EP2545412A4 - Composition de résine sensible à un rayonnement ou aux rayons actiniques et film de réserve et procédé de formation de motifs l'utilisant - Google Patents
Composition de résine sensible à un rayonnement ou aux rayons actiniques et film de réserve et procédé de formation de motifs l'utilisantInfo
- Publication number
- EP2545412A4 EP2545412A4 EP11753463.6A EP11753463A EP2545412A4 EP 2545412 A4 EP2545412 A4 EP 2545412A4 EP 11753463 A EP11753463 A EP 11753463A EP 2545412 A4 EP2545412 A4 EP 2545412A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- sensitive
- radiation
- resin composition
- forming method
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010053844A JP5639772B2 (ja) | 2010-03-10 | 2010-03-10 | 感活性光線性又は感放射線性樹脂組成物、並びに、それを用いたレジスト膜及びパターン形成方法 |
PCT/JP2011/055717 WO2011111805A1 (fr) | 2010-03-10 | 2011-03-04 | Composition de résine sensible à un rayonnement ou aux rayons actiniques et film de réserve et procédé de formation de motifs l'utilisant |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2545412A1 EP2545412A1 (fr) | 2013-01-16 |
EP2545412A4 true EP2545412A4 (fr) | 2013-11-13 |
Family
ID=44563603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11753463.6A Withdrawn EP2545412A4 (fr) | 2010-03-10 | 2011-03-04 | Composition de résine sensible à un rayonnement ou aux rayons actiniques et film de réserve et procédé de formation de motifs l'utilisant |
Country Status (6)
Country | Link |
---|---|
US (1) | US8795945B2 (fr) |
EP (1) | EP2545412A4 (fr) |
JP (1) | JP5639772B2 (fr) |
KR (1) | KR20130016214A (fr) |
TW (1) | TWI505021B (fr) |
WO (1) | WO2011111805A1 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5286236B2 (ja) * | 2009-11-30 | 2013-09-11 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、それを用いて形成した膜及びそれを用いたパターン形成方法 |
US9274423B2 (en) * | 2011-08-04 | 2016-03-01 | Lg Chem, Ltd. | Fluorine-based resins and photosensitive resin composition comprising the same |
US9261786B2 (en) | 2012-04-02 | 2016-02-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photosensitive material and method of photolithography |
US9213234B2 (en) | 2012-06-01 | 2015-12-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photosensitive material and method of lithography |
US9146469B2 (en) | 2013-03-14 | 2015-09-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Middle layer composition for trilayer patterning stack |
JP6818888B2 (ja) * | 2016-08-09 | 2021-01-20 | メルク パテント ゲゼルシャフト ミット ベシュレンクテル ハフツングMerck Patent Gesellschaft mit beschraenkter Haftung | 環境的に安定した厚膜化学増幅レジスト |
JP6813326B2 (ja) * | 2016-10-06 | 2021-01-13 | 東京応化工業株式会社 | レジストパターンのラフネスを低減させるために用いられる被覆剤、及びラフネスが低減されたレジストパターンの製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0803775A1 (fr) * | 1996-04-25 | 1997-10-29 | Fuji Photo Film Co., Ltd. | Composition photosensible de type positif |
US20080153036A1 (en) * | 2006-11-29 | 2008-06-26 | Sumitomo Chemical Company, Limited | Chemically amplified positive resist compostion |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3525651B2 (ja) * | 1996-10-15 | 2004-05-10 | 信越化学工業株式会社 | 三環式芳香族骨格を有するカルボン酸誘導体 |
JP3206740B2 (ja) * | 1998-07-30 | 2001-09-10 | 日本電気株式会社 | 化学増幅系レジスト |
TWI277830B (en) * | 1999-01-28 | 2007-04-01 | Sumitomo Chemical Co | Resist composition |
JP4480835B2 (ja) | 1999-02-12 | 2010-06-16 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | ポジ型感放射線性樹脂組成物 |
JP4025074B2 (ja) * | 2001-09-19 | 2007-12-19 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
JP2004102264A (ja) * | 2002-08-19 | 2004-04-02 | Fuji Photo Film Co Ltd | 化学増幅型レジスト組成物及びそれを用いたパターン形成方法 |
US6830871B2 (en) * | 2002-08-19 | 2004-12-14 | Fuji Photo Film Co., Ltd. | Chemical amplification type resist composition |
JP4109085B2 (ja) | 2002-11-06 | 2008-06-25 | 富士フイルム株式会社 | 電子ビーム描画方法 |
ATE446530T1 (de) * | 2003-03-31 | 2009-11-15 | Fujifilm Corp | Positiv arbeitende resistzusammensetzung |
JP2008162101A (ja) | 2006-12-27 | 2008-07-17 | Fujifilm Corp | モールド構造体の製造方法 |
JP2009288344A (ja) * | 2008-05-27 | 2009-12-10 | Fujifilm Corp | ポジ型レジスト組成物、及び該組成物を用いたパターン形成方法 |
-
2010
- 2010-03-10 JP JP2010053844A patent/JP5639772B2/ja active Active
-
2011
- 2011-03-04 EP EP11753463.6A patent/EP2545412A4/fr not_active Withdrawn
- 2011-03-04 US US13/521,332 patent/US8795945B2/en active Active
- 2011-03-04 WO PCT/JP2011/055717 patent/WO2011111805A1/fr active Application Filing
- 2011-03-04 KR KR1020127023524A patent/KR20130016214A/ko not_active Application Discontinuation
- 2011-03-09 TW TW100107936A patent/TWI505021B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0803775A1 (fr) * | 1996-04-25 | 1997-10-29 | Fuji Photo Film Co., Ltd. | Composition photosensible de type positif |
US20080153036A1 (en) * | 2006-11-29 | 2008-06-26 | Sumitomo Chemical Company, Limited | Chemically amplified positive resist compostion |
Non-Patent Citations (1)
Title |
---|
See also references of WO2011111805A1 * |
Also Published As
Publication number | Publication date |
---|---|
US20120301831A1 (en) | 2012-11-29 |
JP2011186340A (ja) | 2011-09-22 |
EP2545412A1 (fr) | 2013-01-16 |
TWI505021B (zh) | 2015-10-21 |
KR20130016214A (ko) | 2013-02-14 |
US8795945B2 (en) | 2014-08-05 |
JP5639772B2 (ja) | 2014-12-10 |
WO2011111805A1 (fr) | 2011-09-15 |
TW201133136A (en) | 2011-10-01 |
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Legal Events
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20131015 |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: G03F 7/039 20060101ALI20131009BHEP Ipc: H01L 21/027 20060101ALI20131009BHEP Ipc: G03F 7/16 20060101ALI20131009BHEP Ipc: G03F 7/004 20060101AFI20131009BHEP |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
Effective date: 20140515 |