EP1982219A2 - Thermisch stabiler multilayer-spiegel für den euv-spektralbereich - Google Patents
Thermisch stabiler multilayer-spiegel für den euv-spektralbereichInfo
- Publication number
- EP1982219A2 EP1982219A2 EP07711155A EP07711155A EP1982219A2 EP 1982219 A2 EP1982219 A2 EP 1982219A2 EP 07711155 A EP07711155 A EP 07711155A EP 07711155 A EP07711155 A EP 07711155A EP 1982219 A2 EP1982219 A2 EP 1982219A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- multilayer mirror
- layer
- layers
- mirror according
- multilayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003595 spectral effect Effects 0.000 title description 7
- 239000000463 material Substances 0.000 claims abstract description 49
- 230000005855 radiation Effects 0.000 claims abstract description 33
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000010703 silicon Substances 0.000 claims abstract description 18
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052750 molybdenum Inorganic materials 0.000 claims description 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 7
- 239000011733 molybdenum Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 6
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 229910052703 rhodium Inorganic materials 0.000 claims description 2
- 239000010948 rhodium Substances 0.000 claims description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910052706 scandium Inorganic materials 0.000 claims description 2
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 229910021332 silicide Inorganic materials 0.000 claims 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
- 230000004888 barrier function Effects 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 5
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 4
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 4
- 229910052744 lithium Inorganic materials 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- 238000006731 degradation reaction Methods 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 229910016006 MoSi Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002241 glass-ceramic Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910002483 Cu Ka Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
- GALOTNBSUVEISR-UHFFFAOYSA-N molybdenum;silicon Chemical compound [Mo]#[Si] GALOTNBSUVEISR-UHFFFAOYSA-N 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0891—Ultraviolet [UV] mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/04—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
- G02B6/06—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres the relative position of the fibres being the same at both ends, e.g. for transporting images
- G02B6/08—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres the relative position of the fibres being the same at both ends, e.g. for transporting images with fibre bundle in form of plate
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
- G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
- G21K1/062—Devices having a multilayer structure
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/061—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/064—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements having a curved surface
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/067—Construction details
Definitions
- the invention relates to a thermally stable multilayer mirror for the extreme ultraviolet spectral range (EUV) and its use.
- EUV extreme ultraviolet spectral range
- Reflecting optical components for use in the extreme ultraviolet spectral range can be realized with multilayer mirrors containing a generally periodic layer sequence of a plurality of layer pairs.
- a pair of layers generally contains two layers of different materials, which should have the largest possible difference in their optical constants in the wavelength range intended for use of the component. At least one of these materials, the so-called spacer material, should have the lowest possible absorption at the intended wavelength.
- the choice of materials for the multilayer mirrors is therefore mainly dependent on the wavelength at which the optical component is to be used. In the EUV spectral range, therefore, there is an optimal material pairing for a specific wavelength range, usually only a few nanometers wide, which guarantees high reflection due to the optical contrast of the layer materials.
- multilayer mirrors made of the molybdenum material pair are preferred and silicon, since there is a particularly good optical contrast in the said wavelength range between these materials.
- Mo / Si (molybdenum-silicon) multilayer mirrors for example, a reflection of about 70% at a wavelength of 13.5 nm can be achieved.
- EUV radiation sources which emit at a wavelength of approximately 13.5 nm are provided as radiation sources. Since the reflection of the entire optical system in EUV lithography is relatively low due to the large number of mirrors, such EUV radiation sources must be operated at high powers in order to compensate for the reflection losses arising in the optical system. In the vicinity of such a high-power EUV radiation source, EUV multilayer mirrors may be exposed to high temperatures. This is the case in particular for an EUV multilayer mirror, which is positioned close to an EUV radiation source for beam shaping, for example as a so-called collector mirror.
- DE 100 11 547 C2 To increase the thermal stability of Mo / Si multilayer mirrors, it is known from DE 100 11 547 C2 to insert in each case a barrier layer of M02C at the interfaces between the molybdenum layers and the silicon layers. Furthermore, DE 100 11 548 C2 describes the use of barrier layers of MoSi 2 for increasing the thermal stability.
- the technological requirements in the production of the barrier layers are comparatively high, since the thickness of the barrier layers is generally less than 0.5 nm. In particular, the deposition of a layer sequence with such thin barrier layers on curved substrates is difficult.
- the invention has for its object to provide a multilayer mirror for the EUV spectral range, which is characterized by a high temperature stability, in particular a comparatively high long-term stability, preferably the production cost should be relatively low.
- a muItilayer mirror for EUV radiation comprises a substrate arranged on a layer sequence of a plurality of layer pairs of a first layer of a first material and a second layer of a second material applied thereto, wherein the first layers and the second Each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.
- At least one layer of the layer pairs is a silicon boride layer or a molybdenum nitride layer, interdiffusion at the interfaces between the first layers and the second layers of the layer pairs is reduced, in particular at high operating temperatures.
- the long-term temperature stability and the radiation stability of the multilayer mirrors are thereby advantageously improved over conventional multi-layer mirrors.
- the first material is a silicon boride and the second material is molybdenum.
- the so-called Spacer material called silicon replaced by a silicon boride.
- the first material is silicon and the second material is a molybdenum nitride.
- the so-called absorber material molybdenum is replaced by a molybdenum nitride.
- silicon boride and molybdenum nitride in the context of the application include all compounds having the composition Si x By or Mo x Ny, regardless of the specific stoichiometric or non-stoichiometric composition of the respective material.
- the production cost is a multilayer Mirror according to the invention, the layer pairs of only two layers, advantageously low.
- a further advantage with regard to the production outlay in comparison to multilayer mirrors with barrier layers results from the fact that both the first and the second layers of the multilayer mirror according to the invention each have a thickness of more than 2 nm.
- the multilayer mirror is provided for the reflection of radiation whose angle of incidence varies over the surface of the multilayer mirror.
- the first and / or the second layer of the layer pairs advantageously has a layer thickness gradient. served, ie the thickness of the first and / or second layers varies in the lateral direction.
- the production of such layer thickness gradients is associated with less effort than in the case of layer sequences with barrier layers in which at least the barrier layers have thicknesses in the sub-nanometer range.
- the substrate is, for example, a planar substrate. Furthermore, it is possible for the multilayer mirror to be applied to a curved surface of a substrate.
- the surface of the substrate may have an aspheric curvature, such as a parabolic or elliptical curvature.
- a parabolically curved surface is suitable for producing a substantially parallel beam from a near point radiation source, while an elliptically curved surface is suitable for focusing the beam from a radiation source , which is arranged in a first focal point of the ellipse, is suitable for a second focal point of the ellipse.
- Such a multilayer mirror is preferably used for reflection of EUV radiation having a wavelength between 12.5 m and 14 ⁇ m.
- the multilayer mirror may, for example, have a periodic arrangement of first and second layers, the period thickness, ie the sum of the thicknesses of the first layer and the second layer of the layer pairs, not varying within the multilayer mirror.
- the period thickness of the layer sequence ie the sum of the thicknesses of the first layer and the second Layer of the layer pairs, is advantageously about 6.5 nm to 7, 5 microns.
- the multilayer mirror may also contain an aperiodic layer sequence, within which the thicknesses of the first layers and / or of the second layers vary.
- an aperiodic multilayer mirror it is possible to achieve a high reflection of the multilayer mirrors in a comparatively broad wavelength or incident angle range, the maximum reflection at a given wavelength, however, being lower than in the case of a periodic multilayer mirror.
- a cover layer is preferably applied to the multilayer mirror, which differs in its material and / or its thickness from the layers of the layer pairs in order to protect the multilayer mirror in particular against oxidation and contamination.
- a cover layer may also be applied.
- Particularly suitable materials for the cover layer are oxides, nitrides, carbides or borides, as well as ruthenium, rhodium, scandium and zirconium.
- a multilayer mirror according to the invention for use at temperatures of more than 300 0 C, in particular in the temperature range of 300 0 C to 500 0 C.
- the range includes, as all other ranges in the context of this application, the limits indicated with a.
- a multilayer mirror according to the invention has the advantage, in particular, of high long-term stability at temperatures of more than 300 ° C., in particular in the temperature range from 300 ° C. to 500 ° C.
- a multilayer mirror according to the invention also has an operating time of 100 h in an ner temperature of about 500 0 C still no significant reduction of the reflection and / or the period thickness.
- the multilayer mirror to a high operating temperature, for example, to 300 0 C or more, preferably even to 400 0 C or more heated to reduce the deposition of impurities on the multilayer mirror.
- a heating device can be provided, which is preferably attached to a substrate of the multilayer mirror.
- the adhesion coefficient of lithium on a surface of the multilayer mirror is advantageously reduced in such a way that the reflection is not significantly impaired even after an operating time of 100 hours or more ,
- a multilayer mirror according to the invention can be used in particular in the vicinity of an EUV radiation source, for example a laser plasma source.
- FIG. 1 shows a schematic representation of a cross section through an exemplary embodiment of a multilayer mirror according to the invention
- FIG. 2 shows a graphical representation of the reflection R as a function of the wavelength ⁇ of three exemplary embodiments of a multilayer mirror according to the invention in comparison to Mo / Si, Mo / Si 3 N 4 and Mo 2 B multilayer mirrors.
- Figure 3 is a schematic diagram of an arrangement in which an embodiment of a multilayer mirror according to the invention is used as a collector mirror of an EUV radiation source.
- a layer sequence 7 which contains a multiplicity of layer pairs 5 is applied to a substrate 3.
- a preferred number of the layer pairs 5 is 30 to 100.
- the layer pairs 5 each consist of a first layer 1 of a first material and a second layer 2 of a second material. At least one of the materials is a silicon boride or a molybdenum nitride.
- the first material is a silicon boride, for example SiB 4 or SiB 6 .
- the first material is silicon and the second material is a molybdenum nitride, for example MoN.
- the substrate 3 is for example a semiconductor substrate, in particular of silicon or SiC, or a substrate of a glass or a glass ceramic, in particular a glass ceramic with a low coefficient of thermal expansion.
- the substrate 3 has a surface roughness of less than 0.2 nm. The surface roughness is understood to mean the surface roughness of the surface that can be determined, for example, from curve fits to X-ray reflection curves measured using Cu Ka radiation.
- the multilayer mirror preferably has at least one cover layer 6 applied to the layer sequence 7.
- the thermal stability of the multilayer mirror 1 can be further increased.
- FIG. 2 shows a graph of the calculated reflection R at normal incidence as a function of the wavelength ⁇ for a conventional Mo / Si multilayer mirror (curve 8), a M ⁇ 2B / Si multilayer mirror (curve 9) and a Mo / Si multilayer mirror (curve 9).
- Si3N4 multilayer mirror (curve 13) compared to three embodiments of a multilayer mirror according to the invention (curves 10, 11, 12). These exemplary embodiments are a MoN / Si multilayer mirror (curve 10), a Mo / Si-34 multilayer mirror (curve 11) and a Mo / Si-35 multilayer mirror (curve 12).
- the number of layer pairs is 100 in each case, and that a 2 nm thick cover layer of SiO 2 is applied to the layer sequence.
- the multilayer mirrors according to the invention have a lower reflection than the material pairing Mo / Si used in conventional multilayer mirrors because of the material selection made to achieve improved temperature stability. As the simulation calculations show, it can be In a multi-layer mirror comprising molybdenum and S1B4 or SiBg layer pairs, a reflection of more than 55% is achieved (curves 11 and 12). For the material pairing MoN / Si, a reflection of more than 65% (curve 10) was calculated at the wavelength of about 13.5 nm, which is frequently used for applications in EUV lithography.
- the simulated reflectivities for the layer systems according to the invention thus lie between the calculated values for the material pairing Mo / Si3N4 (curve 13) which has a reflection of more than 40%, and for the material pairings M ⁇ 2B / Si (curve 9) or Mo / Si (curve 8), for which a reflection of more than 70% was calculated.
- the reflection due to the unavoidable boundary surface roughness can be at least slightly lower than in the layer systems based on ideally smooth boundary surfaces on which FIG. 2 is based.
- FIG. 3 schematically shows an exemplary embodiment of a multilayer mirror 19 according to the invention, which has a layer sequence 7 applied to a curved, preferably aspherically curved substrate 14.
- the layer sequence 7 contains layer pairs of first layers and second layers (not shown), the first and / or the second layers preferably having a layer thickness gradient in the lateral direction.
- the layer thickness of the first and / or the second layers of the layer sequence 7 increases from the center of the multilayer mirror towards the edge regions in order to meet the Bragg reflection condition for the EUV radiation 16 impinging on the multilayer mirror 19 at different angles of incidence EUV radiation source 15 to meet.
- the multilayer mirror 19 acts as a collector mirror of EUV radiation source 15.
- the EUV radiation 16 emitted by the EUV radiation source 15 is focused by the collector mirror into a focal point F, for example.
- the EUV radiation source 15 is, for example, a laser plasma radiation source in which a target material, for example lithium droplets, are excited by laser radiation to emit EUV radiation. In the case of such EUV radiation sources, there is often the problem that optical elements arranged in the vicinity of the radiation source are contaminated by the target material.
- a heating device 17 is provided on the substrate 14 to solve this problem, with which the multilayer mirror is heated to a temperature at which the target material of the EUV radiation source 15 has only a low adhesion coefficient us thus of the Surface 18 of the multilayer mirror 19 desorbed.
- the multilayer mirror 19 is heated by the heating device 17 to an operating temperature of about 400 0 C or more.
- a temperature of about 400 0 C is particularly advantageous in the case of a lithium target.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006006283.3A DE102006006283B4 (de) | 2006-02-10 | 2006-02-10 | Thermisch stabiler Multilayer-Spiegel für den EUV-Spektralbereich |
PCT/DE2007/000126 WO2007090364A2 (de) | 2006-02-10 | 2007-01-24 | Thermisch stabiler multilayer-spiegel für den euv-spektralbereich |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1982219A2 true EP1982219A2 (de) | 2008-10-22 |
Family
ID=37998459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP07711155A Withdrawn EP1982219A2 (de) | 2006-02-10 | 2007-01-24 | Thermisch stabiler multilayer-spiegel für den euv-spektralbereich |
Country Status (7)
Country | Link |
---|---|
US (1) | US7986455B2 (de) |
EP (1) | EP1982219A2 (de) |
JP (1) | JP5054707B2 (de) |
KR (1) | KR101350325B1 (de) |
CA (1) | CA2640511C (de) |
DE (1) | DE102006006283B4 (de) |
WO (1) | WO2007090364A2 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008002403A1 (de) | 2008-06-12 | 2009-12-17 | Carl Zeiss Smt Ag | Verfahren zum Herstellen einer Mehrlagen-Beschichtung, optisches Element und optische Anordnung |
DE102008040265A1 (de) | 2008-07-09 | 2010-01-14 | Carl Zeiss Smt Ag | Reflektives optisches Element und Verfahren zu seiner Herstellung |
DE102009017096A1 (de) * | 2009-04-15 | 2010-10-21 | Carl Zeiss Smt Ag | Spiegel für den EUV-Wellenlängenbereich, Projektionsobjektiv für die Mikrolithographie mit einem solchen Spiegel und Projektionsbelichtungsanlage für die Mikrolithographie mit einem solchen Projektionsobjektiv |
JP2011222958A (ja) * | 2010-03-25 | 2011-11-04 | Komatsu Ltd | ミラーおよび極端紫外光生成装置 |
US9448492B2 (en) | 2011-06-15 | 2016-09-20 | Asml Netherlands B.V. | Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus |
DE102013207751A1 (de) | 2013-04-29 | 2014-10-30 | Carl Zeiss Smt Gmbh | Optisches Element mit einer Mehrlagen-Beschichtung und optische Anordnung damit |
DE102013107192A1 (de) * | 2013-07-08 | 2015-01-08 | Carl Zeiss Laser Optics Gmbh | Reflektives optisches Element für streifenden Einfall im EUV-Wellenlängenbereich |
FR3059434B1 (fr) * | 2016-11-29 | 2019-05-17 | Centre National De La Recherche Scientifique - Cnrs | Composant de selection spectrale pour radiations xuv |
US20210373212A1 (en) * | 2020-05-26 | 2021-12-02 | Lawrence Livermore National Security, Llc | High reflectance and high thermal stability in reactively sputtered multilayers |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2004007796A1 (en) * | 2002-07-12 | 2004-01-22 | President And Fellows Of Harvard College | Vapor deposition of tungsten nitride |
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US5190807A (en) * | 1990-10-18 | 1993-03-02 | Diamonex, Incorporated | Abrasion wear resistant polymeric substrate product |
US5480706A (en) * | 1991-09-05 | 1996-01-02 | Alliedsignal Inc. | Fire resistant ballistic resistant composite armor |
JP3357876B2 (ja) * | 1996-04-30 | 2002-12-16 | 株式会社デンソー | X線反射装置 |
JPH09326347A (ja) * | 1996-06-05 | 1997-12-16 | Hitachi Ltd | 微細パターン転写方法およびその装置 |
US5911858A (en) * | 1997-02-18 | 1999-06-15 | Sandia Corporation | Method for high-precision multi-layered thin film deposition for deep and extreme ultraviolet mirrors |
JPH1138192A (ja) * | 1997-07-17 | 1999-02-12 | Nikon Corp | 多層膜反射鏡 |
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2006
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2007
- 2007-01-24 EP EP07711155A patent/EP1982219A2/de not_active Withdrawn
- 2007-01-24 KR KR1020087019398A patent/KR101350325B1/ko not_active IP Right Cessation
- 2007-01-24 JP JP2008553606A patent/JP5054707B2/ja not_active Expired - Fee Related
- 2007-01-24 WO PCT/DE2007/000126 patent/WO2007090364A2/de active Application Filing
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KR101350325B1 (ko) | 2014-01-10 |
US7986455B2 (en) | 2011-07-26 |
KR20080096660A (ko) | 2008-10-31 |
WO2007090364A2 (de) | 2007-08-16 |
DE102006006283B4 (de) | 2015-05-21 |
DE102006006283A1 (de) | 2007-08-23 |
JP5054707B2 (ja) | 2012-10-24 |
CA2640511A1 (en) | 2007-08-16 |
CA2640511C (en) | 2014-09-23 |
US20090009858A1 (en) | 2009-01-08 |
JP2009526387A (ja) | 2009-07-16 |
WO2007090364A3 (de) | 2007-09-20 |
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