EP1899756A2 - Ensemble servant a fixer un composant optique - Google Patents

Ensemble servant a fixer un composant optique

Info

Publication number
EP1899756A2
EP1899756A2 EP06805630A EP06805630A EP1899756A2 EP 1899756 A2 EP1899756 A2 EP 1899756A2 EP 06805630 A EP06805630 A EP 06805630A EP 06805630 A EP06805630 A EP 06805630A EP 1899756 A2 EP1899756 A2 EP 1899756A2
Authority
EP
European Patent Office
Prior art keywords
optical element
arrangement according
force
compression springs
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06805630A
Other languages
German (de)
English (en)
Inventor
Armin SCHÖPPACH
Christian Zengerling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of EP1899756A2 publication Critical patent/EP1899756A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/004—Manual alignment, e.g. micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1824—Manual alignment

Definitions

  • the invention relates to an arrangement for mounting an optical element having an outer peripheral region, in particular a lens or a mirror, relative to a carrier (6) via at least three articulation points (17) arranged on the outer peripheral region of the optical element (18, 21).
  • the mounts may exert only low forces on the optical element to minimize distortion of the optical surface, the mount should have high rigidity to ensure fitment of the optical elements, and The fixture must be athermal, temperature changes must not alter the shape of the optical surface or affect the position of the optical element, the stability of the material and creep effects should be taken into account so that the position of the optical element over time remains stable.
  • US 5,428,482 discloses an optical element support which is decoupled from a ring surrounding the optical element which fixes the optical element within an optical system in the desired position.
  • Serve flexible fingers which are formed by slots within the ring from this.
  • the support members and / or at least one bearing members connected to the support members for the optical elements by one of a Laser generated laser beam deformed such that the bearing surfaces are aligned at least approximately on a common bearing surface.
  • an arrangement with resilient mounting structures which comprises a plurality of seats connected to flexible radial pedestals, to an array of compliant soft pedestals, or to a combination of flexible radial and radial pedestals the soft base are attached.
  • the elastic members allow the lens to radially expand and contract according to temperature changes
  • EP 1 245 982 A2 relates to a device for mounting an optical element, in particular a mirror or a lens, in an optical arrangement, in particular a projection exposure apparatus, with at least three articulation points arranged on the circumference of the element, against which in each case a bearing device engages, which is connected on the side facing away from the articulation point with an outer base structure.
  • the bearing device has at least one leaf spring-like bending element arranged tangentially to the optical element and at least one bending element arranged in the radial direction relative to the optical element.
  • an optical element is mounted within a housing by placing at least three brackets on the optical element at a distance of approximately
  • Each bracket 120 ° are attached.
  • Each bracket includes a spherical disc that fits within one
  • Ringes or a sleeve is arranged. Each disc is adjacent to the optical element and carries this. Any load applied to the housing will cause a sliding or
  • a clamping device is provided to hold the surface in storage and to realize a kinematic ie statically determined storage.
  • the sliding friction occurring during assembly in these coupling points leads to a poor reproducibility in a renewed adjustment of the optical element in the storage.
  • a holding device which is equipped with an annular holding part for holding flange portions of an optical element.
  • the holding portions of the holding device comprise blocks on which the flange portions are placed; the blocks are rotatably supported by support mechanisms about a tangential axis of the optical element.
  • WO 2004/001 478 A1 relates to a kinematic (statically determined) lens holder with a reduced clamping force.
  • the holder has a holder structure and three clamping units, each comprising a resilient, attached to the holder structure socket and a spring assembly with an elastic member.
  • the optical element is clamped at the edge only in the axial direction. In the tangential direction, it is held by friction.
  • a kinematic arrangement for mounting a lens with a circumferentially distributed support is known.
  • this arrangement is a combination of fixed bearing elements, and provided elastic support points, which are preferably distributed rotationally symmetrically over a lens surrounding the outer periphery of the carrier body, and only in the axial direction, ie in the beam direction of the light, have a low rigidity. This is intended to distribute the gravitational load of the lens evenly on the substrate, without exposing the lens to high stresses and deformations.
  • Each of the resilient support members is preloaded so that the force exerted on the lens is equally distributed over all the fixed and resilient support members.
  • optical element is held krafltschlüssig via the articulation points in at least one direction by elastically resilient elements, wherein the elastically resilient elements are located for each pivot point in a bearing device with a support body and the storage facilities hold the optical element statically determined on the carrier.
  • a bonding technique is provided between the optical element of glass or like material and the socket which holds the optical element in at least three places.
  • two coupling points are preferably used at these three locations.
  • an axial force in conjunction with a tangential force or an axial force in conjunction with a force in any direction in a direction perpendicular to the optical axis plane is used, the lines of action of these forces may not intersect in principle in one point.
  • the terms "axial,” “radial,” and “tangential” refer to the optical axis of the element and the outer contour of the optical element projected in a plane perpendicular to the optical axis.
  • time-dependent effects such as setting effects in coupling points
  • stress relaxation of strained parts can be largely avoided. Therefore, the number of contact points is also limited to a minimum.
  • non-positive connections are used instead of frictional connections.
  • a of the optical element with the mass M for example in a direction x - eg in the tangential direction, for example as a result of shock load
  • the force F RS acts perpendicular to the bearing surface of the optical element, ie, with tangential acceleration of the optical element, this force acts approximately in the axial direction (F ax i a i).
  • ⁇ is the coefficient of static friction, which is approximately in the range of 0.1 to 0.2 in the required precise machining of the bearing surfaces. Due to the small coefficient of static friction, a much larger axial force F 3x J 3 !
  • the value of ⁇ F KS for frictionally holding the optical element is much smaller than the value for F RS (for frictionally holding the optical element), which is why the optical element as a whole is subjected to lower mechanical stresses.
  • the acceleration counteracting force pushes the optical element back to the original position, while the optical element in the case of a frictional connection can behave undefined, if, for example, its fixation by the static friction is temporarily not guaranteed.
  • FIG. 1 shows the force F T acting on an optical element (ZB in the tangential direction) in the case of a frictional holding of an optical element in a position x (which is determined, for example, by one of the two points indicated on the x-axis, where x generally a space coordinate), when the optical element is held by means of an elastic element not biased with respect to the holding force. Occurs during a power surge or by an acceleration of the optical element, a force .DELTA.F «s, this causes a deflection .DELTA.x of the optical element, which is determined by the elastic element holding the optical element. After the end of the action of the force ⁇ F «s the optical element returns to its original position.
  • Static friction coefficient ⁇ is greater than the force due to the force force .DELTA.F KS , so if F RS ⁇ > ⁇ F KS - It was assumed that the force of the force impulse is directed in the direction of the static friction mediating surfaces. If this is not the case, then ⁇ FK S must be replaced by the force component pointing in this direction, which can be determined by vector decomposition. If this condition F RS ⁇ > .DELTA.F KS violated, there is a risk that the optical element is removed from its original position and occupies a new position, wherein after the action of force, eg, after the end of the impulse, the optical element in the new position remains.
  • the frictional retention of the optical element must be approximately 5 to 10 times the expected maximum forces due to force impulses on the optical element or due to accelerations of the optical element. This is shown schematically in FIG. 1
  • projections are formed on the optical element.
  • the projections are formed by the optical element itself.
  • they can also be formed by sockets, brackets or blocks attached to the optical element, for example by wringing or gluing. It also proves to be advantageous if in each case two coupling points are provided on the projections, each acting on the two holding forces for holding the optical element in the carrier body.
  • both an axial force and a tangential force act on the optical element in an advantageous manner at the coupling points.
  • the tension of the optical element can be minimized by the use of minimum elastic forces for holding the optical element.
  • An advantage is an arrangement in which the elastic elements are arranged in holders which at least partially surround the elastic elements.
  • the elastic elements are formed by prestressed compression springs.
  • the compression springs hold the projections in the axial and tangential direction.
  • the arrangement can advantageously be designed such that one or two compression springs are arranged in the tangential direction and that one or two compression springs are arranged in the axial direction.
  • the compression springs are preloaded only to the extent that they can absorb shock loads occurring during the transport of the optical element.
  • the compression springs are arranged in a clamping unit accommodating the carrier body, which holds the carrier body through a monolithic solid-body joint.
  • the solid-body joint can advantageously be designed as a bipod by means of two rods.
  • compression springs are received by the notches or grooves. Between the compression springs and the example V-shaped grooves or depressions and intermediate spacer elements may be present.
  • the projections of the optical component via the elastic elements, in particular via the compression springs, are held in a bracket belonging to the bearing device.
  • the invention also relates to a device comprising two arrangements, each comprising an optical component, in which the optical components are each constructed as described above.
  • the optical components are arranged by an alternately hanging and standing arrangement of the clamping elements or the storage facilities on a single bearing ring.
  • FIG. 1 forces during non-positive connection
  • FIG. 2 is a plan view of a clamping element with bearing means
  • Fig. 3 is a perspective view of an arrangement with an optical
  • FIGS. 4-8 are diagrams according to which the optical device can be held in the assembly.
  • a clamping element 1 (FIG. 2), also referred to as a bearing device, also referred to as a bipod, comprises a base or carrier body 2 with a central recess 3 and two lateral feet 4, 5 which rest on a ring 6 (FIG. 3), for example. supported support (6) support.
  • the feet 4, 5 are known according to their structure principle, for example, from EP 1 245 982 A2, on the content of which in terms of their structure is referenced. They have leaf-spring-like bending members 7 and / or solid-body joints, as are known from bearing arrangements shown in EP 1 245 982 A2.
  • the three compression springs 14, 15, 16 receives, which has a projection 17 on a optical element, such as a lens 18, holds.
  • a optical element such as a lens
  • the lens 18 is held by two further bearing devices (clamping elements) 19, 20, wherein the prestressed compression springs 14, 15, 16 hold the lens 18 respectively by the projection 17 introduced between them.
  • FIG. 4 it is shown how any forces acting on an optical element 21 with a projection 22 on the optical element 21.
  • Acting on the projection 22 forces Fi and F 2 act in the axial or in any direction within a plane defined by a sectional surface of the optical element 21 plane, which is usually perpendicular to the optical axis z.
  • Forces F 3 and F 4 act in the axial direction or in the tangential direction with respect to the circular circumference of the optical element 21.
  • the axial forces F 1 and F 3 are absorbed by the bearing devices according to FIGS. 1 and 3 by the compression springs 16 which can be generally elastically formed fixing in the axial direction.
  • the tangential forces F 4 are recorded in the bearing devices according to FIG. 1 in the arrangement according to FIG. 3 by the compression springs 14 and 15. These springs can also generally be replaced by fixing elements which are elastically formed in the tangential direction.
  • a coupling point for forces F 5 acting in the axial direction and for forces F 6 acting in the tangential direction is created.
  • the coupling points are preferably each flat surfaces perpendicular to the forces mentioned, not components of said forces in directions other than to deflect axially or tangentially, as would be the case if the surfaces were not perpendicular to said forces.
  • FIG. 6 for holding a projection 17 within a clamping element 1 (a bearing device 1), as can be used for the mounting of the optical element 18 according to FIG. 2, are on the projection 17 on the underside and on a vertical side resilient elements 24, 25, 26 attached, which are formed for example as a stretched spiral or disc springs. On the top opposite the underside of rigid elements 27, 28 are arranged. On the opposite vertical side of the projection 17 is provided with a bulge 29 which is opposite to a cylindrical pin 30, that comes to a cylinder pin to the plant. Thus, the projection 17 is held frictionally for certain mechanical stresses or strains.
  • This frictional mounting is given when the mechanical stress of the optical element is, for example, in a downward force impulse, for example, results from a shock (or shock), such as when transporting or building a unit comprising the optical element, eg optical component of a lithography system, can result.
  • Force impulse means the integral of the acting force over time.
  • a force impulse can generally be caused by the change of a momentum, or in other words by a temporally limited acceleration, or simply by the action of a time-limited force.
  • a conditional by the impulse acceleration of the optical element down is collected by the resilient elements 24 and 25 or, with appropriate bias of the springs prevented.
  • a possible bias of the springs 24 and 25 is chosen so that this corresponds approximately to the maximum forces occurring in the expected impulses. This prevents that the projection 17 from the contact surfaces of the rigid elements 27 and 28 solves or lifts. If the bias voltage is chosen to be smaller, then the protrusion 17 of the optical element can be briefly removed from the rigid elements 27 and 28 at the maximum expected force impulses take off, but then with decaying force by means of the springs 24 and 25 brought by these back to the rigid elements 27 and 28 to the plant. Thus, the optical element takes after a downward force impulse (eg by shock or shock) again the desired, by the rigid elements 27 and 28 predetermined position.
  • a downward force impulse eg by shock or shock
  • the spring 26 acts with the cylindrical pin 30 in force impulses in the tangential direction, whose force components are directed in the direction of the cylinder pin 30 to the spring 26.
  • the spring 26 may also be biased, wherein preferably the bias voltage is selected so that it corresponds approximately to the maximum force occurring in the expected impulses. This prevents that the projection 17 is released from the contact surface on the cylindrical pin 30 or lifts off from this surface.
  • the bias of the spring 26 can be selected smaller than the maximum expected force in a force, in which case the projection 17 of the optical element can temporarily lift off the contact surface of the cylindrical pin 30.
  • the projection 17 is brought by the spring 26 through this again to the cylinder pin 30 to the plant.
  • the springs shown in Fig. 6 can be replaced by elastic means.
  • a holder of an optical element by means of the embodiment of a bearing device shown in FIG. 6 is also frictionally held in the event of force collisions with force components in the direction of the rigid elements 27, 28 and / or in the direction of the cylindrical pin 30.
  • the frictional holding force is less than the frictional holding force. If the force effect of the force impulse, however, exactly in the direction of the rigid elements 27, 28 or exactly in the direction of the cylindrical pin 30, the optical element is held by means of the projection 17 in the bearing device of FIG. 6 via positive engagement in position.
  • elastically resilient elements 31, 32, 33, 34 are arranged both on the underside and on the two vertical sides of the projection 17, to hold the optical element 21.
  • the resilient elements may be generally elastic elements, which may also have a bias, is selected when power surges are to be expected in any, but downward direction, and while held frictionally the optical element shall be. If, in general, force impulses are also expected in any upwardly directed direction, the rigid elements remaining in FIG. 7, which act on the projection 17 at the top, can also be replaced by resilient or elastic, optionally prestressed elements.
  • the projection 17 is held on two sides by means of elastic elements 35, 36 and on the other two sides by rigid elements 37, 38.
  • the position of the projection 17 in at least one degree of freedom can be adjusted independently of any bias of the elastic element 35, 36.
  • the rigid elements 37 and 38 can also be replaced by elastic elements, but these (at least one of these elastic elements) are also provided with adjusting means 41 to change their position.
  • the projection 17 can be adjusted in two degrees of freedom (in at least one degree of freedom) with respect to its position, in addition regardless of the position of the projection 17 a possible bias of the elastic elements is adjustable so that it with a desired bias on the optical element or its advantage act.
  • the optical element is held, for example, by means of three projections 17 or articulation points 17, each articulation point 17 being adjustable in two degrees of freedom with respect to its position, then the optical element is adjustable in total up to 6 degrees of freedom, whereby at each articulation point (or at least one) a possible bias of the articulation point 17 regardless of the position of the relevant pivot point 17 and thus regardless of the position of the optical element., With the elements 35, 36 press against the projection 17.
  • a projection 42 is provided on the optical element, which projection is connected to a head element 45 of an isostatic (statically determined) bearing element 46 via a screw 44 surrounded by a compression spring 43.
  • the storage element is in turn mounted and fixed to a support element via a bipod formed by two feet 47, 48.
  • the projection 42 is elastically supported by a screw 50 surrounded by a compression spring 49.
  • the bearing element 46 comprises a clamp 51, which comprises a leaf spring 52. The leaf spring 52 allows easy insertion of the projection 42 in the region between the head member 45 and the bracket 51.
  • a solid-state joint 54 is integrated, so that an elastic support of the projection 42 in the tangential direction through the Screw 50 is supported.
  • the connecting piece 53 can be adjusted in a tangential direction, whereby the projection 42 can be adjusted in this direction.
  • the projection 52 can be held again with the desired or without bias. This makes it possible to adjust the optical element in one degree of freedom with respect to its position, and regardless of the position of the optical element with the projection 42 to set any bias that acts on the projection 42.
  • the articulation point 17, 42 of an optical element 18, 21 can be adjusted in at least one degree of freedom with respect to the position of the articulation point, wherein additionally the optical element 18, 21 via the articulation point 17, 42 in at least one direction by at least one elastic element or is held frictionally by at least one elastically resilient element 14, 15, 16, 49, and wherein a possible bias of the holding force generated by the elastically resilient elements or the elastic element independently of the position of the articulation point and thus independently of the position of the optical element adjustable is.
  • the adjustment element 60 is replaced by a device equivalent to the screw 50, or by such a screw, which then preferably also includes a compression spring 49.

Abstract

L'invention concerne un ensemble servant à fixer un élément optique (18, 21) présentant une zone périphérique extérieure, en particulier une lentille ou un miroir, par rapport à un support (6) par l'intermédiaire d'au moins trois points articulés (17) placés sur la zone périphérique extérieure de l'élément optique (18, 21). Cet élément optique (18, 21) est maintenu par liaison de force par l'intermédiaire des points articulés (17) dans au moins une direction sous l'action d'éléments élastiques (14, 15, 16), les éléments élastiques pour chaque point articulé (17) se trouvant dans un dispositif de fixation (1) pourvu d'un corps de support (2). Ces dispositifs de fixation (1) maintiennent l'élément optique de manière statique sur le support (6).
EP06805630A 2005-07-01 2006-06-30 Ensemble servant a fixer un composant optique Withdrawn EP1899756A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69643205P 2005-07-01 2005-07-01
PCT/EP2006/006353 WO2007017013A2 (fr) 2005-07-01 2006-06-30 Ensemble servant a fixer un composant optique

Publications (1)

Publication Number Publication Date
EP1899756A2 true EP1899756A2 (fr) 2008-03-19

Family

ID=37592570

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06805630A Withdrawn EP1899756A2 (fr) 2005-07-01 2006-06-30 Ensemble servant a fixer un composant optique

Country Status (4)

Country Link
US (2) US20080144199A1 (fr)
EP (1) EP1899756A2 (fr)
JP (1) JP4934131B2 (fr)
WO (1) WO2007017013A2 (fr)

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DE102007063305A1 (de) * 2007-12-27 2009-07-02 Carl Zeiss Smt Ag Optische Einrichtung mit einer Federeinrichtung mit einem Bereich konstanter Federkraft
US8036502B2 (en) * 2008-04-17 2011-10-11 Jds Uniphase Corporation Stress free mounting of optical bench for WSS
DE102008036574A1 (de) * 2008-07-31 2010-02-04 Carl Zeiss Laser Optics Gmbh Vorrichtung zum Lagern eines optischen Elements
DE102009037133B4 (de) 2009-07-31 2013-01-31 Carl Zeiss Laser Optics Gmbh Haltevorrichtung für ein optisches Element
DE102009037135B4 (de) 2009-07-31 2013-07-04 Carl Zeiss Laser Optics Gmbh Haltevorrichtung für ein optisches Element
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US9314980B2 (en) * 2013-03-19 2016-04-19 Goodrich Corporation High correctability deformable mirror
JP5848470B2 (ja) * 2015-02-05 2016-01-27 カール・ツァイス・エスエムティー・ゲーエムベーハー 寄生負荷最小化光学素子モジュール
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Also Published As

Publication number Publication date
US20090284849A1 (en) 2009-11-19
WO2007017013A3 (fr) 2008-05-02
JP4934131B2 (ja) 2012-05-16
WO2007017013A2 (fr) 2007-02-15
US7920344B2 (en) 2011-04-05
US20080144199A1 (en) 2008-06-19
JP2008545152A (ja) 2008-12-11

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