EP3008343B1 - Pompe à vide ainsi que procédé permettant de faire fonctionner une pompe à vide - Google Patents

Pompe à vide ainsi que procédé permettant de faire fonctionner une pompe à vide Download PDF

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Publication number
EP3008343B1
EP3008343B1 EP14726958.3A EP14726958A EP3008343B1 EP 3008343 B1 EP3008343 B1 EP 3008343B1 EP 14726958 A EP14726958 A EP 14726958A EP 3008343 B1 EP3008343 B1 EP 3008343B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
switching element
check valve
closing
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14726958.3A
Other languages
German (de)
English (en)
Other versions
EP3008343A1 (fr
Inventor
Christophe DESPESSE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold GmbH filed Critical Leybold GmbH
Priority to PL14726958T priority Critical patent/PL3008343T3/pl
Publication of EP3008343A1 publication Critical patent/EP3008343A1/fr
Application granted granted Critical
Publication of EP3008343B1 publication Critical patent/EP3008343B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28Safety arrangements; Monitoring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02Lubrication; Lubricant separation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet

Definitions

  • the invention relates to a vacuum pump and a method for operating a vacuum pump.
  • Vacuum pumps such as, for example, rotary vane pumps, have a suction chamber in a pump housing.
  • a conveying element In the pumping chamber for conveying a gaseous medium, a conveying element is arranged.
  • the conveying element In a rotary vane pump, the conveying element has an eccentrically arranged in the cylindrical suction chamber rotor element in which a plurality of slides are arranged. The slides are slidably held in slots of the rotor element and abut against the inside of the pump chamber.
  • the eccentrically arranged rotor element By rotating the eccentrically arranged rotor element, the medium is conveyed by means of the chambers, which change in size through the rotation and are arranged between adjacent slides, from an inlet of the pump chamber to an outlet.
  • a check valve is arranged in the region of the inlet. In a mechanical embodiment of the check valve, this is adjusted via a spring. In order to ensure a safe closing of the suction nozzle, the valve must be close to its Be set sealing surface. At low pressures, in particular less than 1 mbar at the pump inlet, there is the disadvantage that the delivery rate of the pump decreases at low pressures.
  • the object of the invention is to provide a vacuum pump and a method for operating a vacuum pump, wherein even at low pressures of in particular less than 1 mbar at the inlet, even without provision of an electromagnetic valve, the highest possible pumping power can be achieved.
  • the object is achieved according to the invention by a vacuum pump according to claim 1 and a method for operating a vacuum pump according to claim 7.
  • the vacuum pump according to the invention which may in particular be a rotary vane pump, has a suction chamber in a housing. At least one conveying element is arranged in the suction space.
  • a rotary vane pump is an eccentrically arranged in a cylindrical suction chamber, cylindrical conveyor element with slidable slides. The slides are located on the inner wall of the pump chamber.
  • the suction space is connected to an inlet and an outlet. Due to the rotational movement of the conveyor element, in particular, a gaseous medium is conveyed through the inlet in the direction of the outlet in order to evacuate a space connected to the inlet.
  • a check valve is arranged, which closes the inlet when the vacuum pump is switched off.
  • the check valve may be integrated in an inlet channel forming the inlet.
  • a fluid device is provided according to the invention.
  • the fluid device acts on turning off the vacuum pump to close the check valve on this.
  • This has the advantage that the check valve is wide and in particular fully opened even at low pressures in the inlet region. As a result, a large pump power can continue to be realized even at low pressures.
  • By providing the check valve actuating fluid device it is possible to increase the gap between the check valve and the suction port compared to a mechanical spring-set check valve. Optionally, such a spring can be completely eliminated.
  • this has a fluidically actuated switching element such as a control piston.
  • a fluid acts to close the check valve on the check valve.
  • the switching element is connected via a connecting channel to the check valve, wherein the connecting channel is connected either directly to the check valve or via the inlet channel, through which the medium to be conveyed is sucked into the suction chamber.
  • the switching element of the fluid device is connected to a feed channel in which a pressurized fluid is provided. With the aid of the pressurized fluid, a pressure is exerted on the switching piston during operation of the vacuum pump, so that it is held in a closed position. In the closed position, the connecting channel between the switching element and the check valve is closed. This is particularly advantageous if the connecting channel is not connected directly to the check valve, but indirectly via the inlet channel with the check valve, since otherwise fluid would be sucked from the connecting channel into the pump chamber of the vacuum pump.
  • the supply channel is connected to the connecting channel by actuation of the switching element, ie in particular by displacement of the switching piston. Then, fluid flows from the supply channel through the connecting channel and possibly through the inlet channel in the direction of the check valve and closes it, so that after switching off the vacuum pump no medium can flow back into the evacuated space.
  • the switching element is connected to a closing channel.
  • actuation of the switching element can take place.
  • pressure it is particularly preferable for pressure to be applied to the switching element via the closing channel during the operation of the vacuum pump during the operation of the vacuum pump. With a corresponding pressure reduction or a corresponding pressure drop then takes place opening of the switching element, i. in particular, a displacement of the control piston.
  • the construction of pressure in the closing channel this is connected to the outlet of the vacuum pump. Since there is a significantly higher pressure at the outlet of the vacuum pump than at the inlet of the vacuum pump, it is possible to conduct this pressure for closing the switching element via the closing channel to the switching element, so that the pressure acts in particular on the switching piston.
  • the pressure at the pump outlet drops.
  • the pressure in the closing channel connected to the outlet or the outlet region also decreases. This results in an opening of the fluid device.
  • the opening process can be assisted by a spring, for example.
  • a support can take place due to a pressure acting on the switching element via the feed channel.
  • the switching element is configured such that the pressure prevailing in the closing channel and the pressure prevailing in the supply channel in the opposite direction acts on the switching element in particular on opposing piston surfaces of the switching piston.
  • the feed channel is connected to a pressure generating device of the vacuum pump. This is in particular the compression zone in the vacuum generator just before its outlet.
  • the piston geometry of the switching element is designed such that the switching element has a cavity which is connected to the feed channel. As a result, a corresponding effective area is formed within the switching element.
  • the above-described inventive principle of the action on a check valve by means of a fluid device is not limited to rotary vane pumps, but can also be used in vacuum pumps of other types. Regardless of the design of the vacuum pump, it is particularly preferred that the conveyed medium is used as the fluid which is supplied to the switching channel and serves to switch the switching element, in particular the switching piston.
  • An oil-lubricated vacuum pump such as a rotary vane pump, is a mixture of gas and oil since the oil which seals the rotary vane relative to the inner wall of the suction chamber is carried in small quantities.
  • the invention relates to a method for operating the above-described vacuum pump. This is advantageously developed as described above.
  • the switching of the check valve is carried out according to the inventive method when switching off the vacuum pump fluidic actuation of the switching element, ie in particular the switching piston of the fluid device, whereby the check valve is thereby closed.
  • fluid is conveyed in the direction of the check valve or flows in the direction of the check valve.
  • the fluid preferably flows through the supply channel via the switching element into the connecting channel.
  • fluid is supplied to the closing channel for closing the switching element during the pressure build-up operation, wherein this fluid is, in particular, fluid conveyed by the vacuum pump.
  • this fluid is, in particular, the fluid delivered by the vacuum pump from the space to be evacuated, in particular gas.
  • the method is advantageously developed as described above with reference to the device.
  • FIG. 1 is shown as an example of a vacuum pump, a rotary vane pump.
  • This has a housing 10 in which a pump chamber 12 is formed.
  • a rotary member 14 (pump rotor) is formed, which together with Sliders 16 forms a conveyor element.
  • the sliders 16 are slidable in slots 18 disposed in the rotor element 14.
  • an oil supply into the slots 18 takes place via an internal oil supply, so that the oil seals the slides 16 with respect to the inner wall 20 of the pump chamber 12.
  • the rotation element 14 is arranged eccentrically, by rotating the rotation element 14, a conveying of in particular gaseous medium, which is sucked through an inlet 22 and expelled through an outlet 24, takes place.
  • the inlet 22 is connected to an inlet port 26.
  • the suction of the medium to be conveyed takes place, so that a space connected to the inlet pipe 26 to be evacuated space is evacuated.
  • a check valve 28 and possibly a filter element or sieve 30 is arranged within the inlet 22, 26.
  • a fluid means 36 is provided.
  • This has a connecting channel 38, which is arranged in the illustrated embodiment between a switching element 40 and the connecting channel 38.
  • the fluid device 36 has a supply channel 42 connected to the oil box or oil reservoir, which also communicates with the switching element 40 connected is.
  • a cavity 43 is provided within the switching element 40, into which the feed channel 42 opens.
  • a closing channel 44 is connected to the switching element 40. The closing channel 44 is further connected to the outlet 24 of the vacuum generator or in the region of the outlet 24 with the suction chamber 12.
  • the medium sucked into the chambers 32 through the inlet channel 22 is compressed, so that there is a higher pressure at the outlet 24 than at the inlet 22. Due to the connection with the closing channel 44, this pressure also prevails on the switching element 40, which is designed in particular as a switching piston. By this pressure, the switching element 40 is closed, so that no fluid enters the connecting channel 38 (FIG. Fig. 2 ). At the same time, a pressure is applied to the switching element 40 via the feed channel 42, which, however, exerts a smaller force on the switching piston 40 as a function of the effective piston surfaces than the pressure prevailing in the closing channel 44. This ensures that the fluid device 36 remains closed during operation.
  • the piston 40 preferably has a cavity into which fluid when the valve is closed ( Fig. 2 ) flows through the feed channel 42 so that these a force on the piston in Fig. 2 exerts to the left, wherein the counterforce is generated by the pressure prevailing in the switching channel 44.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Claims (11)

  1. Pompe à vide, notamment pompe à vide à palettes, avec
    une chambre d'aspiration (12) formée dans un carter de pompe (10),
    un élément de transport (14, 15) disposé dans la chambre d'aspiration,
    une entrée (22) reliée à la chambre d'aspiration (12) et une sortie (24) reliée à la chambre d'aspiration (12),
    une valve anti-retour (28) fermant l'entrée (22) lors de l'arrêt de la pompe à vide,
    un dispositif à fluide (36) agissant sur la valve anti-retour (28) lors de l'arrêt de la pompe à vide pour fermer la valve anti-retour (28), avec un élément de commutation (40) actionné de manière fluidique qui est relié à un canal de fermeture (44) et, via un canal de liaison (38), à la valve anti-retour (28),
    le canal de fermeture (44) étant relié à la sortie (24) de la pompe à vide, si bien qu'une pression soit appliquée à l'élément de commutation (40) pendant le fonctionnement de la pompe à vide, qui ferme l'élément de commutation (40),
    caractérisée en ce que
    l'élément de commutation (40) est relié à un canal d'amenée (42) comprenant un fluide sous pression.
  2. Pompe à vide selon la revendication 1, caractérisée en ce que l'élément de commutation (40) actionné de manière fluidique comprend un piston de commutation.
  3. Pompe à vide selon la revendication 1 ou 2, caractérisée en ce que, lors de l'arrêt de la pompe à vide, le canal d'amenée (42) est relié au canal de liaison (38) par un actionnement de l'élément de commutation (40).
  4. Pompe à vide selon l'une des revendications 1 à 3, caractérisée en ce que la pression régnant dans le canal de fermeture (44) et la pression régnant dans le canal d'amenée (42) agissent sur l'élément de commutation (40), notamment sur des faces de piston opposées du piston de commutation, dans des directions opposées.
  5. Pompe à vide selon l'une des revendications 1 à 4, caractérisée en ce qu'il est prévu dans l'élément de commutation (40), notamment dans le piston de commutation, un espace creux (43) qui est relié au canal d'amenée (42).
  6. Pompe à vide selon l'une des revendications 1 à 5, caractérisée en ce que le canal d'amenée (42) est relié à un dispositif de génération de pression.
  7. Procédé permettant de faire fonctionner une pompe à vide selon l'une des revendications 1 à 6, selon lequel, lors de l'arrêt de la pompe à vide, la valve anti-retour (28) est fermée par un actionnement fluidique de l'élément de commutation (40) du dispositif à fluide (36).
  8. Procédé permettant de faire fonctionner une pompe à vide selon la revendication 7, selon lequel, pour fermer la valve anti-retour (28), un fluide, notamment un agent lubrifiant, passe par le canal de liaison (38) en direction de la valve anti-retour (28).
  9. Procédé permettant de faire fonctionner une pompe à vide selon la revendication 7 ou 8, selon lequel, pour fermer l'élément de commutation (40) pendant le fonctionnement, du fluide est amené au canal de fermeture (44) pour engendrer de la pression.
  10. Procédé permettant de faire fonctionner une pompe à vide selon la revendication 9, selon lequel le fluide sous pression est produit par la pompe à vide, le fluide étant plus particulièrement celui aspiré par la pompe à vide, de la chambre à évacuer.
  11. Procédé permettant de faire fonctionner une pompe à vide selon l'une des revendications 7 à 10, selon lequel, lors de l'arrêt de la pompe à vide, le canal d'amenée (42) est relié au canal de liaison (38) par un actionnement de l'élément de commutation (40).
EP14726958.3A 2013-06-11 2014-05-26 Pompe à vide ainsi que procédé permettant de faire fonctionner une pompe à vide Active EP3008343B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL14726958T PL3008343T3 (pl) 2013-06-11 2014-05-26 Pompa próżniowa oraz sposób eksploatacji pompy próżniowej

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013210854.0A DE102013210854A1 (de) 2013-06-11 2013-06-11 Vakuumpumpe sowie Verfahren zum Betreiben einer Vakuumpumpe
PCT/EP2014/060838 WO2014198524A1 (fr) 2013-06-11 2014-05-26 Pompe à vide ainsi que procédé permettant de faire fonctionner une pompe à vide

Publications (2)

Publication Number Publication Date
EP3008343A1 EP3008343A1 (fr) 2016-04-20
EP3008343B1 true EP3008343B1 (fr) 2019-07-10

Family

ID=50841779

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14726958.3A Active EP3008343B1 (fr) 2013-06-11 2014-05-26 Pompe à vide ainsi que procédé permettant de faire fonctionner une pompe à vide

Country Status (7)

Country Link
EP (1) EP3008343B1 (fr)
CN (1) CN105378284B (fr)
DE (1) DE102013210854A1 (fr)
ES (1) ES2749125T3 (fr)
PL (1) PL3008343T3 (fr)
TW (1) TWI622703B (fr)
WO (1) WO2014198524A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3657019B1 (fr) * 2019-11-07 2022-01-05 Pfeiffer Vacuum Gmbh Pompe à vide et procédé pour ordonner l'arrêt d'une telle pompe à vide
CN113531986A (zh) * 2020-04-17 2021-10-22 海信(山东)冰箱有限公司 冰箱
CN113531990B (zh) * 2020-04-17 2023-04-18 海信冰箱有限公司 冰箱

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1195361A (en) * 1966-03-28 1970-06-17 N G N Ltd Improvements in and relating to Vacuum Pumping apparatus including a Rotary Vacuum Pump
DE2612024A1 (de) * 1976-03-20 1977-09-22 Barmag Barmer Maschf Vakuumpumpe fuer bremskraftverstaerker in kraftfahrzeugen
FR2383335A1 (fr) * 1977-03-08 1978-10-06 Leybold Heraeus Sogev Pompe mecanique a joint d'huile
AU5180279A (en) * 1978-10-27 1980-05-01 Dynavac Pty. Ltd. Vacuum pump inlet valve
DE3150033A1 (de) * 1981-12-17 1983-07-14 Leybold-Heraeus GmbH, 5000 Köln Vakuumpumpe mit einem saugstutzen-ventil und betriebsverfahren dafuer
GB9223806D0 (en) * 1992-11-13 1993-01-06 Boc Group Plc Improvements in vacuum pumps
JPH10339288A (ja) * 1993-06-08 1998-12-22 Hitachi Ltd 偏心形ベーンポンプ
CN2471974Y (zh) * 2001-01-18 2002-01-16 成都无极真空科技有限公司 新直联式真空泵
KR100519567B1 (ko) * 2003-09-22 2005-10-11 김덕겸 로터리 베인형 진공펌프
US9494156B2 (en) * 2010-01-29 2016-11-15 Ulvac Kiko, Inc. Pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
PL3008343T3 (pl) 2020-01-31
DE102013210854A1 (de) 2014-12-11
CN105378284A (zh) 2016-03-02
WO2014198524A1 (fr) 2014-12-18
ES2749125T3 (es) 2020-03-19
TW201510362A (zh) 2015-03-16
EP3008343A1 (fr) 2016-04-20
TWI622703B (zh) 2018-05-01
CN105378284B (zh) 2017-07-25

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