EP2283968A3 - Polierverfahren für ein Werkstück und für das Polierverfahren verwendetes Polierwerkzeug - Google Patents

Polierverfahren für ein Werkstück und für das Polierverfahren verwendetes Polierwerkzeug Download PDF

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Publication number
EP2283968A3
EP2283968A3 EP10171593.6A EP10171593A EP2283968A3 EP 2283968 A3 EP2283968 A3 EP 2283968A3 EP 10171593 A EP10171593 A EP 10171593A EP 2283968 A3 EP2283968 A3 EP 2283968A3
Authority
EP
European Patent Office
Prior art keywords
polishing
workpiece
polishing body
polishing method
tool used
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10171593.6A
Other languages
English (en)
French (fr)
Other versions
EP2283968A2 (de
Inventor
Kenichi Masuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP2283968A2 publication Critical patent/EP2283968A2/de
Publication of EP2283968A3 publication Critical patent/EP2283968A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/0076Other grinding machines or devices grinding machines comprising two or more grinding tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/002Grinding heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/02Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/20Mountings for the wheels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/06Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental
    • B24D5/066Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental with segments mounted axially one against the other
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/10Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor with cooling provisions, e.g. with radial slots

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
EP10171593.6A 2009-08-03 2010-08-02 Polierverfahren für ein Werkstück und für das Polierverfahren verwendetes Polierwerkzeug Withdrawn EP2283968A3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009181085 2009-08-03

Publications (2)

Publication Number Publication Date
EP2283968A2 EP2283968A2 (de) 2011-02-16
EP2283968A3 true EP2283968A3 (de) 2013-11-27

Family

ID=43033624

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10171593.6A Withdrawn EP2283968A3 (de) 2009-08-03 2010-08-02 Polierverfahren für ein Werkstück und für das Polierverfahren verwendetes Polierwerkzeug

Country Status (3)

Country Link
US (1) US20110028074A1 (de)
EP (1) EP2283968A3 (de)
JP (1) JP5780719B2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202013002062U1 (de) 2013-03-05 2013-10-07 Christian Vogt System und Vorrichtung zum Schleifen von Formatteilen
US20150167652A1 (en) * 2013-12-18 2015-06-18 General Electric Company Submersible pumping system and method
EP3085491B1 (de) * 2015-04-24 2017-04-12 ARKU Maschinenbau GmbH Vorrichtung zum schleifen und entgraten eines flächigen werkstücks
CN108838802B (zh) * 2018-06-12 2023-11-21 江苏金鼎建设集团有限公司 一种木制品打磨装置
JP7317532B2 (ja) * 2019-03-19 2023-07-31 キオクシア株式会社 研磨装置及び研磨方法
DE102020120617A1 (de) * 2020-08-05 2022-02-10 Egon Evertz Kg (Gmbh & Co) Verfahren und Vorrichtung zum Rundschleifen

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB523879A (en) * 1939-02-13 1940-07-24 James Henry Fletcher Improvements relating to abrasive wheels for surface, former and other grinding
DE2331646A1 (de) * 1972-08-08 1974-02-28 Evertz Egon Schleifkoerper
GB2069893A (en) * 1980-01-21 1981-09-03 Braasch G Apparatus for sanding timber surfaces
JPH1190806A (ja) * 1997-09-12 1999-04-06 Ricoh Co Ltd 曲面研磨装置及び研磨方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1181782A (en) * 1966-03-11 1970-02-18 Norton Abrasives Ltd Improvements relating to Grinding
US4504283A (en) * 1982-07-22 1985-03-12 Superior Finishers, Incorporated Cushioned abrasive articles, and method of manufacture
DE8810148U1 (de) * 1988-08-10 1988-09-29 Gebr. Hegner KG Werkzeug- und Maschinenfabrik, 7730 Villingen-Schwenningen Schärf- und Poliermaschine
JP2798347B2 (ja) * 1993-07-08 1998-09-17 信越半導体株式会社 ウェーハのノッチ部研磨装置
US5954566A (en) * 1995-04-03 1999-09-21 Bauer; Jason Method and apparatus for reconditioning digital recording discs
DE19527222C2 (de) * 1995-07-26 1997-09-04 Wernicke & Co Gmbh Anlage zum Schleifen wenigstens des Umfangsrandes von Brillengläsern und Verfahren zum rechnerischen Berücksichtigen der Position eines an einem Haltekopf der Anlage gehaltenen Brillenglasrohlings
JPH09277148A (ja) * 1996-04-17 1997-10-28 Topcon Corp レンズ周縁研削方法及びその装置
CN1146866C (zh) * 1998-11-17 2004-04-21 阿尔卑斯电气株式会社 浮起式磁头的冠顶形成方法及冠顶形成装置
JP4136283B2 (ja) * 2000-07-07 2008-08-20 オリンパス株式会社 研磨装置
DE10064163C2 (de) * 2000-12-22 2003-04-17 Wernicke & Co Gmbh Anordnung zum lösbaren Befestigen einer Schleifscheibe oder eines Schleifscheibenpakets an einer Schleifspindel
JP3731522B2 (ja) * 2001-10-09 2006-01-05 日本ミクロコーティング株式会社 クリーニングシート
JP4170204B2 (ja) * 2003-12-03 2008-10-22 株式会社リコー 研磨方法
KR100949560B1 (ko) * 2005-05-17 2010-03-25 도요 고무 고교 가부시키가이샤 연마 패드
JP5142548B2 (ja) * 2006-02-14 2013-02-13 Hoya株式会社 磁気ディスク用ガラス基板の製造方法および研磨パッド
US7204244B1 (en) * 2006-03-02 2007-04-17 Luminare Supply Corporation Diamond core drill bit

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB523879A (en) * 1939-02-13 1940-07-24 James Henry Fletcher Improvements relating to abrasive wheels for surface, former and other grinding
DE2331646A1 (de) * 1972-08-08 1974-02-28 Evertz Egon Schleifkoerper
GB2069893A (en) * 1980-01-21 1981-09-03 Braasch G Apparatus for sanding timber surfaces
JPH1190806A (ja) * 1997-09-12 1999-04-06 Ricoh Co Ltd 曲面研磨装置及び研磨方法

Also Published As

Publication number Publication date
JP5780719B2 (ja) 2015-09-16
EP2283968A2 (de) 2011-02-16
JP2011051089A (ja) 2011-03-17
US20110028074A1 (en) 2011-02-03

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