EP2935887B1 - Pumping unit for pumping light gases, and use of the pumping unit - Google Patents

Pumping unit for pumping light gases, and use of the pumping unit Download PDF

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Publication number
EP2935887B1
EP2935887B1 EP13805822.7A EP13805822A EP2935887B1 EP 2935887 B1 EP2935887 B1 EP 2935887B1 EP 13805822 A EP13805822 A EP 13805822A EP 2935887 B1 EP2935887 B1 EP 2935887B1
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EP
European Patent Office
Prior art keywords
dry
pump
compression pump
pumping unit
pumping
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EP13805822.7A
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German (de)
French (fr)
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EP2935887A1 (en
Inventor
Dirk Schiller
Daniel SCHNEIDENBACH
Thomas Dreifert
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Leybold GmbH
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Leybold GmbH
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/18—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use for specific elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/10—Fluid working
    • F04C2210/105—Helium (He)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F04C2210/224—Hydrogen (H2)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Definitions

  • the invention relates to a pumping station for pumping light gases, such as helium, hydrogen or their isotopes. Furthermore, the invention relates to the use of a pumping station for pumping such easier.
  • a pumping station for light gases is off EP1596066 known.
  • the object of the invention is to provide a pumping station for pumping light gases, with which a contamination of the light gases is realized while simultaneously achieving high pumping speeds at low inlet pressures.
  • the pumping station according to the invention for pumping light gases has a first dry-compressing pump.
  • An inlet of the first pump is preferably connected directly to a chamber or a recipient to be evacuated.
  • a second dry-compressing pump in particular directly connected.
  • dry compressing pumps are in particular screw or Roots pumps, the required tightness of these pumps is not realized by oil or the like, but due to a high precision manufacturing.
  • the dry-compressing pumps are hermetically sealed from the environment.
  • a hermetic Sealing is defined here as a spatial separation of the gas mixture within the vacuum pump from that outside the vacuum pump. Gaskets prevent ambient gases from pumping the gaseous mixture into a kind of impurities that significantly affect the application.
  • the seal of such pumps is made without oil or rubbing / sliding seals.
  • the vacuum pumps are screw pumps. By using such pumps, it is avoided that components of the lubricant or the seal get into the pumped gas.
  • a further, third dry-compressing pump is arranged parallel to the first dry-compressing pump. This is also connected to the evacuated chamber or the recipient.
  • the two dry-compressing screw pumps arranged parallel to one another are then connected together to the second downstream dry-compressing screw pump.
  • the two outlets of the first and third dry compressing pumps are brought together and connected in common with the inlet of the second dry compressing screw pump.
  • three dry compressing pumps are arranged in series one behind the other so that the second dry compacting pump is directly connected to another dry compacting pump.
  • dry-compressing pump that is, depending on the embodiment of the second or fourth provided dry-compressing pump, a pumping against atmosphere backing pump.
  • the backing pump is a dry displacement vacuum pump of the Roots claw, piston and / or screw type.
  • the backing pump according to the invention is designed as a dry-compressing pump in order to avoid contamination of the light gases to be pumped.
  • by providing only dry-compressing pumps according to the invention and dispensing with the use of purge gas it is possible to pump light gases with high efficiency to achieve low process pressures in the recipient due to the use of hermetically sealed pumps.
  • the gas is not contaminated, a complex cleaning is avoided, so that it is particularly possible to reuse the pumped gas, for example, in a circulatory system.
  • the first and / or the third pump is connected directly to the chamber or the recipient to be evacuated.
  • the second pump is directly connected to the first and / or third pump.
  • all dry-compressing pumps used are designed as screw pumps.
  • the entire pumping station form a hermetically sealed system to the outside.
  • the light gases are in particular hydrogen, hydrogen isotopes, deuterium, tritium, helium, helium isotopes or mixtures thereof.
  • the pumping station according to the invention for pumping light gases is particularly suitable for compacting light gases of fine vacuum, i. from approx. 0.01 mbar to ambient pressure of approx. 1 bar with full effective pumping speed.
  • the invention relates to the use of a pumping station with at least two dry-compressing pumps which are hermetically sealed to the environment in order to pump light gases.
  • the pumping station used is advantageously developed as described above and in particular pumps the light gases listed above.
  • a chamber or a recipient 10 to be evacuated is in particular connected directly to the inlet of a first dry-compressing pump 12 designed as a screw pump.
  • the outlet of the screw pump 12 is connected to the inlet of a second in the illustrated embodiment, also designed as a screw pump 14 dry compressing pump.
  • the outlet of the second dry compressing pump 14 may be connected to other elements of the plant or via a line 16 to a backing pump, not shown.
  • the two dry-compressing screw pumps provided in the first exemplary embodiment are each designed as hermetically sealed pumps relative to the environment.
  • a third dry-compressing screw pump 18 is provided parallel to the first dry-compressing screw pump 12.
  • the dry compressing screw pump 18 is directly connected to the recipient 10.
  • the two outlets of the screw pumps 12, 18 are brought together and then connected together to the inlet of the screw pump 14.
  • the outlet of the screw pump 14 is connected to a line 16 with the atmosphere or a backing pump, not shown.
  • a further preferred embodiment of the invention according to Fig. 3 is a combination of the in the Figures 1 and 2 illustrated embodiments.
  • the recipient 10 is connected directly to the two parallel screw pumps 12,18.
  • the outlets of the two screw pumps 12, 18 are brought together and connected together with the inlet of the screw pump 14.
  • another fourth dry-compressing pump 20, which is also preferably a screw pump is connected.
  • the outlet of the fourth screw pump 20 is shown in FIG Embodiment connected via a line 16 with a backing pump 22, which then pumps against the atmosphere.
  • screw pumps are provided as dry-compressing pump, which are always hermetically sealed to the environment.
  • the roughing pump 22 is a dry compressing pump, so that contamination of the light gas to be pumped is avoided.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Description

Die Erfindung betrifft einen Pumpstand zum Pumpen leichter Gase, wie Helium, Wasserstoff oder deren Isotope. Ferner betrifft die Erfindung die Verwendung eines Pumpstandes zum Pumpen derartiger leichter. Ein Pumpstand für leichte Gase ist aus EP1596066 bekannt.The invention relates to a pumping station for pumping light gases, such as helium, hydrogen or their isotopes. Furthermore, the invention relates to the use of a pumping station for pumping such easier. A pumping station for light gases is off EP1596066 known.

Beim Pumpen leichter Gase besteht die Problematik, dass diese Gase aufgrund der innerhalb der Pumpe bestehenden Undichtigkeiten zurückströmen. Beispielsweise weisen Schraubenpumpen zwischen dem schraubenförmigen Pumpelement und dem Gehäuse einen Spalt auf, durch den leichtes Gas zurückströmen kann. Um das Rückströmen leichter Gase zu verringern, ist es bekannt, den zu pumpenden leichten Gasen ein Purgegas beizumischen. Desweiteren ist es bekannt, die innere Dichtigkeit der Pumpen dadurch zu erhöhen, dass Fluide wie Öle zur inneren Abdichtung verwendet werden. Sowohl das Verwenden von Purgegasen als auch das Verwenden ölgedichteter Pumpen weist den Nachteil auf, dass die gepumpten leichten Gase verunreinigt werden. Dies hat zur Folge, dass die Gase aufwendig gereinigt werden müssen. Eine entsprechende Reinigung ist technisch schwierig und teuer. Dies ist insbesondere nachteilig, wenn die gepumpten leichten Gase in einem Kreislauf verwendet werden und bspw. einem Herstellungsprozess wieder zugeführt werden sollen. Hierbei können bereits geringe Verunreinigungen der entsprechenden leichten Gase zu schädlichen Veränderungen im Prozess führen. Beispielsweise ist beim Fördern des leichten Gases Tritium in Kernfusionsexperimenten bereits eine geringe Verunreinigung schädlich.
Aufgabe der Erfindung ist es einen Pumpstand zum Pumpen leichter Gase zu schaffen, mit dem ein Verunreinigen der leichten Gase bei einer gleichzeitigen Erzielung hoher Saugvermögen bei kleinen Einlassdrücken realisiert ist. Insbesondere ist es Aufgabe der Erfindung einen Pumpstand zum Pumpen leichter Gase zu schaffen, mit dem in einer zu evakuierenden Kammer Drücke von weniger als 100mbar erzielt werden können. Insbesondere ist es Aufgabe der Erfindung ein ausreichendes Saugvermögen bei Einlassdrücken von 100 bis 0,1mbar zu erzielen.
Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale eines Pumpstandes gemäß Anspruchs 1 bzw. der Verwendung eines Pumpstandes gemäß Anspruch 9. Der erfindungsgemäße Pumpstand zum Pumpen leichter Gase weist eine erste trockenverdichtende Pumpe auf. Ein Einlass der ersten Pumpe ist vorzugsweise unmittelbar mit einer zu evakuierenden Kammer bzw. einem Rezipienten verbunden. Mit der ersten trockenverdichtenden Pumpe, d.h. insbesondere einem Auslass zur ersten trockenverdichtenden Pumpe ist eine zweite trockenverdichtende Pumpe, insbesondere unmittelbar verbunden. Bei trockenverdichtenden Pumpen handelt es sich insbesondere um Schrauben- oder Rootspumpen, wobei die erforderliche Dichtigkeit dieser Pumpen nicht durch Öl oder dergleichen, sondern aufgrund einer hohen präzisen Herstellung realisiert ist. Um in der zu evakuierenden Kammer bzw. dem Rezipienten erfindungsgemäß niedrige Prozessdrücke von insbesondere weniger als 100mbar erzielen zu können und hierbei zusätzlich das Verunreinigen der gepumpten leichten Gase durch Purgegas oder ölgedichtete Pumpen zu vermeiden, sind erfindungsgemäß die trockenverdichtenden Pumpen gegenüber der Umgebung hermetisch dicht ausgebildet. Eine hermetische Abdichtung ist hierbei definiert als eine räumliche Trennung der Gasmischung innerhalb der Vakuumpumpe von derjenigen außerhalb der Vakuumpumpe. Über Dichtungen wird verhindert, dass Umgebungsgase das zu pumpende Gasgemisch in einer Art Verunreinigungen, dass sie die Applikation signifikant beeinflussen.When pumping light gases there is the problem that these gases flow back due to the existing within the pump leaks. For example, screw pumps between the helical pumping element and the housing have a gap through which light gas can flow back. In order to reduce the backflow of light gases, it is known to mix a purge gas to the light gases to be pumped. Furthermore, it is known to increase the internal tightness of the pumps by using fluids such as oils for internal sealing. Both the use of purge gases and the use of oil-sealed pumps has the disadvantage of contaminating the pumped light gases. This has the consequence that the gases must be cleaned consuming. A corresponding cleaning is technically difficult and expensive. This is particularly disadvantageous if the pumped light gases are used in a cycle and, for example, a manufacturing process to be supplied again. In this case, even slight contamination of the corresponding light gases can be harmful Changes in the process lead. For example, in conveying the light gas tritium in nuclear fusion experiments, even a slight contamination is harmful.
The object of the invention is to provide a pumping station for pumping light gases, with which a contamination of the light gases is realized while simultaneously achieving high pumping speeds at low inlet pressures. In particular, it is an object of the invention to provide a pumping station for pumping light gases, with which in a chamber to be evacuated pressures of less than 100mbar can be achieved. In particular, it is an object of the invention to achieve a sufficient pumping speed at inlet pressures of 100 to 0.1 mbar.
The object is achieved by the features of a pumping station according to claim 1 and the use of a pumping station according to claim 9. The pumping station according to the invention for pumping light gases has a first dry-compressing pump. An inlet of the first pump is preferably connected directly to a chamber or a recipient to be evacuated. With the first dry-compressing pump, ie in particular an outlet to the first dry-compressing pump, a second dry-compressing pump, in particular directly connected. In dry compressing pumps are in particular screw or Roots pumps, the required tightness of these pumps is not realized by oil or the like, but due to a high precision manufacturing. In order to be able to achieve low process pressures of, in particular, less than 100 mbar in the chamber or recipient to be evacuated, and additionally to avoid contaminating the pumped light gases with purge gas or oil-sealed pumps, the dry-compressing pumps are hermetically sealed from the environment. A hermetic Sealing is defined here as a spatial separation of the gas mixture within the vacuum pump from that outside the vacuum pump. Gaskets prevent ambient gases from pumping the gaseous mixture into a kind of impurities that significantly affect the application.

Erfindungsgemäß ist es somit wesentlich, dass trockene, spaltdichtende Vakuumpumpen verwendet werden. Die Dichtung derartiger Pumpen erfolgt ohne Öl oder reibende/ gleitende Dichtungen. Insbesondere handelt es sich bei den Vakuumpumpen um Schraubenpumpen. Durch die Verwendung derartiger Pumpen ist es vermieden, dass Bestandteile des Schmiermittel oder der Dichtung in das geförderte Gas gelangen.According to the invention, it is therefore essential that dry, gap-sealing vacuum pumps are used. The seal of such pumps is made without oil or rubbing / sliding seals. In particular, the vacuum pumps are screw pumps. By using such pumps, it is avoided that components of the lubricant or the seal get into the pumped gas.

Bei einer besonders bevorzugten Ausführungsform ist parallel zu der ersten trockenverdichtenden Pumpe eine weitere, dritte trockenverdichtende Pumpe angeordnet. Diese ist ebenfalls mit der zu evakuierenden Kammer bzw. dem Rezipienten verbunden. Vorzugsweise sind die beiden zueinander parallel angeordneten trockenverdichtenden Schraubenpumpen sodann gemeinsam mit der zweiten nachgeordneten trockenverdichtenden Schraubenpumpe verbunden. Vorzugsweise sind die beiden Auslässe der ersten und dritten trockenverdichtenden Pumpe zusammengeführt und gemeinsam mit dem Einlass der zweiten trockenverdichtenden Schraubenpumpe verbunden. Durch eine derartige Anordnung von drei trockenverdichtenden Schraubenpumpen ist es möglich das Gesamtsaugvermögen bei niedrigeren Drücken kleiner 100bar weiter zu steigern.In a particularly preferred embodiment, a further, third dry-compressing pump is arranged parallel to the first dry-compressing pump. This is also connected to the evacuated chamber or the recipient. Preferably, the two dry-compressing screw pumps arranged parallel to one another are then connected together to the second downstream dry-compressing screw pump. Preferably, the two outlets of the first and third dry compressing pumps are brought together and connected in common with the inlet of the second dry compressing screw pump. Such an arrangement of three dry-compressing screw pumps makes it possible to further increase the total absorbency at lower pressures of less than 100 bar.

Bei einer alternativen Ausführungsform sind drei trockenverdichtenden Pumpen in Reihe hintereinander angeordnet, sodass die zweite trockenverdichtende Pumpe unmittelbar mit einer weiteren trockenverdichtenden Pumpe verbunden ist. Hierdurch können in dem Rezipienten auch ohne Einsatz ölgedichteter Pumpen sowie auch ohne den Einsatz von Purgegas hohe Saugvermögen bei niedrigen Drücken kleiner 100mbar insbesondere für Wasserstoff und Wasserstoff-Isotope realisiert werden.
Selbstverständlich ist es auch möglich, zwei trockenverdichtende Pumpen parallel zu schalten und sodann in Pumprichtung in Reihe zwei weitere trockenverdichtende Pumpen vorzusehen. Bei einer derartigen Anordnung von insgesamt vier trockenverdichtenden Pumpen können sehr große Saugvermögen bei niedrigen Drücken kleiner 100mbar insbesondere für Wasserstoff und Wasserstoff-Isotope realisiert werden.In an alternative embodiment, three dry compressing pumps are arranged in series one behind the other so that the second dry compacting pump is directly connected to another dry compacting pump. As a result, in the recipient even without the use of oil-sealed pumps and without the use of purge high suction at low pressures smaller 100mbar can be realized in particular for hydrogen and hydrogen isotopes.
Of course, it is also possible to connect two dry-compressing pumps in parallel and then to provide in the pumping direction in series two more dry-compressing pumps. With such an arrangement of a total of four dry-compressing pumps, very high pumping speeds can be realized at low pressures of less than 100 mbar, in particular for hydrogen and hydrogen isotopes.

Zur weiteren Verringerung der erzielbaren Drücke in dem Rezipienten ist mit der in Pumprichtung letzten trockenverdichtenden Pumpe, d.h. je nach Ausführungsform der zweiten oder vierten vorgesehenen trockenverdichtenden Pumpe, eine gegen Atmosphäre pumpende Vorvakuumpumpe vorgesehen. Bei der Vorvakuumpumpe handelt es sich um eine trockene Verdrängervakuumpumpe, vom Typ Roots-Klauen-, Kolben- und/oder Schraubenpumpe. Die Vorvakuumpumpe ist erfindungsgemäß als trockenverdichtende Pumpe ausgebildet, um ein Verunreinigen der zu pumpenden leichten Gase zu vermeiden.
Insbesondere durch das erfindungsgemäße Vorsehen ausschließlich trockenverdichtender Pumpen und aufgrund des Verzichts auf den Einsatz von Purgegas, ist es aufgrund des Einsatzes von gegenüber der Umgebung hermetisch dichten Pumpen möglich, leichte Gase mit hoher Effizienz zur Erzielung niedriger Prozessdrücke in dem Rezipienten zu pumpen. Da das Gas nicht verunreinigt wird, ist ein aufwendiges Reinigen vermieden, sodass es insbesondere möglich ist, das gepumpte Gas bspw. in einem Kreislaufsystem wiederzuverwenden.
Je nach Ausführungsform ist es bevorzugt, dass die erste und/oder die dritte Pumpe unmittelbar mit der zu evakuierenden Kammer bzw. dem Rezipienten verbunden ist. Desweiteren ist es je nach Ausführungsform bevorzugt, dass die zweite Pumpe unmittelbar mit der ersten und/oder dritten Pumpe verbunden ist. Desweiteren ist es bevorzugt, dass sämtliche eingesetzten trockenverdichtenden Pumpen als Schraubenpumpen ausgebildet sind.To further reduce the achievable pressures in the recipient is provided with the last in the pumping direction dry-compressing pump, that is, depending on the embodiment of the second or fourth provided dry-compressing pump, a pumping against atmosphere backing pump. The backing pump is a dry displacement vacuum pump of the Roots claw, piston and / or screw type. The backing pump according to the invention is designed as a dry-compressing pump in order to avoid contamination of the light gases to be pumped.
In particular, by providing only dry-compressing pumps according to the invention and dispensing with the use of purge gas, it is possible to pump light gases with high efficiency to achieve low process pressures in the recipient due to the use of hermetically sealed pumps. Since the gas is not contaminated, a complex cleaning is avoided, so that it is particularly possible to reuse the pumped gas, for example, in a circulatory system.
Depending on the embodiment, it is preferred that the first and / or the third pump is connected directly to the chamber or the recipient to be evacuated. Furthermore, it is preferable depending on the embodiment that the second pump is directly connected to the first and / or third pump. Furthermore, it is preferred that all dry-compressing pumps used are designed as screw pumps.

Besonders bevorzugt ist es, dass der gesamte Pumpstand ein nach außen hermetisch dichtes System bildet.It is particularly preferred that the entire pumping station form a hermetically sealed system to the outside.

Mit Hilfe des erfindungsgemäßen Pumpstandes ist es auf sehr effiziente Weise möglich, leichte Gase zu pumpen, wobei hierbei ein Verunreinigen der Gase vermieden ist. Bei den leichten Gasen handelt es sich insbesondere um Wasserstoff, Wasserstoffisotope, Deuterium, Tritium, Helium, Heliumisotope oder Gemische hiervon.With the help of the pumping station according to the invention, it is possible in a very efficient manner to pump light gases, in which case contamination of the gases is avoided. The light gases are in particular hydrogen, hydrogen isotopes, deuterium, tritium, helium, helium isotopes or mixtures thereof.

Der erfindungsgemäße Pumpstand zum Pumpen leichter Gase ist insbesondere zum Verdichten leichter Gase von Feinvakuum, d.h. von ca. 0,01 mbar auf Umgebungsdruck von ca. 1 bar bei vollem effektivem Saugvermögen möglich.The pumping station according to the invention for pumping light gases is particularly suitable for compacting light gases of fine vacuum, i. from approx. 0.01 mbar to ambient pressure of approx. 1 bar with full effective pumping speed.

Des Weiteren betrifft die Erfindung die Verwendung eines Pumpstandes mit zumindest zwei trocken verdichtenden Pumpen, die gegenüber der Umgebung hermetisch dicht sind, um leichte Gase zu pumpen. Der verwendete Pumpenstand ist wie vorstehend beschrieben vorteilhaft weitergebildet und pumpt insbesondere die vorstehend aufgeführten leichten Gase.Furthermore, the invention relates to the use of a pumping station with at least two dry-compressing pumps which are hermetically sealed to the environment in order to pump light gases. The pumping station used is advantageously developed as described above and in particular pumps the light gases listed above.

Nachfolgend wird die Erfindung anhand unterschiedlicher Ausführungsformen unter Bezugnahme auf die Zeichnungen näher erläutert.The invention will be explained in more detail with reference to different embodiments with reference to the drawings.

Es zeigen:

Fig. 1 bis 3
unterschiedliche schematische Darstellungen erfindungsgemäßer Pumpstände.
Show it:
Fig. 1 to 3
different schematic representations of inventive pumping stations.

Gemäß einer ersten bevorzugten Ausführungsform ist eine zu evakuierende Kammer bzw. ein Rezipient 10, insbesondere unmittelbar mit dem Einlass einer als Schraubenpumpe ausgebildeten ersten trockenverdichtenden Pumpe 12 verbunden. Der Auslass der Schraubenpumpe 12 ist mit dem Einlass einer zweiten im dargestellten Ausführungsbeispiel ebenfalls als Schraubenpumpe 14 ausgebildeten trockenverdichtenden Pumpe verbunden. Der Auslass der zweiten trockenverdichtenden Pumpe 14 kann mit weiteren Elementen der Anlage oder über eine Leitung 16 mit einer nicht dargestellten Vorvakuumpumpe verbunden sein. Die beiden im ersten Ausführungsbeispiel vorgesehenen trockenverdichtenden Schraubenpumpen sind der jeweils als gegenüber der Umgebung hermetisch dichte Pumpen ausgebildet.According to a first preferred embodiment, a chamber or a recipient 10 to be evacuated is in particular connected directly to the inlet of a first dry-compressing pump 12 designed as a screw pump. The outlet of the screw pump 12 is connected to the inlet of a second in the illustrated embodiment, also designed as a screw pump 14 dry compressing pump. The outlet of the second dry compressing pump 14 may be connected to other elements of the plant or via a line 16 to a backing pump, not shown. The two dry-compressing screw pumps provided in the first exemplary embodiment are each designed as hermetically sealed pumps relative to the environment.

Bei einer Weiterbildung der in Fig. 1 dargestellten Ausführungsform gemäß Fig. 2 ist parallel zu der ersten trockenverdichtenden Schraubenpumpe 12 eine dritte trockenverdichtenden Schraubenpumpe 18 vorgesehen. Die trockenverdichtende Schraubenpumpe 18 ist unmittelbar mit dem Rezipienten 10 verbunden. Die beiden Auslässe der Schraubenpumpen 12,18 sind zusammengeführt und sodann gemeinsam mit dem Einlass der Schraubenpumpe 14 verbunden. Der Auslass der Schraubenpumpe 14 ist an einer Leitung 16 mit der Atmosphäre oder einer nicht dargestellten Vorvakuumpumpe verbunden.In a further education of in Fig. 1 illustrated embodiment according to Fig. 2 a third dry-compressing screw pump 18 is provided parallel to the first dry-compressing screw pump 12. The dry compressing screw pump 18 is directly connected to the recipient 10. The two outlets of the screw pumps 12, 18 are brought together and then connected together to the inlet of the screw pump 14. The outlet of the screw pump 14 is connected to a line 16 with the atmosphere or a backing pump, not shown.

Eine weitere bevorzugte Ausführungsform der Erfindung gemäß Fig. 3 ist eine Kombination der in den Figuren 1 und 2 dargestellten Ausführungsformen. Gemäß dieser Ausführungsform ist der Rezipient 10 unmittelbar mit den beiden parallel zueinander angeordneten Schraubenpumpen 12,18 verbunden. Die Auslässe der beiden Schraubenpumpen 12,18 sind zusammengeführt und gemeinsam mit Einlass der Schraubenpumpe 14 verbunden. Mit dem Auslass der Schraubenpumpe 14 ist eine weitere vierte trockenverdichtende Pumpe 20, bei der es sich vorzugsweise ebenfalls um eine Schraubenpumpe handelt, verbunden. Der Auslass der vierten Schraubenpumpe 20 ist im dargestellten Ausführungsbeispiel über eine Leitung 16 mit einer Vorvakuumpumpe 22 verbunden, die sodann gegen Atmosphäre pumpt.A further preferred embodiment of the invention according to Fig. 3 is a combination of the in the Figures 1 and 2 illustrated embodiments. According to this embodiment, the recipient 10 is connected directly to the two parallel screw pumps 12,18. The outlets of the two screw pumps 12, 18 are brought together and connected together with the inlet of the screw pump 14. With the outlet of the screw pump 14, another fourth dry-compressing pump 20, which is also preferably a screw pump, is connected. The outlet of the fourth screw pump 20 is shown in FIG Embodiment connected via a line 16 with a backing pump 22, which then pumps against the atmosphere.

In sämtlichen Ausführungsbeispielen sind als trockenverdichtende Pumpe, Schraubenpumpen vorgesehen, wobei diese stets gegenüber der Umgebung hermetisch dicht sind. Auch bei der Vorvakuumpumpe 22 handelt es sich um eine trockenverdichtende Pumpe, sodass die Verunreinigung des zu pumpenden leichten Gases vermieden ist.In all embodiments, screw pumps are provided as dry-compressing pump, which are always hermetically sealed to the environment. Also, the roughing pump 22 is a dry compressing pump, so that contamination of the light gas to be pumped is avoided.

Claims (10)

  1. A pumping unit for pumping light gases, in particular hydrogen, hydrogen isotopes, deuterium, tritium, helium, helium isotopes and/or mixtures thereof, comprising
    a first dry-compression pump (12) connected to the chamber (10) to be evacuated, and
    a second dry-compression pump (14) connected to said first dry-compression pump (12),
    wherein said dry-compression pumps (12, 14) are hermetically sealed towards the environment by realizing a spatial separation of the gas mixture inside the vacuum pumps from that outside the vacuum pumps and no purge gas supply being provided, and
    characterized in that
    said second dry-compression pump (14) or a further dry-compression pump (20) has connected thereto a fore-vacuum pump (22) in particular pumping against the atmosphere, wherein said fore-vacuum pump (22) is a Roots, claw or screw pump.
  2. The pumping unit according to claim 1, characterized in that in parallel to the first dry-compression pump (12) a third dry-compression pump (18) is arranged which is connected to the chamber (10) to be evacuated.
  3. The pumping unit according to claim 2, characterized in that the first and the third dry-compression pump (12, 18) are commonly connected to the second dry-compression pump (14).
  4. The pumping unit according to any one of claims 1-3, characterized by the further dry-compression pump (20) which is in particular directly connected to the second dry-compression pump (14).
  5. The pumping unit according to any one of claims 1-4, characterized in that the first and/or the third dry-compression pump (12, 18) are directly connected to the chamber (10) to be evacuated.
  6. The pumping unit according to any one of claims 1-5, characterized in that the second dry-compression pump (14) is directly connected to the first and/or the third dry-compression pump (12, 18).
  7. The pumping unit according to any one of claims 1-6, characterized in that the first and/or the second and/or the third and/or the further dry-compression pump are configured as screw pumps.
  8. The pumping unit according to any one of claims 1-7, characterized in that the overall pumping unit is configured as a system hermetically sealed towards the outside.
  9. A use of a pumping unit according to any one of claims 1-8 for delivering light gases, in particular hydrogen, hydrogen isotopes, deuterium, tritium, helium, helium isotopes and/or mixtures thereof, from a chamber (10) to be evacuated without supplying any purge gases.
  10. The use according to claim 9, wherein exclusively gas from the chamber to be evacuated is delivered by the vacuum pumps of the pumping unit.
EP13805822.7A 2012-12-22 2013-12-06 Pumping unit for pumping light gases, and use of the pumping unit Active EP2935887B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202012012359.9U DE202012012359U1 (en) 2012-12-22 2012-12-22 Pumping station for pumping light gases
PCT/EP2013/075835 WO2014095432A1 (en) 2012-12-22 2013-12-06 Pumping unit for pumping light gases, and use of the pumping unit

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Publication Number Publication Date
EP2935887A1 EP2935887A1 (en) 2015-10-28
EP2935887B1 true EP2935887B1 (en) 2018-10-10

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EP (1) EP2935887B1 (en)
CN (1) CN104870815A (en)
DE (1) DE202012012359U1 (en)
TW (1) TW201433702A (en)
WO (1) WO2014095432A1 (en)

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CN105422454B (en) * 2015-12-09 2017-12-19 攀枝花钢城集团瑞钢工业有限公司 Vacuum-pumping system and vacuum suction method
WO2018220943A1 (en) * 2017-05-30 2018-12-06 株式会社アルバック Vacuum pump
FR3097599B1 (en) * 2019-06-18 2021-06-25 Pfeiffer Vacuum Dry-type primary vacuum pump and method of controlling the injection of a purge gas
EP4224015A1 (en) * 2022-02-07 2023-08-09 Siemens Energy Global GmbH & Co. KG Hydrogen compressors

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Publication number Publication date
EP2935887A1 (en) 2015-10-28
DE202012012359U1 (en) 2014-03-24
TW201433702A (en) 2014-09-01
WO2014095432A1 (en) 2014-06-26
CN104870815A (en) 2015-08-26

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