource storage are enclosed by a trough-shaped insert 189 and the bearing cap 145 in the vacuum pump.

The permanent magnet bearing 183 includes a rotor-side bearing half 191 and a stator-side bearing half 193, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 195, 197 include. The ring magnets 195, 197 are opposed to each other to form a radial bearing gap 199, wherein the rotor-side ring magnets 195 are disposed radially outward and the stator-side ring magnets 197 radially inward. The magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause a radial bearing of the rotor shaft 153. The rotor-side ring magnets 195 are supported by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 radially on the outside. The stator-side ring magnets 197 are supported by a stator-side support portion 203, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119. Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are connected by a cover element coupled to the carrier section 203 207 set. The stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203. Between the fastening ring 211 and the ring magnet 197, a plate spring 213 may also be provided.

Within the magnetic bearing an emergency or catch bearing 215 is provided, which runs empty during normal operation of the vacuum pump 111 without contact and only with an excessive radial deflection of the rotor 149 relative to the stator engages to a radial stop for the rotor 149 to form, since a collision of the rotor-side structures is prevented with the stator-side structures. The safety bearing 215 is designed as an unlubricated rolling bearing and forms with the rotor 149 and / or the stator a radial gap, which causes the safety bearing 215 is disengaged in the normal pumping operation. The radial deflection at which the safety bearing 215 engages is dimensioned large enough so that the safety bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.

The vacuum pump 111 includes the electric motor 125 for rotationally driving the rotor 149. The armature of the electric motor 125 is formed by the rotor 149 whose rotor shaft 153 extends through the motor stator 217. On the extending through the motor stator 217 through portion of the rotor shaft 153 may be arranged radially outside or embedded a permanent magnet arrangement. Between the motor stator 217 and the portion of the rotor 149 extending through the motor stator 217, a gap 219 is arranged, which comprises a radial motor gap over which the motor stator 217 and the permanent magnet arrangement for the transmission of the drive torque can influence magnetically.

The motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125. About the sealing gas port 135, a sealing gas, which is also referred to as purge gas, and which may be, for example, air or nitrogen, enter the engine compartment 137. Via the blocking gas, the electric motor 125 can be provided with process gas, e.g. against corrosive fractions of the process gas. The engine compartment 137 may also be evacuated via the pump outlet 117, i. In the engine compartment 137, at least approximately, the vacuum pressure caused by the backing pump connected to the pump outlet 117 prevails.

Between the rotor hub 161 and a motor space 137 delimiting wall 221 may also be a so-called. And per se known labyrinth seal 223 may be provided, in particular to achieve a better seal of the engine compartment 217 against the Holweck pump stages located radially outside.

The turbomolecular pump of Fig. 1 to 5 forms a vacuum pump according to the invention. The Fig. 6 to 11 show details which also in a turbomolecular pump according to the Fig. 1 to 5 may be provided, even if they are not explicitly shown there.

Fig. 6 shows a side view of a turbomolecular pump according to an embodiment of the invention. The in the FIG. 6 shown turbomolecular pump 111 has an engagement structure 225. The engagement structure 225 is introduced into the outer circumference of the housing 119 as a groove-like depression, in particular as a T-groove. In this case, the engagement structure 225 extends at an angle to the longitudinal axis 227 of the pump housing 119. Thus, the engagement structure 225 and the longitudinal axis 227 of the pump housing 119 close in the in Fig. 6 shown illustration with each other an angle. In particular, the engagement structure 225 extends around the longitudinal axis 227. In this case, the engagement structure 225 extends in a particularly advantageous manner along a plane which is aligned orthogonal to the longitudinal axis 227 of the housing 119.

According to the invention, the position of the engagement structure 225 along the longitudinal axis 227 of the housing 119 is selected as a function of a center of gravity 229 of the pump body of the turbomolecular pump 111. In this case, the center of gravity is determined by all the components of the turbomolecular pump 111, namely in particular the pump housing 119 as well as all arranged in and on the housing 119 pump components, in particular in the present at a mounting of the pump 111 to a recipient configuration. In this way, the turbomolecular pump 111 can be raised in a particularly advantageous manner via a fastener in the engagement structure 225 and aligned in the raised position by rotation about the longitudinal axis 227, without to maintain the respective desired inclination of the longitudinal axis 227 in space a special effort of the Operator is required.

For introducing a fastening means into the engagement structure 225, the engagement structure 225 may be equipped with an insertion section 231. The insertion can, for example, by an interruption of a T-shape and / or by omitting projections 235 for the positive engagement behind a fastener - as in Fig. 8 shown and detailed below - be formed. Thus, a fastener in the region of the insertion portion 231 can be inserted into the engagement structure 225 and then brought into positive engagement with it by sliding along the course of the engagement structure 225.

Fig. 7 shows a cross section along in FIG Fig. 6 shown turbomolecular pump 111 and Fig. 8 shows a detail cross section of in Fig. 6 Turbomolecular pump 111 shown in the Fig. 7 and 8th It can be seen that the engagement structure 225 in the present embodiment is a groove-like depression with a T-shaped cross section 233. In particular, the engagement structure in this case has the projections 235, which can engage behind an introduced fastening element, such as a slot nut, in a form-fitting manner. In the region of the insertion section 231, the T-shaped cross section 233 can be interrupted by omitting the projections 235, so that a fastening element, such as a sliding block, can be introduced in a manner that facilitates handling.

Fig. 9 shows a detail cross section of in Fig. 6 It can be seen that the fastening element 237 designed as a sliding block is inserted into the engagement structure 225 and engages in the projections 235 or the projections 235 in the fastening element 237 intervention.

In a direction transverse to the longitudinal axis 227 of the housing 119, the fastening element 237 designed as a sliding block is thus connected in a form-fitting manner to the engagement structure 225. At the same time, the fastening element 237 can be displaced along the course of the engagement structure 225, in particular along a circumferential orientation or circumferential direction of the pump body or of the housing 119, so that in the raised state of the vacuum pump 111, a handling-friendly rotation about the longitudinal axis 227 can take place. By the targeted guidance of the fastening element 237 within the engagement structure 225, the rotational movement about the longitudinal axis 227 is suitably supported. In this case, a load-receiving means 239, such as an eyebolt, can be screwed into the fastening element 237.

The load-receiving means 239 can be used for connection to a suspension of a hoist or a separate stop means.

Fig. 10 shows a cross section along in FIG Fig. 6 It can be seen that the fastening element 237 designed as a sliding block is inserted into the engagement structure 225 and a positive connection between the fastening element 237 and the engagement structure 225 is produced. At the same time, a load-receiving means 239 configured as an eyebolt is screwed into the fastening element 237, wherein a one-piece design of the components 237 and 239 is likewise possible. To the load-receiving means 239, a suspension means of a hoist or a separate stop means can be attached. Again Fig. 10 it can be seen, is thus formed by the load-receiving means 239 force application point for a lifting means or for a support means of a hoist along the longitudinal axis 227 of the housing 119 at a height of the center of gravity 229 of the pump body.

The Fig. 11 shows a side view of a turbomolecular pump according to another embodiment of the invention. The in the Fig. 11 shown turbomolecular pump 111 has a total of two engagement structures 225, which also extend in the circumferential direction of the housing 119 at its outer periphery. In this case, each engagement structure 225 extends along a plane that is orthogonal to the longitudinal axis 227 of the housing 119 or the pump body of the turbomolecular pump 111. Each engagement structure 225 is in turn formed as a groove-like depression, in particular with a T-shape, and moreover has an insertion section 231 in which the T-shape is interrupted.

The Fig. 11 It can also be seen that the center of gravity 229 of the pump body along the longitudinal axis 227 between the two engagement structures 225 is arranged. The two engagement structures 225 are therefore arranged axially on both sides of the center of gravity 229. The engagement structures 225 have different axial distances to the center of gravity 229. It is also possible that the axial distance of an engagement structure 225 to the center of gravity 229 with the axial distance of another engagement structure 225 to the center of gravity 229 matches ((quasi) equidistant arrangement), which is not shown here.

The in the Fig. 6 to 11 The engagement structures 225 shown by way of example and the concepts generally described in the introduction to the description can also be used in the embodiments according to FIGS Fig. 1 to 5 be provided, although not shown or explained there in detail. This applies to all details regarding the arrangement and / or design of the engagement structure on the pump body or the pump housing 119 of the turbomolecular pump 111. Likewise, all or individual details of the in the Fig. 1 to 5 shown and described accordingly turbomolecular pump 111 also in the in the Fig. 6 to 11 shown embodiments of the turbomolecular pump 111 may be provided.

LIST OF REFERENCE NUMBERS

111

Turbo molecular pump

113

inlet flange

115

pump inlet

117

pump outlet

119

casing

121

lower part

123

electronics housing

125

electric motor

127

accessory port

129

Data Interface

131

Power connector

133

flood inlet

135

Sealing gas connection

137

engine compartment

139

Coolant connection

141

bottom

143

screw

145

bearing cap

147

mounting hole

148

Coolant line

149

rotor

151

axis of rotation

153

rotor shaft

155

rotor disc

157

stator

159

spacer ring

161

rotor hub

163

Holweck rotor sleeve

165

Holweck rotor sleeve

167

Holweck stator

169

Holweck stator

171

Holweck gap

173

Holweck gap

175

Holweck gap

179

connecting channel

181

Rolling

183

Permanent magnetic bearings

185

spray mother

187

disc

189

commitment

191

Rotor-side bearing half

193

stator side half

195

ring magnet

197

ring magnet

199

bearing gap

201

support section

203

support section

205

radial strut

207

cover element

209

support ring

211

fixing ring

213

Belleville spring

215

Emergency or fishing camp

217

motor stator

219

gap

221

wall

223

labyrinth seal

225

engagement structure

227

longitudinal axis

229

Center of gravity

231

insertion

233

T-shaped cross-section

235

head Start

237

fastener

239

Load handling devices

Claims (14)

Vacuum pump (111), in particular turbomolecular pump, having a pump body and a fastening device formed thereon, which has at least one engagement structure (225) for connecting a fastening element (237) to the pump body, the engagement structure (225) at least partially under the outer circumference of the pump body Angle to its longitudinal extent (227) runs,
characterized in that
a position and / or arrangement of the fastening device is selected along the longitudinal extension (227) of the pump body as a function of the center of gravity (229) of the pump body. Vacuum pump (111) according to claim 1,
characterized in that
the engagement structure (225) is designed for the displaceable guidance of a fastening element (237), in particular for a displaceable guide along a circumferential orientation of the pump body. Vacuum pump (111) according to claim 1 or 2,
characterized in that
the at least one engagement structure (225) extends along a circumferential orientation of the pump body, in particular orthogonal or substantially orthogonal to the longitudinal extension (227) of the pump body, and / or wherein the engagement structure (225) surrounds the outer circumference of the pump body in sections or completely and / or continuously. Vacuum pump (111) according to at least one of the preceding claims,
characterized in that
the at least one engagement structure (225) is positioned axially at the height of the center of gravity (229) of the pump body. Vacuum pump (111) according to at least one of the preceding claims,
characterized in that
the fastening device has a plurality of engagement structures (225) and / or wherein at least two engagement structures (225) are positioned axially on both sides of the center of gravity (229) of the pump body, in particular axially enclose the center of gravity (229) of the pump body, and / or wherein the axial distance an engagement structure (225) to the center of gravity (229) with the axial distance of another engagement structure (225) to the center of gravity (229) and / or wherein the engagement structures (225) have different axial distances to the center of gravity (229). Vacuum pump (111) according to at least one of the preceding claims,
characterized in that
the engagement structure (225) is formed as a groove-like depression, preferably as a T-groove, and / or for receiving at least one sliding block and / or wherein a sliding block is displaceable within the groove-like depression. Vacuum pump (111) according to at least one of claims 1 to 5,
characterized in that
the at least one engagement structure is designed as a web-like projection and / or for guiding a complementarily shaped fastening element, in particular a sliding block with groove-like depression formed therein. Vacuum pump (111) according to at least one of the preceding claims,
characterized in that
the engagement structure (225) has an insertion section (231) for a fastening element (237) and / or wherein the insertion section (231) is designed to introduce a fastening element (237) transversely to the longitudinal course of the engagement structure (225) and / or wherein the insertion section (23) 231) by an interruption of the cross-sectional shape (233), in particular by an interruption of a T-shaped cross section and / or by omitting projections (235) for the form-fitting engagement behind a fastener (237) is formed. Vacuum pump (111) according to at least one of the preceding claims,
characterized in that
the at least one engagement structure (225) is produced by machining, preferably by turning and / or milling, more preferably with a T-slot milling cutter, and / or wherein the engagement structure (225) is machined into the pump body. Vacuum pump (111) according to at least one of the preceding claims,
characterized in that
the pump body is formed by a housing (119, 121) and at least one in and / or on the housing (119, 121) arranged pump component, in particular a plurality of pump components, and / or wherein the housing (119, 121) is formed in several parts and / or wherein at least one pump component as a rotor (149) and / or the Housing (119, 121) forms a stator or is connected to a stator and / or wherein the rotor (149) is rotatably mounted about a rotation axis (151) extending along the longitudinal extent of the pump body and / or by its center of gravity (229) , in particular coincides with a gravity axis of the pump body. Vacuum pump (111) according to claim 10,
characterized in that
the fastening device is formed on the housing (119, 121) and / or wherein the housing (119, 121) encloses the at least one pump component and / or wherein the housing (119, 121) has a longitudinal extension and / or an angular and / or Has substantially round outer periphery, preferably a circular outer periphery, and / or wherein the longitudinal extent of the housing (119, 121) is greater than a housing diameter, in particular as a middle and / or as the largest or smallest housing diameter. Vacuum pump (111) according to at least one of the preceding claims,
characterized in that
the pump body, in particular the housing (119, 121), in the region of and / or adjacent to the at least one engagement structure (225) has a reinforcement and / or wherein the housing (119, 121) in the region of and / or adjacent to the Engagement structure (225) has a greater wall thickness than in the other housing sections. Arrangement for handling and / or assembling a vacuum pump (111), comprising a lifting device having a carrying means, with a vacuum pump (111) according to at least one of the preceding claims, with at least one fastening element (237) displaceably positioned in or on the engagement structure (225). , preferably a sliding block, and with a load-bearing means (239), which is connected to the fastening element (237) and preferably designed as eyebolt, wherein the load receiving means (239) is preferably connected to the support means. Method for handling and / or assembling a vacuum pump (111), preferably according to one of claims 1 to 12 or with an arrangement according to claim 13, in which the vacuum pump (111) is lifted by a hoist, - In which the vacuum pump (111) by rotation about a longitudinal and / or rotor and / or gravity axis (227) is aligned in space and - Wherein by the rotation of the vacuum pump (111) in space at least one fastener (237) in and / or on the engagement structure (225) of the vacuum pump (111) is guided out.

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