EP2263428A2 - Procédé et dispositif d'amorçage d'un arc électrique - Google Patents

Procédé et dispositif d'amorçage d'un arc électrique

Info

Publication number
EP2263428A2
EP2263428A2 EP09731134A EP09731134A EP2263428A2 EP 2263428 A2 EP2263428 A2 EP 2263428A2 EP 09731134 A EP09731134 A EP 09731134A EP 09731134 A EP09731134 A EP 09731134A EP 2263428 A2 EP2263428 A2 EP 2263428A2
Authority
EP
European Patent Office
Prior art keywords
anode
cathode
arc
electrodes
barrier discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09731134A
Other languages
German (de)
English (en)
Inventor
Patrick Grabau
Julius Roch
Volkmar Hopfe
Ines Dani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP2263428A2 publication Critical patent/EP2263428A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3421—Transferred arc or pilot arc mode

Definitions

  • the invention relates to a method and a device for igniting an arc between an anode and a cathode arranged at a distance therefrom of a plasma source which can be used for a substrate surface modification under ambient atmospheric conditions.
  • the plasma formed by means of a plasma-forming gas and ignited arc can be directed via an outlet opening onto a substrate surface to be modified.
  • the arc plasma source can be operated in a normal environment at atmospheric pressure, so that it can be dispensed with otherwise commonly used vacuum or vacuum technology. With a per se known arc plasma source, a large-volume plasma can be made available, so that an effective modification of large areas is possible. Substrate surfaces can be cleaned, coated on surfaces.
  • te layers are smoothed, the surface is smoothed or roughened and it is also the formation of layers on surfaces possible, if appropriately suitable gases for the plasma formation or additional reactive gases are used.
  • the invention can also be used in other workpiece processing technologies in which a plasma can be usefully used.
  • Such an arc plasma source is described inter alia in DE 10 2004 015 217 B4.
  • an arc between an anode and a cathode is ignited and then formed with the arc and gas supplied a plasma that can escape through a slot and used. Since the anode and cathode of the plasma source are arranged at a greater distance from each other, an increased effort for the ignition of the arc is required.
  • EP 0 851 720 B1 it is proposed to use a cascaded neutron arrangement which is formed with a stack of copper cascades and insulation material.
  • the Neutroden are arranged between the anode and cathode and can be acted upon by a high voltage electrical.
  • complex ignition electronics With complex ignition electronics, a pilot arc is gradually ignited with the neutrons acting as anodes for a short time, which is successively extended to the total length of the arc to be formed between the actual anode and cathode.
  • this object is achieved by a method having the features of claim 1. It can be worked with a device according to claim 9. Advantageous embodiments and further developments can be achieved with features described in the subordinate claims.
  • the arc is ignited by means of two electrodes arranged parallel to the longitudinal axis between the anode and cathode.
  • the electrodes are connected to a high voltage generator and are acted upon for the ignition with a high-frequency electrical AC voltage.
  • a barrier discharge is ignited.
  • the arc can be ignited with charge carriers arranged on the anode and cathode by the barrier discharge between the anode and the cathode.
  • An inert gas such as argon should be used.
  • the volume flow of this gas should be at least in the ignition phase and for the barrier discharge at 10 to 100 sl / min.
  • a DC electrical voltage applied to the anode and cathode with which also the then ignited arc between the actual anode and cathode of the plasma source can be maintained.
  • the electrical voltage can be chosen depending on the distance between anode and cathode. But it should be at least 100V. At a larger distance, so of about 300 mm, a DC electrical voltage of 500 V can be used.
  • the electrodes used for the formation of the barrier discharge are arranged at a distance which should be as constant as possible over the entire length to each other. Between the electrodes, a gap is formed, at the two end faces once the anode and at the other end side, the cathode are arranged.
  • the electrodes should be provided with a dielectric, but at least high-resistance coating, which should be the case at least on the side of the electrodes, which leads to the respective other electrode has.
  • the electrodes may be rod-shaped or plate-shaped. Their length should be selected so that sufficient charge carriers are present through the barrier discharge in the space between anode and cathode. It is not absolutely necessary to dimension the electrodes in their length so that the length corresponds to the distance from anode to cathode. It may be sufficient that the length of the electrodes is at least 75% of the distance between the anode and the cathode. In this case, the barrier discharge over a length of 80% of the distance between the anode and cathode can be achieved.
  • an adaptation of the electrical parameters can be made, that is, the high-frequency electrical AC voltage and / or applied to the anode and cathode DC voltage to be adjusted accordingly to ensure sufficient values for the electric discharge and the arc of the arc voltage and power.
  • the structural design of an arc plasma source can be considerably simplified.
  • the number of wear parts is reduced because the electrodes are not subject to wear.
  • the effort for operation, maintenance and repair is significantly reduced.
  • FIG. 1 shows in schematic form an example of an embodiment of the invention. inventive device in two views.
  • an anode 4 and on the right a cathode 5 are arranged on the end faces of a combustion channel 7 for an arc and both are connected to a DC voltage source 6.
  • the distance between anode 4 and cathode 5 is 300 mm.
  • An electrical voltage of 500 V is applied.
  • Electrodes 1 and 2 On both sides of the fuel channel 7 are two electrodes 1 and 2, which are aligned parallel to each other and arranged at a distance from each other. They are connected to a high voltage generator 3 and are supplied with an electrical AC voltage of 10 kV at a frequency of 15 kHz.
  • the electrodes 1 and 2 are here provided with a dielectric coating 8 on the surface facing in the direction of the combustion channel 7.
  • argon is introduced as plasma gas 9 into the combustion channel 7. It can be used for the barrier discharge and possibly later ignited arc 11 for the plasma formation.
  • the illustration of anode 4 and cathode 5 has been omitted here.
  • the gap between the electrodes 1 and 2 is 9 mm here. The gap can also be narrower or wider in other designs.
  • Argon is fed at a flow rate of 40 sl / min.
  • the electrical DC voltage can be applied already at training / ignition of the barrier discharge. However, this must be the case at least when the ignition of the arc 11 is to take place and through the barrier discharge sufficient charge carriers in the combustion channel 7 between anode 4 and cathode 5 are present.
  • the electrical AC voltage can be switched off.
  • the formed plasma 10 can be expelled.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

L'invention concerne un procédé et un dispositif d'amorçage d'un arc électrique entre une anode et une cathode d'une source de plasma dans des conditions atmosphériques ambiantes, la cathode étant placée à une certaine distance de l'anode et la source de plasma pouvant être utilisée pour modifier la surface d'un substrat. L'objectif de l'invention est de simplifier l'amorçage d'un arc électrique d'une source de plasma et d'augmenter la fiabilité du processus d'amorçage. A cet effet, une décharge à barrière est amorcée avec apport de gaz au moyen de deux électrodes placées entre l'anode et la cathode parallèlement à l'axe longitudinal, qui sont raccordées à un générateur haute tension et auxquelles une tension alternative haute fréquence est appliquée lors de l'amorçage. Ainsi, un arc électrique peut être amorcé par application d'une tension continue à l'anode et à la cathode au moyen des porteurs de charge créés par la décharge à barrière entre l'anode et la cathode.
EP09731134A 2008-04-08 2009-04-07 Procédé et dispositif d'amorçage d'un arc électrique Withdrawn EP2263428A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008018589A DE102008018589A1 (de) 2008-04-08 2008-04-08 Verfahren und Vorrichtung zum Zünden eines Lichtbogens
PCT/DE2009/000498 WO2009124542A2 (fr) 2008-04-08 2009-04-07 Procédé et dispositif d'amorçage d'un arc électrique

Publications (1)

Publication Number Publication Date
EP2263428A2 true EP2263428A2 (fr) 2010-12-22

Family

ID=41070141

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09731134A Withdrawn EP2263428A2 (fr) 2008-04-08 2009-04-07 Procédé et dispositif d'amorçage d'un arc électrique

Country Status (5)

Country Link
US (1) US20110108539A1 (fr)
EP (1) EP2263428A2 (fr)
CN (1) CN101983542A (fr)
DE (1) DE102008018589A1 (fr)
WO (1) WO2009124542A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014126457A1 (fr) * 2013-02-15 2014-08-21 Stichting Vu-Vumc Système et procédé de surveillance respiratoire, masque, circuit respiratoire et filtre de circuit respiratoire pour utilisation dans un tel système et procédé, et programme informatique
US10378565B2 (en) * 2014-09-29 2019-08-13 University Of Florida Research Foundation, Inc. Electro-fluid transducers
JP7048720B2 (ja) * 2018-03-20 2022-04-05 株式会社Fuji プラズマ装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE806181A (fr) * 1973-10-17 1974-02-15 Soudure Autogene Elect Procede d'amorcage d'une colonne de plasma a l'interieur d'une enceinte et canne-electrode pour l'execution dudit procede
DD125890A1 (fr) * 1976-03-02 1977-06-01
DD299812A7 (de) * 1989-03-27 1992-05-07 Ilmenauer Glaswerke Gmbh,De Verfahren zur lagestabilisierung von lichtboegen in plasmaschmelzanordnungen
DE3914923A1 (de) 1989-05-06 1990-11-08 Heraeus Holding Entladungsvorrichtung
DE4117005C2 (de) * 1990-06-11 2003-07-24 Tokyo Electron Ltd Verfahren und Anordnung zum Einwirken mit einem Lichtstrahl in einen Entladungsraum
US5319282A (en) * 1991-12-30 1994-06-07 Winsor Mark D Planar fluorescent and electroluminescent lamp having one or more chambers
DE4302465C1 (de) * 1993-01-29 1994-03-10 Fraunhofer Ges Forschung Vorrichtung zum Erzeugen einer dielektrisch behinderten Entladung
DE4440130A1 (de) * 1994-11-10 1996-05-15 Blz Bayrisches Laserzentrum Ge Anordnung und Verfahren zum Zünden bzw. Löschen von Gasentladungen, insbesondere bei Gaslasern
DE19517515A1 (de) * 1995-05-12 1996-11-14 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Entladungslampe und Verfahren zum Betreiben derartiger Entladungslampen
ATE185465T1 (de) 1996-12-23 1999-10-15 Sulzer Metco Ag Indirektes plasmatron
DE19705884A1 (de) * 1997-02-15 1998-08-20 Leybold Ag Plasma-Zündvorrichtung
DE19816377C2 (de) * 1998-04-11 2001-03-08 Fraunhofer Ges Forschung Verfahren zur Anregung von Entladungen zwischen wenigstens zwei Hauptelektroden sowie Vorrichtung zur Durchführung eines solchen Verfahrens
DE10042629C2 (de) * 2000-08-30 2003-08-28 Angaris Gmbh Zündvorrichtung für einen Lichtbogenverdampfer
DE10051508C2 (de) * 2000-10-18 2003-08-07 Fraunhofer Ges Forschung Verfahren und Einrichtung zur Reduzierung der Zündspannung von Leistungspulsen gepulst betriebener Plasmen
DE10140298B4 (de) * 2001-08-16 2005-02-24 Mtu Aero Engines Gmbh Verfahren zum Plasmaschweißen
JP2003173887A (ja) * 2001-12-06 2003-06-20 Harison Toshiba Lighting Corp 誘電体バリア放電ランプ点灯装置及び点灯方法
DE10224991A1 (de) * 2002-06-05 2004-01-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Einrichtung zur Reduzierung der Zündspannung von Plasmen
US6831421B1 (en) * 2003-03-24 2004-12-14 The United States Of America As Represented By The Secretary Of The Air Force Shunt-induced high frequency excitation of dielectric barrier discharges
DE102004010261A1 (de) * 2004-03-03 2005-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zum Zünden einer Hohlkatodenbogenentladung
DE102004015217B4 (de) 2004-03-23 2006-04-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Ausbildung dünner Schichten aus Siliziumnitrid auf Substratoberflächen
BG66022B1 (bg) * 2005-06-14 2010-10-29 ДИНЕВ Петър Метод за плазмено-химична повърхнинна модификация
WO2007094179A1 (fr) * 2006-02-13 2007-08-23 Matsushita Electric Industrial Co., Ltd. Dispositif formant lampe a decharge a barriere dielectrique et retro-eclairage pour cristaux liquides

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2009124542A2 *

Also Published As

Publication number Publication date
DE102008018589A1 (de) 2009-11-05
WO2009124542A2 (fr) 2009-10-15
US20110108539A1 (en) 2011-05-12
WO2009124542A3 (fr) 2009-12-03
CN101983542A (zh) 2011-03-02

Similar Documents

Publication Publication Date Title
EP0522281B1 (fr) Procédé et dispositif d'allumage de plasmas en CVD
EP2936542B1 (fr) Procédé d'extinction d'arc et système d'alimentation en puissance pourvu d'un convertisseur de puissance
DE10015244C2 (de) Verfahren und Schaltungsanordnung zur pulsförmigen Energieeinspeisung in Magnetronentladungen
WO2007000255A2 (fr) Procede de traitement plasma et/ou de revetement plasma en pression atmospherique continue de pieces d'usinage, notamment de materiau en plaque ou en bande
DE1465005A1 (de) Schaltanordnung fuer Lichtbogenschweissung
WO1996013964A1 (fr) Procede et circuit pour l'alimentation en energie pulsee bipolaire dans des plasmas basses pression
WO1998033201A1 (fr) Procede et systeme d'exploitation de decharges de magnetrons
EP1826810B1 (fr) Agencement de séparation de particules à partir d'un plasma
DE2838688A1 (de) Anordnung zum elektrischen laden von teilchen
EP0529259A1 (fr) Appareil pour le traitement de substrats
DE2534776A1 (de) Elektrostatische farbauftragseinrichtung
EP2771901B1 (fr) Procédé permettant de fournir des impulsions de puissance séquentielles
WO2007054048A1 (fr) Procede et dispositif de revetement et/ou de traitement de surfaces
DE19621874C2 (de) Quelle zur Erzeugung von großflächigen, gepulsten Ionen- und Elektronenstrahlen
EP1110234B1 (fr) Dispositif et procede pour appliquer un revetement sur des substrats sous vide
EP2263428A2 (fr) Procédé et dispositif d'amorçage d'un arc électrique
DE602004008091T2 (de) Beschleuniger mit gepulstem plasma und betriebsverfahren dazu
DE4239218C2 (de) Anordnung zum Verhindern von Überschlägen in einem Plasma-Prozeßraum
EP1872637A1 (fr) Dispositif et procede de revetement par jet de plasma
EP2087503B1 (fr) Dispositif de prétraitement de substrats
EP1675155A1 (fr) Système d'excitation de plasma
WO2013091761A1 (fr) Procédé pour produire un revêtement homogène par hipims
DE3791058C2 (de) Verfahren und Vorrichtung zum Einbrennen von Elektronenröhren
WO2008128536A2 (fr) Anode pour la formation d'un plasma par création de décharges en arc électriques
DE102008062619B4 (de) Mikrowellenplasmaquelle und Verfahren zur Bildung eines linear langgestreckten Plasma bei Atmosphärendruckbedingen

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20100921

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA RS

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20111124

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20130618