EP2844878B1 - Vacuum pump system for evacuating a chamber, and method for controlling a vacuum pump system - Google Patents
Vacuum pump system for evacuating a chamber, and method for controlling a vacuum pump system Download PDFInfo
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- EP2844878B1 EP2844878B1 EP13786477.3A EP13786477A EP2844878B1 EP 2844878 B1 EP2844878 B1 EP 2844878B1 EP 13786477 A EP13786477 A EP 13786477A EP 2844878 B1 EP2844878 B1 EP 2844878B1
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- pump system
- pressure
- main pump
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- auxiliary
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- 238000000034 method Methods 0.000 title claims description 18
- 230000009467 reduction Effects 0.000 claims description 4
- 239000002826 coolant Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 24
- 238000005086 pumping Methods 0.000 description 14
- 230000008901 benefit Effects 0.000 description 6
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000012809 cooling fluid Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/21—Pressure difference
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/56—Number of pump/machine units in operation
Definitions
- the invention relates to a vacuum pump system for evacuating a chamber or to keep a chamber at a predetermined negative pressure of in particular less than 10 mbar and a method for controlling such a vacuum pump system.
- WO 2011/061429 A2 describes a vacuum pumping system for evacuating a chamber having a main pumping system connected to the chamber and an auxiliary pumping system connected to the outlet of the main pumping system, the auxiliary pumping system having a pumping system Having ejector.
- the ejector is controlled in dependence on the detected electrical power of the main pump system and the detected gas pressure at the outlet of the main pump system.
- the object of the invention is to increase the energy efficiency of a vacuum pump system for evacuating a chamber.
- the object is achieved by a vacuum pump system according to claim 1 or a method for controlling a vacuum pump system according to claim 8.
- the vacuum pump system according to the invention for evacuating a chamber or a recipient has a main pump system, which in particular is directly connected to the chamber.
- the main pump system may have at least one, in particular a plurality of vacuum pumps.
- the vacuum pumps provided in the main pump system are preferably screw vacuum pumps or roots pumps.
- pumps with a high internal compression are used in the main pump system. Internal compression describes the ratio of the volume at the pump inlet prior to compression to the volume at the pump outlet after compression. High internal densities of 1:10, for example, make it possible to transport large volumes of gas. At the beginning of the evacuation such, a large volume in a short time promoting pumps are very well suited.
- the auxiliary pump system according to the invention comprises an ejector.
- Ejector pumps have the advantage, in particular during operation of the vacuum system in the end pressure range, that the remaining relatively small amounts of gas can be pumped through them with little energy requirement.
- This has the significant advantage according to the invention that it is possible, by providing an ejector in the auxiliary pump system in the end pressure range, the speed of the at least one pump of the Reduce main pumping system. As a result, the energy consumption of this pump of the main pump system drops significantly. By providing an ejector in the auxiliary pump system thus energy efficiency can be significantly increased.
- the ejector may be a liquid or a gas ejector.
- a gas ejector pump may be advantageous when pumping gases, with a liquid ejector pump on the one hand having the advantage that the liquid can be separated from the pumped gas in a simple manner.
- An essential advantage of the vacuum pump system according to the invention is that the pressure in the outlet region of the main pump system is reduced by providing the ejector pump. This results in a reduction in the pressure difference between the inlet and the outlet of the at least one pump of the main pump system, whereby the tightness of the pump is improved. In particular, this improves the tightness of the sealing gaps of the corresponding pump.
- a pressure difference meter is provided which measures the pressure difference between the auxiliary pump system and the valve device. This makes it possible, when falling below a predetermined pressure difference, the auxiliary pump system completely or partially off. This is particularly advantageous at the beginning of an evacuation, since the auxiliary pump system is not yet required at this time and by switching off the auxiliary pump system, the power consumption of the entire system can be reduced. According to the invention it is thus preferred that the auxiliary pump system is switched on only when a certain pressure difference is exceeded, so that the energy efficiency can be further improved.
- a pressure sensor is also preferable, in particular in the outlet region of the main pump system. This makes it possible, for example, upon reaching a limit pressure, which is in particular close to the planned final pressure, to reduce the speed of the at least one pump of the main pump system.
- a limit pressure which is in particular close to the planned final pressure
- the amount of gas to be delivered is relatively small. This has the consequence that the amount of gas from the at least one pump of the main pump system can be promoted even at low speed, especially since this amount of gas can be promoted by the ejector in a simple manner. The then possible lowering of the speed of the at least one pump of the main pump system leads to considerable energy savings. It is advantageous that no backflow of the pumped medium occurs even at low speeds.
- a pressure sensor in the outlet region of the main pump system instead of providing a pressure sensor in the outlet region of the main pump system, it is also possible to provide a pressure sensor in the inlet region of the main pump system. This is particularly advantageous in combination with a switchable valve provided parallel to the ejector pump. When the valve is open, the pressure in the outlet area of the main pump system is reduced, so that the pressure measurement in this area has only a low significance. In this respect, it is preferable, when providing a switchable valve, to control the switching of the valve in response to the pressure in an inlet region of the main pump system or an inlet region of one of the pumps of the main pump system.
- the invention relates to a method for controlling a pump system for evacuating a chamber.
- a pump system has a main pumping system connected to the chamber.
- An auxiliary pump system is connected to the outlet of the main pump system.
- the vacuum pump system is preferably developed advantageously, but does not necessarily have to have an ejector pump for implementing the method according to the invention in the auxiliary pump system.
- a pressure is determined in the outlet and / or inlet region of the main pump system. Based on the measured pressure then takes place a regulation of the speed of the at least one pump of the main pump system.
- the pump system has a pressure sensor in the region of the outlet and / or in the region of the inlet.
- the aid of the method according to the invention it is possible with the aid of the method according to the invention to increase the energy efficiency during operation of the vacuum pump system in the end pressure range. In the final pressure range only very small amounts of gas have to be conveyed, so that the speed of the at least one pump of the main pump system can be reduced.
- the gas to be delivered is also conveyed by the auxiliary pump, the power consumption of the auxiliary pump being considerably lower than that of the main pump system.
- a lowering of the speed of the at least one pump of the main pump system takes place when falling below a predetermined pressure limit value. Furthermore, it is possible to define a further lower pressure limit at a further lowering of the pressure, in which then takes place again reducing the speed.
- the speed change of the at least one pump of the main pump system can also be infinitely variable.
- a lowering of the speed takes place only after a predetermined period of time.
- the cooling water flow can be controlled. This is because reducing the pressure in the outlet area of the main pumping system by providing the auxiliary pumping system can reduce the compression capacity of the main pumping system. This leads to a reduction of the mechanical friction and thus to a reduction of the amount of heat generated. As a result, a significantly lower heating of a coolant, such as a coolant can be achieved. As a result, the cooling liquid heated by the vacuum pump system preferably has to be cooled less before being returned to the cooling system. This already leads to energy savings. Also, a cooling fluid can be pumped through the cooling system, for example, at a lower speed, because due to the lower heat generation still enough heat is dissipated by the cooling fluid. This too leads to a considerable energy saving.
- a chamber or a recipient 10 in series first with a Roots pump 12 and then with a screw pump 14 is connected.
- the two pumps 12, 14 in this case form the main pump system.
- an auxiliary pump 20 which is in the illustrated embodiment, in particular a gas ejector connected.
- a valve device in the form of a check valve 22 is provided in the illustrated embodiment.
- the connected to the outlet of the ejector 20 and the check valve 22 lines 24, 26 are brought together to form a line 28, which is connected for example to the atmosphere.
- means for recovering an ejector gas or the like may also be provided.
- a pressure sensor 30 is provided in the area of the outlet 16 of the main pump system.
- the pressure sensor 30 is connected to control devices 32.
- the two control devices 32 which are in particular to Frequency converter acts, serve to control the two pumps 12, 14, in particular the speed of these two pumps.
- a control of the speed, at least one of the two pumps 12, 14 of the main pump system takes place as a function of the pressure measured by the pressure sensor 30 in the outlet region 16.
- the rotational speed of at least one of the two pumps 12, 14 can be reduced. This is possible in this operating state, since only small amounts of gas are conveyed out of the chamber 10. Such a small volume of gas can be conveyed by the ejector 20.
- step 34 means the pressure measured by the pressure gauge 30 at the outlet 16 of the main pump system.
- a step 34 it is determined whether this pressure is ⁇ 800 mbar. As long as this is not the case, for example, a renewed determination of the pressure takes place at regular intervals.
- a timer 36 for example, is set to 60 s.
- step 38 it is checked whether the period of 60 s has expired. Only then, in step 40, again check the pressure of the outlet 16. By providing the timer can be ensured that a change in the speed of the pump is not already at low pressure fluctuations.
- step 44 a further determination of the pressure at the outlet 16 takes place. If the latter exceeds an upper limit of, for example, 900 mbar, the rotational speed of the pumps 12, 14 is increased again in step 46. As long as the pressure is below 900 mbar, the speed of the pumps 12, 14 remains reduced. After increasing the speed in step 46, then again checking the pressure according to step 34.
- a pressure differential meter 48 is provided. With the help of the pressure difference meter, the pressure difference between the auxiliary pump 20 and the check valve 22 is measured. If the pressure difference falls below a predetermined limit, the ejector 20 is switched off. Such low pressure differences prevail, in particular, at the beginning of the process in which large quantities of gas are pumped out of the chamber 10. Such large amounts of gas can not be promoted by the ejector 20, but are conveyed directly through the check valve 22. This is because the pressure difference compared to the main pump system is still relatively low, possible. At the beginning of operation, the pump 14 of the main pump system can still pump against the atmosphere. Only with a correspondingly large pressure difference between the check valve 22 and the ejector 20 is a connection of the ejector, since then at least a majority of the delivered gas is conveyed through the ejector 20.
- a pressure sensor 52 connected to an inlet 50 of the main pump system is provided instead of the pressure sensor 30 connected to the outlet 16.
- a switchable valve 54 is provided instead of a switchable valve 54. Due to the provision of a switchable valve 54, control over the pressure in the region of the outlet 16 is no longer possible, since a switchable valve, in contrast to a check valve, does not generate a back pressure.
- the control takes place at the in FIG. 4 illustrated embodiment via an intermediate control device 56 which is connected to both the pressure sensor 52 and the switchable valve 54. Further, the controller 56 is connected to the ejector 20 to turn on or off depending on the operating state. Also, with the aid of the control device 56 via the frequency converter 32, a regulation of the pump speed of the two pumps 12, 14 takes place.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Jet Pumps And Other Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
Die Erfindung betrifft ein Vakuumpumpensystem zur Evakuierung einer Kammer bzw. um eine Kammer auf einem vorgegebenen Unterdruck von insbesondere weniger als 10 mbar zu halten sowie ein Verfahren zur Steuerung eines derartigen Vakuumpumpensystems.The invention relates to a vacuum pump system for evacuating a chamber or to keep a chamber at a predetermined negative pressure of in particular less than 10 mbar and a method for controlling such a vacuum pump system.
Vakuumpumpensysteme weisen mehrere Vakuumpumpen auf. Hierbei ist es bekannt, ein Hauptpumpensystem mit einer oder mehrerer Vakuumpumpen vorzusehen, das von einem Hilfspumpensystem unterstützt wird. Üblicherweise ist das Hilfspumpensystem dem Hauptpumpensystem in Förderrichtung nachgeordnet bzw. mit dem Auslass des Hauptpumpensystems verbunden. Das Hilfspumpensystem pumpt das Gas gegen Atmosphärendruck und verringert den Druck im Auslassbereich des Hauptpumpensystems, so dass das Hauptpumpensystem nicht gegen Atmosphärendruck fördern muss. Hierdurch ist es möglich, sehr niedrige Enddrücke in der zu evakuierenden Kammer bzw. dem Rezipienten zu realisieren. Derartige Vakuumpumpensysteme sind beispielsweise in
Aufgabe der Erfindung ist es, die Energieeffizienz eines Vakuumpumpensystems zur Evakuierung einer Kammer zu steigern.The object of the invention is to increase the energy efficiency of a vacuum pump system for evacuating a chamber.
Die Lösung der Aufgabe erfolgt durch ein Vakuumpumpensystem gemäß Anspruch 1 bzw. ein Verfahren zur Steuerung eines Vakuumpumpensystems gemäß Anspruch 8.The object is achieved by a vacuum pump system according to claim 1 or a method for controlling a vacuum pump system according to claim 8.
Das erfindungsgemäße Vakuumpumpensystem zur Evakuierung einer Kammer bzw. eines Rezipienten weist ein Hauptpumpensystem auf, das insbesondere unmittelbar mit der Kammer verbunden ist. Hierbei kann das Hauptpumpensystem mindestens ein, insbesondere mehrere Vakuumpumpen aufweisen. Bei den im Hauptpumpensystem vorgesehenen Vakuumpumpen handelt es sich vorzugsweise um Schraubenvakuumpumpen oder Rootspumpen. Insbesondere werden im Hauptpumpensystem Pumpen mit einer hohen inneren Verdichtung eingesetzt. Die innere Verdichtung beschreibt das Verhältnis des Volumens am Pumpeneinlass vor dem Komprimieren zu dem Volumen am Pumpenauslass nach dem Komprimieren. Durch hohe innere Verdichtungen von beispielsweise 1:10 ist es möglich, große Gasvolumina zu fördern. Zu Beginn der Evakuierung sind derartige, ein großes Volumen in kurzer Zeit fördernde Pumpen sehr gut geeignet. Bei Erreichen des Enddrucks in der Kammer müssen derartige großvolumige Pumpen zur Aufrechterhaltung des geringen Drucks in der Kammer weiter bei hoher Leistungsaufnahme betrieben werden, um das Vakuum bzw. den geringen Enddruck aufrecht zu erhalten. Da insbesondere im Bereich des Enddrucks von dem Hauptpumpensystem nur noch geringe Gasmengen gefördert werden müssen, ist ein dem Hauptpumpensystem nachgeschaltetes Hilfspumpensystem vorgesehen, das mit dem Auslass des Hauptpumpensystems verbunden ist.The vacuum pump system according to the invention for evacuating a chamber or a recipient has a main pump system, which in particular is directly connected to the chamber. In this case, the main pump system may have at least one, in particular a plurality of vacuum pumps. The vacuum pumps provided in the main pump system are preferably screw vacuum pumps or roots pumps. In particular, pumps with a high internal compression are used in the main pump system. Internal compression describes the ratio of the volume at the pump inlet prior to compression to the volume at the pump outlet after compression. High internal densities of 1:10, for example, make it possible to transport large volumes of gas. At the beginning of the evacuation such, a large volume in a short time promoting pumps are very well suited. Upon reaching the final pressure in the chamber such large-volume pump to maintain the low pressure in the chamber must continue to be operated at high power consumption to maintain the vacuum or the low final pressure. Since, in particular in the region of the final pressure, only small amounts of gas still have to be delivered by the main pump system, an auxiliary pump system arranged downstream of the main pump system is provided, which is connected to the outlet of the main pump system.
Das Hilfspumpensystem weist erfindungsgemäß eine Ejektorpumpe auf. Ejektorpumpen weisen insbesondere beim Betrieb des Vakuumsystems im Enddruckbereich den Vorteil auf, dass durch diese die verbleibenden relativ geringen Gasmengen bei geringem Energiebedarf gefördert werden können. Dies hat den erfindungsgemäßen wesentlichen Vorteil, dass es möglich ist, durch Vorsehen einer Ejektorpumpe im Hilfspumpensystem im Enddruckbereich die Drehzahl der mindestens einen Pumpe des Hauptpumpensystems zu verringern. Hierdurch sinkt die Energieaufnahme dieser Pumpe des Hauptpumpensystems deutlich. Durch Vorsehen einer Ejektorpumpe im Hilfspumpensystem kann somit die Energieeffizienz deutlich gesteigert werden.The auxiliary pump system according to the invention comprises an ejector. Ejector pumps have the advantage, in particular during operation of the vacuum system in the end pressure range, that the remaining relatively small amounts of gas can be pumped through them with little energy requirement. This has the significant advantage according to the invention that it is possible, by providing an ejector in the auxiliary pump system in the end pressure range, the speed of the at least one pump of the Reduce main pumping system. As a result, the energy consumption of this pump of the main pump system drops significantly. By providing an ejector in the auxiliary pump system thus energy efficiency can be significantly increased.
Bei der Ejektorpumpe kann es sich um eine Flüssigkeits- oder eine Gasejektorpumpe handeln. Je nach Einsatzgebiet kann beim Fördern von Gasen das Vorsehen einer Gasejektorpumpe vorteilhaft sein, wobei eine Flüssigkeitsejektorpumpe einerseits den Vorteil aufweist, dass die Flüssigkeit auf einfache Weise von dem geförderten Gas wieder getrennt werden kann.The ejector may be a liquid or a gas ejector. Depending on the field of application, the provision of a gas ejector pump may be advantageous when pumping gases, with a liquid ejector pump on the one hand having the advantage that the liquid can be separated from the pumped gas in a simple manner.
Mit Hilfe des erfindungsgemäßen Vakuumpumpensystems ist es möglich, bei hohem effektiven Saugvermögen, niedrige Einlassdrücke zu realisieren bzw. diese aufrecht zu erhalten. Besonders bevorzugt ist der Einsatz des Vakuumpumpensystems um nach dem Evakuieren einer Kammer, d.h. nachdem eine Kammer von beispielsweise Umgebungsdruck auf einen niedrigen Druck von insbesondere weniger als 10 mbar evakuiert wurde, diesen niedrigen Druck über einen längeren Prozesszeitraum aufrecht zu erhalten.With the aid of the vacuum pump system according to the invention, it is possible, with high effective pumping speed, to realize or maintain low inlet pressures. Particularly preferred is the use of the vacuum pumping system to after evacuating a chamber, i. for example, after a chamber has been evacuated from, for example, ambient pressure to a low pressure, more particularly less than 10 mbar, to maintain this low pressure over a longer process period.
Erfindungsgemäß ist parallel zu der Ejektorpumpe eine Ventileinrichtung vorgesehen. Die Ventileinrichtung kann hierbei beispielsweise ein schaltbares Ventil oder ein beispielsweise federbelastetes Rückschlagventil aufweisen. Das Vorsehen einer derartigen Ventileinrichtung hat den Vorteil, dass insbesondere zu Beginn einer Evakuierung, bei der große Gasmengen gefördert werden, das Hauptpumpensystem das zu fördernde Medium unmittelbar gegen Atmosphäre fördert. Dies ist insbesondere zu Beginn der Evakuierung möglich, da die Druckdifferenz noch relativ gering ist. Ein Fördern über die Ventileinrichtung hat den Vorteil, dass Gasmengen gefördert werden können, die von der Ejektorpumpe aufgrund des begrenzten Durchsatzes nicht gefördert werden könnten.According to the invention, a valve device is provided parallel to the ejector. The valve device may, for example, have a switchable valve or, for example, a spring-loaded check valve. The provision of such a valve device has the advantage that, especially at the beginning of an evacuation in which large amounts of gas are conveyed, the main pump system promotes the medium to be conveyed directly against the atmosphere. This is particularly possible at the beginning of the evacuation, since the pressure difference is still relatively low. A delivery via the valve device has the advantage that gas quantities can be conveyed that could not be conveyed by the ejector pump due to the limited throughput.
Ein wesentlicher Vorteil des erfindungsgemäßen Vakuumpumpensystems besteht darin, dass durch Vorsehen der Ejektorpumpe der Druck im Auslassbereich des Hauptpumpensystems verringert wird. Dies hat eine Verringerung der Druckdifferenz zwischen dem Einlass und dem Auslass der mindestens einen Pumpe des Hauptpumpensystems zur Folge, wodurch die Dichtigkeit der Pumpe verbessert wird. Insbesondere ist hierdurch die Dichtigkeit der Dichtspalte der entsprechenden Pumpe verbessert.An essential advantage of the vacuum pump system according to the invention is that the pressure in the outlet region of the main pump system is reduced by providing the ejector pump. This results in a reduction in the pressure difference between the inlet and the outlet of the at least one pump of the main pump system, whereby the tightness of the pump is improved. In particular, this improves the tightness of the sealing gaps of the corresponding pump.
Erfindungsgemäß ist ein Druckdifferenzmesser vorgesehen, der die Druckdifferenz zwischen dem Hilfspumpensystem und der Ventileinrichtung misst. Hierdurch ist es möglich, bei Unterschreiten einer vorgegebenen Druckdifferenz das Hilfspumpensystem ganz oder teilweise abzuschalten. Dies ist insbesondere zu Beginn einer Evakuierung vorteilhaft, da das Hilfspumpensystem zu diesem Zeitpunkt noch nicht erforderlich ist und durch Abschalten des Hilfspumpensystems die Leistungsaufnahme des Gesamtsystems verringert werden kann. Erfindungsgemäß ist es somit bevorzugt, dass das Hilfspumpensystem erst bei Überschreiten einer gewissen Druckdifferenz zugeschaltet wird, so dass die Energieeffizienz weiter verbessert werden kann.According to the invention, a pressure difference meter is provided which measures the pressure difference between the auxiliary pump system and the valve device. This makes it possible, when falling below a predetermined pressure difference, the auxiliary pump system completely or partially off. This is particularly advantageous at the beginning of an evacuation, since the auxiliary pump system is not yet required at this time and by switching off the auxiliary pump system, the power consumption of the entire system can be reduced. According to the invention it is thus preferred that the auxiliary pump system is switched on only when a certain pressure difference is exceeded, so that the energy efficiency can be further improved.
Bevorzugt ist es ferner, insbesondere im Auslassbereich des Hauptpumpensystems einen Drucksensor anzuordnen. Hierdurch ist es möglich, beispielsweise bei Erreichen eines Grenzdrucks, der insbesondere nahe dem geplanten Enddruck liegt, die Drehzahl der mindestens einen Pumpe des Hauptpumpensystems zu verringern. Insbesondere, wenn im Auslassbereich des Hauptpumpensystems bereits ein relativ geringer Druck herrscht, ist die zu fördernde Gasmenge verhältnismäßig klein. Dies hat zur Folge, dass die Gasmenge von der mindestens einen Pumpe des Hauptpumpensystems auch bei niedriger Drehzahl gefördert werden kann, zumal diese Gasmenge von der Ejektorpumpe auf einfache Weise gefördert werden kann. Das sodann mögliche Absenken der Drehzahl der mindestens einen Pumpe des Hauptpumpensystems führt zu erheblichen Energieeinsparungen. Hierbei ist es vorteilhaft, dass auch bei niedrigen Drehzahlen keine Rückströmung des Fördermediums auftritt.It is also preferable, in particular in the outlet region of the main pump system, to arrange a pressure sensor. This makes it possible, for example, upon reaching a limit pressure, which is in particular close to the planned final pressure, to reduce the speed of the at least one pump of the main pump system. In particular, if there is already a relatively low pressure in the outlet region of the main pump system, the amount of gas to be delivered is relatively small. This has the consequence that the amount of gas from the at least one pump of the main pump system can be promoted even at low speed, especially since this amount of gas can be promoted by the ejector in a simple manner. The then possible lowering of the speed of the at least one pump of the main pump system leads to considerable energy savings. It is advantageous that no backflow of the pumped medium occurs even at low speeds.
Anstelle des Vorsehens eines Drucksensors im Auslassbereich des Hauptpumpensystems ist es auch möglich, einen Drucksensor im Einlassbereich des Hauptpumpensystems vorzusehen. Dies ist insbesondere in Kombination mit einem parallel zur Ejektorpumpe vorgesehenen schaltbaren Ventil vorteilhaft. Bei geöffnetem Ventil verringert sich der Druck im Auslassbereich des Hauptpumpensystems, so dass die Druckmessung in diesem Bereich nur noch eine geringe Aussagekraft hat. Insofern ist es bevorzugt, beim Vorsehen eines schaltbaren Ventils das Schalten des Ventils in Abhängigkeit des Drucks in einem Einlassbereich des Hauptpumpensystems oder einem Einlassbereich einer der Pumpen des Hauptpumpensystems zu steuern.Instead of providing a pressure sensor in the outlet region of the main pump system, it is also possible to provide a pressure sensor in the inlet region of the main pump system. This is particularly advantageous in combination with a switchable valve provided parallel to the ejector pump. When the valve is open, the pressure in the outlet area of the main pump system is reduced, so that the pressure measurement in this area has only a low significance. In this respect, it is preferable, when providing a switchable valve, to control the switching of the valve in response to the pressure in an inlet region of the main pump system or an inlet region of one of the pumps of the main pump system.
In einer weiteren bevorzugten Weiterbildung ist eine Steuereinrichtung vorgesehen, wobei es sich vorzugsweise um eine gemeinsame zentrale Steuereinrichtung handelt, mit der sämtliche Pumpen des Hauptpumpensystems sowie des Hilfspumpensystems gesteuert werden. Des Weiteren erfolgt vorzugsweise durch diese Steuereinrichtung ein Steuern eines gegebenenfalls vorgesehenen schaltbaren Ventils. Insbesondere erfolgt durch die Steuereinrichtung ein Steuern der Drehzahl der mindestens einen Pumpe des Hauptpumpensystems in Abhängigkeit des von dem mindestens einen Drucksensor gemessenen Drucks.In a further preferred embodiment, a control device is provided, which is preferably a common central control device, with which all pumps of the main pump system and the auxiliary pump system are controlled. Furthermore, preferably by this control device, a control of an optionally provided switchable valve. In particular, the control device controls the rotational speed of the at least one pump of the main pump system as a function of the pressure measured by the at least one pressure sensor.
Des Weiteren betrifft die Erfindung ein Verfahren zur Steuerung eines Pumpensystems zur Evakuierung einer Kammer. Ein derartiges Pumpensystem weist ein Hauptpumpensystem auf, das mit der Kammer verbunden ist. Mit dem Auslass des Hauptpumpensystems ist ein Hilfspumpensystem verbunden.Furthermore, the invention relates to a method for controlling a pump system for evacuating a chamber. Such a pump system has a main pumping system connected to the chamber. An auxiliary pump system is connected to the outlet of the main pump system.
Das Vakuumpumpensystem ist wie vorstehend beschrieben, vorzugsweise vorteilhaft weitergebildet, muss zur Realisierung des erfindungsgemäßen Verfahrens im Hilfspumpensystem jedoch nicht unbedingt eine Ejektorpumpe aufweisen.As described above, the vacuum pump system is preferably developed advantageously, but does not necessarily have to have an ejector pump for implementing the method according to the invention in the auxiliary pump system.
Gemäß des erfindungsgemäßen Verfahrens wird im Auslass- und/ oder Einlassbereich des Hauptpumpensystems ein Druck bestimmt. Anhand des gemessenen Drucks erfolgt sodann ein Regeln der Drehzahl der mindestens einen Pumpe des Hauptpumpensystems. Zur Durchführung dieser Verfahrensschritte ist es bevorzugt, dass das Pumpensystem im Bereich des Auslasses und/ oder im Bereich des Einlasses einen Drucksensor aufweist. Insbesondere ist es mit Hilfe des erfindungsgemäßen Verfahrens möglich, bei Betrieb des Vakuumpumpensystems im Enddruckbereich die Energieeffizienz zu steigern. Im Enddruckbereich müssen nur noch sehr geringe Mengen an Gas gefördert werden, so dass die Drehzahl der mindestens einen Pumpe des Hauptpumpensystems verringert werden kann. Das zu fördernde Gas wird insbesondere auch durch die Hilfspumpe gefördert, wobei die Leistungsaufnahme der Hilfspumpe erheblich niedriger als diejenige des Hauptpumpensystems ist.According to the method of the invention, a pressure is determined in the outlet and / or inlet region of the main pump system. Based on the measured pressure then takes place a regulation of the speed of the at least one pump of the main pump system. To carry out these method steps, it is preferred that the pump system has a pressure sensor in the region of the outlet and / or in the region of the inlet. In particular, it is possible with the aid of the method according to the invention to increase the energy efficiency during operation of the vacuum pump system in the end pressure range. In the final pressure range only very small amounts of gas have to be conveyed, so that the speed of the at least one pump of the main pump system can be reduced. In particular, the gas to be delivered is also conveyed by the auxiliary pump, the power consumption of the auxiliary pump being considerably lower than that of the main pump system.
Vorzugsweise erfolgt ein Absenken der Drehzahl der mindestens einen Pumpe des Hauptpumpensystems bei Unterschreiten eines vorgegebenen Druckgrenzwertes. Des Weiteren ist es möglich, bei einem weiteren Absenken des Drucks einen weiteren niedrigeren Druckgrenzwert zu definieren, bei dem sodann ein erneutes Verringern der Drehzahl erfolgt. Insbesondere kann die Drehzahländerung der mindestens einen Pumpe des Hauptpumpensystems auch stufenlos erfolgen.Preferably, a lowering of the speed of the at least one pump of the main pump system takes place when falling below a predetermined pressure limit value. Furthermore, it is possible to define a further lower pressure limit at a further lowering of the pressure, in which then takes place again reducing the speed. In particular, the speed change of the at least one pump of the main pump system can also be infinitely variable.
Um beispielsweise Schwankungen des Drucks und/ oder Ungenauigkeiten des Drucksensors auszugleichen, ist es bevorzugt, dass ein Absenken der Drehzahl erst nach einer vorgegebenen Zeitspanne erfolgt.For example, to compensate for fluctuations in the pressure and / or inaccuracies of the pressure sensor, it is preferred that a lowering of the speed takes place only after a predetermined period of time.
Bei einer bevorzugten Weiterbildung des erfindungsgemäßen Verfahrens wird eine Druckdifferenz zwischen dem Hilfspumpensystem und einer parallel zum Hilfspumpensystem angeordneten Ventileinrichtung bestimmt. In Abhängigkeit der Druckdifferenz wird die mindestens eine Pumpe des Hilfspumpensystems ein- oder ausgeschaltet. Insbesondere erfolgt bei Unterschreiten eines Grenzwertes einer Druckdifferenz ein Abschalten des Hilfspumpensystems. Hierbei handelt es sich um einen Bereich, in dem das Hilfspumpensystem das Hauptpumpensystem nicht oder nur geringfügig unterstützt und insofern die durch das Hilfspumpensystem erfolgte Leistungsaufnahme durch Abschalten eingespart werden kann.In a preferred development of the method according to the invention, a pressure difference between the auxiliary pump system and a valve device arranged parallel to the auxiliary pump system is determined. Depending on the pressure difference, the at least one pump of the auxiliary pump system is switched on or off. In particular, falls below a limit value of a pressure difference, a shutdown of the auxiliary pump system. This is an area in which the auxiliary pump system does not or only slightly supports the main pump system and insofar as the power consumption by the auxiliary pump system can be saved by switching off.
Aufgrund des Vorsehens eines insbesondere erfindungsgemäß gesteuerten Hilfspumpensystems kann in einer weiteren bevorzugten Ausführungsform des erfindungsgemäßen Verfahrens ein Steuern des Kühlwasserflusses erfolgen. Dies liegt darin begründet, dass durch die Reduzierung des Drucks im Auslassbereich des Hauptpumpensystems durch das Vorsehen des Hilfspumpensystems die Verdichtungsleistung des Hauptpumpensystems reduziert werden kann. Dies führt zu einer Reduzierung der mechanischen Reibung und somit zu einer Verringerung der erzeugten Wärmemenge. Hierdurch kann eine deutlich geringere Erwärmung eines Kühlmittels, wie einer Kühlflüssigkeit erzielt werden. Dies hat zur Folge, dass die durch das Vakuumpumpensystem erwärmte Kühlflüssigkeit vorzugsweise geringer gekühlt werden muss, bevor sie dem Kühlsystem wieder zugeleitet wird. Dies führt bereits zu einer Energieeinsparung. Auch kann ein Kühlfluid beispielsweise mit geringerer Geschwindigkeit durch das Kühlsystem gepumpt werden, da aufgrund der geringeren Wärmeerzeugung dennoch genug Wärme durch das Kühlfluid abgeführt wird. Auch dies führt zu einer erheblichen Energieeinsparung.Due to the provision of an auxiliary pump system controlled according to the invention, in a further preferred embodiment of the method according to the invention, the cooling water flow can be controlled. This is because reducing the pressure in the outlet area of the main pumping system by providing the auxiliary pumping system can reduce the compression capacity of the main pumping system. This leads to a reduction of the mechanical friction and thus to a reduction of the amount of heat generated. As a result, a significantly lower heating of a coolant, such as a coolant can be achieved. As a result, the cooling liquid heated by the vacuum pump system preferably has to be cooled less before being returned to the cooling system. This already leads to energy savings. Also, a cooling fluid can be pumped through the cooling system, for example, at a lower speed, because due to the lower heat generation still enough heat is dissipated by the cooling fluid. This too leads to a considerable energy saving.
Nachfolgend wird die Erfindung anhand bevorzugter Ausführungsformen, unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert.The invention will be explained in more detail below with reference to preferred embodiments, with reference to the accompanying drawings.
Es zeigen:
- Figur 1
- eine schematische Darstellung einer ersten Ausführungsform des Vakuumpumpensystems,
- Figur 2
- ein Ablaufdiagramm einer möglichen Steuerung des Vakuumpumpensystems,
- Figur 3
- eine schematische Darstellung einer zweiten Ausführungsform des Vakuumpumpensystems, und
- Figur 4
- eine schematische Darstellung einer dritten Ausführungsform des Vakuumpumpensystems.
- FIG. 1
- a schematic representation of a first embodiment of the vacuum pump system,
- FIG. 2
- a flow chart of a possible control of the vacuum pump system,
- FIG. 3
- a schematic representation of a second embodiment of the vacuum pump system, and
- FIG. 4
- a schematic representation of a third embodiment of the vacuum pump system.
Bei dem in
Im Bereich des Auslasses 16 des Hauptpumpensystems ist ein Drucksensor 30 vorgesehen. Der Drucksensor 30 ist mit Steuereinrichtungen 32 verbunden. Die beiden Steuereinrichtungen 32, bei denen es sich insbesondere um Frequenzumrichter handelt, dienen zur Steuerung der beiden Pumpen 12, 14, insbesondere der Drehzahl dieser beiden Pumpen.In the area of the
Zur Durchführung des erfindungsgemäßen Verfahrens erfolgt bei dem in
Eine derartige Steuerung ist in
In den
Bei der in
Bei einer weiteren in
Claims (10)
- A vacuum pump system for evacuating a chamber (10), comprising
a main pump system (12, 14) connected with the chamber (10), and an auxiliary pump system (20) connected with an outlet (16) of the main pump system (12, 14),
a valve means (22) connected in parallel with the auxiliary pump system (20),
wherein the auxiliary pump system (20) comprises an ejector pump, in particular a gas ejector pump
characterized by
by a differential pressure gauge (48) measuring the differential pressure between the auxiliary pump system (20) and the valve means (22). - The vacuum pump of claim 1, characterized in that the valve means (22) comprises a check valve.
- The vacuum pump of claim 1 or 2, characterized by a pressure sensor (30) determining the pressure in the outlet region (16) of the main pump system (12, 14).
- The vacuum pump of one of claims 1 to 3, characterized by a pressure sensor (52) determining the pressure in an inlet region (50).
- The vacuum pump of one of claims 1 to 4, characterized in that the main pump system (12, 14) comprises a screw-type vacuum pump (14) and/or a Roots pump (12).
- The vacuum pump of one of claims 1 to 5, characterized by a control means (56) for controlling the rotary speed of the at least one pump (12, 14) of the main pump system in dependence on the pressure measured by the at least one pressure sensor (22, 52).
- A method for controlling a vacuum pump system for evacuating a chamber (10), comprising a main pump system (12, 14) connected with the chamber (10), and an auxiliary pump system (20) connected with an outlet (16) of the main pump system (12, 14), with the following steps:- determining a pressure in the outlet region (16) and/or in the inlet region (50) of the main pump system (12, 14), and- controlling the rotary speed of the at least one pump (12, 14) of the main pump system in dependence on the pressure measured, and- deactivating the auxiliary pump system (20), when the pressure falls below a limit value for a pressure difference between the auxiliary pump system (20) and a valve means (22) arranged in parallel with the auxiliary pump system (20).
- The method of claim 7, wherein the rotary speed of the at least one pump of the main pump system (12, 14) is reduced, when a pressure falls below pressure limit value.
- The method of claim 8, wherein a reduction of the rotary speed is performed for at least a predetermined period of time, when the pressure falls below said pressure limit.
- The method of one of claims 7 to 9, wherein a coolant flow is controlled in dependence on a temperature of the main pump system (12, 14).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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DE102012220442.3A DE102012220442A1 (en) | 2012-11-09 | 2012-11-09 | Vacuum pump system for evacuating a chamber and method for controlling a vacuum pump system |
PCT/EP2013/073021 WO2014072276A1 (en) | 2012-11-09 | 2013-11-05 | Vacuum pump system for evacuating a chamber, and method for controlling a vacuum pump system |
Publications (2)
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EP2844878A1 EP2844878A1 (en) | 2015-03-11 |
EP2844878B1 true EP2844878B1 (en) | 2015-07-15 |
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EP13786477.3A Active EP2844878B1 (en) | 2012-11-09 | 2013-11-05 | Vacuum pump system for evacuating a chamber, and method for controlling a vacuum pump system |
Country Status (6)
Country | Link |
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EP (1) | EP2844878B1 (en) |
KR (1) | KR102141077B1 (en) |
CN (1) | CN104822943B (en) |
DE (1) | DE102012220442A1 (en) |
TW (1) | TWI609131B (en) |
WO (1) | WO2014072276A1 (en) |
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CN104047858B (en) * | 2014-06-16 | 2017-09-01 | 项敏 | The in line intelligent unit of Roots's air and its operation control strategy |
DE202014005279U1 (en) | 2014-06-26 | 2015-10-05 | Oerlikon Leybold Vacuum Gmbh | Vacuum system |
WO2015197138A1 (en) | 2014-06-27 | 2015-12-30 | Ateliers Busch Sa | Method of pumping in a system of vacuum pumps and system of vacuum pumps |
DE202014007963U1 (en) * | 2014-10-01 | 2016-01-05 | Oerlikon Leybold Vacuum Gmbh | Vacuum pumping system |
JP6512674B2 (en) * | 2014-10-02 | 2019-05-15 | アテリエ ビスク ソシエテ アノニムAtelier Busch SA | Pumping system for generating a vacuum and pumping method using the pumping system |
DE102015219078A1 (en) * | 2015-10-02 | 2017-04-06 | Robert Bosch Gmbh | Hydrostatic compact unit with cooling |
CN105422454B (en) * | 2015-12-09 | 2017-12-19 | 攀枝花钢城集团瑞钢工业有限公司 | Vacuum-pumping system and vacuum suction method |
DE202016007609U1 (en) | 2016-12-15 | 2018-03-26 | Leybold Gmbh | Vacuum pumping system |
CN108412740A (en) * | 2018-03-16 | 2018-08-17 | 东莞市基富真空设备有限公司 | A kind of the vacuum supply system and its control method of low energy consumption |
US11815095B2 (en) * | 2019-01-10 | 2023-11-14 | Elival Co., Ltd | Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps |
EP3754200B1 (en) | 2019-10-07 | 2021-12-08 | Pfeiffer Vacuum Gmbh | Scroll vacuum pump and assembly method |
JP7220692B2 (en) | 2019-10-07 | 2023-02-10 | プファイファー・ヴァキューム・ゲーエムベーハー | Vacuum pump, scroll pump and manufacturing method thereof |
CN111734615B (en) * | 2020-06-28 | 2022-03-18 | 安图实验仪器(郑州)有限公司 | Control system and control method for rear-stage pump of vacuum system |
TWI815068B (en) * | 2020-12-25 | 2023-09-11 | 大陸商上海伊萊茨真空技術有限公司 | Vacuum system based on condenser and Roots vacuum pump |
DE102022100843A1 (en) | 2022-01-14 | 2023-07-20 | VON ARDENNE Asset GmbH & Co. KG | Method, control device, storage medium and vacuum arrangement |
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JPS6385292A (en) * | 1986-09-29 | 1988-04-15 | Hitachi Ltd | Vacuum pump |
JP2733489B2 (en) * | 1989-05-10 | 1998-03-30 | 株式会社宇野澤組鐵工所 | Backflow cooled multi-stage rotary vacuum pump with gas dilution |
DE69233568T2 (en) * | 1991-09-10 | 2006-08-10 | Smc K.K. | Fluid pressure actuated device |
KR100190310B1 (en) | 1992-09-03 | 1999-06-01 | 모리시따 요오이찌 | Two stage primary dry pump |
JPH09125227A (en) * | 1995-10-27 | 1997-05-13 | Tokyo Electron Ltd | Evacuation apparatus and vacuum treatment equipment |
JP2001207984A (en) * | 1999-11-17 | 2001-08-03 | Teijin Seiki Co Ltd | Evacuation device |
EP1234982B1 (en) * | 2001-02-22 | 2003-12-03 | VARIAN S.p.A. | Vacuum pump |
FR2822200B1 (en) * | 2001-03-19 | 2003-09-26 | Cit Alcatel | PUMPING SYSTEM FOR LOW THERMAL CONDUCTIVITY GASES |
WO2003023229A1 (en) | 2001-09-06 | 2003-03-20 | Ulvac, Inc. | Vacuum pumping system and method of operating vacuum pumping system |
JP3982673B2 (en) * | 2001-10-31 | 2007-09-26 | 株式会社アルバック | Operation method of vacuum exhaust system |
SE519647C2 (en) * | 2002-05-03 | 2003-03-25 | Piab Ab | Vacuum pump, comprises screw rotor pump with expander and ejector parts operated in parallel |
JP2004263635A (en) * | 2003-03-03 | 2004-09-24 | Tadahiro Omi | Vacuum device and vacuum pump |
JP4218756B2 (en) * | 2003-10-17 | 2009-02-04 | 株式会社荏原製作所 | Vacuum exhaust device |
FR2883934B1 (en) * | 2005-04-05 | 2010-08-20 | Cit Alcatel | QUICK ENCLOSURE PUMPING WITH ENERGY LIMITATION |
JP4745779B2 (en) * | 2005-10-03 | 2011-08-10 | 神港精機株式会社 | Vacuum equipment |
FR2952683B1 (en) * | 2009-11-18 | 2011-11-04 | Alcatel Lucent | METHOD AND APPARATUS FOR PUMPING WITH REDUCED ENERGY CONSUMPTION |
-
2012
- 2012-11-09 DE DE102012220442.3A patent/DE102012220442A1/en not_active Withdrawn
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2013
- 2013-11-05 WO PCT/EP2013/073021 patent/WO2014072276A1/en active Search and Examination
- 2013-11-05 KR KR1020157014938A patent/KR102141077B1/en active IP Right Grant
- 2013-11-05 CN CN201380058746.1A patent/CN104822943B/en active Active
- 2013-11-05 EP EP13786477.3A patent/EP2844878B1/en active Active
- 2013-11-05 TW TW102140082A patent/TWI609131B/en active
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CN104822943B (en) | 2016-12-21 |
WO2014072276A1 (en) | 2014-05-15 |
EP2844878A1 (en) | 2015-03-11 |
TW201430219A (en) | 2014-08-01 |
DE102012220442A1 (en) | 2014-05-15 |
KR102141077B1 (en) | 2020-08-04 |
KR20150082519A (en) | 2015-07-15 |
TWI609131B (en) | 2017-12-21 |
CN104822943A (en) | 2015-08-05 |
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