JP2003237065A - Inkjet head and inkjet recorder - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To attain a stable ink drop ejection characteristic by eliminating variation of a fluid resistance of an ink supply passage in an inkjet head having a plurality of nozzles arranged in regularity. <P>SOLUTION: Ink supply passages 5 and pressurizing chambers 6 are formed on a silicon fluid passage plate in continuous patterns. A diaphragm bonded to the silicon fluid passage plate is driven by a PZT 14 and a pressure is applied to ink in the pressurizing chamber 6 to eject ink drops from a nozzle 2. The ink supply passages 5 and the pressurizing chambers 6 are formed on the identical substrate by anisotropic etching in a depth of 90 μm. The pattern widths W<SB>lc</SB>, W<SB>rf</SB>of the pressurizing chamber 6 and the ink supply passage 5 are set to be 140 μm and 28 μm, respectively. When the width W<SB>rf</SB>of the ink supply passage is to be at most one-third of the depth of the ink supply passage, it is possible to reduce variation in fluid resistances of the ink supply passages 5. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head and an ink jet recording apparatus, and more specifically, a plurality of ink supply paths communicating with a plurality of nozzles arranged with some regularity are formed to have a uniform depth. The present invention relates to an inkjet head having uniform characteristics by eliminating variations in fluid resistance values of individual ink supply paths in the inkjet head, and an inkjet recording apparatus using the inkjet head.

[0002]

2. Description of the Related Art In order to achieve high image quality and high speed in a recording device such as an ink jet printer,
It is important to increase the density of the nozzle array. As a means for achieving this high density, a method of using silicon as a material of the pressure chamber is often adopted. By using a silicon substrate having a (110) plane orientation,
Since the partition between adjacent channels can be formed almost vertically by anisotropic etching, the nozzle density can be increased.

FIG. 1 is a view showing a portion including a nozzle plate and a flow path plate of a general ink jet head, and FIG.
Is a top perspective view showing the nozzle plate transparently, and FIG. 1 (B) is a cross-sectional view taken along the line AA of FIG. 1 (A). The inkjet head shown in FIG. 1 includes a nozzle plate 1, a silicon flow path plate 3, a vibrating plate 8 and the like, and a plurality of nozzles 2 are formed in the nozzle plate 1 at some regular intervals such as at regular intervals. The silicon flow path plate 3 is made of a silicon substrate, and the common liquid chamber 17, the ink supply path 5, the pressure chamber 6, the communication pipe 7, and the like are formed by anisotropic etching. In FIG. 1A, the solid line shows the layout pattern, the dotted line shows the position of the ink supply port 11, and the broken line shows the position of the nozzle 2. The vibrating plate 8 is provided with PZ on the back side of the surface facing the pressure chamber 6.
T (lead zirconate titanate) is joined, PZT is driven according to the print signal, the diaphragm 8 is deformed to apply pressure to the ink in the pressure chamber 6, and the ink is ejected from the nozzle 2 via the communication pipe 7. Eject drops.

The pressure chamber 6 communicating with the nozzle 2 communicates with the common liquid chamber 17 via the ink supply path 5. Ink is supplied to the common liquid chamber 17 from an ink supply port 11 opened in a part of the common liquid chamber 17, and is supplied from the common liquid chamber 17 to each individual pressure chamber 6 via the ink supply passage 5. The ink supply path 5 has a partly narrowed shape, and the pressure chamber 6
The amount of ink flowing into the ink is controlled. The residual pressure in the pressure chamber 6 after the ink is ejected is mainly absorbed by the fluid resistance of the ink supply passage 5. Therefore, this ink supply path 5
When the fluid resistance value is low, the residual pressure does not converge, and the injection characteristics become unstable, especially on the high frequency side. On the contrary, when the fluid resistance value of the ink supply path 5 is high, the ink supply (refill) after ejection is suppressed more than necessary, so that the supply amount becomes insufficient at the time of high frequency ejection, and the ejection droplet volume decreases. Therefore, when manufacturing the inkjet head, the fluid resistance value of the ink supply path 5 needs to be manufactured with high accuracy.

[0005]

When the etching is performed so that the etching is completed in the middle of the substrate like the ink jet head shown in FIG. 1, the pattern width can be controlled with high accuracy by using anisotropic etching, but the etching is performed. Depth control is very difficult. This is because the etching depth is easily influenced by the etching conditions, and therefore there is a limit in increasing the uniformity within the same substrate and within the lot and between the lots. Therefore, the variation in the depth causes the variation in the fluid resistance value of the ink supply path 5, which causes the variation in the head characteristics.

Generally, the fluid resistance value of a straight pipe is expressed by the following relational expression. R = 128 μL / πd ⁴ [Pa · s / m ³ ] d = 4 S / l S = wh l = 2 (w + h) where R: Fluid resistance μ: Fluid viscosity L: Length d: Equivalent pipe diameter S : Cross-sectional area l: Cross-sectional perimeter w: Pattern width h: Etching depth From an industrial point of view, it is reasonable to consider that the variation of the etching depth h in the mass production process is about 10%. Further, the fluid resistance value needs to be suppressed to 10% or less.

FIG. 2 shows a depth of 10% based on the above relational expression.
6 is a graph showing the relationship between the variation of the fluid resistance value R when varying and the ratio of pattern depth (etching depth) h / pattern width w. Here, the fluctuation range of the fluid resistance value is 10
It can be seen from the graph shown in FIG. 2 that the pattern depth / pattern width can be obtained by setting the pattern depth / the pattern width to be 3 or more in the case of suppressing the amount to be not more than%. That is, when forming the fluid resistance, it is possible to reduce the variation in the fluid resistance by setting the width w to 1/3 or less with respect to the etching depth h.
However, in the case of configuring with such a dimensional ratio, the degree of freedom in designing the head decreases, and the ink supply path may be narrowed more than necessary. In such a case, by arranging a plurality of ink supply paths and setting the width of each ink supply path to 1/3 or less of the depth, the necessary flow rate is secured and the variation in the fluid resistance value is suppressed. can do.

[0008]

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems. According to the invention of claim 1, a nozzle for ejecting an ink droplet and a part of the nozzle communicating with the nozzle are deformed. A pressure chamber that generates pressure on the ink by
An ink supply path communicating with the pressure chamber and supplying ink to the pressure chamber, and a plurality of means for deforming a part of the pressure chamber are provided, and the ink supply path communicates with the plurality of ink supply paths. An ink jet head having a common liquid chamber for supplying ink to the plurality of nozzles, wherein the plurality of nozzles are regularly aligned, and the pressure chamber and the ink supply path are formed on the same substrate by anisotropic etching. The pattern width of the supply path on the substrate is 1/3 of the depth.
It is characterized by the following.

According to a second aspect of the present invention, a nozzle for ejecting an ink droplet, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partially deforming the nozzle, and a pressure chamber communicating with the pressure chamber An ink supply path for supplying ink and a plurality of means for deforming a part of the pressure chamber,
An ink jet head having a common liquid chamber that communicates with a plurality of ink supply passages and supplies ink to the ink supply passages, wherein the plurality of nozzles are regularly aligned, and the pressure chambers and the ink supply passages are mainly formed. The pattern width formed on the single crystal silicon substrate having a flat surface by anisotropic etching is 1/3 or less of the depth of the pattern of the ink supply path on the single crystal silicon substrate.

According to a third aspect of the present invention, a nozzle for ejecting an ink droplet, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partially deforming the nozzle, and a pressure chamber communicating with the pressure chamber An ink supply path including a plurality of supply branches for supplying ink, and a plurality of means for deforming a part of the pressure chamber are respectively provided, and the ink is connected to the plurality of ink supply paths and the ink is supplied to the ink supply path. An ink jet head having a common liquid chamber for supplying, wherein the plurality of nozzles are regularly aligned, and the pressure chamber and the ink supply path are formed on the same substrate by anisotropic etching.
The pattern width of the supply shunt on the substrate is 1 / the depth.
It is characterized by being 3 or less.

According to a fourth aspect of the present invention, a nozzle for ejecting an ink droplet, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partially deforming the nozzle, and a pressure chamber communicating with the pressure chamber are provided. An ink supply path for supplying ink and a plurality of means for deforming a part of the pressure chamber,
An ink jet head having a common liquid chamber that communicates with a plurality of the ink supply passages and supplies ink to the ink supply passages, wherein the plurality of nozzles are regularly aligned and the pressure chambers have a plane orientation of (110). The flow path plate obtained by anisotropically etching a silicon substrate having a is formed by bonding a vibration plate serving as a deformation part, and the nozzle is bonded to a side of the flow path plate facing the vibration plate. Cage,
The pressure chamber and the nozzle are connected by a communication pipe penetrating the flow path plate, and the pattern width of the ink supply path on the silicon substrate is 1/3 or less of the depth.

According to a fifth aspect of the invention, a nozzle for ejecting an ink droplet, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partially deforming the nozzle, and a pressure chamber communicating with the pressure chamber An ink supply path for supplying ink and a plurality of means for deforming a part of the pressure chamber,
There is a common liquid chamber that communicates with the plurality of ink supply paths and supplies ink to the ink supply paths, the plurality of nozzles are regularly aligned, and the pressure chambers and the ink supply paths are different on the same substrate. An ink jet head, which is formed by means of isotropic etching and has a pattern width of the ink supply path on the substrate that is ⅓ or less of the depth, is mounted.

According to a sixth aspect of the present invention, a nozzle for ejecting ink droplets, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partially deforming the nozzle, and a pressure chamber communicating with the pressure chamber An ink supply path for supplying ink and a plurality of means for deforming a part of the pressure chamber,
A silicon substrate having a common liquid chamber that communicates with the plurality of ink supply passages and supplies ink to the ink supply passages, the plurality of nozzles are regularly aligned, and the pressure chambers have a (110) plane orientation. To the flow path plate obtained by anisotropic etching, is formed by bonding a vibrating plate serving as a deformation part, and the nozzle is bonded to a side of the flow path plate facing the vibrating plate, and the pressure The chamber and the nozzle are communicated with each other by a communication tube penetrating the flow path plate, and the pattern width of the ink supply path on the silicon substrate is 1/3 of the depth.
The following inkjet heads are mounted.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIG.
~ It demonstrates based on the Example shown in FIG. (Embodiment 1) FIG. 3 is a top perspective view showing a pressure chamber and an ink supply path portion of an ink jet head of Embodiment 1, and FIG. 4 is a sectional view taken along line BB of the ink jet head of FIG. It should be noted that members having the same configuration or function as those of the inkjet head shown in FIG. 1 will be described using the same reference numerals and terms. In the inkjet head of Example 1, the PZT 14 is bonded onto the metal substrate 13,
Groove processing is performed so as to correspond to each nozzle 2. Further, the electrodes separated by the groove processing are electrically mounted by the FPC 15. An ink supply path 5 and a pressure chamber 6 are formed in a continuous pattern on the silicon flow path plate 3 and communicate with the nozzle 2 via a communication pipe 7. The common liquid chamber 17 is composed of a resin frame member 16 and is joined to the silicon channel plate 3 in a direction facing the nozzle surface. Ink is supplied from the common liquid chamber 17 to the ink supply path 5 through the ink supply port 11 that opens in the vibration plate 8. The PZT 14 is attached to the diaphragm 8 by the adhesive layer 12.
It is joined to the ZT connecting portion 10, and an annular thin portion 9 is formed around the PZT connecting portion 10.

Since the ink supply path 5 and the pressure chamber 6 are formed in the same process, the depth h is the same.
μm. The pattern width of the pressure chamber 6 is Wlc.
= 140 μm, the pattern width of the ink supply path 5 is Wrf =
28 μm. Here, the width Wrf of the ink supply passage is 1/3 or less of the depth h of the ink supply passage, and the fluid resistance value of the ink supply passage 5 portion can reduce the influence of variations in the depth h caused by the process. Therefore, it is possible to stably manufacture a head of uniform quality.

Next, the manufacturing process of the silicon channel plate by the ink jet head of the first embodiment will be described.
FIG. 5 is a plan view showing the manufacturing process of the silicon channel plate 3 over time, and FIG. 6 is a sectional view taken along line CC of FIG. As the silicon substrate 21, a p-type doped silicon substrate having a (110) plane orientation is used. First, LP-CV is formed on the entire surface.
A silicon nitride film 23 is formed on both surfaces by using D, and patterning on the pressure chamber surface side is performed to form the pattern 22 of the ink flow path and the pressure chamber. Next, the Al film 24 is formed on the nozzle surface side by using the magnetron sputtering method.
And silicon nitride film 23 are continuously patterned,
A communication pipe pattern 25 is formed (FIG. 5 (A), FIG. 6).
(A)). Next, the communication pipe pattern 25 is etched by ICP dry etching, and only the Al film 24 is selectively peeled off by the wet etching method (FIG. 5).
(B), FIG. 6 (B)). Next, anisotropic etching is performed using a KOH-based wet etchant to form the ink supply path 5, the pressure chamber 6, and the ink supply path end portion 4 adjacent to the ink supply port 11 (FIG. 5C). FIG. 6C).
In the case of such a configuration, since anisotropic etching is used, the pattern dimension can be formed with extremely good accuracy, and in particular, the width is 28 μm as in the ink jet head of the first embodiment.
And 10 μm or more, it is possible to manage the variation to such an extent that it can be almost ignored. However, since the etching depth is affected by the temperature of the etchant and the state of stirring,
It is difficult to improve the accuracy, and if mass production is assumed, a variation of about 10% occurs. Therefore, by setting the width to 1/3 or less with respect to the depth as in the present invention, it is possible to reduce the variation in the fluid resistance value to 10% or less.

FIG. 7 is a view showing the diaphragm 8 shown in FIGS. 3 and 4, FIG. 7 (A) is a top view, and FIG. 7 (B) is FIG. 7 (A).
FIG. In FIG. 7, the dotted line 28 corresponds to the pattern 22 of the ink supply passage and the pressure chamber. The diaphragm 8 is manufactured by Ni electroforming, and an annular thin portion 9 is formed in a portion corresponding to the pressure chamber 6, and the thin portion 9 is formed.
The inside of is the PZT junction 10. An ink supply port 11 is formed in a portion corresponding to the common liquid chamber 17 continuous with the ink supply passage 5.

(Embodiment 2) Next, an ink jet head of Embodiment 2 will be described. FIG. 8 is a top perspective view showing only a part of the inkjet head of the second embodiment, and FIG. 9 is a sectional view taken along line EE of the inkjet head of FIG. Note that FIG. 8 shows only a part of the inkjet head having a large number of nozzles, and the other parts are the same as those of the inkjet head of Example 1 shown in FIGS. 3 and 4. PZT on the metal substrate 13
14 are joined, and groove processing is performed so as to correspond to each nozzle 2. Further, the electrodes separated by the groove processing are electrically mounted by the FPC 15. An ink supply path 5 and a pressure chamber 6 are formed in a continuous pattern on the silicon flow path plate 3 and communicate with the nozzle 2 via a communication pipe 7.

The common liquid chamber 17 is a resin frame member 16
And is joined to the silicon flow path plate 3 from the direction opposite to the nozzle surface. Ink is the common liquid chamber 17
Is supplied to the ink supply path 5 through the ink supply port 11 opening in the vibration plate 8 and the ink supply path end 4. A PZT connecting portion 10 is formed on the vibration plate 8, a PZT 14 is joined via an adhesive layer 12, and a thin portion 9 is formed around the PZT connecting portion 10. Since the ink supply path 5 and the pressure chamber 6 are formed in the same process, the depth h is the same and is 90 μm. The pattern width of the pressure chamber 6 is Wlc = 140 μm. Further, although the entire width of the ink supply path 5 is the same as the pattern width of the pressure chamber 6 and Wlc, the partition walls 18a and 18b of the width Wa formed in the silicon flow path plate 3 are formed in the pattern width of the ink supply path 5. By being arranged, the three supply branches 5a, 5b,
5c are formed and each supply branch 5a, 5b, 5c
Has a pattern width of Wrf = 20 μm. Here, the width Wrf of the ink supply passage is 1/3 or less of the depth h of the ink supply passage, and the fluid resistance value of the portion of the ink supply passage 5 can reduce the influence of the process variation of the depth h. Therefore, it is possible to stably manufacture a head of uniform quality.

In this way, the ink supply path 5 is formed by a plurality of supply branches 5a, 5b, 5c, and the width of each supply branch is suppressed to 1/3 or less of the depth, It is possible to set a desired fluid resistance, it is possible to widen the applicable range with respect to the viscosity of the ink, etc., and it is possible to manufacture a head with few characteristic variations while maintaining the degree of design freedom.

Next, an example of an ink jet recording apparatus equipped with the ink jet heads of Embodiments 1 and 2 which are the droplet discharge heads of the present invention will be described. 10 is a perspective view showing an ink jet recording apparatus equipped with the ink jet head of the present invention, and FIG. 11 is a side sectional view showing a mechanical portion of the ink jet recording apparatus of FIG. This inkjet printing apparatus includes a carriage 123 and a carriage 12 that are movable in the main scanning direction inside a printing apparatus main body 111.
3, a printing mechanism 112 including a recording head 124 including the inkjet head according to the present invention, an ink cartridge 125 that supplies ink to the recording head 124, and the like are housed. A paper feed cassette (or a paper feed tray) 114 capable of stacking a large number of papers 113 from the front side can be detachably attached, and a manual paper feed tray 115 for manually feeding the papers 113 can be attached. The paper 113 fed from the paper feed cassette 114 or the manual feed tray 115 is taken in, the desired image is recorded by the printing mechanism unit 112, and then the paper is discharged to the paper discharge tray 116 mounted on the rear side. Eject the paper.

The printing mechanism 112 slides the carriage 123 in the main scanning direction (the direction perpendicular to the paper surface in FIG. 11) by the main guide rod 121 and the sub guide rod 122, which are guide members that are laterally mounted on the left and right side plates (not shown). The carriage 123 is freely held, and yellow (Y), cyan (C),
A recording head 124, which is an ink jet head that is a liquid droplet ejection head for ejecting ink droplets of each color of magenta (M) and black (Bk), has a direction in which a plurality of ink ejection ports intersects the main scanning direction. And are mounted so that the ink droplet ejection direction faces downward. Further, each ink cartridge 125 for supplying each color ink to the recording head 124 is replaceably mounted on the carriage 123. The ink cartridge 125 has an atmosphere port communicating with the atmosphere in the upper part, a supply port supplying the ink to the ink jet head in the lower part, and a porous body filled with the ink in the inside. The ink supplied to the inkjet head by force is maintained at a slight negative pressure.

Although the recording heads of the respective colors are used as the recording heads 124, one head having nozzles for ejecting ink droplets of the respective colors may be used. here,
The carriage 123 is slidably fitted to the main guide rod 121 on the rear side (downstream side in the sheet conveying direction) and slidably mounted on the sub guide rod 122 on the front side (upstream side in the sheet conveying direction). . Then, in order to move and scan the carriage 123 in the main scanning direction, a timing belt 130 is stretched between the drive pulley 128 and the driven pulley 129 which are rotationally driven by the main scanning motor 127, and the timing belt 130 is mounted on the carriage 123. The carriage 123 is reciprocally driven by the forward and reverse rotations of the main scanning motor 127. On the other hand, in order to convey the paper 113 set in the paper feed cassette 114 to the lower side of the recording head 124,
The paper feed roller 131 and the friction pad 132 for separating and feeding the paper 113 from the paper feed cassette 114, and the paper 1
Guide member 133 for guiding 13 and the fed sheet 1
A transport roller 134 that inverts and transports 13 and a transport roller 135 that is pressed against the peripheral surface of the transport roller 134.
And a leading end roller 136 that defines the feed angle of the paper 113 from the transport roller 134. The conveyance roller 134 is rotationally driven by the sub-scanning motor 137 via a gear train.

The paper 11 sent out from the carrying roller 134 in correspondence with the moving range of the carriage 123 in the main scanning direction.
A print receiving member 139, which is a paper guide member for guiding the sheet 3 under the recording head 124, is provided. At the downstream side of the print receiving member 139 in the paper transport direction, a transport roller 14 that is rotationally driven to send the paper 113 in the paper discharge direction.
1, a spur 142, and further, a paper discharge roller 143 and a spur 144 for sending the paper 113 to the paper discharge tray 116,
Guide members 145 and 146 that form a paper discharge path are provided.

At the time of recording, by driving the recording head 124 in accordance with the image signal while moving the carriage 123, ink is ejected onto the stopped paper 113 to record one line, and the paper 113 is moved by a predetermined amount. After transportation, the next line is recorded. Upon receiving a recording end signal or a signal that the trailing edge of the paper 113 reaches the recording area, the recording operation is ended and the paper 113 is ejected. In this case, since the inkjet head according to the present invention which constitutes the recording head 124 has improved controllability of ink droplet ejection and suppressed characteristic variation, it is possible to stably record an image of high image quality.

A recovery device 147 for recovering the ejection failure of the head 124 is arranged at a position outside the recording area on the right end side of the carriage 123 in the moving direction. The recovery device 147 has a cap means, a suction means, and a cleaning means. The carriage 123 is moved to the recovery device 147 side while the printing is on standby, the head 124 is capped by the capping means, and the ejection port portion is kept wet to prevent ejection failure due to ink drying.
Also, by ejecting ink that is not related to recording during recording, etc., the ink viscosity of all ejection ports is made constant,
Maintains stable discharge performance. When an ejection failure occurs, the ejection port of the head 124 is sealed by a capping unit, and air bubbles and the like are sucked out from the ejection port by a suction unit through a tube, and ink or dust adhered to the ejection port surface is cleaned by a cleaning unit. And the defective ejection is recovered. Further, the sucked ink is discharged to a waste ink reservoir (not shown) installed in the lower portion of the main body, and is absorbed and held by an ink absorber inside the waste ink reservoir. As described above, by mounting the ink jet head, which is the liquid droplet ejection head according to the present invention, stable ink droplet ejection characteristics can be obtained, so that it is possible to obtain a recording apparatus capable of performing high-quality recording.

[0027]

According to the present invention, in an ink jet head having a large number of nozzles, when the pressure chamber and the ink supply path are formed on the same substrate by anisotropic etching, the pattern width of the ink supply path on the substrate can be reduced. By setting the depth to ⅓ or less, it is possible to reduce the variation in the fluid resistance between the ink supply paths, and it is possible to provide an inkjet head of uniform quality. In addition, an inkjet head with less variation in fluid resistance between ink supply paths has improved controllability of ink droplet ejection and stable ink droplet ejection characteristics, so it is possible to record images with high image quality in a stable manner. It is possible to provide an inkjet recording device capable of performing the above.

[Brief description of drawings]

1A and 1B are views showing a portion of an inkjet head including a nozzle plate and a flow path plate, FIG. 1A is a top perspective view showing the nozzle plate in a see-through manner, and FIG. 1B is a perspective view of FIG. 1A. It is an AA sectional view.

FIG. 2 is a graph showing the relationship between the variation of the fluid resistance value R and the ratio of pattern depth (etching depth) h / pattern width w when the depth of the ink supply path changes by 10%.

FIG. 3 is a top perspective view showing a portion of a pressure chamber and an ink supply path of the inkjet head of the first embodiment.

4 is a cross-sectional view taken along the line BB of the inkjet head of FIG.

FIG. 5 is a plan view showing the manufacturing process of the silicon channel plate over time.

FIG. 6 is a sectional view taken along line CC of FIG.

7 is a diagram showing the diaphragm of FIGS. 3 and 4, and FIG.
Is a top view, and FIG. 7B is a cross-sectional view taken along the line DD of FIG.

FIG. 8 is a transparent top view showing a part of the inkjet head of Example 2 extracted.

9 is a cross-sectional view taken along line EE of the inkjet head of FIG.

FIG. 10 is a perspective view showing an inkjet recording apparatus equipped with the inkjet head of the present invention.

11 is a side sectional view showing a mechanical portion of the inkjet recording apparatus of FIG.

[Explanation of symbols]

1 ... Nozzle plate, 2 ... Nozzle, 3 ... Silicon channel plate, 4 ...
Ink supply path ends, 5 ... Ink supply paths 5a, 5b, 5
c ... supply shunt, 6 ... pressure chamber, 7 ... communication pipe, 8 ... diaphragm,
9 ... Thin portion, 10 ... PZT connecting portion, 11 ... Ink supply port, 12 ... Adhesive layer, 13 ... Metal substrate, 14 ... PZT, 1
5 ... FPC, 16 ... Frame member, 17 ... Common liquid chamber, 1
8a, 18b ... Partition walls, 21 ... Silicon substrate, 22 ... Ink supply passage and pressure chamber pattern, 23 ... Silicon nitride film, 24 ... Al film, 25 ... Communication tube pattern, 111 ... Recording device body, 112 ... Printing mechanism section , 113 ... Paper, 11
4 ... Paper feed cassette, 115 ... Manual feed tray, 116 ... Paper ejection tray, 121 ... Main guide rod, 122 ... Slave guide rod, 123 ... Carriage, 124 ... Recording head, 1
25 ... Ink cartridge, 127 ... Main scanning motor, 1
34 ... Conveying rollers, 135, 141 ... Conveying rollers, 142
... Spur, 139 ... A print receiving member.

Claims (6)

[Claims] 1. A nozzle for ejecting an ink droplet, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partially deforming the ink, and an ink communicating with the pressure chamber for supplying the ink to the pressure chamber. An inkjet head having a supply path and a plurality of means for deforming a part of the pressure chamber, the common liquid chamber communicating with the plurality of ink supply paths and supplying ink to the ink supply path. , The plurality of nozzles are regularly aligned, the pressure chamber and the ink supply path are formed on the same substrate by anisotropic etching, and the pattern width of the ink supply path on the substrate is one depth. An ink jet head characterized by being / 3 or less. 2. A nozzle for ejecting an ink droplet, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partially deforming the ink, and an ink communicating with the pressure chamber for supplying the ink to the pressure chamber. An inkjet head having a supply path and a plurality of means for deforming a part of the pressure chamber, the common liquid chamber communicating with the plurality of ink supply paths and supplying ink to the ink supply path. , The plurality of nozzles are regularly aligned, the pressure chamber and the ink supply path are formed by anisotropic etching on a single crystal silicon substrate having a main plane, and the ink supply path is formed on the single crystal silicon substrate. The inkjet head is characterized in that the pattern width is less than 1/3 of the depth. 3. A plurality of nozzles for ejecting ink droplets, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partly deforming, and a plurality of pressure chambers communicating with the pressure chamber for supplying ink to the pressure chamber. Common liquid chamber that has a plurality of ink supply paths each including a supply branch and a plurality of means for deforming a part of the pressure chamber and that communicates with the plurality of ink supply paths and supplies ink to the ink supply paths. An ink jet head having a plurality of nozzles arranged in a regular manner, the pressure chamber and the ink supply path are formed by anisotropic etching on the same substrate, and the supply shunt on the substrate is formed. An ink jet head characterized in that the pattern width is 1/3 or less of the depth. 4. A nozzle for ejecting an ink droplet, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partially deforming the ink, and an ink communicating with the pressure chamber and supplying the ink to the pressure chamber. An inkjet head having a supply path and a plurality of means for deforming a part of the pressure chamber, the common liquid chamber communicating with the plurality of ink supply paths and supplying ink to the ink supply path. The plurality of nozzles are regularly arranged, and the pressure chamber is formed by anisotropically etching a silicon substrate having a (110) plane orientation. And the nozzle is joined to the side of the flow path plate that opposes the vibrating plate, the pressure chamber and the nozzle are connected by a communication pipe that penetrates the flow path plate, and the nozzle of the ink supply path is formed. An ink jet head, wherein the pattern width on the silicon substrate is 1/3 or less of the depth. 5. A nozzle for ejecting an ink droplet, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partially deforming the ink, and an ink communicating with the pressure chamber and supplying the ink to the pressure chamber. A plurality of supply paths and a plurality of means for deforming a part of the pressure chambers, and a common liquid chamber that communicates with the plurality of ink supply paths and supplies ink to the ink supply paths; The nozzles are regularly arranged, the pressure chamber and the ink supply path are formed on the same substrate by anisotropic etching, and the pattern width of the ink supply path on the substrate is 1/3 of the depth. An inkjet recording apparatus comprising the following inkjet head. 6. A nozzle for ejecting an ink droplet, a pressure chamber communicating with the nozzle for generating a pressure in the ink by partially deforming the ink, and an ink communicating with the pressure chamber and supplying ink to the pressure chamber. A plurality of supply paths and a plurality of means for deforming a part of the pressure chambers, and a common liquid chamber that communicates with the plurality of ink supply paths and supplies ink to the ink supply paths; The nozzles are regularly aligned, and the pressure chamber is formed by joining a diaphragm serving as a deformable portion to a flow path plate obtained by anisotropically etching a silicon substrate having a (110) plane orientation, The nozzle is joined to a side of the flow path plate that faces the vibration plate, the pressure chamber and the nozzle are connected by a communication pipe penetrating the flow path plate, and on the silicon substrate of the ink supply path. Pattern An ink jet recording apparatus having an ink jet head whose width is 1/3 or less of the depth.