EP2286175A4 - Interferometric defect detection and classification - Google Patents

Interferometric defect detection and classification Download PDF

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Publication number
EP2286175A4
EP2286175A4 EP09759262.0A EP09759262A EP2286175A4 EP 2286175 A4 EP2286175 A4 EP 2286175A4 EP 09759262 A EP09759262 A EP 09759262A EP 2286175 A4 EP2286175 A4 EP 2286175A4
Authority
EP
European Patent Office
Prior art keywords
classification
defect detection
interferometric defect
interferometric
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09759262.0A
Other languages
German (de)
French (fr)
Other versions
EP2286175A1 (en
Inventor
Hwan J. Jeong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/190,144 external-priority patent/US7864334B2/en
Application filed by Individual filed Critical Individual
Publication of EP2286175A1 publication Critical patent/EP2286175A1/en
Publication of EP2286175A4 publication Critical patent/EP2286175A4/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
EP09759262.0A 2008-06-03 2009-06-02 Interferometric defect detection and classification Withdrawn EP2286175A4 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US13072908P 2008-06-03 2008-06-03
US13561608P 2008-07-22 2008-07-22
US12/190,144 US7864334B2 (en) 2008-06-03 2008-08-12 Interferometric defect detection
US18951008P 2008-08-20 2008-08-20
US18950908P 2008-08-20 2008-08-20
US18950808P 2008-08-20 2008-08-20
US21051309P 2009-03-19 2009-03-19
PCT/US2009/045999 WO2009149103A1 (en) 2008-06-03 2009-06-02 Interferometric defect detection and classification

Publications (2)

Publication Number Publication Date
EP2286175A1 EP2286175A1 (en) 2011-02-23
EP2286175A4 true EP2286175A4 (en) 2017-04-12

Family

ID=41398482

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09759262.0A Withdrawn EP2286175A4 (en) 2008-06-03 2009-06-02 Interferometric defect detection and classification

Country Status (5)

Country Link
EP (1) EP2286175A4 (en)
JP (1) JP5444334B2 (en)
KR (1) KR101556430B1 (en)
CN (1) CN102089616B (en)
WO (1) WO2009149103A1 (en)

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CN113390467B (en) * 2021-07-14 2022-05-03 安徽至博光电科技股份有限公司 Vibration and temperature measuring device and signal processing method thereof
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See also references of WO2009149103A1 *

Also Published As

Publication number Publication date
CN102089616B (en) 2013-03-13
CN102089616A (en) 2011-06-08
EP2286175A1 (en) 2011-02-23
JP5444334B2 (en) 2014-03-19
KR101556430B1 (en) 2015-10-01
JP2011523711A (en) 2011-08-18
WO2009149103A1 (en) 2009-12-10
KR20110031306A (en) 2011-03-25

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