EP2930232B1 - Verfahren zur reinigung von technischen anlagenteilen von metallhalogeniden - Google Patents
Verfahren zur reinigung von technischen anlagenteilen von metallhalogeniden Download PDFInfo
- Publication number
- EP2930232B1 EP2930232B1 EP15162053.1A EP15162053A EP2930232B1 EP 2930232 B1 EP2930232 B1 EP 2930232B1 EP 15162053 A EP15162053 A EP 15162053A EP 2930232 B1 EP2930232 B1 EP 2930232B1
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- EP
- European Patent Office
- Prior art keywords
- method comprises
- plant components
- nitriles
- metal halides
- halides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5013—Organic solvents containing nitrogen
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
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- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3209—Amines or imines with one to four nitrogen atoms; Quaternized amines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5009—Organic solvents containing phosphorus, sulfur or silicon, e.g. dimethylsulfoxide
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/20—Industrial or commercial equipment, e.g. reactors, tubes or engines
Definitions
- the invention relates to a method for the purification of technical system parts of metal halides, organometallic halides and silanes with a nitrile.
- Acetonitrile is described as a solvent for aluminum chloride [ Journal of inorganic and general chemistry. Weinheim: Wiley-VCH, ISSN 0372-7874 Vol. 511 (4, 1984), p. 148 ].
- US3519458A teaches that fluxes containing inorganic chlorides can be removed from iron surfaces by blends of alkylamine and organic solvents such as butyl diglycol ether.
- the invention relates to a process for the purification of technical plant parts of impurities selected from metal halides, organometallic halides and silanes and mixtures thereof, in which the plant parts are treated with a liquid nitrile or with a solution of a nitrile in an aprotic solvent.
- the impurities in particular the metal halides form deposits in the system parts.
- the impurities can easily be dissolved out of the technical components with nitriles.
- the linings in the pipes are opened or dissolved and washed out. After cleaning the system parts, they are dried again and put into operation. The residues of the cleaning can be simply rinsed off and professionally e.g. be disposed of by incineration.
- the impurities are in particular metal halides which are hydrolyzed with water to form acids and organometallic halides, in particular organometallic chlorides.
- organometallic chlorides and chlorides of iron such as FeCl 2 , FeCl 3 , cobalt, nickel, chromium, titanium, copper, tin, zinc and preferably AlR x Cl 3-x , where R is an organo or organosilane function, in particular methyl and x Values 0, 1 or 2, in particular AlCl 3 .
- the nitriles used are preferably the nitriles of monocarboxylic or polycarboxylic acids, which preferably contain 2 to 20 carbon atoms, in particular 5 to 12 carbon atoms.
- nitriles of the aliphatic, saturated monocarboxylic acids such as acetic, propionic, butyric, valeric and caproic acids and the fatty acids having up to 18 carbon atoms.
- dinitriles of aliphatic, saturated dicarboxylic acids such as malonic, succinic, glutaric, adipic, pimelinic and suberic.
- Adipodinitrile is an important intermediate for the production of polyamides and therefore easily and inexpensively available.
- solvents or solvent mixtures having a boiling point or boiling range of up to 120 ° C. at 1013 hPa.
- solvents such as dioxane, tetrahydrofuran, diethyl ether, di-isopropyl ether, diethylene glycol dimethyl ether; chlorinated hydrocarbons, such as dichloromethane, trichloromethane, carbon tetrachloride, 1,2-dichloroethane, trichlorethylene; Hydrocarbons, such as pentane, n-hexane, hexane isomer mixtures, heptane, octane, benzine, petroleum ether, benzene, toluene, xylenes; Siloxanes, in particular linear dimethylpolysiloxanes having trimethylsilyl end groups with preferably 0 to 6 dimethyl
- the concentration of the nitriles in the aprotic solvents is preferably at least 1 g / l, particularly preferably at least 5 g / l, in particular at least 10 g / l.
- the process is preferably carried out at a temperature of 0 ° C to 100 ° C, especially from 15 ° C to 30 ° C.
- the process is preferably carried out at a pressure of 500 hPa to 2000 hPa, in particular from 900 hPa to 1200 hPa.
- plant parts are cleaned in which silanes, selected from methylchlorosilanes and chlorosilanes are processed. From these parts of the plant AlR x Cl 3-x , in particular AlCl 3 is removed with high-boiling organochlorosilanes.
- Acetonitrile is less suitable for these plant components because acetonitrile has a boiling point of 82 ° C at 1013 hPa, and thus a noticeable vapor pressure at room temperature. High vapor pressure makes it difficult to use acetonitrile in pipeline cleaning since acetonitrile is flammable.
- acetonitrile must not be introduced into silane mixtures of the distillation since the boiling point is very close to chlorosilanes or methylchlorosilanes and then itself would become contaminated.
- Plant components are nitriles used alone or together with aprotic solvents having a boiling point of at least 120 ° C at 1013 hPa. Particularly preferred is adiponitrile.
- plant components are pipelines, stirred tanks, tubular reactors, distillation columns and their internals and packings, thin-film evaporators, falling-film evaporators, short-path distillations including their internals such as, for example, Wipers in thin-film evaporators, but also heat exchangers and containers, such as tanks and pistons.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Detergent Compositions (AREA)
Description
- Die Erfindung betrifft ein Verfahren zur Reinigung von technischen Anlagenteilen von Metallhalogeniden, Organometallhalogeniden und Silanen mit einem Nitril.
- Viele industrielle Rohprodukte und Mischungen, wie die Methylchlorsilane und Chlorsilane enthaltenden Mischungen aus der Direktsynthese (Müller-Rochow-Synthese) oder die Chlorsilanmischungen aus der Hydrochlorierung von metallurgischem Silizium können Metallhalogenide, Organometallhalogenide und Silane, insbesondere AlCl3 enthalten. Die Silane in den Rohsilanen werden mittels Destillation in mehreren Stufen in Reinsilane getrennt. Diese Verunreinigungen der Rohsilane setzen sich in den Rohrleitungen ab und führen zu Problemen bis hin zu Verstopfung der Leitungen. Daher müssen die Leitungen in regelmäßigen Zeitabständen demontiert und z.B. mit Wasser gereinigt werden. Die genannte Reinigungsmethode hat zwei Nachteile: Erster Nachteil ist der Aufwand. Demontage-Reinigung-Montage von Leitungen nimmt viel Zeit in Anspruch und ist kostenintensiv. Zweiter Nachteil der Reinigung mit Wasser, ist die Bildung von Salzsäure durch Hydrolyse von Chlorsilanresten und Metallchloriden und/oder Organometallhalogeniden und/oder Mischungen aus Metallhalogeniden/Organometallhalogeniden, welche die Rohrleitungen angreift.
- Acetonitril wird als Lösungsmittel für Aluminiumchlorid beschrieben [Zeitschrift für anorganische und allgemeine Chemie. Weinheim : Wiley-VCH, ISSN 0372-7874 Vol. 511 (4. 1984), S. 148].
-
US4221674A beschreibt den Einsatz von organischen Nitrilen im Gemisch mit organischem Lösungsmittel bei der Reinigung metallischer Oberflächen zur Entfernung polymerer organischer Verbindungen -
US3519458A lehrt, dass Flussmittel, die anorganische Chloride enthalten, von Eisenoberflächen entfernt werden können durch Gemische aus Alkylamin und organischem Lösungsmittel, wie Butyldiglykolether. - Gegenstand der Erfindung ist ein Verfahren zur Reinigung von technischen Anlagenteilen von Verunreinigungen, die ausgewählt werden aus Metallhalogeniden, Organometallhalogeniden und Silanen und Mischungen davon, bei dem die Anlagenteile mit einem flüssigen Nitril oder mit einer Lösung eines Nitrils in einem aprotischen Lösungsmittel behandelt werden.
- Die Verunreinigungen, insbesondere die Metallhalogenide bilden Beläge in den Anlagenteilen. Die Verunreinigungen lassen sich mit Nitrilen leicht aus den technischen Anlagenteilen herauslösen. Die Beläge in den Leitungen werden an- oder aufgelöst und ausgewaschen. Nach der Reinigung der Anlagenteile werden diese wieder getrocknet und in Betrieb genommen. Die Rückstände der Reinigung können einfach ausgespült und fachgerecht z.B. durch Verbrennung entsorgt werden.
- Durch Reinigung von Anlagenteilen mit Nitrilen werden die zeit- und kostenintensive Demontage und Reinigung mit Wasser eingespart. Da die Leitungen nicht mehr mit saurem Wasser in Kontakt kommen, wird die Lebensdauer der Anlagenteile verlängert.
- Die Verunreinigungen sind insbesondere mit Wasser zu Säuren hydrolysierende Metallhalogenide und Organometallhalogenide, insbesondere Organometallchloride. Beispiele sind Organometallchloride und Chloride von Eisen, wie FeCl2, FeCl3, Kobalt, Nickel, Chrom, Titan, Kupfer, Zinn, Zink und bevorzugt AlRxCl3-x, wobei R eine Organo- oder Organosilanfunktion, insbesondere Methyl und x die Werte 0, 1 oder 2 bedeuten, insbesondere AlCl3.
- Als Nitrile werden vorzugsweise eingesetzt die Nitrile von Mono- oder Polycarbonsäuren, die vorzugsweise 2 bis 20 Kohlenstoffatome, insbesondere 5 bis 12 Kohlenstoffatome enthalten.
- Bevorzugt sind die Nitrile der aliphatischen, gesättigten Monocarbonsäuren, wie Essig-, Propion-, Butter-, Valerian- und Capronsäure und der Fettsäuren mit bis zu 18 Kohlenstoffatomen.
- Bevorzugt sind auch die Dinitrile der aliphatischen, gesättigten Dicarbonsäuren, wie Malon-, Bernstein-, Glutar-, Adipin-, Pimelin- und Suberinsäure.
- Bevorzugt sind Nitrile mit einem Siedepunkt von mindestens 120°C bei 1013 hPa, insbesondere mindestens 150°C bei 1013 hPa.
- Insbesondere bevorzugt ist Adipodinitril, welches bei 295°C bei 1013 hPa siedet und aufgrund seiner zwei Nitrilgruppen im Molekül eine starke komplexierende Wirkung auf Metallionen aufweist. Adipodinitril ist ein wichtiges Intermediate zur Herstellung von Polyamiden und daher leicht und kostengünstig verfügbar.
- Falls Lösungen von Nitrilen in aprotischen Lösungsmitteln verwendet werden, sind Lösungsmittel oder Lösungsmittelgemische mit einem Siedepunkt bzw. Siedebereich von bis zu 120°C bei 1013 hPa bevorzugt. Beispiele für solche Lösungsmittel sind Ether, wie Dioxan, Tetrahydrofuran, Diethylether, Di-isopropylether, Diethylenglycoldimethylether; chlorierte Kohlenwasserstoffe, wie Dichlormethan, Trichlormethan, Tetrachlormethan, 1,2-Dichlorethan, Trichlorethylen; Kohlenwasserstoffe, wie Pentan, n-Hexan, Hexan-Isomerengemische, Heptan, Oktan, Waschbenzin, Petrolether, Benzol, Toluol, Xylole; Siloxane, insbesondere lineare Dimethylpolysiloxane mit Trimethylsilylendgruppen mit bevorzugt 0 bis 6 Dimethylsiloxaneinheiten, oder cyclische Dimethylpolysiloxane mit bevorzugt 4 bis 7 Dimethylsiloxaneinheiten, beispielsweise Hexamethyldisiloxan, Octamethyltrisiloxan, Octamethylcyclotetrasiloxan und Decamethylcyclopentasiloxan;
Ketone, wie Aceton, Methylethylketon, Di-isopropylketon, Methyl-isobutylketon (MIBK); Ester, wie Ethylacetat, Butylacetat, Propylpropionat, Ethylbutyrat, Ethyl-isobutyrat; Schwefelkohlenstoff und Nitrobenzol, oder Gemische dieser Lösungsmittel. - Die Konzentration der Nitrile in den aprotischen Lösungsmitteln beträgt vorzugsweise mindestens 1 g/l, besonders bevorzugt mindestens 5 g/l, insbesondere mindestens 10 g/l.
- Das Verfahren wird vorzugsweise bei einer Temperatur von 0°C bis 100°C, insbesondere von 15°C bis 30°C durchgeführt.
- Das Verfahren wird vorzugsweise bei einem Druck von 500 hPa bis 2000 hPa, insbesondere von 900 hPa bis 1200 hPa durchgeführt.
- In einer besonderen Ausführungsform werden Anlagenteile gereinigt, in welchen Silane, ausgewählt aus Methylchlorsilanen und Chlorsilanen verarbeitet werden. Aus diesen Anlagenteilen wird AlRxCl3-x, insbesondere AlCl3 mit hochsiedenden Organochlorosilanen entfernt. Für diese Anlagenteile ist Acetonitril weniger geeignet, denn Acetonitril hat einen Siedepunkt von 82°C bei 1013 hPa, und damit einen merklichen Dampfdruck bei Raumtemperatur. Hoher Dampfdruck erschwert die Verwendung von Acetonitril in der Reinigung von Rohrleitungen, da Acetonitril brennbar ist. Acetonitril darf auch nicht in Silangemische der Destillation eingeschleppt werden, da der Siedepunkt sehr nah bei Chlorsilanen oder Methylchlorsilanen liegt und dann selbst zur Verunreinigung würde. Für diese Anlagenteile werden Nitrile alleine oder zusammen mit aprotischen Lösungsmitteln mit einem Siedepunkt von mindestens 120°C bei 1013 hPa eingesetzt. Insbesondere bevorzugt ist Adipodinitril.
- Beispiele für Anlagenteile sind Rohrleitungen, Rührkessel, Rohrreaktoren, Destillationskolonnen und deren Einbauten und Packungen, Dünnschichtverdampfer, Fallfilmverdampfer, Kurzwegdestillationen inklusive deren Einbauten wie z.B. Wischer in Dünnschichtverdampfern, aber auch Wärmetauscher und Behälter, wie Tanks und Kolben.
Claims (7)
- Verfahren zur Reinigung von technischen Anlagenteilen von Verunreinigungen, die ausgewählt werden aus Metallhalogeniden, Organometallhalogeniden und Silanen und Mischungen davon, bei dem die Anlagenteile mit einem flüssigen Nitril oder mit einer Lösung eines Nitrils in einem aprotischen Lösungsmittel behandelt werden.
- Verfahren nach Anspruch 1, bei dem die Metallhalogenide und Organometallhalogenide ausgewählt werden aus Organometallchloriden und Chloriden von Eisen, Kobalt, Nickel, Chrom, Titan, Kupfer, Zinn, Zink und Al.
- Verfahren nach einem oder mehreren der vorangehenden Ansprüche, bei dem die Nitrile von Mono- oder Polycarbonsäuren mit 2 bis 20 Kohlenstoffatomen eingesetzt werden.
- Verfahren nach einem oder mehreren der vorangehenden Ansprüche, bei dem eine Lösung von Nitrilen in einem aprotischen Lösungsmittel eingesetzt wird, das ausgewählt wird aus Ethern, chlorierten Kohlenwasserstoffen, Kohlenwasserstoffen, Siloxanen, Ketonen, Estern, Schwefelkohlenstoff und Nitrobenzol und Gemischen dieser Lösungsmittel.
- Verfahren nach einem oder mehreren der vorangehenden Ansprüche, bei dem Anlagenteile gereinigt werden, in welchen Silane, ausgewählt aus Methylchlorsilanen und Chlorsilanen verarbeitet werden, wobei AlCl3 entfernt wird und Nitrile und gegebenenfalls aprotische Lösungsmittel mit einem Siedepunkt von mindestens 120°C bei 1013 hPa eingesetzt werden.
- Verfahren nach einem oder mehreren der vorangehenden Ansprüche, bei dem Adipodinitril eingesetzt wird.
- Verfahren nach einem der oder mehreren vorangehenden Ansprüche, bei dem die Anlagenteile ausgewählt werden aus Rohrleitungen, Rührkesseln, Rohrreaktoren, Destillationskolonnen und deren Einbauten und Packungen, Dünnschichtverdampfern, Fallfilmverdampfern, Kurzwegdestillationen inklusive deren Einbauten, Wärmetauschern und Behältern.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014206875.4A DE102014206875A1 (de) | 2014-04-09 | 2014-04-09 | Verfahren zur Reinigung von technischen Anlagenteilen von Metallhalogeniden |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP2930232A1 EP2930232A1 (de) | 2015-10-14 |
| EP2930232B1 true EP2930232B1 (de) | 2017-12-06 |
Family
ID=53039688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP15162053.1A Active EP2930232B1 (de) | 2014-04-09 | 2015-03-31 | Verfahren zur reinigung von technischen anlagenteilen von metallhalogeniden |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9994802B2 (de) |
| EP (1) | EP2930232B1 (de) |
| JP (1) | JP6121472B2 (de) |
| KR (1) | KR101882054B1 (de) |
| CN (1) | CN104971918B (de) |
| DE (1) | DE102014206875A1 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016206090A1 (de) * | 2016-04-12 | 2017-10-12 | Wacker Chemie Ag | Verfahren zur Abtrennung von Aluminiumchlorid aus Silanen |
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|---|---|---|---|---|
| BE523301A (de) | 1952-10-29 | 1953-10-31 | ||
| BE527039A (de) | 1953-03-25 | |||
| US3007956A (en) | 1960-07-01 | 1961-11-07 | Gen Electric | Process for separating organosilanes |
| US3519458A (en) * | 1966-03-01 | 1970-07-07 | Hooker Chemical Corp | Method for reducing the corrosion susceptibility of ferrous metal having fluxing agent residue |
| US3766241A (en) * | 1971-05-26 | 1973-10-16 | Du Pont | Removal of metal cations from solution in nitriles |
| US4221674A (en) * | 1979-03-09 | 1980-09-09 | Allied Chemical Corporation | Organic sulfonic acid stripping composition and method with nitrile and fluoride metal corrosion inhibitor system |
| FR2552434B1 (fr) | 1983-09-28 | 1985-10-25 | Rhone Poulenc Spec Chim | Procede de fabrication de silane a partir de methyldichlorosilane et de chlorosilanes |
| JPH0631271B2 (ja) | 1986-03-31 | 1994-04-27 | 徳山曹達株式会社 | アリ−ルジハロシランの製造方法 |
| US4757154A (en) | 1986-11-04 | 1988-07-12 | Ethyl Corporation | Preparation of silane and amine alanes |
| JPH0635466B2 (ja) | 1988-09-28 | 1994-05-11 | 信越化学工業株式会社 | ジオルガノハロゲノシランの製造方法 |
| US4927616A (en) | 1989-10-02 | 1990-05-22 | Ethyl Corporation | Preparation of silane and amine alanes |
| JP3131868B2 (ja) | 1995-04-20 | 2001-02-05 | 信越化学工業株式会社 | オルガノシラン類の製造方法 |
| US5493042A (en) * | 1995-06-15 | 1996-02-20 | Dow Corning Corporation | Process for removing silanes from by-product stream |
| US5545743A (en) | 1995-11-02 | 1996-08-13 | Dow Corning Corporation | Process for heat-fractionation of organosilanes |
| JPH1087670A (ja) | 1996-09-18 | 1998-04-07 | Chisso Corp | スチリルシランの製造方法 |
| AT409629B (de) * | 2000-09-14 | 2002-09-25 | Dsm Fine Chem Austria Gmbh | Waschverfahren zur reinigung von n-bzw. amino- oder ammoniumgruppen haltigen polymeren |
| TW486392B (en) * | 2000-09-29 | 2002-05-11 | Air Prod & Chem | Solvent blend for use in high purity precursor removal |
| US7018937B2 (en) * | 2002-08-29 | 2006-03-28 | Micron Technology, Inc. | Compositions for removal of processing byproducts and method for using same |
| US20040261823A1 (en) | 2003-06-27 | 2004-12-30 | Lam Research Corporation | Method and apparatus for removing a target layer from a substrate using reactive gases |
| JP4442376B2 (ja) * | 2004-09-22 | 2010-03-31 | 東ソー株式会社 | レジスト除去用組成物 |
| JP2006258890A (ja) * | 2005-03-15 | 2006-09-28 | Tosoh Corp | 基板工程用レジスト剥離液 |
| DE602006009554D1 (de) | 2005-12-06 | 2009-11-12 | Dow Corning | Trennung von chlorsilanen |
| EP2428557A1 (de) | 2005-12-30 | 2012-03-14 | LAM Research Corporation | Reinigungslösung |
| DE102008001576A1 (de) * | 2008-05-06 | 2009-11-12 | Wacker Chemie Ag | Verfahren zur Hydrolyse von Metallsalzen mit Emulsionen |
| DE102008001577A1 (de) * | 2008-05-06 | 2009-11-12 | Wacker Chemie Ag | Verfahren zur Hydrolyse von festen Metallsalzen mit wässrigen Salzlösungen |
| US8685173B2 (en) | 2008-07-17 | 2014-04-01 | Delaval Holding Ab | Method of cleaning food and beverage manufacturing and handling equipment |
| DE102009027729A1 (de) * | 2009-07-15 | 2011-01-27 | Evonik Degussa Gmbh | Entfernung von Fremdmetallen aus anorganischen Silanen |
| US8128755B2 (en) | 2010-03-03 | 2012-03-06 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Cleaning solvent and cleaning method for metallic compound |
| FR2965567B1 (fr) | 2010-10-05 | 2013-12-27 | Arkema France | Composition de nettoyage de polymeres |
| CN103046055B (zh) | 2013-01-15 | 2015-11-04 | 四川理工学院 | 咪唑基赖氨酸盐离子液体作为钢铁缓蚀剂的应用 |
| US20150159122A1 (en) | 2013-12-09 | 2015-06-11 | General Electric Company | Cleaning solution and methods of cleaning a turbine engine |
-
2014
- 2014-04-09 DE DE102014206875.4A patent/DE102014206875A1/de not_active Withdrawn
-
2015
- 2015-03-12 KR KR1020150034262A patent/KR101882054B1/ko active Active
- 2015-03-25 US US14/667,847 patent/US9994802B2/en active Active
- 2015-03-27 CN CN201510139808.2A patent/CN104971918B/zh active Active
- 2015-03-31 EP EP15162053.1A patent/EP2930232B1/de active Active
- 2015-04-08 JP JP2015079119A patent/JP6121472B2/ja active Active
Non-Patent Citations (1)
| Title |
|---|
| None * |
Also Published As
| Publication number | Publication date |
|---|---|
| US20150291920A1 (en) | 2015-10-15 |
| EP2930232A1 (de) | 2015-10-14 |
| KR101882054B1 (ko) | 2018-07-25 |
| KR20150117207A (ko) | 2015-10-19 |
| JP2015213900A (ja) | 2015-12-03 |
| US9994802B2 (en) | 2018-06-12 |
| CN104971918A (zh) | 2015-10-14 |
| DE102014206875A1 (de) | 2015-10-15 |
| JP6121472B2 (ja) | 2017-04-26 |
| CN104971918B (zh) | 2018-03-13 |
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