EP2261983A2 - Verfahren zur Herstellung einer organische elektrolumineszenten Anzeigevorrichtung, Substrat zur Anwendung dieses Verfahrens und durch dieses Verfahren hergestellte organische elektrolumineszente Anzeigevorrichtung - Google Patents

Verfahren zur Herstellung einer organische elektrolumineszenten Anzeigevorrichtung, Substrat zur Anwendung dieses Verfahrens und durch dieses Verfahren hergestellte organische elektrolumineszente Anzeigevorrichtung Download PDF

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Publication number
EP2261983A2
EP2261983A2 EP10186196A EP10186196A EP2261983A2 EP 2261983 A2 EP2261983 A2 EP 2261983A2 EP 10186196 A EP10186196 A EP 10186196A EP 10186196 A EP10186196 A EP 10186196A EP 2261983 A2 EP2261983 A2 EP 2261983A2
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EP
European Patent Office
Prior art keywords
substrate
pixel pits
layer
instance
sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10186196A
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English (en)
French (fr)
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EP2261983A3 (de
Inventor
Marinus Franciscus Johannes Evers
Peter BRIËR
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OLED Technologies & Solutions BV
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OTB Group BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OTB Group BV filed Critical OTB Group BV
Publication of EP2261983A2 publication Critical patent/EP2261983A2/de
Publication of EP2261983A3 publication Critical patent/EP2261983A3/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/04—Refractors for light sources of lens shape
    • F21V5/045—Refractors for light sources of lens shape the lens having discontinuous faces, e.g. Fresnel lenses
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V21/00—Supporting, suspending, or attaching arrangements for lighting devices; Hand grips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/85—Arrangements for extracting light from the devices
    • H10K50/858—Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/17—Passive-matrix OLED displays
    • H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/844—Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/873—Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10—Substrates, e.g. flexible substrates

Definitions

  • the invention relates to a method for manufacturing an organic electroluminescent display device, wherein an arrangement of layers is applied to a substrate, such that, in a first direction, conductors extend, as well as in a second direction, while between the intersections of the conductors, an organic electroluminescent connection is provided which emits light under the influence of an electric tension.
  • the invention also relates to a substrate suitable and intended for use in a method according to the invention for manufacturing an organic electroluminescent display device.
  • the starting point is a substrate manufactured from glass, onto which a structure has been applied with the aid of a photoresist, provided, for instance, through spin coating, which photoresist has been locally exposed and thereupon has been locally removed with washing techniques.
  • a photoresist provided, for instance, through spin coating, which photoresist has been locally exposed and thereupon has been locally removed with washing techniques.
  • the method of the type described in the opening paragraph is characterized in that the substrate is manufactured from plastic and is provided with a surface structure which forms a boundary, at least for a number of the layers to be applied.
  • Such a plastic substrate which is provided with a surface structure can be manufactured with a plastic designing process known per se such as, for instance, injection molding, embossing, photopolymeric replication or the like. Embossing has been described in, for instance, US-A-4 659 407 , photopolymeric replication has been described in WO 87/02934 . From, for instance, the manufacture of CDs, injection molding techniques are known with the aid of which very fine submicronstructures can be manufactured in a plastic substrate at relatively very low cost prices. The need of using wet chemical techniques for forming the substrate is thereby cancelled with all associated advantages. Such fine surface structures can also be applied on a film, as is described in, for instance, WO 99/12160 or EP-A-0 408 283 .
  • the method may include that the substrate used therein includes pixel pits or sub-pixel pits and wherein in the pixel pits or sub-pixel pits a structure has been provided, designed for improving the distribution of liquid for forming the layers provided in the pixel pits or substantially- pixel pits.
  • a first conductive layer can be applied by means of a layer application process such as, for instance, a sputtering process, wherein the surface structure of plastic substrate is provided with a shadowing structure which is such that with the layer application process, parts of this shadowing process are hardly covered, if at all, with the respective conductive layer.
  • a layer application process such as, for instance, a sputtering process
  • the surface structure of plastic substrate is provided with a shadowing structure which is such that with the layer application process, parts of this shadowing process are hardly covered, if at all, with the respective conductive layer.
  • the shadowing structure must be such that the electrical resistance prevailing there is great relative to the resistance in the rest of the conductive layer.
  • the shadowing structure can comprise a number of parallel, narrow and deep grooves, while the width and the depth of the grooves are such that, in the layer application process, at least a part of the side walls and/or the bottom of these grooves is hardly covered, if at all, with the first conductive layer.
  • Such a groove structure can be designed to be such that, in a releasing manner, it can be taken from the mold in which the plastic substrate is formed.
  • the shadowing structure is provided without, to that end, one single finishing step being required for the plastic substrate.
  • the shadowing structure is obtained practically free of charge in the designing process of the plastic substrate when the mold has the right shape.
  • Layers can be applied with the aid of a printing operation such as, for instance, inkjet printing, silkscreen printing, electrostatic printing techniques and thermal transfer printing.
  • a printing operation such as, for instance, inkjet printing, silkscreen printing, electrostatic printing techniques and thermal transfer printing.
  • the walls of the respective channels form the boundaries of the liquid deposited in the channels with the printing process.
  • layers and layer patterns can be provided with the aid of which the organic electroluminescent display device is composed.
  • layers and layer patterns comprise, for instance, a PDOT- and PPV- layer in the pixel pits or sub-pixel pits, insulating layers for covering the first conductor and conductive layers for forming a number of second conductors.
  • An additional relief structure e.g. a curing varnish
  • a curing varnish can be applied to the substrate already provided with a number of layers, for forming a relief structure desired for the application of a following layer.
  • a number of new channels can be formed in which the liquid, forming the second conductors, can be deposited.
  • This curing varnish can for instance be a UV-curing varnish which is deposited locally with an inkjet printing operation.
  • the above-described shadowing structure can be removed by filling the relatively narrow and deep grooves up with UV-curing varnish.
  • the shape of the surface structure can be adapted through a transforming technique, such as, for instance, a local thermal treatment.
  • a thermal treatment can, for instance, be contactlessly, via infrared radiation, or laser irradiation or with a contact treatment.
  • the groove-shaped shadowing structures can be melted away.
  • the substrate described in the opening paragraph is characterized in that it is manufactured from plastic and is provided with a surface structure which forms a boundary, at least for a number of the layers to be applied, wherein in the pixel pits or sub-pixel pits a structure has been provided, designed for improving the distribution of liquid for forming the layers provided in the pixel pits or substantially- pixel pits.
  • Such a plastic substrate provided with a surface structure can be manufactured in one single operation in an injection molding process. This means that the cost price of the substrate can be particularly low. This in contrast with the substrates from glass used heretofore, on which, with the aid of photochemical techniques, structures have been applied.
  • the pixel pits or sub-pixel pits render the deposition of liquid therein, such as for instance PDOT or PPV, with the aid of an inkjet process simple and more controllable.
  • the surface structure can comprise a shadowing structure which is such that with a sputtering process, indirect sputting and/or evaporation, parts of this shadowing structure are not covered with the respective conductive layer, so that the shadowing structure forms insulating tracks in the conductive layer.
  • the shadowing structure can be formed by a number of parallel narrow and deep grooves, while the width and the depth of the grooves is such that at least a part of the side walls and/or the bottom of these grooves are not covered with a first conductive layer in a sputtering process.
  • a structure in the pixel pits or sub-pixel pits, a structure can be provided which influences the generated light that passes the structure.
  • a structure can also be provided at the side of the substrate remote from the pixel pits or sub-pixel pits.
  • a structure in the form of a Fresnel lens having a converging or diverging effect on the light passing through the structure, can be considered.
  • a contact surface enlarging structure can be provided in the pixel pits or sub-pixel pits. Firstly, such a contact surface enlarging structure yields a larger conductive surface so that the electrical resistance across a pixel is reduced. Moreover, a larger electroluminescent surface is created so that a greater light intensity per pixel is obtained.
  • the structure improving the distribution of liquid can also be combined with the contact surface enlarging structure.
  • the structure can, for instance, comprise a number of capillary grooves.
  • the invention also provides an organic electroluminescent display device manufactured while using a method according to any one of claims 1 - 16 starting from a substrate according to any one of claims 17-20.
  • Figs. 1 and 2 show a cross-sectional front view and a top plan view of a part of a plastic substrate 1 not yet provided with layers for manufacturing an organic electroluminescent display device.
  • the substrate has been provided with a surface structure forming a boundary, at least for a number of the layers to be applied.
  • pixel pits 2 are clearly visible which are bounded by pixel pit boundaries 3.
  • the surface structure further comprises a shadowing structure 4.
  • the shadowing structure has been designed as, each time, a number of parallel, deep, narrow grooves 4', 4", 4"'.
  • Such a shadowing structure is such that a layer to be applied with a layer application process such as, for instance, sputtering, hardly covers, if at all, parts of the shadowing structure.
  • Figs. 3 and 4 shows the same substrate which is provided with a transparent encapsulation layer 5, such as, for instance, a nitride-oxide-nitride-, or, NON-layer. Also, other transparent layers which are tight to water, oxygen and other undesired substances are among the possibilities.
  • the transparent encapsulation layer can, for instance, be applied with a deposition technique such as a PVD-, CVD- or PECVD-process.
  • Figs. 5 and 6 show the substrate after a first conductive layer 6 has been applied.
  • the first conductive layer is formed by a TCO-layer (transparent conductive oxide).
  • other conductive layers can be applied. It is clearly visible that the deep parts of the grooves 4', 4", 4"' are hardly covered, if at all, with the first conductive layer 6. In this manner therefore, parallel conductive paths are obtained insulated from each other and extending in a first direction.
  • the Figures also clearly show that parts of the first conductors extend in pixel pits or sub-pixel pits 2 of the surface structure of the substrate 1.
  • the first conductive layer can also be a so-called PDOT-layer.
  • a hole injecting layer 7, such as, for instance, a PDOT-layer is applied exclusively in the pixel pits or sub-pixel pits 2.
  • the layer can for instance be deposited in the pixel pits or sub-pixel pits with a printing operation, such as for instance an inkjet operation. Since the pixel pits or sub-pixel pits 2 are bounded by pixel pit boundaries 3, the risk of the liquid forming the PDOT-layer flowing outside the pixel pits or sub-pixel pits 2 is reduced to a minimum.
  • a light emitting layer 8 is deposited, such as, for instance, a PPV-layer.
  • This layer too can be provided with the aid of, for instance, inkjet printing.
  • Figs. 11 and 12 show that the shadowing structure 4 and, more in particular, the deep, narrow grooves 4', 4", 4"' are filled up with an insulating covering 9.
  • This covering can for instance be formed by a UV-curing varnish which can be accurately applied with the aid of an inkjet printing operation. Instead thereof, the method represented in Fig. 39b can also be used.
  • a second conductive layer 11 is applied such that a number of parallel conductors 12 is provided, extending in a second direction and which are mutually insulated from each other. Parts of the second conductors 12 extend in pixel pits or sub-pixel pits 2 of the surface structure of the substrate 1.
  • the second conductors 12 extend perpendicularly to the first conductors which extend between the parallel shadowing structures 4.
  • the second conductive layer 11 too can be selectively applied with the aid of a printing process, such as for instance an inkjet printing operation.
  • Figs. 17 and 18 show that a second encapsulation layer 13 is applied over the entire substrate. This layer too seals off from undesired substances, such as, for instance, water, oxygen and the like.
  • Figs. 19 and 20 show a second embodiment of a substrate 21.
  • this substrate has not been provided with a shadowing structure as described hereinabove.
  • a channel structure 24 with channel boundary 24' is present for a printable first conductive layer.
  • the pixel pits or sub-pixel pits 22 are clearly visible with the pixel pit boundaries 23.
  • a separating structure 25 is already partially present for a printable second conductive layer. This separating structure 25 is still interrupted at the location of the channels 24 in which the first conductive layer 27 is to be printed.
  • Figs. 21 and 22 show the same substrate which is provided with a transparent encapsulation layer 26, such as, for instance, nitride-oxide-nitride, or NON-layer. Also, other transparent layers which are tight to water, oxygen and other undesired substances are among the possibilities.
  • the transparent encapsulation layer 26 can, for instance, be applied through an evaporation technique such as a CVD- or PECVD-process.
  • Figs. 23 and 24 show a printed first conductive layer 27. It is clearly visible that the first conductive layer 27 extends in the channel structure 24 intended thereto and in the pixel pits or sub-pixel pits 12.
  • the first conductive layer 27 is formed by a PDOT-layer which has been provided on the desired location with the aid of an inkjet printing operation.
  • the channel structure boundary 24' and the pixel pit boundary 23 ensure that the liquid does not flow outside the desired areas.
  • Figs. 25 and 26 show that in the pixel pits or sub-pixel pits 22, further, a light emitting layer 28 is deposited, such as, for instance, a PPV-layer. This layer 28 too can be provided with for instance inkjet printing.
  • insulating covering 29 can for instance be formed by a UV-varnish or photoresist varnish.
  • Figs. 29 and 30 show that the separating structure 25 has also been provided in the channel structure 24 through the provision of a threshold 30 therein.
  • the additional relief structure is therefore provided on the substrate already provided with a number of layers for forming a relief structure desired for applying a following layer.
  • the additional relief structure 30 is provided with the aid of a printing operation, while using a curing varnish, for instance a UV-curing varnish.
  • channels 31 are formed, extending parallel to each other, while the channel direction is perpendicular to the first direction mentioned in which the first conductors 27 extend.
  • Figs. 31 and 32 show that, thereupon, the entire substrate is covered with an electron injecting layer 32 such as, for instance, a calcium-, magnesium-, lithium fluoride- or barium-layer.
  • an electron injecting layer 32 such as, for instance, a calcium-, magnesium-, lithium fluoride- or barium-layer.
  • Figs. 33 and 34 show that the second conductive layer 33 has been provided in the channels 31, for instance with the aid of an inkjet printing operation.
  • the second conductive layer 33 provides a number of parallel conductors, mutually insulated from each other and extending in the second direction, while parts of the second conductors extend in pixel pits or sub-pixel pits 22 of the surface structure of the substrate 21.
  • Figs. 35 and 36 show that after the application of the second conductive layer, an encapsulation layer 34 is applied over substantially the entire surface of the substrate. This layer too seals off from undesired substances such as, for instance, water, oxygen and the like.
  • the layer can comprise, for instance, a Nitride-metal-Nitride layer, a NONON-layer or a NDLCN-layer (nitride diamond like carbon nitride).
  • Fig. 37 shows a top plan view of a substrate wherein, in the pixel pits or sub-pixel pits, a structure 35 has been provided which influences the generated light passing the structure.
  • the structure forms a Fresnel lens 35 which has a converging, diverging or, conversely, paralleling effect. It is noted that such a structure can also extend over several pixels, so that in a part of the eventual display, the issuing light is optically influenced.
  • Such a structure can also be provided on the side of the substrate remote from the pixel pits.
  • Fig. 38 shows another structure 36 provided in the pixel pits or sub-pixel pits 2, 22, designed to improve the distribution of liquid for forming layers provided in the pixel pits or sub-pixel pits.
  • this structure 36 also has a contact surface enlarging effect. This can, for instance, be effected with a structure which is provided with capillary grooves. Such a larger contact surface not only reduces the electrical resistance, it also provides a larger light emitting surface, so that, also, more light is generated.
  • Figs. 39a shows, in cross section, once more, a substrate 1 with a shadowing structure 4.
  • Fig. 39b it is shown how this structure can be melted away locally with the aid of a laser beam or infrared beam directed through a lens 37, which locally heats the shadowing structure 4 such that it melts, so that the shadowing structure 4 disappears.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Physical Vapour Deposition (AREA)
EP10186196A 2002-12-24 2003-12-24 Verfahren zur Herstellung einer organische elektrolumineszenten Anzeigevorrichtung, Substrat zur Anwendung dieses Verfahrens und durch dieses Verfahren hergestellte organische elektrolumineszente Anzeigevorrichtung Withdrawn EP2261983A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1022269A NL1022269C2 (nl) 2002-12-24 2002-12-24 Werkwijze voor het vervaardigen van een organic electroluminescent display device, substraat ten gebruike bij een dergelijke werkwijze, alsmede een organic electroluminescent display device verkregen met de werkwijze.
EP20030789653 EP1581970A1 (de) 2002-12-24 2003-12-24 Verfahren zur herstellung einer organische elektrolumineszenten anzeigevorrichtung, substrat zur anwendung dieses verfahrens und durch dieses verfahren hergestellte organische elektrolumineszente anzeigevorrichtung

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP03789653.7 Division 2003-12-24

Publications (2)

Publication Number Publication Date
EP2261983A2 true EP2261983A2 (de) 2010-12-15
EP2261983A3 EP2261983A3 (de) 2011-10-05

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ID=32844957

Family Applications (4)

Application Number Title Priority Date Filing Date
EP10186196A Withdrawn EP2261983A3 (de) 2002-12-24 2003-12-24 Verfahren zur Herstellung einer organische elektrolumineszenten Anzeigevorrichtung, Substrat zur Anwendung dieses Verfahrens und durch dieses Verfahren hergestellte organische elektrolumineszente Anzeigevorrichtung
EP20030789653 Withdrawn EP1581970A1 (de) 2002-12-24 2003-12-24 Verfahren zur herstellung einer organische elektrolumineszenten anzeigevorrichtung, substrat zur anwendung dieses verfahrens und durch dieses verfahren hergestellte organische elektrolumineszente anzeigevorrichtung
EP10186209A Withdrawn EP2261984A3 (de) 2002-12-24 2003-12-24 Verfahren zur Herstellung einer organische elektrolumineszenten Anzeigevorrichtung, Substrat zur Anwendung dieses Verfahrens und durch dieses Verfahren hergestellte organische elektrolumineszente Anzeigevorrichtung
EP10186243A Withdrawn EP2261985A3 (de) 2002-12-24 2003-12-24 Verfahren zur Herstellung einer organische elektrolumineszenten Anzeigevorrichtung, Substrat zur Anwendung dieses Verfahrens und durch dieses Verfahren hergestellte organische elektrolumineszente Anzeigevorrichtung

Family Applications After (3)

Application Number Title Priority Date Filing Date
EP20030789653 Withdrawn EP1581970A1 (de) 2002-12-24 2003-12-24 Verfahren zur herstellung einer organische elektrolumineszenten anzeigevorrichtung, substrat zur anwendung dieses verfahrens und durch dieses verfahren hergestellte organische elektrolumineszente anzeigevorrichtung
EP10186209A Withdrawn EP2261984A3 (de) 2002-12-24 2003-12-24 Verfahren zur Herstellung einer organische elektrolumineszenten Anzeigevorrichtung, Substrat zur Anwendung dieses Verfahrens und durch dieses Verfahren hergestellte organische elektrolumineszente Anzeigevorrichtung
EP10186243A Withdrawn EP2261985A3 (de) 2002-12-24 2003-12-24 Verfahren zur Herstellung einer organische elektrolumineszenten Anzeigevorrichtung, Substrat zur Anwendung dieses Verfahrens und durch dieses Verfahren hergestellte organische elektrolumineszente Anzeigevorrichtung

Country Status (9)

Country Link
US (2) US8591277B2 (de)
EP (4) EP2261983A3 (de)
JP (1) JP4757496B2 (de)
KR (1) KR101124059B1 (de)
CN (1) CN100563004C (de)
AU (1) AU2003294188A1 (de)
NL (1) NL1022269C2 (de)
TW (1) TWI381764B (de)
WO (1) WO2004070840A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8591277B2 (en) 2002-12-24 2013-11-26 Otb Group B.V. Method for manufacturing an organic electroluminescent display device, substrate to be used with such a method and an organic electroluminescent display device obtained with the method

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6866901B2 (en) 1999-10-25 2005-03-15 Vitex Systems, Inc. Method for edge sealing barrier films
US7198832B2 (en) 1999-10-25 2007-04-03 Vitex Systems, Inc. Method for edge sealing barrier films
US20100330748A1 (en) 1999-10-25 2010-12-30 Xi Chu Method of encapsulating an environmentally sensitive device
US8900366B2 (en) 2002-04-15 2014-12-02 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
US8808457B2 (en) 2002-04-15 2014-08-19 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
US7648925B2 (en) 2003-04-11 2010-01-19 Vitex Systems, Inc. Multilayer barrier stacks and methods of making multilayer barrier stacks
KR100607520B1 (ko) * 2004-11-11 2006-08-02 엘지전자 주식회사 유기 전계발광표시소자 및 그 제조방법
US7767498B2 (en) 2005-08-25 2010-08-03 Vitex Systems, Inc. Encapsulated devices and method of making
KR100745332B1 (ko) * 2005-09-28 2007-08-02 삼성에스디아이 주식회사 유기 발광표시장치 및 그 제조방법
KR101480839B1 (ko) * 2008-08-14 2015-01-12 엘지디스플레이 주식회사 유기전계발광 소자 및 그의 제조방법
US9184410B2 (en) 2008-12-22 2015-11-10 Samsung Display Co., Ltd. Encapsulated white OLEDs having enhanced optical output
US9337446B2 (en) 2008-12-22 2016-05-10 Samsung Display Co., Ltd. Encapsulated RGB OLEDs having enhanced optical output
KR101309865B1 (ko) * 2009-12-23 2013-09-16 엘지디스플레이 주식회사 평판 표시 소자의 제조 장치 및 방법
US8590338B2 (en) 2009-12-31 2013-11-26 Samsung Mobile Display Co., Ltd. Evaporator with internal restriction
CN110061149B (zh) * 2019-04-28 2020-11-10 福州大学 一种柔性oled器件薄膜封装方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659407A (en) 1983-07-04 1987-04-21 Thomson-Csf Process for manufacturing optical disks by pressing
WO1987002934A1 (en) 1985-11-18 1987-05-21 Eastman Kodak Company Stamping optical recording media
EP0408283A2 (de) 1989-07-12 1991-01-16 Canon Kabushiki Kaisha Gerät zur Herstellung einer Substratschicht für optische Aufzeichnungsmedien, Verfahren zur Herstellung einer Substratschicht für optische Aufzeichnungsmedien, das Gebrauch davon macht, Gerät zur Herstellung eines optischen Aufzeichnungsmediums und Verfahren zur Herstellung eines optischen Aufzeichnungsmediums, das Gebrauch davon macht.
WO1999012160A1 (en) 1997-09-01 1999-03-11 Odme International B.V. A method and a device for manufacturing an optically writeable medium and products made therefrom

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5772905A (en) 1995-11-15 1998-06-30 Regents Of The University Of Minnesota Nanoimprint lithography
JPH10223368A (ja) * 1997-01-31 1998-08-21 Hokuriku Electric Ind Co Ltd 有機ｅｌ素子とその製造方法
US6005344A (en) * 1998-02-18 1999-12-21 Eastman Kodak Company Organic electroluminescent image display panel with multiple barriers
CN100530758C (zh) * 1998-03-17 2009-08-19 精工爱普生株式会社 薄膜构图的衬底及其表面处理
JP2991183B2 (ja) * 1998-03-27 1999-12-20 日本電気株式会社 有機エレクトロルミネッセンス素子
US6084347A (en) * 1998-03-27 2000-07-04 Motorola, Inc. Multicolored organic electroluminescent display
CA2329412C (en) * 1998-04-21 2010-09-21 President And Fellows Of Harvard College Elastomeric mask and use in fabrication of devices, including pixelated electroluminescent displays
US6153543A (en) * 1999-08-09 2000-11-28 Lucent Technologies Inc. High density plasma passivation layer and method of application
JP3596416B2 (ja) * 2000-03-29 2004-12-02 セイコーエプソン株式会社 セラミックスの製造方法およびその製造装置
TW451599B (en) * 2000-10-02 2001-08-21 Chi Mei Optoelectronics Corp Organic electro luminescent display panel and manufacturing method thereof
TW474115B (en) * 2000-11-07 2002-01-21 Helix Technology Inc Manufacturing method of organic light emitting diode
TW535457B (en) * 2000-11-23 2003-06-01 Chi Mei Electronics Corp Manufacturing method of organic electroluminescent display
US20020177007A1 (en) 2001-05-25 2002-11-28 Boris Chernobrod Electroluminescent devices and method of manufacturing the same
US20020195928A1 (en) * 2001-06-25 2002-12-26 Grace Anthony J. Electroluminescent display device and method of making
US6597111B2 (en) * 2001-11-27 2003-07-22 Universal Display Corporation Protected organic optoelectronic devices
TW510148B (en) * 2001-12-31 2002-11-11 Lightronik Technology Inc Method to manufacture the anode auxiliary electrode and substrate circuit of organic electroluminescent display
JP4372555B2 (ja) * 2002-02-01 2009-11-25 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Ｏｌｅｄマトリクスのインクジェット印刷のための構造化されたポリマ基板
US6946677B2 (en) * 2002-06-14 2005-09-20 Nokia Corporation Pre-patterned substrate for organic thin film transistor structures and circuits and related method for making same
JP4136799B2 (ja) * 2002-07-24 2008-08-20 富士フイルム株式会社 Ｅｌ表示素子の形成方法
US6831407B2 (en) * 2002-10-15 2004-12-14 Eastman Kodak Company Oled device having improved light output
NL1022269C2 (nl) 2002-12-24 2004-06-25 Otb Group Bv Werkwijze voor het vervaardigen van een organic electroluminescent display device, substraat ten gebruike bij een dergelijke werkwijze, alsmede een organic electroluminescent display device verkregen met de werkwijze.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659407A (en) 1983-07-04 1987-04-21 Thomson-Csf Process for manufacturing optical disks by pressing
WO1987002934A1 (en) 1985-11-18 1987-05-21 Eastman Kodak Company Stamping optical recording media
EP0408283A2 (de) 1989-07-12 1991-01-16 Canon Kabushiki Kaisha Gerät zur Herstellung einer Substratschicht für optische Aufzeichnungsmedien, Verfahren zur Herstellung einer Substratschicht für optische Aufzeichnungsmedien, das Gebrauch davon macht, Gerät zur Herstellung eines optischen Aufzeichnungsmediums und Verfahren zur Herstellung eines optischen Aufzeichnungsmediums, das Gebrauch davon macht.
WO1999012160A1 (en) 1997-09-01 1999-03-11 Odme International B.V. A method and a device for manufacturing an optically writeable medium and products made therefrom

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8591277B2 (en) 2002-12-24 2013-11-26 Otb Group B.V. Method for manufacturing an organic electroluminescent display device, substrate to be used with such a method and an organic electroluminescent display device obtained with the method

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TWI381764B (zh) 2013-01-01
WO2004070840A1 (en) 2004-08-19
KR101124059B1 (ko) 2012-03-23
EP2261985A2 (de) 2010-12-15
US8591277B2 (en) 2013-11-26
JP2006512741A (ja) 2006-04-13
KR20050094827A (ko) 2005-09-28
CN100563004C (zh) 2009-11-25
US20140138656A1 (en) 2014-05-22
NL1022269C2 (nl) 2004-06-25
EP2261983A3 (de) 2011-10-05
JP4757496B2 (ja) 2011-08-24
US20060153970A1 (en) 2006-07-13
CN1732569A (zh) 2006-02-08
EP2261984A3 (de) 2011-10-05
AU2003294188A1 (en) 2004-08-30
EP2261985A3 (de) 2011-10-05
TW200423791A (en) 2004-11-01
EP1581970A1 (de) 2005-10-05

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