EP2835220B1 - Abrichtwerkzeug sowie ein Verfahren zu dessen Herstellung - Google Patents
Abrichtwerkzeug sowie ein Verfahren zu dessen Herstellung Download PDFInfo
- Publication number
- EP2835220B1 EP2835220B1 EP13179579.1A EP13179579A EP2835220B1 EP 2835220 B1 EP2835220 B1 EP 2835220B1 EP 13179579 A EP13179579 A EP 13179579A EP 2835220 B1 EP2835220 B1 EP 2835220B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- recesses
- hard
- main body
- material grains
- grain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 238000000034 method Methods 0.000 title claims description 7
- 238000009966 trimming Methods 0.000 title 1
- 239000000463 material Substances 0.000 claims description 32
- 239000000853 adhesive Substances 0.000 claims description 15
- 230000001070 adhesive effect Effects 0.000 claims description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- 238000009826 distribution Methods 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 3
- 229910000679 solder Chemical group 0.000 claims description 2
- 239000010432 diamond Substances 0.000 description 13
- 229910003460 diamond Inorganic materials 0.000 description 11
- 239000002245 particle Substances 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/04—Devices or means for dressing or conditioning abrasive surfaces of cylindrical or conical surfaces on abrasive tools or wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/06—Devices or means for dressing or conditioning abrasive surfaces of profiled abrasive wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0072—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using adhesives for bonding abrasive particles or grinding elements to a support, e.g. by gluing
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES13179579T ES2756849T3 (es) | 2013-08-07 | 2013-08-07 | Herramienta rectificadora y procedimiento para su fabricación |
EP13179579.1A EP2835220B1 (de) | 2013-08-07 | 2013-08-07 | Abrichtwerkzeug sowie ein Verfahren zu dessen Herstellung |
US14/905,398 US10160095B2 (en) | 2013-08-07 | 2014-07-18 | Dressing tool and method for the production thereof |
RU2016103056A RU2675328C2 (ru) | 2013-08-07 | 2014-07-18 | Правящий инструмент и способ его изготовления |
JP2016532297A JP2016527095A (ja) | 2013-08-07 | 2014-07-18 | 目直しツール及びこれを生産するための方法 |
PCT/EP2014/065484 WO2015018627A1 (de) | 2013-08-07 | 2014-07-18 | Abrichtwerkzeug sowie ein verfahren zu dessen herstellung |
BR112016001035-3A BR112016001035B1 (pt) | 2013-08-07 | 2014-07-18 | Ferramenta de desbaste e método para a produção da mesma |
CN201480040678.0A CN105612028B (zh) | 2013-08-07 | 2014-07-18 | 修整工具以及用于制造修整工具的方法 |
KR1020157036998A KR102256194B1 (ko) | 2013-08-07 | 2014-07-18 | 드레싱 공구 및 이의 제조 방법 |
JP2019017688A JP7043438B2 (ja) | 2013-08-07 | 2019-02-04 | 目直しツール及びこれを生産するための方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP13179579.1A EP2835220B1 (de) | 2013-08-07 | 2013-08-07 | Abrichtwerkzeug sowie ein Verfahren zu dessen Herstellung |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2835220A1 EP2835220A1 (de) | 2015-02-11 |
EP2835220B1 true EP2835220B1 (de) | 2019-09-11 |
Family
ID=48918287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP13179579.1A Active EP2835220B1 (de) | 2013-08-07 | 2013-08-07 | Abrichtwerkzeug sowie ein Verfahren zu dessen Herstellung |
Country Status (9)
Country | Link |
---|---|
US (1) | US10160095B2 (zh) |
EP (1) | EP2835220B1 (zh) |
JP (2) | JP2016527095A (zh) |
KR (1) | KR102256194B1 (zh) |
CN (1) | CN105612028B (zh) |
BR (1) | BR112016001035B1 (zh) |
ES (1) | ES2756849T3 (zh) |
RU (1) | RU2675328C2 (zh) |
WO (1) | WO2015018627A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2783794B1 (de) | 2013-03-26 | 2017-09-27 | Reishauer AG | Schleifscheibe sowie Verfahren zu ihrer Verstärkung |
ES2756849T3 (es) | 2013-08-07 | 2020-04-27 | Reishauer Ag | Herramienta rectificadora y procedimiento para su fabricación |
MX2018009428A (es) * | 2016-02-22 | 2018-11-09 | Almt Corp | Herramienta abrasiva. |
CN109963690B (zh) * | 2016-11-16 | 2021-04-20 | 丰田万磨株式会社 | 齿轮磨削用螺纹状磨具的成型用电沉积金刚石修整器以及其制造方法 |
JP6203980B1 (ja) * | 2017-06-09 | 2017-09-27 | 日本精工株式会社 | 総型ロータリードレッサー及びドレッシング方法 |
CN109262076B (zh) * | 2018-09-29 | 2020-04-10 | 重庆大学 | 一种rv摆线齿轮的高效精密磨削加工方法 |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU50662A1 (ru) * | 1936-04-13 | 1936-11-30 | М.М. Богословский | Способ изготовлени мелко-алмазного инструмента дл правки шлифовальных кругов |
SU831591A1 (ru) * | 1977-07-15 | 1981-05-23 | Fishbejn Efim | Способ изготовлени прав щего инстру-MEHTA |
DE3503914A1 (de) * | 1985-02-06 | 1986-08-07 | Horst 6450 Hanau Lach | Abrichtwerkzeug |
JPS6384946A (ja) * | 1986-09-30 | 1988-04-15 | Tdk Corp | サ−マルヘツド |
JPH027958U (zh) * | 1988-06-27 | 1990-01-18 | ||
US4925457B1 (en) * | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Method for making an abrasive tool |
CH684581A5 (de) * | 1990-11-07 | 1994-10-31 | Reishauer Ag | Verfahren und Vorrichtung zum Profilieren von Schleifscheiben. |
JPH05277951A (ja) * | 1991-03-20 | 1993-10-26 | Toyoda Mach Works Ltd | 砥石修正用ダイヤモンドロールの製造方法 |
US5453106A (en) * | 1993-10-27 | 1995-09-26 | Roberts; Ellis E. | Oriented particles in hard surfaces |
US6478831B2 (en) * | 1995-06-07 | 2002-11-12 | Ultimate Abrasive Systems, L.L.C. | Abrasive surface and article and methods for making them |
US5725421A (en) * | 1996-02-27 | 1998-03-10 | Minnesota Mining And Manufacturing Company | Apparatus for rotative abrading applications |
KR100328108B1 (ko) * | 1996-10-15 | 2002-03-09 | 아사무라 타카싯 | 반도체 기판용 연마패드의 드레서, 그 제조방법 및 그것을 사용한 화학적 기계적 연마방법 |
US7491116B2 (en) * | 2004-09-29 | 2009-02-17 | Chien-Min Sung | CMP pad dresser with oriented particles and associated methods |
JP3052896B2 (ja) * | 1997-06-13 | 2000-06-19 | 日本電気株式会社 | 研磨布表面のドレス治具及びその製造方法 |
KR19990081117A (ko) * | 1998-04-25 | 1999-11-15 | 윤종용 | 씨엠피 패드 컨디셔닝 디스크 및 컨디셔너, 그 디스크의 제조방법, 재생방법 및 세정방법 |
DE29819006U1 (de) * | 1998-10-26 | 1999-02-04 | Kaiser Michael Dr Ing | Diamant-Abrichtscheibe |
US7201645B2 (en) * | 1999-11-22 | 2007-04-10 | Chien-Min Sung | Contoured CMP pad dresser and associated methods |
US6702654B2 (en) * | 2001-02-07 | 2004-03-09 | Agere Systems Inc. | Conditioning wheel for conditioning a semiconductor wafer polishing pad and method of manufacture thereof |
JP4508514B2 (ja) * | 2001-03-02 | 2010-07-21 | 旭ダイヤモンド工業株式会社 | Cmpコンディショナ及びその製造方法 |
DE50209649D1 (de) | 2002-01-25 | 2007-04-19 | Wendt Gmbh | Abrichtrolle und Verfahren zur Herstellung einer Abrichtrolle |
US6945857B1 (en) * | 2004-07-08 | 2005-09-20 | Applied Materials, Inc. | Polishing pad conditioner and methods of manufacture and recycling |
US20070060026A1 (en) * | 2005-09-09 | 2007-03-15 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
JP4781358B2 (ja) | 2005-06-27 | 2011-09-28 | 株式会社アライドマテリアル | 歯車用ダイヤモンドロータリードレッサならびにそれを用いた歯車加工用砥石のツルーイングおよびドレッシング方法 |
TWI290337B (en) * | 2005-08-09 | 2007-11-21 | Princo Corp | Pad conditioner for conditioning a CMP pad and method of making the same |
KR101293461B1 (ko) * | 2005-08-25 | 2013-08-07 | 이시즈카히로시 | 소결체 연마부가 구비된 공구 및 그 제조 방법 |
CN1931522A (zh) * | 2005-09-13 | 2007-03-21 | 巨擘科技股份有限公司 | 修整晶圆研磨垫的修整器及其制造方法 |
WO2008027714A1 (en) * | 2006-08-30 | 2008-03-06 | 3M Innovative Properties Company | Extended life abrasive article and method |
AT504926B1 (de) * | 2007-02-21 | 2009-10-15 | Rappold Winterthur Technologie | Abrichtwerkzeug |
TW200906546A (en) * | 2007-08-07 | 2009-02-16 | Tian-Yuan Yan | Adjusting device for resin-bonded polishing pad and manufacturing method thereof |
TW201000259A (en) * | 2008-06-25 | 2010-01-01 | Kinik Co | Diamond polishing disk and manufacturing method thereof |
JP2010149221A (ja) * | 2008-12-25 | 2010-07-08 | Kyocera Corp | ドレッシング工具およびドレッシング方法 |
US20110104989A1 (en) * | 2009-04-30 | 2011-05-05 | First Principles LLC | Dressing bar for embedding abrasive particles into substrates |
DE102009059201B4 (de) | 2009-12-17 | 2012-02-02 | Reishauer Ag | Vollprofilrolle zum Abrichten mehrgängiger zylindrischer Schleifschnecken |
TW201246342A (en) * | 2010-12-13 | 2012-11-16 | Saint Gobain Abrasives Inc | Chemical mechanical planarization (CMP) pad conditioner and method of making |
CH704729A2 (de) | 2011-03-22 | 2012-09-28 | Reishauer Ag | Verfahren und Einrichtung und Herstellung eines Grundkörpers mit Hartstoffpartikeln. |
ES2756849T3 (es) | 2013-08-07 | 2020-04-27 | Reishauer Ag | Herramienta rectificadora y procedimiento para su fabricación |
-
2013
- 2013-08-07 ES ES13179579T patent/ES2756849T3/es active Active
- 2013-08-07 EP EP13179579.1A patent/EP2835220B1/de active Active
-
2014
- 2014-07-18 CN CN201480040678.0A patent/CN105612028B/zh active Active
- 2014-07-18 US US14/905,398 patent/US10160095B2/en active Active
- 2014-07-18 JP JP2016532297A patent/JP2016527095A/ja active Pending
- 2014-07-18 WO PCT/EP2014/065484 patent/WO2015018627A1/de active Application Filing
- 2014-07-18 RU RU2016103056A patent/RU2675328C2/ru active
- 2014-07-18 BR BR112016001035-3A patent/BR112016001035B1/pt active IP Right Grant
- 2014-07-18 KR KR1020157036998A patent/KR102256194B1/ko active IP Right Grant
-
2019
- 2019-02-04 JP JP2019017688A patent/JP7043438B2/ja active Active
Non-Patent Citations (1)
Title |
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None * |
Also Published As
Publication number | Publication date |
---|---|
JP2016527095A (ja) | 2016-09-08 |
RU2016103056A (ru) | 2017-09-08 |
CN105612028B (zh) | 2019-10-22 |
ES2756849T3 (es) | 2020-04-27 |
JP2019089199A (ja) | 2019-06-13 |
CN105612028A (zh) | 2016-05-25 |
KR102256194B1 (ko) | 2021-05-26 |
US10160095B2 (en) | 2018-12-25 |
JP7043438B2 (ja) | 2022-03-29 |
EP2835220A1 (de) | 2015-02-11 |
RU2675328C2 (ru) | 2018-12-18 |
WO2015018627A1 (de) | 2015-02-12 |
BR112016001035B1 (pt) | 2022-01-11 |
US20160176018A1 (en) | 2016-06-23 |
KR20160040146A (ko) | 2016-04-12 |
BR112016001035A2 (zh) | 2017-07-25 |
RU2016103056A3 (zh) | 2018-06-25 |
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