EP3303651A1 - Wear and/or friction reduction by using molybdenum nitride based coatings - Google Patents

Wear and/or friction reduction by using molybdenum nitride based coatings

Info

Publication number
EP3303651A1
EP3303651A1 EP16728832.3A EP16728832A EP3303651A1 EP 3303651 A1 EP3303651 A1 EP 3303651A1 EP 16728832 A EP16728832 A EP 16728832A EP 3303651 A1 EP3303651 A1 EP 3303651A1
Authority
EP
European Patent Office
Prior art keywords
mon
layer
less
individual
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP16728832.3A
Other languages
German (de)
English (en)
French (fr)
Inventor
Johann Karner
Volker Derflinger
Maximilian Erich LUICHTL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Surface Solutions AG Pfaeffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions AG Pfaeffikon filed Critical Oerlikon Surface Solutions AG Pfaeffikon
Publication of EP3303651A1 publication Critical patent/EP3303651A1/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/542Controlling the film thickness or evaporation rate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J9/00Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction
    • F16J9/26Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction characterised by the use of particular materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • Y10T428/24975No layer or component greater than 5 mils thick

Definitions

  • the present invention relates to coatings for attaining reduction of wear or reduction of friction on surfaces of components.
  • Such components for example can be used in the automotive sector or precision components (i.e. highly engineered components) sector.
  • the components can be for example piston pins, cam followers or piston rings or nozzle needles.
  • molybdenum coatings or molybdenum comprising coatings is well known.
  • molybdenum nitride as wear reduction coating on surfaces of components is in particular well known.
  • the behavior of the interface between the substrate surface of the component and the molybdenum nitride coating is however still today unsatisfactory and insufficient for meeting the current industrial requirements during application of the so coated components.
  • the substrate material to be coated is not hard enough, it means in this context that the substrate material has a hardness for example between 50-65 HRC, in any case not higher than 65 HRC.
  • Figure 1 shows a picture of a coated surface after Rockwell indentation HRC, where the hardness of the substrate is between 50 and 65 HRC and the substrate is coated with MoN. Ring-shaped fracture of the MoN coating can be clearly observed surrounding the HRC Rockwell indentation. It is possible that the observed ring-shaped fracture has been produced as a consequence of the big difference between the hardness and Young's modulus of the MoN coating and the hardness and Young's modulus of the substrate material.
  • variable loads interrupted load
  • substrates having a higher hardness such as e.g. substrates made of cemented carbide.
  • the components used in many automotive applications are made of materials which have Rockwell hardness lower than 65 HRC.
  • the objective of the present invention is to modify the molybdenum nitride coating and/or the substrate surface to be coated in order to improve the contact between substrate surface and MoN coating when the substrate exhibit a hardness of 65 HRC or lower and the coated substrate is subjected to load or especially to interrupted load.
  • inventive solution makes possible that no ring-shaped fracture lines are produced during Rockwell indentation by conduction of HRC Rockwell tests in substrates coated with MoN based coatings when the substrate hardness is lower or equal to 65 HRC.
  • the objective of the present invention is attained by providing a component having a layer or a layer system between the substrate surface and the coating comprising at least one MoN layer according to claim 1.
  • the MoN coatings in the context of the present invention were deposited by using a reactive PVD process.
  • reactive arc PVD process are demonstrated to be suitable for depositing MoN coatings on component surfaces hardened as suggested above. It is a special advantage of the used method that the nitriding processs of the substrate and the coating process can be done in a same vacuum chamber of a coating machine.
  • the MoN coating can be deposited exhibiting a hexagonal phase or a cubic phase or a mixture of hexagonal and cubic phases.
  • Figure 2 shows a picture of a surface coated according to the above mentioned inventive solution that was tested afterwards according to the standard HRC Rockwell test. In this picture it is clear to see that no ring-shaped fracture lines surrounding the Rockwell indentation can be observed.
  • the inventors proposes to apply a multilayer structured MoN/CrN coating, which comprises alternate deposited individual layers of MoN and individual layers of CrN. Especially good results i.e. Rockwell indentations without ring-shaped fracture lines or further adhesive failures were in particular observed by using this second inventive solution when the thickness of the multilayer coating was about 4 to 5 ⁇ .
  • the MoN layers can be also deposited exhibiting a hexagonal phase or a cubic phase or a mixture of hexagonal and cubic phases.
  • the MoN and CrN individual layers can be deposited for example by using a reactive PVD process.
  • a reactive arc PVD process is used for depositing the MoN and the CrN individual layers of the multilayer coating. Since as described in the first inventive solution the component surface to be coated with a MoN coating must be previously nitrided and standard nitriding processes are conducted at temperatures of 450 °C or higher, only components made of materials which can resist such temperatures can be treated in this manner.
  • the second inventive solution (using a MoN/CrN multilayer coating) involves the advantage that the coating process can be conducted at temperatures lower than 450 °C, e.g. of 200 °C. Since as already mentioned no nitriding step is necessary, components made of temperature sensitive materials can be treated, like for example piston pins.
  • an adhesion layer made of CrN This adhesion layer was deposited for example before depositing the MoN coating according to the first inventive solution or before depositing the modified MoN coating according to the second inventive solution, respectively.
  • the CrN adhesion layer is preferably provided having a layer thickness of at least 30 nm. The thickness of the CrN adhesion layer preferably between 0.05 ⁇ and 1 ⁇ .
  • cam follower treated according to the first inventive solution did not show any damage after the nitriding step.
  • the components that can be treated according to the present invention are however not limited by this description.
  • the surfaces of the components treated according to the present invention exhibit additionally very good tribological properties, in particular concerning increment of wear resistance. Examples: Different automotive and precision components were treated according to the present invention and stupendous improvements concerning increment of wear resistance were attained.
  • cam followers were treated according to the state of the art and others were treated according to some preferred embodiments of the present invention. Subsequently, all treated cam followers were subjected to different analysis and tests.
  • QRS Quretrachloro-1-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoetyl-N-trimethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoethyl-N-(2-aminoethyl)-2-aminoe
  • Treatment A (state of the art): The surfaces of the QRS and the cam followers to be tested were coated with a MoN layer having a thickness of approximately 2.5 ⁇ on QRS and 4.5 ⁇ on cam follower. Between the MoN layer and the surface of the cam follower a thin CrN layer with thickness of approximately 50 nm was deposited as adhesion layer. The MoN layer was deposited by using reactive Arc PVD techniques. By deposition of the MoN layer a Mo target was arc vaporized in a vacuum atmosphere comprising nitrogen as reactive gas. The nitrogen partial pressure was maintained at 3 Pa and the substrate temperature (i.e. the temperature of surface of the cam follower being treated) was approximately 200 °C.
  • the MoN layer was formed comprising basically only the hexagonal phase of molybdenum nitride.
  • Treatment B (inventive): The surfaces of the QRS and the cam followers to be tested were coated with the same coating as described in Treatment A, but the cam follower surface was previously subjected to a hardening step consisting of a plasma nitriding process carried out in a vacuum chamber comprising nitrogen.
  • the substrate temperature (the temperature of the component measured at the surface being subjected to treatment) was approximately 480 °C. In this manner a hardened, nitrogen-containing surface layer having a thickness of approximately 50 ⁇ was formed.
  • a MoN layer was deposited by using reactive Arc PVD techniques.
  • a Mo target was arc vaporized in a vacuum atmosphere comprising nitrogen as reactive gas.
  • the nitrogen partial pressure was maintained at 3 Pa and the substrate temperature (i.e. the temperature of surface of the cam follower being treated) was approximately 480 °C.
  • the MoN layer was formed comprising a mixture of hexagonal phase and at least one cubic phase of molybdenum nitride.
  • a thin CrN layer with thickness of approximately 50 nm was deposited as adhesion layer between the MoN layer and the hardened, nitrogen-comprising surface layer.
  • Treatment C The surfaces of the QRS and the cam followers to be tested were treated similarly as described in Treatment B, but after the hardening step, the coating chamber was cooled down until the substrates to be coated attained a temperature of approximately 200 °C and the MoN layer was then deposited by using a nitrogen partial pressure of 3 Pa but at a substrate temperature of approximately 200 °C. In this manner the MoN layer was formed comprising basically only the hexagonal phase of molybdenum nitride.
  • the thickness of the hardened, nitrogen-containing surface layer was approximately 50 ⁇ .
  • the thickness of the MoN layer was about 2.5 ⁇ on QRS and 4.5 ⁇ on cam follower.
  • a thin CrN layer with thickness of approximately 50 nm was deposited as adhesion layer between the MoN layer and the hardened, nitrogen-comprising surface layer.
  • Treatment D The surfaces of the QRS and the cam followers to be tested were coated with a multilayer MoN/CrN coating film having a thickness of approximately 4 ⁇ on both QRS and cam follower.
  • the multilayer MoN/CrN coating film was deposited deposited by using reactive Arc PVD techniques. By deposition of the multilayer MoN/CrN coating film one Mo target and one Cr targets were arc vaporized in a vacuum atmosphere comprising nitrogen as reactive gas. The nitrogen partial pressure was maintained at 3 Pa and the substrate temperature was approximately 200 °C. MoN individual layers and CrN individual layers were deposited alternate one on each other as shown in Figure 3.
  • FIG. 3 shows a picture of a cross section corresponding to a portion of a multilayer MoN/CrN coating film deposited on a cam follower according to the present invention.
  • the individual MoN layers comprised in the multilayer MoN/CrN coating film deposited in this manner comprised a mixture of hexagonal phase and at least one cubic phase of molybdenum nitride.
  • the treated QRS were tested by using the HRC Rockwell test and the cam followers were tested by using an engine valve test at different rotation speeds during up to 200 hours. ⁇
  • the treated surfaces of the QRS were tested by using In HRC Rockwell test as mentioned above. All surfaces of the QRS treated with the Treatments A according to the state of the art presented ring-shaped fractures after HRC Rockwell test. Contrariwise, all surfaces of the QRS treated with the Treatments B, C and D according to the present invention presented surprisingly no ring-shaped fractures after HRC Rockwell test.
  • the present invention relates to: a component comprising a substrate surface coated with a coating comprising at least one MoN layer having a thickness not less than 40 nm, wherein between the substrate surface and the at least one MoN layer a substrate surface hardened layer is comprised, which is a hardened, nitrogen-containing substrate surface layer that is the result of a nitriding treatment carried out at the substrate surface and has a thickness not less than 10 ⁇ , preferably not less than 20 ⁇ and not greater than 150 ⁇ , or a component comprising a substrate surface coated with a coating comprising at least one MoN layer having a thickness not less than 40 nm, wherein between the substrate surface and the at least one MoN layer:
  • a substrate surface hardened layer which is a hardened, nitrogen- containing substrate surface layer that is the result of a nitriding treatment carried out at the substrate surface and has a thickness not less than 10 ⁇ , preferably not less than 20 ⁇ and not greater than 150 ⁇
  • a layer system composed of more than 2 MoN layers and more than 2 CrN layers is comprised, wherein the MoN and CrN layers forming the layer system are individual layers deposited alternate one on each other forming a multilayer MoN/CrN coating film or a component comprising a substrate surface coated with a coating comprising at least one MoN layer having a thickness not less than 40 nm, wherein between the substrate surface and the at least one MoN layer a layer system composed of more than 2 MoN layers and more than 2 CrN layers is comprised, wherein the MoN and CrN layers forming the layer system are individual layers deposited alternate one on each other forming a multilayer MoN/CrN coating film.
  • the at least one MoN layer has a thickness not less than 500 nm.
  • the at least one MoN layer can be deposited in such a manner that it consists of molybdenum nitride comprising at least largely the hexagonal phase ⁇ - ⁇ or only the hexagonal phase ⁇ - ⁇ .
  • the overall thickness of said at least one MoN layer is not less than 1 ⁇ and not less than 15 ⁇ , more preferably not less than 1,5 ⁇ and not greater than 10 ⁇ .
  • said multilayer MoN/CrN coating film has a thickness not less than 460 nm.
  • the above mentioned at least one MoN layer having a thickness not less than 40 nm can be also comprised between two multilayer MoN/CrN coating films, wherein each multilayer MoN/CrN coating film has preferably a film thickness not less than 460 nm.
  • the sum of the thicknesses of both multilayer MoN/CrN coating films and said at least one MoN layer is not less than 1 ⁇ and not greater than 15 ⁇ ⁇ , preferably not less than 1,5 ⁇ and not greater than 10 ⁇ .
  • an individual intermediate layer comprising Mo, Cr and N is comprised.
  • the individual intermediate layer has a thickness not less than 10 nm and not greater than thickness of the individual CrN layer or the thickness of the individual MoN layer that is next to said individual intermediate layer.
  • At least the majority of the individual MoN layers have an individual layer thickness not less than 40 nm and preferably not greater than 500 nm.
  • At least the majority of the individual CrN layers have an individual layer thickness not less than 20 nm and preferably not greater than 500 nm.
  • the overall thickness of said multilayer MoN/CrN coating film is not less than 1 ⁇ and not greater than 15 ⁇ , preferably not less than 1,5 ⁇ and not greater than 10 ⁇ .
  • the individual MoN layers consists of molybdenum nitride comprising a mixture of phases, the mixture comprising:
  • the treatments according to the present invention are particularly advantageously, when the component is an automotive component or a precision component, and more in particular if the substrate surface of the component has a hardness equal or lower than 65 HRC.
  • a preferred method for producing a component according to at least one of the embodiments of the present invention comprises the deposition of said at least one MoN layer or of at least one of the individual MoN layers by means of a reactive PVD process.
  • the method involves the use of a reactive Arc PVD process as reactive PVD process, wherein during deposition of the MoN layer or the MoN individual layer, at least one target of Mo is operated as cathode and in this manner evaporated by using Arc PVD techniques in an atmosphere comprising nitrogen as reactive gas.
  • a reactive Arc PVD process as reactive PVD process, wherein during deposition of the MoN layer or the MoN individual layer, at least one target of Mo is operated as cathode and in this manner evaporated by using Arc PVD techniques in an atmosphere comprising nitrogen as reactive gas.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
  • Pistons, Piston Rings, And Cylinders (AREA)
EP16728832.3A 2015-05-26 2016-05-25 Wear and/or friction reduction by using molybdenum nitride based coatings Pending EP3303651A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015006510 2015-05-26
DE102016003998 2016-04-07
PCT/EP2016/000863 WO2016188632A1 (en) 2015-05-26 2016-05-25 Wear and/or friction reduction by using molybdenum nitride based coatings

Publications (1)

Publication Number Publication Date
EP3303651A1 true EP3303651A1 (en) 2018-04-11

Family

ID=56121014

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16728832.3A Pending EP3303651A1 (en) 2015-05-26 2016-05-25 Wear and/or friction reduction by using molybdenum nitride based coatings

Country Status (6)

Country Link
US (2) US11168392B2 (ru)
EP (1) EP3303651A1 (ru)
JP (1) JP6741690B2 (ru)
KR (1) KR102576846B1 (ru)
CN (1) CN107873064B (ru)
WO (1) WO2016188632A1 (ru)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109399582B (zh) * 2019-01-02 2022-05-31 吉林化工学院 块体材料氮化钼的高温高压制备
CN109988994B (zh) * 2019-05-21 2024-01-30 仪征亚新科双环活塞环有限公司 一种具有耐磨减摩作用的镀层、其制备方法及活塞环
US11286558B2 (en) 2019-08-23 2022-03-29 Asm Ip Holding B.V. Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
EP4031690A1 (de) 2019-09-19 2022-07-27 Oerlikon Surface Solutions AG, Pfäffikon Substrat mit einem molydännitrid schichtsystem, sowie beschichtungsverfahren zur herstellung eines schichtsystems
WO2022112605A1 (en) 2020-11-30 2022-06-02 Oerlikon Surface Solutions Ag, Pfäffikon Molybdenum nitride based multilayer coating for wear and friction reduction

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2664852A (en) * 1950-04-27 1954-01-05 Nat Res Corp Vapor coating apparatus
JPH02118064A (ja) * 1988-10-27 1990-05-02 Mitsubishi Heavy Ind Ltd 真空蒸着装置
US5492724A (en) * 1994-02-22 1996-02-20 Osram Sylvania Inc. Method for the controlled delivery of vaporized chemical precursor to an LPCVD reactor
DE102004028487B4 (de) 2004-06-11 2018-11-15 Mahle Gmbh Verfahren zur Herstellung verschleissfester Flanken für einen Trapezring für Verbrennungsmotoren
DE102006046917C5 (de) * 2006-10-04 2014-03-20 Federal-Mogul Burscheid Gmbh Kolbenring für Verbrennungskraftmaschinen
CN101911253B (zh) * 2008-01-31 2012-08-22 应用材料公司 闭环mocvd沉积控制
US8926722B2 (en) * 2010-02-04 2015-01-06 Oerlikon Trading Ag, Truebbach Cutting tools with Al—Cr—B—N/Ti—Al—N multilayer coatings
JP5668262B2 (ja) * 2011-02-01 2015-02-12 住友電工ハードメタル株式会社 表面被覆切削工具
CN102588175A (zh) * 2012-01-19 2012-07-18 浙江汇锦梯尔镀层科技有限公司 一种新型喷油泵控制阀套及其表面处理方法
JP6313746B2 (ja) * 2012-03-30 2018-04-18 タタ、スティール、ネダーランド、テクノロジー、ベスローテン、フェンノートシャップTata Steel Nederland Technology Bv 液体金属を蒸発器に供給する方法および装置
DE102012207814A1 (de) 2012-05-10 2013-11-14 Mahle International Gmbh Bauelement, insbesondere ein Gleitelement
DE102012020757A1 (de) 2012-10-23 2014-05-08 Mahle International Gmbh Bauteil mit einer Beschichtung und Verfahren zu seiner Herstellung
CN103741101B (zh) * 2014-01-19 2016-01-13 宜昌后皇真空科技有限公司 一种MoN/CrN纳米复合涂层及其沉积方法
CN104388899A (zh) * 2014-12-10 2015-03-04 武汉大学 一种具有MoN/Cr/CrN/Cr纳米复合超厚涂层的活塞环及其制备方法

Also Published As

Publication number Publication date
US20220145442A1 (en) 2022-05-12
US11168392B2 (en) 2021-11-09
KR102576846B1 (ko) 2023-09-08
WO2016188632A1 (en) 2016-12-01
CN107873064B (zh) 2020-10-23
KR20180011756A (ko) 2018-02-02
JP6741690B2 (ja) 2020-08-19
JP2018517059A (ja) 2018-06-28
US20180135164A1 (en) 2018-05-17
CN107873064A (zh) 2018-04-03

Similar Documents

Publication Publication Date Title
US20220145442A1 (en) Wear and/or friction reduction by using molybdenum nitride based coatings
Zhang et al. Evaluation of the adhesion and failure mechanism of the hard CrN coatings on different substrates
Chen et al. Investigation on microstructures and mechanical properties of AlCrN coatings deposited on the surface of plasma nitrocarburized cool-work tool steels
CN106574376B (zh) 滑动元件、特别是活塞环和用于制造滑动元件的方法
WO2018235750A1 (ja) 摺動部材及び被覆膜
JP2022088457A (ja) 窒化モリブデンベースの被覆を用いる摩耗及び/又は摩擦の低減
CN113151826B (zh) 一种耐腐蚀镀膜工艺及其制得的耐腐蚀镀膜涂层
RU2593561C2 (ru) Деталь с dlc покрытием и способ нанесения dlc покрытия
CN110724923A (zh) 一种表面梯度纳米结构离子注渗碳化钨层制备方法
WO2015082538A1 (en) Piston ring
JP2018517059A5 (ru)
JP5660697B2 (ja) 硬質皮膜被覆部材およびその製造方法
KR20150116523A (ko) 지르코늄 복합소재 코팅층 및 상기 코팅층의 형성 방법
Su et al. Tension and fatigue behavior of a PVD TiN-coated material
JP5660696B2 (ja) 硬質皮膜被覆部材およびその製造方法
JP2002115045A (ja) 被膜形成方法及びベーン型圧縮機用のベーン
Quaeyhaegens et al. Promising developments for new applications
KR101270282B1 (ko) 저마찰 코팅 필름 및 그 제조방법
KR20150118665A (ko) 저마찰 및 기계적 특성이 향상된 자동차 습동 부품용 코팅재 및 이를 이용한 표면 코팅방법
RU2782102C1 (ru) СПОСОБ ПОЛУЧЕНИЯ ПОКРЫТИЯ НА ОСНОВЕ СИСТЕМЫ Ti-Al, СИНТЕЗИРОВАННОГО В СРЕДЕ АЗОТА И АЦЕТИЛЕНА
JP5634669B2 (ja) 硬質皮膜被覆部材およびその製造方法
Tillmann et al. Effect of plasma treatment on adhesion of DLC layers to steels
KR101367702B1 (ko) 다층코팅층을 포함하는 금속강재 제조방법
WO1996005332A2 (en) Coated material and method of its production
KR20060119380A (ko) 세라믹코팅층과 다이아몬드형 카본층의 복합층 코팅방법

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20180102

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20201102

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED