EP1921521A1 - MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr - Google Patents

MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr Download PDF

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Publication number
EP1921521A1
EP1921521A1 EP06123971A EP06123971A EP1921521A1 EP 1921521 A1 EP1921521 A1 EP 1921521A1 EP 06123971 A EP06123971 A EP 06123971A EP 06123971 A EP06123971 A EP 06123971A EP 1921521 A1 EP1921521 A1 EP 1921521A1
Authority
EP
European Patent Office
Prior art keywords
rotor
shaft
micromotor
plate
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06123971A
Other languages
English (en)
French (fr)
Other versions
EP1921521B1 (de
Inventor
Lionel Paratte
Wilfried Noell
Jean-Philippe Rebeaud
Nicolas Golay
Yves Pétremand
André Zanetta
Fabien Blondeau
Pierre-André Meister
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA SA Manufacture Horlogere Suisse
Original Assignee
ETA SA Manufacture Horlogere Suisse
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ETA SA Manufacture Horlogere Suisse filed Critical ETA SA Manufacture Horlogere Suisse
Priority to AT06123971T priority Critical patent/ATE495481T1/de
Priority to EP06123971A priority patent/EP1921521B1/de
Priority to DE602006019612T priority patent/DE602006019612D1/de
Priority to SG200717592-0A priority patent/SG143156A1/en
Priority to KR1020070114779A priority patent/KR101374043B1/ko
Priority to JP2007294753A priority patent/JP5053046B2/ja
Priority to CN2007101869245A priority patent/CN101183838B/zh
Priority to US11/939,067 priority patent/US7505373B2/en
Publication of EP1921521A1 publication Critical patent/EP1921521A1/de
Priority to HK08112364.5A priority patent/HK1120936A1/xx
Application granted granted Critical
Publication of EP1921521B1 publication Critical patent/EP1921521B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04C—ELECTROMECHANICAL CLOCKS OR WATCHES
    • G04C3/00—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means
    • G04C3/08—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork, e.g. electrostatically
    • G04C3/12—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork, e.g. electrostatically driven by piezoelectric means; driven by magneto-strictive means
    • G—PHYSICS
    • G04—HOROLOGY
    • G04G—ELECTRONIC TIME-PIECES
    • G04G15/00—Time-pieces comprising means to be operated at preselected times or after preselected time intervals
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type

Definitions

  • the present invention relates to a micromotor type MEMS (Micro Electro Mechanical System) and a timepiece equipped with this micromotor.
  • MEMS Micro Electro Mechanical System
  • the invention more particularly relates to a MEMS micromotor made in a plate of crystalline or amorphous material, in particular based on silicon, which comprises a lower layer constituting a substrate, and an upper layer in which is etched at least one actuator and a rotor, the actuator rotating the rotor around a cylindrical shaft.
  • the rotor of an electrostatic MEMS micromotor with ratchet drive must be precisely guided in rotation, so as to allow the pawls to function properly.
  • a conventional way is to form an integrated fixed axis, made at the same time as the rotor and its bore. Such an example is described in the document WO 2004/081695 .
  • the radial bore-axis clearance of a rotor with integrated axis can not be less than the minimum trench achievable in a deep plasma etching technology called DRIE (Deep Reactive Ion Etching), generally 5 microns for 80 microns thick.
  • DRIE Deep Reactive Ion Etching
  • the invention aims to solve these problems simply and economically.
  • the invention proposes a micromotor of the type mentioned above, characterized in that the shaft is attached to the plate, in that the shaft is stepped and extends axially through a hole of the plate, and in that the shaft is clamped and centered in the hole by means of elastic fixing structures which are formed by etching in the substrate and which are arranged around the hole.
  • the invention also proposes a timepiece comprising a gear train rotated by a micromotor made according to one of the preceding characteristics.
  • FIG. 1 diagrammatically shows a timepiece 10 constituted by a wristwatch equipped with a drive module 13 according to the teachings of the invention, the drive module 13 being here arranged in FIG. inside a housing 12.
  • the timepiece 10 comprises a watch case 14 closed by a lens 16, a dial 18, and analog display means here constituted by needles 20.
  • the needles 20 are designed to be rotated by the module 20. 13 according to the invention, via a gear train 22 comprising, for example, gearing means.
  • the drive module 13 is supplied with electrical energy by a battery 24.
  • the housing 12, the drive module 13, the gear 22, and the battery 24 are here mounted on a plate 26 and together form the movement 27 of the timepiece 10, this movement 27 being fixed inside the watch case 14.
  • the movement 27 comprises other elements (not shown), in particular an electronic module comprising an integrated circuit, a base of time comprising a quartz, a printed circuit board and so on.
  • FIG. 2 shows part of the movement 27 of the timepiece 10, in particular the plate 26 on which the housing 12 and the gear train 22 are mounted.
  • the drive module 13 is designed to mesh with a clock wheel called the input wheel 28 of the gear train 22.
  • the drive module 13 comprises a plate 30 of crystalline or amorphous material, for example silicon, comprising a lower layer which constitutes a substrate 32, and an upper layer 34 in which is etched a micromotor 36 of the MEMS (Micro ElectroMechanical System) type. ).
  • the micromotor 36 is constituted here by two actuators 38, 40 driving in rotation a rotor 42 etched in the upper layer 34.
  • Each actuator 38, 40 comprises a stylet 44, 46 movable in a direction A1, A2 parallel to the plane of the plate 30.
  • Each stylet 44, 46 is provided at its free end with a pawl 48, 50 provided to cooperate with a toothing 52 sawtooth arranged on the outer peripheral edge of the rotor 42 to rotate it sequentially.
  • each stylet 44, 46 extends in a direction A1, A2 which cuts the associated actuator 38, 40 in two generally symmetrical parts.
  • a first actuator 38 comprises a pusher pawl 48 and a second actuator 40 comprises a pawl 50.
  • Each actuator 38, 40 is here of the electrostatic type with interdigitated combs and produced by etching in the silicon plate 30.
  • the plate 30 is here of the Silicon On Insulator (SOI) type and comprises a thick lower layer 32 of substrate in silicon, an intermediate layer 54 of silicon oxide, and an upper layer 34 made of silicon with a thickness less than the substrate 32.
  • SOI Silicon On Insulator
  • each actuator 38, 40 has a supply pad 56, 58 designed to be electrically connected to the electronic module, and the movable part of each actuator 38, 40 has a contact pad 57, 59 which places these moving parts. at a determined potential, here at zero Volts.
  • a micromotor comprising electrostatic actuators made in a silicon plate is described and shown, for example, in the document WO 2004/081695 , incorporated herein by reference.
  • the motor is made by etching in a silicon layer. It comprises a toothed drive wheel and actuating fingers which cooperate with the teeth of the wheel to cause its rotation. Each actuating finger is integral in displacement of a moving comb which moves relative to a fixed comb according to a voltage applied to the fixed comb.
  • each actuator 38, 40 is associated with a passive pawl 49, 51 whose latching zone is located between the engagement zone 70 and the latching zone of the associated pawl.
  • These passive pawls 49, 51 are held elastically intermeshed with the rotor 42 so as to ensure precise angular positioning, especially during the driving phases, when the other pawls 48, 50 move.
  • the rotor 42 is guided by an integrated central smooth bearing 60 or chimney, made at the same time as the pawls 48, 50, and having a diametral clearance of between 4 and 10 microns. approximate lower limit corresponding to a thick silicon layer of 80 microns.
  • Pawls 48, 50 will work well if they act on a tangential stroke significantly greater than this game, typically between 20 and 100 microns. This corresponds well to the range of possible strokes with guidance of the stylets 44, 46 by bending springs (not shown).
  • the torque of the rotor 42 is transmitted to a pinion 62 by a system related to a crank.
  • the pinion 62 located just above the rotor 42, is coaxial with the latter and is guided by a central shaft 64.
  • the pinion 62 is provided with pins 66, engaged in windows 68 of the rotor 42. Operating gaps are provided between the various elements of the rotor 42 and the pinion 62 as shown in the diagram of FIG. 7.
  • rotor 42 and pinion 62 are angularly coupled, but laterally independent: the games in the xy plane are taken over by the bearing 60 for the rotor 42 and the shaft 64 for the pinion 62.
  • the lateral reaction force due to the load is not taken up by the bearing 60 at the rotor 42, but by guiding the pinion 62 by the shaft 64.
  • the microfabricated elements of the micromotor 36 are protected from the greater forces exerted by the watch elements, in case of shocks, for example.
  • Pinion 62 is provided to mesh with input wheel 28 of gear train 22 in a meshing zone 70 located near an outer peripheral edge 72 of plate 30.
  • the rotor 42 is arranged on the plate 30 so as to minimize the distance D between the toothing 52 of the rotor 42 and the outer peripheral edge 72 of the plate 30 corresponding to the engagement zone 70.
  • the outer diameter of the pinion 62 is slightly greater than that of the rotor 42 so as to be cantilevered with respect to the plate 30 in the meshing zone 70.
  • FIG. 7 To simplify the diagram of Figure 7, there is shown a rotor 42 having only four windows 68 and a pinion 62 having only four pins 66. According to an advantageous embodiment, as illustrated in particular in Figures 3 and 4, it is provided eight windows 68 and eight pins 66.
  • the angular position of the ratchet zone of each pawl 48, 50 with the rotor 42 is angularly offset relative to the engagement zone 70.
  • the ratchet zone of each pawl 48, 50 forms an angle ⁇ with the axis x'x.
  • ⁇ represents the angle, at a given instant, between the radius passing through the pin 66 which bears, in engagement, against the edge of its window 68, and the axis x'x (FIG. 7).
  • This transmission solution makes it possible to vary the diameter of the pinion 62 in order to adapt the torques and the speeds, according to the loads. Moreover, if the pinion 62 is large enough and protrudes from the peripheral edge 72 of the plate 30, meshing by the wafer is simplified, and the drive module 13 can be assembled on the plate 26 of the timepiece 10 so modular, that is to say without disassembling / reassembling the driven wheel 28.
  • the drive module 13 allows an increased modularity for the adaptation to the load, allowing the use of pinions 62 of various diameters, without modifying the rest of the module 13.
  • the pinion 62 may be made of metal such as brass, with pins 66 reported also made of metal.
  • the pinion 62 can also be made in one piece with the pins 66 by molding plastic material.
  • An embodiment of the pinion 62 of plastic material with overmolded metal pins 66 is also conceivable.
  • the axis of rotation of the pinion 62 is constituted by a stepped shaft 64 metal which is inserted into the plate 30 through a first hole 74 formed in the substrate 32 and which is driven into a second hole 76 made in a plate 106 of the housing 12.
  • the radial forces applied on the shaft 64 are taken up by the plate 106.
  • the shaft 64 has a lower end section 78 which delimits with a lower intermediate section 80 a first shoulder surface 82 facing upwards and coming into axial abutment against the lower face of the plate 30.
  • the lower intermediate section 80 has a diameter substantially equal to the diameter of first hole 74 and it extends in this hole 74.
  • the shaft has an upper intermediate portion 84 of slightly smaller diameter than the lower intermediate portion 80 adjacent and which extends into the bore 86 of the pinion 62 to guide it in rotation .
  • the upper intermediate section 84 delimits with the upper end section 88 a second shoulder surface 90 against which is held in axial support a fixing ring 92 which is driven on the upper end section 88.
  • the rotation guide of the rotor 42 is carried out by the bearing 60, which is produced by a photolithographic etching process in the same manner as the first hole 74 which determines the centering of the shaft 64 with respect to the bearing 60, one obtains a very good centering of the shaft 64, the pinion 62, the bearing 60 and the rotor 42.
  • the lower face of the pinion 62 comprises, opposite the bearing 60, a boss 94 which prevents the pinion 62 from coming to bear axially against the rotor 42, particularly in the event of a tilting, which avoids deterioration of the rotor 42.
  • FIGS. 8 and 9 show another advantageous embodiment in which the shaft 64 is mounted in the plate 30 in the manner of a driving by means of elastic fixing structures 96 arranged in the substrate 32 around the first hole 74.
  • the radial forces applied on the shaft 64 are taken up by the substrate 32 and thus by the elastic fixing structures 96.
  • the elastic attachment structures 96 are constituted here by flexible blades 98 lithographed in the rear face of the plate 30.
  • the shaft 64 can be finally fixed in the plate 30 by a complementary fixing means, for example by welding to the substrate 32 by means of a weld bead 99 which is shown in Figure 8, or by gluing.
  • the problems of friction against the shaft 64 can be solved by deposition of a solid thin layer on the outer axial wall of the shaft 64 to reduce the friction between the parts.
  • the elastic attachment structures 96 may be chosen in particular from the examples described and represented in the document CH 695395 or among other structures that can provide accurate centering and clamping of the shaft 64 on the plate 30, for example, structures consisting of flexible tongues with free ends.
  • the actuators 38, 40 describe between them an angle of approximately ninety degrees, the bisector of this angle passing through the engagement zone 70 and by the axis of rotation z z of the rotor 42, so that the drive module 13 has a general shape in "V" defined by the outer contour of the plate 30, this contour being optimized.
  • the plate 30 comprises a central portion 100 which carries the rotor 42 and two lateral portions 102, 104.
  • the outer contour of the plate 30 corresponds globally to the intersection of two rectangles, which are orthogonal to one another and which form the two lateral portions. 102, 104, with a transverse rectangle, which forms the central portion 100, the transverse rectangle describing an angle of forty-five degrees with respect to each of the other two rectangles.
  • Most of the surface of each lateral portion 102, 104 is occupied by an actuator 38, 40 while most of the surface of the central portion 100 is occupied by the rotor 42.
  • the meshing zone 70 is arranged at near one of the peripheral edges 72 of the central portion 100.
  • the pads 56, 57, 58, 59 are arranged on the central portion 100, on the opposite side to the engagement zone 70 with respect to the z'z axis of the rotor 42.
  • the "V" shape of the drive module 13 has the advantage of allowing an optimization of the efficiency of the micromotor 36 relative to the surface of the plate 30 used, and an optimization of the surface of crystalline or amorphous material used to realize the micromotors 36 and the drive modules 13.
  • the "V" shape allows nested replication of the plates 30 on the surface of the wafer to maximize the number of micromotors 36 obtained from a given surface of silicon.
  • the plates 30 can be arranged on the wafer in parallel columns in the manner of chevrons, two adjacent columns Cn, Cn + 1 being oriented in opposite directions.
  • two plates Adjacent ones of two adjacent columns Cn, Cn + 1 have their adjacent side portions 102 which are aligned.
  • the angle described by the two actuators 38, 40 is between ninety and one hundred and forty degrees.
  • the housing 12 which contains the drive module 13 comprises a lower plate 106 designed to be fixed on an element of the timepiece 10, here on the plate 26 of the movement, and the plate 30 of the drive module 13 is mounted on the bottom plate 106.
  • the housing 12 comprises a protective cover 108 which covers the drive module 13, which is fixed on the lower plate 106, here by means of a screw 109, and which holds the drive module 13 against the lower plate 106.
  • the upper face of the lower plate 106 here comprises a recess or recess 110 in which the plate 30 of the drive module 13 is received in substantially complementary manner.
  • the cover 108 has a notch 112 open in one of its outer peripheral edges and the pinion 62 is housed in this notch 112 after mounting the cover 108 on the bottom plate 106.
  • a printed circuit 114 is interposed between the lower plate 106 and the cover 108 to allow the electrical connection of the micromotor 36, by its tracks 56, 57, 58, 59, to the electronic module of the timepiece 10.
  • the drive module 13 can be mounted directly on the plate 26, which eliminates the housing 12, in particular to minimize the number of components, to facilitate the assembly of the movement 27 and to minimize the bulk of the drive means.
  • a protection element may be provided on the drive module 13 to protect its components.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromechanical Clocks (AREA)
  • Micromachines (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Iron Core Of Rotating Electric Machines (AREA)
  • Percussion Or Vibration Massage (AREA)
EP06123971A 2006-11-13 2006-11-13 MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr Active EP1921521B1 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
AT06123971T ATE495481T1 (de) 2006-11-13 2006-11-13 Mems-mikromotor und mit diesem mikromotor ausgerüstete uhr
EP06123971A EP1921521B1 (de) 2006-11-13 2006-11-13 MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr
DE602006019612T DE602006019612D1 (de) 2006-11-13 2006-11-13 MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr
SG200717592-0A SG143156A1 (en) 2006-11-13 2007-11-09 Mems micromotor and timepiece equipped with this micromotor
KR1020070114779A KR101374043B1 (ko) 2006-11-13 2007-11-12 Ｍｅｍｓ 마이크로모터 및 상기 마이크로모터로 구비된시계
JP2007294753A JP5053046B2 (ja) 2006-11-13 2007-11-13 Ｍｅｍｓマイクロモータおよびこのマイクロモータを装備する時計
CN2007101869245A CN101183838B (zh) 2006-11-13 2007-11-13 微机电系统微型马达和装备该微型马达的时计
US11/939,067 US7505373B2 (en) 2006-11-13 2007-11-13 MEMS micromotor and timepiece equipped with this micromotor
HK08112364.5A HK1120936A1 (en) 2006-11-13 2008-11-11 Mems micromotor and timepiece equipped with this micromotor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06123971A EP1921521B1 (de) 2006-11-13 2006-11-13 MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr

Publications (2)

Publication Number Publication Date
EP1921521A1 true EP1921521A1 (de) 2008-05-14
EP1921521B1 EP1921521B1 (de) 2011-01-12

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ID=37896015

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06123971A Active EP1921521B1 (de) 2006-11-13 2006-11-13 MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr

Country Status (9)

Country Link
US (1) US7505373B2 (de)
EP (1) EP1921521B1 (de)
JP (1) JP5053046B2 (de)
KR (1) KR101374043B1 (de)
CN (1) CN101183838B (de)
AT (1) ATE495481T1 (de)
DE (1) DE602006019612D1 (de)
HK (1) HK1120936A1 (de)
SG (1) SG143156A1 (de)

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ITRE20120049A1 (it) * 2012-07-11 2014-01-12 Renato Rinaldi Orologio
US9146537B2 (en) 2013-04-23 2015-09-29 Rolex S.A. Horology component intended to house a driven-in member
EP2959571A4 (de) * 2013-01-07 2016-12-07 Timex Group Usa Inc Bidirektionale mems antriebsanordnung
CN108317233A (zh) * 2018-04-09 2018-07-24 中国工程物理研究院电子工程研究所 应用于mems微纳加工的一体化无装配多层微齿轮结构

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WO2007143623A2 (en) 2006-06-02 2007-12-13 Stalford Harold L Methods and systems for micro machines
US8134276B2 (en) * 2006-06-02 2012-03-13 MicroZeus, LLC Methods and systems for positioning micro elements
US9156674B2 (en) * 2006-06-02 2015-10-13 MicroZeus, LLC Micro transport machine and methods for using same
US8884474B2 (en) * 2006-06-02 2014-11-11 MicroZeus, LLC Method of fabricating a micro machine
US8915158B2 (en) * 2006-06-02 2014-12-23 MicroZeus, LLC Methods and systems for micro transmissions
US8159107B2 (en) 2006-06-02 2012-04-17 Microzeus Llc Micro rotary machine and methods for using same
US8282284B2 (en) 2006-06-02 2012-10-09 MicroZeus, LLC Methods and systems for micro bearings
US8122973B2 (en) * 2008-05-21 2012-02-28 Stalford Harold L Three dimensional (3D) robotic micro electro mechanical systems (MEMS) arm and system
EP2154582A1 (de) * 2008-08-15 2010-02-17 Nivarox-FAR S.A. Verzahnungverfahren für Uhrwerk
EP2164163B1 (de) * 2008-09-16 2017-06-21 ETA SA Manufacture Horlogère Suisse Elektrostatischer Motor, der ein Stellglied umfasst
US8826350B1 (en) * 2012-01-24 2014-09-02 Intellectual Ventures Fund 79 Llc Methods, devices, and mediums for providing group video on demand
CN102769371B (zh) * 2012-07-13 2014-07-30 上海大学 基于电热驱动的步进微转动装置
EP3273303A1 (de) * 2016-07-19 2018-01-24 Nivarox-FAR S.A. Bauteil für uhrwerk
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EP0403179A1 (de) * 1989-06-16 1990-12-19 Matsushita Electric Industrial Co., Ltd. Elektrostatische Mikromotorvorrichtung
GB2293662A (en) * 1994-09-28 1996-04-03 Seikosha Kk Viscous damping in gear train of clock
US6211599B1 (en) * 1999-08-03 2001-04-03 Sandia Corporation Microelectromechanical ratcheting apparatus
US6402969B1 (en) * 2000-08-15 2002-06-11 Sandia Corporation Surface—micromachined rotatable member having a low-contact-area hub
US20050100748A1 (en) * 2003-09-23 2005-05-12 Iowa State University Research Foundation, Inc. Ultra-hard low friction coating based on AlMgB14 for reduced wear of MEMS and other tribological components and system
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITRE20120049A1 (it) * 2012-07-11 2014-01-12 Renato Rinaldi Orologio
EP2959571A4 (de) * 2013-01-07 2016-12-07 Timex Group Usa Inc Bidirektionale mems antriebsanordnung
US9146537B2 (en) 2013-04-23 2015-09-29 Rolex S.A. Horology component intended to house a driven-in member
EP2796940A3 (de) * 2013-04-23 2016-05-04 Rolex Sa Uhrkomponente zur Aufnahme eines Organs durch Einpressen
CN112925185A (zh) * 2013-04-23 2021-06-08 劳力士有限公司 用于容纳被驱入构件的钟表部件
CN108317233A (zh) * 2018-04-09 2018-07-24 中国工程物理研究院电子工程研究所 应用于mems微纳加工的一体化无装配多层微齿轮结构
CN108317233B (zh) * 2018-04-09 2023-06-20 中国工程物理研究院电子工程研究所 应用于mems微纳加工的一体化无装配多层微齿轮结构

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EP1921521B1 (de) 2011-01-12
KR101374043B1 (ko) 2014-03-12
SG143156A1 (en) 2008-06-27
JP2008125348A (ja) 2008-05-29
DE602006019612D1 (de) 2011-02-24
CN101183838B (zh) 2011-11-16
US7505373B2 (en) 2009-03-17
CN101183838A (zh) 2008-05-21
HK1120936A1 (en) 2009-04-09
US20080197749A1 (en) 2008-08-21
KR20080043241A (ko) 2008-05-16
JP5053046B2 (ja) 2012-10-17
ATE495481T1 (de) 2011-01-15

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