EP1934387A1 - Verfahren zur entschichtung eines gasturbinenbauteils - Google Patents
Verfahren zur entschichtung eines gasturbinenbauteilsInfo
- Publication number
- EP1934387A1 EP1934387A1 EP06805384A EP06805384A EP1934387A1 EP 1934387 A1 EP1934387 A1 EP 1934387A1 EP 06805384 A EP06805384 A EP 06805384A EP 06805384 A EP06805384 A EP 06805384A EP 1934387 A1 EP1934387 A1 EP 1934387A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- bath
- layer
- gas turbine
- turbine component
- relatively hard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims abstract description 27
- 239000011248 coating agent Substances 0.000 title claims abstract description 22
- 239000000919 ceramic Substances 0.000 claims abstract description 23
- 239000000126 substance Substances 0.000 claims abstract description 5
- 239000007789 gas Substances 0.000 claims description 40
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 13
- 159000000000 sodium salts Chemical class 0.000 claims description 12
- -1 nitrogen-containing organic compound Chemical class 0.000 claims description 9
- 150000007524 organic acids Chemical class 0.000 claims description 9
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims description 7
- 150000003018 phosphorus compounds Chemical class 0.000 claims description 7
- XAEFZNCEHLXOMS-UHFFFAOYSA-M potassium benzoate Chemical compound [K+].[O-]C(=O)C1=CC=CC=C1 XAEFZNCEHLXOMS-UHFFFAOYSA-M 0.000 claims description 7
- 150000003377 silicon compounds Chemical class 0.000 claims description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- 239000002585 base Substances 0.000 claims description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims description 5
- 239000011574 phosphorus Substances 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910001854 alkali hydroxide Inorganic materials 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 235000005985 organic acids Nutrition 0.000 claims description 4
- 239000000243 solution Substances 0.000 claims description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 229910017604 nitric acid Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 45
- 239000000463 material Substances 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910001860 alkaline earth metal hydroxide Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009990 desizing Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- UEUXEKPTXMALOB-UHFFFAOYSA-J tetrasodium;2-[2-[bis(carboxylatomethyl)amino]ethyl-(carboxylatomethyl)amino]acetate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]C(=O)CN(CC([O-])=O)CCN(CC([O-])=O)CC([O-])=O UEUXEKPTXMALOB-UHFFFAOYSA-J 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/005—Repairing methods or devices
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/44—Compositions for etching metallic material from a metallic material substrate of different composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/10—Other heavy metals
- C23G1/106—Other heavy metals refractory metals
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
- F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
- F01D5/12—Blades
- F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
- F01D5/288—Protective coatings for blades
Definitions
- the invention relates to a method for stripping a gas turbine component according to the preamble of claim 1.
- Components of a gas turbine such as the rotor blades, are provided with special anti-wear coatings to provide oxidation resistance, corrosion resistance, or erosion resistance on the surfaces.
- the components of gas turbines are subject to wear during operation of the same or can be damaged in any other way.
- it is generally necessary to remove or remove the wear-resistant coating from the part to be repaired in regions, partially or in total.
- the removal or removal of coatings is also referred to as stripping.
- stripping In the stripping process, a distinction is made between those in which stripping takes place by mechanical means, by chemical means or by electrochemical means.
- wear protection coatings are designed as so-called multi-layer coatings consisting of several alternately applied to the gas turbine component layers. So it is e.g. it is possible that a wear protection coating designed as a multilayer coating comprises a relatively soft, metallic layer and a relatively hard, ceramic layer, which are applied to the gas turbine component repeatedly alternately in succession. Furthermore, wear protection coatings are known in practice, in which more than two different layers are alternately applied successively to the gas turbine component, e.g.
- Multilayer coatings of four mutually alternately applied to the gas turbine component layers namely a first, adapted to the material composition of the gas turbine component metallic and thus relatively soft layer, also a relatively soft, metallic layer of a metal alloy material, a third, relatively hard graded metal Ceramic layer and a fourth relatively hard, ceramic layer.
- the gas turbine component is alternately positioned in two different chemical baths, a first bath excluding removal of the or each relatively hard ceramic layer and a second bath excluding removal of the or each relatively soft metallic layer the wear protection coating is used.
- the component with a multilayer wear protection coating alternately in different baths, wherein the different baths selectively ablate either a relatively hard, ceramic layer or a relatively soft, metallic layer of the wear protection coating to be removed.
- a method is proposed for the first time, with the aid of which gas turbine components can be effectively freed from a so-called multilayer wear protection coating without the risk of damage to the gas turbine component.
- the first bath which exclusively serves to remove the or each relatively hard, ceramic layer, is an acid comprising a hydrogen peroxide solution and at least one sodium salt and / or potassium salt of an organic acid contained therein.
- the first bath may comprise a nitrogen-containing organic compound.
- the hydrogen peroxide solution may also be replaced by a mixture of hydrofluoric acid and nitric acid.
- the first bath has a pH between 3 and 5.
- the second bath which serves only to remove the or each relatively soft, metallic layer, is a base of an aqueous solution of at least one alkali hydroxide or alkaline earth metal hydroxide with silicon or silicon compounds contained therein and / or phosphorus or phosphorus compounds, wherein the second bath a pH of at least 12 has.
- the first bath is a 5% to 50% hydrogen peroxide solution with 10 g / L to 100 g / L sodium salts of organic acids. alternatives tiv or in addition to the sodium salts, the first bath may have from 1 g / l to 10 g / l of a nitrogen-containing organic compound.
- the second bath is preferably a 2% to 50% strength alkali metal hydroxide solution with 1 g / l to 200 g / l of silicon or silicon compounds and / or 10 g / l to 100 g / l of phosphorus or phosphorus compounds.
- the gas turbine component is positioned to remove a relatively hard, ceramic layer in the first bath at a temperature between 10 0 C and 7O 0 C for a period of 1-60 minutes per 1 nm thickness of the layer to be removed ,
- the gas turbine component in the second bath at a temperature between 20 0 C and 150 0 C for a period of 10-120 minutes per 1 nm in thickness is positioned to be removed position.
- the inventive method is used for stripping of coated with multilayer wear protection coatings gas turbine components, the multilayer wear protection coatings from at least two different, alternately successively arranged layers, namely alternately arranged one behind the other ceramic, relatively hard layers and metallic, relatively soft layers are formed.
- the method is used for stripping gas turbine components, to which a wear protection coating of four different, alternately successive layers are applied.
- the first layer is preferably formed of titanium or palladium or platinum.
- a second layer is applied, which is preferably formed by a TiCrAl material.
- the third layer is followed by a grading layer, which is formed from a TiAlNl-x material.
- the third layer is followed by a fourth layer of titanium aluminum nitride (TiAlN).
- TiAlN titanium aluminum nitride
- the first bath which serves exclusively to remove the or each relatively hard ceramic layer, is an acid of a hydrogen peroxide solution and at least one sodium salt and / or potassium salt of an organic acid contained therein.
- the first bath may comprise a nitrogen-containing organic compound.
- the hydrogen peroxide solution may also be replaced by a mixture of hydrofluoric acid and nitric acid.
- the first bath is formed from a 5% to 50% hydrogen peroxide solution with 10 g / l to 100 g / l sodium salts of organic acids.
- the pH of this first bath is between 3 and 5.
- the second bath which serves exclusively to remove the or each relatively soft, metallic layer, is a base of an aqueous solution of at least one alkali hydroxide or an alkaline earth metal hydroxide with silicon and / or phosphorus contained therein or with silicon compounds contained therein and / or phosphorus compounds.
- the second bath is a base of a 2% to 50% alkali hydroxide solution with 1 g / l to 200 g / l of silicon compounds and 10 g / l to 100 g / l of phosphorus compounds.
- the pH of this second bath is at least 12.
- the first bath is an acid consisting of a 10% hydrogen peroxide solution with 70 g / l ethylenediaminetetraacetate sodium salt and 20 g / l phenol-4-sulfonic acid sodium salt and a second bath in the second bath % alkali metal hydroxide solution with 100 g / l silicon compounds and 50 g / l phosphorus compounds.
- the gas turbine component is alternately positioned in the first bath and the second bath, the first bath being selectively removed only from the removal bath.
- the first bath is selectively removed only from the removal bath.
- the first bath has a temperature between 1O 0 C and 7O 0 C.
- the temperature of this bath is preferably of the order of magnitude of room temperature, that is to say approximately 20 ° C.
- the gas turbine component is arranged in this bath for a period of 1 to 60 minutes per 1 nm thickness of the ceramic, relatively hard layer to be removed.
- the gas turbine component For stripping a metallic, relatively soft layer of wear protection coating, the gas turbine component is positioned in the second bath, wherein the temperature of the second bath between 20 ° C and 150 0 C, preferably the temperature of the second bath at 80 0 C. Das Bauteil is positioned in the second bath for a period between 10 minutes and 120 minutes per 1 nm thickness of the metallic, relatively soft layer to be removed. Between the positioning of a gas turbine component to be stripped between the two baths, the gas turbine component can be flushed.
- so-called multilayer wear protection coatings of gas turbine components can be effectively removed without the risk of damage to the gas turbine component.
- wear-resistant coatings can be completely or even partially removed from a gas turbine component, whereby for partially removing the wear-resistant coatings, a gas turbine component is either only partially immersed in the baths or areas of the gas turbine component that are not to be stripped before immersion in the gas turbine component corresponding bath with a protective layer of z. B. wax are provided.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- ing And Chemical Polishing (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Turbine Rotor Nozzle Sealing (AREA)
- Detergent Compositions (AREA)
Abstract
Description
Claims
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PL06805384T PL1934387T3 (pl) | 2005-10-14 | 2006-10-10 | Sposób odwarstwiania elementu turbiny gazowej |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005049249.5A DE102005049249B4 (de) | 2005-10-14 | 2005-10-14 | Verfahren zur Entschichtung eines Gasturbinenbauteils |
| PCT/DE2006/001766 WO2007041998A1 (de) | 2005-10-14 | 2006-10-10 | Verfahren zur entschichtung eines gasturbinenbauteils |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP1934387A1 true EP1934387A1 (de) | 2008-06-25 |
| EP1934387B1 EP1934387B1 (de) | 2015-06-17 |
Family
ID=37605754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP06805384.2A Not-in-force EP1934387B1 (de) | 2005-10-14 | 2006-10-10 | Verfahren zur entschichtung eines gasturbinenbauteils |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9212555B2 (de) |
| EP (1) | EP1934387B1 (de) |
| JP (1) | JP2009511804A (de) |
| DE (1) | DE102005049249B4 (de) |
| PL (1) | PL1934387T3 (de) |
| WO (1) | WO2007041998A1 (de) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8377324B2 (en) * | 2005-06-10 | 2013-02-19 | Acromet Technologies Inc. | Methods for removing coatings from a metal component |
| US8262870B2 (en) * | 2005-06-10 | 2012-09-11 | Aeromet Technologies, Inc. | Apparatus, methods, and compositions for removing coatings from a metal component |
| DE102007022832A1 (de) * | 2007-05-15 | 2008-11-20 | Mtu Aero Engines Gmbh | Verfahren zur Entschichtung eines Bauteils |
| DE102010034336B4 (de) | 2010-08-14 | 2013-05-29 | Mtu Aero Engines Gmbh | Verfahren und Vorrichtung zum Entfernen einer Schicht von einer Oberfläche eines Körpers |
| US10316414B2 (en) * | 2016-06-08 | 2019-06-11 | United Technologies Corporation | Removing material with nitric acid and hydrogen peroxide solution |
| US10377968B2 (en) | 2017-06-12 | 2019-08-13 | General Electric Company | Cleaning compositions and methods for removing oxides from superalloy substrates |
| US10501839B2 (en) | 2018-04-11 | 2019-12-10 | General Electric Company | Methods of removing a ceramic coating from a substrate |
| US11926880B2 (en) | 2021-04-21 | 2024-03-12 | General Electric Company | Fabrication method for a component having magnetic and non-magnetic dual phases |
| US11661646B2 (en) | 2021-04-21 | 2023-05-30 | General Electric Comapny | Dual phase magnetic material component and method of its formation |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3438901A (en) * | 1965-10-22 | 1969-04-15 | Neiko I Vassileff | Metal treating bath and chelating agent for metal reactive acid baths |
| US3833414A (en) * | 1972-09-05 | 1974-09-03 | Gen Electric | Aluminide coating removal method |
| US4746369A (en) * | 1982-01-11 | 1988-05-24 | Enthone, Incorporated | Peroxide selective stripping compositions and method |
| US4900398A (en) * | 1989-06-19 | 1990-02-13 | General Motors Corporation | Chemical milling of titanium |
| WO1992007110A1 (en) | 1990-10-19 | 1992-04-30 | Union Carbide Coatings Service Technology Corporation | Stripping solution and process for stripping compounds of titanium from base metals |
| DE4101843C1 (en) * | 1991-01-23 | 1992-04-02 | Eifeler Werkzeuge Gmbh, 4000 Duesseldorf, De | Hard tool coating for economy - by stripping using tetra:sodium di:phosphate soln. and hydrogen peroxide |
| US5248386A (en) * | 1991-02-08 | 1993-09-28 | Aluminum Company Of America | Milling solution and method |
| DE4110595C1 (en) * | 1991-04-02 | 1992-11-26 | Thyssen Edelstahlwerke Ag, 4000 Duesseldorf, De | Wet-chemical removal of hard coatings from workpiece surfaces - comprises using hydrogen peroxide soln. stabilised by complex former e.g. potassium-sodium tartrate-tetra:hydrate |
| DE4339502C2 (de) * | 1993-11-24 | 1999-02-25 | Thoene Carl Stefan | Entschichtungslösung zum naßchemischen Entfernen von Hartstoffschichten und Verfahren zu deren Anwendung |
| JPH09109126A (ja) * | 1995-10-17 | 1997-04-28 | Ngk Insulators Ltd | ハニカム成形用口金の再生方法 |
| DE59811875D1 (de) | 1997-11-10 | 2004-09-30 | Unaxis Trading Ag Truebbach | Verfahren zum entschichten von körpern |
| US5972424A (en) * | 1998-05-21 | 1999-10-26 | United Technologies Corporation | Repair of gas turbine engine component coated with a thermal barrier coating |
| EP1093534B1 (de) * | 1998-06-11 | 2007-12-26 | Oerlikon Trading AG, Trübbach | Verfahren zum entschichten von hartstoffschichten |
| US6132520A (en) * | 1998-07-30 | 2000-10-17 | Howmet Research Corporation | Removal of thermal barrier coatings |
| DE19924589A1 (de) * | 1999-05-28 | 2000-11-30 | Thoene Carl Stefan | Verfahren zum naßchemischen Entfernen von Hartstoffschichten auf Hartmetall-Substraten |
| US6488729B1 (en) * | 1999-09-30 | 2002-12-03 | Showa Denko K.K. | Polishing composition and method |
| US6379749B2 (en) * | 2000-01-20 | 2002-04-30 | General Electric Company | Method of removing ceramic coatings |
| US6355116B1 (en) * | 2000-03-24 | 2002-03-12 | General Electric Company | Method for renewing diffusion coatings on superalloy substrates |
| US20020125215A1 (en) * | 2001-03-07 | 2002-09-12 | Davis Brian Michael | Chemical milling of gas turbine engine blisks |
| US6793838B2 (en) * | 2001-09-28 | 2004-09-21 | United Technologies Corporation | Chemical milling process and solution for cast titanium alloys |
| US6936543B2 (en) * | 2002-06-07 | 2005-08-30 | Cabot Microelectronics Corporation | CMP method utilizing amphiphilic nonionic surfactants |
| US6916429B2 (en) * | 2002-10-21 | 2005-07-12 | General Electric Company | Process for removing aluminosilicate material from a substrate, and related compositions |
| US7008553B2 (en) * | 2003-01-09 | 2006-03-07 | General Electric Company | Method for removing aluminide coating from metal substrate and turbine engine part so treated |
| US7094450B2 (en) * | 2003-04-30 | 2006-08-22 | General Electric Company | Method for applying or repairing thermal barrier coatings |
| US7078073B2 (en) * | 2003-11-13 | 2006-07-18 | General Electric Company | Method for repairing coated components |
| US20050152805A1 (en) | 2004-01-08 | 2005-07-14 | Arnold James E. | Method for forming a wear-resistant hard-face contact area on a workpiece, such as a gas turbine engine part |
| DE102004001392A1 (de) | 2004-01-09 | 2005-08-04 | Mtu Aero Engines Gmbh | Verschleißschutzbeschichtung und Bauteil mit einer Verschleißschutzbeschichtung |
| PL1725700T3 (pl) * | 2004-01-29 | 2010-07-30 | Oerlikon Trading Ag | Sposób usuwania powłoki |
| US7271136B2 (en) * | 2005-01-21 | 2007-09-18 | Spray Nine Corporation | Aircraft cleaner formula |
| US8377324B2 (en) * | 2005-06-10 | 2013-02-19 | Acromet Technologies Inc. | Methods for removing coatings from a metal component |
| US7425278B2 (en) * | 2006-11-28 | 2008-09-16 | International Business Machines Corporation | Process of etching a titanium/tungsten surface and etchant used therein |
| US20080169270A1 (en) * | 2007-01-17 | 2008-07-17 | United Technologies Corporation | Method of removing a case layer from a metal alloy |
| US8623236B2 (en) * | 2007-07-13 | 2014-01-07 | Tokyo Ohka Kogyo Co., Ltd. | Titanium nitride-stripping liquid, and method for stripping titanium nitride coating film |
-
2005
- 2005-10-14 DE DE102005049249.5A patent/DE102005049249B4/de not_active Expired - Fee Related
-
2006
- 2006-10-10 EP EP06805384.2A patent/EP1934387B1/de not_active Not-in-force
- 2006-10-10 WO PCT/DE2006/001766 patent/WO2007041998A1/de not_active Ceased
- 2006-10-10 US US12/088,800 patent/US9212555B2/en not_active Expired - Fee Related
- 2006-10-10 JP JP2008534864A patent/JP2009511804A/ja active Pending
- 2006-10-10 PL PL06805384T patent/PL1934387T3/pl unknown
Non-Patent Citations (1)
| Title |
|---|
| See references of WO2007041998A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1934387B1 (de) | 2015-06-17 |
| JP2009511804A (ja) | 2009-03-19 |
| DE102005049249B4 (de) | 2018-03-29 |
| US9212555B2 (en) | 2015-12-15 |
| PL1934387T3 (pl) | 2016-03-31 |
| US20090302004A1 (en) | 2009-12-10 |
| DE102005049249A1 (de) | 2007-04-19 |
| WO2007041998A1 (de) | 2007-04-19 |
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