JP2020026794A - Method of producing vacuum pump - Google Patents

Abstract

To improve the resistance of adhesive connections in a vacuum pump.SOLUTION: The present invention relates to a method of producing a vacuum pump (111), in particular a turbo molecular pump. With the method, first elements (163, 165) are connected to a second element (161) by an adhesive. In this case, the first and second elements (163, 165, 161) each have first or second adhesive regions (231, 232, 233, 234) provided for an adhesive, and then at least one of the adhesive regions (231, 232, 233, 234) is at least partially treated with plasma before connection.SELECTED DRAWING: Figure 1

Description

  The present invention is a method for the manufacture of a vacuum pump, in particular a turbo-molecular pump, wherein a first element is connected to a second element by an adhesive, wherein the first and second elements are connected by an adhesive. Each relates to a method having a first or second adhesive area provided for an adhesive.

  The invention further relates to a vacuum pump, in particular a turbo-molecular pump, comprising first and second elements, which are connected by an adhesive, wherein the first and second elements are respectively: The present invention relates to a vacuum pump having a first or second bonding area provided for an adhesive.

  For example, prior art vacuum pumps have a Holweck stage. It has a cylindrical rotor sleeve. The rotor sleeve rotates during operation of the pump and carries the gas to be carried along the screw path. The screw path is usually formed in a restrained cylinder surrounding or surrounded by the rotor sleeve. The rotor sleeve is fixed to the rotor hub by an adhesive. In particular, turbomolecular pumps rotate at high speeds as is known. Thus, in general, a high load is generated on all involved elements and their connections.

European Patent Application Publication No. 2597313A2

  It is an object of the present invention to improve the resistance of an adhesive connection in a vacuum pump.

  This object is achieved by a manufacturing method for a vacuum pump according to claim 1, in particular at least one of the bonding areas is at least partially, in particular completely, treated by a plasma before the connection. . The bonding area is then interpreted as a surface. It need not be flat, and it is provided for wetting by the adhesive.

  Since the plasma treatment leads to the activation of the bonding area, the adhesive can be better bonded to the element. The adhesive strength of the adhesive is thereby significantly increased in the treated adhesive area, so that an overall firm and durable connection is achieved.

  Such a process is simple and inexpensive to carry out and can be handled. Moreover, a special advantage of the plasma treatment is that it not only activates the bonding area, but also performs, in particular, degreasing and cleaning, as well as roughening and surface enlargement. All these effects additionally improve the adhesion in the bonding area of the adhesive. This preferably allows the conventional treatment for improving the adhesion to be omitted. Thus, for example, degreasing by hand can be omitted. This saves labor costs. Alternatively or additionally, for example, the polishing process can be omitted. This also simplifies the method. This is particularly advantageous if the adhesive area to be handled is formed, for example, on the inner surface of a cylindrical element. This is because the polishing process here is often particularly troublesome or completely impossible. After all, these effects can also be performed individually in the manufacture or additionally in a combination of conventional methods, in order to further improve the adhesive connection. This is possible, for example, by providing additional process steps including degreasing, cleaning, roughening, and / or enlarging the surface of the bonding area. For example, it is possible for a mechanical cleaning process to be provided before the plasma treatment.

  Furthermore, the plasma treatment causes the above-mentioned effects to be particularly uniform and reproducible based on the treated surface. This significantly increases the process safety and significantly reduces production waste. No cleaning agents are needed in the work space. When manual cleaning is omitted, the risk of injury and the scientific burden on the producer are reduced. Decontamination of the elements to be glued by the possibly contaminated cleaning tools is also omitted. In addition, conventional pretreatments (such as, for example, cleaning, in particular for the removal of dust particles) are intended, in which, for example, if contamination occurs due to contaminant debris in the cleaning machine, this is not the case with plasma. Reduced and eliminated by processing.

  Another advantage of the plasma treatment is that its effect, especially the activation of the surface, is relatively long lasting. Thus, an intermediate storage of the elements is possible, which makes the manufacturing process more flexible.

  The invention makes it possible to reduce the possibility of adhesion or adhesive failure between the element in question and the adhesive. This makes the connection overall stronger.

  Another advantage relates to the development of vacuum pumps. Here, the study of the vacuum pump is performed by, for example, a prior calculation using, for example, the finite element method. At that time, material parameters of the adhesive, particularly those regarding its strength, are required. These are usually provided by the adhesive supplier. Prior to the present invention, the intensity calculated from this differs from that determined in experiments on vacuum pump components. In particular, parameters are provided for standardized test conditions, since these cannot be easily met in the manufacture of vacuum pumps. This makes development difficult. In the manufacturing method according to the invention, on the contrary, the strength provided by the supplier is almost or virtually achieved in a particularly reliable but simple manner. This allows for more accurate considerations and thus the development of improved vacuum pumps.

  In particular, means for plasma generation (eg plasma furnaces or plasma chambers) are particularly low in acquisition costs, easy to operate, require little safety measures (safety measures) and are rarely maintained. Only need.

  According to one embodiment of the present invention, it is contemplated that the plasma treatment is performed at a sub-atmospheric pressure. This makes it possible in particular to achieve good activation of the surface. Alternatively, processing at atmospheric pressure or higher pressure is also possible.

  Similarly, it is advantageous if the plasma is generated from air as a plasma process gas according to an embodiment. This enables a particularly simple manufacturing process. This is because no special plasma process gas needs to be additionally stored. However, alternatively, other gases or gas mixtures can also be used as the process gas.

  In a development of the method according to the invention, the first and / or the second element are treated as a whole with a plasma. This basically means that all surfaces of the element are treated. This takes place, for example, in a chamber filled with plasma. Thus, all surfaces are exposed to the plasma. This has the advantage that the element can easily be placed in the chamber, without the need to precisely orient the element. The manufacturing method is further simplified.

  As far as reference is made to the first or second element herein, this is done for illustrative purposes only. It is understood that each described embodiment can be transferred to each other element. Basically, it is also possible for more than two elements to be glued together.

  In another embodiment, the plasma treatment is performed for at least 1 minute, in particular at least 3 minutes, and / or up to 10 minutes, especially up to 7 minutes. Particularly preferred is about 5 minutes.

  The plasma can be generated by, for example, direct current, alternating current, and / or microwaves. The alternating current is especially at a low or high frequency.

  According to a development, the first and / or the second element is provided or manufactured with a macroscopically defined surface roughness, in addition to the microscopic roughness particularly achieved by plasma treatment. The average roughness Rz is preferably at least in the bonding area, for example, at least 0.8 μm, in particular at least 1.6 μm, in particular at least 3.2 μm, in particular at least 6.3 μm, and / or up to 50 μm, in particular up to 25 μm In particular, it can be up to 17.5 μm.

  According to a development, the first and second elements are provided for rotation during operation of the vacuum pump. In particular, this can be a rotor member. The method works particularly advantageously here because of the particularly high forces during rotation.

  The vacuum pump can have Holweck stages according to an advantageous embodiment. In this case, the first element comprises an element that exerts the pumping effect of the Holbek stage, in particular a Holbek rotor three.

  Alternatively or additionally, the vacuum pump may have a permanent magnet electric motor, for example. In this case, one element, or the first element, may comprise, in particular, a rotor motor magnet, a permanent magnet, a load-receiving sleeve, and / or a restoring ring (return ring, German: Rueckschlossring) which can be driven electromagnetically.

  In one embodiment, only one of these components is treated by the plasma. This especially includes plastic in the bonding area. This achieves a good connection while reducing costs. However, it is also possible that both components are treated by the plasma.

  In particular, the first element is a plastic and / or a composite material, in particular a carbon fiber composite material, an aramid fiber composite material, a glass fiber composite material, a basalt fiber composite material, a hybrid having a fiber ratio or a fiber ratio of a plurality of the composite materials mentioned above. It may include a fabric composite and / or a laminar combination of the fiber types described above as a multilayer composite. These provide high strength at low weight.

  In a development, the first element comprises at least an essentially cylindrical part and comprises a fiber composite material in this part, the fibers of which at least to a considerable extent are at least essentially circumferential. Extending. This may also be referred to as the radial winding of the fiber. This is because they extend in a radial plane. As a result, the temperature expansion and / or the centrifugal expansion are minimized in the radial direction, so that the pump can be set particularly effectively, for example, with a narrow gap and thus, for example, with high compression. Contact between multiple elements can lead to pump failure, but such contact is effectively prevented.

  The second element may advantageously comprise a metallic material. For example, aluminum, at least one of alloys EN AW-6082, EN AW-7075, EN AW-7475, EN AW-2618, EN AW-2618A, titanium, especially alloy TiAl6V4, cast steel, especially alloy EN-GJL-150, At least one of -200, -250, -300, -350, EN-GJS-400-15, EN-GJS-500-7, EN-GJS-600-3, steel, particularly alloy 1.0711m, 1. 0715, 1.0721, 1.0736, E235, H320B and / or at least one of stainless steel, especially alloys 1.4301, 1.4305, 1.4401, 1.4429, 1.4435. obtain.

  According to a development, the first and / or the second element are provided with a cavity, and the region of the cavity at least partially forms an adhesive area. This makes it possible for the adhesive to be applied particularly purposely and to be held in the adhesive area. Furthermore, the plasma treatment allows a relatively free form of this space. This is because conventional pretreatment, particularly polishing or the like, is not required. The cavities can be formed, in particular, around the circumference, in particular as grooves, and / or as undercuts (Freistich) and / or as a circulating set of individual cavities.

  Between the first and second elements, for example, at least an essentially cylindrical connection area can be defined. Thereby, for example, good joining accuracy can be achieved.

  The cylindrical connection area can be arranged, for example, coaxially with the axis of rotation of the rotor of the vacuum pump.

  Furthermore, the connection area can be arranged, for example, in a ring shape in the axial direction with respect to the rotation axis of the rotor of the vacuum pump. The orientation of the connection area is not limited to a purely radial or axially expanding area coaxial with the axis of rotation of the vacuum pump rotor, but may also be a diagonal or any shaped area. It is advantageously arranged in a ring shape coaxially with the axis of rotation of the rotor of the vacuum pump.

  Combinations of multiple connection areas in the same orientation or different orientations between the two elements are likewise possible. Furthermore, a plurality of connection areas of the same orientation and / or different orientations may transition to intervene with one another, especially in the radial and axial directions, and define one common multi-axis complex connection area. It is possible.

  Any connection area can have one, in particular two, three or many, cavities for the adhesive, advantageously formed in the shape of a ring. They can each be formed with a mainly rectangular or complex cross section.

  The object of the invention is also solved by a vacuum pump having the features of an independent device claim, and in particular by the fact that at least one of the bonding areas is at least partially treated with a plasma before the connection. Is done.

  BRIEF DESCRIPTION OF THE DRAWINGS The invention is described below on the basis of advantageous embodiments with reference to the accompanying drawings. The figure simply shows:

Perspective view of turbo molecular pump Lower view of the turbo-molecular pump of FIG. FIG. 2 is a sectional view of the turbo-molecular pump taken along line AA shown in FIG. 2. FIG. 2 is a sectional view of the turbo-molecular pump taken along line BB shown in FIG. 2. FIG. 2 is a sectional view of the turbo-molecular pump taken along line CC shown in FIG. 2. Enlarged view of partial region T in FIG. Enlarged view of partial area U in FIG.

  The turbo-molecular pump 111 shown in FIG. 1 has a pump inlet 115 surrounded by an inlet flange 113. A vacuum vessel (not shown) can be connected to the pump inlet by a known method. Gas from the vacuum vessel can be drawn from the vacuum vessel via a pump inlet 115 and conveyed through a pump to a pump outlet 117. A pre-vacuum pump (eg, a rotary vane pump) can be connected to the pump outlet.

  The inlet flange 113 forms the upper end of the housing 119 of the vacuum pump 111 in the direction of the vacuum pump in FIG. The housing 119 has a lower part 121. It is provided with an electronics housing 123 on the side. The electronic housing 123 houses the electronic and / or electronic components of the vacuum pump 111. These are for operating an electric motor 125 arranged in a vacuum pump, for example. The electronics housing 123 is provided with a plurality of connection portions 127 for accessories. Furthermore, a data interface 129 (for example according to the RS485 standard) and a power supply connection 131 are provided in the electronics housing 123.

  In the housing 119 of the turbo-molecular pump 111, a flow inlet 133 is provided, in particular in the form of a flow valve. Through this, the vacuum pump 111 can receive overflow. In the area of the lower part 121, a sealing gas connection 135 (also called a cleaning gas connection) is further provided. Through this, a cleaning gas can be taken into the motor chamber 137 to protect the electric motor 15 against the gas carried by the pump. An electric motor 125 of the vacuum pump 111 is housed in the motor chamber. Two further cooling medium connections 139 are provided in the lower part 121. Here, one cooling medium connection is provided as an inlet for the cooling medium and the other cooling medium connection is provided as an outlet. A cooling medium can be directed into the vacuum pump for cooling purposes.

  Since the lower surface 141 of the vacuum pump can be used as a rising surface, the vacuum pump 111 can be operated upright on the lower surface 141. However, it is also possible for the vacuum pump 111 to be fixed to the vacuum vessel via the inlet flange 113, so that it can be operated in a suspended manner, so to speak. Further, the vacuum pump 111 can be configured to be able to be activated when oriented differently than that shown in FIG. It is also possible to realize an embodiment of a vacuum pump in which the lower side 141 is arranged not facing downwards but towards or towards that surface.

  Various screws 143 are further provided on the lower side surface 141 shown in FIG. By these, the components of the vacuum pump, not specified here in detail, are fixed to one another. For example, a support cover 145 is fixed to the lower side surface 141.

  The lower side surface 141 is further provided with a fixing hole 147. Through this, the pump 111 can be fixed to the mounting surface, for example.

  2 to 5, a cooling medium pipe 148 is shown. In this, it is possible that the cooling medium introduced or drawn out via the cooling medium connection 139 is circulating.

  As shown in the cross-sectional views of FIGS. 3 to 5, the vacuum pump has a plurality of process gas pump stages. This is for transporting the process gas reaching the pump inlet 115 to the pump outlet 117.

  A rotor 149 is arranged in the housing 119. This rotor has a rotor shaft 153 rotatable about a rotation shaft 151.

  The turbo molecular pump 111 has a plurality of pump stages serially connected to each other to produce a pump effect. These pump stages have a plurality of radial rotor disks 155 fixed to the rotor shaft 153 and a stator disk 157 disposed between the rotor disks 155 and fixed in the housing 119. In this case, one rotor disk 155 and one adjacent stator disk 157 form one turbomolecular pump stage. The stator disks 157 are held at a desired axial distance from one another by spacer rings 159.

  The vacuum pump further has Holweck pump stages radially nested within each other and serially connected to each other to effect pumping. The rotor of the Holbek pump stage has a rotor hub 161 provided on a rotor shaft 153 and two Holbec rotor sleeves 163, 165 fixed to the rotor hub 161 and carried by the cylinder. . These are oriented coaxially with the rotation axis 151 and are nested in one another in the radial direction. Further, two Holbek stator sleeves 167, 169 having a cylinder side shape are provided. They are likewise oriented coaxially with respect to the rotation axis 151 and are nested in one another as viewed in the radial direction.

  The surface of the Holbek pump stage that exerts a pumping effect is formed by the side surfaces, that is, by the inner and / or outer surfaces of the Holbek rotor sleeves 163, 165 and the Holbek stator sleeves 167, 169. The radially inner surface of the outer Holbek stator sleeve 167 faces the radially outer surface of the outer Holbek rotor sleeve 163, forming a radial Holbek gap 171 and which is coupled to the turbomolecular pump. A subsequent first Holbek pump stage is formed. The radially inner surface of the outer Holbek rotor sleeve 163 faces the radially outer surface of the inner Holbek stator sleeve 169, forming a radial Holbek gap 173, and Form a Beck pump stage. The radially inner surface of the inner Holbek stator sleeve 169 faces the radially outer surface of the inner Holbec rotor sleeve 165, forming a radial Holbek gap 175, and Form a Beck pump stage.

  The lower end of the Holbek rotor sleeve 163 may be provided with a radially extending channel. Through this, the Holbeck gap 171 located on the radially outer side is connected to the central Holbeck gap 173. Further, the upper end of the Holweck stator sleeve 169 may be provided with a radially extending channel. Through this, the central Holbek gap 173 is connected to the Holbek gap 175 located radially inward. This allows a plurality of nested pumps to be serially connected to one another. The lower end of the holbek rotor sleeve 165, which is located radially inward, can furthermore be provided with a connection channel 179 to the outlet 117.

  The pumping surfaces of the Holbeck stator sleeves 167 and 169 each have a plurality of Holbeck grooves extending in the axial direction while orbiting around the rotation shaft 151 in a spiral shape. On the other hand, the opposing sides of the Holbek rotor sleeves 163, 165 are smoothly formed and drive the gas for the operation of the vacuum pump 111 into the Holbek grooves.

  For the rotatable bearing of the rotor shaft 153, a roller bearing 181 in the area of the pump inlet 117 and a permanent magnet bearing 183 in the area of the pump outlet 115 are provided.

  In the area of the roller bearing 181, a conical splash nut 185 is provided on the rotor shaft 153. It has an outer diameter that increases towards the roller bearing 181. The splash nut 185 is in sliding contact with at least one skimmer (Abstreifer) in the working medium reservoir. The working medium reservoir has a plurality of absorbent disks 187 stacked on one another. These discs are impregnated with the working medium for the roller bearing 181, for example, a lubricant.

  During operation of the vacuum pump 111, the working medium is transmitted from the working medium reservoir via a skimmer to the rotating splash nut 185 by a capillary effect, and the centrifugal force along the splash nut 185 causes the splash nut 185 to expand. The roller is conveyed toward the roller bearing 181 in the direction of the outer diameter. There, for example, a lubrication function is exerted. The roller bearing 181 and the working medium reservoir are surrounded by a tank-shaped insert 189 and a bearing cover 145 in the vacuum pump.

  The permanent magnet support 183 has a rotor-side support half 191 and a stator-side support half 193. These each have one ring stack. The ring stack consists of a plurality of rings 195, 197 of permanent magnets stacked on one another in the axial direction. The ring magnets 195, 197 face each other forming a radial bearing gap 199, with the rotor-side ring magnet 195 radially outward and the stator-side ring magnet 197 radially inward. It is provided in. The field present in the bearing gap 199 causes a magnetic repulsion between the ring magnets 195,197. This achieves a radial bearing of the rotor shaft 153. The rotor side ring magnet 195 is carried by the carrier portion 201 of the rotor shaft 153. This surrounds the ring magnet 195 radially outward. The ring magnet 197 on the stator side is carried by the carrier portion 203 on the stator side. It extends through the ring magnet 197 and is suspended from struts 205 of the housing 119. A rotor-side ring magnet 195 is fixed parallel to the rotation shaft 151 by a cover element 207 connected to the carrier part 203. The stator-side ring magnet 197 is fixed in one direction parallel to the rotating shaft 151 by a fixed ring 209 connected to the carrier portion 203 and by a fixed ring 211 connected to the carrier portion 203. In addition, a flat spring 213 may be provided between the fixed ring 211 and the ring magnet 197.

  An emergency or safety support 215 is provided inside the magnet support. This leads to non-contact idle rotation during normal operation of the vacuum pump, and only to effect when the rotor 149 is excessively radially displaced relative to the stator. This is to form a radial stopper for the rotor 149. This is because the structure on the rotor side is prevented from colliding with the structure on the stator side. The safety bearing 215 is formed as an unlubricated roller bearing and forms a radial gap with the rotor 149 and / or the stator. This gap provides that safety bearing 215 is inactive during normal pump operation. The radial gap leading to the action of the safety bearing is dimensioned sufficiently large so that the safety bearing 215 does not work during normal operation of the vacuum pump and at the same time is sufficiently small that the rotor Collisions of the side structure with the structure of the stator side are prevented in all situations.

  The vacuum pump 111 has an electric motor 125 for driving the rotor 149 to rotate. The anchor of the electric motor 125 is formed by the rotor 149. The rotor shaft 153 extends through the motor stator 217. The portion of the rotor shaft 153 that extends through the motor stator 217 can be provided with a permanent magnet arrangement radially outward or embedded. An intermediate space 219 is provided between a portion of the rotor 149 extending through the motor stator 217 and the motor stator 217. It has a radial motor gap. Through this, the motor stator 217 and the permanent magnet device can magnetically influence each other for transmitting the drive torque.

  The motor stator 217 is fixed in a motor chamber 137 provided for the electric motor 125 in the housing. Via a sealing gas connection 135, a sealing gas (also called a cleaning gas, which can be, for example, air or nitrogen) flows into the motor compartment 137. Via the sealing gas, the electric motor 125 can be protected against process gases, for example corrosive parts of the process gas. The motor chamber 137 can also be evacuated via the pump outlet 117, i.e. the motor chamber 137 is at least approximately at a pre-vacuum state realized by a vacuum reading pump connected to the pump outlet 117 It has become.

  A so-called known labyrinth seal 223 can be further provided between the wall 221 defining the motor chamber 137 and the rotor hub 161. In particular, this is to achieve better sealing of the motor chamber 217 with respect to the Holbeck pump stage located radially outward.

  FIG. 6 shows an enlarged portion T in FIG. In this, the connection between the rotor hub 161 and the Holbek rotor sleeves 163 and 165 can be clearly seen. Five pairs of corresponding adhesive areas 231 and 232, 233 and 234, 235 and 236, 237 and 238, and 239 and 240 can be seen. These are each filled with an adhesive. Each connection area is formed by their respective surfaces between the holbek rotor sleeve 163 or 165 on the one hand and the rotor hub 161 on the other hand. At least one of the bonding areas 231 to 240 has been at least partially pre-treated with a plasma.

  Here, respectively, the carbon fiber composite material is bonded to the side of the Holbek rotor sleeves 163, 165 and the metal is bonded to the side of the rotor hub 161. The fibers of the rotor sleeves 163 and 165 are preferably radially wound, that is to say extend in the circumferential direction, and extend perpendicular to the plane of the drawing in FIG.

  In one or both of the elements to be glued, it is possible for the surrounding space, in particular the groove, to be provided for the adhesive. Thus, for example, the bonding region 232 is formed by a circling space, that is, by an undercut. The bonding areas 234, 236, 238 and 240 are likewise rounded, but formed as grooves. The bonding regions 233, 235, 237, 239 are formed flat with respect to this. On the other hand, the bonding area 231 is formed as a corner. The bonding area pairs 233 and 234, 235 and 236, 237 and 238, and 239 and 240 form a radial connection with the adhesive present therein. In contrast, the bonding areas 231 and 232 form a connection with an adhesive that is oriented both radially and axially. Of course, other quantities, arrangements and combinations of bonding areas are possible.

  FIG. 7 is an enlarged view of a portion U in FIG. 3, and basically shows the mounting and configuration of the electric motor 125. The permanent magnet arrangement in the rotor shaft 153 in the region of the electric motor 125 for the magnetic transmission of the driving torque is at least one or more, in particular regularly coaxially arranged and / or magnetized. Of the permanent magnet 241. It can have different materials, especially ferromagnetic materials. Ferromagnetic materials include, among others, samarium-cobalt (Sm-Co), neodymium-iron-boron (Nd-Fe-B), and / or ferrite (strontium-ferrite Sr-Fe-O, barium-ferrite Ba-Fe-). O or cobalt-ferrite (Co—Fe—O). These powder materials are formed into permanent magnets, especially in tool-related presses or hot isostatic presses and subsequent and / or integrated sintering processes, and / or plastic adhesives as injection molding compounds, It can then be used for the drive of the rotor 149 (see FIG. 3).

  The arrangement of the permanent magnet 241 on the rotor shaft 153 can be made coaxial, especially in a ring shape. Permanent magnets typically have only low mechanical strength and / or only low elongation at break (German: Bruchdehnungswerte). Due to thermal expansion and / or centrifugal expansion, the mechanical, mostly radial tensile stresses generated during rotation of the rotor 149 and operation of the pump in the permanent magnet cause the permanent magnet arrangement to at least partially In particular, it can be minimized by a load-receiving sleeve 242, which is advantageously ring-shaped, especially completely radially surrounding or covering.

  Advantageously, the load-receiving sleeve 242 is materially connected to the radially pressed or shrink ties in a force-coupled manner and / or in particular to the inner permanent magnet by an adhesive connection. That is, in FIG. 7, the bonding region 243 is provided, and the bonding region is bonded to the bonding region 244 of the permanent magnet 241. At this time, at least one of the adhesion regions 243 and 244 has been previously treated with plasma.

  The load receiving sleeve 242 may include a non-magnetic metallurgy, particularly stainless steel, or titanium, or may particularly include a fiber composite material. The fibers advantageously extend at least in a significant proportion, at least essentially in the circumferential direction, and mainly occur during rotation of the rotor 149, of the permanent magnet arrangement arranged inside the load-receiving sleeve 242. Radial forces are advantageously required and can be supported accordingly.

  The load receiving sleeve 242 may have additional functions in addition to supporting the permanent magnet device. For example, they can extend radially to one or both sides beyond the permanent magnet 241. Further axial and / or radial centering and / or rotor 149, or an element thereof, in particular the inner diameter, or outer diameter in those directions, and / or one or both axial fronts, This is for connection to the shaft 153.

  Advantageously, by radially and / or axially effective centering between the load receiver 242 and the rotor shaft 153, the entire load receiver sleeve 240 with the permanent magnet arrangement 241 centered inside it. The orientation can be optimized and implemented. The mechanical connection with the rotor shaft 153 is made as a compression connection or a contraction connection and / or advantageously in a material-bonded manner, for example by means of an adhesive, for example by plasma treatment of the bonding area.

  In addition, an intermediate space 219 is advantageously formed in vacuum technology, like the Holbek gaps 171, 173, 175 and the motor stator 217, and / or the repelling stator like the Holbek stators 167, 169. As long as the load receiving sleeve 242 has the same vacuum technical function as the Holbeck sleeves 163 and 165, the load receiving sleeve 242 can have the same function.

  The improvement of the function of the electric motor 125 is possible by means of a permanent magnet arrangement or a radial arrangement of a ferromagnetic restoring element (Rueckschlossselment) 245 radially inside the permanent magnet 241. The restoring element 245 can be formed as a ring-shaped unique element radially surrounding the rotor shaft 153, or can be formed as a hollow or centrally formed rotor shaft. In both cases, the aim is to optimize the magnetic circuit of the electric motor, advantageously by introducing one or more weakly magnetic, in particular metallic elements.

  The connection between the restoring ring 245, the permanent magnet 241, the rotor shaft 153, and / or the load-receiving sleeve 242 may be, for example, form-fit, as a pressed composite or as a shrink composite, and / or advantageously as a material bond In particular, this is done at least with an adhesive. Adhesion can, for example, advantageously connect more than two of the above-described elements to one another and create an overall composite that is operationally safe. In all adhesive connections, it is possible, for example, for at least one, in particular a plurality of adhesive areas to be provided for each connection partner. At least one, especially more than one, or all of them have been pre-treated with plasma.

  The rotor shaft 153 has one adhesive region 246 here. This is formed as a void. The void has an additional void 247. This also forms an adhesive area 246. The bonding area 246 is the part of the bonding connection with a plurality of further elements, namely the permanent magnet 241, the restoring element, and even a small part of the load-receiving sleeve 242. These have their own adhesive areas 248, 249, or 250. At least one of the bonding areas 246, 248, 249 and 250 has been pre-treated with a plasma.

  Here, in particular, in the bonding areas 243 and 244, a carbon fiber composite material pair is bonded to the side of the load-receiving sleeve 242, and the plastic is bonded to the side of the resin-bonded compound permanent magnet 241; At 246 and 248 a ferromagnetic steel material pair is glued to the side of the restoring ring 245 and aluminum to the side of the rotor shaft 153. At the bonding areas 246 and 248, ie at their axial ends, the material of the permanent magnet 241 and the load-receiving sleeve 242 additionally participates. These bonds 246, 248 are made in complex shapes and connect the members 153, 241, 242 and 245 described above in a multiaxial arrangement over a plurality of partial volumes.

111 Turbo molecular pump 113 Inlet flange 115 Pump inlet 117 Pump outlet 119 Housing 121 Lower part 123 Electronics housing 125 Electric motor 127 Accessory connection 129 Data interface 131 Power supply connection 133 Flow inlet 135 Seal gas connection 137 Motor room 139 Coolant Connection portion 141 Lower side surface 143 Screw 145 Bearing cover 147 Fixing hole 148 Coolant pipe 149 Rotor shaft 153 Rotor shaft 155 Rotor disk 157 Stator disk 159 Spacer ring 161 Rotor hub 163 Holbek rotor sleeve 165 Holbek rotor sleeve 167 Hollow Beck Stator Sleeve 169 Holbeck Stator Reeve 171 Holbek gap 173 Holbek gap 175 Holbek gap 179 Connection channel 181 Roller bearing 183 Permanent magnet bearing 185 Splash nut 187 Disk 189 Insert 191 Rotor-side bearing half 193 Stator-side bearing half 195 Ring magnet 197 Ring magnet 199 Bearing gap 201 Bearing part 203 Bearing part 205 Radial column 207 Cover element 209 Support ring 211 Retaining ring 213 Belleville spring 215 Emergency or safety bearing 217 Motor stator 219 Intermediate space 221 Wall 223 Labyrinth seal 231-240 Adhesion Area 241 Permanent magnet 242 Load receiving sleeve 243 Bonding area 244 Bonding area 245 Restoring element 246 Bonding area 247 Void 248-250 Chakuryoiki

Claims (15)

A method for the production of a vacuum pump (111), in particular a turbo-molecular pump, wherein a first element (163, 165) is connected to a second element (161) by an adhesive,
In this case, the first and second elements (163, 165, 161) each have a first or second adhesive area (231, 232, 233, 234) provided for an adhesive. And
In this case, at least one of the bonding areas (231, 232, 233, 234) is at least partially treated with a plasma before the connection. The method of claim 1, wherein the plasma treatment is performed at a sub-atmospheric pressure or at an atmospheric pressure. 3. The method according to claim 1, wherein the plasma is generated from air as a plasma process gas. 4. The method according to claim 1, wherein the first and / or the second element are treated as a whole with a plasma. 5. The method according to claim 1, wherein the plasma treatment is performed for at least one minute and / or for at most 10 minutes. 6. The method according to claim 1, wherein the plasma is generated by a direct current, in particular a low or high frequency alternating current, and / or a microwave. 7. The method according to claim 1, wherein the first and / or second element is provided for rotation during operation of the vacuum pump. The method described in the section. The vacuum pump (111) has a Holweck stage, and the first element (163, 165) comprises an element that exerts the Holbek stage pumping effect. The method described in. 9. A method according to any one of the preceding claims, wherein the first element (163, 165) comprises a composite material. The first element (163, 165) comprises at least an essentially cylindrical part and comprises a fiber composite material in this part, in particular wherein the fibers of the fiber composite material are at least to a considerable extent: The method according to claim 1, wherein the method extends at least essentially circumferentially. The method according to any of the preceding claims, wherein the second element (161) comprises a metallic material. The first and / or second element (163, 165, 161) is provided with a cavity, and the region of the cavity at least partially forms an adhesive area. Item 12. The method according to any one of Items 1 to 11. 13. The method according to claim 1, wherein at least an essentially cylindrical connection area is defined between the first and second elements. 14. The method according to claim 13, wherein the cylindrical bonding area is arranged coaxially with respect to the axis of rotation (151) of the rotor (149) of the vacuum pump (111). A vacuum pump (111), in particular a turbo-molecular pump, in particular a vacuum pump manufactured according to the method of one of claims 1 to 14, wherein the first element (163, 165) and the second element (163). 161), which are connected by an adhesive,
In this case, the first and second elements (163, 165, 161) each have a first or second adhesive area (231, 232, 233, 234) provided for an adhesive. And
A vacuum pump, characterized in that at least one of the bonding areas (231, 232, 233, 234) is at least partially treated with plasma before connection.

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