EP2836722A2 - Pompe à vide à palettes rotatives - Google Patents

Pompe à vide à palettes rotatives

Info

Publication number
EP2836722A2
EP2836722A2 EP13708741.7A EP13708741A EP2836722A2 EP 2836722 A2 EP2836722 A2 EP 2836722A2 EP 13708741 A EP13708741 A EP 13708741A EP 2836722 A2 EP2836722 A2 EP 2836722A2
Authority
EP
European Patent Office
Prior art keywords
rotary vane
channel
vacuum rotary
vane pump
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13708741.7A
Other languages
German (de)
English (en)
Other versions
EP2836722B1 (fr
Inventor
Laurent FURRER
Jean-Francois Aubert
Frederic Jeziorowski
Laurent BREGIER
Eric Figoni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP2836722A2 publication Critical patent/EP2836722A2/fr
Application granted granted Critical
Publication of EP2836722B1 publication Critical patent/EP2836722B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/026—Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F04C29/128—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type of the elastic type, e.g. reed valves

Definitions

  • the invention relates to a vacuum rotary vane pump.
  • Vacuum rotary vane pumps have a pump chamber arranged in a housing. Within the housing, a rotor is arranged eccentrically. Two or more sliders are usually connected to the rotor in slide slots. As a result of the centrifugal force, the slides are pressed against an inner wall of the pump chamber during a rotation of the rotor. To generate a vacuum, a suction opening of the vacuum rotary vane pump is connected to the space to be vacuumed. Due to the eccentricity of the rotor and the changing size of the chambers formed between the sliders, the medium is conveyed through one or more ejection channels.
  • the at least one ejection channel usually runs from the suction chamber into an oil chamber.
  • a vacuum rotary vane pump in which a compensation channel is connected to the discharge channel. At the compensation channel is substantially at atmospheric pressure.
  • the compensation channel is arranged in a flange of the pump housing and covered by a valve plate of the valve device.
  • the object of the invention is to provide a covered groove in the flange to develop an alternative solution, which may be retrofitted cost and / or existing pumps.
  • the suction chamber is connected to an oil chamber via an ejection channel, wherein a valve device is arranged between the oil chamber and the ejection channel.
  • the valve device serves to prevent a backflow of medium, ie usually a mixture of oil and air, from the oil chamber into the pump chamber.
  • at least one compensation channel is provided, which connects the discharge channel with a region in which substantially atmospheric pressure prevails.
  • the compensation channel is connected to an air space of the oil chamber, wherein the air space of the oil chamber is the area of the oil chamber, which is above the oil bath and in which substantially enriched with oil air is present.
  • the medium By providing such a compensation channel in conjunction with a valve device arranged between the oil chamber and the discharge channel, the medium is forced out of the pump chamber into the discharge channel during operation, the medium, which is usually a mixture of gas such as air and oil acts, passes through the valve means in the oil chamber. A part of the oil present in the medium is pressed into the compensation channel or sucked in by it and thus seals it off. It is thereby ensured that no fresh air is sucked in during operation via the compensation channel, or air with ambient pressure reaches the discharge channel.
  • the medium which is usually a mixture of gas such as air and oil acts
  • the compensation channel is integrated into the valve device.
  • This has the advantage that a designed according to the invention the compensation channel having valve device can be used for differently designed rotary vane pumps.
  • the valve device preferably has a valve plate which closes the discharge channel and which cooperates with a spring element. By the spring element a closing force is exerted on the valve plate.
  • the spring element is preferably also plate-shaped and has an elastic material for generating the spring force.
  • the valve plate has a connection opening connected to the discharge channel.
  • the connection opening opens into the compensation channel.
  • the cross-sectional area of the connection opening and preferably also of the compensation channel is preferably chosen as a function of the viscosity of the lubricant such that the at least one compensation channel forms a capillary channel in which oil is sucked in during operation. This results in a closing of the compensation channel during operation.
  • Controlled and defined emulsification of the oil is also achieved by providing the equalization channel.
  • the compensation channel is at least partially filled with oil, while the medium is conveyed from a region of the pumping space between two adjacent slides into the discharge channel. If the trailing slide now subsequently passes through the opening of the ejection channel connected to the suction chamber, the oil reservoir stored in the compensation channel is conveyed into this space. In this case, a small amount of air is sucked out of the compensation channel, which leads to the emulsion of the oil.
  • the number and shape design of the compensation channels a good emulsification of the lubricant can be ensured depending on the lubricant used.
  • the provision according to the invention of at least one compensation channel thus also leads to a reduction of noise in rotational speed limits of the vacuum rotary vane pump.
  • the small cross-sectional area of the at least one compensation channel ensures that only a small amount of air enters the pump.
  • an intermediate element is provided between the valve plate and the spring element of the valve device.
  • the at least one compensation channel is formed.
  • the intermediate element limits the compensation channel laterally and downwardly so that a compensation channel opening is formed in an upper region of the intermediate element.
  • the equalizing passage opening is connected to the oil chamber, the connection being made in the region of the oil chamber in which gas or air is.
  • the lower region is thus the region opposite the upper region, wherein the lower region is preferably arranged in the oil bath of the oil chamber.
  • the compensation channel is delimited by the valve plate and the spring element.
  • a versatile closed channel is formed, which has a compensation channel opening in the upper region and is closed in the lower region.
  • the intermediate element is formed such that it partially surrounds the connection opening.
  • the intermediate element is U-shaped.
  • the individual intermediate elements are preferably U-shaped or, in the case of a common intermediate element, the intermediate elements have corresponding slots or openings forming the compensation channels.
  • the at least one intermediate element may be connected to the valve plate and / or the spring element or an intermediate part arranged between the spring element and the intermediate element. This can be done, for example, by gluing or welding. It is also possible that the intermediate element is integrally formed with the valve plate and / or the spring element.
  • a one-piece design can be made with the spring element made of an elastic plastic.
  • the spring element made of an elastic plastic.
  • that is Intermediate element also made of elastic material to ensure a good seal can.
  • the at least one intermediate element is made of elastomeric plastic. This may be a separate one or more compensation channels forming intermediate element.
  • the at least one compensation channel is provided in the Ventllplättchen.
  • a slot or a groove may be provided in the valve plate.
  • the at least one compensation channel formed thereby is in turn open at the top and has a corresponding compensation channel opening, which opens in particular in the oil chamber into a region in which gas or air is present.
  • a bore could be provided in the Ventllplättchen, wherein for manufacturing reasons, the provision of a slot or a groove is preferred. If a groove is provided, this is open in one direction. This opening of the groove can be closed by a housing wall, such as a flange of the housing.
  • the pumping chamber is connected to the oil chamber via a plurality of preferably parallel discharge channels.
  • the plurality of ejection channels may in this case be closed either with separate valve devices, wherein it is preferred to provide a common valve device.
  • This valve device may comprise a Ventllplättchen with multiple finger-like lugs, of Each finger-like approach a discharge channel is closed.
  • the spring element is preferably formed accordingly in this embodiment.
  • At least one of the plurality of ejection channels is connected to an integrated according to the invention in the valve means compensation channel.
  • several, in particular all, ejection channels are connected to a compensation channel.
  • a common equalization channel for a plurality of ejection channels or per ejection channel may be provided a separate equalization channel.
  • the valve plate is formed of an elastic, spring-back material.
  • a particularly good sealing of the valve plate can be achieved if the area of the valve plate which seals the discharge channel is located in an oil bath, so that an additional contact pressure is built up. Due to the increased tightness, a further and more efficient evacuation can be carried out.
  • FIG. 1 is a schematic sectional view of a first embodiment of a vacuum rotary vane pump
  • Fig. 2 is a schematic representation of the items of the
  • Fig. 3 is a schematic sectional view of a second embodiment of a vacuum rotary valve pump and Fig. 4 is a schematic representation of the items of the
  • a vacuum rotary vane pump (FIG. 1) has a housing 10. Within the housing 10, a rotor 14 is arranged in a pump chamber 12. The rotor 14 has in the illustrated embodiment, three slide slots 16, in each of which a slide 18 is arranged. The slides 18 are pressed by the rotation of the rotor 14 due to the centrifugal force against an inner wall 20 of the pump chamber.
  • a suction opening 22 which is connected to the space to be evacuated, medium is sucked from the space to be evacuated into a first area 24 of the pumping chamber 12.
  • the region 24 of the suction chamber 12 is bounded by two adjacent slides 18.
  • An area 28 of the suction space 12 located in front of the area 24 in the direction of rotation 26 is reduced by the rotation of the rotor 14, so that the medium located therein is compressed. From the region 28, the medium is conveyed through an ejection channel 30 from the suction chamber 12 in the direction of an oil chamber 32.
  • the oil chamber 32 is attached to a flange 34 of the housing 10 of the vacuum rotary vane pump.
  • the oil chamber 32 has an oil chamber or an oil bath 35, in which the oil supplied via the discharge channel 30, in particular together with the air taken from the space to be evacuated, collects.
  • valve means is an elastic valve pad 48 ( Figure 2) which is secured to the flange 34 of the housing 10, for example by means of a screw or nut 40. It is particularly preferred in the region of the outlet opening 36 that Place valve plate 48 in an oil bath 42.
  • a separate oil space is formed in the oil chamber 32 by an intermediate wall 44, wherein the oil flows in the direction of an arrow 47 when the oil space is filled.
  • a compensation channel is integrated according to the invention.
  • a compensation channel 50 is formed by an intermediate element 52.
  • the intermediate element 52 is in a preferred embodiment, a U-shaped made of elastic plastic part.
  • the valve has a valve plate 48.
  • the valve plate 48 which closes three mutually parallel discharge channels 30 in the illustrated embodiment, has finger-shaped projections 54 on this. These downward-pointing finger-shaped projections 54 each have a connection opening 56.
  • the connection opening 56 constitutes a connection between the discharge channel 30 and the compensation channel 50.
  • the intermediate elements 52 are arranged on the finger-shaped projections 54, wherein, for example, by means of gluing, fixing can take place.
  • An intermediate part 58 which is part of the intermediate element, closes off the front part of the respective compensation channels 50 facing away from a flange surface 47. Fixing of the intermediate part 58 likewise takes place by means of the screw 46.
  • the valve device has a spring element 60.
  • This spring element which is produced in particular from elastic plastic material, causes the valve plate 48 to be pressed back and thus the discharge channels 30 to be closed.
  • Both the intermediate part 58 and the spring element 60 have projections 62, 64 corresponding to the finger-shaped projections 54.
  • the compensation channels 50 are thus limited by the valve plate 48, the U-shaped intermediate elements 52 and the intermediate part 48.
  • the compensation channels 50 are connected to the discharge channels 30 via the connection openings 56.
  • the connection of the compensation channels 50 to an air space 53 of the oil chamber 32 takes place via compensation channel openings 66, which are arranged in the upper region of the intermediate elements.
  • an oil-enriched medium is conveyed from the region 28 in the direction of an arrow 68 into the discharge channel 30 during operation. Due to the pressure, the valve plate 48 is pushed back, so that the medium in the direction of an arrow 70 in the oil bath 42 and in the oil chamber 32 passes. A portion of the oil is in this case pressed into the Ausgieichskanäle 50, thus causing a seal.
  • the oil reservoir present in the channels 50 is drawn into the discharge channel 30 together with a small amount of air drawn in through the opening 66 from the air space 53 of the oil chamber 32.
  • the entrainment of air emulsifies the oil and thus reduces noise.
  • valve device 38 Due to the flow of oil or oil circulation in the area of the valve device 38, in particular of the valve plate 48, it is ensured that no deposits form here. In particular, pollution is the Valve device 38 avoided. As a result, jamming of the valve device 38 is avoided. Furthermore, a good seal is ensured and an influence of the valve tightness on the pump performance is avoided.
  • a second preferred embodiment (FIGS. 3 and 4), with the exception of the configuration of the valve device 38, has the same components, so that they are identified by the same reference numerals.
  • the mode of operation also corresponds to the mode of operation of the vacuum rotary vane pump described above with reference to FIGS. 1 and 2.
  • the at least one compensation channel is integrated into the valve device 38 such that a slot is provided in the valve plate 48 to form a compensation channel 72. This extends in the vertical direction over a large part of the valve plate in particular in one of the finger-shaped projections 54. The connection between the discharge channel 30 and the compensation channel 72 takes place in the lower region 74 of the slot.
  • the slot is bounded on the one side laterally by the valve plate 48 and on the other side by the flange surface 47 and by a correspondingly configured valve spring 60.
  • an intermediate part corresponding to the intermediate part 58 (FIG. be provided between the valve spring 60 and the valve plate 48.
  • the operation of the rotary vane vacuum pump shown in FIGS. 3 and 4 corresponds to that of the rotary vane vacuum pump illustrated in FIGS. 1 and 2.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

L'invention concerne une pompe à vide à palettes rotatives qui comprend une chambre d'aspiration (12) dans un logement (10). Un rotor (14) est monté de manière excentrique dans la chambre d'aspiration (12). Des palettes (18) sont reliées au rotor (14) de manière déplaçable. Un canal d'éjection (30) est en outre relié à la chambre d'aspiration (12) et à une chambre à huile (32). Un dispositif de soupape (38) est disposé entre le canal d'éjection (30) et la chambre à huile (32) pour empêcher le fluide de refluer de la chambre à huile (32) dans la chambre d'aspiration (12). Selon l'invention, au moins un canal de compensation (50, 72) est relié au canal d'éjection (30) et à la chambre à huile (32) et est intégré dans le dispositif de soupape (38).
EP13708741.7A 2012-03-22 2013-02-28 Pompe à vide à palettes rotatives Active EP2836722B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202012002882U DE202012002882U1 (de) 2012-03-22 2012-03-22 Vakuum-Drehschieberpumpe
PCT/EP2013/054004 WO2013139570A2 (fr) 2012-03-22 2013-02-28 Pompe à vide à palettes rotatives

Publications (2)

Publication Number Publication Date
EP2836722A2 true EP2836722A2 (fr) 2015-02-18
EP2836722B1 EP2836722B1 (fr) 2021-11-03

Family

ID=47845961

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13708741.7A Active EP2836722B1 (fr) 2012-03-22 2013-02-28 Pompe à vide à palettes rotatives

Country Status (5)

Country Link
EP (1) EP2836722B1 (fr)
CN (1) CN104204533B (fr)
DE (1) DE202012002882U1 (fr)
ES (1) ES2900750T3 (fr)
WO (1) WO2013139570A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202014009218U1 (de) 2014-07-11 2015-10-14 GM Global Technology Operations LLC (n. d. Ges. d. Staates Delaware) Drehschiebervakuumpumpe
FR3048462B1 (fr) * 2016-03-03 2020-01-10 Mil's Pompe, notamment a palettes lubrifiees
CN108119297B (zh) * 2017-11-14 2019-09-10 武汉船用机械有限责任公司 一种液压马达壳体和液压马达
WO2024078678A1 (fr) 2022-10-10 2024-04-18 Busch Produktions Gmbh Pompe rotative améliorée à palettes coulissantes
CN117212157B (zh) * 2023-11-08 2024-02-27 江苏芬奇工业设备制造有限公司 一种可自动润滑旋片的旋片式真空泵

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3326456A (en) * 1965-09-13 1967-06-20 Prec Scient Company Check valve for a vacuum pump
US3301474A (en) 1965-09-24 1967-01-31 Bendix Balzers Vacuum Inc Oil sealed mechanical rotary vacuum pump
GB1336873A (en) * 1970-01-31 1973-11-14 Gen Eng Radcliffe Vacuum pumps
WO2007003215A1 (fr) * 2005-07-05 2007-01-11 Vhit S.P.A. Pompe à vide à palettes avec soupape de refoulement
DE102005031718A1 (de) 2005-07-07 2007-01-18 Leybold Vacuum Gmbh Vakuum-Drehschieberpumpe
DE102007005216B4 (de) * 2007-01-29 2015-07-30 Pierburg Gmbh Vakuumpumpe
WO2009018906A1 (fr) * 2007-08-04 2009-02-12 Ixetic Hückeswagen Gmbh Pompe à vide
DE102010044898A1 (de) * 2010-09-09 2012-03-15 Schwäbische Hüttenwerke Automotive GmbH Vakuumpumpe mit Lüftungseinrichtung
CN201891609U (zh) * 2010-10-11 2011-07-06 王晟 一种真空泵排气装置的改进结构
CN202157963U (zh) * 2011-07-22 2012-03-07 上海真空泵厂有限公司 一种新型防返油旋片式真空泵

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
None *
See also references of WO2013139570A2 *

Also Published As

Publication number Publication date
ES2900750T3 (es) 2022-03-18
EP2836722B1 (fr) 2021-11-03
CN104204533B (zh) 2017-03-08
WO2013139570A3 (fr) 2014-07-03
CN104204533A (zh) 2014-12-10
DE202012002882U1 (de) 2013-06-25
WO2013139570A2 (fr) 2013-09-26

Similar Documents

Publication Publication Date Title
EP1899608B1 (fr) Pompe a vide a tiroirs rotatifs
EP0547404B1 (fr) Pompe à membrane actionnée hydrauliquement avec limitation du mouvement de la membrane
EP2836722B1 (fr) Pompe à vide à palettes rotatives
WO2001094791A1 (fr) Pompe
DE3013006A1 (de) Drehkolbenverdichter
DE1728282A1 (de) Mechanische Vakuum-Rotorpumpe vom Schraubentyp
DE1628144B2 (de) Saugdrosselsteuereinrichtung
DE2308265A1 (de) Rotations- bzw. drehkolbenverdichter anlage mit oelkreislauf und ventilanordnungen
DE1503507C3 (de) Flügelzellenverdichter
EP0084085B1 (fr) Pompe à vide avec une soupape dans la tubulure d'aspiration et son procédé de mise en activité
DE102007010729B3 (de) Vakuumpumpe
EP0084084A1 (fr) Pompe à vide à joint d'huile
DE202012002883U1 (de) Vakuum-Drehschieberpumpe
EP3008343B1 (fr) Pompe à vide ainsi que procédé permettant de faire fonctionner une pompe à vide
DE4008522C2 (fr)
WO2010025799A2 (fr) Pompe à vide
DE2029280A1 (de) Vakuumpumpe
DE4425406A1 (de) Abstützkonstruktion für eine Drehwelle eines Kompressors
DE202005022024U1 (de) Vakuum-Drehschieberpumpe
DE10130953C2 (de) Flügelzellen- oder Rollenzellenpumpe
DE202012002881U1 (de) Vakuum-Drehschieberpumpe
EP0608796A1 (fr) Distributeur de pression/aspiration d'un appareil de nettoyage à haute pression avec valve de commande additionelle
DE19918393B4 (de) Hydraulische Fördereinrichtung
DE2157637B2 (de) Flügelzellenpumpe oder -motor
DE2843170A1 (de) Anordnung in einem kompressor zur draenierung von fluessigkeit

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20141017

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAX Request for extension of the european patent (deleted)
RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: LEYBOLD GMBH

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20161209

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20210611

RIN1 Information on inventor provided before grant (corrected)

Inventor name: FIGONI, ERIC

Inventor name: BREGIER, LAURENT

Inventor name: JEZIOROWSKI, FREDERIC

Inventor name: AUBERT, JEAN-FRANCOIS

Inventor name: FURRER, LAURENT

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1444185

Country of ref document: AT

Kind code of ref document: T

Effective date: 20211115

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502013015972

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20211103

REG Reference to a national code

Ref country code: ES

Ref legal event code: FG2A

Ref document number: 2900750

Country of ref document: ES

Kind code of ref document: T3

Effective date: 20220318

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220203

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220303

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220303

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220203

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220204

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502013015972

Country of ref document: DE

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

26N No opposition filed

Effective date: 20220804

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20220228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220228

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220228

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 1444185

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220228

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230422

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20130228

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: ES

Payment date: 20240319

Year of fee payment: 12

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240215

Year of fee payment: 12

Ref country code: CZ

Payment date: 20240216

Year of fee payment: 12

Ref country code: CH

Payment date: 20240301

Year of fee payment: 12

Ref country code: GB

Payment date: 20240222

Year of fee payment: 12

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20240229

Year of fee payment: 12

Ref country code: FR

Payment date: 20240222

Year of fee payment: 12

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20211103