EP2844878B1 - Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems - Google Patents

Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems Download PDF

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Publication number
EP2844878B1
EP2844878B1 EP13786477.3A EP13786477A EP2844878B1 EP 2844878 B1 EP2844878 B1 EP 2844878B1 EP 13786477 A EP13786477 A EP 13786477A EP 2844878 B1 EP2844878 B1 EP 2844878B1
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EP
European Patent Office
Prior art keywords
pump system
pressure
main pump
main
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP13786477.3A
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German (de)
English (en)
French (fr)
Other versions
EP2844878A1 (de
Inventor
Dirk Schiller
Daniel SCHNEIDENBACH
Thomas Dreifert
Magnus Janicki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
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Publication date
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Publication of EP2844878A1 publication Critical patent/EP2844878A1/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/21—Pressure difference
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/56—Number of pump/machine units in operation

Definitions

  • the invention relates to a vacuum pump system for evacuating a chamber or to keep a chamber at a predetermined negative pressure of in particular less than 10 mbar and a method for controlling such a vacuum pump system.
  • WO 2011/061429 A2 describes a vacuum pumping system for evacuating a chamber having a main pumping system connected to the chamber and an auxiliary pumping system connected to the outlet of the main pumping system, the auxiliary pumping system having a pumping system Having ejector.
  • the ejector is controlled in dependence on the detected electrical power of the main pump system and the detected gas pressure at the outlet of the main pump system.
  • the object of the invention is to increase the energy efficiency of a vacuum pump system for evacuating a chamber.
  • the object is achieved by a vacuum pump system according to claim 1 or a method for controlling a vacuum pump system according to claim 8.
  • the vacuum pump system according to the invention for evacuating a chamber or a recipient has a main pump system, which in particular is directly connected to the chamber.
  • the main pump system may have at least one, in particular a plurality of vacuum pumps.
  • the vacuum pumps provided in the main pump system are preferably screw vacuum pumps or roots pumps.
  • pumps with a high internal compression are used in the main pump system. Internal compression describes the ratio of the volume at the pump inlet prior to compression to the volume at the pump outlet after compression. High internal densities of 1:10, for example, make it possible to transport large volumes of gas. At the beginning of the evacuation such, a large volume in a short time promoting pumps are very well suited.
  • the auxiliary pump system according to the invention comprises an ejector.
  • Ejector pumps have the advantage, in particular during operation of the vacuum system in the end pressure range, that the remaining relatively small amounts of gas can be pumped through them with little energy requirement.
  • This has the significant advantage according to the invention that it is possible, by providing an ejector in the auxiliary pump system in the end pressure range, the speed of the at least one pump of the Reduce main pumping system. As a result, the energy consumption of this pump of the main pump system drops significantly. By providing an ejector in the auxiliary pump system thus energy efficiency can be significantly increased.
  • the ejector may be a liquid or a gas ejector.
  • a gas ejector pump may be advantageous when pumping gases, with a liquid ejector pump on the one hand having the advantage that the liquid can be separated from the pumped gas in a simple manner.
  • An essential advantage of the vacuum pump system according to the invention is that the pressure in the outlet region of the main pump system is reduced by providing the ejector pump. This results in a reduction in the pressure difference between the inlet and the outlet of the at least one pump of the main pump system, whereby the tightness of the pump is improved. In particular, this improves the tightness of the sealing gaps of the corresponding pump.
  • a pressure difference meter is provided which measures the pressure difference between the auxiliary pump system and the valve device. This makes it possible, when falling below a predetermined pressure difference, the auxiliary pump system completely or partially off. This is particularly advantageous at the beginning of an evacuation, since the auxiliary pump system is not yet required at this time and by switching off the auxiliary pump system, the power consumption of the entire system can be reduced. According to the invention it is thus preferred that the auxiliary pump system is switched on only when a certain pressure difference is exceeded, so that the energy efficiency can be further improved.
  • a pressure sensor is also preferable, in particular in the outlet region of the main pump system. This makes it possible, for example, upon reaching a limit pressure, which is in particular close to the planned final pressure, to reduce the speed of the at least one pump of the main pump system.
  • a limit pressure which is in particular close to the planned final pressure
  • the amount of gas to be delivered is relatively small. This has the consequence that the amount of gas from the at least one pump of the main pump system can be promoted even at low speed, especially since this amount of gas can be promoted by the ejector in a simple manner. The then possible lowering of the speed of the at least one pump of the main pump system leads to considerable energy savings. It is advantageous that no backflow of the pumped medium occurs even at low speeds.
  • a pressure sensor in the outlet region of the main pump system instead of providing a pressure sensor in the outlet region of the main pump system, it is also possible to provide a pressure sensor in the inlet region of the main pump system. This is particularly advantageous in combination with a switchable valve provided parallel to the ejector pump. When the valve is open, the pressure in the outlet area of the main pump system is reduced, so that the pressure measurement in this area has only a low significance. In this respect, it is preferable, when providing a switchable valve, to control the switching of the valve in response to the pressure in an inlet region of the main pump system or an inlet region of one of the pumps of the main pump system.
  • the invention relates to a method for controlling a pump system for evacuating a chamber.
  • a pump system has a main pumping system connected to the chamber.
  • An auxiliary pump system is connected to the outlet of the main pump system.
  • the vacuum pump system is preferably developed advantageously, but does not necessarily have to have an ejector pump for implementing the method according to the invention in the auxiliary pump system.
  • a pressure is determined in the outlet and / or inlet region of the main pump system. Based on the measured pressure then takes place a regulation of the speed of the at least one pump of the main pump system.
  • the pump system has a pressure sensor in the region of the outlet and / or in the region of the inlet.
  • the aid of the method according to the invention it is possible with the aid of the method according to the invention to increase the energy efficiency during operation of the vacuum pump system in the end pressure range. In the final pressure range only very small amounts of gas have to be conveyed, so that the speed of the at least one pump of the main pump system can be reduced.
  • the gas to be delivered is also conveyed by the auxiliary pump, the power consumption of the auxiliary pump being considerably lower than that of the main pump system.
  • a lowering of the speed of the at least one pump of the main pump system takes place when falling below a predetermined pressure limit value. Furthermore, it is possible to define a further lower pressure limit at a further lowering of the pressure, in which then takes place again reducing the speed.
  • the speed change of the at least one pump of the main pump system can also be infinitely variable.
  • a lowering of the speed takes place only after a predetermined period of time.
  • the cooling water flow can be controlled. This is because reducing the pressure in the outlet area of the main pumping system by providing the auxiliary pumping system can reduce the compression capacity of the main pumping system. This leads to a reduction of the mechanical friction and thus to a reduction of the amount of heat generated. As a result, a significantly lower heating of a coolant, such as a coolant can be achieved. As a result, the cooling liquid heated by the vacuum pump system preferably has to be cooled less before being returned to the cooling system. This already leads to energy savings. Also, a cooling fluid can be pumped through the cooling system, for example, at a lower speed, because due to the lower heat generation still enough heat is dissipated by the cooling fluid. This too leads to a considerable energy saving.
  • a chamber or a recipient 10 in series first with a Roots pump 12 and then with a screw pump 14 is connected.
  • the two pumps 12, 14 in this case form the main pump system.
  • an auxiliary pump 20 which is in the illustrated embodiment, in particular a gas ejector connected.
  • a valve device in the form of a check valve 22 is provided in the illustrated embodiment.
  • the connected to the outlet of the ejector 20 and the check valve 22 lines 24, 26 are brought together to form a line 28, which is connected for example to the atmosphere.
  • means for recovering an ejector gas or the like may also be provided.
  • a pressure sensor 30 is provided in the area of the outlet 16 of the main pump system.
  • the pressure sensor 30 is connected to control devices 32.
  • the two control devices 32 which are in particular to Frequency converter acts, serve to control the two pumps 12, 14, in particular the speed of these two pumps.
  • a control of the speed, at least one of the two pumps 12, 14 of the main pump system takes place as a function of the pressure measured by the pressure sensor 30 in the outlet region 16.
  • the rotational speed of at least one of the two pumps 12, 14 can be reduced. This is possible in this operating state, since only small amounts of gas are conveyed out of the chamber 10. Such a small volume of gas can be conveyed by the ejector 20.
  • step 34 means the pressure measured by the pressure gauge 30 at the outlet 16 of the main pump system.
  • a step 34 it is determined whether this pressure is ⁇ 800 mbar. As long as this is not the case, for example, a renewed determination of the pressure takes place at regular intervals.
  • a timer 36 for example, is set to 60 s.
  • step 38 it is checked whether the period of 60 s has expired. Only then, in step 40, again check the pressure of the outlet 16. By providing the timer can be ensured that a change in the speed of the pump is not already at low pressure fluctuations.
  • step 44 a further determination of the pressure at the outlet 16 takes place. If the latter exceeds an upper limit of, for example, 900 mbar, the rotational speed of the pumps 12, 14 is increased again in step 46. As long as the pressure is below 900 mbar, the speed of the pumps 12, 14 remains reduced. After increasing the speed in step 46, then again checking the pressure according to step 34.
  • a pressure differential meter 48 is provided. With the help of the pressure difference meter, the pressure difference between the auxiliary pump 20 and the check valve 22 is measured. If the pressure difference falls below a predetermined limit, the ejector 20 is switched off. Such low pressure differences prevail, in particular, at the beginning of the process in which large quantities of gas are pumped out of the chamber 10. Such large amounts of gas can not be promoted by the ejector 20, but are conveyed directly through the check valve 22. This is because the pressure difference compared to the main pump system is still relatively low, possible. At the beginning of operation, the pump 14 of the main pump system can still pump against the atmosphere. Only with a correspondingly large pressure difference between the check valve 22 and the ejector 20 is a connection of the ejector, since then at least a majority of the delivered gas is conveyed through the ejector 20.
  • a pressure sensor 52 connected to an inlet 50 of the main pump system is provided instead of the pressure sensor 30 connected to the outlet 16.
  • a switchable valve 54 is provided instead of a switchable valve 54. Due to the provision of a switchable valve 54, control over the pressure in the region of the outlet 16 is no longer possible, since a switchable valve, in contrast to a check valve, does not generate a back pressure.
  • the control takes place at the in FIG. 4 illustrated embodiment via an intermediate control device 56 which is connected to both the pressure sensor 52 and the switchable valve 54. Further, the controller 56 is connected to the ejector 20 to turn on or off depending on the operating state. Also, with the aid of the control device 56 via the frequency converter 32, a regulation of the pump speed of the two pumps 12, 14 takes place.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP13786477.3A 2012-11-09 2013-11-05 Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems Active EP2844878B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012220442.3A DE102012220442A1 (de) 2012-11-09 2012-11-09 Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
PCT/EP2013/073021 WO2014072276A1 (de) 2012-11-09 2013-11-05 Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems

Publications (2)

Publication Number Publication Date
EP2844878A1 EP2844878A1 (de) 2015-03-11
EP2844878B1 true EP2844878B1 (de) 2015-07-15

Family

ID=49546402

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13786477.3A Active EP2844878B1 (de) 2012-11-09 2013-11-05 Vakuumpumpensystem zur evakuierung einer kammer sowie verfahren zur steuerung eines vakuumpumpensystems

Country Status (6)

Country Link
EP (1) EP2844878B1 (ko)
KR (1) KR102141077B1 (ko)
CN (1) CN104822943B (ko)
DE (1) DE102012220442A1 (ko)
TW (1) TWI609131B (ko)
WO (1) WO2014072276A1 (ko)

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CN104047858B (zh) * 2014-06-16 2017-09-01 项敏 罗茨大气直排智能机组及其运行控制策略
DE202014005279U1 (de) * 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
WO2015197138A1 (fr) 2014-06-27 2015-12-30 Ateliers Busch Sa Méthode de pompage dans un système de pompes à vide et système de pompes à vide
DE202014007963U1 (de) * 2014-10-01 2016-01-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpsystem
WO2016050313A1 (fr) * 2014-10-02 2016-04-07 Ateliers Busch Sa Systeme de pompage pour generer un vide et procede de pompage au moyen de ce systeme de pompage
DE102015219078A1 (de) * 2015-10-02 2017-04-06 Robert Bosch Gmbh Hydrostatisches Kompaktaggregat mit Kühlung
CN105422454B (zh) * 2015-12-09 2017-12-19 攀枝花钢城集团瑞钢工业有限公司 真空抽气系统和真空抽气方法
DE202016007609U1 (de) 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
CN108412740A (zh) * 2018-03-16 2018-08-17 东莞市基富真空设备有限公司 一种低能耗的真空供应系统及其控制方法
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
JP7220692B2 (ja) 2019-10-07 2023-02-10 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ、スクロールポンプ及びその製造方法
EP3754200B1 (de) 2019-10-07 2021-12-08 Pfeiffer Vacuum Gmbh Scrollvakuumpumpe und montageverfahren
CN111734615B (zh) * 2020-06-28 2022-03-18 安图实验仪器(郑州)有限公司 用于真空系统的后级泵控制系统及控制方法
TWI815068B (zh) * 2020-12-25 2023-09-11 大陸商上海伊萊茨真空技術有限公司 基於冷凝器及羅茨真空泵的真空系統
DE102022100843A1 (de) 2022-01-14 2023-07-20 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung, Speichermedium und Vakuumanordnung

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Also Published As

Publication number Publication date
CN104822943A (zh) 2015-08-05
KR20150082519A (ko) 2015-07-15
DE102012220442A1 (de) 2014-05-15
TW201430219A (zh) 2014-08-01
WO2014072276A1 (de) 2014-05-15
CN104822943B (zh) 2016-12-21
TWI609131B (zh) 2017-12-21
EP2844878A1 (de) 2015-03-11
KR102141077B1 (ko) 2020-08-04

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