EP2583761B1 - Reinigungssystem - Google Patents
Reinigungssystem Download PDFInfo
- Publication number
- EP2583761B1 EP2583761B1 EP11795412.3A EP11795412A EP2583761B1 EP 2583761 B1 EP2583761 B1 EP 2583761B1 EP 11795412 A EP11795412 A EP 11795412A EP 2583761 B1 EP2583761 B1 EP 2583761B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- roller
- cleaning
- foreign matter
- cleaning roller
- transferring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Not-in-force
Links
- 238000004140 cleaning Methods 0.000 title claims description 214
- 239000002184 metal Substances 0.000 claims description 43
- 230000000087 stabilizing effect Effects 0.000 claims description 21
- 239000000428 dust Substances 0.000 claims description 9
- 238000006748 scratching Methods 0.000 claims description 3
- 230000002393 scratching effect Effects 0.000 claims description 3
- 230000002708 enhancing effect Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 28
- 239000000853 adhesive Substances 0.000 description 19
- 230000001070 adhesive effect Effects 0.000 description 19
- 238000012423 maintenance Methods 0.000 description 17
- 230000002093 peripheral effect Effects 0.000 description 14
- 238000001179 sorption measurement Methods 0.000 description 13
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229920002635 polyurethane Polymers 0.000 description 3
- 239000004814 polyurethane Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- RVCKCEDKBVEEHL-UHFFFAOYSA-N 2,3,4,5,6-pentachlorobenzyl alcohol Chemical compound OCC1=C(Cl)C(Cl)=C(Cl)C(Cl)=C1Cl RVCKCEDKBVEEHL-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 125000000022 2-aminoethyl group Chemical group [H]C([*])([H])C([H])([H])N([H])[H] 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229920006243 acrylic copolymer Polymers 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B6/00—Cleaning by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/02—Plant or installations having external electricity supply
- B03C3/04—Plant or installations having external electricity supply dry type
- B03C3/10—Plant or installations having external electricity supply dry type characterised by presence of electrodes moving during separating action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/32—Transportable units, e.g. for cleaning room air
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
- B03C3/34—Constructional details or accessories or operation thereof
- B03C3/74—Cleaning the electrodes
- B03C3/743—Cleaning the electrodes by using friction, e.g. by brushes or sliding elements
-
- B08B1/52—
-
- B08B1/54—
Landscapes
- Electrostatic Charge, Transfer And Separation In Electrography (AREA)
- Cleaning In General (AREA)
Claims (7)
- Ein Reinigungssystem (1), das eine Reinigungswalze (11) aufweist zur Relativbewegung durch Rotieren während sie in Kontakt mit einer Oberfläche eines zu reinigenden Objektes (S) ist, um so Fremdmaterial, wie Staub und Dreck, das an der Oberfläche des zu reinigenden Objekts durch elektrostatische Kraft anhaftet, zu entfernen, wobei
die Reinigungswalze (11) versehen ist mit einer Übertragungswalze (21) zur Rotation während sie in Kontakt mit einer Oberfläche der Reinigungswalze (11) ist, wobei
die Reinigungswalze (11) in der Lage ist, an ihrer Oberfläche mit elektrischer Ladung versehen zu werden zum Adsorbieren von Fremdmaterial, das an der Oberfläche des zu reinigenden Objekts (S) durch elektrostatische Kraft anhaftet,
die Übertragungswalze (21) in der Lage ist, an ihrer Oberfläche mit elektrischer Ladung versehen zu werden zum Adsorbieren von Fremdmaterial, das an der Oberfläche der Reinigungswalze (11) durch elektrostatische Kraft anhaftet,
dadurch gekennzeichnet, dass
die Reinigungswalze (11) geerdet ist über eine Spannungsstabilisierungsschaltung (12) und die Übertragungswalze (21) direkt oder indirekt mit einer externen Leistungsquelle (31) verbunden ist, und
die Spannungsstabilisierungsschaltung (12) in der Lage ist, eine Elektrifizierungsspannung der Reinigungswalze (11) zum Adsorbieren des Fremdmaterials mit Hilfe von elektrostatischer Kraft zu verändern. - Das Reinigungssystem nach Anspruch 1, dadurch gekennzeichnet, dass die Spannungsstabilisierungsschaltung (12) ein fester Widerstand (12b), ein variabler Widerstand (12a) oder ein schaltbarer Transistor (43) ist, der eine Vielzahl von Widerständen aufweist und zu einem der festen zu verwendenden Widerstände schaltet, um so einen Widerstandswert zu verändern.
- Das Reinigungssystem nach Anspruch 1, dadurch gekennzeichnet, dass die Übertragungswalze (21) ausgebildet ist zum Rotieren während sie in Kontakt mit der Oberfläche der Reinigungswalze ist, um so eine Potentialdifferenz zwischen der Übertragungswalze (21) und der Reinigungswalze (11) in Übereinstimmung mit einem Unterschied in der Oberflächenelektrifizierung zwischen der Übertragungswalze (21) und der Reinigungswalze (11) zu erzeugen.
- Das Reinigungssystem nach Anspruch 1, dadurch gekennzeichnet, dass die Übertragungswalze (21) versehen ist mit einer Reinigungsbürste (41) zum gemeinsamen Rotieren damit oder zum Rotieren in umgekehrter Richtung dazu und die Reinigungsbürste (41) versehen ist mit einer Metallwalze (42) zum gemeinsamen Rotieren damit oder zum Rotieren in entgegengesetzter Richtung dazu und
die externe Leistungsquelle (31) verbunden ist mit der Metallwalze (42) und ausgebildet ist zum Erzeugen von Potentialdifferenzen über die Reinigungswalze (24), die Reinigungsbürste (41) und die Metallwalze (42). - Das Reinigungssystem nach Anspruch 4, dadurch gekennzeichnet, dass die Metallwalze (42) in der Nähe ihrer Oberfläche versehen ist mit einer Reinigungsklinge (44) mit einem Spitzenkratzer zum Abkratzen von Fremdmaterial, das an der Oberfläche der Metallwalze (42) anhaftet.
- Das Reinigungssystem nach Anspruch 5, dadurch gekennzeichnet, dass die Reinigungsklinge (44) daneben versehen ist mit einem Sauganschluss (45) einer Luftvakuumeinrichtung, die in der Lage ist, Fremdmaterial mit Hilfe von Unterdruck anzusaugen, oder ein Fremdmaterialbehälter (46) zum Sammeln und Anhäufen von Fremdmaterial, das durch die Reinigungsklinge (44) abgekratzt worden ist.
- Das Reinigungssystem nach Anspruch 1, dadurch gekennzeichnet, dass eine Führungswalze (51) vorgesehen ist gegenüberliegend der Reinigungswalze (11), wobei das zu reinigende Objekt zwischen ihnen angeordnet ist, und die Führungsrolle (51) ausgebildet ist zum Verstärken einer Feldintensität der Reinigungswalze (11) zum Adsorbieren von Fremdmaterial, das an der Oberfläche des zu reinigenden Objekts (S) mit Hilfe von elektrostatischer Kraft anhaftet.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010138030 | 2010-06-17 | ||
PCT/JP2011/003413 WO2011158504A1 (ja) | 2010-06-17 | 2011-06-15 | クリーニングシステム |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2583761A1 EP2583761A1 (de) | 2013-04-24 |
EP2583761A4 EP2583761A4 (de) | 2014-02-12 |
EP2583761B1 true EP2583761B1 (de) | 2015-04-08 |
Family
ID=45347919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11795412.3A Not-in-force EP2583761B1 (de) | 2010-06-17 | 2011-06-15 | Reinigungssystem |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP2583761B1 (de) |
JP (1) | JP5015365B2 (de) |
KR (1) | KR101271040B1 (de) |
CN (1) | CN102933323B (de) |
TW (1) | TWI406716B (de) |
WO (1) | WO2011158504A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101377498B1 (ko) | 2012-03-29 | 2014-03-25 | 현대제철 주식회사 | 롤 표면의 이물질 제거장치와 롤 표면의 이물질 제거방법 |
JP6073629B2 (ja) * | 2012-10-03 | 2017-02-01 | バンドー化学株式会社 | 清掃具及び清掃装置 |
CN108778536B (zh) * | 2016-03-09 | 2022-08-02 | 阪东化学株式会社 | 清洁装置 |
KR102340314B1 (ko) * | 2016-03-09 | 2021-12-15 | 반도 카가쿠 가부시키가이샤 | 클리닝 장치 |
KR102338895B1 (ko) * | 2016-03-09 | 2021-12-10 | 반도 카가쿠 가부시키가이샤 | 클리닝 장치 및 클리닝 방법 |
TWI620905B (zh) * | 2017-06-14 | 2018-04-11 | 住華科技股份有限公司 | 除液裝置 |
CN109484361B (zh) * | 2018-11-22 | 2022-02-11 | 深圳市威群视科技有限公司 | 一种自洁净车载倒车摄像头 |
JP7203593B2 (ja) * | 2018-12-25 | 2023-01-13 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3861861A (en) * | 1973-08-10 | 1975-01-21 | Xerox Corp | Fuser roll cleaning apparatus |
US4440082A (en) * | 1978-11-13 | 1984-04-03 | Dayco Corporation | Electrostatically assisted printing system |
JPH08203851A (ja) * | 1995-01-27 | 1996-08-09 | Sony Corp | 清浄化装置 |
JPH09244499A (ja) * | 1996-03-04 | 1997-09-19 | Ricoh Co Ltd | 帯電ローラのクリーニング装置 |
US6085061A (en) * | 1998-12-22 | 2000-07-04 | Xerox Corporation | Active electrostatic cleaning brush |
JP3797035B2 (ja) * | 1999-09-03 | 2006-07-12 | 富士ゼロックス株式会社 | 画像形成装置 |
US6169872B1 (en) * | 1999-09-28 | 2001-01-02 | Xerox Corporation | Electrostatic cleaning belt brush |
US6980765B2 (en) * | 2003-11-25 | 2005-12-27 | Xerox Corporation | Dual polarity electrostatic brush cleaner |
TWM271341U (en) * | 2004-11-03 | 2005-07-21 | Jean Herl Technologies Co | Substrate dusting machine |
GB0514837D0 (en) * | 2005-07-20 | 2005-08-24 | Teknek Holdings Ltd | Surface cleaning apparatus |
JP2008168188A (ja) | 2007-01-10 | 2008-07-24 | Mitsuma Giken Kk | クリーニング装置 |
CN101011698A (zh) * | 2007-02-07 | 2007-08-08 | 马书林 | 自洁式静电除尘辊 |
JP2008271797A (ja) | 2007-04-25 | 2008-11-13 | Iseki & Co Ltd | コンバイン |
JP2009088244A (ja) * | 2007-09-28 | 2009-04-23 | Tokyo Electron Ltd | 基板クリーニング装置、基板処理装置、基板クリーニング方法、基板処理方法及び記憶媒体 |
JP2009151195A (ja) * | 2007-12-21 | 2009-07-09 | Fuji Xerox Co Ltd | 帯電装置および画像形成装置 |
JP5491017B2 (ja) * | 2008-10-22 | 2014-05-14 | バンドー化学株式会社 | クリーニングシステム |
-
2011
- 2011-05-24 TW TW100118093A patent/TWI406716B/zh not_active IP Right Cessation
- 2011-06-15 JP JP2012518673A patent/JP5015365B2/ja active Active
- 2011-06-15 EP EP11795412.3A patent/EP2583761B1/de not_active Not-in-force
- 2011-06-15 WO PCT/JP2011/003413 patent/WO2011158504A1/ja active Application Filing
- 2011-06-15 KR KR1020127029805A patent/KR101271040B1/ko not_active IP Right Cessation
- 2011-06-15 CN CN201180025582.3A patent/CN102933323B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
JPWO2011158504A1 (ja) | 2013-08-19 |
CN102933323A (zh) | 2013-02-13 |
EP2583761A1 (de) | 2013-04-24 |
EP2583761A4 (de) | 2014-02-12 |
KR101271040B1 (ko) | 2013-06-04 |
TW201210709A (en) | 2012-03-16 |
JP5015365B2 (ja) | 2012-08-29 |
TWI406716B (zh) | 2013-09-01 |
KR20130029392A (ko) | 2013-03-22 |
CN102933323B (zh) | 2014-07-02 |
WO2011158504A1 (ja) | 2011-12-22 |
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