WO2009124542A2 - Procédé et dispositif d'amorçage d'un arc électrique - Google Patents

Procédé et dispositif d'amorçage d'un arc électrique Download PDF

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Publication number
WO2009124542A2
WO2009124542A2 PCT/DE2009/000498 DE2009000498W WO2009124542A2 WO 2009124542 A2 WO2009124542 A2 WO 2009124542A2 DE 2009000498 W DE2009000498 W DE 2009000498W WO 2009124542 A2 WO2009124542 A2 WO 2009124542A2
Authority
WO
WIPO (PCT)
Prior art keywords
anode
cathode
arc
electrodes
barrier discharge
Prior art date
Application number
PCT/DE2009/000498
Other languages
German (de)
English (en)
Other versions
WO2009124542A3 (fr
Inventor
Patrick Grabau
Julius Roch
Volkmar Hopfe
Ines Dani
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority to CN2009801121250A priority Critical patent/CN101983542A/zh
Priority to US12/934,097 priority patent/US20110108539A1/en
Priority to EP09731134A priority patent/EP2263428A2/fr
Publication of WO2009124542A2 publication Critical patent/WO2009124542A2/fr
Publication of WO2009124542A3 publication Critical patent/WO2009124542A3/fr

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3421—Transferred arc or pilot arc mode

Definitions

  • the invention relates to a method and a device for igniting an arc between an anode and a cathode arranged at a distance therefrom of a plasma source which can be used for a substrate surface modification under ambient atmospheric conditions.
  • the plasma formed by means of a plasma-forming gas and ignited arc can be directed via an outlet opening onto a substrate surface to be modified.
  • the arc plasma source can be operated in a normal environment at atmospheric pressure, so that it can be dispensed with otherwise commonly used vacuum or vacuum technology. With a per se known arc plasma source, a large-volume plasma can be made available, so that an effective modification of large areas is possible. Substrate surfaces can be cleaned, coated on surfaces.
  • te layers are smoothed, the surface is smoothed or roughened and it is also the formation of layers on surfaces possible, if appropriately suitable gases for the plasma formation or additional reactive gases are used.
  • the invention can also be used in other workpiece processing technologies in which a plasma can be usefully used.
  • Such an arc plasma source is described inter alia in DE 10 2004 015 217 B4.
  • an arc between an anode and a cathode is ignited and then formed with the arc and gas supplied a plasma that can escape through a slot and used. Since the anode and cathode of the plasma source are arranged at a greater distance from each other, an increased effort for the ignition of the arc is required.
  • EP 0 851 720 B1 it is proposed to use a cascaded neutron arrangement which is formed with a stack of copper cascades and insulation material.
  • the Neutroden are arranged between the anode and cathode and can be acted upon by a high voltage electrical.
  • complex ignition electronics With complex ignition electronics, a pilot arc is gradually ignited with the neutrons acting as anodes for a short time, which is successively extended to the total length of the arc to be formed between the actual anode and cathode.
  • this object is achieved by a method having the features of claim 1. It can be worked with a device according to claim 9. Advantageous embodiments and further developments can be achieved with features described in the subordinate claims.
  • the arc is ignited by means of two electrodes arranged parallel to the longitudinal axis between the anode and cathode.
  • the electrodes are connected to a high voltage generator and are acted upon for the ignition with a high-frequency electrical AC voltage.
  • a barrier discharge is ignited.
  • the arc can be ignited with charge carriers arranged on the anode and cathode by the barrier discharge between the anode and the cathode.
  • An inert gas such as argon should be used.
  • the volume flow of this gas should be at least in the ignition phase and for the barrier discharge at 10 to 100 sl / min.
  • a DC electrical voltage applied to the anode and cathode with which also the then ignited arc between the actual anode and cathode of the plasma source can be maintained.
  • the electrical voltage can be chosen depending on the distance between anode and cathode. But it should be at least 100V. At a larger distance, so of about 300 mm, a DC electrical voltage of 500 V can be used.
  • the electrodes used for the formation of the barrier discharge are arranged at a distance which should be as constant as possible over the entire length to each other. Between the electrodes, a gap is formed, at the two end faces once the anode and at the other end side, the cathode are arranged.
  • the electrodes should be provided with a dielectric, but at least high-resistance coating, which should be the case at least on the side of the electrodes, which leads to the respective other electrode has.
  • the electrodes may be rod-shaped or plate-shaped. Their length should be selected so that sufficient charge carriers are present through the barrier discharge in the space between anode and cathode. It is not absolutely necessary to dimension the electrodes in their length so that the length corresponds to the distance from anode to cathode. It may be sufficient that the length of the electrodes is at least 75% of the distance between the anode and the cathode. In this case, the barrier discharge over a length of 80% of the distance between the anode and cathode can be achieved.
  • an adaptation of the electrical parameters can be made, that is, the high-frequency electrical AC voltage and / or applied to the anode and cathode DC voltage to be adjusted accordingly to ensure sufficient values for the electric discharge and the arc of the arc voltage and power.
  • the structural design of an arc plasma source can be considerably simplified.
  • the number of wear parts is reduced because the electrodes are not subject to wear.
  • the effort for operation, maintenance and repair is significantly reduced.
  • FIG. 1 shows in schematic form an example of an embodiment of the invention. inventive device in two views.
  • an anode 4 and on the right a cathode 5 are arranged on the end faces of a combustion channel 7 for an arc and both are connected to a DC voltage source 6.
  • the distance between anode 4 and cathode 5 is 300 mm.
  • An electrical voltage of 500 V is applied.
  • Electrodes 1 and 2 On both sides of the fuel channel 7 are two electrodes 1 and 2, which are aligned parallel to each other and arranged at a distance from each other. They are connected to a high voltage generator 3 and are supplied with an electrical AC voltage of 10 kV at a frequency of 15 kHz.
  • the electrodes 1 and 2 are here provided with a dielectric coating 8 on the surface facing in the direction of the combustion channel 7.
  • argon is introduced as plasma gas 9 into the combustion channel 7. It can be used for the barrier discharge and possibly later ignited arc 11 for the plasma formation.
  • the illustration of anode 4 and cathode 5 has been omitted here.
  • the gap between the electrodes 1 and 2 is 9 mm here. The gap can also be narrower or wider in other designs.
  • Argon is fed at a flow rate of 40 sl / min.
  • the electrical DC voltage can be applied already at training / ignition of the barrier discharge. However, this must be the case at least when the ignition of the arc 11 is to take place and through the barrier discharge sufficient charge carriers in the combustion channel 7 between anode 4 and cathode 5 are present.
  • the electrical AC voltage can be switched off.
  • the formed plasma 10 can be expelled.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

L'invention concerne un procédé et un dispositif d'amorçage d'un arc électrique entre une anode et une cathode d'une source de plasma dans des conditions atmosphériques ambiantes, la cathode étant placée à une certaine distance de l'anode et la source de plasma pouvant être utilisée pour modifier la surface d'un substrat. L'objectif de l'invention est de simplifier l'amorçage d'un arc électrique d'une source de plasma et d'augmenter la fiabilité du processus d'amorçage. A cet effet, une décharge à barrière est amorcée avec apport de gaz au moyen de deux électrodes placées entre l'anode et la cathode parallèlement à l'axe longitudinal, qui sont raccordées à un générateur haute tension et auxquelles une tension alternative haute fréquence est appliquée lors de l'amorçage. Ainsi, un arc électrique peut être amorcé par application d'une tension continue à l'anode et à la cathode au moyen des porteurs de charge créés par la décharge à barrière entre l'anode et la cathode.
PCT/DE2009/000498 2008-04-08 2009-04-07 Procédé et dispositif d'amorçage d'un arc électrique WO2009124542A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2009801121250A CN101983542A (zh) 2008-04-08 2009-04-07 用于引发电弧的方法和装置
US12/934,097 US20110108539A1 (en) 2008-04-08 2009-04-07 Method and Device for Igniting an Arc
EP09731134A EP2263428A2 (fr) 2008-04-08 2009-04-07 Procédé et dispositif d'amorçage d'un arc électrique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008018589.2 2008-04-08
DE102008018589A DE102008018589A1 (de) 2008-04-08 2008-04-08 Verfahren und Vorrichtung zum Zünden eines Lichtbogens

Publications (2)

Publication Number Publication Date
WO2009124542A2 true WO2009124542A2 (fr) 2009-10-15
WO2009124542A3 WO2009124542A3 (fr) 2009-12-03

Family

ID=41070141

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2009/000498 WO2009124542A2 (fr) 2008-04-08 2009-04-07 Procédé et dispositif d'amorçage d'un arc électrique

Country Status (5)

Country Link
US (1) US20110108539A1 (fr)
EP (1) EP2263428A2 (fr)
CN (1) CN101983542A (fr)
DE (1) DE102008018589A1 (fr)
WO (1) WO2009124542A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2994046A1 (fr) * 2013-02-15 2016-03-16 Stichting VU-VUmc Système et procédé de surveillance respiratoire, masque, circuit respiratoire et filtre de circuit respiratoire pour utilisation dans un tel système et procédé, et programme informatique
WO2016053936A2 (fr) * 2014-09-29 2016-04-07 The University Of Florida Research Foundation, Inc. Tranducteurs électro-fluidiques
CN111886934A (zh) * 2018-03-20 2020-11-03 株式会社富士 等离子体装置、等离子体生成方法

Citations (7)

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US5067135A (en) 1989-05-06 1991-11-19 Haraeus Holding Gmbh Gas laser apparatus
EP0550047A2 (fr) 1991-12-30 1993-07-07 Mark D. Winsor Lampe fluorescente et électroluminescente plane ayant une ou plusieurs chambres
US5965988A (en) 1995-05-12 1999-10-12 Patent-Treuhand-Gesellschaft Fur Elektrische Gluehlampen Mbh Discharge lamp with galvanic and dielectric electrodes and method
JP2003173887A (ja) 2001-12-06 2003-06-20 Harison Toshiba Lighting Corp 誘電体バリア放電ランプ点灯装置及び点灯方法
US6831421B1 (en) 2003-03-24 2004-12-14 The United States Of America As Represented By The Secretary Of The Air Force Shunt-induced high frequency excitation of dielectric barrier discharges
WO2006133524A2 (fr) 2005-06-14 2006-12-21 Peter Doncheff Dineff Procede de modification chimique de surface par traitement plasma
US20080061689A1 (en) 2006-02-13 2008-03-13 Matsushita Electric Industrial Co., Ltd. Dielectric barrier discharge lamp device and backlight for liquid crystal display

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BE806181A (fr) * 1973-10-17 1974-02-15 Soudure Autogene Elect Procede d'amorcage d'une colonne de plasma a l'interieur d'une enceinte et canne-electrode pour l'execution dudit procede
DD125890A1 (fr) * 1976-03-02 1977-06-01
DD299812A7 (de) * 1989-03-27 1992-05-07 Ilmenauer Glaswerke Gmbh,De Verfahren zur lagestabilisierung von lichtboegen in plasmaschmelzanordnungen
DE4117005C2 (de) * 1990-06-11 2003-07-24 Tokyo Electron Ltd Verfahren und Anordnung zum Einwirken mit einem Lichtstrahl in einen Entladungsraum
DE4302465C1 (de) * 1993-01-29 1994-03-10 Fraunhofer Ges Forschung Vorrichtung zum Erzeugen einer dielektrisch behinderten Entladung
DE4440130A1 (de) * 1994-11-10 1996-05-15 Blz Bayrisches Laserzentrum Ge Anordnung und Verfahren zum Zünden bzw. Löschen von Gasentladungen, insbesondere bei Gaslasern
ATE185465T1 (de) 1996-12-23 1999-10-15 Sulzer Metco Ag Indirektes plasmatron
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Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5067135A (en) 1989-05-06 1991-11-19 Haraeus Holding Gmbh Gas laser apparatus
EP0550047A2 (fr) 1991-12-30 1993-07-07 Mark D. Winsor Lampe fluorescente et électroluminescente plane ayant une ou plusieurs chambres
US5965988A (en) 1995-05-12 1999-10-12 Patent-Treuhand-Gesellschaft Fur Elektrische Gluehlampen Mbh Discharge lamp with galvanic and dielectric electrodes and method
JP2003173887A (ja) 2001-12-06 2003-06-20 Harison Toshiba Lighting Corp 誘電体バリア放電ランプ点灯装置及び点灯方法
US6831421B1 (en) 2003-03-24 2004-12-14 The United States Of America As Represented By The Secretary Of The Air Force Shunt-induced high frequency excitation of dielectric barrier discharges
WO2006133524A2 (fr) 2005-06-14 2006-12-21 Peter Doncheff Dineff Procede de modification chimique de surface par traitement plasma
US20080061689A1 (en) 2006-02-13 2008-03-13 Matsushita Electric Industrial Co., Ltd. Dielectric barrier discharge lamp device and backlight for liquid crystal display

Also Published As

Publication number Publication date
DE102008018589A1 (de) 2009-11-05
CN101983542A (zh) 2011-03-02
US20110108539A1 (en) 2011-05-12
EP2263428A2 (fr) 2010-12-22
WO2009124542A3 (fr) 2009-12-03

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