EP3158345A1 - Ensemble douille d'essai et procédés associés - Google Patents

Ensemble douille d'essai et procédés associés

Info

Publication number
EP3158345A1
EP3158345A1 EP15734498.7A EP15734498A EP3158345A1 EP 3158345 A1 EP3158345 A1 EP 3158345A1 EP 15734498 A EP15734498 A EP 15734498A EP 3158345 A1 EP3158345 A1 EP 3158345A1
Authority
EP
European Patent Office
Prior art keywords
assembly
leadframe
recited
socket assembly
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15734498.7A
Other languages
German (de)
English (en)
Other versions
EP3158345B1 (fr
Inventor
Valts Treibergs
Mitchell NELSON
Jason Mroczkowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xcerra Corp
Original Assignee
Xcerra Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xcerra Corp filed Critical Xcerra Corp
Publication of EP3158345A1 publication Critical patent/EP3158345A1/fr
Application granted granted Critical
Publication of EP3158345B1 publication Critical patent/EP3158345B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
    • G01R1/045—Sockets or component fixtures for RF or HF testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0483—Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/32—Holders for supporting the complete device in operation, i.e. detachable fixtures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495—Lead-frames or other flat leads
    • H01L23/49517—Additional leads
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K5/00—Casings, cabinets or drawers for electric apparatus
    • H05K5/04—Metal casings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/02—Arrangements of circuit components or wiring on supporting structure
    • H05K7/10—Plug-in assemblages of components, e.g. IC sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
    • G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • Test contactors are used on printed circuit boards to test various parameters and/or components of semiconductor devices. Electronic devices have become smaller yet more powerful, resulting crowded and complex circuit boards. For example, modern automobiles are using RADAR equipment for collision avoidance, parking assist, automated driving, cruise control, etc. The radio frequencies used in such systems are typically 77 GHz (W-band). Next generation IC's will push operating frequencies to even higher levels. Semiconductor devices that operate at these frequencies need to be tested, but existing test contactor technology cannot operate in the W-band due to extreme transmission line impedance mismatches.
  • a socket assembly including a housing that has one or more spring probes therein.
  • the socket assembly further includes a leadframe assembly that has one or more cantilever members, and the leadframe assembly has microwave structures, and a flexible ground plane.
  • the socket assembly further includes an elastomeric spacer adjacent the leadframe assembly, the elastomeric spacer having one or more holes receiving the spring probes therethrough.
  • a method includes disposing a device under test in a socket assembly, the socket assembly comprising a housing having one or more spring probes therein, a leadframe assembly including one or more cantilever members, the leadframe assembly having impedance controlled microwave structures and a flexible ground plane, the leadframe assembly disposed within the housing, and an elastomeric spacer adjacent the leadframe assembly, the elastomeric spacer having one or more holes receiving the spring probes therethrough.
  • the method further includes contacting the device under test with the spring probes and the microwave structures, and contacting the device under test with the cantilever members and flexing and deflecting the cantilever members.
  • FIG. 1 illustrates an exploded perspective view of a test socket assembly as constructed in one or more embodiments.
  • FIG. 2 illustrates an exploded cross-sectional view of a test socket assembly as constructed in one or more embodiments.
  • FIG. 3 illustrates a perspective view of a portion of a test socket assembly as constructed in one or more embodiments.
  • FIG. 4 illustrates a cross-sectional view of a test socket assembly as constructed in one or more embodiments.
  • FIG. 5A illustrates a view of a leadframe assembly as constructed in one or more embodiments.
  • FIG. 5B illustrates a view of a portion of leadframe assembly as constructed in one or more embodiments.
  • FIG. 6 illustrates a perspective view of a leadframe assembly as constructed in one or more embodiments.
  • FIG. 7 illustrates a top view of a portion of a leadframe assembly as constructed in one or more embodiments.
  • FIG. 8 illustrates a top view of a portion of a device under test as constructed in one or more embodiments.
  • FIG. 9 illustrates a top view of a portion of a leadframe assembly as constructed in one or more embodiments.
  • FIG. 10 illustrates a top view of a portion of a leadframe assembly as constructed in one or more embodiments.
  • FIG. 11A illustrates a perspective view of a cantilever member of the leadframe assembly as constructed in one or more embodiments.
  • FIG. 1 IB illustrates a cross-sectional view of a cantilever member of the leadframe assembly as constructed in one or more embodiments.
  • FIG. l lC illustrates a perspective view of a cantilever member of the leadframe assembly as constructed in one or more embodiments.
  • FIG. 1 ID illustrates a perspective view of a cantilever member of the leadframe assembly as constructed in one or more embodiments.
  • FIG. 1 IE illustrates a cross-sectional view of a cantilever member of the leadframe assembly as constructed in one or more embodiments.
  • FIG. 11 F illustrates a perspective view of a cantilever member of the leadframe assembly as constructed in one or more embodiments.
  • FIG. 11 G illustrates a cross-sectional view of a cantilever member of the leadframe assembly as constructed in one or more embodiments.
  • FIG. 12 illustrates a view of the contactor as constructed in one or more embodiments.
  • FIG. 13A illustrates a portion of a test socket assembly as constructed in one or more embodiments.
  • FIG. 13B illustrates a portion of a test socket assembly as constructed in one or more embodiments.
  • FIG. 13C illustrates a portion of a test socket assembly as constructed in one or more embodiments.
  • FIG. 13D illustrates a portion of a test socket assembly as constructed in one or more embodiments.
  • FIG. 14 illustrates a test socket assembly as constructed in one or more embodiments.
  • FIG. 15 illustrates a portion of a test socket assembly as constructed in one or more embodiments.
  • FIG. 16 illustrates a portion of a test socket assembly as constructed in one or more embodiments.
  • FIG. 17 illustrates a portion of a test socket assembly as constructed in one or more embodiments.
  • FIGs. 1 and 2 illustrate a test socket assembly 100, including a socket alignment frame 190, a leadframe assembly 140, spring probes 120, a socket frame 180, a socket body 110, and a retainer plate 108.
  • the test socket assembly 100 is an integrated circuit test socket that combines spring probes in an insulative housing with a conductive structure that includes a flexible ground plane and impedance controlled microwave structures that carry very high speed signals in coplanar waveguide structures and coaxial connectors that interface with test equipment.
  • Retainer plate hardware 109 and alignment frame hardware 192 are also optionally provided.
  • the test socket assembly 100 is used with a device under test 200 (FIG. 2).
  • the test socket assembly 100 uses vertical compliance to achieve reliability.
  • the spring probes 120 are compliant for the power, ground and low speed signal connections, such as balls, and the microwave structures flex into the elastomer spacer 130.
  • the microwave structures terminate in precision coaxial connectors or waveguides.
  • the socket alignment frame 190 assists in aligning the device under test 200 with the test socket assembly 100.
  • FIGs. 3 - 6 illustrate the leadframe assembly 140 in greater detail.
  • the leadframe assembly 140 including polymer 135, is installed on the body 1 10 with spring probes 120 and an elastomer spacer 130, where the leadframe assembly 140 is adjacent to the elastomer spacer 130.
  • the leadframe assembly 140 is positioned on top of the elastomer spacer 130, and in a further option positioned directly adjacent and directly on top of the spacer 130.
  • the elastomer spacer 130 is disposed in a pocket in the plastic socket body 110.
  • the elastomer spacer 130 provides resiliency to the ground and microwave structures.
  • the elastomer spacer 130 has one or more holes sizes and positioned to receive the spring probes 120 therethrough.
  • the elastomer spacer 130 is resilient so that the microwave structures and ground planes offer compliance.
  • the spacer can be laser cut and customized to the pinout configuration of the device under test.
  • the spacer can be made from a silicone rubber sheet.
  • the device under test 200 engages both spring probes and ends of microwave structures.
  • the leadframe assembly 140 is replaceable such that it can be removed from the socket assembly without damaging the socket assembly and replaced with another leadframe assembly.
  • the leadframe assembly 140 includes an electrically conductive sheet with holes, slots, and cantilever members 150 that make the impedance controlled microwave structures (such as a coplanar waveguide). Microwave structures are formed to high speed signal positions of the device under test, and are routed to the edge of the leadframe assembly 140 or to an interior position in the grounding portion of the leadframe.
  • Other holes can be fabricated in the ground plane and can be used for mechanical fastening and/or alignment to the socket housing.
  • the leadframe assembly 140 has holes matched for the pin out array of the spring probes, as shown in FIGs. 5A and 5B.
  • the lead frame has a first set of holes 144 that are tightly positioned where ground signals need to be in contact with the device under test and spring pin.
  • the leadframe assembly 140 makes electrical contact with the spring probes at the first set of holes 144.
  • the leadframe assembly 140 further includes a second set of holes 146 which are oversized relative to the spring probe where non-critical signals interface with the device under test 200 (FIG. 2) , such as power lines or other signal lines.
  • the spring probes do not make electrical contact with the leadframe assembly 140 at the second set of holes 146.
  • FIG. 7 - 10 illustrates the leadframe assembly 140 in greater detail.
  • a flexible 2-D structure of the leadframe assembly 140 allows for other RF structures to be directly incorporated therein.
  • a balun structure 170 splits a single-ended 50 ohm signal at a specific frequency and shifts phase of the signals. One leg of the split is slightly longer, thus shifting the phase if the signal by a prescribed amount, for example 180 degrees (See FIG. 7).
  • the resultant output is a balanced differential signal pair.
  • Additional embodiments include, but are not limited to loopback traces connecting input and output signals, and delay lines (See FIGs. 8 and 9, 10).
  • the leadframe assembly includes signal paths with longer 172 or shorter 174 paths to fine tune signal propagation delay.
  • the leadframe assembly 140 includes one or more cantilever members 150 which flex relative to the remaining portion of the assembly 140.
  • the cantilever members 150 include members which interface with the device under test 200 (FIG. 2).
  • the cantilever members 150 are impedance controlled microwave structures.
  • the members include end portions of the cantilever members 150, in one or more examples.
  • the members 141 have mechanical structures designed to align and/or penetrate the ball grid array solder balls, which assist in making reliable electrical contacts.
  • the members include parallel edges (FIG. 1 1 A, 1 IB), recessed overall triangle shape (FIG. 11C, 1 IE), recessed sharp bumps (FIG.
  • the cantilever members include coupling members of the transmission line signals.
  • the coupling members are delay lines or phase shifting lines.
  • the leadframe microwave structures are terminated externally to precision microwave coaxial connectors.
  • the leadframe is impedance matched at the transition to the coaxial connectors 182 (FIG. 12) for optimal RF performance.
  • the leadframe can include a flat configuration with axially terminating connectors (FIGs. 12, FIG. 13 A).
  • the leadframe has a gradual radius downward, so that coaxial connectors can be mounted below the socket housing, allowing for improved socket density in test handling conditions (FIG. 6).
  • the leadframe signal lines are configured in a coplanar waveguide transmission line structure.
  • the leadframe signal lines can be split with a balun structure, so that the split signals shift phase to a prescribed amount at a prescribed frequency. This allows for construction of a balanced differential signal pair.
  • the leadframe signal lines can incorporate loopback structures that are short and connect an input and output signal of a device under test for testing.
  • leadframe signal lines can be lengthened or shortened to add a prescribed signal delay.
  • the socket frame 180 is shown in FIG. 12 in greater detail.
  • the coplanar waveguide transmission line structures terminate to a coaxial feed through connector or surface mounted connector, in one or more embodiments.
  • a reduced diameter of the center conductor of the connector mates with a recess and/or slot in an end of the leadframe assembly 140 lead.
  • An electrical connection can be made, for example, by soldering the connection.
  • a ground plane of the lead frame assembly 140 has protrusions near the signal line, and the protrusions are inserted into holes in a conductor frame, for example, a metal frame, that encloses the entire socket and supports the coaxial connectors.
  • the ground plane can be mechanically attached, such as clamped with metal fasteners. This connection can be used to connect all of the ground planes to the socket body.
  • a transition from the lead frame signal line to the coaxial connector is matched so that impedance discontinuities are minimized for high speed performance.
  • the socket assembly has an outer body constructed of a conductive metal shell.
  • the shell acts as a mounting point for connectors and acts as an electrical ground.
  • the socket assembly further includes a socket body 110 that is non-conductive and houses the spring probes (FIG. 1).
  • the spring probes contact digital signals, power, and ground pins on the device under test.
  • a retainer plate on the bottom of the body 110 captivates the spring probes.
  • FIGs. 14 - 17 illustrate a use of a surface mount connector as terminations for the microwave transmission lines. This construction allows for a non-conductive socket housing 183, such as a plastic housing, to be used. The above-discussed embodiments are incorporated herein for FIGs. 14 - 17.
  • the leadframe assembly 140 includes an electrically conductive sheet with holes, slots, and cantilever members 150, and balun structure 170 that make the impedance controlled microwave structures (such as a coplanar waveguide).
  • Microwave structures are formed to high speed signal positions of the device under test, and are routed to the edge of the leadframe assembly 140 or to an interior position in the grounding portion of the leadframe.
  • An elastomer spacer 130 is provided, where the leadframe assembly 140 is adjacent to the elastomer spacer 130.
  • the leadframe assembly 140 is positioned on top of the elastomer spacer 130, and in a further option positioned directly adjacent and directly on top of the spacer 130.
  • the elastomer spacer 130 is disposed in a pocket in the plastic socket body.
  • the elastomer spacer 130 provides resiliency to the cantilever members 150 at the end of the signal leads.
  • the elastomer spacer 130 has an outer frame 133, and spacer fingers 136 extending into a center opening of the spacer 130.
  • the elastomer spacer 130 is resilient so that the microwave structures and ground planes offer compliance.
  • the spacer fingers 136 support the cantilever members 150.
  • the leadframe microwave structures are terminated externally to precision microwave coaxial connectors.
  • the leadframe is impedance matched at the transition to the coaxial connectors 182 for optimal RF performance.
  • the coaxial connectors 182 can be surface mounted to the lead frame.
  • the outside perimeter of the lead assembly includes the ground plane, however it is not necessary to interface every pin with the ground plane.
  • a method for testing components includes disposing a device under test in a socket assembly, the socket assembly comprising a housing having one or more spring probes therein, a leadframe assembly including one or more cantilever members, the leadframe assembly having impedance controlled microwave structures and a flexible ground plane, the leadframe assembly disposed within the housing, and an elastomeric spacer adjacent the leadframe assembly.
  • the method further includes contacting the device under test with the spring probes and the microwave structures, contacting the device under test with the cantilever members and flexing and deflecting the cantilever members, resiliently supporting the cantilever members with the elastomeric spacer, and sending microwave signals to and from the device under test.
  • the leadframe assembly includes a first set of holes and a second set of holes, and the spring probes electrically contact the first set of holes and ground signals are tested.
  • the method further includes penetrating a portion of the device under test with the cantilever members.
  • the socket assembly is a test socket that is compatible with semiconductor back-end manufacturing, yet is capable in operating at the W-band frequencies.
  • the spring probes provide for reliable testing and are combined with impedance matched transmission line contacts to device contact points.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Connecting Device With Holders (AREA)
  • Details Of Connecting Devices For Male And Female Coupling (AREA)

Abstract

La présente invention concerne un ensemble douille comprenant un boîtier qui contient une ou plusieurs sondes à ressort. L'ensemble douille comprend en outre un ensemble grille de connexion qui présente un ou plusieurs éléments en porte-à-faux, et l'ensemble grille de connexion présente des structures hyperfréquences et un plan de masse souple. L'ensemble douille comprend en outre un élément d'espacement élastomère adjacent à l'ensemble grille de connexion, l'élément d'espacement élastomère ayant un ou plusieurs orifices destinés à recevoir les sondes à ressort.
EP15734498.7A 2014-06-20 2015-06-18 Ensemble douille d'essai et procédés associés Active EP3158345B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462015180P 2014-06-20 2014-06-20
PCT/US2015/036513 WO2015195970A1 (fr) 2014-06-20 2015-06-18 Ensemble douille d'essai et procédés associés

Publications (2)

Publication Number Publication Date
EP3158345A1 true EP3158345A1 (fr) 2017-04-26
EP3158345B1 EP3158345B1 (fr) 2023-11-15

Family

ID=53514399

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15734498.7A Active EP3158345B1 (fr) 2014-06-20 2015-06-18 Ensemble douille d'essai et procédés associés

Country Status (10)

Country Link
US (2) US10037933B2 (fr)
EP (1) EP3158345B1 (fr)
JP (2) JP2017518505A (fr)
KR (1) KR102354793B1 (fr)
CN (1) CN106716143B (fr)
DK (1) DK3158345T3 (fr)
MY (1) MY193598A (fr)
PH (1) PH12016502551B1 (fr)
SG (1) SG11201610578WA (fr)
WO (1) WO2015195970A1 (fr)

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KR101978731B1 (ko) * 2018-03-27 2019-05-15 송인식 반도체 패키지용 테스트 소켓
WO2019231928A1 (fr) * 2018-06-01 2019-12-05 Xcerra Corporation Ensemble tête de sonde hybride servant à tester un dispositif de tranche à l'essai
US20200083582A1 (en) 2018-09-07 2020-03-12 Xcerra Corporation High frequency circuit with radar absorbing material termination component and related methods
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CN112824912A (zh) * 2019-11-20 2021-05-21 嘉联益电子(昆山)有限公司 传输线测试模块与传输线测试方法
KR102089653B1 (ko) * 2019-12-30 2020-03-16 신종천 테스트 소켓 조립체
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EP3859891B1 (fr) 2020-01-31 2024-08-21 Nxp B.V. Procédé et appareil comprenant un dispositif à semiconducteurs et appareil de test
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JP2020064065A (ja) 2020-04-23
US11088051B2 (en) 2021-08-10
US10037933B2 (en) 2018-07-31
KR20170020465A (ko) 2017-02-22
MY193598A (en) 2022-10-19
US20180096917A1 (en) 2018-04-05
KR102354793B1 (ko) 2022-01-21
WO2015195970A1 (fr) 2015-12-23
SG11201610578WA (en) 2017-01-27
JP2017518505A (ja) 2017-07-06
EP3158345B1 (fr) 2023-11-15
US20150369840A1 (en) 2015-12-24
DK3158345T3 (da) 2024-02-19
PH12016502551A1 (en) 2017-04-10
CN106716143B (zh) 2019-08-13
PH12016502551B1 (en) 2017-04-10
CN106716143A (zh) 2017-05-24

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