EP2960520A1 - Procédé et dispositif d'admission pour une chambre à vide - Google Patents

Procédé et dispositif d'admission pour une chambre à vide Download PDF

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Publication number
EP2960520A1
EP2960520A1 EP15174043.8A EP15174043A EP2960520A1 EP 2960520 A1 EP2960520 A1 EP 2960520A1 EP 15174043 A EP15174043 A EP 15174043A EP 2960520 A1 EP2960520 A1 EP 2960520A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
flood
pressure
valve
flooding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15174043.8A
Other languages
German (de)
English (en)
Other versions
EP2960520B1 (fr
Inventor
Tobias Stoll
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2960520A1 publication Critical patent/EP2960520A1/fr
Application granted granted Critical
Publication of EP2960520B1 publication Critical patent/EP2960520B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0207—Surge control by bleeding, bypassing or recycling fluids
    • F04D27/0215—Arrangements therefor, e.g. bleed or by-pass valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0207—Surge control by bleeding, bypassing or recycling fluids
    • F04D27/0223—Control schemes therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Definitions

  • the present invention relates to a method for flooding a vacuum chamber connected to a vacuum pump, in particular a turbomolecular pump, in which the flooding of the vacuum chamber simultaneously flooding the vacuum pump comprising a rotor and a stator. It further relates to a device suitable in particular for carrying out the method for flooding a vacuum chamber connected to a vacuum pump, in particular a turbomolecular pump.
  • Vacuum pumps such as turbomolecular pumps can be used to generate a vacuum in a vacuum chamber, also referred to as a recipient. After switching off the vacuum pumps are often vented via associated flood valves. For example, turbomolecular pumps should be vented after shutdown to prevent back diffusion of hydrocarbons from the fore-vacuum side through the pump.
  • the flood valves assigned to the vacuum pumps have a very small cross-section, since it was assumed that the vacuum pump is flanged blindly at the point of use, that is to say is completed and accordingly has no additional volume.
  • the pressure in the switched-off vacuum pump must not rise too much while the pump rotor is still rotating, otherwise too great a force, i. Gas loads acting on the rotor.
  • the vacuum chambers at the site remain connected to the respective vacuum pumps.
  • a respective vacuum chamber is therefore often the respective vacuum pump associated flood valve used, which is usually controlled by the drive electronics of the vacuum pump, in particular turbomolecular pump.
  • the vacuum pump is switched off during the flooding process, ie the pump rotor is de-energized, the pump rotor often rotates at least intermittently and is then braked faster due to the higher pressure as a result of the flooding.
  • the flow rate of the respective vacuum pump associated flood valve that is, the flow rate at which the serving for aeration gas can be supplied, has hitherto adapted to the size of the respective vacuum pump or turbomolecular pump.
  • the invention has for its object to provide a method and an apparatus of the type mentioned above, which also in relatively large volume of the vacuum chamber in the simplest possible way rapid flooding of the vacuum chamber without affecting the already switched off, but still rotating rotor connected to the vacuum chamber Allow vacuum pump.
  • the inventive method is characterized in that the flooding occurs immediately after a respective shutdown of the pump rotor and the flood rate is increased during a respective flood process, as soon as the pressure in the vacuum pump has reached a predetermined limit.
  • a relatively larger vacuum chamber can be flooded very quickly without the risk of damage or damage to the already switched off, but at least temporarily rotating rotor of the vacuum chamber connected to the vacuum chamber.
  • the invention makes use of the fact that, starting from a certain pressure in the vacuum pump, at least substantially no disadvantageous forces caused by a gas load are transferred to the outgoing, i.e. still rotating shut-off pump rotor act, so that after reaching this pressure limit, the flood rate for the rest of the flooding process compared to the previous flood rate can be increased, whereby the flooding process is accelerated as a whole.
  • Flooding immediately after switching off the pump rotor means that the pump rotor is still rotating when the flooding process is started. In particular, it can not be ruled out that a certain period of time, which depends in particular on the particular concrete conditions, can pass between the switch-off process and the beginning of the flooding process.
  • the predeterminable limit value of the pressure in the vacuum chamber is chosen such that at least essentially no forces act on the still rotating pump rotor switched off, ie. Impairment or damage to the pump rotor can be avoided by excessive gas loads.
  • the rate of flow is preferably selected during a respective flooding operation until reaching the predeterminable limit value of the pressure in the vacuum pump so that a predeterminable pressure rise rate in the vacuum pump is not exceeded ,
  • a pressure increase rate in the range of 1 to 50 mbar / s, in particular 10 to 20 mbar / s, is preferably selected.
  • the flooding takes place until reaching the predefinable limit value of the pressure in the vacuum pump via an activated first fluid cross section and the flooding after reaching this limit value of the pressure in the vacuum pump via an enabled second fluid cross section that is larger than the first fluid cross section.
  • the switching over from the first fluid cross section to the relatively larger second fluid cross section can take place, for example, by virtue of the fact that, in addition to an activated first flow valve, a second flow control valve is released.
  • the first flood valve is assigned to the vacuum pump, while the second flood valve of the vacuum pump or the vacuum chamber can be assigned.
  • the vacuum pump is usually associated anyway at least one flood valve, which can be used in accordance with the flood of the vacuum chamber.
  • the flooding via a vacuum pump or the vacuum chamber associated flood valve which is clocked until reaching the predetermined limit value of the pressure in the vacuum pump for a pulsed unlocking of the flood valve with a first duty cycle and after reaching this limit the pressure in the vacuum pump is clocked with a larger compared to the first duty cycle second duty cycle or completely unlocked.
  • a flood valve which is clocked in the manner of a pulse width modulation.
  • a larger duty cycle is to be understood as meaning that with a larger duty cycle the proportion of the open or disconnection times of the flood valve is greater than with a smaller duty cycle.
  • the flooding is effected via a flood valve associated with the vacuum pump or the vacuum chamber, which allows two different sizes of flooding gas streams and after a predeterminable time of the smaller one is switched to the larger flow of flooding gas, after which the predeterminable limit value of the pressure in the vacuum pump has been reached.
  • the control of such a flood valve does not necessarily take place by the control device associated with the vacuum pump, for example integrated into the vacuum pump or permanently connected to the vacuum pump. It is, for example, a control by adjusting means directly on the flood valve conceivable comprising two channels.
  • the device according to the invention for flooding a vacuum chamber connected to a vacuum pump comprises a control device and a valve arrangement for simultaneously flooding the vacuum chamber and the vacuum pump comprising a rotor and a stator immediately after a respective switching off of the pump rotor.
  • the control device is designed so and the valve assembly via the control device is controlled so that the rate of flow is increased during a respective flood process, as soon as the pressure in the vacuum pump has reached a predetermined limit.
  • the predefinable limit value of the pressure in the vacuum chamber is preferably selected such that at least substantially no forces act on the still rotating pump rotor that is still turned off.
  • the valve arrangement comprises at least one flood valve associated with the vacuum pump and / or at least one flood valve associated with the vacuum chamber, which can be controlled accordingly by the control device.
  • the valve assembly comprises at least a first and a second flood valve and these flood valves are controlled by the controller so that until reaching the predetermined limit the pressure in the vacuum pump, the first flood valve is released and upon reaching this limit value of the pressure in the vacuum pump in addition to the first flood valve, the second flood valve is released.
  • the first flood valve is preferably associated with the vacuum pump, while the second flood valve may be associated with the vacuum pump or the vacuum chamber.
  • the valve arrangement comprises a flood valve associated with the vacuum pump or the vacuum chamber, which can be controlled by the control device such that it reaches a predetermined limit value of the pressure in the vacuum pump for a pulsed release of the flood valve with a first Duty cycle is clocked and clocked after reaching this limit value of the pressure in the vacuum pump with a larger compared to the first duty cycle second duty cycle or completely unlocked.
  • a flood valve is sufficient to flood the vacuum chamber and the connected vacuum pump.
  • the control device is preferably assigned to the vacuum pump, so that the control device, which as a rule is already provided for the vacuum pump anyway, can also be used at the same time for controlling the flooding process or the at least one flood valve.
  • the valve arrangement may also comprise a flood valve associated with the vacuum pump or the vacuum chamber, which allows two differently sized flood gas flows and is controllable by the control device such that it is switched from the smaller to the larger flow of flooding gas after a predeterminable time , after which the predefinable limit value of the pressure in the vacuum pump has been reached.
  • the control device does not necessarily have to be assigned to the vacuum pump. It is for example also conceivable to control the flood valve by adjusting means directly to the flood valve.
  • Fig. 1 shows a schematic representation of an exemplary embodiment of an apparatus 10 according to the invention for flooding a connected to a vacuum pump 12 vacuum chamber 14. It may be in the vacuum pump 12 is in particular a turbomolecular pump.
  • the vacuum pump 12 may be provided with a Vorvakuumflansch 20 to which a backing pump can be connected.
  • the device 10 comprises a control device 16 and a valve arrangement 18 for simultaneous flooding of the vacuum chamber 14 and the vacuum pump 12 comprising a rotor and a stator immediately after a respective switching off of the pump rotor, so that the pump rotor is switched off during a respective flooding operation, that is to say de-energized , but at least temporarily still rotates.
  • the control device 16 is embodied in this way and the valve arrangement 18 can be actuated via the control device 16 in such a way that the flow rate, that is to say the flow velocity of the supplied sputtering gas, is increased during a respective flooding process as soon as the pressure in the vacuum pump 12 reaches a predefinable limit value p G (FIG. see also Fig. 2 ) has reached.
  • p G a predefinable limit value
  • the predeterminable limit value p G of the pressure in the vacuum pump 12 is preferably selected such that at least essentially no forces act on the still rotating pump rotor which is still turned off, ie this is not impaired by an excessive gas load.
  • a predeterminable limit value p G of the pressure in the vacuum pump 12 for example, a pressure value in the range of 300 mbar can be selected.
  • the valve assembly 18 may in particular comprise at least one of the vacuum pump 12 associated flood valve 18 1 and / or at least one of the vacuum chamber 14 associated flood valve 18 2 , which are controlled by the control device 16 accordingly.
  • the valve assembly 18, for example, at least a first and a second flood valve 18 1 , 18 2 include, and the flood valves 18 1 , 18 2 can through the Control device 16 be controlled so that until reaching the predetermined limit p G of the pressure in the vacuum pump 12, the first flood valve 18 1 or 18 2 is released and upon reaching this limit p G of the pressure in the vacuum pump 12 in addition to the first flood valve 18 first or 18 2 the second flood valve 18 2 or 18 1 is released.
  • the first flood valve 18 1, in particular the vacuum pump 12 and the second flood valve 18 2 of the vacuum pump 12 or the vacuum chamber 14 may be assigned.
  • the valve arrangement 18 may include, for example, a flood valve 18 1 or 18 2 associated with the vacuum pump 12 or the vacuum chamber 14, which can be controlled by the control device 16 until it reaches the predeterminable limit value p G of the pressure in the vacuum pump 12 for a pulsed disconnection of the flood valve 18 1 or 18 2 is clocked with a first duty cycle and clocked after reaching this limit p G of the pressure in the vacuum pump 12 with a larger compared to the first duty cycle second duty cycle or completely unlocked.
  • the respective flood valve 18 1 or 18 2 can thus be controlled in the manner of a pulse width modulation.
  • the control device 16 may be assigned in such a case, in particular the vacuum pump 12.
  • the valve arrangement 18 may also comprise a flood valve 18 1 or 18 2 associated with the vacuum pump 12 or the vacuum chamber 14, which allows two different sizes of flood gas flows and can be controlled by the control device 16 so that it is after a predeterminable time is switched from the smaller to larger flood gas stream, after which the predetermined limit value p G of the pressure in the vacuum pump 12 has been reached.
  • the controller 16 does not necessarily have to be assigned to the vacuum pump 12 in this case.
  • the activation of the flood valve For example, can also be done via adjusting means, which include two channels, directly to the flood valve.
  • Fig. 2 1 shows a purely schematic diagram in which a dashed line shows the time profile of the pressure p in the vacuum pump 12 resulting with a conventional flooding device according to the prior art and with a continuous line of the flood device 10 according to the invention during a respective flooding process is.
  • This results in the pressure from the relationship p Q ⁇ t V .
  • "p" is the pressure in the vacuum pump 12
  • "Q” the flood gas load
  • t the current time
  • V the total volume of the vacuum chamber 14 and the vacuum pump 12.
  • Fig. 3 shows a purely schematic diagram in which is shown with a dashed line with the conventional flooding device and with a continuous line of the resulting with the flooding device 10 according to the invention during a respective flood process time profile of the flood rate.
  • the conventional flooding device an at least substantially constant time profile of the flood rate results during the entire flooding process (see the dashed line), while with the flooding device 10 according to the invention the flood rate is reached the limit value p G of the pressure in the vacuum chamber (see also again Fig. 2 ) increases abruptly, which, as already mentioned, the entire flooding process is significantly accelerated.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP15174043.8A 2014-06-26 2015-06-26 Procédé et dispositif d'admission pour une chambre à vide Active EP2960520B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014109005.5A DE102014109005A1 (de) 2014-06-26 2014-06-26 Verfahren und Vorrichtung zum Fluten einer Vakuumkammer

Publications (2)

Publication Number Publication Date
EP2960520A1 true EP2960520A1 (fr) 2015-12-30
EP2960520B1 EP2960520B1 (fr) 2020-07-01

Family

ID=53498826

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15174043.8A Active EP2960520B1 (fr) 2014-06-26 2015-06-26 Procédé et dispositif d'admission pour une chambre à vide

Country Status (3)

Country Link
EP (1) EP2960520B1 (fr)
JP (1) JP2016008612A (fr)
DE (1) DE102014109005A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018033697A1 (fr) * 2016-08-15 2018-02-22 Edwards Limited Ensemble évent de turbo-pompe et procédé
EP3339651A1 (fr) * 2016-12-23 2018-06-27 Pfeiffer Vacuum Gmbh Dispositif à vide
EP4033516A1 (fr) * 2021-01-26 2022-07-27 Jeol Ltd. Appareil de traitement par faisceau d'ions et procédé de commande de son fonctionnement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH018714Y2 (fr) * 1984-12-05 1989-03-08
EP1739308B1 (fr) 2005-06-30 2008-06-18 VARIAN S.p.A. Pompe à vide
EP2053249A2 (fr) * 2007-10-25 2009-04-29 Pfeiffer Vacuum Gmbh Agencement doté d'une pompe à vide et procédé

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60167192U (ja) * 1984-04-17 1985-11-06 日本電子株式会社 タ−ボ分子ポンプを用いた排気系
JPS6352255U (fr) * 1986-09-24 1988-04-08
DE4022523A1 (de) * 1990-07-16 1992-01-23 Pfeiffer Vakuumtechnik Einrichtung zum fluten von schnell rotierenden vakuumpumpen
JPH0819907B2 (ja) * 1991-09-05 1996-03-04 シーケーディ株式会社 真空破壊用装置
FR2940219B1 (fr) * 2008-12-22 2011-10-14 Bosch Gmbh Robert Systeme de simulation de sensation de freinage et application d'un tel systeme
DE102010055058A1 (de) * 2010-12-17 2012-06-21 Pfeiffer Vacuum Gmbh Verfahren zum Belüften einer Vakuumpumpe und Anordnung mit einer Vakuumpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH018714Y2 (fr) * 1984-12-05 1989-03-08
EP1739308B1 (fr) 2005-06-30 2008-06-18 VARIAN S.p.A. Pompe à vide
EP2053249A2 (fr) * 2007-10-25 2009-04-29 Pfeiffer Vacuum Gmbh Agencement doté d'une pompe à vide et procédé

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018033697A1 (fr) * 2016-08-15 2018-02-22 Edwards Limited Ensemble évent de turbo-pompe et procédé
CN109804190A (zh) * 2016-08-15 2019-05-24 爱德华兹有限公司 涡轮泵排气组件和方法
GB2552958B (en) * 2016-08-15 2019-10-30 Edwards Ltd Turbo pump vent assembly and method
CN109804190B (zh) * 2016-08-15 2020-08-11 爱德华兹有限公司 涡轮泵排气组件和方法
US11149736B2 (en) 2016-08-15 2021-10-19 Edwards Limited Turbo pump vent assembly and method
EP3339651A1 (fr) * 2016-12-23 2018-06-27 Pfeiffer Vacuum Gmbh Dispositif à vide
JP2018105300A (ja) * 2016-12-23 2018-07-05 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
EP4033516A1 (fr) * 2021-01-26 2022-07-27 Jeol Ltd. Appareil de traitement par faisceau d'ions et procédé de commande de son fonctionnement
US11929238B2 (en) 2021-01-26 2024-03-12 Jeol Ltd. Ion beam processing apparatus and method for controlling operation thereof

Also Published As

Publication number Publication date
JP2016008612A (ja) 2016-01-18
DE102014109005A1 (de) 2015-12-31
EP2960520B1 (fr) 2020-07-01

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