EP3069026A1 - Antriebs- und steuereinrichtung für eine vakuumpumpe, vakuumpumpe sowie verfahren zum herstellen einer steuerplatine für eine vakuumpumpe - Google Patents
Antriebs- und steuereinrichtung für eine vakuumpumpe, vakuumpumpe sowie verfahren zum herstellen einer steuerplatine für eine vakuumpumpeInfo
- Publication number
- EP3069026A1 EP3069026A1 EP14796105.6A EP14796105A EP3069026A1 EP 3069026 A1 EP3069026 A1 EP 3069026A1 EP 14796105 A EP14796105 A EP 14796105A EP 3069026 A1 EP3069026 A1 EP 3069026A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- control device
- vacuum pump
- drive
- plug contact
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000005192 partition Methods 0.000 claims description 39
- 239000004020 conductor Substances 0.000 claims description 16
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 16
- 229910052697 platinum Inorganic materials 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 abstract description 5
- 238000004382 potting Methods 0.000 description 7
- 238000007527 glass casting Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- YSUIQYOGTINQIN-UZFYAQMZSA-N 2-amino-9-[(1S,6R,8R,9S,10R,15R,17R,18R)-8-(6-aminopurin-9-yl)-9,18-difluoro-3,12-dihydroxy-3,12-bis(sulfanylidene)-2,4,7,11,13,16-hexaoxa-3lambda5,12lambda5-diphosphatricyclo[13.2.1.06,10]octadecan-17-yl]-1H-purin-6-one Chemical compound NC1=NC2=C(N=CN2[C@@H]2O[C@@H]3COP(S)(=O)O[C@@H]4[C@@H](COP(S)(=O)O[C@@H]2[C@@H]3F)O[C@H]([C@H]4F)N2C=NC3=C2N=CN=C3N)C(=O)N1 YSUIQYOGTINQIN-UZFYAQMZSA-N 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0693—Details or arrangements of the wiring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/008—Hermetic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/068—Mechanical details of the pump control unit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/803—Electric connectors or cables; Fittings therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/808—Electronic circuits (e.g. inverters) installed inside the machine
Definitions
- the invention relates to a drive and control device for a vacuum pump, a vacuum pump and a method for producing a control board for a vacuum pump.
- Vacuum pumps have at least one rotor element in a pump housing.
- this is a rotor which has a plurality of rotor blades formed in rotor disks.
- the rotor element can also be a rotor of a Holweck stage which is essentially hollow-cylindrical.
- the at least one rotor element is supported by a rotor shaft rotatably mounted in the pump housing.
- at least one stator element interacting with the at least one rotor element is arranged in the pump housing.
- a turbomolecular pump is a plurality of disk-shaped, stator-shaped stator disks, which are arranged between adjacent rotor disks.
- the stator element In a Holweck stage, the stator element is a stationary helical groove.
- a vacuum pump has a drive device in which it usually is an electric motor. It is customary here for the motor motor to be located directly on the rotor shaft.
- the motor stator is arranged within a region of the vacuum pump in which there is a vacuum. This has the consequence that a power supply, for example by a partition of the pump housing, must be performed in the vacuum area.
- connection of the pin with a control device arranged outside the vacuum region is effected by a flexible line.
- a flexible line is required here because the glass encapsulation of the pins is extremely susceptible to mechanical stresses. Such voltages can occur, for example due to tolerances in particular between pins and plugs. This would then lead to damage during assembly of Glasvergusses if no flexible conduit would be provided.
- the provision of such a flexible line is in the manufacture and in particular in the assembly is a considerable effort. Plugging a corresponding plug contact with flexible line on the pins of the current feedthrough must be done by hand. In this case, particular care must be taken to ensure that the glass casting is not damaged by excessive forces. The production and production is therefore expensive. Furthermore, a relatively large amount of space is needed.
- the object of the invention is to simplify the connection to a power feedthrough.
- the object is achieved by a drive and control device for a vacuum pump according to claim 1, a vacuum pump according to claim 10 and a method for producing and mounting a control board for a vacuum pump according to claim 11.
- the drive and control device according to the invention for a vacuum pump has a partition wall or a base wall. This is in particular a part of the vacuum pump housing or a part that can be connected to the vacuum pump housing.
- a partition a distinction between a vacuum region within the vacuum pump, in which the drive means, such as the electric motor, sensors or other electrical means are arranged, and a further area.
- This area may be an area outside of the vacuum pump or another area arranged inside the vacuum pump, but in which there is a lower vacuum and in particular atmospheric pressure.
- the electrical device and on the other side of the partition, ie. outside the vacuum region a control device is arranged, wherein the control device can be a control device arranged directly in a space of the vacuum pump or an external control device.
- the partition wall has a vacuum-tight current feedthrough.
- This is usually one or more pins or pins, which are arranged vacuum-tight in the partition. This can be done in particular by potting the pins in the partition, preferably by a glass casting.
- the current feedthrough is connected via a first conductor to the electrical device. This is usually a flexible conductor, wherein the connecting wires are usually soldered to the pins.
- a second conductor the connection between the current feedthrough and the Control device.
- the second current conductor is designed as a plug contact which is connected directly to the current leadthrough. This can be done in a simple manner an exact cost-effective connection.
- the plug contact is connected to the control device via at least one connecting web.
- control device is designed as a control circuit board, which can be connected to the partition wall.
- a control circuit board which can be connected to the partition wall.
- a direct screwing or otherwise securing the control board on the side facing away from the vacuum region in the vacuum pump side of the partition takes place.
- a base plate or a base member is further provided. This is preferably attached to the partition, and this can be done directly or indirectly.
- the base plate or the base element serves for fastening the control board. Also, in a further preferred embodiment, a fastening of the plug contact to the base plate or the base element take place.
- the control board is first fixed to the base plate or the base element in particular by screws.
- the plug-in contact or an element carrying the plug-in contact is then preferably likewise held on the base plate or the base element via screws, but not yet fixed, so that the plug-in contact is still movable.
- the base plate or the base element is then connected to the partition, in which case the plug-in contact is plugged onto the current feedthrough. Due to the not yet firm connection between the plug contact and the base plate or base element, an introduction of forces or moments in the current feedthrough is avoided. Subsequently, a fixing of the base plate or of the base element takes place the partition or another part of the pump or the pump housing.
- the plug contact is connected to the control board via a flexible cable which forms part of the second conductor. Furthermore, it is preferred in this case in particular for simplifying the assembly that the plug contact is connected via at least one connecting web to the control board. This has the particular advantage that the provision of the plug contact, as well as the other electronic components that are arranged on the board, can be done automatically.
- the at least one connecting web is in this case directly connected to the plug contact or it is additionally provided a support plate.
- the support plate is then connected to at least one connecting web with the control board, wherein the support plate carries the plug contact.
- the carrier plate may be a part of a plate-shaped main carrier of the board.
- the support plate can in this case be made for example by corresponding recesses in the board, so that only the at least one connecting web stops.
- the carrier plate can be produced in a simple manner and the plug contact can be arranged in a simple manner, in particular automatically, on the carrier plate.
- the at least one connecting web has a certain flexibility in a preferred development. This can be done by a relative thin design of the at least one connecting web can be realized. It is particularly preferred that the at least one connecting web is severable. It is thus possible, in particular before the assembly of the control board on the base plate or partition to sever the at least one connecting web. It is thus possible, the carrier plate which carries the plug-in contact, for example, via a screw firmly connected to the base plate or the partition. This is also possible with the control board.
- the plug contact in particular the carrier plate of the plug contact, for example, via the screw, are firmly connected to the partition, wherein before this connection, if necessary, a severing of the at least one connecting web.
- a firm connection of the control board on the partition in particular also by a screw, done.
- the electrical device is in this case arranged in a vacuum region of the pump, wherein the control device is arranged in a region with a lower vacuum, in particular atmospheric pressure.
- the vacuum pump according to the invention is preferably further developed as described above with reference to the different embodiments of the drive and control device.
- the individual features of the drive and control device described above thus also represent preferred features of the vacuum pump according to the invention.
- the invention relates to a method for manufacturing and mounting a control board for a vacuum pump.
- a board carrier is made with a main carrier and a carrier plate.
- the main carrier of the platinum carrier is used to hold electronic components and the like.
- the carrier plate serves to receive the plug contact and is connected according to the invention via at least one connecting web with the main carrier.
- the main carrier is equipped with electronic components, whereby in a preferred embodiment this takes place automatically or automatically.
- a plug contact is arranged on the carrier plate, whereby this, too, can preferably be effected automatically or automatically.
- a severing of the at least one connecting web takes place during or during assembly.
- the platinum carrier it is preferred, for example, to produce it from a one-piece planar carrier material which is usually used for electronic boards, the carrier plate receiving the plug contact being produced in such a way that recesses are produced.
- the recesses are formed such that at least one connecting web for holding the carrier plate stops.
- the recesses can be made by milling, cutting or the like.
- the assembly of the control board ie. the main carrier and / or the carrier plate is preferably carried out as described above on the partition which delimits a vacuum region or on the base plate.
- the vacuum pump preferably an immediate plugging of the plug-in contact on the current feedthrough or the corresponding pins.
- FIG. 1 shows a schematic sectional view of a drive and control device mounted on a base plate
- Figure 2 is a schematic plan view of a control board and a
- FIG. 3 shows a schematic sectional view of a drive and control device mounted on a partition
- FIG. 4 shows a schematic plan view of a further embodiment of a control board and a plug contact
- FIG. 5 is a schematic sectional view of that shown in FIG.
- FIG. 6 is a schematic sectional view of that shown in FIG.
- a control device has a plurality of only schematically illustrated electronic components 10, which are arranged on a circuit board 12.
- the circuit board 12 is connected to, for example, a frequency converter, an additional control device or the like.
- a schematically illustrated drive device 14 is provided, such as an electric motor.
- the electric motor is usually connected directly to the rotor shaft of the vacuum pump to be driven. It may also be a temperature sensor, speed sensor and / or another electronic device instead of the electric motor.
- the electronic device is arranged in relation to a partition 16 of the vacuum pump in a region 18 in the vacuum prevails.
- the partition separates the vacuum region 18, in particular, tightly from a region 20 in which a lower vacuum or, in particular, atmospheric pressure prevails.
- the device 14 is connected via power lines 22 with pins 24.
- the pins 24 penetrate the partition and thus constitute a current feedthrough.
- the pins 24 are for sealing z. B. with glass 26 shed.
- the pins 24 are connected to a plug contact 28.
- the plug contact 28 is arranged on a carrier plate 30, for example glued.
- the carrier plate 30 is connected to the control board 12 via a flexible cable, designed as a flat cable 32 in the illustrated embodiment.
- the support plate 30 is fixed in the illustrated embodiment via a screw 34 to a base plate 25. Since the connection to the control board 12 takes place after assembly only via the flexible flat cable 32 in the illustrated embodiment, no forces are transmitted from the control board 12 in the support plate 30 and thus not on the pins 24. This ensures that the casting 26 is not damaged by corresponding forces or stresses becomes .
- the base plate 35 is connected by screws 37 to the partition 16.
- the control board 12 is fixed by means of the screws 38 on the base plate 35. Subsequently, the screw 34 is easily screwed into the plug contact 28 wherein the plug contact 28 is not yet fixed, so that it is still movable.
- placing or plugging the base plate 35 onto the dividing wall 16 takes place, for example, centering lugs, centering pins and the like may be provided.
- the plug-in contact 28 is plugged onto the pins 24. Since the plug-in contact 28 is not yet fixed, plugging can take place without corresponding forces or stresses being introduced into the potting 26 which could damage the potting.
- the base plate 35 can be fixed by means of several distributed around the circumference arranged screws 37. In this fixation, a slight displacement of the plug contact 28 can continue to take place. After fixing the base plate 35 and the plug contact 28 can be fixed by means of the screw 34.
- this has a platinum support 42 ( Figure 2). On this, the electronic components 10, and interconnects, etc. are arranged.
- the support plate 30 is connected in the illustrated embodiment via four connecting webs 44 with the platinum support 42. This makes it possible to equip the plug 28 automatically or automatically. Before or during assembly on the base plate 35, the connecting webs 44 are severed.
- control board 12 and the plug contact 28 is not on a base plate 35 (FIG 1) but are arranged on the partition wall 16.
- the control board 12 is connected to the support plate 30, as shown in Figure 2, via webs 44.
- a flat cable 32 is provided for electrical contacting.
- the webs 44 are severed in order to prevent transfers of forces to the carrier plate 30 and thus into the potting compound 26.
- control device 12 is fixed to the partition wall 16 by means of screws 33.
- plug contact 28 is plugged onto the pins 24, but not yet fixed.
- a fixing of the plug-in contact 28 takes place only after the control board 12 is fixed by means of screws 33 on the partition wall 16.
- the fixation of the plug-in contact 28 is then carried out by means of screws 29.
- FIGS. 4 to 6 show a further preferred embodiment of a control board and a plug-in contact.
- the control board 46 shown in FIGS. 4 to 6 is likewise equipped with a plurality of electronic components 10.
- a support plate 48 is disposed outside of the control board 46.
- connecting webs 52 may be provided, which are then severed for assembly.
- the connecting webs 52 may also be omitted.
- lines 54 which may be formed as a flat cable, the control board 46 is connected to the support plate 48 and a arranged on the support plate 48 plug contact 28.
- the support plate or board 48 also omitted.
- the lines 54 and a corresponding flat cable is then connected directly to the plug contact 28 in this embodiment.
- the webs 52 when connecting webs 52 are provided, an automatic loading of the circuit board 46 and the support plate 48 can take place.
- the webs 52 if they are present, severed and the support plate 48 is brought together with the plug contact 28 from the position shown in Figure 5 in the position shown in Figure 6.
- 50 through-holes 56 are provided in the platinum carrier.
- Substantially cylindrical lugs 58 of plug contact 54 are inserted through holes 56 for mounting, with the diameter of bores 56 being greater than that of cylindrical lugs 58.
- the plug-in contact 28 can then be fixed by means of screws 60, for example, to a dividing wall 16 or a base plate 35, corresponding to the embodiments described above. This can be done by means of two screws 60.
- the plug-in contact 28 is plugged in turn on the pins 24 during assembly, 46 due to the mechanical separation between the plug contact 28 and the control board 46, the introduction of forces or stresses in the potting 26 is avoided.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201310222905 DE102013222905A1 (de) | 2013-11-11 | 2013-11-11 | Antriebs- und Steuereinrichtung für eine Vakuumpumpe, Vakuumpumpe sowie Verfahren zum Herstellen einer Steuerplatine für eine Vakuumpumpe |
PCT/EP2014/074201 WO2015067810A1 (de) | 2013-11-11 | 2014-11-10 | Antriebs- und steuereinrichtung für eine vakuumpumpe, vakuumpumpe sowie verfahren zum herstellen einer steuerplatine für eine vakuumpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3069026A1 true EP3069026A1 (de) | 2016-09-21 |
EP3069026B1 EP3069026B1 (de) | 2019-06-19 |
Family
ID=51871049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14796105.6A Active EP3069026B1 (de) | 2013-11-11 | 2014-11-10 | Antriebs- und steuereinrichtung für eine vakuumpumpe, vakuumpumpe sowie verfahren zum herstellen einer steuerplatine für eine vakuumpumpe |
Country Status (7)
Country | Link |
---|---|
US (1) | US20160319823A1 (de) |
EP (1) | EP3069026B1 (de) |
JP (1) | JP6457513B2 (de) |
KR (1) | KR102312641B1 (de) |
CN (1) | CN105765224B (de) |
DE (1) | DE102013222905A1 (de) |
WO (1) | WO2015067810A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD742581S1 (en) | 2013-12-09 | 2015-11-03 | Kenall Manufacturing Company | Driver housing |
EP3333429B1 (de) * | 2016-12-09 | 2022-02-09 | Pfeiffer Vacuum Gmbh | Vakuumgerät |
CN110541819B (zh) | 2018-05-28 | 2020-11-20 | 杭州三花研究院有限公司 | 电子油泵 |
CN110541818B (zh) | 2018-05-28 | 2020-11-20 | 杭州三花研究院有限公司 | 电子油泵 |
JP7289627B2 (ja) * | 2018-10-31 | 2023-06-12 | エドワーズ株式会社 | 真空ポンプ、保護網及び接触部品 |
JP7342766B2 (ja) * | 2020-03-31 | 2023-09-12 | 株式会社豊田自動織機 | 電動圧縮機 |
DE102022207143A1 (de) | 2022-07-13 | 2024-01-18 | Robert Bosch Gesellschaft mit beschränkter Haftung | Elektronisch kommutierte Maschine und deren Verwendung |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5180651U (de) * | 1974-12-23 | 1976-06-26 | ||
JPS5180651A (ja) * | 1975-01-12 | 1976-07-14 | Hai Mekanitsuku Kogyo Kk | Setsutensoshitorimetaruno yosetsuhoho |
JPH0641168U (ja) * | 1992-10-28 | 1994-05-31 | 横河電機株式会社 | 補助基板を有する電子機器 |
JP2003132975A (ja) * | 2001-10-26 | 2003-05-09 | Nippon Konekuto Kogyo Kk | 基板用高電流コネクタ |
JP2005273592A (ja) * | 2004-03-26 | 2005-10-06 | Nippon Densan Corp | 遠心ファン |
JP4826212B2 (ja) * | 2005-11-04 | 2011-11-30 | 株式会社豊田自動織機 | 電動コンプレッサ |
DE102006016405B4 (de) * | 2006-04-07 | 2024-08-01 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Antriebsgerät |
JP5017042B2 (ja) * | 2007-09-28 | 2012-09-05 | 株式会社東芝 | 電源コネクタ |
JP5412098B2 (ja) * | 2008-12-05 | 2014-02-12 | 三菱重工業株式会社 | インバータ一体型電動圧縮機およびそのインバータ装置 |
JP5407991B2 (ja) * | 2010-03-30 | 2014-02-05 | 株式会社豊田自動織機 | 電動圧縮機 |
EP2631487A4 (de) * | 2010-10-19 | 2014-06-18 | Edwards Japan Ltd | Vakuumpumpe |
JP6016390B2 (ja) * | 2012-03-13 | 2016-10-26 | ナブテスコオートモーティブ株式会社 | 真空ポンプおよび真空ポンプの製造方法 |
-
2013
- 2013-11-11 DE DE201310222905 patent/DE102013222905A1/de not_active Withdrawn
-
2014
- 2014-11-10 CN CN201480061312.1A patent/CN105765224B/zh active Active
- 2014-11-10 KR KR1020167012289A patent/KR102312641B1/ko active IP Right Grant
- 2014-11-10 JP JP2016529968A patent/JP6457513B2/ja active Active
- 2014-11-10 WO PCT/EP2014/074201 patent/WO2015067810A1/de active Application Filing
- 2014-11-10 US US15/035,495 patent/US20160319823A1/en not_active Abandoned
- 2014-11-10 EP EP14796105.6A patent/EP3069026B1/de active Active
Also Published As
Publication number | Publication date |
---|---|
EP3069026B1 (de) | 2019-06-19 |
KR102312641B1 (ko) | 2021-10-13 |
JP6457513B2 (ja) | 2019-01-23 |
CN105765224B (zh) | 2017-07-11 |
US20160319823A1 (en) | 2016-11-03 |
WO2015067810A1 (de) | 2015-05-14 |
JP2016538459A (ja) | 2016-12-08 |
DE102013222905A1 (de) | 2015-05-13 |
CN105765224A (zh) | 2016-07-13 |
KR20160081920A (ko) | 2016-07-08 |
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