EP2520807B1 - Pompe à vide avec rotor - Google Patents

Pompe à vide avec rotor Download PDF

Info

Publication number
EP2520807B1
EP2520807B1 EP12002241.3A EP12002241A EP2520807B1 EP 2520807 B1 EP2520807 B1 EP 2520807B1 EP 12002241 A EP12002241 A EP 12002241A EP 2520807 B1 EP2520807 B1 EP 2520807B1
Authority
EP
European Patent Office
Prior art keywords
balancing
rotor
vacuum pump
accordance
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP12002241.3A
Other languages
German (de)
English (en)
Other versions
EP2520807A2 (fr
EP2520807A3 (fr
Inventor
Helmut Bernhardt
Wolfgang Lobach
Herbert Stammler
Anja Stroh
Bernhard Tatzber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2520807A2 publication Critical patent/EP2520807A2/fr
Publication of EP2520807A3 publication Critical patent/EP2520807A3/fr
Application granted granted Critical
Publication of EP2520807B1 publication Critical patent/EP2520807B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings

Definitions

  • the invention relates to a vacuum pump according to the preamble of claim 1 and a method for balancing a rotor of such a vacuum pump.
  • a vacuum pump according to the preamble of claim 1 is known from EP 1 619 395 A1 known. Moreover, a vacuum pump having a balancing means for changing a balancing state of a rotor of the vacuum pump and a sensor for detecting the balancing state in the EP 1 273 803 A2 disclosed. Furthermore, devices for determining a state of balance of a rotating body in the US 5 544 073 A or US 4 046 704 A disclosed.
  • the running quality of a vacuum pump depends crucially on the balancing quality of the rotor or the rotors.
  • a very high balancing quality can be achieved, since the balancing process is carried out under the best conditions and partly in special devices.
  • vacuum pumps in particular molecular and turbomolecular vacuum pumps, were only used in clean applications where the lowest possible end pressure was of prime importance. Today they are exposed to very different conditions. Vacuum pumps are increasingly being used to extract process gases, which in some cases lead to extreme process deposits on the rotor and in the pumping system. The balancing quality of a vacuum pump can deteriorate to a high degree of contamination within just a few months so far that a further operation is permitted only after re-balancing.
  • One of these measures is targeted temperature management. In this individual areas of the vacuum pump are subjected to a heat treatment in order to avoid deposits.
  • Another solution for limiting deposits is to add inert gas.
  • the goal is either a substantial delimitation of the process components from the surfaces of the vacuum pump or an acceleration of the pumping speed.
  • the claimed features create a vacuum pump whose balancing quality can be improved in the simplest way. This can be done at the customer's site.
  • the invention can be carried out so that the vacuum pump does not have to be removed from the customer's device. Instead of a costly exchange with possibly subsequent disassembly of the vacuum pump, a fast rebalancing occurs in a process break. This achieves an enormous cost and time advantage.
  • FIG. 1 An arrangement with a vacuum pump.
  • a chamber 2 in which, for example, a coating process takes place, has a chamber flange 4, to which a vacuum-tight vacuum pump 10 is attached in a gas-tight manner.
  • the vacuum pump houses a rotor 20. Gas, which is conveyed and compressed in the vacuum pump, is transferred to the gas outlet line 6, which leads, for example, to a backing pump, not shown, which then compresses the gas to atmospheric pressure.
  • the vacuum pump has a pump electronics 12, which can be flanged directly to the vacuum pump. Within the pump electronics electronic assemblies are provided for various tasks, such as drive modules, interface controls and the like. With the pump electronics, a display element 16 is connected, which can be designed as a screen in the housing of the pump electronics, as a detachably connected handset with optical signal instrument or connected via an interface computer.
  • FIG Fig. 2 A first embodiment of the interior of the vacuum pump is shown in FIG Fig. 2 shown schematically.
  • the rotor 20 has a shaft 22 which carries at least one disc hub 24 to which a ring of blades 26 is attached.
  • a first end of the shaft is supported by a radial permanent magnet bearing 44 comprising a bearing stator 46 and a bearing rotor 48.
  • a fishing camp 36 prevents the contact of Lagerstator and bearing rotor in the case of high and excessive deflection of leading forces on the rotor.
  • a second end of the shaft is opposite the first.
  • the shaft is rotatably supported by a rolling bearing 50 in the axial and radial directions.
  • a motor magnet 40 is mounted on the shaft, which cooperates with a powered motor stator 38 and the shaft in rapid rotation about a rotation axis 200.
  • the rotor has a Holwecknabe 30 rotatably connected to the shaft, which carries a Holweckzylinder 32.
  • Balancing holes and introduced therein, for example, screwed, balancing weights are provided near the permanent magnet bearing.
  • a second plurality of balancing bores 106 with balancing weights 108 are mounted in the axle hub.
  • the energization of the motor stator is effected by a drive control 130 connected to the motor stator by means of current supply lines.
  • a rotor position detection unit 132 is connected to the energizing lines by means of position detection taps 142 and evaluates the rotor position from the signals of the energizing lines, for example the counter-electromotive force induced by the motor magnet. Conceivable is the use of Hall probes or the like, but the example shown has a cost advantage by eliminating components and avoids a source of error.
  • the rotor position detection unit may be part of the drive control and, for example, an in the motor control running in the case of a sinusoidally commutated synchronous motor to determine the rotor position.
  • a vibration sensor 52 is connected, which receives the vibrations of the rolling bearing. In this vibration signal, the information about the imbalance of the rotor 20 is included.
  • the vibration sensor is operatively connected via a sensor connection 144 to an evaluation unit 134. This is also operatively connected by means of a position detection connection 148 with the rotor position detection unit.
  • the evaluation unit is designed so that it generates the information about the imbalance from the vibration signal and assigns the information about the rotor position.
  • an assignment means for example, provided on the Holwecknabe recess 100 on the rotor, it is possible to unambiguously allocate the information about the unbalance the balancing bores and balancing weights.
  • FIG. 3 a likewise suitable embodiment of the inner life of the vacuum pump 10 before.
  • the rotor 20 comprises in this example, in addition to the shaft 22 a bell-shaped body 28, often called also short bell, which carries the blades 26. Through the bell, a cavity is created, in which the shaft is arranged. Surrounding it, it at least partially incorporates the components of a magnetic bearing to support the rotor in five axes.
  • the rotor has balancing means comprising balancing bores and balancing weights.
  • the balancing bores 102 of the first balancing plane and the balancing weights 104 located therein are located on the front side of the bell on which the shaft opposite outside.
  • the balancing bores 106 and the balancing weights 108 of the second balancing plane contained therein are provided on the casing of the bell between two blade rows.
  • a cover 80 may be provided which protects the balancing bores of the first level and is releasably connected to the bell.
  • a closure 82 may be provided, which is designed, for example, as a circulating around the bell metal band.
  • An assignment means which is designed for example as a small recess 100 in the form of a reduction, allows an assignment of the balancing bores to the position of the motor magnet and thus the assignment of the balancing state of the rotor to the balancing bores.
  • the assignment means in the example shown, the recess, be similar to the balancing holes covered.
  • Fig. 3 an alternative is shown, which is also applicable to the balancing bores and balancing weights.
  • a blocking gas inlet 84 sealing gas is admitted under the bell, whereby both the bell and the magnetic bearing are protected from process gases.
  • the marking is now arranged on the bell so that they are flown by the sealing gas and thus process deposits on the marking are suppressed.
  • the magnetic bearing comprises a bell-side end of the shaft associated upper radial bearing stator 60, an upper radial sensor 62, a lower radial bearing stator 64, and a lower radial sensor 66.
  • the storage is effected in two perpendicular spatial directions.
  • the radial sensors provide information about the position of the shaft within the radial bearing stators.
  • the remaining fifth axis is oriented along the axis of rotation 200 and is supported by a thrust bearing.
  • a thrust bearing Serve for this purpose an axial bearing stator 68 and the rotor side a thrust washer 70th
  • the energization of the coils of the radial and axial bearing stators is adjusted in accordance with the signals of the radial and axial sensors by a magnetic bearing controller 136 connected to the sensors and the coils.
  • the signals from the sensors contain the information about the balancing state of the rotor.
  • a sufficient number of backup bearings 36 ensures the storage in de-energized storage.
  • a drive causes the shaft and thus the rotor to rotate rapidly and comprises a motor stator 38 and a motor rotor 40.
  • the energization of the motor stator is effected by the drive controller 130 via supply lines 140.
  • a rotor position detection unit 132 is provided, which detects the rotational position of the rotor in a suitable form.
  • position detection taps 142 are provided with which the position information is determined from the counter-motor force induced by the motor magnet of the motor rotor.
  • An evaluation unit 134 is operatively connected to the rotor bearing detection unit 132 and to the magnetic bearing control 136. It is designed so that a rotor position is assigned to the determined from the magnetic bearing sensor signals balance state of the rotor. Due to the marking of the balancing state is then clearly associated with the balancing bores and balancing weights.
  • Fig. 4 Schematically illustrated are the first balancing plane 204 and the second balancing plane 206, in which balancing weights 104 and 108 are provided. With these balancing weights, the rotor is balanced as well as possible during production, so that a smooth running around the axis of rotation 200 results.
  • the motor rotor has a pronounced direction 202, which follows, for example, from the magnetization direction of a motor magnet. This direction is fixedly assigned to the positions of the balancing bores, since the motor rotor and balancing bores are stationary on the rotor. Again, stationary on the rotor is the marker 100.
  • the effects of imbalance are contained in the sensor signals.
  • the detection can be measured by sensors in two directions perpendicular to the axis of rotation.
  • a sensor may be provided which measures only in one direction and whose signal is then analyzed phase-related, because during the revolution about the axis of rotation, the imbalance is once in the direction and once perpendicular to the sensor direction.
  • the evaluation unit is now designed so that it is out of the imbalance changed balancing state derives a necessary change of individual balancing weights in the balancing planes and assigns them to the rotor position.
  • the absolute value of the unbalance can be output.
  • a simpler embodiment provides to design the evaluation unit so that it determines only the relative change of the balancing state based on the balancing state after the pump has been manufactured. From this follows the necessary change in the balancing means, in the example shown, the individual balancing weights. These changes are first assigned to the rotor position, that is, the direction 202. Since this is in a fixed relationship to the assignment means, the changes are also assigned to this.
  • a service technician After issuing the necessary changes in the balancing weights via the display element 16, which is accordingly adapted to output the information about the change of the balancing means, a service technician is able to make the necessary changes by looking up the allocation means of the rotor, for example the recess and starting from this, looking for the individual balancing bores and adapts the balancing weights contained therein.
  • the adjustment can be a simple replacement of the balance weight.
  • the balancing weights 104a to 104d are provided, which are distributed on the rotor over the circumference and arranged at a distance from the rotation axis 200.
  • a first spatial direction 212 and a second orthogonal spatial direction 214 span the balancing plane.
  • the rotor can never be made so accurately that the center of mass coincides with the axis of rotation. He is therefore in a production balance state 230, the smooth running of the rotor at the required high speeds not possible. Therefore, the balance weights are added to achieve an initial balance state 232 where the center of gravity is sufficiently close to the axis of rotation.
  • the masses are used in the initial state 240a to 240d, the rotor is in the tilluchtuchtSh after this process step.
  • deposits progressively change the balancing state according to the balancing curve 250 until the balancing state is achieved by deposits 234. This balancing condition requires rebalancing of the rotor for further operation of the pump.
  • the balancing state is included in the sensor signals.
  • the evaluation unit is designed and configured to calculate the changes of the balancing means and to assign them to the rotor position and the allocation means to the balancing means.
  • the absolute value of the imbalance can also be calculated and output. In both cases, as part of the process, the balancing state of the rotor is monitored and assigned to a rotor position.
  • the method now provides that upon a change in the balancing state, for example by the abovementioned deposits, balancing means provided on the rotor are changed to improve the balancing state.
  • balancing means provided on the rotor are changed to improve the balancing state.
  • the mass changes 244a to 244d the balancing weights are brought to the mass according to balances 242a to 242d.
  • the new balancing state 236 is reached which allows further operation of the rotor.
  • FIG. 6 A development of the balancing shows Fig. 6 as a section through a rotor Fig. 3 , whereby the measure also after a rotor after Fig. 2 is applicable. In outline, the circumferential row of blades 26 can be seen. These are attached to the bell 28. About the scope the bell balancing bores 106 are distributed. All or part of the balancing bores may be designed as continuous as the balancing bore 112.
  • the assignment means may be used instead of or in addition to that in the Fig. 2 and 3 shown recess comprise a balancing bore with a larger diameter 110.
  • the allocation means provides a non-rotationally symmetric distribution of the balancing means in the circumferential direction. In Fig. 6 this is shown.
  • the balancing bores 106 are located at a normal distance 220, wherein asymmetrically placed bores 114 are provided, which have a shortened distance 222 to at least one of the closest balancing bores.
  • FIG. 7 Another embodiment of the allocation means shows the Fig. 7 .
  • Fig. 7 is a plan view of a rotor 20 shown with bell 28, on the outer periphery of blades 26 are arranged.
  • the assignment means in this example comprises an asymmetric connection screw 152.
  • the asymmetry is achieved by a shorter distance 262 from the axis of rotation.
  • this connection screw may have a different diameter.
  • Other ways of making this connecting screw asymmetrical to the others are conceivable, for example with the aid of washers, markings, color design, to name a few.
  • the balancing means comprises in this example balancing points 154 which are distributed over the circumference. At these locations material is removed, for example, in a cutting or grinding manner, whereby the Balance of the rotor is selectively changed.
  • the asymmetrical connecting screw is assigned to one of the equalization points, so that the balance means uniquely assigns the balance to the rotor position.
  • Fig. 8 is a section, not belonging to the invention, shown by a rotor with bell 28 at the level of balancing bores 112.
  • the number of blades and the number of balancing holes are in a proportionable ratio, in the example shown there are eight blades and five balancing holes. By this ratio of the number, it is possible to provide an associated balancing bore 156, which is uniquely associated, for example, with a blade edge 158 of a blade.
  • the allocation means in this example comprises elements of the rotor, namely the blades, which are distributed in such a way as the balancing means, namely the balancing bores, about the axis of rotation 200, that an unambiguous assignment of the balancing means and to one of the elements arises.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (10)

  1. Pompe à vide (10) comportant un rotor (20) qui comprend des moyens d'équilibrage, un entraînement (38, 40) apte à animer le rotor d'une rotation, des paliers (44, 50 ; 60, 62, 64, 66, 68, 70) aptes à soutenir le rotor, un moyen capteur apte à détecter un état d'équilibrage du rotor et en outre apte à coopérer avec une unité d'évaluation (134) apte à reconnaître une modification de l'état d'équilibrage, dans laquelle
    la pompe à vide est adaptée à coopérer avec une unité (132) de reconnaissance de la position du rotor pour déterminer la position du rotor,
    il est prévu un moyen d'association pour associer l'état d'équilibrage à la position du rotor, de telle sorte qu'une adaptation des moyens d'équilibrage est rendue possible afin de faire face à la modification de l'état d'équilibrage, et
    caractérisée en ce que
    le moyen d'association est conçu comme une configuration qui n'est pas à symétrie de révolution du moyen d'équilibrage, en particulier comme une répartition de perçages d'équilibrage (114), qui n'est pas à symétrie de révolution.
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que
    l'un des paliers comprend un roulement à billes (50) qui soutient le rotor (20) en direction radiale.
  3. Pompe. à vide selon la revendication 1,
    caractérisée en ce que
    les paliers comprennent un palier radial magnétique actif (60, 62, 64, 66).
  4. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que
    le moyen capteur comprend un capteur de vibrations (52), le moyen capteur étant conçu pour détecter des vibrations dans au moins une direction spatiale.
  5. Pompe à vide selon la revendication 3,
    caractérisée en ce que
    le moyen capteur comprend un capteur de distance de palier radial (62, 66).
  6. Pompe à vide selon l'une des revendications 1 à 5,
    caractérisée en ce que
    l'état d'équilibrage contient une valeur absolue et la position d'un balourd (208).
  7. Pompe à vide selon l'une des revendications 1 à 5,
    caractérisée en ce que
    l'état d'équilibrage contient une modification relative du balourd (208).
  8. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que
    le moyen d'équilibrage comprend une pluralité de perçages d'équilibrage (102, 106 ; 110, 112, 114, 156) répartis sur le rotor et destinés à recevoir respectivement un poids d'équilibrage (104, 108 ; 104a, 104b, 104c, 104d).
  9. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que
    le moyen d'équilibrage, en particulier les perçages d'équilibrage (102, 106 ; 110, 112, 114, 156) sont protégés contre des dépôts causés par le processus.
  10. Procédé d'équilibrage d'un rotor (20) d'une pompe à vide (10) selon la revendication 1, dans lequel le rotor (20) est amené dans un état d'équilibrage de départ (232),
    caractérisé en ce que
    l'état d'équilibrage du rotor (20) est surveillé, l'état d'équilibrage est associé à une position du rotor, et lors d'une modification de l'état d'équilibrage, des moyens d'équilibrage prévus sur le rotor (20) sont modifiés pour améliorer l'état d'équilibrage.
EP12002241.3A 2011-05-05 2012-03-28 Pompe à vide avec rotor Not-in-force EP2520807B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011105806A DE102011105806A1 (de) 2011-05-05 2011-05-05 Vakuumpumpe mit Rotor

Publications (3)

Publication Number Publication Date
EP2520807A2 EP2520807A2 (fr) 2012-11-07
EP2520807A3 EP2520807A3 (fr) 2014-09-24
EP2520807B1 true EP2520807B1 (fr) 2017-05-10

Family

ID=46000618

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12002241.3A Not-in-force EP2520807B1 (fr) 2011-05-05 2012-03-28 Pompe à vide avec rotor

Country Status (3)

Country Link
EP (1) EP2520807B1 (fr)
JP (1) JP6188278B2 (fr)
DE (1) DE102011105806A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11333154B2 (en) * 2018-10-15 2022-05-17 Shimadzu Corporation Vacuum pump with a rotary body in a case with the rotary body having at least three balance correction portions accessible from an outside of the case for balance correction by an n-plane method

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012112492A1 (de) * 2012-12-18 2014-06-18 Pfeiffer Vacuum Gmbh Vakuumsystem
DE102013113400A1 (de) * 2013-12-03 2015-06-03 Pfeiffer Vacuum Gmbh Pumpe und Verfahren zum Wuchten eines Rotors
DE102014103060B4 (de) * 2014-03-07 2019-01-03 Pfeiffer Vacuum Gmbh Verfahren zum Wuchten eines Rotors einer Vakuumpumpe oder eines Rotors einer Rotationseinheit für eine Vakuumpumpe
EP3244068B1 (fr) * 2016-05-10 2020-01-01 Pfeiffer Vacuum Gmbh Pompe à vide
EP3244067B1 (fr) * 2016-05-10 2020-07-22 Pfeiffer Vacuum Gmbh Pompe à vide et procédé de réduction d'un balourd residuel dans une pompe à vide
US11105203B2 (en) 2018-01-29 2021-08-31 Carrier Corporation High efficiency centrifugal impeller with balancing weights
JP7363397B2 (ja) * 2019-11-13 2023-10-18 株式会社島津製作所 真空ポンプの振動測定方法および真空ポンプ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4064704A (en) * 1975-12-05 1977-12-27 Ird Mechanalysis, Inc. Vibration analyzing apparatus
DE3818556A1 (de) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik Magnetlager fuer eine schnell rotierende vakuumpumpe
US5544073A (en) * 1994-06-02 1996-08-06 Computational Systems, Inc. Rotor balancing calculator
DE19627921A1 (de) * 1996-07-11 1998-01-15 Leybold Vakuum Gmbh Verfahren zum Wuchten eines Rotors sowie für die Durchführung dieses Verfahrens geeigneter Rotor
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ
JP2003021092A (ja) * 2001-07-03 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
JP2003021093A (ja) * 2001-07-05 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
JP2003336597A (ja) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP4400348B2 (ja) * 2004-07-09 2010-01-20 株式会社島津製作所 ターボ分子ポンプおよびバランス修正方法
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
DE102004050743A1 (de) * 2004-10-19 2006-04-20 Pfeiffer Vacuum Gmbh Vibrationsarme Vakuumpumpe
DE102007027711A1 (de) * 2007-06-15 2008-12-18 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Anordnung mit Vakuumpumpe und Anordnung mit einer Vakuumpumpe
JP4934089B2 (ja) * 2008-04-09 2012-05-16 株式会社荏原製作所 ターボ分子ポンプ
JP2011012611A (ja) * 2009-07-02 2011-01-20 Shimadzu Corp 回転体のアンバランス修正方法、アンバランス修正装置および真空ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11333154B2 (en) * 2018-10-15 2022-05-17 Shimadzu Corporation Vacuum pump with a rotary body in a case with the rotary body having at least three balance correction portions accessible from an outside of the case for balance correction by an n-plane method

Also Published As

Publication number Publication date
EP2520807A2 (fr) 2012-11-07
DE102011105806A1 (de) 2012-11-08
EP2520807A3 (fr) 2014-09-24
JP6188278B2 (ja) 2017-08-30
JP2012233477A (ja) 2012-11-29

Similar Documents

Publication Publication Date Title
EP2520807B1 (fr) Pompe à vide avec rotor
EP3550150B1 (fr) Procédé d'equilibrage d'un rotor d'une pompe à vide ou d'un rotor d'une unité de rotation pour une pompe à vide
EP3139044B1 (fr) Procédé d'équilibrage d'un rotor d'une pompe à vide ou d'un rotor d'une unité de rotation pour une pompe à vide
DE112008003624B4 (de) Hydraulische Maschine und Lüfterantriebsvorrichtung
EP2373457B1 (fr) Ensemble palier avec section de palier magnétique ainsi que procédé de réglage d'un ou de l'ensemble système de palier
DE102008060262B4 (de) Sensorsystem für elektrische Maschinen mit mehrpoligen Sensormagneten und mindestens einem Hall-IC
DE102015113681B3 (de) Verfahren zum Reduzieren eines magnetischen Streuvektorfelds einer Vakuumpumpe oder Rotationseinheit sowie Vakuumpumpe und Rotationseinheit
WO2008017498B1 (fr) Dispositif pourvu d'un corps de rotation à entraînement direct, et palier aérostatique
EP3361102B1 (fr) Dispositif de détection de position
DE10302531B4 (de) Messeinrichtung und Messverfahren für Elektromotoren
EP1611423A1 (fr) Dispositif et procede de mesure de desequilibre
DE102005001494A1 (de) Regelverfahren für eine Magnetlagerung und hiermit korrespondierende Einrichtung
DE102015103670A1 (de) Verfahren und Vorrichtung zum Ausgleich einer Unwucht eines Rotors
EP2856622B1 (fr) Flasque pour machine électrique, machine électrique et procédé de montage d'une machine électrique
EP2848816B1 (fr) Agencement doté d'une pompe à vide turbomoléculaire et procédé de compensation d'un champ magnétique d'au moins un élément produisant un champ magnétique parasite disposé dans une pompe à vide turbomoléculaire
DE3248085C2 (de) Verfahren zum Auswuchten von rotationssymmetrischen Teilen während der Rotation
EP3112687B1 (fr) Détection de la circulation d'un gaz auxiliaire qui est injecté dans une pompe à vide
DE10321925B4 (de) Radiales Magnetlager, Verfahren zum Zusammenbau eines Magnetlagers sowie Rotationsmaschine mit einem radialen Magnetlager
EP2106505A1 (fr) Procédé de détermination des fréquences de résonance d'un rotor à palier magnétique
EP3708843B1 (fr) Procédé de fabrication d'un moteur électrique ou d'un appareil a vide avec un tel moteur
DE102008016745B4 (de) Lagereinrichtung für einen Spinnrotor
DE102016217693A1 (de) Vorrichtung und Verfahren zur Messung einer Rotationsbewegung eines drehbaren Bauteils, insbesondere einer Rotationsrichtung
EP3536966B1 (fr) Appareil à vide
DE102006057391A1 (de) Farbrad
DE102014214511A1 (de) Vorrichtung mit einer Gantry

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 29/058 20060101ALI20140820BHEP

Ipc: F04D 19/04 20060101AFI20140820BHEP

Ipc: F04D 29/66 20060101ALI20140820BHEP

17P Request for examination filed

Effective date: 20150303

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

17Q First examination report despatched

Effective date: 20160307

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20161010

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 892652

Country of ref document: AT

Kind code of ref document: T

Effective date: 20170515

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502012010271

Country of ref document: DE

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20170510

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170811

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170810

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170810

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170910

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502012010271

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20180213

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20180331

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180328

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180328

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180331

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180331

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180331

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 892652

Country of ref document: AT

Kind code of ref document: T

Effective date: 20180328

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20180328

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20120328

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170510

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20170510

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20220321

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20220322

Year of fee payment: 11

Ref country code: CZ

Payment date: 20220325

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20220530

Year of fee payment: 11

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 502012010271

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CZ

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230328

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20230328

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230328

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230328

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20231003

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20230328