EP3189236A2 - Pompe à griffes - Google Patents

Pompe à griffes

Info

Publication number
EP3189236A2
EP3189236A2 EP15759706.3A EP15759706A EP3189236A2 EP 3189236 A2 EP3189236 A2 EP 3189236A2 EP 15759706 A EP15759706 A EP 15759706A EP 3189236 A2 EP3189236 A2 EP 3189236A2
Authority
EP
European Patent Office
Prior art keywords
rotor
rotors
claw
pump according
claw pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15759706.3A
Other languages
German (de)
English (en)
Inventor
Peter Birch
Clive Tunna
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP3189236A2 publication Critical patent/EP3189236A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings

Definitions

  • the invention relates to a claw pump with several pump stages.
  • Multi-stage claw pumps have two rotor shafts on which rotors with claw profiles are formed. Each rotor profile thus has one or two claws and associated claw recesses. The conveying of the medium takes place by two cooperating rotors, which are rotated in opposite directions, wherein the claws of one rotor engage in the recess of the other rotor. In the case of multi-stage claw pumps, a radial suction and a radial expulsion of the fluid take place per stage relative to the longitudinal direction of the rotor shafts.
  • respective channels are arranged to redirect the fluid expelled radially from a pump stage so that it in turn is radially drawn in by the next pump stage.
  • the individual claw rotors are arranged on a shaft, for example by pressing.
  • the shafts are arranged in a multi-part housing and mounted in this housing via oil-lubricated roller bearings. To synchronize the two shafts a gear is provided on each shaft. Due to the multi-part of the housing and the required connection of the individual rotor elements with the waves, the numerous occurring tolerances must be compensated. The assembly is therefore gradual.
  • the rotor shafts are arranged with a first pumping stage, that is, the two corresponding rotors. Subsequently, an intermediate wall is attached to the two rotor shafts to form the first pumping stage. If necessary, appropriate discs or spacers must be used. see to compensate for tolerances.
  • the two next rotors are attached to the shafts and then the next housing part. Again, corresponding components for tolerance compensation are required again.
  • the construction of a claw pump with multiple stages is therefore very expensive.
  • an exact synchronization between the two waves is required. Since this is done via a mechanical gearbox, it is necessary to lubricate the gearbox. This also has the consequence that seals between the gear or the oil-lubricated bearings and the pumping stages are required. This further increases the manufacturing and assembly costs.
  • the object of the invention is to provide a claw pump with in particular a plurality of pump stages whose manufacturing and assembly costs are significantly reduced.
  • the claw pump according to the invention has two rotor shafts, each carrying a plurality of rotors.
  • the two rotor shafts are arranged parallel to each other in a pump housing.
  • a pumping chamber in which the rotors are arranged Through the pump housing per pump stage, a pumping chamber in which the rotors are arranged formed.
  • Each rotor in the preferred embodiment has two jaws and two claw recesses.
  • a claw of one rotor cooperates with a recess of the other rotor.
  • the pump housing is designed such that a parting plane of the pump housing extends in the longitudinal direction of the rotor shafts. In particular, the parting plane of the pump housing lies in a longitudinal center plane of the two shafts.
  • the two shafts can be inserted with the appropriately provided rotors in a housing part.
  • the assembly is thus no longer gradual, in the form that one pump stage after another is mounted.
  • the pump housing formed in two parts, so that the rotor shafts can be inserted together with the rotors as a complete component in the first pump housing, and then the pump housing is closed by placing the second part of the pump housing.
  • the assembly of the claw pump is considerably simplified.
  • the intermediate walls arranged between adjacent pumping chambers are formed in two parts.
  • the parting plane of the intermediate walls is arranged in a plane which extends in the longitudinal direction of the rotor shaft.
  • the parting line at the at least one intermediate wall coincides with the parting plane of the pump housing.
  • the intermediate walls and possibly also provided side walls of a pumping chamber of the first and / or the last pump stage preferably have open recesses in the direction of the parting plane.
  • the recesses serve to receive or for passing the rotor shafts in the assembled state. It is particularly preferred that these recesses are substantially semicircular recesses, so that the rotor shaft can be easily inserted into the recesses.
  • the at least one intermediate wall which is fixedly connected to one of the two housing parts, in particular integrally formed.
  • the two housing parts as well as the intermediate walls or optionally also the first and / or last pumping stage receiving pumping chamber forming side walls may be integrally formed. This may be, for example, a one-piece casting.
  • connecting channels are provided in the intermediate walls of respectively adjacent pump stages, which connect the adjacent pumping stages with each other.
  • the provision of such connecting channels in the intermediate walls provides an independent, by the design of the particular two-piece pump housing,
  • the arrangement of the connection channels in the intermediate walls has the particular advantage that the production of such connection channels is much easier than in the housing surrounding the pumping stages.
  • the connection channels between the pumping stages thus extend substantially axially with respect to the rotor shaft.
  • the corresponding inlets and outlets of the pumping stages are thus according to the invention axially and not radially arranged as in the prior art.
  • connection channels they are open in the direction of the dividing wall.
  • This is particularly advantageous in connection with the provision of a two-part pump housing with preferably integrally formed partitions.
  • the arrangement of the connecting channels such that they are open in the direction of the parting plane of the intermediate wall, has the advantage that they can be produced in a simple manner.
  • the production of the connection channels can be produced on a two-part pump housing by, for example, milling or the like, wherein the milling tool can be guided, for example, essentially perpendicular to the parting plane. It is preferably not necessary with such configured connecting channels, vorzugesehn parallel to the shaft axis extending holes in the intermediate walls.
  • the connecting channels are arranged such that they are at least partially open in the direction of the rotor shaft receiving particular semicircular openings.
  • the production of the connecting channels is further simplified.
  • the connecting channels are thus at least partially closed except for a small gap by the rotor shaft.
  • an inlet and an outlet, a connecting channel arranged in an intermediate wall are connected to arranged on different sides of the dividing planes.
  • the inlet is thus arranged above a median plane of the rotor shafts and the outlet below the median plane. It is thus particularly preferred that the inlet and the outlet are each formed in different housing parts, in particular in each case in one of the two housing parts.
  • the inlet and / or the outlet of the connecting channel is arranged such that it is completely closed, partially closed or completely open by an associated rotor depending on the rotor position.
  • the associated rotor is in this case one of the two rotors of the rotor pairs per pump stage flows into the region of medium and / or flows out of the region of medium.
  • it is particularly advantageous that the inlet and / or outlet opening is completely closed in a rotor position. This can be realized in a simple manner in that the corresponding opening is arranged in the dividing wall and thus the opening is swept over by a side wall of the rotor. It can thus be achieved a very good sealing of the inlet and / or outlet.
  • the seal is good, in particular because of the small gap and the relatively large radial overlap.
  • the cross sections of the inlets and / or the outlets decrease starting from a first stage in the direction of the penultimate stage. This can be done continuously or in stages.
  • the cross sections may become smaller due to the compression.
  • the cross section of the inlet and / or the outlet of the last stage is greater than the cross section of the penultimate stage.
  • the arrangement or alignment of the claws and the claw recesses is at least at least two, especially at all, pumping stages identical.
  • at least two, in particular all pump stages each have rotors with identical rotor profiles.
  • the rotors thus differ from each other exclusively in terms of their axial width.
  • a rotary piston can be arranged on the rotor shafts as the first and / or last pump stage.
  • the rotor shaft is integrally formed with the other rotors designed as claw rotors and arranged only rotors designed as rotary rotors on the rotor shaft, for example, pressed, are.
  • the two rotor shafts are mounted in the pump housing by grease-lubricated bearings.
  • the synchronization device is oil-free.
  • the synchronization device serves to synchronize the two counter-rotating shafts. An oil-free synchronization of the two waves takes place in a preferred embodiment by a belt and / or a chain. It is thus not necessary to provide a gear transmission or at least two meshing gears that would need to be oil lubricated.
  • a mechanical synchronization device it would also be possible to drive the two shafts in each case by a separate motor, in particular an electric motor, wherein the two motors are preferably synchronized with one another via an electronic synchronization unit. It would also be possible to use a power transmission-free synchronization gear that can then also have gears, as they do not have to be oiled due to the power transmission freedom.
  • the invention relates to a rotor shaft unit for vacuum pumps, which represents an independent invention, which is used in a preferred embodiment in the claw pump according to the invention.
  • the rotor shaft unit according to the invention has a plurality of rotors, which are supported by a rotor shaft.
  • the rotors and the rotor shaft are integrally formed.
  • the rotors as described above with reference to the claw pump designed such that preferably all rotors have an identical rotor profile.
  • the individual rotors differ in a particularly preferred embodiment thus only in their axial width.
  • the one-piece rotor shaft is produced as an extruded profile, in particular as an extruded profile.
  • an extruded profile By producing an extruded profile, a one-piece rotor shaft with rotors can be produced in a simple manner. This is particularly possible because in a preferred embodiment all rotors have the same rotor profile. Since extruded profiles can be manufactured with high precision, this essentially only has to be processed in such a way that the interspaces between adjacent rotors are produced by milling. The manufacturing process of the rotor shaft unit is thus significantly cheaper than the manufacture and mounting of individual separate rotors, which then have to be mounted on a shaft.
  • the manufacture of the rotor shaft unit thus comprises the following essential production steps:
  • an extrusion profile is produced, for example, in the extrusion process.
  • the outer profile of the entire strand here corresponds preferably to the rotor profile.
  • the spaces between adjacent rotors are made. This can be done for example by milling. Here, the spaces have a depth, so that the shaft connecting the two adjacent rotors stops. Subsequently, for example, bearing points can be produced at the two ends of the shaft. If the synchronization of two such manufactured rotor shaft units via belts, chains or the like, then gears can be arranged on the shafts for receiving the chains or belts. Also, the gears can be used to connect to an electric motor.
  • the one-piece design of the rotor shaft unit has the particular advantage that no additive tolerances occur and cost-effective production is possible.
  • the assembly process is particularly simple and thus cost.
  • the assembly method has in particular the following essential steps:
  • the integral rotor shaft units i. the integrally formed with the rotors rotor shafts are inserted in a first step in a first housing half.
  • the insertion takes place in the provided in the partitions, in particular semicircular recesses.
  • the housing half already includes the partitions.
  • the second housing housing can be placed and the two housing halves connected.
  • the vacuum-tight connection can be achieved here by gluing, for example. consequences.
  • the synchronization unit is arranged within the housing, before or after the connection of the two housing halves, the mounting of a belt or a chain on the preferably also pre-mounted gears or the like.
  • the multi-stage claw pump according to the invention can be constructed such that all pump stages are arranged axially one behind the other, so that the compression in an axial direction always increases from one stage to the next. It is also possible to provide a central pump inlet from which pump stages extend in both directions. The pump stages are in turn arranged axially on the same shaft, but the pumping direction is opposite to each other. The common inlet is thus at a so-called. dual exhaust pump in the middle of the pump and the two outlets on the two outer sides of the pump.
  • FIGS. 1 to 3 show a schematic representation of a pumping stage of the claw pump in a sectional view in different positions
  • Figure 4 is a schematic representation of a part of a
  • the claw pump according to the invention has a plurality of pump stages arranged axially one behind the other, with a schematic cross-sectional view of a pump stage being illustrated in FIGS. It is the representation of the same pumping stage in different positions of the rotor pair forming rotors 10, 12.
  • the two rotors 10, 12 are each formed integrally with a rotor shaft 14.
  • the rotor shafts 14 are arranged in a pump housing formed from two housing halves 16, 18.
  • the pump housing 16, 18 forms together with the rotors 10, 12 pumping chambers 20, 22, whereby the position of the pumping chambers changes depending on the position of the rotors 10, 12.
  • the two housing halves 16, 18 are in this case formed such that a parting plane 24 extends in the longitudinal direction of the shafts 14.
  • the parting plane 24 is arranged at the level of a median plane of the two shafts 14.
  • an intermediate wall 26 is arranged behind the two rotors 10, 12 .
  • the intermediate wall forms the separation from the pumping stage previously arranged in the pumping direction in the illustrated embodiment.
  • a connecting channel is arranged, which is indicated in the figures 1 - 3 by the arrow 28.
  • the fluid to be pumped flows through an outlet 30, which is located in the illustration of Figures 1 to 3 on the back of the intermediate wall 26, in the connecting channel 28 a.
  • the fluid then flows through an inlet 32, which is located in Figures 1 - 3 at the front of the intermediate wall 26 in the illustrated pumping stage.
  • the fluid only flows into the chamber 22 through the connection channel 28 and the inlet 32 when the two rotors 10, 12 are in the position shown in FIG.
  • the inlet 32 is at least partially open, so that fluid can flow into the chamber 22.
  • fluid is pumped out of the chamber 20 into an outlet.
  • This outlet is arranged in an intermediate wall, which is arranged in front of the illustrated rotors in FIGS. 1-3.
  • the rotors 10, 12 have a known claw profile. This has two claw recesses 38 per rotor.
  • two successive pump stages 40, 42 are partially visible.
  • an axial width of a step 40 is wider than an axial width of a subsequent step 42, so that increases the compression of the pumped medium.
  • the two successive pumping stages 40, 42 are separated from one another by an intermediate wall 26, which is arranged in a parting plane 24.
  • the intermediate wall 26 has two open in the direction of the parting plane 24 recesses 44, 46.
  • the two recesses 44, 46 serve to receive the two rotor shafts 14.
  • the partition wall 26 has the inlet 32 of the pumping stage 42 below the recess 44. Depending on the position of the rotor 10 (FIG. 2), fluid flows into the chamber 22 through the inlet 32.
  • the inlet 32 is connected to a connecting channel 28. This extends from the inlet 32 initially perpendicular to a side surface 48 of the intermediate wall 26. Then extends preferably based on the thickness of the intermediate wall 26 in the middle of the channel 28 in a portion 28a in Figure 4 upwards.
  • the second housing half has the outlet 30 above the recess 46 on the corresponding second wall of the pumping stage 40. This is corresponding to the inlet 32 with a channel 28, 28a connected. In the upper part of the dividing wall formed by the second housing half, the channel is thus designed accordingly.
  • a particular advantage of the embodiment of the connecting channels 28, 28a shown in FIG. 4 is that the production is very simple, since the channel can be produced in a simple manner, for example with a milling cutter. The channel is always accessible from a top 50 of the partition 26.
  • the rotor shafts 14 which are produced in particular integrally with the rotors 10, 12, are inserted from above into the recesses 44, 46 of the partitions in FIG. In this case, the rotor shafts 14 always close off a part of the corresponding connection channels 28.
  • the second housing half is placed, so that the parts 28a of the connecting channels lie on one another and a continuous connecting channel 28, 28a between two adjacent pumping stages 40, 42 is formed.
  • the other stages are designed accordingly, wherein a width of the pump stages 40, 42 extending in the longitudinal direction 52 of the rotor shafts 14 decreases in the pumping direction.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
  • Details And Applications Of Rotary Liquid Pumps (AREA)

Abstract

L'invention concerne une pompe à griffes comportant deux arbres de rotor (14), qui portent chacun plusieurs rotors (10, 12). Les arbres de rotor (14), dans des modes de réalisation préférés, sont réalisés d'une seule pièce conjointement avec les rotors (10, 12) associés. Les arbres de rotor (14) sont disposés conjointement avec les rotors (10, 12) dans un carter de pompe (16, 18), plusieurs étages de pompe étant formés par le carter de pompe et les paires de rotors (10, 12) correspondantes. Afin de simplifier le montage, les arbres de rotor (14) sont d'une part réalisés d'une seule pièce avec les rotors (10, 12) et d'autre part, le carter de pompe est réalisé en deux parties. Dans un mode de réalisation préféré, un plan de séparation (24) du carter de pompe (16, 18) s'étend dans la direction longitudinale des arbres de rotor (14).
EP15759706.3A 2014-09-05 2015-08-27 Pompe à griffes Withdrawn EP3189236A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202014007117.9U DE202014007117U1 (de) 2014-09-05 2014-09-05 Klauenpumpe
PCT/EP2015/069637 WO2016034485A2 (fr) 2014-09-05 2015-08-27 Pompe à griffes

Publications (1)

Publication Number Publication Date
EP3189236A2 true EP3189236A2 (fr) 2017-07-12

Family

ID=54064308

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15759706.3A Withdrawn EP3189236A2 (fr) 2014-09-05 2015-08-27 Pompe à griffes

Country Status (7)

Country Link
EP (1) EP3189236A2 (fr)
JP (2) JP6643323B2 (fr)
KR (1) KR20170053665A (fr)
CN (1) CN106662107B (fr)
DE (1) DE202014007117U1 (fr)
TW (1) TWI626379B (fr)
WO (1) WO2016034485A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2558954B (en) 2017-01-24 2019-10-30 Edwards Ltd Pump sealing
CN107448390B (zh) * 2017-09-14 2023-10-10 东莞市大路通真空设备制造有限公司 长寿命真空泵
DE102018210430A1 (de) * 2018-06-26 2020-01-02 Leybold Gmbh Verdränger, Rotor und Vorrichtung einer Vakuumpumpe sowie Verfahren zur Herstellung eines Verdrängers und eines Rotors einer Vakuumpumpe
DE102019103577A1 (de) 2019-02-13 2020-08-13 Gebr. Becker Gmbh Drehkolbenpumpe
CN110332111B (zh) * 2019-06-21 2021-08-06 宁波邦威泵业有限公司 一种叶轮及其转子泵

Citations (1)

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Publication number Priority date Publication date Assignee Title
EP1020645A1 (fr) * 1999-01-11 2000-07-19 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Pompe Roots multiétagée et procédé de fabrication du boítier

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AT140808B (de) * 1933-06-07 1935-02-25 Franz Dr Ing Heinl Maschine mit umlaufenden Kolben.
EP0290664B1 (fr) * 1987-05-15 1991-12-27 Leybold Aktiengesellschaft Pompe à deux arbres
GB2207190A (en) * 1987-07-18 1989-01-25 Boc Group Plc Pump drive arrangement
EP0370117B1 (fr) 1988-10-24 1994-01-12 Leybold Aktiengesellschaft Pompe à vide avec deux arbres et méthode de fonctionnement
GB9021780D0 (en) * 1990-10-06 1990-11-21 Boc Group Plc Improvements in mechanical pumps
KR100700415B1 (ko) 1998-09-19 2007-03-27 엘지.필립스 엘시디 주식회사 액티브 매트릭스 액정표시장치
JP2000170679A (ja) * 1998-12-04 2000-06-20 Toyota Autom Loom Works Ltd 多段ルーツポンプ及び多段ポンプ装置
FR2813104B1 (fr) * 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide
JP2003097475A (ja) * 2001-09-21 2003-04-03 Nsk Ltd ドライ真空ポンプ用軸受
JP2004211556A (ja) * 2002-12-26 2004-07-29 Toyota Industries Corp 真空ポンプ
JP2007092625A (ja) * 2005-09-28 2007-04-12 Aisin Seiki Co Ltd 回転軸とロータを備えた回転体およびその製造法
GB2435675B (en) 2006-03-02 2011-02-09 Boc Group Plc Rotor assembly
US8662869B2 (en) * 2007-11-14 2014-03-04 Ulvac, Inc. Multi-stage dry pump
EP2180188B1 (fr) * 2008-10-24 2016-09-07 Edwards Limited Améliorations dans et concernant des pompes à racines
JP5284940B2 (ja) * 2009-12-24 2013-09-11 アネスト岩田株式会社 多段真空ポンプ
GB2508405B (en) * 2012-11-30 2015-09-02 Edwards Ltd Vacuum pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1020645A1 (fr) * 1999-01-11 2000-07-19 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Pompe Roots multiétagée et procédé de fabrication du boítier

Also Published As

Publication number Publication date
CN106662107B (zh) 2020-01-10
KR20170053665A (ko) 2017-05-16
WO2016034485A3 (fr) 2016-05-06
WO2016034485A2 (fr) 2016-03-10
JP6643323B2 (ja) 2020-02-12
CN106662107A (zh) 2017-05-10
JP2020056409A (ja) 2020-04-09
DE202014007117U1 (de) 2015-12-09
TW201621167A (zh) 2016-06-16
TWI626379B (zh) 2018-06-11
JP2017527735A (ja) 2017-09-21

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