WO2013023954A3 - Wälzkolbenpumpe - Google Patents

Wälzkolbenpumpe Download PDF

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Publication number
WO2013023954A3
WO2013023954A3 PCT/EP2012/065406 EP2012065406W WO2013023954A3 WO 2013023954 A3 WO2013023954 A3 WO 2013023954A3 EP 2012065406 W EP2012065406 W EP 2012065406W WO 2013023954 A3 WO2013023954 A3 WO 2013023954A3
Authority
WO
WIPO (PCT)
Prior art keywords
pump
roots pump
connecting ducts
another
roots
Prior art date
Application number
PCT/EP2012/065406
Other languages
English (en)
French (fr)
Other versions
WO2013023954A2 (de
Inventor
Peter Birch
Thomas Dreifert
Robert JENTKINS
Clive Tunna
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Priority to US14/238,611 priority Critical patent/US9476423B2/en
Priority to KR1020147003957A priority patent/KR101905228B1/ko
Priority to EP12745685.3A priority patent/EP2745015B1/de
Priority to RU2014109852A priority patent/RU2631579C2/ru
Priority to JP2014525400A priority patent/JP6076343B2/ja
Priority to CN201280039495.8A priority patent/CN103732923B/zh
Publication of WO2013023954A2 publication Critical patent/WO2013023954A2/de
Publication of WO2013023954A3 publication Critical patent/WO2013023954A3/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F04C23/003—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle having complementary function

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Reciprocating Pumps (AREA)
  • Rotary Pumps (AREA)

Abstract

Eine Wälzkolbenpumpe weist mehrere, jeweils eine Pumpstufe (50, 52, 54, 56, 58, 60) ausbildende mehrzähnige Drehkolbenpaare (10, 48, 49) auf. Benachbarte Pumpstufen (50, 52, 54, 56, 58, 60) sind über Verbindungskanäle (30, 34, 77, 84, 86, 88, 90) miteinander verbunden. Zur Verringerung der Herstellungskosten ist es erfindungsgemäß vorgesehen, die Verbindungskanäle (30, 34, 77, 84, 86, 88, 90) in benachbarte Pumpstufen (50, 52, 54, 56, 58, 60) voneinander trennenden Zwischenwänden (74, 76, 78, 80, 82) anzuordnen.
PCT/EP2012/065406 2011-08-17 2012-08-07 Wälzkolbenpumpe WO2013023954A2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US14/238,611 US9476423B2 (en) 2011-08-17 2012-08-07 Roots pump connection channels separating adjacent pump stages
KR1020147003957A KR101905228B1 (ko) 2011-08-17 2012-08-07 루츠 펌프
EP12745685.3A EP2745015B1 (de) 2011-08-17 2012-08-07 Wälzkolbenpumpe
RU2014109852A RU2631579C2 (ru) 2011-08-17 2012-08-07 Насос рутса
JP2014525400A JP6076343B2 (ja) 2011-08-17 2012-08-07 ルーツポンプ
CN201280039495.8A CN103732923B (zh) 2011-08-17 2012-08-07 摇杆式活塞泵

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202011104491.6 2011-08-17
DE202011104491U DE202011104491U1 (de) 2011-08-17 2011-08-17 Wälzkolbenpumpe

Publications (2)

Publication Number Publication Date
WO2013023954A2 WO2013023954A2 (de) 2013-02-21
WO2013023954A3 true WO2013023954A3 (de) 2013-12-19

Family

ID=46640681

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/065406 WO2013023954A2 (de) 2011-08-17 2012-08-07 Wälzkolbenpumpe

Country Status (9)

Country Link
US (1) US9476423B2 (de)
EP (1) EP2745015B1 (de)
JP (1) JP6076343B2 (de)
KR (1) KR101905228B1 (de)
CN (1) CN103732923B (de)
DE (1) DE202011104491U1 (de)
RU (1) RU2631579C2 (de)
TW (1) TWI611101B (de)
WO (1) WO2013023954A2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103334928B (zh) * 2013-06-09 2016-08-10 李锦上 节能摇摆活塞压缩机
DE202017001029U1 (de) 2017-02-17 2018-05-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
FR3117176B1 (fr) * 2020-12-04 2023-03-24 Pfeiffer Vacuum Pompe à vide
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT140808B (de) * 1933-06-07 1935-02-25 Franz Dr Ing Heinl Maschine mit umlaufenden Kolben.
DE3312117A1 (de) * 1983-04-02 1984-10-04 Leybold-Heraeus GmbH, 5000 Köln Zweiwellen-vakuumpumpe mit innerer verdichtung
FR2642479A1 (fr) * 1989-02-02 1990-08-03 Cit Alcatel Pompe a vide du type roots, multietagee
DE29906654U1 (de) * 1999-04-15 1999-07-15 Kaiser Drehkolbenkompressor
EP1256720A2 (de) * 2001-05-08 2002-11-13 Kabushiki Kaisha Toyota Jidoshokki Vorrichtung zum Abdichten für drehende Vakuumpumpen
US20050089424A1 (en) * 2003-10-23 2005-04-28 Ming-Hsin Liu Multi-stage vacuum pump
US20090246040A1 (en) * 2008-03-24 2009-10-01 Anest Iwata Corporation Multistage Vacuum Pump Unit and an Operation Method Thereof
EP2196675A2 (de) * 2008-12-11 2010-06-16 Kabushiki Kaisha Toyoda Jidoshokki Rotationsvakuumpumpe

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR660528A (fr) * 1928-09-17 1929-07-12 Cfcmug Compresseur roots multi-cellulaire pour hautes pressions
GB2111126A (en) * 1981-12-09 1983-06-29 British Oxygen Co Ltd Rotary positive-displacement fluid-machines
GB8513684D0 (en) 1985-05-30 1985-07-03 Boc Group Plc Mechanical pumps
JPH0733834B2 (ja) * 1986-12-18 1995-04-12 株式会社宇野澤組鐵工所 ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
DE4038704C2 (de) * 1990-12-05 1996-10-10 K Busch Gmbh Druck & Vakuum Dr Drehkolbenpumpe
JPH05302583A (ja) * 1992-04-24 1993-11-16 Nippon Carbureter Co Ltd ルーツ形空気機械
DE19629174A1 (de) * 1996-07-19 1998-01-22 Leybold Vakuum Gmbh Klauenvakuumpumpe
GB0515905D0 (en) 2005-08-02 2005-09-07 Boc Group Plc Vacuum pump
JP4767625B2 (ja) * 2005-08-24 2011-09-07 樫山工業株式会社 多段ルーツ式ポンプ
JP2009008596A (ja) 2007-06-29 2009-01-15 Toppan Printing Co Ltd 板状金属表面自動検査装置
EP2180188B1 (de) * 2008-10-24 2016-09-07 Edwards Limited Verbesserungen bei und in Zusammenhang mit Drehkolbenpumpen
CN101985938A (zh) 2010-11-30 2011-03-16 东北大学 一种具有螺杆和罗茨转子的三轴复合干泵
CN102146919A (zh) 2010-12-21 2011-08-10 周建强 双转子闭合压缩机

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT140808B (de) * 1933-06-07 1935-02-25 Franz Dr Ing Heinl Maschine mit umlaufenden Kolben.
DE3312117A1 (de) * 1983-04-02 1984-10-04 Leybold-Heraeus GmbH, 5000 Köln Zweiwellen-vakuumpumpe mit innerer verdichtung
FR2642479A1 (fr) * 1989-02-02 1990-08-03 Cit Alcatel Pompe a vide du type roots, multietagee
DE29906654U1 (de) * 1999-04-15 1999-07-15 Kaiser Drehkolbenkompressor
EP1256720A2 (de) * 2001-05-08 2002-11-13 Kabushiki Kaisha Toyota Jidoshokki Vorrichtung zum Abdichten für drehende Vakuumpumpen
US20050089424A1 (en) * 2003-10-23 2005-04-28 Ming-Hsin Liu Multi-stage vacuum pump
US20090246040A1 (en) * 2008-03-24 2009-10-01 Anest Iwata Corporation Multistage Vacuum Pump Unit and an Operation Method Thereof
EP2196675A2 (de) * 2008-12-11 2010-06-16 Kabushiki Kaisha Toyoda Jidoshokki Rotationsvakuumpumpe

Also Published As

Publication number Publication date
US9476423B2 (en) 2016-10-25
KR20140049555A (ko) 2014-04-25
TW201314032A (zh) 2013-04-01
JP6076343B2 (ja) 2017-02-08
RU2014109852A (ru) 2015-09-27
RU2631579C2 (ru) 2017-09-25
KR101905228B1 (ko) 2018-10-05
WO2013023954A2 (de) 2013-02-21
EP2745015A2 (de) 2014-06-25
CN103732923B (zh) 2016-09-21
DE202011104491U1 (de) 2012-11-20
JP2014521887A (ja) 2014-08-28
US20140205483A1 (en) 2014-07-24
TWI611101B (zh) 2018-01-11
EP2745015B1 (de) 2021-10-06
CN103732923A (zh) 2014-04-16

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