WO2007017013A3 - Anordnung zur lagerung eines optischen bauelements - Google Patents

Anordnung zur lagerung eines optischen bauelements Download PDF

Info

Publication number
WO2007017013A3
WO2007017013A3 PCT/EP2006/006353 EP2006006353W WO2007017013A3 WO 2007017013 A3 WO2007017013 A3 WO 2007017013A3 EP 2006006353 W EP2006006353 W EP 2006006353W WO 2007017013 A3 WO2007017013 A3 WO 2007017013A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical element
mounting
arrangement
optical component
outer peripheral
Prior art date
Application number
PCT/EP2006/006353
Other languages
English (en)
French (fr)
Other versions
WO2007017013A2 (de
Inventor
Armin Schoeppach
Christian Zengerling
Original Assignee
Zeiss Carl Smt Ag
Armin Schoeppach
Christian Zengerling
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Smt Ag, Armin Schoeppach, Christian Zengerling filed Critical Zeiss Carl Smt Ag
Priority to JP2008518735A priority Critical patent/JP4934131B2/ja
Priority to EP06805630A priority patent/EP1899756A2/de
Publication of WO2007017013A2 publication Critical patent/WO2007017013A2/de
Priority to US11/959,914 priority patent/US20080144199A1/en
Publication of WO2007017013A3 publication Critical patent/WO2007017013A3/de
Priority to US12/506,450 priority patent/US7920344B2/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/004—Manual alignment, e.g. micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1824—Manual alignment

Abstract

Anordnung zur Lagerung eines einen äußeren Umfangsbereich aufweisenden optischen Elements (18, 21), insbesondere einer Linse oder eines Spiegels, relativ zu einem Träger (6) über wenigstens drei am äußeren Umfangsbereich des optischen Elements (18, 21) angeordnete Anlenkstellen (17). Das optische Element (18, 21) ist über die Anlenkstellen (17) in wenigstens einer Richtung durch elastisch federnde Elemente (14, 15, 16) kraftschlüssig gehalten, wobei sich die elastisch federnden Elemente für jede Anlenkstelle (17) in einer Lagereinrichtung (1) mit einem Trägerkörper (2) befinden. Die Lagereinrichtungen (1) halten das optische Element statisch bestimmt am Träger (6).
PCT/EP2006/006353 2005-07-01 2006-06-30 Anordnung zur lagerung eines optischen bauelements WO2007017013A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008518735A JP4934131B2 (ja) 2005-07-01 2006-06-30 光学要素の支持装置
EP06805630A EP1899756A2 (de) 2005-07-01 2006-06-30 Anordnung zur lagerung eines optischen bauelements
US11/959,914 US20080144199A1 (en) 2005-07-01 2007-12-19 Arrangement for mounting an optical component
US12/506,450 US7920344B2 (en) 2005-07-01 2009-07-21 Arrangement for mounting an optical element

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69643205P 2005-07-01 2005-07-01
US60/696,432 2005-07-01

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/959,914 Continuation US20080144199A1 (en) 2005-07-01 2007-12-19 Arrangement for mounting an optical component

Publications (2)

Publication Number Publication Date
WO2007017013A2 WO2007017013A2 (de) 2007-02-15
WO2007017013A3 true WO2007017013A3 (de) 2008-05-02

Family

ID=37592570

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/006353 WO2007017013A2 (de) 2005-07-01 2006-06-30 Anordnung zur lagerung eines optischen bauelements

Country Status (4)

Country Link
US (2) US20080144199A1 (de)
EP (1) EP1899756A2 (de)
JP (1) JP4934131B2 (de)
WO (1) WO2007017013A2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5128665B2 (ja) * 2007-08-23 2013-01-23 カール・ツァイス・エスエムティー・ゲーエムベーハー 寄生負荷最小化光学素子モジュール
DE102007047109A1 (de) 2007-10-01 2009-04-09 Carl Zeiss Smt Ag Optisches System, insbesondere Projektionsobjektiv der Mikrolithographie
DE102007063305A1 (de) * 2007-12-27 2009-07-02 Carl Zeiss Smt Ag Optische Einrichtung mit einer Federeinrichtung mit einem Bereich konstanter Federkraft
US8036502B2 (en) * 2008-04-17 2011-10-11 Jds Uniphase Corporation Stress free mounting of optical bench for WSS
DE102008036574A1 (de) * 2008-07-31 2010-02-04 Carl Zeiss Laser Optics Gmbh Vorrichtung zum Lagern eines optischen Elements
DE102009037135B4 (de) 2009-07-31 2013-07-04 Carl Zeiss Laser Optics Gmbh Haltevorrichtung für ein optisches Element
DE102009037133B4 (de) 2009-07-31 2013-01-31 Carl Zeiss Laser Optics Gmbh Haltevorrichtung für ein optisches Element
DE102010028941B4 (de) * 2010-05-12 2012-03-22 Carl Zeiss Smt Gmbh Vorrichtung für eine optische Anordnung und Verfahren zum Positionieren eines optischen Elements einer optischen Anordnung
DE102011114123A1 (de) * 2010-09-29 2012-04-05 Carl Zeiss Smt Gmbh System zur Ausrichtung eines optischen Elements und Verfahren hierfür
US9314980B2 (en) * 2013-03-19 2016-04-19 Goodrich Corporation High correctability deformable mirror
JP5848470B2 (ja) * 2015-02-05 2016-01-27 カール・ツァイス・エスエムティー・ゲーエムベーハー 寄生負荷最小化光学素子モジュール
US11056803B2 (en) * 2017-09-12 2021-07-06 Lumentum Operations Llc Spring clamp for optics
DE102021200131A1 (de) 2021-01-11 2022-07-14 Carl Zeiss Smt Gmbh Baugruppe mit einem Entkopplungsgelenk zur mechanischen Lagerung eines Elements

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2937571A (en) * 1957-10-08 1960-05-24 Ernest B Thompson Optical lens mount
US4268123A (en) * 1979-02-26 1981-05-19 Hughes Aircraft Company Kinematic mount
EP1081521A2 (de) * 1999-08-31 2001-03-07 Nikon Corporation Kinematische Linsenhalterung
US20020021503A1 (en) * 2000-06-17 2002-02-21 Karlfrid Osterried Device for mounting an optical element, for example a lens element in a lens
US6400516B1 (en) * 2000-08-10 2002-06-04 Nikon Corporation Kinematic optical mounting
EP1326114A1 (de) * 2000-08-25 2003-07-09 Nikon Corporation Haltevorrichtung für optische elemente
US20030162484A1 (en) * 2002-02-22 2003-08-28 Nickon Corporation Devices and methods for holding an optical element with reduced stress in an optical column and while performing an out-of-column procedure on the element
US20030234989A1 (en) * 2002-06-24 2003-12-25 Nikon Corporation Optical-element mountings exhibiting reduced deformation of optical elements held thereby

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4929054A (en) * 1986-04-28 1990-05-29 The Perkin-Elmer Corporation Mounting for high resolution projection lenses
US5428482A (en) * 1991-11-04 1995-06-27 General Signal Corporation Decoupled mount for optical element and stacked annuli assembly
DE19825716A1 (de) * 1998-06-09 1999-12-16 Zeiss Carl Fa Baugruppe aus optischem Element und Fassung
DE19957398A1 (de) 1999-11-29 2001-05-31 Zeiss Carl Verfahren zum Richten der Auflageflächen von Auflagegliedern für optische Elemente
EP1744193A1 (de) * 2000-08-18 2007-01-17 Nikon Corporation Halter für ein optisches Element mit einem Antriebsmechanismus, der die Bewegung des optischen Elements entlang dreier Koordinatenachsen erlaubt
DE10115914A1 (de) 2001-03-30 2002-10-02 Zeiss Carl Vorrichtung zur Lagerung eines optischen Elementes in einer Optik
US6873478B2 (en) 2002-06-21 2005-03-29 Nikon Corporation Kinematic lens mount with reduced clamping force

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2937571A (en) * 1957-10-08 1960-05-24 Ernest B Thompson Optical lens mount
US4268123A (en) * 1979-02-26 1981-05-19 Hughes Aircraft Company Kinematic mount
EP1081521A2 (de) * 1999-08-31 2001-03-07 Nikon Corporation Kinematische Linsenhalterung
US20020021503A1 (en) * 2000-06-17 2002-02-21 Karlfrid Osterried Device for mounting an optical element, for example a lens element in a lens
US6400516B1 (en) * 2000-08-10 2002-06-04 Nikon Corporation Kinematic optical mounting
EP1326114A1 (de) * 2000-08-25 2003-07-09 Nikon Corporation Haltevorrichtung für optische elemente
US20030162484A1 (en) * 2002-02-22 2003-08-28 Nickon Corporation Devices and methods for holding an optical element with reduced stress in an optical column and while performing an out-of-column procedure on the element
US20030234989A1 (en) * 2002-06-24 2003-12-25 Nikon Corporation Optical-element mountings exhibiting reduced deformation of optical elements held thereby

Also Published As

Publication number Publication date
EP1899756A2 (de) 2008-03-19
WO2007017013A2 (de) 2007-02-15
JP4934131B2 (ja) 2012-05-16
US20080144199A1 (en) 2008-06-19
JP2008545152A (ja) 2008-12-11
US20090284849A1 (en) 2009-11-19
US7920344B2 (en) 2011-04-05

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