DE602006019612D1 - MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr - Google Patents

MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr

Info

Publication number
DE602006019612D1
DE602006019612D1 DE602006019612T DE602006019612T DE602006019612D1 DE 602006019612 D1 DE602006019612 D1 DE 602006019612D1 DE 602006019612 T DE602006019612 T DE 602006019612T DE 602006019612 T DE602006019612 T DE 602006019612T DE 602006019612 D1 DE602006019612 D1 DE 602006019612D1
Authority
DE
Germany
Prior art keywords
micromotor
shaft
hole
plate
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006019612T
Other languages
English (en)
Inventor
Lionel Paratte
Wilfried Noell
Jean-Philippe Rebeaud
Nicolas Golay
Yves Petremand
Andre Zanetta
Fabien Blondeau
Pierre-Andre Meister
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ETA Manufacture Horlogere Suisse SA
Original Assignee
ETA Manufacture Horlogere Suisse SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ETA Manufacture Horlogere Suisse SA filed Critical ETA Manufacture Horlogere Suisse SA
Publication of DE602006019612D1 publication Critical patent/DE602006019612D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04C—ELECTROMECHANICAL CLOCKS OR WATCHES
    • G04C3/00—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means
    • G04C3/08—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork, e.g. electrostatically
    • G04C3/12—Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork, e.g. electrostatically driven by piezoelectric means; driven by magneto-strictive means
    • G—PHYSICS
    • G04—HOROLOGY
    • G04G—ELECTRONIC TIME-PIECES
    • G04G15/00—Time-pieces comprising means to be operated at preselected times or after preselected time intervals
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
DE602006019612T 2006-11-13 2006-11-13 MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr Active DE602006019612D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06123971A EP1921521B1 (de) 2006-11-13 2006-11-13 MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr

Publications (1)

Publication Number Publication Date
DE602006019612D1 true DE602006019612D1 (de) 2011-02-24

Family

ID=37896015

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006019612T Active DE602006019612D1 (de) 2006-11-13 2006-11-13 MEMS-Mikromotor und mit diesem Mikromotor ausgerüstete Uhr

Country Status (9)

Country Link
US (1) US7505373B2 (de)
EP (1) EP1921521B1 (de)
JP (1) JP5053046B2 (de)
KR (1) KR101374043B1 (de)
CN (1) CN101183838B (de)
AT (1) ATE495481T1 (de)
DE (1) DE602006019612D1 (de)
HK (1) HK1120936A1 (de)
SG (1) SG143156A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1906983B (zh) * 2004-01-15 2011-07-20 国际商业机器公司 一种芯片上系统
US8884474B2 (en) * 2006-06-02 2014-11-11 MicroZeus, LLC Method of fabricating a micro machine
US9156674B2 (en) * 2006-06-02 2015-10-13 MicroZeus, LLC Micro transport machine and methods for using same
US8915158B2 (en) * 2006-06-02 2014-12-23 MicroZeus, LLC Methods and systems for micro transmissions
US8282284B2 (en) 2006-06-02 2012-10-09 MicroZeus, LLC Methods and systems for micro bearings
US8134276B2 (en) * 2006-06-02 2012-03-13 MicroZeus, LLC Methods and systems for positioning micro elements
WO2007143623A2 (en) 2006-06-02 2007-12-13 Stalford Harold L Methods and systems for micro machines
US8159107B2 (en) * 2006-06-02 2012-04-17 Microzeus Llc Micro rotary machine and methods for using same
US8122973B2 (en) 2008-05-21 2012-02-28 Stalford Harold L Three dimensional (3D) robotic micro electro mechanical systems (MEMS) arm and system
EP2154582A1 (de) * 2008-08-15 2010-02-17 Nivarox-FAR S.A. Verzahnungverfahren für Uhrwerk
EP2164163B1 (de) * 2008-09-16 2017-06-21 ETA SA Manufacture Horlogère Suisse Elektrostatischer Motor, der ein Stellglied umfasst
US8826350B1 (en) * 2012-01-24 2014-09-02 Intellectual Ventures Fund 79 Llc Methods, devices, and mediums for providing group video on demand
ITRE20120049A1 (it) * 2012-07-11 2014-01-12 Renato Rinaldi Orologio
CN102769371B (zh) * 2012-07-13 2014-07-30 上海大学 基于电热驱动的步进微转动装置
US8926465B2 (en) * 2013-01-07 2015-01-06 Timex Group Usa, Inc. Bidirectional MEMS driving arrangement
EP2796940A3 (de) * 2013-04-23 2016-05-04 Rolex Sa Uhrkomponente zur Aufnahme eines Organs durch Einpressen
EP3273303A1 (de) * 2016-07-19 2018-01-24 Nivarox-FAR S.A. Bauteil für uhrwerk
US10838366B2 (en) 2017-09-14 2020-11-17 Timex Group Usa, Inc. Bidirectional MEMS driving arrangements with a force absorbing system
CN108317233B (zh) * 2018-04-09 2023-06-20 中国工程物理研究院电子工程研究所 应用于mems微纳加工的一体化无装配多层微齿轮结构

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3672153A (en) 1970-08-03 1972-06-27 Bulova Watch Co Inc Miniaturized battery-operated tuning-fork timepiece
JPS57130595U (de) * 1981-02-09 1982-08-14
JPS648880A (en) * 1987-06-30 1989-01-12 Sanyo Electric Co Supersonic motor
JPH02151279A (ja) * 1988-11-29 1990-06-11 Toyo Electric Mfg Co Ltd 超音波モータ
JPH078149B2 (ja) * 1989-06-16 1995-01-30 松下電器産業株式会社 静電型マイクロモータの駆動力伝達装置
JP3060639B2 (ja) * 1991-09-05 2000-07-10 日本電気株式会社 微小可動機械の製造方法
JPH07241088A (ja) * 1993-12-10 1995-09-12 Mega Chips:Kk マイクロマシンの製造方法
JPH07177761A (ja) * 1993-12-20 1995-07-14 Sony Corp マイクロマシンの製造方法
US5631514A (en) * 1994-06-09 1997-05-20 The United States Of America As Represented By The United States Department Of Energy Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
JP2697763B2 (ja) * 1994-09-28 1998-01-14 セイコークロック株式会社 粘性カップリング歯車装置
US6069419A (en) * 1998-06-16 2000-05-30 Tabib-Azar; Massood Micro-actuator assembly
US5959376A (en) * 1998-09-10 1999-09-28 Sandia Corporation Microelectromechanical reciprocating-tooth indexing apparatus
EP1181601A4 (de) * 1998-12-15 2006-11-08 Seagate Technology Llc Optischer mikroschalter mit rotierendem elektrosttischem stelltrieb
CN100367649C (zh) * 1998-12-21 2008-02-06 精工爱普生株式会社 压电驱动装置和钟表
US6137206A (en) * 1999-03-23 2000-10-24 Cronos Integrated Microsystems, Inc. Microelectromechanical rotary structures
US6211599B1 (en) * 1999-08-03 2001-04-03 Sandia Corporation Microelectromechanical ratcheting apparatus
US6402969B1 (en) * 2000-08-15 2002-06-11 Sandia Corporation Surface—micromachined rotatable member having a low-contact-area hub
JP2002233171A (ja) * 2001-02-05 2002-08-16 Minolta Co Ltd 駆動装置
JP2004072993A (ja) * 2002-06-14 2004-03-04 Seiko Epson Corp 圧電アクチュエータ、これを備えた動力伝達装置、液体吐出装置および時計
SG112865A1 (en) * 2002-12-10 2005-07-28 Sony Corp Mems based motor
CH695395A5 (fr) 2003-02-06 2006-04-28 Eta Sa Mft Horlogere Suisse Spiral de résonateur balancier-spiral.
FR2852111B1 (fr) 2003-03-05 2005-06-24 Univ Franche Comte Dispositif d'horloge utilisant la technologie mems
US7238429B2 (en) * 2003-09-23 2007-07-03 Iowa State University Research Foundation, Inc. Ultra-hard low friction coating based on A1MgB14 for reduced wear of MEMS and other tribological components and system
WO2006024561A1 (fr) 2004-08-31 2006-03-09 Societe De Technologie Michelin Pneumatique a mobilite etendue avec zone d'ancrage a moment d'inertie eleve
FR2874907B1 (fr) * 2004-09-03 2006-11-24 Silmach Soc Par Actions Simpli Dispositif d'entrainement, notamment pour mecanisme horloger
FR2883277B1 (fr) 2005-03-18 2007-05-11 Silmach Soc Par Actions Simpli Procede et dispositif pour deplacer un element a entrainer utilisant un element actionneur forme par gravure dans un materiau semi-conducteur
US7411322B2 (en) * 2005-12-06 2008-08-12 Lucent Technologies Inc. Micromachined reluctance motor
DE602006005058D1 (de) * 2006-11-13 2009-03-19 Eta Sa Mft Horlogere Suisse Einen MEMS-Mikromotor umfassendes Antriebsmodul, Verfahren zur Herstellung dieses Moduls und mit diesem Modul ausgerüstete Uhr

Also Published As

Publication number Publication date
CN101183838B (zh) 2011-11-16
EP1921521B1 (de) 2011-01-12
US7505373B2 (en) 2009-03-17
EP1921521A1 (de) 2008-05-14
SG143156A1 (en) 2008-06-27
ATE495481T1 (de) 2011-01-15
KR101374043B1 (ko) 2014-03-12
US20080197749A1 (en) 2008-08-21
JP5053046B2 (ja) 2012-10-17
CN101183838A (zh) 2008-05-21
KR20080043241A (ko) 2008-05-16
HK1120936A1 (en) 2009-04-09
JP2008125348A (ja) 2008-05-29

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