EP2935887B1 - Groupe de pompage permettant de pomper des gaz légers et utilisation du groupe de pompage - Google Patents

Groupe de pompage permettant de pomper des gaz légers et utilisation du groupe de pompage Download PDF

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Publication number
EP2935887B1
EP2935887B1 EP13805822.7A EP13805822A EP2935887B1 EP 2935887 B1 EP2935887 B1 EP 2935887B1 EP 13805822 A EP13805822 A EP 13805822A EP 2935887 B1 EP2935887 B1 EP 2935887B1
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EP
European Patent Office
Prior art keywords
dry
pump
compression pump
pumping unit
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP13805822.7A
Other languages
German (de)
English (en)
Other versions
EP2935887A1 (fr
Inventor
Dirk Schiller
Daniel SCHNEIDENBACH
Thomas Dreifert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
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Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Publication of EP2935887A1 publication Critical patent/EP2935887A1/fr
Application granted granted Critical
Publication of EP2935887B1 publication Critical patent/EP2935887B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/18—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/10—Fluid working
    • F04C2210/105—Helium (He)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F04C2210/224—Hydrogen (H2)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Definitions

  • the invention relates to a pumping station for pumping light gases, such as helium, hydrogen or their isotopes. Furthermore, the invention relates to the use of a pumping station for pumping such easier.
  • a pumping station for light gases is off EP1596066 known.
  • the object of the invention is to provide a pumping station for pumping light gases, with which a contamination of the light gases is realized while simultaneously achieving high pumping speeds at low inlet pressures.
  • the pumping station according to the invention for pumping light gases has a first dry-compressing pump.
  • An inlet of the first pump is preferably connected directly to a chamber or a recipient to be evacuated.
  • a second dry-compressing pump in particular directly connected.
  • dry compressing pumps are in particular screw or Roots pumps, the required tightness of these pumps is not realized by oil or the like, but due to a high precision manufacturing.
  • the dry-compressing pumps are hermetically sealed from the environment.
  • a hermetic Sealing is defined here as a spatial separation of the gas mixture within the vacuum pump from that outside the vacuum pump. Gaskets prevent ambient gases from pumping the gaseous mixture into a kind of impurities that significantly affect the application.
  • the seal of such pumps is made without oil or rubbing / sliding seals.
  • the vacuum pumps are screw pumps. By using such pumps, it is avoided that components of the lubricant or the seal get into the pumped gas.
  • a further, third dry-compressing pump is arranged parallel to the first dry-compressing pump. This is also connected to the evacuated chamber or the recipient.
  • the two dry-compressing screw pumps arranged parallel to one another are then connected together to the second downstream dry-compressing screw pump.
  • the two outlets of the first and third dry compressing pumps are brought together and connected in common with the inlet of the second dry compressing screw pump.
  • three dry compressing pumps are arranged in series one behind the other so that the second dry compacting pump is directly connected to another dry compacting pump.
  • dry-compressing pump that is, depending on the embodiment of the second or fourth provided dry-compressing pump, a pumping against atmosphere backing pump.
  • the backing pump is a dry displacement vacuum pump of the Roots claw, piston and / or screw type.
  • the backing pump according to the invention is designed as a dry-compressing pump in order to avoid contamination of the light gases to be pumped.
  • by providing only dry-compressing pumps according to the invention and dispensing with the use of purge gas it is possible to pump light gases with high efficiency to achieve low process pressures in the recipient due to the use of hermetically sealed pumps.
  • the gas is not contaminated, a complex cleaning is avoided, so that it is particularly possible to reuse the pumped gas, for example, in a circulatory system.
  • the first and / or the third pump is connected directly to the chamber or the recipient to be evacuated.
  • the second pump is directly connected to the first and / or third pump.
  • all dry-compressing pumps used are designed as screw pumps.
  • the entire pumping station form a hermetically sealed system to the outside.
  • the light gases are in particular hydrogen, hydrogen isotopes, deuterium, tritium, helium, helium isotopes or mixtures thereof.
  • the pumping station according to the invention for pumping light gases is particularly suitable for compacting light gases of fine vacuum, i. from approx. 0.01 mbar to ambient pressure of approx. 1 bar with full effective pumping speed.
  • the invention relates to the use of a pumping station with at least two dry-compressing pumps which are hermetically sealed to the environment in order to pump light gases.
  • the pumping station used is advantageously developed as described above and in particular pumps the light gases listed above.
  • a chamber or a recipient 10 to be evacuated is in particular connected directly to the inlet of a first dry-compressing pump 12 designed as a screw pump.
  • the outlet of the screw pump 12 is connected to the inlet of a second in the illustrated embodiment, also designed as a screw pump 14 dry compressing pump.
  • the outlet of the second dry compressing pump 14 may be connected to other elements of the plant or via a line 16 to a backing pump, not shown.
  • the two dry-compressing screw pumps provided in the first exemplary embodiment are each designed as hermetically sealed pumps relative to the environment.
  • a third dry-compressing screw pump 18 is provided parallel to the first dry-compressing screw pump 12.
  • the dry compressing screw pump 18 is directly connected to the recipient 10.
  • the two outlets of the screw pumps 12, 18 are brought together and then connected together to the inlet of the screw pump 14.
  • the outlet of the screw pump 14 is connected to a line 16 with the atmosphere or a backing pump, not shown.
  • a further preferred embodiment of the invention according to Fig. 3 is a combination of the in the Figures 1 and 2 illustrated embodiments.
  • the recipient 10 is connected directly to the two parallel screw pumps 12,18.
  • the outlets of the two screw pumps 12, 18 are brought together and connected together with the inlet of the screw pump 14.
  • another fourth dry-compressing pump 20, which is also preferably a screw pump is connected.
  • the outlet of the fourth screw pump 20 is shown in FIG Embodiment connected via a line 16 with a backing pump 22, which then pumps against the atmosphere.
  • screw pumps are provided as dry-compressing pump, which are always hermetically sealed to the environment.
  • the roughing pump 22 is a dry compressing pump, so that contamination of the light gas to be pumped is avoided.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (10)

  1. Poste de pompage destiné à pomper des gaz légers, en particulier de l'hydrogène, des isotopes de l'hydrogène, du deutérium, du tritium, de l'hélium, des isotopes de l'hélium et/ou des mélanges de ceux-ci, comprenant
    une première pompe à compression sèche (12) reliée à la chambre (10) à évacuer, et
    une deuxième pompe à compression sèche (14) reliée à la première pompe à compression sèche (12),
    dans lequel
    les pompes à compression sèche (12, 14) sont hermétiquement étanches vis à vis de l'environnement par le fait que s'opère une séparation spatiale du mélange gazeux au sein des pompes à vide d'avec le mélange gazeux à l'extérieur des pompes à vide et qu'aucun apport de gaz de purge n'est prévu, et caractérisé en ce qu'une pompe à vide préliminaire (22) pompant en particulier par rapport à l'atmosphère est reliée à la deuxième pompe à compression sèche (14) ou à une autre pompe à compression sèche (20), la pompe à vide préliminaire (22) étant une pompe Roots, une pompe à becs ou une pompe à vis.
  2. Poste de pompage selon la revendication 1, caractérisé en ce qu'est disposée, parallèlement à la première pompe à compression sèche (12), une troisième pompe à compression sèche (18) qui est reliée à la chambre (10) à évacuer.
  3. Poste de pompage selon la revendication 2, caractérisé en ce que la première et la troisième pompes à compression sèche (12, 18) sont reliées ensemble à la deuxième pompe à compression sèche (14).
  4. Poste de pompage selon l'une des revendications 1 à 3, caractérisé par l'autre pompe à compression sèche (20) reliée, en particulier directement, à la deuxième pompe à compression sèche (14).
  5. Poste de pompage selon l'une des revendications 1 à 4, caractérisé en ce que la première et/ou la troisième pompe à compression sèche (12, 18) est/sont directement reliée(s) à la chambre (10) à évacuer.
  6. Poste de pompage selon l'une des revendications 1 à 5, caractérisé en ce que la deuxième pompe à compression sèche (14) est directement reliée à la première et/ou à la troisième pompe(s) à compression sèche (12, 18).
  7. Poste de pompage selon l'une des revendications 1 à 6, caractérisé en ce que la première et/ou la deuxième et/ou la troisième et/ou l'autre pompe à compression sèche est/sont configurée(s) sous la forme de pompes à vis.
  8. Poste de pompage selon l'une des revendications 1 à 7, caractérisé en ce que l'ensemble du poste de pompage forme un système hermétiquement étanche vers l'extérieur.
  9. Utilisation d'un poste de pompage selon l'une des revendications 1 à 8 pour le refoulement de gaz légers, notamment de l'hydrogène, des isotopes de l'hydrogène, du tritium, de l'hélium, des isotopes de l'hélium et/ou de mélanges de ceux-ci, provenant d'une chambre à évacuer (10), sans apport de gaz de purge.
  10. Utilisation selon la revendication 9, dans laquelle exclusivement du gaz provenant de la chambre à évacuer est refoulé par les pompes à vide du poste de pompage.
EP13805822.7A 2012-12-22 2013-12-06 Groupe de pompage permettant de pomper des gaz légers et utilisation du groupe de pompage Active EP2935887B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202012012359.9U DE202012012359U1 (de) 2012-12-22 2012-12-22 Pumpstand zum Pumpen leichter Gase
PCT/EP2013/075835 WO2014095432A1 (fr) 2012-12-22 2013-12-06 Groupe de pompage permettant de pomper des gaz légers et utilisation du groupe de pompage

Publications (2)

Publication Number Publication Date
EP2935887A1 EP2935887A1 (fr) 2015-10-28
EP2935887B1 true EP2935887B1 (fr) 2018-10-10

Family

ID=49766055

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13805822.7A Active EP2935887B1 (fr) 2012-12-22 2013-12-06 Groupe de pompage permettant de pomper des gaz légers et utilisation du groupe de pompage

Country Status (5)

Country Link
EP (1) EP2935887B1 (fr)
CN (1) CN104870815A (fr)
DE (1) DE202012012359U1 (fr)
TW (1) TW201433702A (fr)
WO (1) WO2014095432A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105422454B (zh) * 2015-12-09 2017-12-19 攀枝花钢城集团瑞钢工业有限公司 真空抽气系统和真空抽气方法
US10982663B2 (en) * 2017-05-30 2021-04-20 Ulvac, Inc. Vacuum pump
FR3097599B1 (fr) * 2019-06-18 2021-06-25 Pfeiffer Vacuum Pompe à vide primaire de type sèche et procédé de contrôle de l’injection d’un gaz de purge
EP4224015A1 (fr) * 2022-02-07 2023-08-09 Siemens Energy Global GmbH & Co. KG Compresseur d'hydrogène

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DE3639512A1 (de) * 1986-11-20 1988-06-01 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpsystem mit einer waelzkolbenpumpe
DE3865012D1 (de) * 1988-06-01 1991-10-24 Leybold Ag Pumpsystem fuer ein lecksuchgeraet.
EP0448750B1 (fr) * 1990-03-27 1996-05-01 Leybold Aktiengesellschaft Pompe à vide multiétagée avec compression à sec et procédé pour sa mise en oeuvre
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US7033142B2 (en) * 2003-01-24 2006-04-25 Pfeifer Vacuum Gmbh Vacuum pump system for light gases
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CN201827048U (zh) * 2010-10-20 2011-05-11 广东理文造纸有限公司 一种真空系统
DE102011015464B4 (de) * 2010-11-30 2012-09-06 Von Ardenne Anlagentechnik Gmbh Vakuumpumpeinrichtung und -verfahren für staubhaltige Gase

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Also Published As

Publication number Publication date
CN104870815A (zh) 2015-08-26
EP2935887A1 (fr) 2015-10-28
DE202012012359U1 (de) 2014-03-24
WO2014095432A1 (fr) 2014-06-26
TW201433702A (zh) 2014-09-01

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