EP2035786A2 - Résistance à couche contenue dans le tuyau d'échappement - Google Patents

Résistance à couche contenue dans le tuyau d'échappement

Info

Publication number
EP2035786A2
EP2035786A2 EP07785869A EP07785869A EP2035786A2 EP 2035786 A2 EP2035786 A2 EP 2035786A2 EP 07785869 A EP07785869 A EP 07785869A EP 07785869 A EP07785869 A EP 07785869A EP 2035786 A2 EP2035786 A2 EP 2035786A2
Authority
EP
European Patent Office
Prior art keywords
temperature
measuring device
ceramic
resistors
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07785869A
Other languages
German (de)
English (en)
Inventor
Karlheinz Wienand
Karlheinz Ullrich
Matthias Muziol
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Nexensos GmbH
Original Assignee
Heraeus Sensor Technology GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Sensor Technology GmbH filed Critical Heraeus Sensor Technology GmbH
Publication of EP2035786A2 publication Critical patent/EP2035786A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/6983—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters adapted for burning-off deposits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making

Definitions

  • the invention relates to a flow sensor element with sheet resistors, in particular with a temperature sensor based on a platinum thin film resistor and a heating power sensor based on a platinum thin film resistor.
  • the temperature sensor and the heating power sensor are arranged on a carrier element.
  • electrical conductors and pads for electrical contacting of temperature sensors and heating power sensors on a ceramic substrate has proven itself.
  • the invention relates to the production and use of such a flow sensor element, in particular in an apparatus for exhaust gas recirculation.
  • Such flow sensor elements are known from EP 1 065 476 A1.
  • a thermal air flow sensor is disclosed in which a sensor element with a heating resistor and a resistance temperature measuring element sunk in a recess of a Keramiklaminat- body and fixed with ceramic cement. Due to the adhesive bond and the sunk arrangement of the sensor element with or in the ceramic laminate, the sensor element has a noticeable reaction inertia with temperature changes of the measured medium.
  • the electrical contacts are covered in the flow area with an epoxy resin, so that use of the device at temperatures above 300 0 C is not possible. In addition, the arrangement is complicated and therefore expensive.
  • DE 102 25 602.0 discloses a temperature sensor with a total thickness of 10 to 100 ⁇ m, which has a metallic film substrate with an electrically insulating coating on which a platinum thin-film resistor is arranged as a temperature-sensitive element.
  • the temperature sensor is used in the region of a heat sink for a semiconductor device.
  • DE 195 06 231 A1 discloses a hot-film anemometer with a temperature sensor and a heating power sensor.
  • the heating power sensor is arranged like a bridge in a recess of a plastic carrier plate.
  • the platinum temperature thin-film elements for the temperature sensor and the heating power sensor are arranged on a ceramic substrate, which is preferably formed of aluminum oxide.
  • DE 199 41 420 A1 discloses a sensor element for measuring temperature on a metallic substrate, which has an insulation layer as a membrane.
  • the membrane spans a recess in the metallic substrate.
  • the platinum thin film is arranged in the region of the recess on the membrane.
  • DE 101 24 964 A1 discloses a sensor for measuring flow velocities of gases or liquids with a carrier membrane, which is designed in the form of a lug.
  • the carrier membrane is preferably formed from a plastic and has an electrical conductor of platinum and electrical leads. The use of such a sensor with a support membrane made of plastic is not possible at temperatures above 300 0 C.
  • EP 1 431 718 discloses a fast response flow sensor element for measuring mass flows of hot gaseous or liquid media.
  • a temperature measuring element and a heating element each have a metallic carrier foil with an electrically insulating coating on which the platinum thin film resistors are arranged. If dirty, the measured value drifts.
  • DE 199 59 854 describes an exhaust gas recirculation, in which the incoming air is measured with a flow mass sensor according to the anemometric principle and for measuring the amount of exhaust gas, a second flow mass sensor is arranged in the exhaust duct after a water cooling.
  • an anemometric measuring device for flow sensors, are fixed in the sheet resistors in a lid or a hollow body in an opening or in openings of the lid or hollow body, wherein two resistors are different by one to three orders of magnitude.
  • the sheet resistors comprise at least one conductor track, in particular made of platinum, preferably a platinum thin-film conductor track on a substrate, in particular a ceramic plate, and in each case two connecting leads connected to the conductor track per conductor track.
  • the one to three orders of magnitude greater resistance is suitable as a temperature measuring resistor and is referred to below as such.
  • the smaller by one to three orders of magnitude compared to the temperature measuring resistors are suitable for heating.
  • these heating resistors a distinction is made in the context of the present invention between different functions:
  • Heating resistors for self-cleaning of the temperature sensor as part of the temperature sensor are provided.
  • Heating power sensors with two heating conductors allow the determination of the direction of mass flow.
  • Heat output sensors with an additional temperature measuring resistor allow a precise temperature setting of the heating power sensor.
  • the present invention exclusively relates to sheet resistors which are designed as a thick layer or thin layer, preferably in platinum, in particular as a platinum thin layer.
  • the sheet resistors are arranged on carrier material, in particular on a ceramic substrate. You can run the ceramic substrate as a carrier or on a support, such as a metal plate, arrange.
  • sheet resistors applied to a carrier material are also referred to as sheet resistors. net, so that there is no linguistic distinction between sheet resistors in the narrower sense than the pure resistance layer and sheet resistors including the carrier material.
  • the sheet resistors inserted in openings of a lid or hollow body comprise the carrier material on which the thinner thick film is arranged as a resistive layer.
  • the sheet resistors are arranged in the narrower sense on a ceramic substrate.
  • Various sheet resistors in the broader sense can be arranged side by side in an opening of a lid or hollow body or separately in each case an opening.
  • heating power sensors and temperature sensors are spaced apart.
  • Two heating conductors of a heating power sensor are preferably arranged one behind the other so that they lie one behind the other in the flow direction.
  • heating power sensors are implemented with two heat conductors on a common ground or with two successively arranged identical chips.
  • the openings of the lid or hollow body are expediently slots or holes.
  • the lid is intended for sealing a pipe. If the lid is made of metal, it can be welded to a metal tube.
  • the sheet resistors in a broader sense are passed through the opening or openings of the lid and fixed in the opening or in the openings on the lid.
  • the hollow body serves to receive the terminals of the sheet resistors whose sensitive Teii protrudes through the opening or the openings of the hollow body.
  • a relevant aspect of the present invention is that resistors produced in thick or thin film are integrated into a sensor element which can easily be installed in an exhaust gas channel in mass production.
  • the solution according to the invention of inserting film resistors into a lid or hollow body allows a simple sealing of the
  • the sheet resistances can be executed perpendicular to the base surface of a lid or hollow body. This results in production technical advantages over a parallel to a plate continued arrangement.
  • the invention is not limited to a vertical design, but allows any angle to the surface of the lid or hollow body.
  • the vertical component of angles according to the present invention is feasible. Accordingly, the advantage of the present invention occurs particularly at angles of 60 to 90 degrees, especially 80 to 90 degrees.
  • the hollow body is open on one side or formed as a tube; •
  • the lid is designed as a disc;
  • the base area of an opening for receiving at least two sheet resistances is at least one order of magnitude smaller than the cover base area or a corresponding hollow body base area;
  • the lid or the hollow body has two openings for receiving layer resistances
  • the lid is made of ceramic material
  • sheet resistors are mounted in the opening of a ceramic lid, in particular a ceramic disc with glass solder;
  • the sheet resistors carried on a ceramic substrate are fastened in at least one opening of a metal cover or hollow body, in particular a metal sheet with casting or glass welded to a metal pipe.
  • the measuring device according to the invention is suitable for flow sensors or soot sensors.
  • the flow sensor element is operated with the sheet resistors according to the anemometric principle.
  • a temperature sensor is equipped as part of an anemometric measuring device with a heat conductor.
  • a cleaning of the temperature sensor is made possible by annealing by means of heaters. It has proven useful in the anemometric measuring device to decouple the temperature sensor and the heating power sensor to be differentiated from the heater of the temperature sensor, preferably to space it, in particular to insert it in separate openings of the lid or hollow body.
  • the temperature sensor has a much higher resistance than the heaters, typically one to three orders of magnitude higher. Self-cleaning of the temperature sensor or its temperature measuring element by annealing is made possible by means of a heat conductor.
  • this heating conductor is integrated on the chip of the temperature measuring element.
  • at least two platinum thin-film resistors are arranged on a ceramic support plate. This allows heating of the temperature sensing element to heat or anneal contaminants.
  • the two resistors of the temperature measuring element are arranged on a ceramic substrate, preferably on a solid ceramic plate.
  • the resistors can also be arranged on a ceramic substrate on an alternative carrier.
  • a finished temperature measuring resistor is not intended for measuring the fluid temperature, since it is only suitable for its temperature control during operation of the heating power sensor.
  • the ceramic carrier platelets have a thickness in the range of 100 microns to 650 microns, in particular 150 microns to 400 microns.
  • Al 2 O 3 has proved to be suitable as the material for the ceramic carrier platelets, in particular with at least 96% by weight and preferably more than 99% by weight.
  • heating resistors preferably have 1 to 50 ohms and tend to lower values when reducing the size of the components. In the currently common dimensions of the components 5 to 20 ohms are preferred. Temperature measuring resistors preferably have 50 to 10,000 ohms and also tend to lower values when reducing the size of the components. With the current dimensions of the components, 100 to 2,000 ohms are preferred. On the Temperaturchip the temperature measuring resistor is many times greater than the heating resistor. In particular, these resistances differ by one to two orders of magnitude.
  • the passivation layer preferably has a thickness in the range from 10 ⁇ m to 30 ⁇ m, in particular from 15 ⁇ m to 20 ⁇ m.
  • a passivation layer comprising at least two different individual layers, in particular individual layers of Al 2 O 3 and glass ceramic, has proved particularly useful.
  • the thin-film technique is suitable for creating the preferred layer thickness of the Al 2 O 3 layer of 0.5 ⁇ m to 5 ⁇ m, in particular 1 ⁇ m to 3 ⁇ m.
  • the at least one heating element has rectangular ceramic carrier plates with two long and two narrow edges and that the ceramic carrier plates are arranged in openings of a lid or a hollow body.
  • the platinum-thin film resistors are preferably arranged on the end of the carrier platelets facing away from the lid or hollow body, in order to ensure the lowest possible thermal influence of the thin film resistors by the thermally inert lid or hollow body.
  • the platinum thin film resistor of the heating element is arranged further away from the cover or hollow body than the platinum thin film resistor of the temperature measuring element.
  • the PiatinPhynfiimwidermounted the heating element are not arranged in the same flow fiber of the measuring medium as the PiatinPhynfiimwiderrange the temperature measuring element.
  • the preferred arrangement of the temperature measuring element is in the flow direction in front of the heating element.
  • the carrier plates of the heating element and the temperature measuring element are spaced apart, in particular parallel to each other.
  • the flow sensor element according to the invention is particularly suitable for the measurement of gaseous media having a temperature in the range of -40 0 C to +800 0 C, as for example, has the exhaust gas of an internal combustion engine.
  • the self-cleaning by heating the temperature measuring element is particularly suitable for in the exhaust gas of internal combustion engines, especially diesel engines arranged sensors. Sooty sensors quickly become VOMABLE by heating, especially annealing. This self-cleaning can be repeated as often as desired during the life of a motor.
  • the arrangement of a plurality of temperature measuring elements and heating elements on the carrier element also makes it possible to detect the flow direction or flow direction changes of a medium in an ideal manner.
  • the measuring devices according to the invention can be realized devices for exhaust gas recirculation, in which the measuring device is arranged in the outlet region of a vehicle internal combustion engine.
  • the measuring device is arranged in the outlet region of a vehicle internal combustion engine.
  • a device for exhaust gas recirculation from an outlet region of a vehicle internal combustion engine in an air inlet region to which an adjustable mixture of exhaust gas and incoming air to the machine can be fed, and an amount of fuel is adjustable is provided, according to the invention in the outlet region a hot-film anemometer is arranged, in particular the exit region is connected via an exhaust gas recirculation line, which has a controllable valve, an exhaust gas cooling device and a hot film anemometer, to an inlet region of the internal combustion engine, wherein the hot film anemometer 1 comprises two ceramic chips which are mounted on a ceramic support and at this carrier the transition to Metallic material of the exhaust gas outlet region of the internal combustion engine takes place, so that the current paths of the chips gas-tight electrically through the ceramic material of the metallic material in the region of the exhaust gas outlet region of the Brenn motor are electrically isolated.
  • the hot-film anemometer 10 is disposed in an exhaust gas recirculation passage upstream of the cooling 8 or in an air-cooled radiator.
  • a hot-film anemometer 10 does not need to be arranged for either the fresh air or the cooled exhaust gas.
  • the multi-part ceramic component of the hot-film anemometer comprises a carrier element, a temperature measuring element and a heating element.
  • a device has proven useful in which two sheet resistors 128, 129 are held on a common ceramic substrate 107 in an opening.
  • FIGS 1 to 3b illustrate the flow sensor element according to the invention by way of example only. It is therefore expressly added here that the arrangement of the electrical see conductor tracks and pads as well as the number of Platin Conferencenfilme per temperature measuring element or heating element can also be chosen differently, without departing from the scope of the invention.
  • FIG. 1 shows a flow sensor element with a heating and temperature measuring element arranged in a metal disk
  • FIG. 2 shows a flow sensor element with a heating and temperature measuring element arranged in a ceramic disk
  • FIG. 3 a shows a section according to FIG. 1 or 2 relating to an arrangement of sheet resistors in a ceramic disk
  • Figure 3b shows the detail of FIG. 3a in plan view.
  • a sensor element with potting or glass 18 is made in a carrier disk 21 made of heat and exhaust resistant stainless steel.
  • a good clawing of the potting is achieved.
  • the area of the carrier disk 21, through which the sensor element exits toward the medium, has a rectangular contour which is only slightly larger than the sensor element cross section.
  • the flow sensor element is held in the direction of the media-carrying tube 5 and the interior of the complete sensor is sealed off against the medium.
  • the carrier disk 21 is inserted into a housing 24 and tightly welded to a circular seam 22.
  • the housing tube 24 the housing 11 is welded.
  • the housing 11 of the insulating body 10 made of temperature-resistant plastic or ceramic with a ring 9, which is fixed by a bead 17, supported.
  • a cable bushing made of an elastomer is tightly attached to the bead 16.
  • Feed lines 4 are guided through the bores of a grommet 14. Each supply line is electrically connected via a crimp 25 to a contact sleeve 3.
  • the contact sleeve 3 has a widening 26 under an insulating part 10 and a surface 27, which is wider than the contact sleeve diameter, above the insulating part 10, so that the contact sleeve is fixed in the insulating part 10 in the axial direction.
  • the connecting wires 2 are contacted with the weld 15 electrically.
  • FIG. 2 shows another embodiment with a ceramic carrier disk 7, in which the flow element 1 is fastened with glass solder 18 in the carrier disk 7.
  • the support plate 7 is crimped together with a high temperature resistant seal 8 made of mica or graphite in the metallic frame 6.
  • the version 6 is also tightly welded to the housing tube 24.
  • the heating element is designed as a heating power sensor and the temperature measuring element as a temperature sensor, which can additionally wear a heating conductor for annealing.
  • two heating power sensors 28 for direction detection of the media flow are arranged for this purpose.
  • the anemometric measuring principle works in such a way that the temperature measuring element accurately detects the temperature of the medium.
  • the one or both heating elements of the heating power sensor (s) 28 are then held at a constant excess temperature to the temperature sensor 29 by an electrical circuit.
  • the gas or liquid flow to be measured more or less cools the heating element (s) of the heating power sensor (s).
  • the electronics In order to maintain the constant over-temperature, the electronics must be able to supply current to the heating element (s) in the event of mass flow; this generates a voltage at an exact measuring resistor, which is correlated with the mass flow and can be evaluated.
  • the double arrangement of the heating power sensor 28 allows the direction detection of the mass flow. Notwithstanding FIG. 5, in one embodiment, as a soot sensor, two heating power sensors are inserted parallel into a tubular housing.
  • the two heating power sensors 28 are still each provided with a glass-ceramic lid.
  • a heating power sensor is operated above the pyrolytic incineration temperature; ie, at about 500 0 C.
  • the second heating power sensor is employed in a lower temperature range of 200 to 450 0 C, preferably operated by 300 to 400 ° C. With soot deposition on this second heating power sensor, this deposition layer acts as a thermal insulation and alteration of the IR radiation properties in the sense of an increasingly black body.
  • FIG. 6 shows a device for exhaust gas recirculation from an exit region 104 of a vehicle internal combustion engine 101 into an air inlet region 102, to which an adjustable mixture of exhaust gas and inflowing air can be supplied to the engine 101 and an amount of fuel is adjustable, in accordance with the invention in the exit region of the internal combustion engine 104
  • Hot-film anemometer 110 is arranged, which has two ceramic chips 28, 29 which are mounted on a ceramic support 30 and on this support 30, the transition to the metiai Materiai the exit region 104 of the internal combustion engine follows, so that the current paths of the chips gas-tight through the ceramic Material are electrically isolated from the metallic material in the region of the exhaust gas outlet region 104 of the internal combustion engine.
  • a material arrangement with different coefficients of expansion between the metallic exhaust pipe and the ceramic chip for permanently high temperatures is provided gas-tight, with which an improved measurement is made possible.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Volume Flow (AREA)

Abstract

L'invention concerne un dispositif de mesure, notamment un dispositif de mesure anémométrique d'un débitmètre, comportant des résistances à couche dans une ou plusieurs ouvertures d'un couvercle ou d'un corps creux. Les résistances à couche sont fixées dans la ou les ouvertures. Deux résistances à couches se différencient de l'ordre d'un à trois ordres de grandeur en ce qui concerne leur résistance. Dans le cas d'un dispositif de mesure anémométrique d'un débitmètre, un capteur de température et un capteur de puissance de chauffage sont enfichés dans un élément support. Le capteur de température présente une résistance de mesure de température et un conducteur thermique se présentant sous la forme de résistances à couche mince ou épaisse de platine sur base céramique. Pour l'autonettoyage d'un dispositif de mesure anémométrique d'un débitmètre comportant un élément de mesure de la température et un élément de chauffage enfichés dans un élément support, l'élément de mesure de la température présente une résistance à couche mince de platine sur base céramique pour la mesure de la température, et est chauffé avec une résistance à couche mince de platine additionnelle. Pour la fabrication d'un dispositif de mesure anémométrique d'un débitmètre composé de résistances à couche et d'un couvercle ou d'un corps creux, deux résistances à couches se différenciant de l'ordre d'un à deux ordres de grandeur sont enfichées et fixées dans des ouvertures du couvercle ou du corps creux.
EP07785869A 2006-06-30 2007-06-29 Résistance à couche contenue dans le tuyau d'échappement Withdrawn EP2035786A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006030786A DE102006030786A1 (de) 2006-06-30 2006-06-30 Strömungssensorelement und dessen Selbstreinigung
PCT/EP2007/005769 WO2008000494A2 (fr) 2006-06-30 2007-06-29 Résistance à couche contenue dans le tuyau d'échappement

Publications (1)

Publication Number Publication Date
EP2035786A2 true EP2035786A2 (fr) 2009-03-18

Family

ID=38693563

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07785869A Withdrawn EP2035786A2 (fr) 2006-06-30 2007-06-29 Résistance à couche contenue dans le tuyau d'échappement

Country Status (5)

Country Link
US (1) US20090282909A1 (fr)
EP (1) EP2035786A2 (fr)
JP (1) JP2009541757A (fr)
DE (1) DE102006030786A1 (fr)
WO (1) WO2008000494A2 (fr)

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DE102008037206B4 (de) 2008-08-11 2014-07-03 Heraeus Sensor Technology Gmbh 300°C-Flowsensor
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CN103229590A (zh) * 2010-10-12 2013-07-31 马克卡车公司 用于气液混合环境的受热传感器元件
DE102011009754A1 (de) 2011-01-28 2012-08-02 Heraeus Sensor Technology Gmbh Strömungssensoren mit Stromdurchführung im Deckel und Sensorspitze als Zwischenprodukt
DE102011005768A1 (de) 2011-03-18 2012-09-20 Robert Bosch Gmbh Vorrichtung zur Erfassung mindestens einer Eigenschaft eines fluiden Mediums
DE102011052305A1 (de) 2011-07-29 2013-01-31 Pierburg Gmbh Verbrennungsmotorabgas-Massenstromsensor mit einem Heißfilm-Anemometer
JP5609827B2 (ja) * 2011-09-07 2014-10-22 株式会社デンソー 空気流量測定装置
DE102011053419B4 (de) * 2011-09-09 2014-11-06 Pierburg Gmbh Verfahren zur Steuerung eines Abgassystems eines Dieselmotors sowie Abgassystem eines Dieselmotors
JP5477358B2 (ja) * 2011-10-31 2014-04-23 株式会社デンソー 空気流量測定装置
DE102011056534B4 (de) * 2011-12-16 2014-01-09 Pierburg Gmbh Verfahren zur Steuerung eines Abgassystems eines Dieselmotors
DE102012200121A1 (de) * 2012-01-05 2013-07-11 Robert Bosch Gmbh Vorrichtung zur Erfassung mindestens einer Strömungseigenschaft eines fluiden Mediums
CN107436365B (zh) * 2017-08-14 2024-01-30 中北大学 一种石墨烯风速风向传感器
DE102020121925A1 (de) 2020-08-21 2022-02-24 Vega Grieshaber Kg Messgerät mit Einrichtung zur Desinfektion und Anordnung eines solchen Messgerätes an einem Behälter

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JP2009541757A (ja) 2009-11-26
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US20090282909A1 (en) 2009-11-19
DE102006030786A1 (de) 2008-01-03

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