EP2830988A1 - Récipient servant à la manutention et au transport de produits chimiques très purs et ultra-purs - Google Patents

Récipient servant à la manutention et au transport de produits chimiques très purs et ultra-purs

Info

Publication number
EP2830988A1
EP2830988A1 EP13703806.3A EP13703806A EP2830988A1 EP 2830988 A1 EP2830988 A1 EP 2830988A1 EP 13703806 A EP13703806 A EP 13703806A EP 2830988 A1 EP2830988 A1 EP 2830988A1
Authority
EP
European Patent Office
Prior art keywords
empty container
dip tube
connection unit
container according
purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP13703806.3A
Other languages
German (de)
English (en)
Inventor
Ekkehard MÜH
Hartwig Rauleder
Bernd Nowitzki
Harald Klein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evonik Operations GmbH
Original Assignee
Evonik Degussa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Evonik Degussa GmbH filed Critical Evonik Degussa GmbH
Publication of EP2830988A1 publication Critical patent/EP2830988A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0288—Container connection means
    • B67D7/0294—Combined with valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B3/00—Packaging plastic material, semiliquids, liquids or mixed solids and liquids, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0244—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags
    • B67D7/025—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by using elastic expandable bags specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0255—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers squeezing collapsible or flexible storage containers
    • B67D7/0261—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers squeezing collapsible or flexible storage containers specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
    • B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/06—Details or accessories
    • B67D7/84—Casings, cabinets or frameworks; Trolleys or like movable supports

Definitions

  • the invention relates to specially designed empty containers for receiving high purity and ultra high purity, air and / or moisture sensitive chemicals, with a unit for connecting, filling, emptying and rinsing this empty container and its use.
  • silicon compounds used in microelectronics have to meet very high purity requirements.
  • the corresponding silicon compounds are used, inter alia, for producing high-purity, thin layers of silicon by means of epitaxy or silicon nitride (SiN), silicon oxide (SiO), silicon oxynitride (SiON), silicon oxycarbide (SiOC) or
  • SiC Silicon carbide
  • High-purity or ultrahigh-purity chemicals are used in particular in the semiconductor industry, where ultrahigh-purity or "electronic grade" silicon and germanium compounds are currently already being consumed on a scale of hundreds of tons, in particular trichlorosilane.
  • Silicon tetrachloride or tetraethoxysilane which are used for the production of epitaxial silicon layers on a Si wafer or for the production of silicon dioxide insulating layers on electronic chips.
  • Flushing system with two valves and a valve for cross-purge (cross-purge) and normalized connections have, but it is not guaranteed that even after a flushing process for refilling still remains (hereinafter referred to as tilt) remain of the previous product in the container and can lead to significant contamination new-to-use high purity and ultra high purity products, although the person skilled in the implementation of a rinsing process is usually known or specified by operating instructions.
  • the object of the present invention was to provide a further system which makes it possible, in a simple and economical manner, the risk of contamination with regard to the handling and transport of high purity and ultra
  • Empty container (1) hereinafter also referred to as container for short - for holding highly pure and ultra-high purity, air and / or moisture sensitive liquid or condensable compounds, which essentially a container with cylindrical shell (3) and both sides of the cylindrical shell a bottom ( 4a) and an upper end (4b, 4b ' ), an associated connection unit (2) including shut-off / reusable and flushing system (5) and associated dip tube (7), wherein the lower end of the dip tube (7a) in a recess (4c) (trough), which is introduced or embedded in the bottom (4a) and represents the lowest point of the soil, protrudes and / or the lower end of the dip tube (7a) is beveled and with the tip of the tapered dip tube (7b) the deepest point of the bottom (4a) is approached to less than 2 mm, preferably less than or equal to 1 mm, or this touches the tip of the tapered dip tube (7b), to a deutl Minimization of contamination incidents in a refilling of the empty container leads.
  • Rinsing remaining tails again significantly reduce or reduce the number of rinses until the complete removal of impurities and so also to minimize the risk of contamination re-filling.
  • packages according to the invention are advantageous because of their mechanical and chemical properties, such as compressive strength, surface roughness of the inside of the container and surfaces that come into contact with product, the material used as well as the tightness of the empty container including connection unit, high purity or ultra high purity to absorb air- and / or moisture-sensitive liquid or condensable compounds.
  • Such high purity or ultra high purity compounds may include but are not limited to, for example, silicon or germanium compounds.
  • An example is the gaseous monosilane (SiH) at room temperature, which can be condensed under pressure into an empty container.
  • Silicon tetrachloride is one of
  • High-purity or ultra-high-purity compounds should be understood as compounds whose degree of impurity is in the ppb range; at ultra high purity, impurities are present only in the ppt range and below.
  • Metal compounds is in the ppb range to the ppt range, preferably in the ppt range.
  • the required purity can be determined by GC, IR, NMR, ICP-MS or by resistance measurement or GD-MS after deposition of the silicon or
  • Germanium be checked.
  • the present invention therefore relates to empty containers (1) for receiving highly pure and ultra-high purity, liquid and / or moisture-sensitive liquid or condensable compounds, with a cylindrical jacket (3) and a bottom (4a) and an upper end on both sides of the cylindrical jacket (4b, 4b ' ), an associated connection unit (2) including shut-off / reusable and flushing system (5) and associated immersion tube (7), which are characterized
  • the lower end of the dip tube (7a) is chamfered and with the tip of the tapered dip tube (7b) to the lowest point of the bottom (4a) to less than 2 mm, preferably less than or equal to 1 mm, or this with the tip of the beveled dip tube (7b) touched
  • beveled dip tube (7b) the lowest point of the bottom (4a), d. H. in the trough, to less than 2 mm, preferably less than or equal to 1 mm, approximated or touched with the tip of the tapered dip tube (7b).
  • the container (1) comprises a so-called container or interior
  • connection unit (2) (Inner volume) for receiving high-purity and ultrahigh-purity, air- and / or moisture-sensitive liquid or condensable compounds, essentially by the cylindrical shell (3) and on both sides of the cylindrical shell a bottom (4a) and an upper end (4b, 4b ' ) is formed and can be sealed by means of connection unit (2).
  • the connection unit (2) in turn, in addition to the connection connections (2a, 2b) and a dip tube (7) advantageously also includes a shut-off / reusable and
  • connection unit (2) thus has for filling, emptying and for flushing the empty container (1) next to the connection connections (2a, 2b) a shut-off /
  • connection unit (2) has a multi-way system (6a, 6b, 6c), preferably three shut-off devices in the form of two three-way valves (6a, 6c) and one
  • connection connection (2a) via a pipe with obturator (5a) and this with the dip tube (7) is connected, which in turn through the flange cover (2e) extends into the container and the outside of the
  • Immersion tube (7) opposite the passage in the flange cover (2e) is sealed, for example by welding.
  • the obturator (5a) is advantageously connected via a pipe with the obturator (5b), which in turn is connected via a pipe with obturator (5c).
  • the obturator (5c) is connected via a pipe with a passage in the flange cover (2e), wherein said passage in the flange cover, as well as the dip tube (7), ensures access to the interior of the empty container container.
  • the obturator (5c) is connected to the connection (2b) via a pipe.
  • valve or a tap or a closure As a shut-off valve, however, it is also possible to use a valve or a tap or a closure, the use of a valve or multi-way tap being preferred.
  • a valve or multi-way tap In particular, three- or two-way valves and as a valve, a diaphragm valve, a ball valve or a bellows valve are suitable.
  • the lowermost valve or a tap or a closure it is also possible to use of a valve or multi-way tap being preferred.
  • three- or two-way valves and as a valve, a diaphragm valve, a ball valve or a bellows valve are suitable.
  • the lowermost valve or a tap or a closure As a shut-off valve, however, it is also possible to use a valve or multi-way tap being preferred.
  • three- or two-way valves and as a valve, a diaphragm valve, a ball valve or a bellows valve are suitable.
  • Immersion tube advantageously 1 to 50 mm, preferably 2 to 40 mm, particularly preferably 3 to 30 mm, particularly preferably 4 to 25 mm, in particular 5 to 15 mm - to call some of the aforementioned values for the inner diameter [mm] again as such: 1, 1, 5, 2, 2.5, 3, 3.5, 4, 4.5, 5, 5.5, 6, 6.5, 7, 7.5, 8, 8.5, 9, 9, 5, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32 , 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50 -.
  • the connection unit (2) is advantageous in one
  • the protective device (2c) usually comprises a cylindrical jacket and a pivotable or hinged cover (2d, 2d ' ) and is arranged on the curved end (4b, 4b ' ) around the attachment unit (2).
  • the connection unit is preferably completely from the
  • An empty container can generally have an internal volume of 0.001 to 20,000 liters [I].
  • Empty containers or containers (1) according to the invention advantageously have an internal volume of from 0.1 to 1, 000 I, preferably from 0.5 to 500, especially
  • the shape of the empties usually corresponds approximately to that of a cylindrical shell with a curved bottom and curved upper end, wherein the
  • Terminal unit is assigned to the upper termination. This design allows the realization of pressure-resistant empty containers, in which a large pressure difference between internal and external pressure can prevail, for example in condensed under pressure connections.
  • empty containers according to the invention are suitable for an internal pressure up to 50 bar, preferably from 0.1 mbar to 25 bar, more preferably from 0.1 bar to 25 bar, most preferably from 0.5 bar to 12 bar, in particular from 1 bar to 8 bar - to give some of the aforementioned values for the internal pressure [bar] again as such: 0.0001, 0.0005, 0.001, 0.005, 0.01, 0.05, 0.1, 0.2, 0, 3, 0.4, 0.5, 0.6, 0.7, 0.7, 0.8, 0.9, 1, 0, 1, 1, 1, 1, 2, 1, 3, 1, 4, 1, 5, 1, 75, 2, 2.5, 3, 3.5, 4, 4.5, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16 , 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41 , 42, 43, 44, 45, 46, 47, 48, 49, 50 - designed.
  • the empty container according to the invention, the connection unit and / or all parts that come into contact with the filled ultrapure or ultra-high purity chemicals, made of stainless steel the stainless steel is preferably electropolished.
  • stainless steel corrosion-resistant stainless steels are preferred according to the invention, for example 1 .4301.
  • Mo-containing stainless steels such as steels, which begin with the material numbers 1 .41, 1 .44, 1 .45 and 1 .46. That's the way to do it advantageous z.
  • Hastelloy, Cronifer and Nicrofer such as Nicrofer 3127 hMo, 5923 hMo, H-C4 or H-C22.
  • the stainless steels 1 .4301, 1 .4401, 316L, such as 1 .4404, 1 .4432 and 1 .4435, and 1 .4571 are preferred.
  • the stainless steel surface preferably has a roughness (Ra) of less than or equal to 1 ⁇ m. Particularly preferred is the roughness of the stainless steel surfaces at a value (Ra) of ⁇ 0.5 ⁇ , most preferably at ⁇ 0.2 ⁇ ,
  • Determination of the surface roughness can, for example - but not
  • the empty container or container (1) may have a support (8) on the casing (3) and / or on the optionally curved bottom (4a), which circularly arranged supports or a cylindrical shell may be formed.
  • the empty container can be stored on a correspondingly shaped base or in a frame, preferably made of metal.
  • the empty container can provide recesses or fixing means that allow reloading by means of a crane. This is particularly preferred when the empty container size is from 850 liters.
  • the recesses or fixing means are preferably associated with the cylindrical shell of the empty container.
  • the respective connection unit (2) can be connectable via at least two connection connections (2a, 2b) to a distillation column, refilling station or measuring station, for example a so-called in-process control apparatus, and / or a reaction apparatus Connection unit and distillation column,
  • Transfer station or a reaction apparatus preferably a stationary measurement with switching function and alarm function for minimum and / or maximum level and sampling unit is arranged.
  • Device for producing high-purity or ultra-high purity compounds in particular for connecting the empty container with a distillation column, can be used on the side of the filler.
  • Such an adapter can also be advantageously rinsed, evacuated and / or flooded with inert gas via the shut-off / reusable and flushing system.
  • an additional adapter for connecting the container with a device for removal and / or consumption of high purity or ultra high purity compounds are used, in particular for connecting the container with a production plant for the implementation of high purity or ultra high purity compounds.
  • An intended on the part of the consumer adapter and related components can also on the shut-off / reusable and
  • the subject of the present invention is also the use
  • empty container for storage, handling and / or transport of high purity and ultra high purity, air and / or moisture sensitive liquid or condensable compounds in particular selected from the series of high purity and ultrahigh purity silicon and / or
  • Germanium compounds and organometallic compounds preferably from the series silicon tetrachloride, trichlorosilane, dichlorosilane, monochlorosilane,
  • Penta dimethylamino tantalum, ethylamido [ths (diethylamino)] tantalum, tetrakis (diethylamino) zirconium, dimethylaminoethoxytriethoxyzirconium.
  • the empty container or container according to the invention and their use thus allow a significant reduction in the risk that during rinsing process a significant amount of tilt remains in the empty container, which otherwise can lead to product contamination and thus to significant economic damage at refilling.
  • FIG. 1 shows an empty container according to the state of the art. Here still relatively large amounts of tilt or product during emptying and rinsing of the container at the lowest point of the bottom portion (4a) remain with respect to the end of the protruding vertically into the interior of the immersion tube.
  • Figure 2 shows a preferred embodiment of the present invention.
  • the dip tube (7) extends with its end (7a) into a comparison with the dimensions of the bottom (4a) comparatively small trough or recess (4c), which represents the lowest point in the bottom (4a), wherein the tip of the dip tube end ( 7a) to the lowest point of the trough (4c) in the bottom (4a) is approached to less than 2 mm, preferably less than or equal to 1 mm, and thus advantageously minimizing the tilting can be guaranteed.
  • FIG. 3 shows a schematic representation of a tapered dip tube (7b).
  • FIGS. 4 to 6 show further preferred embodiments according to the invention.
  • FIG. 4 shows a preferred embodiment, in which the bottom (4a) is flat and projecting vertically into the interior of the empty container
  • Dip tube (7 a) is beveled at its end (7 b) and the tip of the
  • beveled dip tube (7b) the lowest point of the bottom (4a) to less than 2 mm, preferably less than or equal to 1 mm, approximated or this touches the tip of the tapered dip tube (7b).
  • a preferred embodiment is shown in FIG. 5, wherein the bottom (4a) is arched and the tip of the bevelled dip tube (7b) approaches the lowest point of the bottom (4a) to less than 2 mm, preferably less than or equal to 1 mm or touched with the tip of the tapered dip tube (7b).
  • the empty container (1) shown in FIG. 4, for receiving liquid- or / or moisture-sensitive liquid or condensable compounds, has a connection unit (2) with a shut-off / reusable and flushing system (5)
  • connection unit for example by means of a flange connection (2e) with the upper end (4a, 4b ' ) of the empty container is connectable.
  • the flange connection can also be associated with a sealing ring and closure means to a hermetic closure of the
  • the connection unit has a multi-way valve system or general shut-off / reusable and flushing system (5) with three shut-off devices (6a, 6b, 6c) which in one embodiment each have a three (6a, 6c) or two-way cock (6b). - also referred to as valves shortly - correspond.
  • a connection of the valve (6c) with the empty container extends in the vicinity of the connection unit straight into the empty container or container, valve (6b) is arranged between the two valves (6a and 6c).
  • the empty container or container has a cylindrical jacket (3) and on both sides of the cylindrical shell a substantially flat bottom (4a), which is curved towards the sides in the transition to the jacket, and a curved upper end (4b) with flange (4b ' ). All parts that come into contact with the high-purity or ultrahigh-purity compounds are made of electropolished 316 L stainless steel.
  • the connection unit (2) is arranged in a protective device (2c, 2d).
  • the support (8) allows parking on flat surfaces (9).
  • valve (6c) is connected to a gas supply, which can be taken from dry, optionally heated inert gas, for example with a helium source, and is in a position in which the gas supply communicates with valve (6b) .
  • the valve (6a) is connected to a gas receiver and also placed in a position where there is communication between the gas receiver and the valve (6b).
  • purge gas preferably inert gas.
  • valve (6a) is in a position such that it is filled with a
  • Valve (6b) is in a position such that the connection of the valves (6a) and (6c) is closed.
  • the valve (6c) is open into the empty container and with a gas supply, such as a
  • connection unit By alternately opening and closing the valve (6c) can take place alternately rinsing and evacuation of the empty container, when the gas receiving device is connected to a vacuum pump. Accordingly, the gas space can be flushed through liquid compounds in containers, when the valve (6c) with a gas receiving device and the valve (6a) are connected to a gas supply.
  • valve (6b) To fill the empty container with a liquid connection, the valve (6b) is in a position that prevents communication between the valves (6a and 6c). About the valve (6a) is introduced by means of pumps, pressures or inflow over geodetic height through the dip tube liquid in the empty container. The gas / inert gas to be displaced escapes through the valve (6c) connected to a gas receiver.
  • valve (6b) To empty the container, the valve (6b) remains in the above-described position, by the open valve (6c), which is connected to a gas storage container, inert gas is pressed into the container.
  • the valve (6a) may be connected via an adapter or directly to a consumer. The liquid compound leaves through the dip tube and through the open valve (6a) the container, which is emptied in this way.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Packages (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

L'invention concerne un récipient vide (1) destiné à recevoir des composés liquides ou condensables très purs et ultra-purs sensibles à l'air et/ou à l'humidité. Le récipient comprend une enveloppe cylindrique (3) et de part et d'autre de l'enveloppe cylindrique un fond (4a) et une fermeture supérieure (4b, 4b'), une unité de raccordement (2) associée incluant un système d'arrêt multivoie et de lavage (5), et un tube immergé associé (7). Selon l'invention, l'extrémité inférieure (7a) du tube immergé pénètre dans un creux (4c) (une cuvette) ménagé dans le fond (4a) et représentant le point le plus bas du fond, et/ou l'extrémité inférieure du tube immergé (7a) est biseautée et approchée par la pointe du tube immergé biseauté (7b) à une distance de moins de 2 mm du point le plus bas du fond (4a), ou entre en contact avec ledit point par la pointe du tube immergé biseauté (7b). La présente invention concerne par ailleurs l'utilisation de récipients vides selon l'invention pour le stockage, la manutention et/ou le transport desdits composés très purs ou ultra-purs.
EP13703806.3A 2012-03-27 2013-02-11 Récipient servant à la manutention et au transport de produits chimiques très purs et ultra-purs Withdrawn EP2830988A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201210204902 DE102012204902A1 (de) 2012-03-27 2012-03-27 Gebinde zur Handhabung und für den Transport von hochreinen und ultra hochreinen Chemikalien
PCT/EP2013/052641 WO2013143745A1 (fr) 2012-03-27 2013-02-11 Récipient servant à la manutention et au transport de produits chimiques très purs et ultra-purs

Publications (1)

Publication Number Publication Date
EP2830988A1 true EP2830988A1 (fr) 2015-02-04

Family

ID=47710148

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13703806.3A Withdrawn EP2830988A1 (fr) 2012-03-27 2013-02-11 Récipient servant à la manutention et au transport de produits chimiques très purs et ultra-purs

Country Status (7)

Country Link
US (1) US20150102070A1 (fr)
EP (1) EP2830988A1 (fr)
KR (1) KR20140148393A (fr)
CN (1) CN104185602A (fr)
DE (1) DE102012204902A1 (fr)
TW (1) TW201410586A (fr)
WO (1) WO2013143745A1 (fr)

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Publication number Priority date Publication date Assignee Title
EP2942107B1 (fr) * 2014-05-07 2018-10-17 Basf Se Système de prélèvement
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DE102012204902A1 (de) 2013-10-02
CN104185602A (zh) 2014-12-03
US20150102070A1 (en) 2015-04-16
KR20140148393A (ko) 2014-12-31
TW201410586A (zh) 2014-03-16

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