EP2207915A2 - Verfahren zur herstellung einer geordneten porösen struktur aus einem aluminiumsubstrat - Google Patents

Verfahren zur herstellung einer geordneten porösen struktur aus einem aluminiumsubstrat

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Publication number
EP2207915A2
EP2207915A2 EP08844577A EP08844577A EP2207915A2 EP 2207915 A2 EP2207915 A2 EP 2207915A2 EP 08844577 A EP08844577 A EP 08844577A EP 08844577 A EP08844577 A EP 08844577A EP 2207915 A2 EP2207915 A2 EP 2207915A2
Authority
EP
European Patent Office
Prior art keywords
porous structure
layer
thickness
carried out
anodization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP08844577A
Other languages
English (en)
French (fr)
Other versions
EP2207915B1 (de
Inventor
Laurent Arurault
François LE COZ
René BES
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite Toulouse III Paul Sabatier
Original Assignee
Centre National de la Recherche Scientifique CNRS
Universite Toulouse III Paul Sabatier
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Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Universite Toulouse III Paul Sabatier filed Critical Centre National de la Recherche Scientifique CNRS
Publication of EP2207915A2 publication Critical patent/EP2207915A2/de
Application granted granted Critical
Publication of EP2207915B1 publication Critical patent/EP2207915B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/18After-treatment, e.g. pore-sealing

Definitions

  • the invention relates to a method of manufacturing an ordered porous structure from an aluminum substrate.
  • a porous structure is said to be "ordered” when it has pores, in the form of rectilinear channels, of the same cross section (shape and dimensions), parallel and adjacent in a radial plane, and uniformly distributed in the radial plane.
  • the aluminum part and the anode structures resulting from the anodizing of said aluminum part are oriented according to their two opposite faces, a first face, referred to as the outer face, in contact with the electrolyte solution. and a second face, said substrate face, which is not in contact with the electrolytic solution.
  • the term "alumina” refers to the general term covering oxidized forms of aluminum, namely aluminum oxides, aluminum hydroxides and aluminum oxy-hydroxides.
  • porous structures For this purpose, it is known to produce, by anodizing aluminum metal substrates, ordered porous structures, based on the aluminum chemical element, the surface of which extends over several ⁇ m 2 .
  • porous structures also called porous anodic films
  • These porous structures can be used as support or as matrix for original applications such as nanofiltration or the realization of nanoscale functional elements such as nanoscreens, nanowires and nanotubes.
  • the improvement of the technical performances of these materials, whose ultrastructures are of meso- or nanometric dimension, follows directly from the technological advances allowing the realization of porous anodic films, of big dimension and controlled thickness.
  • this document describes a reference process for the manufacture of an aluminum-based porous structure, by means of several successive treatments that are all chemical or electrochemical.
  • This document presents the surface state of the substrate face of the porous structure, after removal of the residual substrate and the barrier layer. It does not describe the state of the porous structure within its thickness, especially at the outer face.
  • an ordered porous structure by anodizing an aluminum substrate having, on its outer surface, a plurality of concavities, of the same shape, and regularly distributed.
  • Such a print can be obtained by nanoindentation of the aluminum substrate, for example, by applying and pressing on the aluminum substrate, a hard matrix, in particular of silicon carbide having a plurality of convexities.
  • this nanoindentation step is technologically very difficult to implement because of the technical difficulties to achieve, on the meso- and nanometric scales, the silicon carbide matrix having a plurality of convexities. This step of producing a matrix is, consequently, an expensive step.
  • Double anodizing Another known method for obtaining a plurality of concavities, of the same shape, and regularly distributed on the surface of the aluminum or aluminum alloy substrate, is called “double anodizing".
  • a first anodizing step makes it possible to form a plurality of concavities at the interface of the initially smooth aluminum substrate and the porous structure resulting from this anodization.
  • the complete dissolution, by chemical means, of the porous structure resulting from the anodization then reveals the plurality of underlying concavities.
  • These concave impressions then serve as a guide for the growth, during a second anodization step, of an ordered porous structure.
  • This "double anodizing" process is slow to implement because of the duplication of the anodizing step.
  • This method also requires a step of chemical dissolution of the porous structure resulting from the first anodization, which is difficult to implement, and is therefore not or hardly compatible with industrial scale operation. .
  • this The process requires the implementation, during the dissolution step, of toxic chemicals, such as chromium derivatives, in particular chromium VI.
  • the porous structure thickness, produced at the end of the initial anodizing treatment of the aluminum substrate, then dissolved by chemical treatment is not valued.
  • EP 1715085 proposes a method in which the chemical dissolution treatment is replaced by an electrochemical treatment, leading to the separation of the residual aluminum substrate and the entirety of the structure resulting from the first anodization.
  • this process is slow to implement, relatively complex, expensive and not very compatible with industrial scale operation.
  • the invention aims to overcome all these drawbacks by proposing a method of manufacturing, by anodizing an aluminum or smooth aluminum alloy substrate, an ordered porous structure, which avoids the use of double anodization, and which does not require the achievement of a prior step of mechanical nanoindentation of the aluminum substrate or aluminum alloy.
  • the object of the invention is more particularly to provide a process for the production, by anodization, of an ordered porous structure which is simple, fast, inexpensive, environmentally friendly, and which is compatible with a exploitation on an industrial scale.
  • the object of the invention is more particularly to provide a method for obtaining an ordered porous structure of high quality, homogeneous throughout its thickness, and in which the shape, the pore diameter and the pore ordering are perfectly controlled.
  • the invention aims more particularly to provide a method for obtaining an ordered porous structure that can have a large thickness, especially greater than 50 microns.
  • the invention also aims at providing a method of manufacturing an ordered porous structure that does not require the use of toxic chemical compounds such as chromium derivatives, in particular chromium VI.
  • the invention therefore relates to a method of manufacturing a porous structure in which an outer surface layer comprising an ordered porous structure is produced by anodizing an aluminum substrate, characterized in that:
  • an anodizing treatment is carried out on a smooth aluminum substrate with a sufficient duration to make it possible to obtain at least one ordered porous structure thickness; then, by mechanical machining, part of the thickness of said thickness is removed; an anodizing layer, that portion of thickness extending from the outer surface of said anodized layer, retaining a non-zero thickness of an ordered porous structure and such that the ordered porous structure forms the free outer surface of the residual layer.
  • the porous structure obtained by simple anodization of a smooth aluminum substrate has, on its outer face side, a porous structure of imperfectly ordered thickness, that is to say which does not have pores in the form of straight channels, of the same cross section (shape and dimensions), parallel and adjacent in a radial plane, and uniformly distributed in the radial plane. But, if the anodization time is sufficiently long, the porous structure also has, underlying this imperfectly ordered porous structure, a porous structure, perfectly ordered, that is to say having pores in the form of rectilinear channels , of the same cross section (shape and dimensions), parallel and adjacent in a radial plane, and uniformly distributed in the radial plane.
  • the only fact of directly producing anodization on a smooth aluminum substrate that is to say, having an arithmetic roughness of less than 5 nm and therefore not having a plurality of concavities resulting from a prior anodization, -proceded by double anodizing-, or a mechanical nanoindentation step, allows, in fact, if the duration of anodization is long enough, to obtain an ordered porous structure thickness, below one imperfectly ordered porous layer extending to the surface.
  • the thickness corresponding to this imperfectly ordered layer is removed by mechanical machining so as to open the pores of the ordered porous structure on the surface.
  • anodizing treatment is carried out from an aluminum alloy substrate of the IXXX series, for example the aluminum alloy 1050A, or else aluminum refined, in particular chosen from the group consisting of 4N aluminum and 5N aluminum.
  • the outer surface layer comprising at least one porous structure thickness
  • the outer surface layer is obtained after an anodizing time which depends on the growth rate of said outer surface layer.
  • the growth rate of the outer surface layer depends on the operating conditions chosen for the realization of the physical properties of the porous structure.
  • the process according to the invention makes it possible to carry out quickly and simply in a single anodization and without requiring either a subsequent chemical treatment of selective dissolution or separation.
  • electrochemical a porous structure having a non-zero thickness of an ordered porous structure.
  • This ordered porous structure has an open porosity, at least on one of its faces, said outer face, and an ordered porous structure thickness on a micrometer scale.
  • an anodizing treatment comprising a plurality of successive anodizing steps, none of said steps of the anodization treatment being followed by a treatment by selective chemical dissolution or electrochemical separation of part of the thickness of the layer formed by anodization.
  • the various steps of the anodization treatment are carried out under anodizing conditions in which at least one of the anodizing parameters selected in the method is modified between two successive anodizing steps. group consisting of the anodizing voltage, the temperature of the anodization solution, the chemical composition of the anodizing solution, the density of the anodizing current.
  • a process according to the invention it is possible to use any known process for removing material by mechanical machining to effect the removal of a part of the thickness of said layer formed by anodization, this part of thickness being extending from the outer surface of said layer, retaining at least one non-zero thickness of an ordered porous structure and such that the ordered porous structure forms the free outer surface of the residual layer.
  • mechanical machining is understood to mean any suitable method for superficial removal of particles of material.
  • these particles of material removed by mechanical machining are particles in the solid state.
  • the particles of material removed by machining mechanical may be in the gaseous state.
  • a process according to the invention it is possible to use any known method for removing material by mechanical machining, excluding chemical etching treatments, in particular chemical treatments of the layer formed by anodizing with a solution, capable of penetrating by capillarity in the pores of said porous layer and change the shape and size of the pores of the porous structure.
  • Such mechanical machining can be carried out in a single step, or on the contrary by a plurality of successive steps. It is also possible to perform such mechanical machining with a single mechanical machining technique implemented during the various machining steps, or on the contrary by implementing a plurality of mechanical machining techniques during stages of machining. successive mechanical machining.
  • Such a mechanical machining according to the invention can be carried out in particular by ionic polishing using an ion flux, notably an IPS Precision Polishing System (PIPS), or by using the broad and energetic primary beam of a Secondary Ions Mass Spectrometry (SIMS).
  • an ion flux notably an IPS Precision Polishing System (PIPS)
  • SIMS Secondary Ions Mass Spectrometry
  • the outer surface layer anodized to at least one, for a period of several hours, in particular between 1 h and 20 h, in particular between 3 and 6 h is subjected to accelerated argon ion beam at a voltage of between 1 keV and 6 keV, in particular of the order of 5 keV under secondary vacuum of the order of 1.33 10 -3 Pa.
  • said thickness portion is removed by mechanical abrasion, that is to say by solid / solid dynamic friction, by means of a mobile abrasive solid tool, which is applied to the surface outer of the porous layer formed by anodizing, and exerting pressure on said movable abrasive solid tool.
  • this mechanical abrasion is performed so as to obtain an ordered porous structure whose outer surface is flat.
  • said thickness portion is removed by a mechanical machining treatment, in particular by mechanical abrasion, which only affects the outer surface of the porous layer formed by anodizing, and which does not affect, in the thickness of the porous structure, the pore diameter of the ordered porous structure and the shape of said pores revealed during the abrasive treatment.
  • This mechanical abrasion treatment is distinguished from a chemical dissolution treatment which necessarily affects not only the thickness of the porous layer formed by anodization, but also the shape and pore diameter of said layer.
  • the mechanical abrasion is carried out by means of a piece of fabric, in particular a piece of felt-, impregnated with a suspension, called an abrasive suspension, of a powder in an aqueous phase.
  • said powder comprising at least one mineral selected from the group of abrasive minerals, consisting of diamond and ceramics, in particular corundum.
  • a piece of fabric impregnated with an abrasive suspension makes it possible to obtain regular abrasion and great fineness.
  • it also allows the permanent wetting of the surface of the porous layer obtained by anodization and the maintenance of the temperature thereof, even during mechanical abrasion. It thus avoids the deterioration of the porous anodic structure during said abrasion.
  • the choice of the abrasive mineral also makes it possible to select the hardness of said mineral, so as to control the abrasion speed of the porous structure.
  • the hardness of the abrasive mineral contained in the abrasive suspension is greater than the hardness of the porous layer whose composition is based on alumina, in particular oxidized, hydroxylated and / or oxy-hydroxylated derivatives of the aluminum.
  • the mechanical abrasion is carried out in a single step, or on the contrary, by a plurality of successive stages of abrasion, each of said successive abrasion stages being carried out by means of an abrasive suspension.
  • the abrasive suspensions of each of the successive abrasion stages being chosen so as to have a decreasing particle size from one step to another.
  • the mechanical abrasion is carried out by a succession of abrasion steps ranging from a less fine and faster abrasion to a finer and slower abrasion.
  • the choice of the particle size of the mineral powder makes it possible to control both the abrasion speed of the porous structure and the quality of the finish of the surface of the porous structure.
  • the succession of abrasion steps carried out by means of abrasive suspensions of decreasing particle size makes it possible moreover to reduce the abrasion time while conferring on the surface of the porous structure a low roughness and an excellent finish.
  • each of the plurality of successive stages of abrasion is carried out by means of a piece of fabric impregnated with an abrasive suspension, said piece of fabric being applied to the surface of the abrasion.
  • a rigid support selected from the group consisting of a vibrating support and a rotatable support.
  • each of the plurality of successive abrasion steps is carried out by means of a piece of fabric impregnated with an abrasive suspension, said piece of fabric being applied to the surface of a rigid support chosen from the group consisting of a vibrating support and a rotatable support, the smallest dimension of the piece of fabric and the rigid support being greater than the largest dimension of the outer surface layer.
  • each abrasion step of the plurality of successive stages of abrasion is carried out by means of a rotary support having a rotation speed of less than 30 rad / s, in particular included between 2 rad / s and 20 rad / s.
  • the pressure applied to the surface of the porous layer during mechanical abrasion is in particular between 1 kPa and 50 kPa.
  • the mechanical abrasion is carried out by a first abrasion step by means of a piece of felt impregnated with a diamond suspension whose average particle size is between 0.8 ⁇ m and 1.5 ⁇ m. ⁇ m, in particular of the order of 1 ⁇ m, and by a second abrasion step by means of a piece of felt impregnated with a diamond suspension whose average particle size is between 0.2 ⁇ m and 0.4 ⁇ m. , in particular of the order of 0.25 microns.
  • the total duration of the mechanical abrasion is less than 30 min, in particular between 10 min and 20 min. This time makes it possible in practice to eliminate the entire thickness of the unordered porous layer formed on the outer surface during the anodization.
  • abrasion step is carried out by means of a piece of felt impregnated with a diamond suspension whose average particle size is close to 1 ⁇ m, and then the second stage by means of a piece of felt impregnated with a suspension diamond whose average particle size is close to 0.25 microns, and finally the third step by means of a piece of felt impregnated with a diamond suspension whose average particle size is close to 0.10 microns.
  • a thickness of the outer surface layer of between 15 ⁇ m and 25 ⁇ m, in particular of the order of 17 ⁇ m to 20 ⁇ m, is removed. This thickness is at least the thickness of the imperfectly ordered porous structure extending from the outer surface of the anodized layer.
  • an anodizing treatment is carried out on a smooth aluminum substrate, with a duration adapted to obtain an outer surface layer formed by anodizing having a total thickness of between 25 ⁇ m and 300 ⁇ m, especially between 100 ⁇ m and 200 ⁇ m.
  • a single anodization treatment is carried out on a smooth aluminum substrate, said treatment having a duration of between 1 h and 12 h, in particular of the order of 4 h.
  • a method according to the invention consists in producing a single anodizing treatment, comprising at least one anodizing step, then a step of removing the thickness portion of the outer surface layer whose porous structure is imperfectly ordered.
  • the anodizing step marking the end of the anodization treatment is immediately followed by mechanical machining treatment, including mechanical abrasion.
  • a single anodizing treatment is carried out on a smooth aluminum substrate for a period of time adapted so that the thickness of the ordered porous structure formed by anodization is between 1 ⁇ m and 150 ⁇ m, in particular between 50 ⁇ m and 150 ⁇ m.
  • anodization is carried out in an aqueous electrolyte solution chosen from the group consisting of aqueous solutions of acids, in particular sulfuric acid, a mixture of sulfuric acid and boric acid, oxalic acid, phosphoric acid, malonic acid, tartaric acid and citric acid.
  • anodizing in an aqueous electrolyte solution whose composition is adapted to provide an ordered porous structure whose pores have a diameter of between 10 nm and 500 nm, in particular between 100 nm and 200 nm.
  • anodization is carried out at a temperature of between -2 ° C. and + 20 ° C., in particular of the order of -1.5 ° C.
  • anodization is carried out under a voltage of between 19 V and 240 V, in particular between 125 V and 195 V with an aqueous solution comprising phosphoric acid as the electrolyte.
  • at least one anodization is carried out in a single step, or in a set of immediately successive anodizing steps, and then a mechanical abrasion treatment.
  • a porous structure is obtained comprising at least one ordered porous structure thickness.
  • a single anodizing treatment of the aluminum substrate is carried out.
  • the mechanically machining removal step of the unordered structure in particular by mechanical abrasion, it is possible to proceed to further subsequent treatments, but it is not necessary to perform, chemical or electrochemical dissolution, or new treatment by anodization.
  • the non-oxidized aluminum substrate and a portion of non-porous thickness of said layer are removed in order to retain only the ordered porous structure.
  • a chemical treatment of the ordered porous structure adapted to increase the pore diameter of said porous structure is then carried out.
  • Such a chemical treatment is particularly suitable for partially dissolving the pore wall, from the face of said partition which faces the pore and towards the internal part of the partition.
  • the inventor has observed that the chemical composition of the layer of material constituting said partition varies along the radial axis of the pores.
  • the chemical composition of the face of the layer of material constituting the partition, which is opposite the pore is a mixture based on oxidized aluminum, hydroxylated and / or oxyhydroxylated, and comprising up to 20% of compounds from the electrolytic solution used for anodization.
  • the inner part of said partition is composed essentially of oxides, hydroxides and / or aluminum oxyhydroxide.
  • the invention also relates to a method of manufacturing a porous structure characterized in combination by all or some of the characteristics mentioned above or below.
  • FIGS. 1a to 1b are illustrative cross-sectional diagrams on which the thickness and width scales are not realistic, illustrating successive steps of a method according to the invention.
  • FIG. 2 is a schematic flow diagram of a method according to the invention.
  • FIG. 3 presents a field scanning electron microscopy (MEB-FEG), a section along the axis of growth of an ordered porous structure according to the invention.
  • MEB-FEG field scanning electron microscopy
  • FIG. 4 presents a field scanning electron microscopy (MEB-FEG), an ordered porous structure according to the invention, without an aluminum substrate, but with the barrier layer, seen from the side of the barrier layer.
  • MEB-FEG field scanning electron microscopy
  • FIG. 5 shows a field scanning electron microscopy (MEB-FEG), the outer face of an outer surface layer according to the invention, after anodization and before mechanical abrasion.
  • FIG. 6 shows a field-effect scanning electron microscopy (MEB-FEG), of the outside face of an ordered porous structure according to the invention, after mechanical abrasion, said porous structure being inclined with respect to the direction of anodization.
  • MEB-FEG field scanning electron microscopy
  • FIG. 7 shows a field scanning electron microscopy (MEB-FEG), the outside face of an ordered porous structure according to the invention, said porous structure being inclined with respect to the direction of anodization and not comprising an aluminum substrate or a barrier layer, said porous structure being characteristic of nano structuring of the "honeycomb" type.
  • FIG. 8 shows a field scanning electron microscopy (MEB-FEG), the outside face of an ordered porous structure according to the invention, without an aluminum substrate and without a barrier layer, which is characteristic of a nano structuration type "wasp nest".
  • Figure la represents a piece 1 of aluminum or aluminum alloy serving as a substrate for the 24 treatment by anodization and to obtain an ordered porous structure 7 according to the invention.
  • This piece 1 of aluminum has at least one face, called the outer face 2, subjected to a set of physical or chemical treatments of the part 1 as indicated below.
  • the aluminum substrate used may be, for example, made of aluminum alloy of the IXXX series, for example alloy 1050A, or of refined aluminum type 4N (99.99% pure) or type 5N (99.999% pure).
  • Pretreatment 18 of the piece 1 is carried out in order to prepare it for its anodization 24.
  • This pretreatment 18 has the objective of promoting the obtaining of an ordered porous structure thickness. It allows on the one hand to increase the wettability of the piece 1 in aqueous solution, and on the other hand to reduce or eliminate pre-existing defects on the surface of the part 1.
  • the pretreatment 18 contributes to the establishment of a contact a regular between the piece 1 and the anodizing solution 24.
  • This pretreatment 18 of the part 1 comprises a succession of four treatments 19, 20, 21, 22.
  • the first treatment 19 is a degreasing of the part 1 by means of organic or aqueous chemical solvents. This first treatment can be carried out by dipping the part 1 in a hydroalcoholic solution which makes it possible to dissolve and then rinse off the dirt, grease, oils or lubricants originating from the previous methods of shaping said part 1, for example rolling. Piece 1 is then rinsed with distilled water.
  • the second treatment 20 is a mechanical polishing to reduce the roughness of the surface of the workpiece 1 and thus to obtain a smooth substrate.
  • the inventor has shown that it is, on the contrary, preferable to perform anodizing from an outer surface as smooth and even as possible. Indeed, structural defects of the substrate, which are known to be irregularly distributed on the outer face 2 of the substrate, are at the origin of the formation of irregular pores, and the growth of imperfectly ordered porous structures.
  • abrasive discs of finer and finer, rotating or vibrating nature are used, followed by pieces of fabric. particularly of felt, impregnated with abrasive suspensions.
  • a sheet impregnated with a suspension of diamond powder, the average diamond grain size of which is of the order of 1 ⁇ m makes it possible to obtain a finish suitable for carrying out the process according to the invention.
  • the piece 1 is rinsed with distilled water.
  • the third treatment 21 consists of a heat treatment of the part 1 to release the internal stresses and to increase the size of the aluminum grains.
  • this thermal treatment is preferably carried out under a non-oxidizing atmosphere, typically in a neutral or even reducing atmosphere, namely under an inert gas atmosphere, typically under a nitrogen atmosphere or under partial vacuum.
  • the part 1 is heated, in an oven, at a temperature between 35O 0 C and 600 0 C, preferably at 45O 0 C.
  • the heat treatment lasts between 0.1 h and 8 h, in particular between 0.5 h and 5 h h, preferably for 1 h at an effective temperature of 450 ° C. under a nitrogen atmosphere.
  • the fourth treatment is an electropolishing 22 of the piece 1. It aims to improve the surface condition of the outer face 2 of the part 1 which, as indicated above, must be as smooth as possible.
  • the part 1 is subjected, for a period of between 1 min and 1 h, to electrolysis under a voltage of between 25 V and 26 V in a cell containing a controlled bath at a temperature of between 20 ° C. and 30O 0 C.
  • Said bath may be an alkaline bath or an acid bath.
  • This is, for example, a Jacquet bath.
  • the Jacquet bath consists of the 33% by volume mixture of perchloric acid and 66% by volume of glacial acetic acid, the piece 1 constituting the anode of the electrolysis.
  • an electropolishing 22 according to the invention is obtained by treating, for 2 min, the part 1, by electrolysis under 25 V, in a Jacquet bath thermoregulated at 20 ° C.
  • the piece 1 is then rinsed with distilled water and subjected, immediately after rinsing, to the anodizing treatment 24.
  • a part 1 is obtained whose external face 2 has a low and regular arithmetic roughness, in particular of arithmetic roughness of less than 5 nm.
  • This piece 1 is used to prepare a porous structure 7 ordered by a treatment 23 comprising anodization 24 followed by an abrasion 25.
  • the piece 1 is subjected to a single anodization 24, in which the piece 1 constitutes the anode.
  • single anodization 24 is meant a treatment comprising either a single anodization step or successive anodizing steps, without intermediate chemical or electrochemical treatment step of the porous structure.
  • the anodizing conditions are preferably of the "hard anodizing" type as described, for example, in Lee W., J., R., Gosele, U. and Nielsch K., (2006), Nature Mat. ; 9, 741-747 "Fast manufacture of long-range controlled porous alumina membranes by hard anodization".
  • the oxidation rate of the aluminum is advantageously greater than the dissolution rate, by the electrolyte, of the alumina formed.
  • Anodization 24 leads to the formation of an anode structure comprising a layer 3 of outer surface, supported by a layer 4 of residual aluminum.
  • the anodization 24 may be carried out in an electrolyte chosen from sulfuric acid, the mixture of sulfuric acid and boric acid, oxalic acid, phosphoric acid, malonic acid, tartaric acid or citric acid.
  • the use as electrolyte of a mixture of sulfuric acid and boric acid provides a structural thickness of up to 300 microns. Such anodic structure thickness, however, does not have an ordered porous structure over its entire thickness.
  • an aqueous solution of phosphoric acid with a mass concentration of between 1% and 8%, preferably 8%, is employed in a cell whose temperature is regulated between -2 ° C. and +2 ° C. 0 C, preferably at -1.5 0 C.
  • the solution is homogenized, continuously, by stirring.
  • the voltage applied to the aluminum piece 1 is typically between 125 V and 195 V.
  • the anodizing treatment 24 is carried out for a sufficient time so that the outer surface layer 3 has a sufficient thickness and the outer surface layer 3 has, over a part of its thickness, an ordered porous structure thickness.
  • a layer 3 of outer surface 130 ⁇ m thick for an anodizing time of 4 hours there is obtained, for example, a layer 3 of outer surface 130 ⁇ m thick for an anodizing time of 4 hours.
  • the anodic structure is shown diagrammatically in FIG. 1b.
  • FIG. 1b is only schematic and illustrative, and the scales are not respected. It comprises a layer 4 of residual aluminum, unoxidized, supporting a layer 3 of outer surface.
  • the outer surface layer 3 consists of a barrier layer, non-porous, also called a compact layer, defining on its inner face 6 the interface between the residual aluminum layer 4 and the outer surface layer 3 and on its outer face, the non-emergent end of the pores 8.
  • the outer surface layer 3 comprises on its outer face an unordered porous layer 11 extending from the outer face of the outer surface layer 3 to the ordered / unordered interface 14 with the ordered porous structure 7.
  • the ordered porous structure 7 has a regular juxtaposition of pores 8 empty of material, in the form of linear tubular channels, of constant diameter, extending axially in a main direction, corresponding to the direction of anodization, orthogonal to the outer face 2 of the anodic structure, and partitions 9, separating the pores 8.
  • the partitions 9 have, in addition, a constant thickness over the entire thickness of the porous structure.
  • the average distance joining the centers of two adjacent pores varies from 50 nm to 600 nm and the mean diameter of said pores varies from 10 nm to 500 nm.
  • the unordered porous layer 11 is formed by an irregular juxtaposition of empty pores of material, shapes, orientations, and variable dimensions, separated by partitions, also of varying shapes, orientations and dimensions of thickness on the wall. set of the unordered porous layer 11.
  • unordered porous layer 1 1 superimposed on the ordered porous structure 7 partially masks and obstructs the outer surface of said ordered porous structure 7.
  • the unordered porous layer 11 is then removed from the anode structure so as to reveal at least one ordered porous structure thickness.
  • the unordered porous layer 11 is removed by removal of material, in particular by at least one mechanical abrasion treatment.
  • a solid tool 12 is applied to the outer face of the outer surface layer 3, such as a discoidal, rigid, plane rotary device, and on the surface of which a piece 13 of fabric is fixed. , in particular felt, previously impregnated with an abrasive suspension.
  • the abrasive suspension consists of an aqueous dispersion of particles, insoluble in water, characterized by their hardness as well as by their size.
  • the solid particles of the abrasive suspensions are selected from the group consisting of solid and abrasive materials, for example diamond and ceramics, especially corundum.
  • a first portion of the unordered porous layer 11 is removed by abrasion from the outer face of the outer surface layer 3 for a few minutes, for example 10 minutes, with an abrasive suspension formed of a suspension of diamond, the average diameter of said particles being close to 1 ⁇ m.
  • the surface of the porous layer is rinsed with distilled water.
  • a second portion of the unordered porous layer 11 is removed by fine abrasion from the outer face of the anode structure for a few minutes, for example 10 minutes, with an abrasive suspension formed of an aqueous suspension of diamond particles, the average diameter of said particles being close to 0.25 microns.
  • Part 15 resulting from the abrasion of the outer face of the outer surface layer 3 by removal of the unordered porous layer 11, is shown schematically in FIG.
  • This part 15 comprises an anodized layer 36, supported on a layer 4 of residual aluminum, said layer 36 having a through porosity, but non-emerging because of the presence of a barrier layer and the aluminum layer 4.
  • the outer surface has an even distribution of tabular pores of circular cross-section, organized in a hexagonal pattern, that is, in a "honeycomb" configuration.
  • the pores 8 have a circular cross section and have, for example, a diameter of the order of 250 nm.
  • this part 15 can be used without further modification, with the barrier layer and the residual aluminum layer 4. In other applications, this part is subjected to at least one of the subsequent treatments 26, 30 for adjusting the functional properties of the part 15.
  • the residual aluminum layer 4 is removed by electrochemical separation of the anodized layer 36 and the residual aluminum layer 4.
  • This separation 31 is carried out in a stirred solution of phosphoric acid at a mass concentration of between 5% and 20%, typically 16%, and at a temperature between 25 ° C. and 35 ° C., typically 30 ° C. under tension. alternative of 30 volts for 30 min.
  • this treatment 30 leads simultaneously to the removal of the barrier layer and to the opening of the pores 8, in particular on the inner face of the porous structure 33.
  • the piece 34 obtained has a through porosity and opening on both faces-outer surface 16 and inner surface 17-of the ordered porous structure 7, and is shown schematically in Figure 1c.
  • a treatment 32 by chemical dissolution, leading to the enlargement of the pores 8 of the ordered porous structure 7.
  • the piece 34 is immersed in a solution of phosphoric acid at a mass concentration of between 5% and 16%, typically 16%.
  • the duration of the treatment 32, and the mass concentration of phosphoric acid are chosen to increase the diameter of the pores 8, until reaching a value of diameter which is, for example, of the same order of magnitude as the distance separating the center. two pores adjacent in the ordered porous structure 7.
  • a succession of three treatments 27, 28, 29 is obtained from the part obtained at the end of the mechanical abrasion 25 by selective dissolution of the constituents of the part 15: a first treatment 27 for controlled opening of the pores 8, a second treatment 28 for the chemical / redox dissolution of the residual aluminum layer 4, then a third treatment 29 for the chemical dissolution of the barrier layer.
  • the first treatment 27 consists of a partial chemical dissolution of the partitions 9 and makes it possible to increase the diameter of the pores 8 to a value which depends on the reaction time and the mass concentration of the acid used.
  • This first treatment 27 perfectly controls not only the diameter but also the geometry of the transverse cross section of the pores 8, from a circular section to a hexagonal section.
  • This first treatment 27 also makes it possible to modify the diameter of the pores 8, without however affecting the barrier layer or the residual aluminum layer 4.
  • This first treatment 27 is carried out by immersing the part 15 in a solution of phosphoric acid at a mass concentration of between 5 and 16%, at a controlled temperature, in particular between 25 and 35 ° C. Typically, the concentration of the solution phosphoric acid is 16% and the temperature of 3O 0 C. the duration of the treatment varies according to the desired geometry on the surface 16 of the anodized layer 36.
  • a treatment time of 65 min results in an ordered porous structure 7 in which the pores 8 are hexagonally ordered and have a hexagonal cross section, a diameter of the order of 400 nm, in a "wasp nest" configuration.
  • Intermediate processing times lead to intermediate configurations between the "honeycomb” configuration and the "nest of wasps" configuration, in which the pore diameter varies between 250 nm and 400 nm.
  • the second treatment 28 by chemical dissolution or redox of the aluminum layer 4 makes it possible to specifically eliminate the layer 4 residual aluminum.
  • the part 15 is immersed in an oxidizing solution at room temperature.
  • This oxidizing solution may be a mixture of CuCl or else CUCI 2 at a concentration of 0.1 mol / l and hydrochloric acid at a mass concentration of 18%. This immersion simultaneously causes the oxidation of metallic aluminum and the reduction of copper cations.
  • Other redox couples, having a large difference in redox potential with the A1 3+ / A1 pair, can advantageously be used, in particular the Hg 2+ / Hg pair.
  • amalgam is made of a liquid metal at room temperature, in particular gallium or mercury, with the aluminum of the residual aluminum layer 4. Extraction of the amalgam thus makes it possible to eliminate the aluminum from the support.
  • This second treatment 28 leads to a piece 33 having a through porosity, without aluminum substrate, but not open due to the presence of the barrier layer.
  • the third treatment 29 consists of the chemical dissolution of the barrier layer by immersion of the piece 33 in a solution of phosphoric acid at a mass concentration of between 5% and 20%, for example of the order of 16%, the temperature of said solution being controlled between 25 0 C and 35 0 C, in particular to 3O 0 C.
  • the piece 34 whose hardness is low, in particular of the order of 150 Hv, is then heat treated in order to increase its hardness, in particular up to a value of 2000 Hv.
  • a piece 1 of refined aluminum of 4N quality, of disc shape, of 10 -2 m in diameter, and 10 -3 m thick, is subjected to mechanical polishing, by means of a polisher, and abrasive discs and a fabric impregnated with a suspension of diamond particles whose average size decreases to 1 ⁇ m.
  • the total duration of abrasion is approximately 20 minutes to 30 minutes.
  • the aluminum piece 1 is then rinsed with distilled water and placed in an oven, under a nitrogen atmosphere, at 45O 0 C for 2 h.
  • the piece 1 of aluminum is subjected to a treatment 22 by electropolishing in a Jacquet bath, whose volume composition is 33% perchloric acid and 66% glacial acetic acid, regulated at 20 ° C. for 2 minutes under a voltage of 25 V.
  • the piece 1 of aluminum is placed in an anodizing tank containing an aqueous bath of 8% phosphoric acid (mass), homogenized by rotary stirring at a speed of 37 rad / s and regulated at a temperature of -1.5 ° C.
  • the voltage is fixed at 180 V and the duration of the anodization is 4 h.
  • FIG. 5 The analysis, by field-effect electron microscopy, of the outer face 2 of the outer surface layer 3 obtained after anodizing 24 and before polishing 25 is shown in FIG. 5.
  • This photograph shows a plurality of pores, irregularly distributed on the entire surface, and of heterogeneous cross-section in size and shape. It is noted, moreover, that a minority of these pores has an open porosity.
  • Example 2 A piece 1 of aluminum is prepared as described in Example 1, and subjected to anodization at a voltage of 185 V for 4 h.
  • the outer surface of the anode structure is removed by abrasion 25 by means of a piece of felt impregnated with a suspension of diamond particles having an average diameter of 1 ⁇ m for 10 minutes. then by means of a piece of felt impregnated with a suspension of diamond particles whose average diameter is 0.25 microns, for another 10 min.
  • the aluminum part 1 supporting the porous structure is then treated with a solution of phosphoric acid at a mass concentration of 16%, regulated at a temperature of 30 ° C., homogenized by stirring. rotational at a speed of 37 rad / s, for 1 h.
  • the aluminum part 1 supporting the porous structure is treated with a solution of CuCl and HCl at a temperature of 20 ° C. until the residual aluminum thickness is completely dissolved.
  • the electron field-effect microscopy analysis of the longitudinal section of the ordered porous structure 7 obtained is shown in FIG. 3. A juxtaposition of sections of linear tubes, elongated in the direction of growth of the porous structure, is observed. whose average width is 360 nm.
  • a piece 1 of aluminum is prepared as described in Example 1, then anodized at a voltage of 185 V for 4 h and finally subjected to mechanical abrasion as described in Example 2.
  • the ordered porous structure is immersed in a solution of CuCl and HCl, regulated at a temperature of 20 ° C., until the residual aluminum thickness is completely dissolved. There is obtained a piece 33, without layer 4 of residual metallic aluminum, with through porosity and non-emerging with a barrier layer.
  • FIG. 4 The electron field effect microscopy analysis of the surface of the barrier layer of the part 33 is shown in FIG. 4. A juxtaposition of non-emerging hexagonal cross-section hexagonal hexagonal cross sections regularly observed is observed. hexagonal arrangement centered, and whose average diameter of the circle describing this hexagon is 460 nm.
  • FIG. 6 the analysis, by field-effect electron microscopy, of the polished outer face 2 of the part 33 is shown in FIG. 6.
  • a piece 1 of aluminum is prepared as described in Example 1, then is anodized at a voltage of 180 V for 4 hours and finally subjected to mechanical abrasion as described in Example 2.
  • the porous structure is treated, by electrochemistry, at a voltage of 30 V / 50 Hz, in a solution of phosphoric acid at a mass concentration of 16%, regulated at a temperature of 30 ° C., homogenized by stirring. rotating at a speed of 37 rad / s, for 45 min.
  • a piece 33, without layer 4 of residual aluminum, porosity through, open, without barrier layer, and the diameter of the pores 8 has been enlarged.
  • FIG. 7 A juxtaposition of regularly ordered circular-section pores with a mean diameter of 240 nm type "honeycomb".
  • Example 5 A piece 1 of aluminum is prepared as described in Example 1, then anodized at a voltage of 210 V for 15 h and finally subjected to mechanical abrasion as described in Example 2.
  • the structure is electrochemically treated, as described in Example 4, at 35 V / 50 Hz for 65 min. There is obtained a piece 33, without layer 4 of metallic aluminum, with porosity through, without barrier layer, and opening on both sides of the structure
  • FIG. 8 The analysis, by field-effect electron microscopy, of the outer surface of the ordered porous structure 7 thus obtained is shown in FIG. 8.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Porous Artificial Stone Or Porous Ceramic Products (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • ing And Chemical Polishing (AREA)
EP08844577A 2007-10-26 2008-10-23 Verfahren zur herstellung einer geordneten porösen struktur aus einem aluminiumsubstrat Not-in-force EP2207915B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0707540A FR2922899B1 (fr) 2007-10-26 2007-10-26 Procede de fabrication d'une structure poreuse ordonnee a partir d'un substrat d'aluminium
PCT/FR2008/051921 WO2009056744A2 (fr) 2007-10-26 2008-10-23 Procédé de fabrication d'une structure poreuse ordonnée à partir d'un substrat d'aluminium

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EP2207915A2 true EP2207915A2 (de) 2010-07-21
EP2207915B1 EP2207915B1 (de) 2011-08-31

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NL2003250C2 (en) * 2009-07-20 2011-01-24 Metal Membranes Com B V Method for producing a membrane and such membrane.
EP2433659A3 (de) * 2010-08-13 2014-09-03 Biotronik AG Implantat und Verfahren zur Herstellung desselben
TWI442014B (zh) * 2010-11-24 2014-06-21 Ind Tech Res Inst 散熱元件及散熱元件的處理方法
KR101701314B1 (ko) * 2015-07-02 2017-02-02 고려대학교 산학협력단 양극산화된 금속산화물 나노다공성 템플레이트 제작방법
KR102443973B1 (ko) * 2017-12-11 2022-09-16 (주)코미코 내부식성 및 절연특성이 우수한 양극산화된 알루미늄 또는 알루미늄 합금 부재의 제조방법 및 표면처리된 반도체 장치
JP6584604B1 (ja) * 2018-07-31 2019-10-02 株式会社Uacj アルミニウム部材及びその製造方法
US11230786B2 (en) * 2019-06-17 2022-01-25 Nanopec, Inc. Nano-porous anodic aluminum oxide membrane for healthcare and biotechnology
US20220355265A1 (en) * 2021-05-04 2022-11-10 Nanopec, Inc. Controlled pore ceramics chips for high throughput solid state oligonucleotide synthesis
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Also Published As

Publication number Publication date
FR2922899B1 (fr) 2010-11-26
JP2011500969A (ja) 2011-01-06
US20100258445A1 (en) 2010-10-14
ATE522640T1 (de) 2011-09-15
FR2922899A1 (fr) 2009-05-01
JP5199376B2 (ja) 2013-05-15
EP2207915B1 (de) 2011-08-31
ES2372790T3 (es) 2012-01-26
WO2009056744A3 (fr) 2009-07-30
WO2009056744A2 (fr) 2009-05-07

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