EP2333340A1 - Flexible element for a micro-pump - Google Patents
Flexible element for a micro-pump Download PDFInfo
- Publication number
- EP2333340A1 EP2333340A1 EP09178168A EP09178168A EP2333340A1 EP 2333340 A1 EP2333340 A1 EP 2333340A1 EP 09178168 A EP09178168 A EP 09178168A EP 09178168 A EP09178168 A EP 09178168A EP 2333340 A1 EP2333340 A1 EP 2333340A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- micro
- actuator
- membrane
- pump according
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005086 pumping Methods 0.000 claims abstract description 9
- 239000010935 stainless steel Substances 0.000 claims abstract description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 5
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims abstract description 3
- 239000012528 membrane Substances 0.000 claims description 40
- 238000004026 adhesive bonding Methods 0.000 claims description 4
- 239000003292 glue Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000919 ceramic Substances 0.000 abstract description 2
- 238000006073 displacement reaction Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 4
- 230000008602 contraction Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000005459 micromachining Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 240000008042 Zea mays Species 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
Definitions
- the invention relates to micro-pumps obtained by micromachining and activatable by means of an actuator such as a piezoelectric element.
- these devices are in the form of a stack, or a support plate, an intermediate layer acting as a flexible membrane, a pumping chamber and a closure plate, the pumping chamber communicating with the outside, eg through the support plate.
- Part of the membrane is secured to a piezoelectric element disposed outside the device.
- the connection between these two elements is achieved by means of at least one element, eg a block obtained by micromachining in the support plate.
- the problem that the present invention proposes to solve lies in the difficulty of ensuring a high-performance link between a membrane and an actuator that deforms when activated.
- the solution of the aforementioned problem consists of a micro-pump in the form of a stack successively comprising a support plate, an intermediate layer acting as a flexible membrane, a pumping chamber and a closure plate said pump chamber communicating with the outside of the micro-pump, eg through the support plate, said membrane being secured to an actuator disposed outside the micro-pump, the connection being made through a passage passing through the support plate.
- the actuator may be chosen from piezoelectric bi-morphs, piezoelectric multi-morphs, thermal bi-morphs or shape-memory alloy beams.
- this type of actuator can exert significant forces, typically of the order of 0.1 N to 100 N.
- this type of actuator can exert a small amplitude movement along a non-rectilinear trajectory, for example on a circular arc.
- the length of the trajectory may be less than 1 mm.
- the invention is characterized in that the membrane is secured to the actuator by means of at least one element in the form of a strip, rigid along its main axis and flexible in the direction perpendicular to its main axis. Rigidity allows the force of the actuator to be transmitted in a linear movement of the membrane while the flexibility ensures the lateral transmission of this force.
- the actuator is a bi-morphic piezoelectric blade.
- the actuator comprises a fixed end and a free end, the latter being disposed cantilever at the exit of the passage.
- One end of the band being attached to said free end.
- the strip is adhesively bonded to the piezoelectric element.
- the strip is in direct contact with the membrane.
- the band is preferably fixed by gluing to the membrane.
- the end of the strip which is attached to the membrane preferably has holes or a crenellated contour.
- the tape may be made of any material that achieves the intended purpose.
- it is made of stainless steel.
- the piezoelectric element comprises electrical contacts disposed near said fixed end.
- a particularly interesting configuration is to fix the micro-pump on a rigid part, on which part is also fixed said fixed end of the piezoelectric element.
- the constituent elements of this set thus form a closed loop.
- the bonding between the membrane of the micro-pump and the flexible element is then carried out last. In this way these two elements are fixed in their relative position by the other elements and fasteners of the loop.
- the last fixation (eg gluing) makes it possible to absorb the variations of geometry and to avoid the hyper - statisms by fixing this relative position.
- the micro-pump shown on the figure 1 is formed of elements preferably made of silicon and glass. It is performed using micromachining technologies known per se. It comprises in particular a glass base plate 12, a silicon support plate 1, a silicon flexible membrane 2, a pumping chamber 4 and a glass closure plate 3, the pumping chamber 4 being defined between the membrane 2 and the closure plate 3.
- a glass base plate 12 a silicon support plate 1
- a silicon flexible membrane 2 a silicon flexible membrane 2
- pumping chamber 4 being defined between the membrane 2 and the closure plate 3.
- a piezoelectric element 5 (not shown on the figure 1 ) is made integral with a transmission block 13 machined in the support plate 3.
- the figure 2 schematically illustrates a sectional view of a variant of the invention.
- the electrical voltage applied to the fixed end 8 of a piezoelectric element 5 induces its contraction, contraction which results in a circular movement of its free end 9.
- the maximum displacement of the piezoelectric element 5 is therefore at its free end 9.
- Several electrical contacts 15 are placed in such a way that by applying a tension on each of them, the displacement occurs either in one direction or in the other and / or increasing the displacement.
- the free end 9 of the piezoelectric element is attached to an upper end 10 of a strip 6 disposed in a vertical direction, inside a cylindrical passage 7.
- the invention consists mainly in using as connecting element 6 a band, easily deformable horizontally. Moreover, the strip 6 is sufficiently rigid and resistant along its main axis so as to transmit the movement of the piezoelectric element to the membrane 2.
Abstract
Description
L'invention concerne les micro-pompes obtenues par micro-usinage et activables au moyen d'un actuateur tel que élément piézo-électrique.The invention relates to micro-pumps obtained by micromachining and activatable by means of an actuator such as a piezoelectric element.
De tels dispositifs sont décrits notamment dans la demande de brevet internationale
De manière générale, ces dispositifs se présentent sous forme d'un empilement , soit d'une plaque de support, d'une couche intermédiaire jouant le rôle de membrane flexible, d'une chambre de pompage et d'une plaque de fermeture, la chambre de pompage communiquant avec l'extérieur, p.ex. au travers de la plaque de support. Une partie de la membrane est rendue solidaire d'un élément piézo-électrique disposé à l'extérieur du dispositif. La liaison entre ces deux éléments est réalisée par l'intermédiaire d'au moins un élément, p.ex. un bloc obtenu par micro-usinage dans la plaque support.In general, these devices are in the form of a stack, or a support plate, an intermediate layer acting as a flexible membrane, a pumping chamber and a closure plate, the pumping chamber communicating with the outside, eg through the support plate. Part of the membrane is secured to a piezoelectric element disposed outside the device. The connection between these two elements is achieved by means of at least one element, eg a block obtained by micromachining in the support plate.
Le problème que la présente invention se propose de résoudre réside dans la difficulté d'assurer un lien performant entre une membrane et un actuateur qui se déforme lorsqu'il est activé.The problem that the present invention proposes to solve lies in the difficulty of ensuring a high-performance link between a membrane and an actuator that deforms when activated.
Dans l'invention, la solution du problème précité consiste en une micro-pompe se présentant sous forme d'un empilement comprenant successivement une plaque de support, une couche intermédiaire jouant le rôle de membrane flexible, une chambre de pompage et une plaque de fermeture, ladite chambre de pompage communiquant avec l'extérieur de la micro-pompe, p.ex. au travers de la plaque de support, ladite membrane étant rendue solidaire d'un actuateur disposé à l'extérieur de la micro-pompe, la liaison étant réalisée au travers d'un passage traversant la plaque support.In the invention, the solution of the aforementioned problem consists of a micro-pump in the form of a stack successively comprising a support plate, an intermediate layer acting as a flexible membrane, a pumping chamber and a closure plate said pump chamber communicating with the outside of the micro-pump, eg through the support plate, said membrane being secured to an actuator disposed outside the micro-pump, the connection being made through a passage passing through the support plate.
L'actuateur peut être choisi parmi les bi-morphes piézo-électriques, les multi-morphes piézo-électriques, les bi-morphes thermiques ou des poutres en alliage à mémoire de forme,The actuator may be chosen from piezoelectric bi-morphs, piezoelectric multi-morphs, thermal bi-morphs or shape-memory alloy beams.
Malgré son faible encombrement, ce type d'actuateur peut exercer des forces importantes, typiquement de l'ordre de 0.1 N à 100 N.Despite its small size, this type of actuator can exert significant forces, typically of the order of 0.1 N to 100 N.
En outre, ce type d'actuateur peut exercer un mouvement de faible amplitude le long d'une trajectoire non rectiligne, par exemple sur un arc de cercle. La longueur de la trajectoire peut être inférieure à 1 mm.In addition, this type of actuator can exert a small amplitude movement along a non-rectilinear trajectory, for example on a circular arc. The length of the trajectory may be less than 1 mm.
L'invention se caractérise par le fait que la membrane est rendue solidaire de l'actuateur par l'intermédiaire d'au moins un élément se présentant sous la forme d'une bande, rigide selon son axe principal et flexible selon la direction perpendiculaire à son axe principal. La rigidité permet de transmettre la force de l'actuateur dans un mouvement linéaire de la membrane alors que la flexibilité assure la transmission latérale de cette force.The invention is characterized in that the membrane is secured to the actuator by means of at least one element in the form of a strip, rigid along its main axis and flexible in the direction perpendicular to its main axis. Rigidity allows the force of the actuator to be transmitted in a linear movement of the membrane while the flexibility ensures the lateral transmission of this force.
De préférence, l'actuateur est une lame bi-morphe piézo-électrique.Preferably, the actuator is a bi-morphic piezoelectric blade.
Avantageusement, l'actuateur comporte une extrémité fixe et une extrémité libre, cette dernière étant disposée en porte-à-faux à la sortie du passage. Une des extrémités de la bande étant fixée à ladite extrémité libre.Advantageously, the actuator comprises a fixed end and a free end, the latter being disposed cantilever at the exit of the passage. One end of the band being attached to said free end.
De préférence, la bande est fixée par collage à l'élément piézo-électrique.Preferably, the strip is adhesively bonded to the piezoelectric element.
Selon une variante de l'invention, la bande est en contact direct avec la membrane. Dans cette configuration, la bande est de préférence fixée par collage à la membrane.According to a variant of the invention, the strip is in direct contact with the membrane. In this configuration, the band is preferably fixed by gluing to the membrane.
Afin de renforcer le collage, l'extrémité de la bande qui est fixée à la membrane comporte de préférence des trous ou un contour crénelé.In order to strengthen the bonding, the end of the strip which is attached to the membrane preferably has holes or a crenellated contour.
La bande peut être constituée en n'importe quel matériau permettant d'atteindre l'objectif visé. Avantageusement elle est en acier inox.The tape may be made of any material that achieves the intended purpose. Advantageously it is made of stainless steel.
Selon un mode de réalisation de l'invention, l'élément piézo-électrique comporte des contacts électriques disposés à proximité de ladite extrémité fixe.According to one embodiment of the invention, the piezoelectric element comprises electrical contacts disposed near said fixed end.
Une configuration particulièrement intéressante consiste à fixer la micro-pompe sur une pièce rigide, pièce sur laquelle est également fixée ladite extrémité fixe de l'élément piézo-électrique. Les éléments constitutifs de cet ensemble forment ainsi une boucle fermée.A particularly interesting configuration is to fix the micro-pump on a rigid part, on which part is also fixed said fixed end of the piezoelectric element. The constituent elements of this set thus form a closed loop.
Lors de l'assemblage de ces éléments, des variations de géométrie ou des défauts d'alignement peuvent toutefois se produire et s'additionner, entraînant de la sorte des erreurs inacceptables ou des hyper-statismes lorsque la dernière fixation est réaliséeWhen assembling these elements, however, variations in geometry or misalignment may occur and add up, resulting in unacceptable errors or hyper-droopings when the last fixation is made.
De préférence, on réalise dès lors le collage entre la membrane de la micro-pompe et l'élément flexible en dernier. De cette façon ces deux éléments sont fixés dans leur position relative par les autres éléments et fixations de la boucle.Preferably, the bonding between the membrane of the micro-pump and the flexible element is then carried out last. In this way these two elements are fixed in their relative position by the other elements and fasteners of the loop.
La dernière fixation (p.ex. collage) permet donc d' absorber les variations de géométrie et éviter les hyper-statismes en figeant cette position relative.The last fixation (eg gluing) makes it possible to absorb the variations of geometry and to avoid the hyper - statisms by fixing this relative position.
L'invention est décrite plus en détail ci-après au moyen d'exemples illustrés par les figures suivantes :
- La
figure 1 présente un type de micro-pompe pouvant être utilisée dans le cadre de la présente invention. - La
figure 2 représente une variante de réalisation selon l'invention. - La
figure 3 représente une manière de fixer la bande à la membrane.
- The
figure 1 presents a type of micro-pump that can be used in the context of the present invention. - The
figure 2 represents an alternative embodiment according to the invention. - The
figure 3 represents a way of fixing the band to the membrane.
Les références numériques suivantes sont utilisées dans la présente demande:
- 1. Plaque de support
- 2. Membrane flexible
- 3. Plaque de fermeture
- 4. Chambre de pompage
- 5. Elément piézo-électrique
- 6. Bande
- 7. Passage
- 8. Extrémité fixe de l'élément piézo-électrique
- 9. Extrémité libre de l'élément piézo-électrique
- 10. Extrémité supérieure de la bande
- 11. Pièce rigide
- 12. Plaque de base
- 13. Bloc de transmission
- 14. Extrémité inférieure de la bande
- 15. Contact électrique
- 1. Support plate
- 2. Flexible membrane
- 3. Closing plate
- 4. Pumping chamber
- 5. Piezoelectric element
- 6. Band
- 7. Passage
- 8. Fixed end of the piezoelectric element
- 9. Free end of the piezoelectric element
- 10. Upper end of the band
- 11. Rigid piece
- 12. Base plate
- 13. Transmission block
- 14. Lower end of the band
- 15. Electrical contact
La micro-pompe illustrée sur la
Un élément piézo-électrique 5 (non-illustré sur la
La
La tension électrique appliqué a l'extrémité fixe 8 d'un élément piézo-électrique 5 induit sa contraction, contraction qui se traduit en un mouvement circulaire de son extrémité libre 9. Le déplacement maximal de l'élément piézo-électrique 5 se situe donc au niveau de son extrémité libre 9. Plusieurs contacts électriques 15 sont placés de telle façon qu'en appliquant une tension sur chacun d'entre eux, le déplacement se produit soit dans un sens, soit dans l'autre et/ou en augmentant le déplacement.The electrical voltage applied to the
L'extrémité libre 9 de l'élément piézo-électrique est attachée à une l'extrémité supérieure 10 d'une bande 6 disposée selon une direction verticale, à l'intérieur d'un passage de forme cylindrique 7. La bande 6, constituée p.ex. d'acier inox, présente donc une flexibilité horizontale(latérale). Elle peut donc se déplacer selon cette direction lorsqu'une force horizontale agit sur elle, ce qui se produit dans le cas présent avec l'élément piézo-électrique 5.The free end 9 of the piezoelectric element is attached to an
II convient de relever à ce stade que les systèmes de l'état de la technique consistent à absorber la contrainte horizontale par des points pivot, par intégration de pièces à mouvements rotatifs.It should be noted at this stage that the systems of the state of the art consist in absorbing the horizontal stress by pivot points, by integrating parts with rotating movements.
L'invention consiste principalement à utiliser comme élément de liaison 6 une bande, facilement déformable horizontalement. Par ailleurs, la bande 6 est suffisamment rigide et résistante le long de son axe principal de manière à transmettre le mouvement de l'élément piézo-électrique à la membrane 2.The invention consists mainly in using as connecting element 6 a band, easily deformable horizontally. Moreover, the
La variante illustrée sur la
- a) Une micro-pompe est fixée a une pièce rigide 11.
- b) Un fluide est aspiré ou refoulé en fonction du déplacement de la bande 6.
- c) Des contacts électriques 15 sont disposés à proximité du point fixe 8 de l'élément piézo-électrique 5.
- d) La bande flexible 6 est fixée à l'extrémité 9 de l'élément piézo-électrique 5 et à la
membrane 2.
Lorsqu'une tension électrique est appliquée sur un des contacts de l'élément piézo-électrique 5, cette tension provoque une contraction qui se traduit par un mouvement angulaire, le plus grand déplacement se situe à l'extrémité libre 9 de l'élément piézo-électrique 5. - e) Le mouvement induit par l'élément piézo-électrique 5 tire ou pousse la bande 6 selon un axe vertical, les déplacements non verticaux sont absorbés par une déformation de la bande 6.
- f)
Une extrémité 14 de la bande 6 est fixée par collage à la membrane 2 (voirfigure 3 ), l'autre extrémité 10 étant fixée par collage sur l'élément piézo-électrique 5. - g) La matière de la bande 6 est de préférence en acier inox, d'épaisseur 0,05mm. Elle est découpée et pliée .
- h) Afin d'obtenir un bon collage entre la bande 6 et
la membrane 2, des cavités sont découpées (formation de créneaux) sur l'extrémité concernée de la bande (voir figure 4 qui représente l'extrémité inférieure de la bande 6 selon un plan perpendiculaire aux plans des autres figures). - i) L'élément piézo-électrique 5 est de préférence une lame bi-morphe comportant 3 contacts électriques.
- j) La pièce rigide 11 est soumisse aux efforts transmis par la déformation de l'élément piézo-électrique 5. Afin d'assurer une rigidité suffisante au bon fonctionnement de la pompe , la pièce rigide 11 est réalisée de préférence en céramique.
- k)
La membrane 2 est délicate, la liaison avec la bande 6 est réalisée de préférence par une goute de colle, une distance de sécurité entre les pièces empêche d'endommager lamembrane 2. Des variations d'épaisseur de la pièce rigide ou de la longueur de la bande sont compensées par une pénétration plus ou moins profonde dans la goutte de colle. - l)
La bande 6 est dimensionnée suffisamment rigide pour pousser et tirer lamembrane 2, mais aussi suffisamment déformable par flambage dans la limite d'élasticité si une surpression due à une occlusion génère une force supérieure, de cette façon on empêche de causer des dommages sur la pompe.
- a) A micro-pump is attached to a
rigid part 11. - b) A fluid is sucked or discharged according to the displacement of the
strip 6. - c)
Electrical contacts 15 are arranged near the fixedpoint 8 of the piezoelectric element 5. - d) The
flexible strip 6 is fixed to the end 9 of the piezoelectric element 5 and to themembrane 2.
When an electrical voltage is applied to one of the contacts of the piezoelectric element 5, this voltage causes a contraction which results in angular movement, the greatest displacement is at the free end 9 of the piezo element -electric 5. - e) The movement induced by the piezoelectric element 5 pulls or pushes the
strip 6 along a vertical axis, the non-vertical displacements are absorbed by a deformation of thestrip 6. - f) One
end 14 of thestrip 6 is fixed by gluing to the membrane 2 (seefigure 3 ), the other end being adhesively secured to the piezoelectric element 5. - g) The material of the
strip 6 is preferably made of stainless steel, 0.05 mm thick. It is cut and folded. - h) In order to obtain a good bond between the
strip 6 and themembrane 2, cavities are cut (formation of crenellations) on the end of the strip (see FIG. 4 which represents the lower end of thestrip 6 according to a plane perpendicular to the planes of the other figures). - i) The piezoelectric element 5 is preferably a bi-morphic blade having 3 electrical contacts.
- j) The
rigid part 11 is subjected to the forces transmitted by the deformation of the piezoelectric element 5. In order to ensure sufficient rigidity to the proper operation of the pump, therigid part 11 is preferably made of ceramic. - k) The
membrane 2 is delicate, the connection with thestrip 6 is preferably performed by a drop of glue, a safety distance between the parts prevents damage to themembrane 2. Variations in the thickness of the rigid part or the length of the band are compensated by a more or less deep penetration into the drop of glue. - l) The
strip 6 is dimensioned sufficiently rigid to push and pull themembrane 2, but also sufficiently deformable by buckling in the elastic limit if an overpressure due to an occlusion generates a higher force, in this way it prevents damage from occurring. on the pump.
Il va de soi que l'invention ne se limite pas aux exemples précités.It goes without saying that the invention is not limited to the above examples.
Claims (16)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09178168A EP2333340A1 (en) | 2009-12-07 | 2009-12-07 | Flexible element for a micro-pump |
EP10803638.5A EP2510236B1 (en) | 2009-12-07 | 2010-11-19 | Flexible element for a micro-pump |
CN201080048311.5A CN102667158B (en) | 2009-12-07 | 2010-11-19 | Flexible element for micropump |
PCT/IB2010/055310 WO2011070468A1 (en) | 2009-12-07 | 2010-11-19 | Flexible element for micropump |
IN4834DEN2012 IN2012DN04834A (en) | 2009-12-07 | 2010-11-19 | |
US13/512,463 US9822774B2 (en) | 2009-12-07 | 2010-11-19 | Diaphragm pump having a strip connector |
JP2012542648A JP5778169B2 (en) | 2009-12-07 | 2010-11-19 | Flexible element for micropumps |
RU2012124971/06A RU2012124971A (en) | 2009-12-07 | 2010-11-19 | FLEXIBLE ELEMENT FOR MICRO PUMP |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09178168A EP2333340A1 (en) | 2009-12-07 | 2009-12-07 | Flexible element for a micro-pump |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2333340A1 true EP2333340A1 (en) | 2011-06-15 |
Family
ID=42112213
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09178168A Withdrawn EP2333340A1 (en) | 2009-12-07 | 2009-12-07 | Flexible element for a micro-pump |
EP10803638.5A Active EP2510236B1 (en) | 2009-12-07 | 2010-11-19 | Flexible element for a micro-pump |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10803638.5A Active EP2510236B1 (en) | 2009-12-07 | 2010-11-19 | Flexible element for a micro-pump |
Country Status (7)
Country | Link |
---|---|
US (1) | US9822774B2 (en) |
EP (2) | EP2333340A1 (en) |
JP (1) | JP5778169B2 (en) |
CN (1) | CN102667158B (en) |
IN (1) | IN2012DN04834A (en) |
RU (1) | RU2012124971A (en) |
WO (1) | WO2011070468A1 (en) |
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WO2013068726A3 (en) * | 2011-11-09 | 2013-07-04 | Johnson Matthey Catalysts (Germany) Gmbh | Bending transducer and micropump comprising a bending transducer |
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TWI539076B (en) * | 2013-09-25 | 2016-06-21 | 馬小康 | Diaphragm pump with separable chamber |
CN103925199B (en) * | 2014-05-06 | 2016-06-15 | 吉林大学 | A kind of Novel stack laminar piezoelectricity membrane pump |
US10668212B2 (en) | 2014-08-26 | 2020-06-02 | Debiotech S.A. | Detection of an infusion anomaly |
DE102020002351A1 (en) * | 2020-04-19 | 2021-10-21 | Exel Industries Sa | Print head with micro-pneumatic control unit |
CN112177903A (en) * | 2020-09-29 | 2021-01-05 | 长春工业大学 | Rectangular cavity flexible membrane double-vibrator valveless piezoelectric pump |
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CN113302399A (en) * | 2018-11-23 | 2021-08-24 | Hnp微系统有限责任公司 | Sealing structure for transportation equipment with shape memory alloy |
CN113302399B (en) * | 2018-11-23 | 2023-08-29 | Hnp微系统有限责任公司 | Sealing structure for a transport device with shape memory alloy |
Also Published As
Publication number | Publication date |
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RU2012124971A (en) | 2014-01-20 |
US20120237375A1 (en) | 2012-09-20 |
US9822774B2 (en) | 2017-11-21 |
IN2012DN04834A (en) | 2015-09-25 |
EP2510236A1 (en) | 2012-10-17 |
EP2510236B1 (en) | 2013-08-28 |
JP2013513066A (en) | 2013-04-18 |
WO2011070468A1 (en) | 2011-06-16 |
JP5778169B2 (en) | 2015-09-16 |
CN102667158A (en) | 2012-09-12 |
CN102667158B (en) | 2015-04-22 |
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