EP2960520B1 - Procédé et dispositif d'admission pour une chambre à vide - Google Patents

Procédé et dispositif d'admission pour une chambre à vide Download PDF

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Publication number
EP2960520B1
EP2960520B1 EP15174043.8A EP15174043A EP2960520B1 EP 2960520 B1 EP2960520 B1 EP 2960520B1 EP 15174043 A EP15174043 A EP 15174043A EP 2960520 B1 EP2960520 B1 EP 2960520B1
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EP
European Patent Office
Prior art keywords
vacuum pump
flooding
pressure
limit value
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP15174043.8A
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German (de)
English (en)
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EP2960520A1 (fr
Inventor
Tobias Stoll
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2960520A1 publication Critical patent/EP2960520A1/fr
Application granted granted Critical
Publication of EP2960520B1 publication Critical patent/EP2960520B1/fr
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0207—Surge control by bleeding, bypassing or recycling fluids
    • F04D27/0215—Arrangements therefor, e.g. bleed or by-pass valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0207—Surge control by bleeding, bypassing or recycling fluids
    • F04D27/0223—Control schemes therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Definitions

  • the present invention relates to a method for flooding a vacuum chamber connected to a vacuum pump, in particular a turbomolecular pump, in which the vacuum pump comprising a rotor and a stator is simultaneously flooded with the flooding of the vacuum chamber. It also relates to a device, particularly suitable for carrying out the method, for flooding a vacuum chamber connected to a vacuum pump, in particular a turbomolecular pump.
  • Vacuum pumps such as turbomolecular pumps
  • a vacuum chamber also known as a recipient. After switching off, the vacuum pumps are often ventilated via assigned flood valves.
  • turbomolecular pumps should be vented after they have been switched off in order to prevent backdiffusion of hydrocarbons from the forevacuum side through the pump.
  • the flood valve assigned to the vacuum pump in question is therefore often used to flood a respective vacuum chamber used, which is usually controlled by the drive electronics of the vacuum pump, in particular turbomolecular pump.
  • the vacuum pump is switched off during the flooding process, that is to say the pump rotor is de-energized, but the pump rotor frequently rotates at least temporarily and is then braked more quickly by the higher pressure resulting from the flooding.
  • the flood rate of the flood valve assigned to the respective vacuum pump that is to say the flow rate at which the gas serving for ventilation can be supplied, has hitherto been adapted to the size of the respective vacuum pump or turbomolecular pump.
  • the invention is based on the object of specifying a method and a device of the type mentioned at the outset which, even with a relatively large volume of the vacuum chamber, allow the vacuum chamber to be flooded in a simple manner without impairing the rotor which has already been switched off but is still rotating and which is connected to the vacuum chamber Allow vacuum pump.
  • this object is achieved by a method having the features of claim 1 and by a device having the features of claim 5.
  • Preferred embodiments of the method according to the invention and preferred embodiments of the device according to the invention are specified in the subclaims.
  • the method according to the invention is characterized in that the flooding takes place immediately after the pump rotor has been switched off and the flooding rate is increased during a respective flooding process as soon as the pressure in the vacuum pump has reached a predefinable limit value.
  • a relatively larger vacuum chamber can also be flooded very quickly in a relatively simple manner without the risk of impairing or damaging the rotor, which has already been switched off but is at least temporarily still rotating, of the vacuum pump connected to the vacuum chamber.
  • the invention takes advantage of the fact that above a certain pressure in the vacuum pump, at least essentially no more adverse forces caused by a gas load on the escaping, i.e. Pump rotor still switched off act, so that after reaching this pressure limit, the flood rate for the remaining flood process can be increased compared to the previous flood rate, thus accelerating the flood process as a whole.
  • Flooding immediately after the pump rotor is switched off means that the pump rotor is still rotating when the flooding process is started. In particular, it cannot be ruled out that a certain period of time may elapse between the switch-off process and the start of the flood process, in particular depending on the respective specific conditions.
  • the predeterminable limit value of the pressure in the vacuum chamber is selected such that at least essentially no more forces act on the pump rotor that is still rotating, i.e. Impairment or damage to the pump rotor due to excessive gas loads can be avoided.
  • a pressure value in the range from 100 to 400 mbar, in particular from 250 to 300 mbar, is preferably selected as the predefinable limit value of the pressure in the vacuum pump.
  • the flood rate during a respective flood process until the predeterminable limit value of the pressure in the vacuum pump is reached is preferably chosen such that a predeterminable pressure rise rate in the vacuum pump is not exceeded .
  • a preselectable rate of pressure rise in the vacuum pump is therefore preferably a rate of pressure rise in the range from 1 to 50 mbar / sec, in particular from 10 to 20 mbar / sec.
  • the flooding takes place via an activated first fluid cross-section until the predeterminable limit value of the pressure in the vacuum pump is reached and the flooding takes place after this limit value of the pressure in the vacuum pump has been reached via an activated second fluid cross-section that is larger than the first fluid cross-section.
  • the switching from the first fluid cross-section to the relatively larger second fluid cross-section takes place in that, in addition to an activated first flood valve, a second flood valve is activated.
  • the first flood valve is assigned to the vacuum pump, while the second flood valve is assigned to the vacuum chamber. This takes into account the fact that the vacuum pump is generally assigned at least one flood valve anyway, which can also be used accordingly for flooding the vacuum chamber.
  • the flooding takes place via a flood valve assigned to the vacuum pump or the vacuum chamber, which is clocked with a first duty cycle until a predefined limit value of the pressure in the vacuum pump is reached for pulsed activation of the flood valve and after this has been reached Limit value of the pressure in the vacuum pump is clocked with a larger duty cycle than the first duty cycle or is fully activated.
  • a flood valve for example, which is clocked in the manner of a pulse width modulation, is therefore sufficient.
  • a larger duty cycle is to be understood to mean that, with a larger duty cycle, the proportion of the open or release times of the flood valve is greater than with a smaller duty cycle.
  • the flooding is carried out via a flood valve assigned to the vacuum pump or the vacuum chamber, the two differently large flood gas flows possible and after a predeterminable time from the smaller is switched to the larger flood gas flow, after which the predetermined limit value of the pressure in the vacuum pump has been reached.
  • the control of such a flood valve does not necessarily have to be carried out by the control device assigned to the vacuum pump, for example integrated into the vacuum pump or permanently connected to the vacuum pump.
  • control by actuating means directly on the flood valve is also conceivable, which comprise two channels.
  • the device according to the invention for flooding a vacuum chamber connected to a vacuum pump comprises a control device and a valve arrangement for simultaneously flooding the vacuum chamber and the vacuum pump comprising a rotor and a stator immediately after the pump rotor has been switched off. It is accordingly characterized in that the control device is designed and the valve arrangement can be controlled via the control device in such a way that the flood rate is increased during a respective flood process as soon as the pressure in the vacuum pump has reached a predefinable limit value.
  • the predeterminable limit value of the pressure in the vacuum chamber is preferably selected such that at least essentially no more forces act on the pump rotor which is still rotating and is switched off.
  • the valve arrangement comprises at least a first flood valve assigned to the vacuum pump and at least a second flood valve assigned to the vacuum chamber, which can be controlled accordingly by the control device.
  • the first and the second flood valve can be controlled in such a way that the predefinable limit value is reached of the pressure in the vacuum pump, the first flood valve is activated and, when this limit value of the pressure in the vacuum pump is reached, the second flood valve is activated in addition to the first flood valve.
  • the flood valve assigned to the vacuum pump can be controlled by the control device in such a way that it is clocked with a first duty cycle until the predeterminable limit value of the pressure in the vacuum pump is reached for a pulsed activation of the flood valve and after this limit value has been reached of the pressure in the vacuum pump is clocked with a larger second duty cycle in comparison to the first duty cycle or is fully activated.
  • the control device is preferably assigned to the vacuum pump, so that the control device which is already provided for the vacuum pump as a rule can also be used at the same time to control the flooding process or the at least one flooding valve.
  • the flood valve assigned to the vacuum pump enables two flood gas streams of different sizes and it can be controlled by the control device in such a way that it is switched from the smaller to the larger flood gas stream after a predeterminable time, after which the predefinable limit value of the pressure in the Vacuum pump was reached.
  • the control device does not necessarily have to be assigned to the vacuum pump. For example it is it is also conceivable to actuate the flood valve directly on the flood valve by actuating means.
  • Fig. 1 shows a schematic representation of an exemplary embodiment of a device 10 according to the invention for flooding a vacuum chamber 14 connected to a vacuum pump 12.
  • the vacuum pump 12 can in particular be a turbomolecular pump.
  • the vacuum pump 12 can be provided with a backing flange 20 to which a backing pump can be connected.
  • the device 10 comprises a control device 16 and a valve arrangement 18 for simultaneously flooding the vacuum chamber 14 and the vacuum pump 12 comprising a rotor and a stator immediately after the pump rotor has been switched off, so that the pump rotor is indeed switched off during a respective flooding process, that is to say is de-energized , but at least still rotating at times.
  • the control device 16 is designed in such a way and the valve arrangement 18 can be controlled via the control device 16 in such a way that the flood rate, that is to say the flow rate of the supplied flood gas, is increased during a respective flood process as soon as the pressure in the vacuum pump 12 reaches a predefinable limit value p G ( see also Fig. 2 ) has reached.
  • the predeterminable limit value p G of the pressure in the vacuum pump 12 is preferably selected such that at least essentially no more forces act on the pump rotor which is still rotating and is therefore not impaired by an excessively high gas load.
  • a pressure value in the range of 300 mbar can, for example, be selected as the predefinable limit value p G of the pressure in the vacuum pump 12.
  • the valve assembly 18 includes at least one of the vacuum pump 12 associated venting valve 18 1 and at least one of the vacuum chamber 14 associated venting valve 18 2, which are controllable by the control device sixteenth
  • the flood valves 18 1 , 18 2 are through the The control device 16 can be controlled such that the first flood valve 18 1 is activated until the predefinable limit value p G of the pressure in the vacuum pump 12 is reached and, when this limit value p G of the pressure in the vacuum pump 12 is reached, the second flood valve 18 1 in addition to the first flood valve 18 1 2 is unlocked.
  • the valve arrangement 18 can also include a flood valve 18 1 assigned to the vacuum pump 12, which can be controlled by the control device 16 in such a way that until a predeterminable limit value p G of the pressure in the vacuum pump 12 is reached with a pulsed activation of the flood valve 18 1 clocked first duty cycle and after reaching this limit value p G of the pressure in the vacuum pump 12 is clocked with a larger than the first duty cycle second duty cycle or completely unlocked.
  • the relevant flood valve 18 1 can thus be controlled in the manner of a pulse width modulation.
  • control device 16 can in particular be assigned to the vacuum pump 12.
  • the valve arrangement 18 can also include a flood valve 18 1 assigned to the vacuum pump 12, which enables two flood gas streams of different sizes and can be controlled by the control device 16 in such a way that after a predeterminable time it is switched from the smaller to the larger flood gas stream, after which the one that can be predetermined Limit value p G of the pressure in the vacuum pump 12 was reached.
  • the control 16 does not necessarily have to be assigned to the vacuum pump 12.
  • the control of the flood valve can, for example, also take place directly on the flood valve via adjusting means which comprise two channels.
  • Fig. 2 shows a purely schematic diagram, in which a dashed line shows the temporal course of the pressure p in the vacuum pump 12 which results with a conventional flooding device according to the prior art and with a continuous line with the flooding device 10 according to the invention during a respective flooding process is.
  • the conventional flooding device has an at least substantially constant pressure rise rate in the vacuum pump 12 during the entire flooding process (see the dashed line).
  • this rate of pressure increase in the vacuum pump 12 rises sharply when the limit value p G of the pressure in the vacuum pump 12 is reached (see the continuous line), so that the entire flooding process is greatly accelerated.
  • Fig. 3 shows a purely schematic diagram, in which a dashed line is used to show the temporal course of the flood rate that occurs with the conventional flooding device and with a continuous line that results with the inventive flooding device 10 during a respective flooding process.
  • the conventional flooding device results in an at least essentially constant temporal course of the flooding rate during the entire flooding process (see the dashed line), while the flooding device 10 according to the invention achieves the flooding rate when reached the limit value p G of the pressure in the vacuum chamber (cf. again Fig. 2 ) rises abruptly, which, as already mentioned, significantly accelerates the entire flooding process.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (9)

  1. Procédé de remplissage d'une chambre à vide (14) reliée à une pompe à vide (12), en particulier à une pompe turbomoléculaire,
    dans lequel
    la pompe à vide (12) comprenant un rotor et un stator est remplie simultanément avec le remplissage de la chambre à vide (14),
    le remplissage s'effectue immédiatement après une coupure respective du rotor de la pompe, et le débit de remplissage est augmenté lors d'une opération de remplissage respective dès que la pression dans la pompe à vide a atteint une valeur limite (pG) prédéfinissable,
    le remplissage s'effectue par une première section transversale de fluide activée jusqu'à ce que la valeur limite (pG) prédéfinissable de la pression dans la pompe à vide (12) soit atteinte, et le remplissage s'effectue par une deuxième section transversale de fluide activée, qui est plus grande que la première section transversale de fluide, après avoir atteint cette valeur limite (pG) de la pression dans la pompe à vide (12), et
    le passage de la première section transversale de fluide à la deuxième section transversale de fluide relativement plus grande s'effectue du fait que, en supplément à une première vanne de remplissage (181) activée, une deuxième vanne de remplissage (182) est activée, la première vanne de remplissage (181) étant affectée à la pompe à vide (12) et la deuxième vanne de remplissage (182) étant affectée à la chambre à vide (14).
  2. Procédé selon la revendication 1,
    caractérisé en ce que
    la valeur limite (pG) prédéfinissable de la pression dans la pompe à vide (12) est choisie de manière à ce qu'il n'y ait au moins sensiblement plus de force agissant sur le rotor de pompe coupé encore en rotation.
  3. Procédé selon la revendication 1 ou 2,
    caractérisé en ce que
    une valeur de pression dans la plage de 100 à 400 mbar, en particulier de 250 à 300 mbar, est choisie à titre de valeur limite (pG) prédéfinissable de la pression dans la pompe à vide (12).
  4. Procédé selon l'une au moins des revendications précédentes,
    caractérisé en ce que
    le débit de remplissage pendant une opération de remplissage respective jusqu'à atteindre la valeur limite (pG) prédéfinissable de la pression dans la pompe à vide (12) est choisi de telle sorte qu'une vitesse prédéfinissable d'augmentation de la pression dans la pompe à vide (12) ne soit pas dépassée, et
    en particulier, une vitesse d'augmentation de la pression dans la plage de 1 à 50 mbar/sec, en particulier de 10 à 20 mbar/sec, est choisie comme vitesse prédéfinissable d'augmentation de la pression dans la pompe à vide (12).
  5. Dispositif (10) de remplissage d'une chambre à vide (14) reliée à une pompe à vide (12), en particulier à une pompe turbomoléculaire, en particulier pour mettre en œuvre le procédé selon l'une au moins des revendications précédentes,
    comportant un système de commande (16) et un ensemble de vannes (18) pour remplir simultanément la chambre à vide (14) et la pompe à vide (12) comprenant un rotor et un stator immédiatement après une coupure respective du rotor de la pompe,
    dans lequel
    le système de commande (16) est réalisé et l'ensemble de vannes (18) peut être piloté par le système de commande (16), de telle sorte que le débit de remplissage est augmenté pendant une opération de remplissage respective dès que la pression dans la pompe à vide (12) a atteint une valeur limite (pG) prédéfinissable,
    l'ensemble de vannes (18) comprend au moins une première vanne de remplissage (181) affectée à la pompe à vide (12) et au moins une deuxième vanne de remplissage (182) affectée à la chambre à vide (14), lesdites vannes de remplissage peuvent être pilotées par le système de commande (16) de telle sorte que la première vanne de remplissage (181) est activée jusqu'à ce que la valeur limite (pG) prédéfinissable de la pression dans la pompe à vide (12) soit atteinte, et en supplément à ladite première vanne de remplissage (181) la deuxième vanne de remplissage (182) est activée lorsque ladite valeur limite (pG) de la pression dans la pompe à vide (12) a été atteinte.
  6. Dispositif selon la revendication 5,
    caractérisé en ce que
    la valeur limite (pG) prédéfinissable de la pression dans la pompe à vide (12) est choisie de manière à ce qu'il n'y ait au moins sensiblement plus de force agissant sur le rotor de pompe coupé encore en rotation.
  7. Dispositif selon l'une des revendications 5 à 6,
    caractérisé en ce que
    la vanne de remplissage (181) affectée à la pompe à vide (12) peut être pilotée par le système de commande (16) de manière à être cadencée avec un premier rapport cyclique en vue d'une activation pulsée de la vanne de remplissage (181) jusqu'à ce que la valeur limite (pG) prédéfinissable de la pression dans la pompe à vide (12) soit atteinte, et de manière à être cadencée avec un deuxième rapport cyclique qui est supérieur au premier rapport cyclique ou à être activée complètement, après avoir atteint ladite valeur limite (pG) de la pression dans la pompe à vide (12).
  8. Dispositif selon l'une des revendications 5 à 6,
    caractérisé en ce que
    la vanne de remplissage (181) affectée à la pompe à vide (12) permet deux flux de gaz de remplissage de tailles différentes et peut être pilotée par le système de commande (16) de manière à passer du plus petit au plus grand flux de gaz de remplissage après un temps prédéfinissable auquel la valeur limite (pG) prédéfinissable de la pression dans la pompe à vide (12) est atteinte.
  9. Dispositif selon l'une des revendications 5 à 8,
    caractérisé en ce que
    le système de commande (16) est affecté à la pompe à vide (12).
EP15174043.8A 2014-06-26 2015-06-26 Procédé et dispositif d'admission pour une chambre à vide Active EP2960520B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014109005.5A DE102014109005A1 (de) 2014-06-26 2014-06-26 Verfahren und Vorrichtung zum Fluten einer Vakuumkammer

Publications (2)

Publication Number Publication Date
EP2960520A1 EP2960520A1 (fr) 2015-12-30
EP2960520B1 true EP2960520B1 (fr) 2020-07-01

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EP15174043.8A Active EP2960520B1 (fr) 2014-06-26 2015-06-26 Procédé et dispositif d'admission pour une chambre à vide

Country Status (3)

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EP (1) EP2960520B1 (fr)
JP (1) JP2016008612A (fr)
DE (1) DE102014109005A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2552958B (en) * 2016-08-15 2019-10-30 Edwards Ltd Turbo pump vent assembly and method
EP3339651B1 (fr) * 2016-12-23 2019-05-01 Pfeiffer Vacuum Gmbh Pompe à vide
JP7208276B2 (ja) 2021-01-26 2023-01-18 日本電子株式会社 イオンビーム加工装置及びその動作制御方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2466145A2 (fr) * 2010-12-17 2012-06-20 Pfeiffer Vacuum GmbH Procédé d'aération d'une pompe à vide et agencement doté d'une pompe à vide

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60167192U (ja) * 1984-04-17 1985-11-06 日本電子株式会社 タ−ボ分子ポンプを用いた排気系
JPH018714Y2 (fr) * 1984-12-05 1989-03-08
JPS6352255U (fr) * 1986-09-24 1988-04-08
DE4022523A1 (de) * 1990-07-16 1992-01-23 Pfeiffer Vakuumtechnik Einrichtung zum fluten von schnell rotierenden vakuumpumpen
JPH0819907B2 (ja) * 1991-09-05 1996-03-04 シーケーディ株式会社 真空破壊用装置
EP1739308B1 (fr) 2005-06-30 2008-06-18 VARIAN S.p.A. Pompe à vide
DE102007051045B4 (de) * 2007-10-25 2020-11-12 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren
FR2940219B1 (fr) * 2008-12-22 2011-10-14 Bosch Gmbh Robert Systeme de simulation de sensation de freinage et application d'un tel systeme

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2466145A2 (fr) * 2010-12-17 2012-06-20 Pfeiffer Vacuum GmbH Procédé d'aération d'une pompe à vide et agencement doté d'une pompe à vide

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EP2960520A1 (fr) 2015-12-30
JP2016008612A (ja) 2016-01-18
DE102014109005A1 (de) 2015-12-31

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