JP2003145751A - Micro pump, ink jet recording head using the micro pump, and ink jet recorder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a micro pump used in an ink jet recording head or the like which has superior corrosion resistance and can transport every liquid irrespective of qualities of liquids. SOLUTION: The electrostatic micro pump is constituted of three parts of a single crystal silicon substrate 11, a nozzle plate 14 and an electrode substrate. The single crystal silicon substrate 11 has a silicon diaphragm 2, discrete liquid chambers 18, a common liquid chamber 16 and liquid channels 17 formed by anisotropic etching and is joined by a joining member 27 to the nozzle plate 14 having liquid nozzles 19 and liquid supply ports 15 formed thereto. An organic resin film 26 formed of polyimide or polybenzoxazole is formed to an entire surface of the single crystal silicon substrate 11 with which ink or the like liquid comes in contact. Since the surface has an adhesive absorption structure such as uneveness, an extra adhesive 27 at a joining time is absorbed and prevented from bulging into the discrete liquid chambers 18.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro pump used to convey or transfer a liquid having a minute flow rate,
An inkjet recording head using the micropump;
The present invention relates to an inkjet recording apparatus, and more particularly, to a micropump characterized by an adhesive structure between micropump constituent members manufactured by using a microfabrication technique, an inkjet recording head using the micropump, and an inkjet recording apparatus.

[0002]

2. Description of the Related Art Generally, an ink jet recording head used as a recording head in an ink jet recording apparatus used as an image forming apparatus such as a printer, a facsimile, a copying machine, a plotter, etc., has a plurality of nozzles for ejecting ink droplets and each nozzle communicating with each other. Flow path forming member that forms an ink liquid chamber (also referred to as a discharge chamber, a pressure liquid chamber, an ink flow path, a pressure chamber, a pressure chamber, etc.) and ink in each ink liquid chamber is pressurized to Energy generation means (actuator) including electromechanical conversion elements such as piezoelectric elements that generate energy for ejecting ink droplets, electrothermal conversion elements such as heaters, or electrostatic force generation means such as electrodes
By driving this actuator according to image information, ink droplets are ejected from required nozzles to record an image.

In such a micropump (inkjet recording head, etc.) for transporting a liquid, constituent members are eluted due to the property of the transported liquid such as alkaline or acidic, which is one of the causes of the destruction of the micropump. . For this reason, it is general to form a corrosion resistant film against the liquid to be transported on the surface of the member which is in contact with the liquid. An example of forming this corrosion resistant thin film is shown below.

Japanese Unexamined Patent Publication No. 6-143588 discloses an ink jet head used in an ink jet printer in which paraxylene, which is an organic film, is formed on the surface of an ink liquid chamber made of a piezoelectric material to secure ink resistance. Is disclosed. Further, Japanese Patent Application Laid-Open No. 8-142324 discloses a piezo method using a piezoelectric effect as a driving method of an ink jet head, which utilizes displacement of a piezoelectric element in the d33 direction. International publication number WO9
In 8/42513, as an ink resistant thin film having corrosion resistance of an electrostatic drive type inkjet head, Ti,
Examples using Ti compounds and Al ₂ O ₃ thin films are described. Furthermore, Japanese Patent Laid-Open No. 10-291322 discloses that
An example is disclosed in which a silicon oxide film is formed on the surface of a diaphragm that constitutes a pressure chamber and then laminated to form a thin film of oxide-, nitride-, or metal having ink resistance.

Such various ink jet heads are
For example, as described in Japanese Patent Application Laid-Open No. 8-142324, a nozzle plate, a liquid chamber partition member, a vibrating plate, a piezoelectric element, and the like, which are laminated and joined, are described in Japanese Patent Application Laid-Open No. 5-50601. So that the liquid chamber forming member (first substrate)
It is formed by joining a plurality of members, such as a lid member that covers the top of the head member and a nozzle in which a nozzle is formed on the entire surface of the head. In this case, it is known that a silicon substrate or the like is directly joined or joined by eutectic joining to join a plurality of members. However, when such a joining method cannot be adopted, adhesion by an adhesive is generally used. . A typical adhesive application method is to form a thin adhesive layer on a flexible base material and transfer it onto the surface (bonding surface) of the member to be adhered. A transfer method of applying and adhering and another method of screen printing are known.

At this time, for example, when the nozzle plate is adhered to a liquid chamber partition member having openings such as through holes or recesses for forming a plurality of fine discharge chambers, if the amount of adhesive applied is large, When the chamber partition member and nozzle plate are superposed, the adhesive will stick out to the opening side and block the openings (through holes) such as ink flow paths and nozzles, or enter the discharge chamber to change the discharge chamber volume and Ink ejection characteristics will vary. As described in JP-A-7-125198, a pressure generating chamber, an ink supply port,
It is known that a plurality of fine rectangular recesses are formed so as to surround a through hole that serves as a reservoir, and excess adhesive flows into these recesses.

[0007]

When a nozzle plate is bonded to a liquid chamber partition member having openings such as through holes or recesses for forming a plurality of fine discharge chambers, if the amount of adhesive applied is large, When the chamber partition member and the nozzle plate are superposed, the adhesive protrudes toward the opening side, blocks the openings (through holes) of the ink flow path and nozzles, and enters the discharge chamber to change the discharge chamber volume, and Ink ejection characteristics vary between the two. In addition, JP-A-7-125198
As described in the publication, a plurality of fine rectangular recesses are formed so as to surround the pressure generating chamber, the ink supply port, and the through hole that serves as a reservoir, and excess adhesive flows into these recesses. In that case, since the rigidity of the partition wall is lowered, there is a possibility that the reliability of the head is lowered due to a drop in the ink ejection efficiency.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a micropump having excellent corrosion resistance and capable of transporting any liquid regardless of the properties of the liquid.

Further, in the case of adhering a nozzle plate with a liquid chamber partition member having openings such as through holes or recesses for forming a plurality of fine discharge chambers, the inside of the individual liquid chamber of the adhesive used for attaching the nozzle plate. It is an object of the present invention to suppress the protrusion to the edge and prevent the occurrence of variations in ink ejection characteristics between channels.

Further, even if the amount of the adhesive intervening on the bonding surface between the flow path forming member and the nozzle plate is excessive, the excessive amount of the adhesive is absorbed by the adhesive absorbing structure and does not overflow into the individual liquid chamber. To prevent. In addition, the film thickness can be increased,
Prevents the generation of pinholes caused by dust,
The purpose is to improve reliability.

Further, there is no need to set restrictions on the type and chemical properties of the ink required to form a high quality image,
(EN) Provided is a highly reliable inkjet recording head and an inkjet recording device capable of performing an ink ejection operation for any ink for a long period of time without corroding the liquid chamber and preventing liquid leakage from a nozzle joint surface. The purpose is to

[0012]

According to a first aspect of the present invention, there is provided a nozzle plate having a plurality of nozzles for ejecting a liquid, and the nozzle for ejecting the liquid by utilizing energy generating means. In a micropump comprising an individual liquid chamber that communicates with an individual liquid chamber and a flow channel forming member in which a common liquid chamber that communicates with the individual liquid chamber is formed, all surfaces of the flow channel forming member on the side in contact with the liquid are An organic resin film having corrosion resistance to a liquid is formed, the surface of the organic resin film has an adhesive absorption structure, and the nozzle plate and the flow path forming member are bonded with an adhesive via the organic resin film. It is characterized by

According to a second aspect of the present invention, in the micropump according to the first aspect of the present invention, the adhesive absorbing structure covers the surface of the organic resin film which covers the flow path forming member which is an adhesive surface with the nozzle plate. Is characterized by having a plurality of depressions.

According to a third aspect of the present invention, in the micropump according to the first or second aspect of the invention, the organic resin film is formed along an edge portion of an opening on the surface of the flow path forming member which is an adhesion surface with the nozzle plate. It is characterized in that the film is formed thin.

According to a fourth aspect of the present invention, in the micropump according to the first to third aspects, the organic resin film is polyimide or polybenzoxazole.

According to a fifth aspect of the present invention, in an ink jet recording head using the micropump according to the first to fourth aspects, a nozzle hole for ejecting an ink liquid, an ink liquid chamber communicating with the nozzle hole, and the ink are provided. It is characterized by comprising an ink flow path communicating with the liquid chamber and an energy generating means for ejecting ink.

According to a sixth aspect of the present invention, in an ink jet recording apparatus for recording an ink image using the ink jet recording head of the fifth aspect, a recording medium conveying means for conveying a recording medium for recording the ink image is provided. And recording an ink recording image by ejecting ink onto the recording medium conveyed by the recording medium conveying means.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIG.
~ It demonstrates based on the Example shown in FIG. (Example 1: Electrostatic type micro pump) Example 1 of the present invention
The electrostatic type micro pump will be described. FIG. 1 is a diagram showing a configuration of an electrostatic micropump, and FIG. 1A is a top view of the electrostatic micropump, and FIGS.
(D) shows the AA sectional view, the BB sectional view, and the CC sectional view of the electrostatic micropump shown in FIG. 1 (A), respectively.

The electrostatic micropump is composed of three parts: a single crystal silicon substrate 11 having a plane orientation (110) which is a liquid chamber substrate, a nozzle plate (cover plate) 14, and an electrode substrate. The single crystal silicon substrate 11, which is a liquid chamber substrate, includes a silicon vibrating plate 12, an individual liquid chamber 18 in which the liquid is pressurized by the vibrating plate, a common liquid chamber 16 communicating with the individual liquid chamber, and a liquid flow path forming a fluid resistance. 17 is formed by anisotropic etching. The nozzle plate (cover plate) 14 is provided with a liquid nozzle 19 and a liquid supply port 15 which are communicated with each other corresponding to the individual liquid chamber 18,
It is formed of a glass plate, a metal plate, a silicon plate, or the like. The electrode substrate will be described later.

The single crystal silicon substrate 11, which is the liquid chamber substrate, corresponds to the individual liquid chambers 18 and the individual liquid nozzles 19, and the silicon vibrating plate 12 driven by electrostatic attraction and the common liquid for supplying the liquid. A chamber 16 is formed. Individual liquid chamber 1
8 and the common liquid chamber 16 are communicated with each other by a liquid flow path 17 forming a fluid resistance. On the surface of the liquid chamber substrate 11, the surface of the silicon vibration plate 12, the inner wall of the individual liquid chamber 18, the inner wall of the common liquid chamber 16 and the surface of the liquid flow path 17, an organic resin thin film 26 having corrosion resistance to the liquid, Preferably, polyimide or polybenzoxazole has a thickness of 100 by spraying.
It is laminated over the entire surface of 0 to 50 μm, preferably 1 to 10 μm. The nozzle plate 14 and the flow path forming silicon member (single crystal silicon substrate) through the organic resin film 26
11 is joined. When the film thickness is extremely thin, pinholes are generated due to dust, etc. on the diaphragm, and when the film thickness is extremely thick, the rigidity of the diaphragm becomes high and the injection characteristics change. The thickness range is fixed.

When polyimide or polybenzoxazole is laminated by a spray method, the organic resin film 26 is formed by mixing a solvent having a boiling point of 100 ° C. or lower with a solvent of the organic resin film raw material and applying the mixture. Has less fluidity on the surface of the flow path forming silicon member (single crystal silicon substrate) 11 and can form irregularities on the surface of the organic resin film.

Further, the organic resin film raw material is formed by applying the organic resin film raw material onto the flow path forming silicon member (single crystal silicon substrate) 11 heated to a temperature higher than room temperature by a spray method to form the organic resin film. Since a part of the solvent is volatilized on the surface of the flow path forming silicon member, the fluidity is reduced, and unevenness can be formed on the surface of the organic resin film. It can be absorbed by the concaves and convexes of the unevenness, and the protrusion into the inside of the individual liquid chamber can be suppressed.

Furthermore, the silicon vibrating plate 12 forming a part of the individual liquid chamber 18 corresponding to each liquid nozzle 19.
Are arranged so as to face the drive electrode 21 for applying a voltage for driving the electrostatic micropump using the silicon oxide 2 as a gap spacer. Reference numeral 20 is a liquid ejection direction determined by the arrangement direction of the liquid nozzles. Nozzle plate 1
A large number of nozzles 19, which are fine holes for ejecting ink droplets, are formed in the nozzle 4. The diameter of the nozzle 19 is 35 μm or less on the ink droplet outlet side, and the nozzle 19 is a pressurized liquid. It is provided at a position corresponding to the vicinity of the center of the individual liquid chamber 18, which is a chamber. The nozzle plate 14 is made of a Ni (nickel) metal plate and is manufactured by the electroforming method.

Next, the electrode substrate will be described. Figure 1
In (A) to (D), 1 is an n-type or p-type single crystal silicon substrate. Normally, a plane-oriented (100) single crystal Si substrate is used, but the plane orientation (11
There is no problem even if a 0) or (111) single crystal Si substrate is used.

Reference numeral 21 denotes a drive electrode 21 for applying a voltage for driving an electrostatic micropump formed inside the silicon oxide 2 on the single crystal silicon substrate 1, and any drive conductor may be used. Desirably, polycrystalline silicon containing a large amount of phosphorus or boron impurity atoms, refractory metal, or the like is used as the impurities that are insulated from each other. Drive electrode 21
Silicon oxide 2 is formed on the upper surface, and a gap (void) 4 is formed between the silicon diaphragm 12 and the drive electrode 21 by using this silicon oxide as a gap spacer. An electrostatic attractive force is generated by applying a voltage to the drive electrode 21 facing the silicon diaphragm 12 via the gap spacer. Reference numeral 8 denotes a drive voltage applying section that is electrically connected to the drive electrode 21, and is a pad section for applying a voltage to the electrode substrate from the outside and further mounting such as FPC and wire bonding.

As a manufacturing method for forming the ink resistant thin film 26 which is an organic resin thin film as described above, there is spray coating. As one method of spray coating used here, a method of spraying an organic thin film polymer diluted with a highly volatile solvent while rotating a substrate on which a liquid chamber member such as the individual liquid chamber 18 is processed at low speed can be realized. There is a method of forming the ink resistant thin film 26 by thermosetting the sprayed polymer film. Further, as another method of forming the ink resistant thin film 26, there is a method of spin coating so as to suppress the flow of air on the substrate surface. A method of suppressing the flow of air can be realized by covering with a lid that rotates in synchronization with the rotation of the substrate.

When a film containing polyimide or polybenzoxazole as a main component is used as the ink resistant thin film 26, for example, in the case of polybenzoxazole, the film is treated at 150 ° C. for 30 minutes in a nitrogen gas atmosphere and further heated to 320 ° C. And a heat treatment for 30 minutes can form a film having low water absorption and hardly swelling. Further, the solubility is low even in an ink for an inkjet head which mainly uses an alkaline ink. Furthermore, polybenzoxazole has a stronger adhesion to the flow path forming silicon member 11 than polyimide, and a highly reliable adhesion strength can be obtained.

FIGS. 2A to 2C are enlarged views of the portion D shown in FIG. 1D, which shows three different ink resistant thin films 26 formed on the flow path forming silicon member 11. It is a figure which shows an example. FIG. 2A shows an example in which a plurality of depressions 26 a are formed on the surface of the ink resistant thin film 26 on the surface of the flow path forming silicon member 11 which is the adhesive surface to the nozzle plate 14. The ink resistant thin film 26 on the surface of the flow path forming silicon member 11 is formed on the surface of the flow path forming silicon member 11. The surface of the ink-resistant thin film 26 has a plurality of recesses 2 having no periodicity.
6a.

An adhesive 27 is applied to the surface of the flow path forming silicon member 11 on which the ink resistant thin film 26 is formed by, for example, a transfer method, and the nozzle plate 14 is pressed together. When the flow path forming silicon member 11 on which the flow path forming member 26 is formed and the nozzle plate 14 are bonded, the excess adhesive 27 is formed in a space formed between the ink resistant thin film 26 on the flow path forming silicon member 11 and the nozzle plate 14. Since it is absorbed, the amount of protrusion to the opening 18 on the surface of the flow path forming silicon member 11 is reduced.

It has also been found that there are some restrictions when forming an ink resistant film. First, the ink resistant thin film 26
It has been found that when the roughness of the depression 26a is Rmax value of 1 nm or less, it is difficult to obtain the effect of absorbing the adhesive. Further, when the roughness similarly exceeds 1 μm in Rmax value,
It became easier for ink to enter and uneven coating (voids, pinholes). Therefore, it is important to control the roughness of the surface of the ink resistant thin film 26 within this range.

FIG. 2B shows an example in which the ink resistant thin film 26 is formed thin along the edge of the opening on the surface of the flow path forming silicon member 11 which is the adhesion surface to the nozzle plate 14. Ink-resistant thin film 2 on the surface of the flow path forming silicon member 11
No. 6 has the largest film thickness in the vicinity of the central portion of the surface of the flow path forming silicon member 11, and the film thickness gradually decreases toward the edge of the opening 18 on the surface of the flow path forming silicon member 11. In this way, the ink resistant thin film 26 is formed by applying the adhesive 27 to the surface of the flow path forming silicon member 11 on which the ink resistant thin film 26 is formed by, for example, a transfer method and pressing the nozzle plate 14 together. When the flow path forming silicon member 11 and the nozzle plate 14 are bonded together, the excess adhesive 27 causes the ink resistant thin film 26 on the flow path forming silicon member 11 and the nozzle plate 1.
4 is absorbed by the gap formed between the flow path forming silicon member 11 and the flow path forming silicon member 11, so that the amount of protrusion to the opening 18 on the surface of the flow path forming silicon member 11 is reduced.

In FIG. 2C, the ink resistant thin film 26 is thinly formed along the edge of the opening on the surface of the flow path forming silicon member 11 which is the adhesion surface to the nozzle plate 14, and the ink resistant thin film 26 is further formed. It is a figure which shows the example which formed several depressions 26a in the surface of the conductive thin film 26. The ink resistant thin film 26 on the surface of the flow path forming silicon member 11 has the largest film thickness in the vicinity of the central portion of the surface of the flow path forming silicon member 11, and is directed toward the edge of the opening 18 on the surface of the flow path forming silicon member 11. The film thickness is gradually reduced, and the surface of the ink resistant thin film 26 has a plurality of recesses 26a having no periodicity.

An adhesive 27 is applied to the surface of the flow path forming silicon member 11 on which the ink resistant thin film 26 is formed by, for example, a transfer method, and the nozzle plate 14 is pressed together. When the flow path forming silicon member 11 on which the flow path forming member 26 is formed and the nozzle plate 14 are bonded, the excess adhesive 27 is formed in a space formed between the ink resistant thin film 26 on the flow path forming silicon member 11 and the nozzle plate 14. Since it is absorbed, the amount of protrusion to the opening 18 on the surface of the flow path forming silicon member 11 is reduced.

It has also been found that there are some restrictions when an ink resistant film is provided. First, it was found that when the roughness of the depression of the ink resistant thin film 26 was 1 nm or less in Rmax value, the effect of absorbing the adhesive was difficult to obtain. Further, when the roughness also exceeds 1 μm in Rmax value, it is easy for ink to enter and uneven coating (voids, pinholes). Therefore, it is important to control the roughness of the surface of the ink resistant thin film 26 within this range.

A manufacturing method of the embodiment shown in FIGS. 2A to 2C will be described with reference to FIG. In FIG. 3A, the solvent 32b of the resin droplet 32 that is the origin of the ink resistant thin film 26 is sufficiently evaporated from the spray nozzle 31 to the flow path forming silicon member 11 before being attached to the flow path forming silicon member 11. This is a method, and when such a method is used, the solid component 32 of the liquid droplet when attached to the flow path forming silicon member 11
Since the ratio of a increases and the amount of the solvent 32b is small, the fluidity becomes low on the flow path forming silicon member 11, and the ink resistant thin film 26 on the flow path forming silicon member 11 becomes a film having irregularities. As a means for sufficiently evaporating before adhering to the flow path forming silicon member 11, a resin droplet 32, which is a base of the ink resistant thin film 26, is mixed and diluted with a solvent having a boiling point of 100 ° C. or less and sprayed. When the same amount of the liquid droplets 32 and the same solid component 32a are contained, the solvent 32b has a large proportion of the solvent having a low boiling point, so that the solvent is more volatilized in the space and the ink resistant thin film 26 having irregularities can be formed.

Similarly, a method for forming the ink resistant thin film 26 having unevenness will be described with reference to FIG. FIG. 3B shows a method of evaporating the solvent 32b from the spray nozzle 31 to the flow path forming silicon member 11 at the moment when the resin droplet 32 which is the origin of the ink resistant thin film 26 adheres to the flow path forming silicon member 11. Therefore, the fluidity is lowered before the droplets 32 flow on the flow path forming silicon member 11, and the ink resistant thin film 26 on the flow path forming silicon member 11 is made uneven. As a means for evaporating the solvent 32b at the moment of adhering to the flow path forming silicon member 11, spray coating is applied to the flow path forming silicon member 11 heated to a temperature higher than room temperature. Furthermore, the ink-resistant thin film 26 having unevenness can be obtained by spray-coating the flow path forming silicon member 11 heated to a temperature higher than room temperature with resin droplets obtained by mixing and diluting a solvent having a boiling point of 100 ° C. or less. It can be formed more easily.

As shown in FIG. 2B, the ink resistant thin film 26 on the surface of the flow path forming silicon member 11 is formed in the central portion of the surface of the flow path forming silicon member 11 without making the ink resistant thin film 26 uneven. A method of maximizing the film thickness in the vicinity and gradually decreasing the film thickness in the edge direction of the opening 18 on the surface of the flow path forming silicon member 11 can be realized by performing the reverse of the manufacturing method of FIG. That is, the proportion of the solvent having a low boiling point is reduced, or the solvent is not mixed, and the temperature of the flow path forming silicon member 11 is set to room temperature or a lower temperature.

As shown in FIG. 2C, the ink-resistant thin film 26 is provided with irregularities, and the ink-resistant thin film 26 on the surface of the flow path forming silicon member 11 is provided in the vicinity of the central portion of the surface of the flow path forming silicon member 11. As a method of making the film thickness thickest and gradually decreasing the film thickness in the direction of the edge of the opening 18 on the surface of the flow path forming silicon member 11, the dilution ratio of the solvent having a low boiling point and the temperature of the flow path forming silicon member 11 may be used. It can be realized by adjusting.

Example 2 Inkjet Recording Device An inkjet recording device using the electrostatic micropump of the present invention will be described. FIG. 4 is a diagram showing an ink jet recording apparatus of Example 2, FIG. 4 (A) is a perspective view of an essential part of the ink jet recording apparatus, and FIG. 4 (B) is a side sectional view of the same. The inkjet recording apparatus includes a carriage 5 that is movable in the main scanning direction inside a recording apparatus main body 41.
3, a print mechanism portion 42 including a recording head 54 including an ink jet head mounted on the carriage 53, an ink cartridge 55 that supplies ink to the recording head 54, and the like are housed, and a front side is provided in a lower portion of the apparatus main body 41. A paper feed cassette (or a paper feed tray) 44 capable of stacking a large number of papers 43 can be detachably attached, and a manual feed tray 45 for manually feeding the papers 43 is opened. Can feed the paper cassette 44
Alternatively, the paper 43 fed from the manual feed tray 45 is taken in, the desired image is recorded by the printing mechanism unit 42, and then the paper is ejected to the paper ejection tray 46 mounted on the rear surface side.

In the printing mechanism section 42, a main guide rod 51 and a sub guide rod 52, which are guide members which are horizontally mounted on left and right side plates (not shown), move the carriage 53 in the main scanning direction (see FIG. 4).
(B) is held slidably in the direction perpendicular to the paper surface, and the carriage 53 is ejected from the inkjet head that ejects ink droplets of each color of yellow (Y), cyan (C), magenta (M), and black (Bk). The recording head 54
A plurality of ink ejection ports are arranged in a direction intersecting with the main scanning direction, and the ink droplet ejection direction is attached downward. The recording head 54 uses the electrostatic actuator of the present invention as an inkjet head. Here, the carriage 5
3 is the main guide rod 5 on the rear side (downstream side in the sheet conveying direction)
1 is slidably fitted to the front side (upstream side in the paper transport direction)
Is slidably mounted on the secondary guide rod 52. Then, in order to move and scan the carriage 53 in the main scanning direction, the drive pulley 58 that is rotationally driven by the main scanning motor 57.
The timing belt 60 is stretched between the driven pulley 59 and the driven pulley 59, and the timing belt 60 is fixed to the carriage 53. The carriage 53 is reciprocally driven by the forward and reverse rotations of the main scanning motor 57.

On the other hand, in order to convey the paper 43 set in the paper feed cassette 44 to the lower side of the recording head 54, the paper feed roller 6 for separating and feeding the paper 43 from the paper feed cassette 44.
1 and a friction pad 62, a guide member 63 that guides the paper 43, a transport roller 64 that reverses and transports the fed paper 43, a transport roller 65 that is pressed against the peripheral surface of the transport roller 64, and a transport roller. A leading end roller 66 that defines the feeding angle of the sheet 43 from the sheet 64 is provided. The conveyance roller 64 is rotationally driven by the sub-scanning motor 67 via a gear train. And the carriage 5
A print receiving member 68, which is a paper guide member for guiding the paper 43 sent out from the conveyance roller 64 below the recording head 54, is provided corresponding to the movement range of the sheet 3 in the main scanning direction. A transport roller 71 and a spur 72 that are driven to rotate in order to send out the paper 43 in the paper discharge direction are provided on the downstream side of the print receiving member 68 in the paper transport direction, and further, the paper 43 is sent to the paper discharge tray 46. Roller 73 and spur 74
And guide members 75 and 76 that form a paper discharge path.

At the time of recording, by driving the recording head 54 in accordance with the image signal while moving the carriage 53, ink is ejected onto the stopped paper 43 to record one line, and the paper 43 is moved by a predetermined amount. After transportation, the next line is recorded. Upon receiving a recording end signal or a signal that the trailing edge of the paper 43 reaches the recording area, the recording operation is ended and the paper 43 is discharged. As a result of printing using such an ink jet recording apparatus, it was confirmed that not only high-definition printing can be performed but also stable operation is performed for a long period of time.

As described above, in the embodiment, the example of the electrostatic system is shown as the driving force, but the present invention is not limited to the electrostatic driving system, and the same as the case where the silicon flow path forming member is formed. Any micro pump having the above structure can be applied, and it can also be applied to a piezo system using a piezoelectric effect, a thermal system using a thermal expansion of ink as a driving force, and a bubble system micro pump.

[0044]

As is apparent from the above description, the present invention has the following effects. According to the invention of claim 1, since the organic resin film surface, which is a surface to which the nozzle plate is bonded, has an adhesive absorption structure, it has excellent corrosion resistance,
It is possible to provide a micropump capable of transporting any liquid regardless of the property of the liquid, and to prevent the adhesive used for sticking the nozzle plate from protruding into the individual liquid chamber.

According to the second aspect of the present invention, since a plurality of depressions are formed on the surface of the organic resin film covering the flow path forming member which is the adhesion surface with the nozzle, the adhesive used for attaching the nozzle plate. The excessive amount of is absorbed in the plurality of depressions, and the protrusion into the inside of the individual liquid chamber can be suppressed.

According to the third aspect of the invention, since the organic resin film is thinly formed along the edge of the opening on the surface of the flow path forming member which is the adhesion surface with the nozzle, the nozzle plate is attached. The excess amount of the adhesive used for is absorbed in the region where the organic resin film is thin, and it is possible to prevent the adhesive from protruding into the individual liquid chamber.

According to the fourth aspect of the present invention, the organic resin film having corrosion resistance to the liquid formed on all the surfaces of the silicon member in which the flow path is formed is in contact with the polyimide or the polypentazo. Since it is oxazole, it is possible to provide a micropump having excellent corrosion resistance and transporting any liquid regardless of the properties of the liquid. Further, since the film thickness can be easily increased, pinholes caused by dust or the like can be prevented and reliability is improved.

According to the fifth aspect of the present invention, by using the micropumps of the first to fourth aspects, the nozzle holes for ejecting the ink liquid, the ink flow path communicating with the nozzle holes, the ink liquid chamber and the ink ejection are formed. Since it is an inkjet head consisting of an energy generating means, it is not necessary to set restrictions on the type and chemical properties of the ink required for forming high quality images, and it is possible to keep the liquid chamber for any ink for a long time. It is possible to provide an inkjet head and an inkjet head cartridge that can perform an ink ejection operation without being corroded, prevent liquid leakage from the nozzle joint surface, and have high reliability.

According to the invention of claim 6, since the ink jet recording apparatus is a recording apparatus incorporating the ink jet recording head according to claim 5, it is possible to print high-definition images and characters.

[Brief description of drawings]

1A and 1B are diagrams showing an electrostatic micropump according to a first embodiment of the present invention, FIG. 1A being a top view, FIG. 1B and FIG.
1C is a sectional view taken along the line AA, a sectional view taken along the line BB, and a sectional view taken along the line CC of FIG. 1A, respectively.

FIG. 2 is an enlarged view showing an enlarged part D of FIG.
2 (A), FIG. 2 (B), and FIG. 2 (C) show different examples.

3 (A), FIG. 3 (B), and FIG. 2 (C) are views for explaining the manufacturing method of the example shown in FIG.
(B) shows different examples.

4A and 4B are diagrams showing an ink jet recording apparatus according to a second embodiment of the invention, FIG. 4A being a perspective view of a main part and FIG. 4B being a side sectional view.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Silicon substrate, 2 ... Silicon oxide, 4 ... Gap (gap), 8 ... Driving voltage application part, 11 ... Single crystal silicon substrate, 12 ... Silicon vibrating plate, 14 ... Nozzle plate (cover plate), 15 ... Liquid supply Mouth, 16 ... Common liquid chamber, 17 ... Liquid flow path, 18 ... Individual liquid chamber, 19 ... Liquid nozzle, 21 ... Drive electrode, 26 ... Ink resistant thin film, 27 ... Adhesive agent, 31 ... Spray nozzle, 32 ... Resin Droplet, 32a ... Solid component, 32
b ... solvent, 41 ... recording device body, 42 ... printing mechanism part, 4
3 ... Paper, 44 ... Paper feed cassette, 45 ... Manual feed tray,
46 ... Paper discharge tray, 53 ... Carriage, 54 ... Recording head, 55 ... Ink cartridge, 57 ... Main scanning motor,
58 ... Drive pulley, 59 ... Followed pulley, 60 ... Timing belt, 61 ... Paper feed roller, 62 ... Friction pad, 63 ... Guide member, 64 ... Conveying roller, 65 ... Conveying roller, 66 ... Tip roller, 67 ... Sub scanning Motor, 68 ... Printing receiving member, 71 ... Conveying roller, 72, 74 ... Spur, 7
5,76 ... Guide member.

Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) F04B 15/00 B41J 3/04 103H 19/04 F04B 21/00 N 53/00 (72) Inventor Mitsuru Irinoda Tokyo 1-3-6 Nakamagome, Ota-ku F-term in Ricoh Co., Ltd. (Reference) 2C057 AF70 AF72 AG29 AG44 AG46 AG54 AP13 AP14 AP25 AP34 AQ02 3H069 AA04 BB01 CC00 DD21 DD27 DD44 EE06 EE09 EE14 3H071 AA05 BB01 CC26 CC04 CC06 CC44 DD44 CC44 CC44 DD31 DD42 DD51 EE07 EE08 EE09 3H075 AA07 BB04 BB21 CC18 CC20 DA03 DA05 DA11 DB02

Claims (6)

[Claims] 1. A nozzle plate having a plurality of nozzles for ejecting liquid, an individual liquid chamber communicating with the nozzle for ejecting the liquid using an energy generating means, and a separate liquid chamber communicating with the individual liquid chamber. In a micropump comprising a flow channel forming member having a common liquid chamber formed therein, an organic resin film having corrosion resistance to the liquid is formed on all surfaces of the flow channel forming member on the side in contact with the liquid. ,
The micropump, wherein the surface of the organic resin film has an adhesive absorbing structure, and the nozzle plate and the flow path forming member are bonded together with the adhesive via the organic resin film. 2. The micropump according to claim 1, wherein the adhesive absorbing structure has a plurality of dents on a surface of the organic resin film that covers the flow path forming member that is an adhesion surface with the nozzle plate. A micro pump characterized by that. 3. The micropump according to claim 1, wherein the organic resin film is thinly formed along an edge portion of an opening on the surface of the flow path forming member which is an adhesion surface with the nozzle plate. A micro pump characterized by that. 4. The micropump according to claim 1, wherein the organic resin film is polyimide or polybenzoxazole. 5. An inkjet recording head using the micropump according to claim 1, wherein a nozzle hole for ejecting an ink liquid, an ink liquid chamber communicating with the nozzle hole, and the ink liquid chamber are provided. An ink flow path that communicates,
An inkjet recording head comprising: an energy generating unit for ejecting ink. 6. An inkjet recording apparatus for recording an ink image using the inkjet recording head according to claim 5, further comprising a recording medium conveying means for conveying a recording medium for recording the ink image, An ink jet recording apparatus, characterized in that an ink recording image is recorded by ejecting ink onto the recording medium conveyed by a body conveying means.