JP2014521887A - ルーツポンプ - Google Patents
ルーツポンプ Download PDFInfo
- Publication number
- JP2014521887A JP2014521887A JP2014525400A JP2014525400A JP2014521887A JP 2014521887 A JP2014521887 A JP 2014521887A JP 2014525400 A JP2014525400 A JP 2014525400A JP 2014525400 A JP2014525400 A JP 2014525400A JP 2014521887 A JP2014521887 A JP 2014521887A
- Authority
- JP
- Japan
- Prior art keywords
- pump
- channel
- roots pump
- stage
- rotary piston
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims abstract description 24
- 230000004323 axial length Effects 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/086—Carter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
- F04C23/003—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle having complementary function
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Reciprocating Pumps (AREA)
- Rotary Pumps (AREA)
Abstract
Description
Claims (9)
- ポンプ段(50,52,54,56,58)を各形成している複数の多葉のロータリーピストンペア(10;48,49)と、
隣接するポンプ段(52,54,56,58,60)を各連結している連結チャネル(30,34,77,84,86,88,90)と
を備えるルーツポンプにおいて、
前記連結チャネル(30,34,77,84,86,88,90)は、前記隣接するポンプ段(50,52,54,56,58,60)を隔てている隔壁(74,76,78,80,82)内に配置されていること
を特徴とするルーツポンプ。 - 少なくとも一つの連結チャネル(30,34,77,84,86,88,90)のチャネル入口開口部及び/又はチャネル出口開口部は、ロータリーピストン(10,48,49)の側壁によって、作動中に覆われること
を特徴とする請求項1に記載のルーツポンプ。 - 前記連結チャネル(30,34,77,84,86,88,90)の全ては、前記ポンプ段(50,52,54,56,58,60)を隔てている前記隔壁(74,76,78,80,82)内に配置されていること
を特徴とする請求項1又は2に記載のルーツポンプ。 - 少なくとも三葉のロータリーピストン(10,48,49)が設けられ、
少なくともいくつかの前記連結チャネル(30,34,77,84,86,88,90)は、軸長方向に延びていること
を特徴とする請求項1から3までの何れか一つに記載のルーツポンプ。 - 主吸気口(51)は、主排気口(62)と半径方向反対側に配置されていること
を特徴とする請求項1から4までの何れか一つに記載のルーツポンプ。 - ポンプ段(54)と隣接するポンプ段(56)とを連結する連結チャネル(77)は、対応する隔壁(78)内で斜めに延び、2つのシャフト軸(66,68)によって形成された平面を略横切る方向に延びていること
を特徴とする請求項5に記載のルーツポンプ。 - 斜めの連結チャネル(77)を含む隔壁(78)は、軸長方向の連結チャネル(84,86,88,90)を含む隔壁(74,76,80,82)よりも厚いこと
を特徴とする請求項6に記載のルーツポンプ。 - 前記ロータリーピストンペア(10;48,49)夫々における2つのロータリーピストン(10;48,49)の1つは、共通シャフト(66,68)に配置されていること
を特徴とする請求項1から7までの何れか一つに記載のルーツポンプ。 - 前記ポンプ段(50,52,54,56,58,60)夫々における前記ロータリーピストン(10,48,49)の軸長方向の幅は、特にポンピング方向に向かって減少すること
を特徴とする請求項1から8までの何れか一つに記載のルーツポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202011104491.6 | 2011-08-17 | ||
DE202011104491U DE202011104491U1 (de) | 2011-08-17 | 2011-08-17 | Wälzkolbenpumpe |
PCT/EP2012/065406 WO2013023954A2 (de) | 2011-08-17 | 2012-08-07 | Wälzkolbenpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014521887A true JP2014521887A (ja) | 2014-08-28 |
JP6076343B2 JP6076343B2 (ja) | 2017-02-08 |
Family
ID=46640681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014525400A Active JP6076343B2 (ja) | 2011-08-17 | 2012-08-07 | ルーツポンプ |
Country Status (9)
Country | Link |
---|---|
US (1) | US9476423B2 (ja) |
EP (1) | EP2745015B1 (ja) |
JP (1) | JP6076343B2 (ja) |
KR (1) | KR101905228B1 (ja) |
CN (1) | CN103732923B (ja) |
DE (1) | DE202011104491U1 (ja) |
RU (1) | RU2631579C2 (ja) |
TW (1) | TWI611101B (ja) |
WO (1) | WO2013023954A2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103334928B (zh) * | 2013-06-09 | 2016-08-10 | 李锦上 | 节能摇摆活塞压缩机 |
DE202017001029U1 (de) | 2017-02-17 | 2018-05-18 | Leybold Gmbh | Mehrstufige Wälzkolbenpumpe |
FR3117176B1 (fr) * | 2020-12-04 | 2023-03-24 | Pfeiffer Vacuum | Pompe à vide |
GB2608381A (en) * | 2021-06-29 | 2023-01-04 | Edwards Korea Ltd | Stator assembly for a roots vacuum pump |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59185889A (ja) * | 1983-04-02 | 1984-10-22 | ライボルト−ヘレ−ウス・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 2軸式真空ポンプ |
US20050089424A1 (en) * | 2003-10-23 | 2005-04-28 | Ming-Hsin Liu | Multi-stage vacuum pump |
JP2010159740A (ja) * | 2008-12-11 | 2010-07-22 | Toyota Industries Corp | 回転式真空ポンプ |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR660528A (fr) * | 1928-09-17 | 1929-07-12 | Cfcmug | Compresseur roots multi-cellulaire pour hautes pressions |
AT140808B (de) * | 1933-06-07 | 1935-02-25 | Franz Dr Ing Heinl | Maschine mit umlaufenden Kolben. |
GB2111126A (en) * | 1981-12-09 | 1983-06-29 | British Oxygen Co Ltd | Rotary positive-displacement fluid-machines |
GB8513684D0 (en) | 1985-05-30 | 1985-07-03 | Boc Group Plc | Mechanical pumps |
JPH0733834B2 (ja) * | 1986-12-18 | 1995-04-12 | 株式会社宇野澤組鐵工所 | ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ |
FR2642479B1 (fr) * | 1989-02-02 | 1994-03-18 | Alcatel Cit | Pompe a vide du type roots, multietagee |
FR2656658B1 (fr) * | 1989-12-28 | 1993-01-29 | Cit Alcatel | Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique. |
DE4038704C2 (de) * | 1990-12-05 | 1996-10-10 | K Busch Gmbh Druck & Vakuum Dr | Drehkolbenpumpe |
JPH05302583A (ja) * | 1992-04-24 | 1993-11-16 | Nippon Carbureter Co Ltd | ルーツ形空気機械 |
DE19629174A1 (de) * | 1996-07-19 | 1998-01-22 | Leybold Vakuum Gmbh | Klauenvakuumpumpe |
DE29906654U1 (de) * | 1999-04-15 | 1999-07-15 | Kaiser | Drehkolbenkompressor |
JP4747437B2 (ja) * | 2001-05-08 | 2011-08-17 | 株式会社豊田自動織機 | 真空ポンプにおける油洩れ防止構造 |
GB0515905D0 (en) | 2005-08-02 | 2005-09-07 | Boc Group Plc | Vacuum pump |
JP4767625B2 (ja) * | 2005-08-24 | 2011-09-07 | 樫山工業株式会社 | 多段ルーツ式ポンプ |
JP2009008596A (ja) | 2007-06-29 | 2009-01-15 | Toppan Printing Co Ltd | 板状金属表面自動検査装置 |
JP5438279B2 (ja) * | 2008-03-24 | 2014-03-12 | アネスト岩田株式会社 | 多段真空ポンプ及びその運転方法 |
EP2180188B1 (en) * | 2008-10-24 | 2016-09-07 | Edwards Limited | Improvements in and relating to Roots pumps |
CN101985938A (zh) * | 2010-11-30 | 2011-03-16 | 东北大学 | 一种具有螺杆和罗茨转子的三轴复合干泵 |
CN102146919A (zh) * | 2010-12-21 | 2011-08-10 | 周建强 | 双转子闭合压缩机 |
-
2011
- 2011-08-17 DE DE202011104491U patent/DE202011104491U1/de not_active Expired - Lifetime
-
2012
- 2012-07-24 TW TW101126538A patent/TWI611101B/zh active
- 2012-08-07 EP EP12745685.3A patent/EP2745015B1/de active Active
- 2012-08-07 JP JP2014525400A patent/JP6076343B2/ja active Active
- 2012-08-07 US US14/238,611 patent/US9476423B2/en active Active
- 2012-08-07 RU RU2014109852A patent/RU2631579C2/ru active
- 2012-08-07 KR KR1020147003957A patent/KR101905228B1/ko active IP Right Grant
- 2012-08-07 CN CN201280039495.8A patent/CN103732923B/zh active Active
- 2012-08-07 WO PCT/EP2012/065406 patent/WO2013023954A2/de active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59185889A (ja) * | 1983-04-02 | 1984-10-22 | ライボルト−ヘレ−ウス・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 2軸式真空ポンプ |
US20050089424A1 (en) * | 2003-10-23 | 2005-04-28 | Ming-Hsin Liu | Multi-stage vacuum pump |
JP2010159740A (ja) * | 2008-12-11 | 2010-07-22 | Toyota Industries Corp | 回転式真空ポンプ |
Also Published As
Publication number | Publication date |
---|---|
EP2745015B1 (de) | 2021-10-06 |
DE202011104491U1 (de) | 2012-11-20 |
US9476423B2 (en) | 2016-10-25 |
EP2745015A2 (de) | 2014-06-25 |
TWI611101B (zh) | 2018-01-11 |
WO2013023954A3 (de) | 2013-12-19 |
CN103732923B (zh) | 2016-09-21 |
CN103732923A (zh) | 2014-04-16 |
KR101905228B1 (ko) | 2018-10-05 |
RU2014109852A (ru) | 2015-09-27 |
US20140205483A1 (en) | 2014-07-24 |
TW201314032A (zh) | 2013-04-01 |
WO2013023954A2 (de) | 2013-02-21 |
JP6076343B2 (ja) | 2017-02-08 |
KR20140049555A (ko) | 2014-04-25 |
RU2631579C2 (ru) | 2017-09-25 |
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