EP2583364A1 - Laser à gaz et procédé permettant de faire fonctionner un laser à gaz - Google Patents

Laser à gaz et procédé permettant de faire fonctionner un laser à gaz

Info

Publication number
EP2583364A1
EP2583364A1 EP11725669.3A EP11725669A EP2583364A1 EP 2583364 A1 EP2583364 A1 EP 2583364A1 EP 11725669 A EP11725669 A EP 11725669A EP 2583364 A1 EP2583364 A1 EP 2583364A1
Authority
EP
European Patent Office
Prior art keywords
cooling
laser
gas
corner housing
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11725669.3A
Other languages
German (de)
English (en)
Inventor
Michael Von Borstel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Laser und Systemtechnik GmbH
Original Assignee
Trumpf Laser und Systemtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Laser und Systemtechnik GmbH filed Critical Trumpf Laser und Systemtechnik GmbH
Publication of EP2583364A1 publication Critical patent/EP2583364A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0407—Liquid cooling, e.g. by water
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
    • H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
    • H01S3/076—Folded-path lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813—Configuration of resonator
    • H01S3/0816—Configuration of resonator having 4 reflectors, e.g. Z-shaped resonators

Definitions

  • the present invention relates to a gas laser, comprising: a plurality of discharge tubes, which are connected to each other via corner housing, in each of which at least one mirror element for beam guidance of a laser beam and at least one cooling channel are provided with a Kühidemkeit therein, and a heat exchanger with at least one Kühikanal with a cooling liquid therein for cooling the laser gas before entering a respective corner housing, as well as an operating method for such Gasiaser.
  • Gasiaser in particular COs laser, have a folded, preferably square laser resonator in which the laser beam is folded in one or more superimposed parallel planes square, for which mirror elements are arranged in each plane, which are commonly housed in four corner housings. Between the corner housings discharge tubes are arranged with electrodes for exciting the laser gas.
  • the laser gas is from a Druckqueiie, which may for example be designed as a radial fan, via supply lines the
  • One or more Bruhikanäie a heat exchanger are arranged in the supply lines typically to cool the laser gas before entering the corner housing and thus in the beam guiding space.
  • the laser gas cycle is closed via suction lines, via which the heated laser gas is sucked out of the discharge tubes and fed to the radial fan.
  • the corner housing are cooled.
  • one or more Bruhikanäie are mounted in a main body of the respective corner housing, which are flowed through by a cooling liquid, typically water.
  • the Kühikanäie the heat exchanger are in the rain! connected to the cooling channels of the corner housing and form a common coolant circuit.
  • Laser resonator undergoes an undesirable change in the laser beam direction (so-called, beam pointing), which can lead to a deterioration of the beam quality.
  • the temperature of the incoming cooled laser gas is typically about 10 K above the temperature of the coolant in the corner housing.
  • a difference between the temperature of the cooled laser gas entering the corner housing and the temperature of the cooling liquid in the corner housing is less than 5 K, preferably less than 2 K, in particular less than 0, 2 K is adjustable
  • the inventor has recognized that the tilt of the mirror elements disposed in the corner housings is triggered by an asymmetric expansion of the (generally symmetrical) corner housing caused by a temperature gradient between the temperature of the laser gas flowing into the corner housing and the temperature of the coolant in the cooling channel of the corner housing is generated.
  • asymmetric expansion of the (generally symmetrical) corner housing caused by a temperature gradient between the temperature of the laser gas flowing into the corner housing and the temperature of the coolant in the cooling channel of the corner housing is generated.
  • Corner housing belong to two differentierimitteinikiäufen, in this case, the temperature of the cooling liquid in the cooling channels of the corner block
  • the tempering device has a
  • Heating device for heating the cooling liquid which is supplied to the cooling channel of the corner housing.
  • the tempering device can also have a cooling device for cooling the coolant, which is supplied to the or the cooling channels of the heat exchanger.
  • the aggregates of the respective coolant circuit in particular when a commondemittei Vietnameselauf is provided, ie when the cooling channels of the corner housing are connected to the Kühikanäien the heat exchanger and the cooling liquid in the two coolant circuits a substantially has identical temperature, it is advantageous if the laser gas is subjected to a direct cooling by means of an additionaldeeinnchtung so that the temperature of the cooled laser gas is independent of the temperature of kuhilakekeit the heat exchanger and the Kühidemkeit adjustable in the corner housing.
  • different measures can be provided:
  • the additional cooling means comprises an expander for adiabatically expanding the laser gas as it enters the
  • an expansion device e.g. in the form of a possibly
  • controllable or adjustable expansion nozzle which causes a cooling of the entering into the corner housing laser gas.
  • the additional cooling device has a mixing device for admixing additional cold laser gas.
  • the additionally mixed laser gas must have a lower temperature than the laser gas already present in the gas loop of the gas.
  • the amount of the supplied laser gas is hereby e.g. adjusted via a controllable valve so that the desired cooling effect is achieved.
  • the inlet or the controllable valve for the mixed laser gas is in this case preferably at the outlet of the heat exchanger, i. adjacent to the corner housing.
  • the additional cooling device has a Peltier element for cooling the laser gas.
  • the laser gas is cooled in this case, in addition to the heat exchanger directly through the Peltier element, which also provides an additional approximation of the temperature of the laser gas to the temperature of the Coolant causes in the corner housing.
  • the additional cooling device can also have a further heat exchanger which is operated with the same or preferably with a further coolant, i. the cooling channels of the further heat exchanger are charged with a coolant other than that of the first heat exchanger.
  • the further coolant may be e.g. to act a coolant of a cooling unit, which serves for cooling the cooling liquid of the flowing through the cooling channels of the (first) heat exchanger coolant.
  • a thermal insulation between the mirror element (s) and the corner housing or its base body may be provided in order to avoid transmission of the mirror heat from the mirror element or its mirror carrier to the corner housing as far as possible.
  • a further cooling device for direct cooling of the Spiegeleiements be provided in the corner housing. Also, it is favorable for the temperature stability of the corner housing, if a
  • Resonator frame on which the or all corner housing of the gas laser are mounted has at least one cooling channel, which forms a commonissermittei Vietnameselauf with the cooling channel of the corner housing. Due to the common cooling can be achieved that the corner housing and the resonator frame the same, in the
  • the invention also relates to a method for operating a gas laser, the
  • a difference between the temperature of a cooled laser gas when entering a corner housing of the gas laser and the temperature of a cooling liquid in at least one cooling channel of the corner housing is set to less than 5 K, preferably less than 2 K, in particular less than 0 , 2K.
  • the operation of a gas laser in the manner described above has in particular resonators with high resonator lengths (eg greater than 5m) or laser processing machines with Sangen Strahlinature (larger 8m) ais shown particularly advantageous.
  • Fig. 1 is a plan view of a CG gas laser with a folded
  • Fig. 2 is a perspective view of the C0 2 gas laser of Fig., A Thomasdarsteliung a detail of the invention
  • Figure 3b is a view analogous to Figure 3a with an additional cooling device in the form of an expansion nozzle and a Peltier element for cooling the laser gas, and
  • FIG. 3c shows an illustration analogous to FIG. 3b with an additional cooling device in the form of a mixing device and an additional heat exchanger for cooling the laser gas.
  • the C0 2 gas laser 1 shown in Fig. 1 has a square folded
  • a running in the direction of the axes of the laser discharge tubes 3 laser beam 6 is shown in phantom.
  • Umlenkspiege! 7 in the corner housings 4 serve to deflect the laser beam 6 by 90 °. in one of the corner housing 5, a rearview mirror 8 and a partially transmissive Auskoppelspiegef 9 are arranged.
  • the rearview mirror 8 is formed highly reflective and reflects the laser beam 6 by 180 °, so that the laser discharge tubes 3 are traversed again in the opposite direction.
  • a part of the laser beam 6 is coupled out of the laser resonator 2 at the partially transmissive Auskoppeispeigei 9, the other part remains in the laser resonator 2 and passes through the laser discharge tubes 3 again, the output via the Auskoppeispiegei 9 from the laser resonator 2 laser beam is denoted by 10.
  • a radial fan 11 is arranged as a pressure source for laser gas, which is connected via supply lines 12 for laser gas with the corner housings 4, 5 suction lines 13 extend between suction 14 and the radial fan 1 1.
  • Laser gas is provided via electrodes 15 disposed adjacent to the laser discharge tubes 3 and connected to an RF generator (not shown).
  • an RF generator for example, a tube generator with an excitation frequency of 13.56 MHz or 27, 12 MHz can be used.
  • Fig. 2 and in particular in Fig, 3a are in the
  • Supply lines 12 helical or lamellar cooling channels 16 in the form of
  • Cooling tubes provided through which a cooling liquid 17, in the present example, water flows.
  • the cooling channels 16 are connected to a cooling unit 18 in conjunction and together with this a heat exchanger circuit 19, In the
  • Corner housing 4 of Fig. 3a is still adekana! 20 provided in the form of a cooling hole which extends through a base body of the corner housing 4 and is also traversed by cooling water 21.
  • cooling channel 20 of the corner housing 4 is not connected to the cooling unit " 18 of the heat exchanger 19, but to a further unit 22, which forms a separate housing block circuit 23 together with the cooling channel 20. It is understood that the one in FIG illustrated heat exchanger circuit 19 extends not only through the Zuurerieitung 12, but through all the supply lines of the gas laser 1 and through all the suction lines 13, wherein it is in the Rule is a parallel connection of several heat exchangers.
  • the housing block circuit 23 passes through all corner blocks 4, 5 of the gas laser 1.
  • the heat exchanger circuit 19 and the housing block circuit 23 are independent of each other, so that the respective temperature T w , w of the cooling liquid 17 of the heat exchanger circuit 19 and the temperature TW , B of the cooling liquid 21 of the home slewing circuit 23 are independently adjustable by suitably setting the units 18, 22 serving as tempering means.
  • This is favorable in order to equalize the temperature T G , K of the cold laser gas when entering the corner housing 4 to the temperature T W , B of the cooling liquid 21 in the cooling channel 20 of the corner housing 4, so that the temperature difference TQ, K - T W> B is as small as possible. In this way, it is possible to prevent a temperature gradient from occurring in the corner housing 4, which causes tilting of the deflecting mirror 7 arranged therein and thus incorrect positioning of the laser beam 6.
  • the temperature of the cooling water 17 in the cooling pipe 16 be set lower than the temperature of the cooling water 21 in the cooling hole 20 of the corner housing 4.
  • the temperature T WJW of the cooling water 17 in the cooling pipe 16 can be reduced by about 10 K to T W [ 15 ° C], whereby the cooled laser gas entering the corner housing 4 reaches a temperature TG .K of 25 ° C, ie, coincides with the temperature T WI B of the cooling water 21 in the corner block 4.
  • both measures can be performed simultaneously, ie the temperature Tw.w of the cooling liquid 7 in the cooling pipe 16 is reduced and the temperature T W , B of the cooling liquid 21 in the corner housing 4 is simultaneously increased accordingly, so that overall sets a temperature difference which is not greater than 5 K, preferably not greater than 2 K, in particular not greater than 0.2 K.
  • the actuation of the units 18, 22 can be carried out by a common control device 24. It is understood that if necessary, also heat sensors can be provided, which regulate the temperatures on the above
  • an additional cooling device may be provided, which in FIG. 3b comprises an expansion nozzle 25, which is arranged at the entry into the corner housing 4.
  • the expansion nozzle 25 causes a
  • the cooling device can also have a Peltier element 26, which is attached to a wall of the supply line 12 in the example shown in FIG. in Fig.
  • a cooling device in the form of a mixing device comprising a controllable valve 27, via which the mixing of additional, cool laser gas from a gas reservoir 28 in the gas circuit of the gas laser 1 can be done, wherein the admixed amount of gas is adjusted so that the mixing temperature corresponds to the desired temperature of the laser gas, and a cooling device in the form of another heat exchanger 29, which is acted upon directly with the cooling liquid of kuhiaggregats 18, which also serves for the cooling of the cooling water 17 of the cooling tube 16.
  • Heat exchanger 29 and the gas outlet or the valve 27 for the mixed laser gas are in this case arranged with respect to the flow direction of the laser gas behind the heat exchanger 19 and serve the additional cooling of the laser gas cooled by this before entering the corner block 4,
  • Mirror element 7 is arranged on a mirror support 30, which is equipped with a further cooling device 31 in the form of a cooling channel with coolant therein, in order to cool the mirror element 7 directly.
  • the mirror support 30 is thermally insulated from the respective corner housing 4, 5, the thermal insulation e.g. over steel screws while avoiding flat contact with the
  • the temperature T G , the cooled laser gas entering a respective corner housing 4, 5 and the temperature T W , B of a cooling liquid 21 of the corner housing 4, 5 can be matched to each other, so that no asymmetric temperature gradient in the corner housing 4 T 5 is formed and arranged therein SpiegeieJemente 7, 8, 9 and their mirror support 30 are tilted unintentionally. Overall, such an undesirable change in the direction of the laser beam 6 in the laser resonator 2 can be prevented and the beam quality of the decoupled laser beam 10 can be increased.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Lasers (AREA)

Abstract

L'invention concerne un laser à gaz, comprenant : une pluralité de tubes de décharge (3), reliés entre eux au moyen de boîtiers d'angle (4) contenant respectivement au moins un élément réflecteur (7) pour le guidage d'un faisceau laser (6) et au moins un canal de refroidissement (20) dans lequel se trouve un liquide de refroidissement (21) ; et un échangeur de chaleur (19) pourvu d'au moins un canal de refroidissement (16) dans lequel se trouve un liquide de refroidissement (17), pour refroidir le gaz laser avant son entrée dans un boîtier d'angle (4) respectif. Le laser comprend un dispositif de refroidissement supplémentaire pour refroidir le gaz laser et/ou un dispositif de thermorégulation (18, 22) pour produire une différence de température (Tw,w - Tw,B) entre le liquide de refroidissement (17) dans le canal ou les canaux de refroidissement (16) de l'échangeur de chaleur (19) et le liquide de refroidissement (21) dans le canal ou les canaux de refroidissement (20) du boîtier d'angle (4, 5), de telle sorte qu'une différence (TG,K - TW,B) entre la température (TG,K) du gaz laser refroidi à l'entrée dans le boîtier d'angle (4) et la température (TW,B) du liquide de refroidissement (21) dans le boîtier d'angle (4) peut être réglée à moins de 5 K, de préférence à moins de 2 K, en particulier à moins de 0,2 K. L'invention concerne également un procédé correspondant permettant de faire fonctionner un laser à gaz.
EP11725669.3A 2010-06-16 2011-06-06 Laser à gaz et procédé permettant de faire fonctionner un laser à gaz Withdrawn EP2583364A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010030141A DE102010030141B4 (de) 2010-06-16 2010-06-16 Gaslaser und Betriebsverfahren dafür
PCT/EP2011/059281 WO2011157581A1 (fr) 2010-06-16 2011-06-06 Laser à gaz et procédé permettant de faire fonctionner un laser à gaz

Publications (1)

Publication Number Publication Date
EP2583364A1 true EP2583364A1 (fr) 2013-04-24

Family

ID=44343901

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11725669.3A Withdrawn EP2583364A1 (fr) 2010-06-16 2011-06-06 Laser à gaz et procédé permettant de faire fonctionner un laser à gaz

Country Status (6)

Country Link
US (1) US8817833B2 (fr)
EP (1) EP2583364A1 (fr)
JP (1) JP5591398B2 (fr)
KR (1) KR101449824B1 (fr)
DE (1) DE102010030141B4 (fr)
WO (1) WO2011157581A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012205870B3 (de) 2012-04-11 2013-02-21 Trumpf Laser- Und Systemtechnik Gmbh Kühlanordnung für einen Gaslaser, Gaslaser damit, sowie Verfahren zum Kühlen von Lasergas
CN103887686B (zh) * 2014-03-19 2016-06-29 武汉光谷科威晶激光技术有限公司 一种轴快流气体激光器的一体化热交换系统
US10268128B2 (en) 2015-07-08 2019-04-23 Asml Netherlands B.V. Lithographic apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299183A (ja) * 1987-05-29 1988-12-06 Hitachi Ltd レ−ザ発生装置
JPH02103974A (ja) * 1988-10-13 1990-04-17 Fanuc Ltd レーザ発振装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3900804A (en) * 1973-12-26 1975-08-19 United Aircraft Corp Multitube coaxial closed cycle gas laser system
DE3136231C2 (de) 1981-09-12 1983-11-24 Messer Griesheim Gmbh, 6000 Frankfurt Gaslaser, insbesondere CO↓2↓-Gastransportlaser
US4672621A (en) * 1982-04-13 1987-06-09 Matsushita Electric Industrial Co., Ltd. Laser resonator having an improved gas-introducing portion
JPS61208002A (ja) * 1985-03-13 1986-09-16 Toshiba Corp 光透過装置
US4891820A (en) * 1985-12-19 1990-01-02 Rofin-Sinar, Inc. Fast axial flow laser circulating system
US4709372A (en) * 1985-12-19 1987-11-24 Spectra-Physics, Inc. Fast axial flow laser circulating system
JPH02101782A (ja) * 1988-10-08 1990-04-13 Fanuc Ltd ガスレーザ装置
JPH02148779A (ja) * 1988-11-29 1990-06-07 Mitsubishi Electric Corp レーザ発振器
JPH04127590A (ja) * 1990-09-19 1992-04-28 Toshiba Corp 放電励起エキシマレーザー装置
JP2786960B2 (ja) * 1991-12-05 1998-08-13 ファナック株式会社 ガスレーザ装置
JP3162255B2 (ja) 1994-02-24 2001-04-25 三菱電機株式会社 レーザ加工方法及びその装置
JPH0983044A (ja) * 1995-09-18 1997-03-28 Amada Eng Center:Kk レーザ発振器の冷却装置
US5940420A (en) * 1996-10-08 1999-08-17 Trimedyne, Inc. Split-flow laser cooling cavity
DE29618887U1 (de) * 1996-10-30 1997-01-09 Trumpf GmbH + Co., 71254 Ditzingen Gaslaseranordnung
JP2004363559A (ja) * 2003-05-14 2004-12-24 Canon Inc 光学部材保持装置
DE102006055738B4 (de) * 2006-11-25 2010-10-07 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung zum Verändern des Strahldurchmessers eines durch ein optisches Element hindurchgehenden Laserstrahls mittels Temperaturänderung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299183A (ja) * 1987-05-29 1988-12-06 Hitachi Ltd レ−ザ発生装置
JPH02103974A (ja) * 1988-10-13 1990-04-17 Fanuc Ltd レーザ発振装置

Also Published As

Publication number Publication date
US20130100975A1 (en) 2013-04-25
KR20130052575A (ko) 2013-05-22
KR101449824B1 (ko) 2014-10-08
JP2013532380A (ja) 2013-08-15
DE102010030141A1 (de) 2011-12-22
US8817833B2 (en) 2014-08-26
WO2011157581A1 (fr) 2011-12-22
DE102010030141B4 (de) 2012-04-19
JP5591398B2 (ja) 2014-09-17

Similar Documents

Publication Publication Date Title
WO2014135136A1 (fr) Dispositif de déviation de faisceau laser pour dispositif de production d'objets tridimensionnels
DE2831199C3 (de) Kryochirurgiegerät
EP0183023B1 (fr) Laser à gaz avec accouplement transversal d'énergie à haute fréquence
DE2555578C2 (de) Verfahren und Vorrichtung zum Abkühlen von Gegenständen oder Stoffen
WO2011157581A1 (fr) Laser à gaz et procédé permettant de faire fonctionner un laser à gaz
DE102012205870B3 (de) Kühlanordnung für einen Gaslaser, Gaslaser damit, sowie Verfahren zum Kühlen von Lasergas
EP3308868A1 (fr) Refroidissement d'un rouleau d'une cage de laminoir
DE19518280B4 (de) Vorrichtung zur Heizung und/oder Belüftung des Fahrgastraums eines Fahrzeugs
EP1921703B1 (fr) Système de piles à combustible ayant un dispositif pour préchauffer de l'air pour la cathode
EP1729900B1 (fr) Dispositif pour refroidir des toles et des feuillards
EP2715886B1 (fr) Laser à gaz doté d'un échangeur thermique
DE102016001175B4 (de) Laseroszillator mit eine Resonatoreinheit kühlenden Gebläsen
WO2009036913A1 (fr) Pile à combustible à membrane électrolytique polymère à haute température (ht-pemfc) comprenant des dispositifs pour son refroidissement
EP2747218A2 (fr) Agencement de refroidissement pour matériaux solides à effet laser, agencement laser et procédé de refroidissement d'un matériau solide à effet laser
EP1816424A1 (fr) Echangeur thermique pour un cycle frigorifique
DE3851893T2 (de) Vorrichtung und verfahren zur steuerung des gases zum laser.
DE102016119231A1 (de) Klimaanlage mit verbesserter Temperaturregelung und Verfahren dazu
DE1655069A1 (de) Waermeaustauscher fuer die Heizung und Kuehlung von Fahrzeugen
DE102016219205B4 (de) Mehrpassiger Luft/Kältemittel-Wärmeübertrager, Klimatisierungsvorrichtung für ein Kraftfahrzeug und Kraftfahrzeug
EP3781716A1 (fr) Dispositif de régulation de température pour le refroidissement partiel d'un composant
DE68906118T2 (de) Auskoppel-Vorrichtung für Gaslaser.
EP1816426B1 (fr) Dispositif de transfert de chaleur, en particulier d'un évaporateur arrière dans un véhicule automobile
AT523215A1 (de) Extrusionsdüse zur herstellung eines kunststoffprofils
DE10013094A1 (de) Temperaturregelung für eine Werkzeugmaschine
DE10238253A1 (de) UV-Bestrahlungsanlage

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20130116

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20160623

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20181211