EP2283508B1 - Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung - Google Patents

Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung Download PDF

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Publication number
EP2283508B1
EP2283508B1 EP09757210A EP09757210A EP2283508B1 EP 2283508 B1 EP2283508 B1 EP 2283508B1 EP 09757210 A EP09757210 A EP 09757210A EP 09757210 A EP09757210 A EP 09757210A EP 2283508 B1 EP2283508 B1 EP 2283508B1
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EP
European Patent Office
Prior art keywords
electron beam
liquid
liquid line
radiation
radiation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP09757210A
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German (de)
English (en)
French (fr)
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EP2283508A1 (de
Inventor
Frank Sukowski
Norman Uhlmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
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Priority to PL09757210T priority Critical patent/PL2283508T3/pl
Publication of EP2283508A1 publication Critical patent/EP2283508A1/de
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Publication of EP2283508B1 publication Critical patent/EP2283508B1/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/12—Cooling non-rotary anodes
    • H01J35/13—Active cooling, e.g. fluid flow, heat pipes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H01J2235/082—Fluids, e.g. liquids, gases
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes

Definitions

  • the invention relates to a radiation source for generating X-radiation. Furthermore, the invention relates to a method for generating X-radiation.
  • the nondestructive testing of objects using X-ray computed tomography requires the use of high-energy x-ray sources to inspect objects with high transmission lengths or high densities.
  • a solid body is used as the X-ray target, which is strongly heated and thermally stressed by the bombardment with an electron beam in the interaction zone designated as the focal spot.
  • the heat generated in the focal spot is difficult to remove from the solid.
  • the thermal load of the X-ray target thus limits the achievable output power of the X-ray radiation.
  • X-ray sources with a high output power of the X-radiation are required.
  • An X-ray source is known in which a liquid jet is used as the X-ray target.
  • the liquid jet is generated by means of a nozzle and collected by a suction pipe again. Between the nozzle and the suction tube, the liquid jet moves freely in an evacuated chamber.
  • the liquid jet is bombarded with an electron beam to generate X-rays.
  • the fact that the X-ray target is designed as a liquid jet, the resulting heat in the focal spot can be better dissipated compared to a solid.
  • the achievable output of the X-radiation is higher compared to X-ray sources with a solid body as the X-ray target.
  • the disadvantage is that if the liquid jet is heated too much, the vapor pressure of the liquid jet can rise to such an extent that it is no longer completely sucked off, but a portion of the liquid jet evaporates and deposits on the inner walls of the evacuated chamber. The function and reliability of the X-ray source is thereby compromised.
  • a radiation source for generating X-ray radiation which has, as an X-ray target, a liquid which flows through a closed liquid line.
  • An electron beam strikes the liquid line and enters through an entrance window in the form of a metal foil with a thickness of 5 to 30 microns in this.
  • the kinetic energy of the electrons is about 500 keV.
  • a radiation source for generating X-ray radiation which has as the X-ray target a liquid alloy of Ga, In and Sn or liquid mercury flowing through a closed liquid line.
  • the liquid line has a permeable to the electron beam entrance window. Due to the low energy of the electrons, the entrance window is made extremely thin, so that pressure fluctuations on the entrance window must be compensated by an opposite compensation window with a pressure chamber arranged behind it.
  • a radiation source for generating X-ray radiation which has as the X-ray target a liquid alloy of Ga, In and Sn or liquid mercury, which is arranged in a liquid line.
  • the entrance window is thin, so that pressure fluctuations on the entrance window must be compensated.
  • an X-ray source that has liquid mercury in a liquid chamber.
  • the chamber is formed by two opposing plates and a bellows arranged therebetween. The distance of the plates is adjustable.
  • the invention has for its object to provide a radiation source for generating high-energy X-ray radiation, which allows a high degree of heat removal from the interaction zone and at the same time ensures unrestricted function and high reliability of the radiation source.
  • a radiation source for generating X-radiation with the features of claim 1. Because the liquid acting as X-ray target is completely surrounded by the liquid line in the direction of the evacuable chamber, the liquid is completely separated from the chamber, so that no liquid can escape from the liquid line and be deposited in the chamber. The heat removal due to the liquid flow from the interaction zone is not affected by the liquid line. So that the electrons of the electron beam lose as little as possible of their kinetic energy on entering the liquid line, at least the part of the liquid line through which the electrons enter the liquid line is essentially permeable or transparent to the electron beam.
  • the electron beam generation unit can be operated with a high acceleration voltage, in particular with at least 3 MV, so that a correspondingly high-energy X-ray radiation is generated, which is preferably emitted in the electron beam direction.
  • liquids liquid metals, such as mercury, or liquids with metallic microparticles can be used.
  • the target unit in such a way that the X-ray radiation can be emitted substantially in the electron beam direction enables a simple provision of high-energy X-radiation.
  • the liquid provided by means of the target unit serves as a so-called transmission X-ray target.
  • the generated X-ray radiation is emitted substantially in the electron beam direction.
  • the liquid line is permeable or transparent to the X-ray radiation on the side opposite to the part which is permeable to the electron beam, so that it can emerge from the liquid line essentially without loss of energy in the electron beam direction.
  • the intensity ratio of X-rays generated in the electron beam direction increases as compared with the X-rays generated against the electron beam direction.
  • the X-ray radiation is generated substantially in the electron beam direction, which is used in the target unit.
  • the liquid disposed in the liquid line thus forms a transmission X-ray target.
  • the efficiency in the generation of high-energy X-radiation is substantially higher in the transmission X-ray target according to the invention than in a reflection X-ray target, in which the X-radiation is generated substantially opposite to the electron beam direction.
  • the Elektronenstrahleraeugungsaku is accordingly operable with an acceleration voltage of at least 3 MV.
  • the transmissive portion in the electron beam direction has a dimension in the range of 50 ⁇ m to 500 ⁇ m increases the transmittance of the electron beam.
  • the permeable part of the liquid line has sufficient stability to absorb the forces due to the pressure difference between the pressures inside and outside the liquid line. Since the stability also decreases with decreasing dimension in the electron beam direction, the dimension must be chosen such that there is sufficient transmittance and stability of the transmissive part at the same time.
  • Forming the liquid conduit such that the transmissive portion has a dimension of at most 1000 ⁇ m across the electron beam direction increases the stability of the transmissive member.
  • the dimension of the permeable part transverse to the electron beam direction at most as large as the cross section of the electron beam.
  • a liquid line according to claim 2 is largely permeable to the electrons of the electron beam.
  • the permeability increases with decreasing atomic number of the chemical elements of the material.
  • materials for example compounds of berrylium, carbon, oxygen, aluminum and / or silicon can be used.
  • carbon in the form of graphite or diamond can be used.
  • glassy compounds of carbon can be used, which are available, for example, under the trade name Sigradur.
  • the materials can be ceramics. Decisive for a high permeability or transparency is that all chemical elements of the material have an atomic number of at most 14.
  • a material according to claim 3 is both permeable and stable.
  • An entrance window according to claim 5 allows in a simple manner to form a part of the liquid line permeable.
  • the entrance window and the remaining conduit wall of the fluid conduit can be made of different materials.
  • the entrance window and / or the conduit wall are preferably made of a heat and corrosion resistant metal.
  • the conduit wall preferably has one Wall thickness in the range of 0.5 mm to 50 mm, in particular in the range of 1.0 mm to 20 mm, and in particular in the range of 2 mm to 10 mm.
  • the conduit wall is preferably formed on the side opposite the entrance window side in such a way that the generated X-ray radiation can emerge from the fluid conduit essentially unattenuated.
  • An embodiment of the fluid conduit of claim 6 minimizes the pressure differential between the evacuated chamber and the fluid at the location of the permeable portion of the fluid conduit or entrance window. Reducing the internal cross-sectional area in the landing section increases the velocity of the fluid flowing through it, reducing the static pressure according to the Bernoulli equation.
  • the transition section between the feed section and the impact section can in principle be tapered as desired. For example, the taper may be symmetric in all directions or asymmetrical in at least one selected direction.
  • a transition section according to claim 7 prevents the formation of a turbulent flow.
  • the size of the interaction zone designated as the focal surface can be kept small.
  • a liquid pump according to claim 9 improves the heat removal from the interaction zone.
  • the pressure and the speed of Liquid in the liquid line can be adjusted by means of the liquid pump.
  • a cooling unit according to claim 10 ensures that the temperature of the liquid can be kept permanently constant.
  • the liquid is preferably pumped after the bombardment with the electron beam through a heat exchanger serving as a cooling unit.
  • a liquid according to claim 11 ensures a good ratio of the generation of X-radiation to the generation of heat. This ratio improves with increasing atomic number of the chemical elements of the liquid.
  • Mercury as a liquid has proven itself in practice for generating X-ray radiation.
  • An X-ray computer tomograph according to claim 12 allows the investigation of objects with high transmission lengths and / or high densities with good image quality.
  • a further object of the present invention is to provide a method for generating high-energy X-ray radiation which to a great extent permits heat removal from the interaction zone and at the same time ensures unrestricted and reliable generation of X-ray radiation.
  • a radiation source 1 has an evacuated chamber 3 for generating high-energy x-ray radiation 2.
  • an electron beam generating unit 5 is arranged.
  • the electron beam generating unit 5 serves to generate an electron beam 6 which extends in an electron beam direction 7 in the chamber 3.
  • the electron beam generation unit 5 is operable to accelerate the electrons forming the electron beam 6 with a maximum acceleration voltage U B, and more particularly from 3 MV to 24 MV. Alternatively, the upper limit for the acceleration voltage may be 18 MV.
  • the electron beam generation unit 5 is designed as a linear accelerator (LINAC), in which the electrons can be generated via incandescent emission and can be accelerated in several stages in an evacuated tube, the so-called waveguide. At lower acceleration voltages U B , the electron beam generating unit 5 may alternatively be formed as an X-ray tube.
  • LINAC linear accelerator
  • the radiation source 1 has a target unit 8 which serves to provide an X-ray target 9.
  • the X-ray target 9 is formed as a liquid and is hereinafter referred to as liquid 9.
  • the liquid 9 is arranged in a closed liquid line 10 which extends transversely to the electron beam direction 7 at a second end 11 of the chamber 3 and closes the chamber 3.
  • the liquid 9 is thus completely surrounded by the liquid line 10 in the direction of the chamber 3.
  • the target unit 8 has a liquid pump 13.
  • the liquid line 10 is divided into a feed section 14, a funnel-shaped tapering first transition section 15, a striking section 16, a funnel-shaped expanding second transition section 17 and a discharge section 18.
  • the impact section 16 is arranged at the second end 11 of the chamber 3 in the middle of this, so that the electron beam 6 strikes the liquid line 10 in the impact section 16.
  • a cooling unit 19 designed as a heat exchanger 19 is arranged in the liquid line 10 in the feed section 14.
  • a part 20 of the liquid line 10 for the electron beam 6 is so permeable or transparent that it can enter the liquid line 10 through the permeable part 20 substantially without the loss of kinetic energy.
  • the permeable part 20 of the liquid line 10 is formed as a separate entrance window, which is arranged in a recess 21 of the liquid line 10 forming conduit wall 22 tightly.
  • entrance window 20 By interaction of the electron beam 6 and the liquid 9, an interaction zone 23 designated as a focal spot for generating the X-radiation 2 can thus be generated within the liquid line 10.
  • entrance window 20 Of the permeable part of the liquid line 10 is hereinafter referred to as entrance window 20.
  • the entrance window 20 consists of a material of one or more chemical elements, each having an atomic number of at most 14.
  • the material of the entrance window 20 is beryllium, diamond or aluminum. These materials have a high permeability to the electron beam 6 due to their atomic numbers.
  • the conduit wall 22 may in principle consist of any material and, in particular, does not need to be permeable to the electron beam 6.
  • the entrance window 20 has in the electron beam direction 7 a dimension D of at most 1000 .mu.m, in particular of at most 100 .mu.m, and in particular of at most 10 .mu.m.
  • the smaller the thickness dimension D the greater the transparency of the entrance window 20 for the electron beam 6. If the dimension D of the entrance window 20 is at most 1000 .mu.m, this is preferably in the range from 50 .mu.m to 500 .mu.m. As a result, a high stability of the entrance window 20 is ensured at the same time.
  • the entrance window 20 has a dimension H of at most 500 ⁇ m.
  • the entrance window 20 may be circular or square. In a circular design, the dimension H denotes the diameter. In a square design, the dimension H denotes the side length.
  • the dimension H corresponds to the diameter of the electron beam 6.
  • the liquid line 10 has a first inner cross-sectional area A 1 .
  • the liquid line 10 has a second inner cross-sectional area A 2 in the impact section 16 comprising the entrance window 20.
  • the inner cross-sectional areas A 1 and A 2 are in Fig. 2 indicated.
  • the entrance window 20 is formed flush with the conduit wall 22 toward an inner side of the liquid passage 10, so that the second inner cross-sectional area A 2 in the entire impact portion 16 is constant.
  • the ratio A 1 / A 2 of the first inner cross-sectional area A 1 to the second inner cross-sectional area A 2 is greater than 1, in particular greater than 10, and in particular greater than 100.
  • the impact section 16 has along the electron beam direction 7 an internal dimension B of at most 5000 ⁇ m, in particular of at most 1000 ⁇ m, and in particular of at most 100 ⁇ m.
  • the liquid 9 consists of a material having at least one chemical element, wherein the at least one chemical element has an atomic number of at least 50. If the liquid 9 is made of a material having a plurality of chemical elements, then each chemical element has an atomic number of at least 50. Preferably, the material of the liquid 9 Mercury. The efficiency of the generation of X-radiation 2 against the generation of heat increases linearly with the atomic number of the material of the liquid 9.
  • the radiation source 1 is of a - in Fig. 1 only indicated - lead shield 24 surrounded.
  • the lead shield 24 has an exit window 25 for the generated X-radiation 2 in the region of the impact section 16.
  • the radiation source 1 is, for example, part of an X-ray computer tomograph for nondestructive testing of industrial objects.
  • the generation of X-ray radiation 2 by means of the radiation source 1 will be described.
  • the electron beam generation unit 5 electrons are generated by thermal emission, which are accelerated by the acceleration voltage U B and form the electron beam 6.
  • the electron beam 6 passes through the chamber 3 in the electron beam direction 7 and impinges on the liquid line 10 in the impingement section 16. Because the entrance window 20 is substantially transparent to the electrons of the electron beam 6, the electron beam 6 can pass through the liquid line 10 into the liquid line 10 Enter liquid 9.
  • the electron beam 6 and the liquid 9 cooperate in a known manner, so that X-ray radiation 2 is emitted, which is emitted substantially in the electron beam direction 7 and leaves the radiation source 1 through the exit window 25.
  • the entrance window 20 is permeable and has a small dimension D in the electron beam direction 7, the electrons of the electron beam 6 lose little kinetic energy when entering the liquid line 9.
  • the second inner cross-sectional area A 2 is significantly smaller than the first inner cross-sectional area A 1 , the pressure difference between the liquid 9 and the chamber 3 at the location of the entrance window 20 minimized.
  • a high stability of the liquid line 10 in the impingement section 16 is ensured by the fact that the entrance window 20 is at most as large as the diameter of the electron beam 6.
  • the liquid 9 is continuously pumped by the liquid pump 13 through the liquid line 10, so that the heat generated in the interaction zone 23 heat is dissipated by an exchange of the liquid 9 in the interaction zone 23.
  • the liquid 9 heated in the interaction zone 23 is pumped by means of the liquid pump 13 through the cooling unit 19, whereby the supplied heat is dissipated again and the liquid 9 has no increased temperature when it flows through the interaction zone 23 again. Because the liquid 9 is completely surrounded by the liquid line 10 towards the chamber 3, no liquid 9 can evaporate in the interaction zone 23 and leave the liquid line 10. This ensures unrestricted function and high reliability of the radiation source 1.
  • the pressure of the liquid 9 and the flow rate of the liquid 9 can be adjusted by means of the liquid pump 13. Because the first transition section 15 tapers in a funnel shape in the flow direction 12, a laminar flow is ensured at the transition between the feed section 14 and the impact section 16.
  • the liquid 9 acts as a transmission X-ray target, so that the generated X-radiation 2 is emitted substantially in the electron beam direction 7.
  • This is extremely efficient since, with increasing acceleration voltage U B, the intensity ratio of X-radiation 2 generated in the electron beam direction 7 increases with respect to X-radiation 2 generated against the electron beam direction 7.
  • At acceleration voltages U B from about 1 MV substantially all of the X-radiation 2 is generated in the electron beam direction 7.
  • the conduit wall 22 is designed such that the generated X-radiation 2 can emerge from the fluid conduit 9 substantially unattenuated in the electron beam direction 7.

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
EP09757210A 2008-06-05 2009-05-28 Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung Active EP2283508B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL09757210T PL2283508T3 (pl) 2008-06-05 2009-05-28 Źródło promieniowania i sposób wytwarzania promieniowania rentgenowskiego

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008026938A DE102008026938A1 (de) 2008-06-05 2008-06-05 Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung
PCT/EP2009/003784 WO2009146827A1 (de) 2008-06-05 2009-05-28 Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung

Publications (2)

Publication Number Publication Date
EP2283508A1 EP2283508A1 (de) 2011-02-16
EP2283508B1 true EP2283508B1 (de) 2011-10-26

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EP09757210A Active EP2283508B1 (de) 2008-06-05 2009-05-28 Strahlungsquelle und verfahren zum erzeugen von röntgenstrahlung

Country Status (6)

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US (1) US8565381B2 (pl)
EP (1) EP2283508B1 (pl)
AT (1) ATE531069T1 (pl)
DE (1) DE102008026938A1 (pl)
PL (1) PL2283508T3 (pl)
WO (1) WO2009146827A1 (pl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014226813A1 (de) * 2014-12-22 2016-06-23 Siemens Aktiengesellschaft Metallstrahlröntgenröhre
US10748736B2 (en) 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
EP3493239A1 (en) * 2017-12-01 2019-06-05 Excillum AB X-ray source and method for generating x-ray radiation
US11719652B2 (en) 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
US11882642B2 (en) 2021-12-29 2024-01-23 Innovicum Technology Ab Particle based X-ray source
US11955308B1 (en) 2022-09-22 2024-04-09 Kla Corporation Water cooled, air bearing based rotating anode x-ray illumination source

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US4737647A (en) 1986-03-31 1988-04-12 Siemens Medical Laboratories, Inc. Target assembly for an electron linear accelerator
DE19955392A1 (de) * 1999-11-18 2001-05-23 Philips Corp Intellectual Pty Monochromatische Röntgenstrahlenquelle
WO2002011499A1 (en) 2000-07-28 2002-02-07 Jettec Ab Method and apparatus for generating x-ray or euv radiation
DE10062928A1 (de) * 2000-12-16 2002-06-20 Philips Corp Intellectual Pty Röntgenstrahler mit Flüssigmetall-Target
DE10106740A1 (de) * 2001-02-14 2002-08-22 Philips Corp Intellectual Pty Röntgenstrahler mit einem Target aus einem flüssigen Metall
DE10129463A1 (de) * 2001-06-19 2003-01-02 Philips Corp Intellectual Pty Röntgenstrahler mit einem Flüssigmetall-Target
DE10130070A1 (de) * 2001-06-21 2003-01-02 Philips Corp Intellectual Pty Röntgenstrahler mit Flüssigmetall-Target
JP2005520289A (ja) * 2002-03-08 2005-07-07 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 液体金属アノードを有するｘ線発生装置
US7127036B2 (en) * 2002-03-08 2006-10-24 Koninklijke Philips Electronics, N.V. Device for generating X-rays having a liquid metal anode
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DE102004013618B4 (de) * 2004-03-19 2007-07-26 Yxlon International Security Gmbh Verfahren zum Betrieb einer magnetohydrodynamischen Pumpe, Flüssigmetallanode für eine Röntgenquelle sowie Röntgenstrahler
DE102004015590B4 (de) 2004-03-30 2008-10-09 GE Homeland Protection, Inc., Newark Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul
WO2005101450A1 (en) * 2004-04-13 2005-10-27 Koninklijke Philips Electronics N.V. A device for generating x-rays having a liquid metal anode

Also Published As

Publication number Publication date
WO2009146827A1 (de) 2009-12-10
EP2283508A1 (de) 2011-02-16
PL2283508T3 (pl) 2012-03-30
DE102008026938A1 (de) 2009-12-17
US8565381B2 (en) 2013-10-22
ATE531069T1 (de) 2011-11-15
US20110080997A1 (en) 2011-04-07

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