EP1868269B1 - Ensemble d'électrodes - Google Patents

Ensemble d'électrodes Download PDF

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Publication number
EP1868269B1
EP1868269B1 EP06012197A EP06012197A EP1868269B1 EP 1868269 B1 EP1868269 B1 EP 1868269B1 EP 06012197 A EP06012197 A EP 06012197A EP 06012197 A EP06012197 A EP 06012197A EP 1868269 B1 EP1868269 B1 EP 1868269B1
Authority
EP
European Patent Office
Prior art keywords
electrode arrangement
test electrodes
electrode
electrodes
spacings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP06012197A
Other languages
German (de)
English (en)
Other versions
EP1868269A1 (fr
Inventor
Eckhard Prinz
Peter Palm
Frank FÖRSTER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Softal Elektronik GmbH
Softal Electronic Erik Blumenfeld GmbH and Co KG
Original Assignee
Softal Elektronik GmbH
Softal Electronic Erik Blumenfeld GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Softal Elektronik GmbH, Softal Electronic Erik Blumenfeld GmbH and Co KG filed Critical Softal Elektronik GmbH
Priority to DK06012197T priority Critical patent/DK1868269T3/da
Priority to EP06012197A priority patent/EP1868269B1/fr
Priority to AT06012197T priority patent/ATE407468T1/de
Priority to DE502006001508T priority patent/DE502006001508D1/de
Priority to PCT/EP2007/004851 priority patent/WO2007144075A1/fr
Priority to US12/303,454 priority patent/US7859180B2/en
Publication of EP1868269A1 publication Critical patent/EP1868269A1/fr
Application granted granted Critical
Publication of EP1868269B1 publication Critical patent/EP1868269B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge

Definitions

  • the invention relates to an electrode arrangement as a high-voltage electrode for the continuous plasma treatment or plasma coating of sheet material having a plurality of transverse to a transport direction of the web material arranged substantially parallel to each other knife electrodes.
  • Such electrode arrangements are known and are widely used in the plasma treatment or plasma coating of usually electrically non-conductive sheet material, e.g. Plastic film or the like., Used. These electrodes are typically used as high-voltage electrodes with a transport roller opposite the free ends of the blade electrodes and designed as a counterelectrode.
  • the plasma discharge between knife electrodes in the gas gap to the counter electrode is ignited, and the material plasma-treated or -coated.
  • a plasma treatment is typically carried out without the use of precursors, in which case due to the ignited plasma only a change in the surface states of the treated material takes place in order to improve, for example, the adhesion of a later applied coating material or the like.
  • a plasma coating can be carried out with such electrodes, in which case precursors are introduced into the gap or space formed between the electrodes and the web material, which supply the starting materials for the coating.
  • knife electrodes are elongated, blade-like electrodes, which are generally fixed with one of their longitudinal edges in a high-voltage arrangement and form the actual discharge surface with their other longitudinal edge, such as, for example EP-A-0 095 051 known.
  • the blade electrodes are arranged at the same distance between adjacent electrodes, that is, equidistant.
  • the distances between adjacent blade electrodes at the edge of the electrode assembly are greater than in the center thereof.
  • those regions are meant which, viewed in a transport direction of the web material, lie at the front or rear end of the electrode arrangement (cf claim 2).
  • the blade electrodes are preferably arranged according to the specifications of claim 6.
  • the subject of the invention is a device for the continuous plasma treatment or plasma coating of web material with the features of claim 7. It is essential here that the device contains an electrode arrangement as described above.
  • Fig. 1 is a provided with an inventive electrode assembly 1 plasma treatment or coating device 10 in sections and shown schematically.
  • the electrode assembly 1 is connected via a separate high voltage supply with insulators 11 relative to the rest of the device 10.
  • a treatment section 12 Opposite a treatment section 12, not shown here in detail, is a transport roller designed as a counterelectrode, with which the web material to be treated or to be coated is guided through the intermediate space between this transport roller and the electrode arrangement 1.
  • the plasma - in Fig. 1 not shown - is ignited between plasma treatment and plasma coating apparatus 10 and transport roller.
  • the electrode assembly 1 is shown enlarged again. It contains an electrode holder 2 and a plurality, in this embodiment a total of 14, knife electrodes 3. These knife electrodes are constructed in bones in cross section with integrally formed on both longitudinal edges, in cross-section substantially circular or part-circular thickening.
  • the second, formed on the free-standing edge of the blade electrode thickening forms a discharge bar 5. This discharge bar 5 is thicker or thicker in cross-section than the adjoining blade 6 of the blade electrode 3.
  • the diameter of the discharge strip 5 does not have to be the same in the electrode arrangement, as a result of which strong sliding discharges at the edge and thus at the front or rear end of the electrode arrangement 1 are minimized.
  • the individual, adjacent blade electrodes 3 are arranged at variable distances from one another, wherein the distances between adjacent blade electrodes 3 at the outer edges of the electrode assembly 1 are greater than the spacings of adjacent blade electrodes 3 in the center of the assembly 1.
  • the inventive structure of the electrode assembly 1 with substantially parallel to each other, in the transport direction of the web material to be treated or coated successively arranged knife electrodes 3 at different distances creates improved homogeneity and quality of the performed with this plasma treatment or plasma coating under this electrode assembly. 1 on the formed as a counter electrode transport roller guided through web material. This could be confirmed experimentally.
  • the formation of the discharge strips 5 with the circular or partial circular shape in cross section also resulted in improved quality of the plasma coating or treatment compared to known discharge edge shapes.
  • the shape of the electrode assembly 1 shown in the embodiment and the distances a to e indicated therein are not limiting, various different shapes and spacing distributions may instead be adhered to.
  • the features essential to the invention are given in the claims, which are intended to define the scope of the invention or of the protection.

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Plasma Technology (AREA)
  • Ceramic Capacitors (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Surgical Instruments (AREA)
  • Coating Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electron Tubes For Measurement (AREA)
  • Secondary Cells (AREA)

Claims (7)

  1. Ensemble d'électrodes sous forme d'électrodes à haute tension pour le traitement au plasma ou le revêtement par plasma continu de matériau de bande comprenant une pluralité d'électrodes de couteau (3) disposées transversalement à une direction de transport du matériau de bande et sensiblement parallèles entre elles, caractérisé en ce que les espacements (a-e) d'électrodes de couteau (3) voisines sont différents.
  2. Ensemble d'électrodes selon la revendication 1, caractérisé en ce que les espacements (a) d'électrodes de couteau (3) voisines sur le bord de l'ensemble d'électrodes (1) sont supérieurs aux espacements (e) d'électrodes de couteau (3) voisines dans leur centre.
  3. Ensemble d'électrodes selon la revendication 2, caractérisé en ce que les espacements (a) maximum entre des électrodes de couteau (3) voisines sur le bord de l'ensemble d'électrodes (1) sont compris entre 8 et 12 mm et les espacements (e) minimum entre deux électrodes de couteau (3) voisines au centre de l'ensemble d'électrodes (1) se situent entre 2 et 6 mm.
  4. Ensemble d'électrodes selon l'une quelconque des revendications précédentes, caractérisé en ce que les arêtes disposées librement des électrodes de couteau (3) présentent une baguette de décharge (5) sensiblement en forme de cercle ou de cercle partiel en section et conçue de préférence épaissie par rapport à la lame (6) se raccordant à ces électrodes.
  5. Ensemble d'électrodes selon la revendication 4, caractérisé en ce que les arêtes en forme de cercle ou de cercle partiel des électrodes de couteau présentent différents rayons de courbure à l'intérieur d'un ensemble d'électrodes.
  6. Ensemble d'électrodes selon l'une quelconque des revendications précédentes, caractérisé en ce qu'une ligne de liaison est agencée le long des arêtes libres des électrodes de couteau (3), incurvée dans le sens de transport en fonction du contour extérieur d'un cylindre de transport formant une contre-électrode et prévu pour l'agencement sur l'ensemble d'électrodes (1).
  7. Dispositif pour le traitement au plasma ou le revêtement par plasma continu de matériau en bande avec un ensemble d'électrodes (1) selon l'une quelconque des revendications 1 à 6 et avec un cylindre de transport faisant face à l'agencement et formant une contre-électrode.
EP06012197A 2006-06-13 2006-06-13 Ensemble d'électrodes Active EP1868269B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DK06012197T DK1868269T3 (da) 2006-06-13 2006-06-13 Elektrodeanordning
EP06012197A EP1868269B1 (fr) 2006-06-13 2006-06-13 Ensemble d'électrodes
AT06012197T ATE407468T1 (de) 2006-06-13 2006-06-13 Elektrodenanordnung
DE502006001508T DE502006001508D1 (de) 2006-06-13 2006-06-13 Elektrodenanordnung
PCT/EP2007/004851 WO2007144075A1 (fr) 2006-06-13 2007-06-01 Agencement d'électrodes
US12/303,454 US7859180B2 (en) 2006-06-13 2007-06-01 Electrode arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06012197A EP1868269B1 (fr) 2006-06-13 2006-06-13 Ensemble d'électrodes

Publications (2)

Publication Number Publication Date
EP1868269A1 EP1868269A1 (fr) 2007-12-19
EP1868269B1 true EP1868269B1 (fr) 2008-09-03

Family

ID=36930326

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06012197A Active EP1868269B1 (fr) 2006-06-13 2006-06-13 Ensemble d'électrodes

Country Status (6)

Country Link
US (1) US7859180B2 (fr)
EP (1) EP1868269B1 (fr)
AT (1) ATE407468T1 (fr)
DE (1) DE502006001508D1 (fr)
DK (1) DK1868269T3 (fr)
WO (1) WO2007144075A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9831070B1 (en) 2017-06-15 2017-11-28 Enercon Industries Corporation Surface treater with expansion electrode arrangement

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3133193A (en) * 1962-01-22 1964-05-12 Du Pont Corona discharge apparatus for the surface treatment of plastic resins
CA1042605A (fr) 1977-06-07 1978-11-21 Evin Industries Ltd. Survetements
DE3219538A1 (de) * 1982-05-25 1983-12-01 Softal Electronic GmbH, 2000 Hamburg Vorrichtung zur elektrischen vorbehandlung von nichtleitenden folien
DE3622737C1 (de) * 1986-07-05 1987-10-08 Klaus Kalwar Verfahren zur Korona-Behandlung von bahnfoermigen Materialien sowie Vorrichtung zur Durchfuehrung des Verfahrens
DE9102438U1 (fr) * 1991-03-01 1992-06-25 Roehm Gmbh, 6100 Darmstadt, De
AU2001247685A1 (en) * 2000-03-30 2001-10-15 Tokyo Electron Limited Method of and apparatus for tunable gas injection in a plasma processing system

Also Published As

Publication number Publication date
ATE407468T1 (de) 2008-09-15
DE502006001508D1 (de) 2008-10-16
WO2007144075A1 (fr) 2007-12-21
DK1868269T3 (da) 2009-01-12
EP1868269A1 (fr) 2007-12-19
US20090200911A1 (en) 2009-08-13
US7859180B2 (en) 2010-12-28

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