EP2820668A2 - Dispositif pour alimenter en tension la cathode d'un spectromètre de masse - Google Patents

Dispositif pour alimenter en tension la cathode d'un spectromètre de masse

Info

Publication number
EP2820668A2
EP2820668A2 EP13707587.5A EP13707587A EP2820668A2 EP 2820668 A2 EP2820668 A2 EP 2820668A2 EP 13707587 A EP13707587 A EP 13707587A EP 2820668 A2 EP2820668 A2 EP 2820668A2
Authority
EP
European Patent Office
Prior art keywords
output
voltage
transformer
cathode
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP13707587.5A
Other languages
German (de)
English (en)
Other versions
EP2820668B1 (fr
Inventor
Norbert Rolff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of EP2820668A2 publication Critical patent/EP2820668A2/fr
Application granted granted Critical
Publication of EP2820668B1 publication Critical patent/EP2820668B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details

Definitions

  • the invention relates to a device for powering an ion source of a mass spectrometer and in particular for supplying power to the mass spectrometer cathode.
  • Mass spectrometers are used for the analysis of gases and are used, among other things, in leak detectors.
  • An electric field accelerates the electrons leaving the hot cathode.
  • an electron current is generated which ionizes the substance to be investigated in the gas phase by the electrons and fed to an analyzer.
  • This electric field is generated between a cathode and an anode.
  • a predetermined emission current must be generated reliably and with the lowest possible interference component by varying the heating voltage of the cathode as an actuator.
  • the invention has for its object to provide a device for powering the cathode of a mass spectrometer with little components and low power loss.
  • the device according to the invention is defined by the features of claim 1.
  • a primary-side input voltage is applied to a transformer in a switched-mode power supply.
  • the transformer is equipped with two output connections and one output side center connection. At the two output terminals of the transformer are opposite, d. H. mutually 180 ° out of phase output voltages.
  • a positive output voltage is applied to the first terminal, the same reversed-signed output voltage is applied to the second output terminal.
  • the two output terminals of the transformer are each directly connected to a diode.
  • transistors are used parallel to the diodes corresponding to a controlled rectifier, wherein in the case of two n-channel transistors, the cathode of a diode is connected directly to the first transformer output and the cathode of the second diode directly to the second transformer output ,
  • p-channel transistors are correspondingly the anode of a diode connected to the first transformer output and the anode of the other diode to the second output of the transformer.
  • the gate of one transistor is directly connected to the first output terminal and the gate of the second transistor is directly connected to the other output terminal of the transformer.
  • the diodes serve to rectify the transformer output voltages, with the transistors connected in parallel with the diodes improving the efficiency of the circuit.
  • the drain terminal of one transistor is preferably connected directly to the first transformer output and the drain terminal of the other transistor is connected directly to the second transformer output.
  • the source terminals of the two transistors may be connected to each other and directly to the transformer opposite and not directly connected to the transformer terminals. The source connections are then applied to the two cathodes of the diodes in the case of p-channel transistors and to the two anodes of the diodes in the case of n-channel transistors.
  • the transistors are preferably field-effect transistors of the p-channel or n-channel type.
  • a smoothing capacitor and a choke coil form a low pass between the center of the transformer and the sources of the transistors.
  • the circuit can also be designed as a single-ended flux converter, wherein only one transistor and one diode is required in each case.
  • the voltage supply device serves to drive two cathodes, in which two transistors alternately control exactly one of the two cathode output connections.
  • a conventionally used relay for alternating control of the cathode connections is then eliminated.
  • the control by the transistors is also more reliable and faster than by conventional switching relays.
  • At least one of the output voltages applied to the two transformer outputs becomes a further DC voltage with the aid of generated at least one voltage multiplier.
  • each of the two transformer outputs can be assigned exactly one voltage multiplier, which can be connected to the respective output via a separation capacitor.
  • the DC voltage can a) serve as a supply for generating the electron energy (anode voltage) for the mass spectrometer, b) for generating a supply voltage for the two cathode terminals driving transistors and / or c) for supplying a measuring circuit for measuring and / or regulating the emission current.
  • the emission current is the current flowing within the ion source from the anode to the respective switched-on cathode, the electron energy being given by the voltage difference between the anode and the cathode.
  • the emission current is transmitted by means of the pulse width modulation.
  • Fig. 1 is a schematic diagram of the power supply device as
  • FIG. 2 shows a detail from FIG. 1.
  • a transformer 1 is provided on the primary side and secondary side, each with three terminals. At one of the primary terminals, the input voltage Ui is applied to the transformer. At the first output terminal 32 and the second output terminal 30 are mutually phase-shifted, ie opposite, transformer output voltages. The third Secondary terminal is formed as an output side center terminal 31.
  • the first output terminal 32 is referred to as a negative output and the second output terminal 30 as a positive output, ie only one phase of the resulting output voltages is considered.
  • the negative output 32 is connected to the cathode of a diode 7.
  • the positive output 30 is connected to the cathode of a diode 9.
  • the anodes of the two diodes 7, 9 are connected together.
  • a transistor 8, 10 is connected in parallel in the form of an n-channel field effect transistor.
  • the source terminals of the two transistors 8, 10 are respectively connected to the anodes of the two diodes.
  • the drain terminal of the first transistor 8 is connected to the negative output 32 and the drain terminal of the second transistor 10 is connected to the positive output 30.
  • the gate terminal of the first transistor 8 is connected to the drain terminal of the second transistor 10 and to the positive output 30.
  • the gate terminal of the second transistor 10 is connected to the drain terminal of the first transistor 8 and to the negative output 32. At this time, therefore, the transistor 8 is conductive while the transistor 10 is turned off.
  • the supply voltage for the detection, regulation and generation of the electron energy for the anode-cathode emission is generated from the same transformer winding of the transformer 1.
  • the rectification is supported by a controlled rectifier 8, 10, which in the push-pull converter directly from the Transformer output voltage of the other path is controlled.
  • the controlled rectifier 8, which rectifies the output 32, is directly controlled via the transformer output 30. In the times when the transformer output voltage is near zero volts, the current flows through the inductor 11 connected to the sources of the two transistors 8, 10 and through the diodes 7, 9.
  • a voltage multiplier 16, 17 is connected to the positive output 30 and to the negative output 32 of the transformer 1 via a respective separation capacitor 13, 14.
  • a simple voltage multiplier which is formed from the diodes 33 and 34.
  • the DC voltage U 3 is tapped, which can be used, for example, to supply a voltage generating device 18 for generating the anode voltage U A.
  • a voltage supply device 21 can be fed, which supplies via the optocoupler 22 the information for the gate voltages for two transistors 19, 20 which alternately drive two separate cathode connections Kati, Kat 2 .
  • the drain terminals of the two transistors 19, 20 are each connected to the center terminal 31 of the transformer, which represents the positive pole of the cathode voltage supply in the case of n-channel transistors.
  • the gate terminals of the transistors 19, 20 are each connected to the power supply device 21.
  • the source terminal of one transistor 19 is connected to the second cathode terminal Kat 2 and the source terminal of the transistor 20 is connected to the first cathode terminal Kati.
  • Kat 2 can each be connected to a cathode whose opposite pole to the common Cathode terminal is connected Kat.
  • a switching of the cathodes can be done by the DC heating in a simple manner each with a transistor 19, 20.
  • the control of the cathode terminals in the case of a plurality of cathode terminals, ie more than two cathode terminals, each with a transistor, the control of the cathode terminals.
  • the emission current flows within the ion source from the terminal for the anode voltage U A to the terminals of the respectively switched-on cathode Kati or Kat 2 and the common cathode terminal.
  • the average cathode potential is represented by means of the resistors 27, 28 including the voltage drop arising from the emission current at the resistors 26 and 29.
  • the signal evaluation 25 which is preferably a processor module is normally located
  • the emission current which causes a voltage drop across the resistors 26, 29, by means of conversion in the pulse width modulation converter 23 into a PWM signal shaped.
  • the PWM signal is transmitted via an optocoupler 24 to the mass-related signal evaluation 25.
  • the PWM signal is converted into numerical values with a microprocessor, which are then proportional to the emission current.
  • the emission current can be regulated with the aid of the numerical values obtained and software.
  • the manipulated variable is the duty cycle of the switching power supply 4 and can be generated directly from the processor.
  • the manipulated variable is generated via an analog output, which is formed with the aid of a digital-to-analog converter 6 and a switched-mode power supply IC ("Integrated Circuit") 4.
  • the realized in the switching power supply IC current limit can be used.
  • the resistor 5 is used as the current limiting resistor.
  • the generation of the electron energy only requires an up-converter 18, which normally generates a voltage of about 70 to 100 V from the isolated supply voltage U3.
  • the voltage multipliers 16, 17, which consist of at least two rectifiers each, are powered by a capacitive connection to the transformer consisting of the capacitors 13, 14, 15 and allow a connection isolated for direct currents, as shown in FIG. 2 shown.
  • the DC isolation of the power supply ensures that the emission current, which flows at the power output of the rectifier consisting of the parts 7, 8, 9 and 10 in the active cathode, can be evaluated error-free.
  • a voltage multiplier is preferably connected to both transformer outputs 30, 32, whereby the current carrying capacity is greater and the ripple is smaller. In addition, peaks in the transformer are reduced, which could destroy the active rectifier.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Dc-Dc Converters (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Amplifiers (AREA)
  • Rectifiers (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

Un dispositif simplifié pour alimenter en tension la cathode d'un spectromètre de masse, présente un transformateur push-pull, un redresseur (8, 10) commandé étant présent en plus des diodes redresseuses (7, 9) normales. La grille du premier transistor (8) est reliée à la deuxième sortie (30) et la grille du deuxième transistor (10) est reliée à la première sortie (32) du transformateur. Un dispositif d'alimentation en tension se composant d'au moins un multiplicateur de tension, est relié par des condensateurs (13, 14, 15) à la sortie du transformateur et alimente entre autres le dispositif de mesure d'intensité d'émission.
EP13707587.5A 2012-02-29 2013-02-22 Dispositif pour alimenter en tension la cathode d'un spectromètre de masse Active EP2820668B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012203141A DE102012203141A1 (de) 2012-02-29 2012-02-29 Vorrichtung zur Spannungsversorgung der Kathode eines Massenspektrometers
PCT/EP2013/053550 WO2013127701A2 (fr) 2012-02-29 2013-02-22 Dispositif pour alimenter en tension la cathode d'un spectromètre de masse

Publications (2)

Publication Number Publication Date
EP2820668A2 true EP2820668A2 (fr) 2015-01-07
EP2820668B1 EP2820668B1 (fr) 2021-05-05

Family

ID=47827161

Family Applications (1)

Application Number Title Priority Date Filing Date
EP13707587.5A Active EP2820668B1 (fr) 2012-02-29 2013-02-22 Dispositif pour alimenter en tension la cathode d'un spectromètre de masse

Country Status (9)

Country Link
US (1) US9530634B2 (fr)
EP (1) EP2820668B1 (fr)
JP (1) JP6291424B2 (fr)
CN (1) CN104094378B (fr)
DE (1) DE102012203141A1 (fr)
IN (1) IN2014DN07154A (fr)
RU (1) RU2638303C2 (fr)
TW (1) TWI590295B (fr)
WO (1) WO2013127701A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116316406B (zh) * 2022-09-08 2023-11-07 瑞莱谱(杭州)医疗科技有限公司 一种质谱仪检测保护电路

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69203845T2 (de) * 1991-12-31 1996-04-04 Alcatel Standard Electrica Gleichrichtersystem für aperiodisch spannungsgeschaltene Stromrichter.
DE69901918T2 (de) * 1998-03-09 2003-02-06 Shindengen Electric Mfg. Co. Ltd., Tokio/Tokyo Getaktetes Netzgerät

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US2587555A (en) * 1948-10-26 1952-02-26 Sun Oil Co Mass spectrometer
US3493840A (en) * 1968-09-11 1970-02-03 Electronic Devices Inc Regulated voltage-multiplier system
US3869659A (en) * 1974-03-19 1975-03-04 Nasa Controllable high voltage source having fast settling time
JPS53138789A (en) * 1977-05-11 1978-12-04 Hitachi Ltd Filament current control circuit for mass spectrometer
DE4017859A1 (de) * 1990-06-02 1991-12-12 Deutsches Elektronen Synchr Steuerungsschaltung fuer ein lecksuchgeraet
JPH06215886A (ja) * 1993-01-14 1994-08-05 Matsushita Electric Works Ltd 電源装置
US5625541A (en) * 1993-04-29 1997-04-29 Lucent Technologies Inc. Low loss synchronous rectifier for application to clamped-mode power converters
JPH09191649A (ja) * 1996-01-11 1997-07-22 Jeol Ltd 高電圧発生回路
JP2000253658A (ja) * 1999-02-26 2000-09-14 Sanken Electric Co Ltd Ｄｃ−ｄｃコンバータ
US6784867B1 (en) * 2000-11-16 2004-08-31 Koninklijke Philips Electronics N.V. Voltage-fed push LLC resonant LCD backlighting inverter circuit
JP4136342B2 (ja) 2001-08-31 2008-08-20 新電元工業株式会社 スイッチング電源装置およびこのスイッチング電源装置に設けるトランス
JP3790256B2 (ja) * 2005-03-08 2006-06-28 新電元工業株式会社 スイッチング電源装置の制御方法
US8058861B2 (en) * 2007-06-05 2011-11-15 Bayer Materialscience Ag Miniature high-voltage power supplies
JP4689648B2 (ja) * 2007-08-31 2011-05-25 新電元工業株式会社 スイッチング電源装置
US8711593B2 (en) * 2008-08-20 2014-04-29 ConvenientPower HK Ltd. Generalized AC-DC synchronous rectification techniques for single- and multi-phase systems

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
DE69203845T2 (de) * 1991-12-31 1996-04-04 Alcatel Standard Electrica Gleichrichtersystem für aperiodisch spannungsgeschaltene Stromrichter.
DE69901918T2 (de) * 1998-03-09 2003-02-06 Shindengen Electric Mfg. Co. Ltd., Tokio/Tokyo Getaktetes Netzgerät

Non-Patent Citations (1)

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ANONYMOUS: "Spannungsverdoppler - Wikipedia", 15 October 2011 (2011-10-15), XP055698436, Retrieved from the Internet <URL:https://de.wikipedia.org/w/index.php?title=Spannungsverdoppler&oldid=94816920> [retrieved on 20200526] *

Also Published As

Publication number Publication date
CN104094378A (zh) 2014-10-08
TWI590295B (zh) 2017-07-01
JP2015513765A (ja) 2015-05-14
RU2638303C2 (ru) 2017-12-13
WO2013127701A2 (fr) 2013-09-06
DE102012203141A1 (de) 2013-08-29
IN2014DN07154A (fr) 2015-04-24
US20150028743A1 (en) 2015-01-29
CN104094378B (zh) 2016-08-17
EP2820668B1 (fr) 2021-05-05
US9530634B2 (en) 2016-12-27
RU2014138553A (ru) 2016-04-20
JP6291424B2 (ja) 2018-03-14
WO2013127701A3 (fr) 2014-01-30
TW201342421A (zh) 2013-10-16

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