EP2745015B1 - Pompe roots - Google Patents

Pompe roots Download PDF

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Publication number
EP2745015B1
EP2745015B1 EP12745685.3A EP12745685A EP2745015B1 EP 2745015 B1 EP2745015 B1 EP 2745015B1 EP 12745685 A EP12745685 A EP 12745685A EP 2745015 B1 EP2745015 B1 EP 2745015B1
Authority
EP
European Patent Office
Prior art keywords
pump
stage
rotary
roots
roots pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP12745685.3A
Other languages
German (de)
English (en)
Other versions
EP2745015A2 (fr
Inventor
Peter Birch
Thomas Dreifert
Robert JENTKINS
Clive Tunna
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP2745015A2 publication Critical patent/EP2745015A2/fr
Application granted granted Critical
Publication of EP2745015B1 publication Critical patent/EP2745015B1/fr
Active legal-status Critical Current
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/086Carter
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F04C23/003Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle having complementary function

Definitions

  • the invention relates to a Roots pump.
  • Roots pumps usually have two-toothed rotary lobes arranged in a pump chamber.
  • the two rotary lobes are driven in opposite directions, so that gas is sucked in through a main inlet through the individual chambers and expelled again via a main outlet.
  • the main inlet and the main outlet run in the radial direction and are arranged opposite one another.
  • rotary pistons with multiple teeth, in particular three or four teeth are known.
  • the gas is essentially pumped radially from a radially arranged main inlet to a radially arranged main outlet.
  • Multistage Roots pumps are also known for achieving low pressures.
  • Roots pumps of this type have a pair of rotary lobes per stage.
  • the gas to be pumped is conveyed from an outlet of one pumping stage to the inlet of an adjacent pumping stage. This is done via connection channels.
  • the connection channels can, as for example in US 2010/0158728 described, be arranged in the housing of the Roots pump, the connecting channels that surround the pump chambers in which the rotary lobes are arranged or are arranged radially outside the pump chambers. This is necessary to get gas from an im to convey the outlet of a pump stage arranged in the lower region of the Roots pump to an inlet of the adjacent pump stage arranged in the opposite, for example upper region of a Roots pump.
  • Roots pumps of this type have the disadvantage that the design of the channels in the housing is technically complex. Furthermore, the housing for receiving the connecting channels must be designed with a large volume. This not only leads to large external dimensions of the Roots pump but also, in particular, to high costs. In addition to the complex manufacturing process, the high costs are also caused by the large amount of metal used.
  • Roots pump with a plurality of multi-toothed rotary lobe pairs each forming a pump stage is known.
  • the rotary lobes are each designed as three-tooth rotary lobes.
  • Adjacent pump stages are connected to one another via connecting channels, the connecting channels being arranged in a z-shape in the partition walls.
  • Roots pump which has a technically simple structure, the installation space required and the costs preferably also being reduced.
  • the Roots pump according to the invention has several pairs of multi-toothed rotary lobes, each forming a pump stage.
  • two rotary lobes with more than two teeth are provided for each pumping stage, it being preferred that the rotary lobes have at least four, in particular at least six teeth.
  • the two rotary lobes of a pump stage rotate in opposite directions to transport the gas.
  • the two shafts can be connected to one another via gears, so that only one of the two shafts has to be driven.
  • Adjacent pump stages are connected to one another via connecting channels.
  • adjacent pump stages can each have one or several connection channels can be connected to one another.
  • the connecting channels are arranged in partition walls which separate adjacent pump stages from one another. The partition walls are thus provided between the piston chambers of adjacent pump stages.
  • Roots pumps can be designed as dry-running pumps without oil lubrication, Roots pumps also have the advantage that the maintenance requirements are lower.
  • Another advantage of the arrangement according to the invention of the connecting channels in partition walls is that, due to the shortness of the connecting channels, lower pressure losses occur.
  • At least some of the connecting channels are preferably connected to the piston chambers in which the rotary piston pairs are arranged in such a way that a channel inlet opening and / or a channel outlet opening is swept over by a side wall of a rotary piston during operation.
  • the channel inlet and / or channel outlet opening of at least one connecting channel is therefore not arranged radially in relation to a piston chamber, but axially.
  • the opening is painted over not via a radially formed end face but via a side wall of a rotary piston.
  • all the connecting channels are preferably arranged in intermediate walls that separate the pump stages from one another. Only one main inlet and / or one main outlet is not arranged in partition walls.
  • the main inlet and / or the main outlet can be arranged axially or radially.
  • the main inlet is preferably arranged radially opposite the main outlet. If, for example, gas is sucked in through a main inlet arranged on an upper side of the pump, in a preferred embodiment the gas is expelled at the radially opposite lower side of the pump.
  • the main inlet is axially offset with respect to the main outlet, since the individual pump stages are arranged axially one behind the other, starting from the main inlet to the main outlet.
  • the gas is transported from the first to the second stage through a connecting channel which is arranged in the center at a rotation angle of approx. 90 ° for the rotary lobes.
  • This connecting channel can run axially so that the gas enters a central chamber of the adjacent rotary lobes.
  • the gas is then further in the direction of the outlet side conveyed and from this area reaches an inlet-side chamber of the next pumping stage through a channel arranged in particular at an angle or diagonally in the partition wall.
  • multiple axially extending channels can be arranged between adjacent pump stages.
  • the provision of axial channels has the particular advantage that the channels are technically simple to manufacture. These can be axial, in particular circular-cylindrical bores.
  • partition walls in which such connection channels are arranged are preferably thicker in the axial direction than partition walls in which axial connection channels are provided. This makes it possible to design the connecting channels running at an angle without any curvature.
  • the connecting channels In order to keep the power consumption of the pump as low as possible, the connecting channels have the largest possible cross-section. It is also possible to provide a plurality of channels running essentially parallel to one another in order to enlarge the cross section. Particularly in the case of the channels running obliquely in the partition walls, it must also be taken into account that they are designed to be as short as possible.
  • the rotary lobes preferably have axially different widths, the width of the rotary lobes in particular decreasing in steps in the pumping direction. This reduces the volume of the individual chambers formed between the teeth of the rotary pistons.
  • the two intermeshing rotary pistons have the same diameter and the same shape.
  • Rotary pistons that mesh with one another can also have different tooth shapes.
  • Roots pump results in an equalization of the load peaks over the rotation of the rotor and also an equalization of the heat of compression.
  • the ones in the Figs. 1 and 2 three-toothed rotary lobes 10 shown schematically are in a first pumping stage ( Fig. 1 ) arranged in a pump chamber 12.
  • the two rotary pistons 10 are each rotatably supported by a shaft (not shown) and are rotated in opposite directions in the direction of arrows 14 and 16, respectively.
  • Gas is fed to a chamber 20 via a main inlet 18.
  • the in Fig. 1 On the left rotary piston the gas is enclosed in the chamber 20, which is closed off by the curved region 22 of an outer wall. If you continue to rotate the in Fig. 1 left rotary piston in the direction of arrow 14, the chamber 20 is opened corresponding to the chamber designated 24 in this position.
  • the chamber 24 encloses the entire lower area of the two rotary pistons, so that the areas 24, 26, 28 have the same pressure level. As a result, the gas originally located in the chamber 20 is pressed out through a connecting channel 30 running axially, ie parallel to the rotating shafts of the rotary pistons.
  • the gas from the in Fig. 2 outlet 44 designated as the main outlet can be conveyed upwards again in the direction of a main inlet. According to the invention, this takes place through channels, which are not shown in this embodiment, and run diagonally or obliquely in an intermediate wall.
  • Fig. 3-5 are six-tooth rotary piston pairs 48, 49 together with the first stage ( Fig. 3 ), a second stage ( Fig. 4 ) and a third stage ( Fig. 5 ) relevant connection channels are shown.
  • a six-stage Roots pump ( Fig. 6 ) corresponds to the representation of Fig. 3 a first stage 50
  • the representation in Fig. 4 a second stage 52
  • the representation in Fig. 5 a third stage 54
  • the fourth stage 56 essentially corresponds to the first stage ( Fig. 3 ), although the inlet does not take place radially but via an inclined or diagonal connecting channel 57.
  • the fifth stage 58 corresponds to the second stage 52 or Fig.
  • the individual rotary pistons 48 are carried by a common shaft 66.
  • the rotary pistons 49 are carried by a common shaft 68.
  • the two shafts 66, 68 are rotatably mounted in an upper housing half 70 and a lower housing half 72 and can be via not shown Gear wheels are connected to one another, so that only one of the two shafts 66, 68 has to be driven by a motor.
  • Partition walls 74, 76, 78, 80, 82 are provided between adjacent pumping stages.
  • at least one connecting channel 84, 86, 88, 90, 57 is arranged in each partition wall.
  • connection channels are also possible which are arranged at least partially in an outer area, as is known from the prior art.
  • the gas is sucked in through the main inlet 51.Instead of a radially arranged main inlet 51, this can also be used axially as an inlet 53 ( Fig. 3 ) be trained.
  • an inclined inlet or a combination of different inlets is also possible, whereby the inlet merely feeds gas into the chamber 55 ( Fig. 3 ) must be done.
  • the gas is then conveyed from the first pump stage 50 into the second pump stage 52 through a connecting channel 84 running axially, ie parallel to the shafts 66, 68.
  • the connecting channel 84 is arranged in the intermediate wall 74.
  • the gas is here based on the Figs. 1 and 2
  • the principle described is conveyed via an intermediate chamber 57 into a chamber 59 connected to the connecting channels 84.
  • the gas is then conveyed further ( Fig. 4 ) and flows from the second pumping stage 52 into the third pumping stage 54 through a connecting channel 86, which likewise runs axially.
  • the connecting channel 86 is arranged in the intermediate wall 76.
  • a diagonal or inclined channel 77 is provided in the intermediate wall 78, which is thicker in the axial direction than the other intermediate walls 74, 76, 80, 82.
  • the gas is conveyed from the fourth pump stage 56 into the fifth pump stage 58 through a channel 88 running axially in the partition 80. Since the sixth pumping stage 60 is the last pumping stage in the exemplary embodiment shown, it is connected to the essentially radially extending main outlet 62.
  • rotary lobes with different diameters and, in particular, different numbers of teeth can also be provided.
  • a combination of rotary lobes with different tooth shapes is also possible. An example of this is shown in plan view in Figure 7 shown.
  • a left rotary piston 92 has teeth which interact with five separately designed teeth of a right rotary piston 94.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Reciprocating Pumps (AREA)
  • Rotary Pumps (AREA)

Claims (8)

  1. Pompe roots dotée
    de plusieurs paires de pistons rotatifs polydentés (10 ; 48, 49) réalisant respectivement un étage de pompage (50, 52, 54, 56, 58),
    dans laquelle chaque piston rotatif (10 ; 48, 49) est réalisé comme piston rotatif au moins tridenté (10 ; 48, 49), et
    de canaux de raccordement (30, 34, 77, 84, 86, 88, 90) reliant l'un à l'autre des étages de pompage respectivement adjacents (52, 54, 56, 58, 60),
    dans laquelle au moins un des canaux de raccordement (30, 34, 77, 84, 86, 88, 90) est disposé dans des cloisons (74, 76, 78, 80, 82) séparant l'un de l'autre les étages de pompage respectivement adjacents (50, 52, 54, 56, 58, 60)
    caractérisée en ce que
    au moins un de ces canaux de raccordement (30, 34, 84, 86, 88, 90) disposés dans des cloisons (74, 76, 78, 80, 82) séparant l'un de l'autre les étages de pompage respectivement adjacents (50, 52, 54, 56, 58, 60) s'étend de manière exclusivement axiale.
  2. Pompe roots selon la revendication 1, caractérisée en ce qu'une ouverture d'entrée de canal et/ou une ouverture de sortie de canal d'au moins un canal de raccordement (30, 34, 77, 84, 86, 88, 90) est balayée en fonctionnement par une paroi latérale d'un piston rotatif (10, 48, 49).
  3. Pompe roots selon la revendication 1 ou 2, caractérisée en ce que tous les canaux de raccordement (30, 30, 34, 77, 84, 86, 88, 90) sont disposés dans des cloisons (74, 76, 78, 80, 82) séparant l'un de l'autre les étages de pompage (50, 52, 54, 56, 58, 60).
  4. Pompe roots selon l'une des revendications 1-3, caractérisée en ce qu'une entrée principale (51) est disposée en opposition radiale par rapport à une sortie principale (62).
  5. Pompe roots selon la revendication 4, caractérisée en ce que dans le cas de plus de deux étages de pompage (50, 52, 54, 56, 58), un canal de raccordement (77) raccordant un étage de pompage (54) à un étage de pompage adjacent (56) est en diagonale dans la cloison correspondante (78) et sensiblement transversal au plan formé par les deux axes d'arbre (66, 68).
  6. Pompe roots selon la revendication 5, caractérisée en ce que les cloisons (78) comportant des canaux de raccordement (77) s'étendant en diagonale sont réalisées comme plus épaisses que les cloisons (74, 76, 80, 82) comportant des canaux de raccordement (84, 86, 88, 90) s'étendant axialement.
  7. Pompe roots selon l'une des revendications 1-6, caractérisée en ce qu'un des deux pistons rotatifs (10 ; 48, 49) par paire de pistons rotatifs (10 ; 48, 49) est respectivement disposé sur un arbre commun (66, 68).
  8. Pompe roots selon l'une des revendications 1-7, caractérisée en ce que la largeur axiale des pistons rotatifs (10 ; 48, 49) des étages de pompage individuels (50, 52, 54, 56, 58, 60) diminue en particulier dans la direction de pompage (64).
EP12745685.3A 2011-08-17 2012-08-07 Pompe roots Active EP2745015B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202011104491U DE202011104491U1 (de) 2011-08-17 2011-08-17 Wälzkolbenpumpe
PCT/EP2012/065406 WO2013023954A2 (fr) 2011-08-17 2012-08-07 Pompe roots

Publications (2)

Publication Number Publication Date
EP2745015A2 EP2745015A2 (fr) 2014-06-25
EP2745015B1 true EP2745015B1 (fr) 2021-10-06

Family

ID=46640681

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12745685.3A Active EP2745015B1 (fr) 2011-08-17 2012-08-07 Pompe roots

Country Status (9)

Country Link
US (1) US9476423B2 (fr)
EP (1) EP2745015B1 (fr)
JP (1) JP6076343B2 (fr)
KR (1) KR101905228B1 (fr)
CN (1) CN103732923B (fr)
DE (1) DE202011104491U1 (fr)
RU (1) RU2631579C2 (fr)
TW (1) TWI611101B (fr)
WO (1) WO2013023954A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103334928B (zh) * 2013-06-09 2016-08-10 李锦上 节能摇摆活塞压缩机
DE202017001029U1 (de) 2017-02-17 2018-05-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
DE102019103577A1 (de) * 2019-02-13 2020-08-13 Gebr. Becker Gmbh Drehkolbenpumpe
FR3117176B1 (fr) * 2020-12-04 2023-03-24 Pfeiffer Vacuum Pompe à vide
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR660528A (fr) * 1928-09-17 1929-07-12 Cfcmug Compresseur roots multi-cellulaire pour hautes pressions
AT140808B (de) * 1933-06-07 1935-02-25 Franz Dr Ing Heinl Maschine mit umlaufenden Kolben.
GB2111126A (en) 1981-12-09 1983-06-29 British Oxygen Co Ltd Rotary positive-displacement fluid-machines
DE3312117A1 (de) * 1983-04-02 1984-10-04 Leybold-Heraeus GmbH, 5000 Köln Zweiwellen-vakuumpumpe mit innerer verdichtung
GB8513684D0 (en) * 1985-05-30 1985-07-03 Boc Group Plc Mechanical pumps
JPH0733834B2 (ja) * 1986-12-18 1995-04-12 株式会社宇野澤組鐵工所 ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ
FR2642479B1 (fr) * 1989-02-02 1994-03-18 Alcatel Cit Pompe a vide du type roots, multietagee
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
DE4038704C2 (de) * 1990-12-05 1996-10-10 K Busch Gmbh Druck & Vakuum Dr Drehkolbenpumpe
JPH05302583A (ja) * 1992-04-24 1993-11-16 Nippon Carbureter Co Ltd ルーツ形空気機械
DE19629174A1 (de) * 1996-07-19 1998-01-22 Leybold Vakuum Gmbh Klauenvakuumpumpe
DE29906654U1 (de) * 1999-04-15 1999-07-15 Kaiser, Jürgen, 78234 Engen Drehkolbenkompressor
JP4747437B2 (ja) * 2001-05-08 2011-08-17 株式会社豊田自動織機 真空ポンプにおける油洩れ防止構造
TWI237093B (en) * 2003-10-23 2005-08-01 Ind Tech Res Inst Multi-staged vacuum pump
GB0515905D0 (en) 2005-08-02 2005-09-07 Boc Group Plc Vacuum pump
JP4767625B2 (ja) * 2005-08-24 2011-09-07 樫山工業株式会社 多段ルーツ式ポンプ
JP2009008596A (ja) 2007-06-29 2009-01-15 Toppan Printing Co Ltd 板状金属表面自動検査装置
JP5438279B2 (ja) * 2008-03-24 2014-03-12 アネスト岩田株式会社 多段真空ポンプ及びその運転方法
EP2180188B1 (fr) * 2008-10-24 2016-09-07 Edwards Limited Améliorations dans et concernant des pompes à racines
JP2010159740A (ja) * 2008-12-11 2010-07-22 Toyota Industries Corp 回転式真空ポンプ
CN101985938A (zh) * 2010-11-30 2011-03-16 东北大学 一种具有螺杆和罗茨转子的三轴复合干泵
CN102146919A (zh) * 2010-12-21 2011-08-10 周建强 双转子闭合压缩机

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
DE202011104491U1 (de) 2012-11-20
TWI611101B (zh) 2018-01-11
TW201314032A (zh) 2013-04-01
US20140205483A1 (en) 2014-07-24
WO2013023954A3 (fr) 2013-12-19
JP6076343B2 (ja) 2017-02-08
CN103732923B (zh) 2016-09-21
RU2631579C2 (ru) 2017-09-25
CN103732923A (zh) 2014-04-16
KR101905228B1 (ko) 2018-10-05
KR20140049555A (ko) 2014-04-25
US9476423B2 (en) 2016-10-25
EP2745015A2 (fr) 2014-06-25
RU2014109852A (ru) 2015-09-27
JP2014521887A (ja) 2014-08-28
WO2013023954A2 (fr) 2013-02-21

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