EP1868269B1 - Electrode assembly - Google Patents

Electrode assembly Download PDF

Info

Publication number
EP1868269B1
EP1868269B1 EP06012197A EP06012197A EP1868269B1 EP 1868269 B1 EP1868269 B1 EP 1868269B1 EP 06012197 A EP06012197 A EP 06012197A EP 06012197 A EP06012197 A EP 06012197A EP 1868269 B1 EP1868269 B1 EP 1868269B1
Authority
EP
European Patent Office
Prior art keywords
electrode arrangement
test electrodes
electrode
electrodes
spacings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP06012197A
Other languages
German (de)
French (fr)
Other versions
EP1868269A1 (en
Inventor
Eckhard Prinz
Peter Palm
Frank FÖRSTER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Softal Elektronik GmbH
Softal Electronic Erik Blumenfeld GmbH and Co KG
Original Assignee
Softal Elektronik GmbH
Softal Electronic Erik Blumenfeld GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Softal Elektronik GmbH, Softal Electronic Erik Blumenfeld GmbH and Co KG filed Critical Softal Elektronik GmbH
Priority to DE502006001508T priority Critical patent/DE502006001508D1/en
Priority to EP06012197A priority patent/EP1868269B1/en
Priority to DK06012197T priority patent/DK1868269T3/en
Priority to AT06012197T priority patent/ATE407468T1/en
Priority to US12/303,454 priority patent/US7859180B2/en
Priority to PCT/EP2007/004851 priority patent/WO2007144075A1/en
Publication of EP1868269A1 publication Critical patent/EP1868269A1/en
Application granted granted Critical
Publication of EP1868269B1 publication Critical patent/EP1868269B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge

Definitions

  • the invention relates to an electrode arrangement as a high-voltage electrode for the continuous plasma treatment or plasma coating of sheet material having a plurality of transverse to a transport direction of the web material arranged substantially parallel to each other knife electrodes.
  • Such electrode arrangements are known and are widely used in the plasma treatment or plasma coating of usually electrically non-conductive sheet material, e.g. Plastic film or the like., Used. These electrodes are typically used as high-voltage electrodes with a transport roller opposite the free ends of the blade electrodes and designed as a counterelectrode.
  • the plasma discharge between knife electrodes in the gas gap to the counter electrode is ignited, and the material plasma-treated or -coated.
  • a plasma treatment is typically carried out without the use of precursors, in which case due to the ignited plasma only a change in the surface states of the treated material takes place in order to improve, for example, the adhesion of a later applied coating material or the like.
  • a plasma coating can be carried out with such electrodes, in which case precursors are introduced into the gap or space formed between the electrodes and the web material, which supply the starting materials for the coating.
  • knife electrodes are elongated, blade-like electrodes, which are generally fixed with one of their longitudinal edges in a high-voltage arrangement and form the actual discharge surface with their other longitudinal edge, such as, for example EP-A-0 095 051 known.
  • the blade electrodes are arranged at the same distance between adjacent electrodes, that is, equidistant.
  • the distances between adjacent blade electrodes at the edge of the electrode assembly are greater than in the center thereof.
  • those regions are meant which, viewed in a transport direction of the web material, lie at the front or rear end of the electrode arrangement (cf claim 2).
  • the blade electrodes are preferably arranged according to the specifications of claim 6.
  • the subject of the invention is a device for the continuous plasma treatment or plasma coating of web material with the features of claim 7. It is essential here that the device contains an electrode arrangement as described above.
  • Fig. 1 is a provided with an inventive electrode assembly 1 plasma treatment or coating device 10 in sections and shown schematically.
  • the electrode assembly 1 is connected via a separate high voltage supply with insulators 11 relative to the rest of the device 10.
  • a treatment section 12 Opposite a treatment section 12, not shown here in detail, is a transport roller designed as a counterelectrode, with which the web material to be treated or to be coated is guided through the intermediate space between this transport roller and the electrode arrangement 1.
  • the plasma - in Fig. 1 not shown - is ignited between plasma treatment and plasma coating apparatus 10 and transport roller.
  • the electrode assembly 1 is shown enlarged again. It contains an electrode holder 2 and a plurality, in this embodiment a total of 14, knife electrodes 3. These knife electrodes are constructed in bones in cross section with integrally formed on both longitudinal edges, in cross-section substantially circular or part-circular thickening.
  • the second, formed on the free-standing edge of the blade electrode thickening forms a discharge bar 5. This discharge bar 5 is thicker or thicker in cross-section than the adjoining blade 6 of the blade electrode 3.
  • the diameter of the discharge strip 5 does not have to be the same in the electrode arrangement, as a result of which strong sliding discharges at the edge and thus at the front or rear end of the electrode arrangement 1 are minimized.
  • the individual, adjacent blade electrodes 3 are arranged at variable distances from one another, wherein the distances between adjacent blade electrodes 3 at the outer edges of the electrode assembly 1 are greater than the spacings of adjacent blade electrodes 3 in the center of the assembly 1.
  • the inventive structure of the electrode assembly 1 with substantially parallel to each other, in the transport direction of the web material to be treated or coated successively arranged knife electrodes 3 at different distances creates improved homogeneity and quality of the performed with this plasma treatment or plasma coating under this electrode assembly. 1 on the formed as a counter electrode transport roller guided through web material. This could be confirmed experimentally.
  • the formation of the discharge strips 5 with the circular or partial circular shape in cross section also resulted in improved quality of the plasma coating or treatment compared to known discharge edge shapes.
  • the shape of the electrode assembly 1 shown in the embodiment and the distances a to e indicated therein are not limiting, various different shapes and spacing distributions may instead be adhered to.
  • the features essential to the invention are given in the claims, which are intended to define the scope of the invention or of the protection.

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Plasma Technology (AREA)
  • Ceramic Capacitors (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Coating Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Surgical Instruments (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Electron Tubes For Measurement (AREA)
  • Secondary Cells (AREA)

Abstract

The arrangement has multiple blade electrodes (3) arranged at an angle to a direction of transport of the strip material and placed parallel to one another. The distances (a-e) between adjacent blade electrodes are different. The distances between adjacent blade electrodes on the edge of the electrode arrangement (1) are greater than the distances of adjacent blade electrodes in its centre. An independent claim is also included for a device for continuous plasma treatment or plasma coating of strip material.

Description

Die Erfindung betrifft eine Elektrodenanordnung als Hochspannungselektrode für die kontinuierliche Plasmabehandlung oder Plasmabeschichtung von Bahnmaterial mit einer Mehrzahl von quer zu einer Transportrichtung des Bahnmaterials angeordneten, im wesentlichen parallel zueinander stehenden Messerelektroden.The invention relates to an electrode arrangement as a high-voltage electrode for the continuous plasma treatment or plasma coating of sheet material having a plurality of transverse to a transport direction of the web material arranged substantially parallel to each other knife electrodes.

Derartige Elektrodenanordnungen sind bekannt und werden vielfältig in der Plasmabehandlung oder Plasmabeschichtung von in der Regel elektrisch nicht leitendem Bahnmaterial, z.B. Kunststofffolie oder dgl., eingesetzt. Diese Elektroden werden typischerweise als Hochspannungselektroden verwendet mit einer den freien Enden der Messerelektroden gegenüberliegenden, als Gegenelektrode ausgebildeten Transportwalze.Such electrode arrangements are known and are widely used in the plasma treatment or plasma coating of usually electrically non-conductive sheet material, e.g. Plastic film or the like., Used. These electrodes are typically used as high-voltage electrodes with a transport roller opposite the free ends of the blade electrodes and designed as a counterelectrode.

Durch die Spannungsdifferenz wird die Plasmaentladung zwischen Messerelektroden im Gasspalt zur Gegenelektrode gezündet, und das Material plasmabehandelt bzw. -beschichtet.Due to the voltage difference, the plasma discharge between knife electrodes in the gas gap to the counter electrode is ignited, and the material plasma-treated or -coated.

Eine Plasmabehandlung erfolgt dabei typischerweise ohne den Einsatz von Precursoren, wobei hier aufgrund des gezündeten Plasmas lediglich eine Veränderung der Oberflächenzustände des behandelten Materials erfolgt, um beispielsweise die Adhäsion eines später aufgebrachten Beschichtungsmaterials oder dgl. zu verbessern. In gleicher Art und Weise kann auch eine Plasmabeschichtung mit solchen Elektroden durchgeführt werden, wobei hier Precursoren in den zwischen den Elektroden und dem Bahnmaterial gebildeten Spalt bzw. Raum eingebracht werden, die die Ausgangsstoffe für die Beschichtung liefern.A plasma treatment is typically carried out without the use of precursors, in which case due to the ignited plasma only a change in the surface states of the treated material takes place in order to improve, for example, the adhesion of a later applied coating material or the like. In the same way, a plasma coating can be carried out with such electrodes, in which case precursors are introduced into the gap or space formed between the electrodes and the web material, which supply the starting materials for the coating.

Bei den sogenannten Messerelektroden handelt es sich um langgestreckte, klingenähnliche Elektroden, die in der Regel mit einer ihrer Längskanten in einer Hochspannungsanordnung festgelegt sind und mit ihrer anderen Längskante die eigentliche Entladungsfläche bilden, wie z.B aus EP-A-0 095 051 bekannt.The so-called knife electrodes are elongated, blade-like electrodes, which are generally fixed with one of their longitudinal edges in a high-voltage arrangement and form the actual discharge surface with their other longitudinal edge, such as, for example EP-A-0 095 051 known.

Bei den bisher bekannten vergleichbaren Elektrodenanordnungen werden die Messerelektroden in gleichem Abstand zwischen benachbarten Elektroden, also äquidistant, angeordnet.In the previously known comparable electrode arrangements, the blade electrodes are arranged at the same distance between adjacent electrodes, that is, equidistant.

In von der Anmelderin durchgeführten Versuchen hat sich gezeigt, dass mit solchen Elektrodenanordnungen erzielte Plasmabehandlungs- bzw. Plasmabeschichtungsergebnisse hinsichtlich der Homogenität noch verbesserungswürdig sind. Insbesondere stellen Gleitentladungen entlang der Materialoberfläche vielfach eine starke, inhomogene, thermische Belastung des Materials dar, die den Einsatz eines Elektrodensystems oft gegrenzt. Entsprechend stellte sich den Erfindern die Aufgabe, die bekannten Elektrodenanordnungen zu verbessern, um ein verbessertes Behandlungs- bzw. Beschichtungsergebnis auf dem plasmabehandelten bzw. plasmabeschichteten Bahnmaterial zu erzielen.In tests carried out by the Applicant, it has been found that plasma treatment or plasma coating results achieved with such electrode arrangements are in need of improvement in terms of homogeneity. In particular, sliding discharges along the material surface often represent a strong, inhomogeneous, thermal load on the material, which often limits the use of an electrode system. Accordingly, the inventors had the task of improving the known electrode arrangements in order to achieve an improved treatment or coating result on the plasma-treated or plasma-coated web material.

Am Ende einer langen und ausgedehnten Versuchsreihe hat sich überraschend herausgestellt, dass sich eine solchermaßen angestrebte Verbesserung dann erzielen lässt, wenn wie im kennzeichnenden Teil des Anspruches 1 angegeben die Abstände benachbarter Messerelektroden anders als im bekannten Stand der Technik unterschiedlich sind. Die physikalische Ursache für die beobachtete Verbesserung ist bisher nicht vollständig geklärt und noch Gegenstand weitergehender Untersuchungen. Entscheidend für die Verbesserung scheint jedoch zu sein, dass die neue Anordnung der Messerelektroden die Vorteile eines großen Messerabstandes hinsichtlich der Problematik der Gleitentladungen mit den Vorteilen eines geringeren Messerabstandes hinsichtlich der spezifischen elektrischen Belastbarkeit kombiniert.At the end of a long and extensive series of experiments, it has surprisingly been found that such an improvement can be achieved if, as indicated in the characterizing part of claim 1, the distances between adjacent blade electrodes are different than in the known prior art. The physical cause of the observed improvement is not yet fully understood and is still the subject of further investigations. Decisive for the improvement, however, seems to be that the new arrangement of the blade electrodes combines the advantages of a large blade spacing with regard to the problem of sliding discharges with the advantages of a smaller blade spacing with respect to the specific electrical load capacity.

Bevorzugt sind die Abstände benachbarter Messerelektroden am Rand der Elektrodenanordnung größer als in deren Zentrum. Mit Rand der Elektrodenanordnung sind dabei diejenigen Bereiche gemeint, die in einer Transportrichtung der Bahnmaterials gesehen am vorderen bzw. hinteren Ende der Elektrodenanordnung liegen (vgl. Anspruch 2).Preferably, the distances between adjacent blade electrodes at the edge of the electrode assembly are greater than in the center thereof. With the edge of the electrode arrangement, those regions are meant which, viewed in a transport direction of the web material, lie at the front or rear end of the electrode arrangement (cf claim 2).

Als geeignete Abstände zwischen den benachbarten Messerelektroden haben sich am Rand der Elektrodenanordnung Abstände zwischen 8 und 12 mm, im Zentrum der Elektrodenanordnung zwischen 2 und 6 mm erwiesen (Anspruch 3).Distances between 8 and 12 mm, at the center of the electrode arrangement between 2 and 6 mm, have proven to be suitable spacings between the adjacent measuring electrodes at the edge of the electrode arrangement (claim 3).

Eine weitere Verbesserung des Entladungsbildes der Elektrodenanordnung bzw. der mit dieser zu erzielenden Plasmabehandlungs- bzw. Plasmabeschichtungsergebnisse ließ sich erzielen, wenn die freistehenden Kanten der Messerelektroden entsprechend der in Anspruch 4 genannten vorteilhaften Weiterbildung mit im Querschnitt im wesentlichen kreis- bzw. teilkreisförmigen Entladungsleisten versehen waren. Diese Ausbildung der Entladungsleisten bei Messerelektroden, so hat sich herausgestellt, ergibt nicht nur bei der erfindungsgemäß mit Messerelektroden mit divergierenden Abständen versehenen Elektrodenanordnung, sondern auch bei solchen Elektrodenanordnungen mit Messerelektroden in äquidistanter Anordnung ein verbessertes Ergebnis. Die Ausbildung der Entladungskanten stellt insoweit und für sich genommen eine eigenständige Erfindung dar. Dabei müssen die Krümmungsradien der Entladungskanten nicht durchgehend gleich sein, sondern können im Gegenteil mit Vorteil innerhalb der Elektrodenanordnung differieren (vgl. Anspruch 5). So werden starke Gleitentladungen am Rand und somit am vorderen bzw. hinteren Ende der Elektrodenanordnung 1 minimiert.A further improvement of the discharge pattern of the electrode assembly or the plasma treatment or plasma coating results to be achieved with this could be achieved if the freestanding edges of the blade electrodes were provided in accordance with the advantageous development mentioned in claim 4 with substantially circular or part-circular discharge strips in cross-section , This training of the discharge strips at Messerelektroden, so has been found, not only results in the inventively provided with knife electrodes with diverging intervals electrode assembly, but also in such electrode assemblies with knife electrodes in equidistant arrangement an improved result. The formation of the discharge edges in this respect and taken by itself is an independent invention. The radii of curvature of the discharge edges need not be the same throughout, but on the contrary can advantageously differ within the electrode arrangement (see claim 5). Thus, strong sliding discharges are minimized at the edge and thus at the front or rear end of the electrode assembly 1.

Um einen gleich bleibenden Abstand zwischen den Entladungskanten der Messerelektroden und der Oberfläche der Plasma zu behandelnden bzw. Plasma zu beschichtenden Materialbahn beizubehalten, sind die Messerelektroden vorzugsweise entsprechend den Vorgaben des Anspruchs 6 angeordnet.In order to maintain a constant distance between the discharge edges of the blade electrodes and the surface of the plasma to be treated or plasma-coated material web, the blade electrodes are preferably arranged according to the specifications of claim 6.

Gegenstand der Erfindung ist schließlich noch eine Vorrichtung zur kontinuierlichen Plasmabehandlung oder Plasmabeschichtung von Bahnmaterial mit den Merkmalen des Anspruches 7. Hier ist wesentlich, dass die Vorrichtung eine wie oben beschriebene Elektrodenanordnung enthält.Finally, the subject of the invention is a device for the continuous plasma treatment or plasma coating of web material with the features of claim 7. It is essential here that the device contains an electrode arrangement as described above.

Weitere Vorteile und Merkmale der Erfindung ergeben sich aus der nachfolgenden Beschreibung eines Ausführungsbeispiels anhand der beigefügten Figuren. Dabei zeigen:

Fig. 1
eine schematische Ansicht einer erfindungsgemäßen Elektrodenanordnung der kontinuierlichen Plasmabehandlung bzw. -beschichtung von Bahnmaterial; und
Fig. 2
eine vergrößerte Darstellung der erfindungsgemäßen Elektrodenanordnung.
Further advantages and features of the invention will become apparent from the following description of an embodiment with reference to the accompanying figures. Showing:
Fig. 1
a schematic view of an electrode assembly according to the invention of the continuous plasma treatment or coating of sheet material; and
Fig. 2
an enlarged view of the electrode assembly according to the invention.

In Fig. 1 ist eine mit einer erfindungsgemäßen Elektrodenanordnung 1 versehene Plasmabehandlungs- bzw. -beschichtungsvorrichtung 10 in Ausschnitten und schematisch gezeigt. In dieser Vorrichtung ist in einem im wesentlichen geschlossenen Raum die Elektrodenanordnung 1 über eine mit Isolatoren 11 gegenüber der restlichen Vorrichtung 10 getrennte Hochspannungsversorgung angeschlossen. Gegenüber einer Behandlungsstrecke 12 liegt, hier nicht näher dargestellt, eine als Gegenelektrode ausgebildete Transportwalze, mit der das zu behandelnde bzw. zu beschichtende Bahnmaterial durch den Zwischenraum zwischen dieser Transportwalze und der Elektrodenanordnung 1 geführt wird. Das Plasma - in Fig. 1 nicht dargestellt - wird zwischen Plasmabehandlungs- bzw. Plasmabeschichtungsvorrichtung 10 und Transportwalze gezündet.In Fig. 1 is a provided with an inventive electrode assembly 1 plasma treatment or coating device 10 in sections and shown schematically. In this device, in a substantially closed space, the electrode assembly 1 is connected via a separate high voltage supply with insulators 11 relative to the rest of the device 10. Opposite a treatment section 12, not shown here in detail, is a transport roller designed as a counterelectrode, with which the web material to be treated or to be coated is guided through the intermediate space between this transport roller and the electrode arrangement 1. The plasma - in Fig. 1 not shown - is ignited between plasma treatment and plasma coating apparatus 10 and transport roller.

In Fig. 2 ist die Elektrodenanordnung 1 noch einmal vergrößert dargestellt. Sie enthält einen Elektrodenhalter 2 und eine Mehrzahl, in diesem Ausführungsbeispiel insgesamt 14, Messerelektroden 3. Diese Messerelektroden sind im Querschnitt knochenartig aufgebaut mit an beiden Längskanten angeformten, im Querschnitt im wesentlichen kreis- bzw. teilkreisförmigen Verdickungen. Die erste dieser Verdickungen 4, die an der in dem Elektrodenhalter 2 angeordneten Kante der Messerelektrode 3 ausgebildet ist, dient dem Halt der Messerelektrode 3 in dem Elektrodenhalter 2. Die zweite, an der freistehenden Kante der Messerelektrode ausgebildete Verdickung bildet eine Entladungsleiste 5. Diese Entladungsleiste 5 ist im Querschnitt dicker bzw. stärker ausgebildet als die sich daran anschließende Klinge 6 der Messerelektrode 3.In Fig. 2 the electrode assembly 1 is shown enlarged again. It contains an electrode holder 2 and a plurality, in this embodiment a total of 14, knife electrodes 3. These knife electrodes are constructed in bones in cross section with integrally formed on both longitudinal edges, in cross-section substantially circular or part-circular thickening. The first of these thickenings 4, which is formed on the arranged in the electrode holder 2 edge of the blade electrode 3, serves to hold the blade electrode 3 in the electrode holder 2. The second, formed on the free-standing edge of the blade electrode thickening forms a discharge bar 5. This discharge bar 5 is thicker or thicker in cross-section than the adjoining blade 6 of the blade electrode 3.

Der Durchmesser der Entladungsleiste 5 muss in der Elektrodenanordnung nicht gleich sein, wodurch starke Gleitentladungen am Rand und somit am vorderen bzw. hinteren Ende der Elektrodenanordnung 1 minimiert werden.The diameter of the discharge strip 5 does not have to be the same in the electrode arrangement, as a result of which strong sliding discharges at the edge and thus at the front or rear end of the electrode arrangement 1 are minimized.

Die einzelnen, benachbarten Messerelektroden 3 sind mit variablen Abständen zueinander angeordnet, wobei die Abstände zwischen benachbarten Messerelektroden 3 an den äußeren Rändern der Elektrodenanordnung 1 größer sind als die Abstände benachbarter Messerelektroden 3 im Zentrum der Anordnung 1.The individual, adjacent blade electrodes 3 are arranged at variable distances from one another, wherein the distances between adjacent blade electrodes 3 at the outer edges of the electrode assembly 1 are greater than the spacings of adjacent blade electrodes 3 in the center of the assembly 1.

In diesem Beispiel sind insgesamt fünf verschiedene Abstände vorgesehen und in der Figur mit den Ziffern a bis e bezeichnet, wobei die Abstände von a bis e jeweils kleiner werden. In einem Ausführungsbeispiel können die Abstände a bis e z.B. wie folgt gebildet sein:

  • a = 10 mm
  • b = 9 mm
  • c = 8 mm
  • d = 7 mm
  • e = 6 mm
In this example, a total of five different distances are provided and indicated in the figure with the numbers a to e, wherein the distances from a to e are each smaller. In one embodiment, the distances a to e may be formed, for example, as follows:
  • a = 10 mm
  • b = 9 mm
  • c = 8 mm
  • d = 7 mm
  • e = 6 mm

Der erfindungsgemäße Aufbau der Elektrodenanordnung 1 mit sich im wesentlichen parallel zueinander erstreckenden, in Transportrichtung des zu behandelnden bzw. zu beschichtenden Bahnmaterials hintereinander angeordneten Messerelektroden 3 in unterschiedlichem Abstand schafft eine verbesserte Homogenität und Qualität der mit dieser durchgeführten Plasmabehandlung bzw. Plasmabeschichtung des unter dieser Elektrodenanordnung 1 auf der als Gegenelektrode ausgebildeten Transportwalze hindurch geführten Bahnmaterials. Dies konnte experimentell bestätigt werden. Auch die Ausbildung der Entladungsleisten 5 mit der Kreis- bzw. Teilkreisform im Querschnitt ergab eine gegenüber bekannter Entladungskantenformen verbesserte Qualität der Plasmabeschichtung bzw. -behandlung.The inventive structure of the electrode assembly 1 with substantially parallel to each other, in the transport direction of the web material to be treated or coated successively arranged knife electrodes 3 at different distances creates improved homogeneity and quality of the performed with this plasma treatment or plasma coating under this electrode assembly. 1 on the formed as a counter electrode transport roller guided through web material. This could be confirmed experimentally. The formation of the discharge strips 5 with the circular or partial circular shape in cross section also resulted in improved quality of the plasma coating or treatment compared to known discharge edge shapes.

Die in dem Ausführungsbeispiel gezeigte Form der Elektrodenanordnung 1 und die dort angegebenen Abstände a bis e sind nicht beschränkend, es können stattdessen diverse unterschiedliche Formen und Abstandsverteilungen eingehalten werden. Die erfindungswesentlichen Merkmale sind in den Ansprüchen wiedergegeben, welche den Umfang der Erfindung bzw. des Schutzes definieren sollen.The shape of the electrode assembly 1 shown in the embodiment and the distances a to e indicated therein are not limiting, various different shapes and spacing distributions may instead be adhered to. The features essential to the invention are given in the claims, which are intended to define the scope of the invention or of the protection.

BezgugszeichenlisteBezgugszeichenliste

11
Elektrodenanordnungelectrode assembly
22
Elektrodenhalterelectrode holder
33
Messerelektrodediameter electrode
44
Verdickungthickening
55
Entladungsleistedischarge strip
66
Klingeblade
1010
Plasmabehandlungs- bzw. beschichtungsvorrichtungPlasma treatment or coating device
1111
Isolatorinsulator
1212
Behandlungsstrecketreatment section
aa
Abstanddistance
bb
Abstanddistance
cc
Abstanddistance
dd
Abstanddistance
ee
Abstanddistance

Claims (7)

  1. Electrode arrangement as a high voltage electrode for the continuous plasma treatment or plasma coating of sheet material with a plurality of mutually substantially parallel test electrodes (3) positioned transversely to a sheet material feed direction, characterized in that the spacings (a-e) between adjacent test electrodes (3) vary.
  2. Electrode arrangement according to claim 1, characterized in that the spacings (a) between adjacent test electrodes (3) at the edge of electrode arrangement (1) are greater than the spacings (e) of adjacent test electrodes (3) in the centre thereof.
  3. Electrode arrangement according to claim 2, characterized in that the maximum spacings (a) between adjacent test electrodes (3) at the edge of the electrode arrangement (1) are between 8 and 12 mm and the minimum spacings (e) between adjacent test electrodes (3) in the centre of the electrode arrangement (1) are between 2 and 6 mm.
  4. Electrode arrangement according to one of the preceding claims, characterized in that the free standing edges of the test electrodes (3) have a cross-sectionally substantially circular or pitch circular discharge strip (5), which is preferably thickened compared with the blade (6) connected thereto.
  5. Electrode arrangement according to claim 4, characterized in that the circular or pitch circular edges of the test electrodes have different radii of curvature within an electrode arrangement.
  6. Electrode arrangement according to one of the preceding claims, characterized in that a connecting line along the free standing edges of the test electrodes (3) is curved in the feed direction in accordance with the outer contour of a feed roller forming a counterelectrode and placed on electrode arrangement (1).
  7. Device for the continuous plasma treatment or plasma coating of sheet material with an electrode arrangement (1) according to one of the claims 1 to 6 and having a feed roller forming a counterelectrode facing the same.
EP06012197A 2006-06-13 2006-06-13 Electrode assembly Active EP1868269B1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE502006001508T DE502006001508D1 (en) 2006-06-13 2006-06-13 electrode assembly
EP06012197A EP1868269B1 (en) 2006-06-13 2006-06-13 Electrode assembly
DK06012197T DK1868269T3 (en) 2006-06-13 2006-06-13 Electrode arrangement
AT06012197T ATE407468T1 (en) 2006-06-13 2006-06-13 ELECTRODE ARRANGEMENT
US12/303,454 US7859180B2 (en) 2006-06-13 2007-06-01 Electrode arrangement
PCT/EP2007/004851 WO2007144075A1 (en) 2006-06-13 2007-06-01 Electrode arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06012197A EP1868269B1 (en) 2006-06-13 2006-06-13 Electrode assembly

Publications (2)

Publication Number Publication Date
EP1868269A1 EP1868269A1 (en) 2007-12-19
EP1868269B1 true EP1868269B1 (en) 2008-09-03

Family

ID=36930326

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06012197A Active EP1868269B1 (en) 2006-06-13 2006-06-13 Electrode assembly

Country Status (6)

Country Link
US (1) US7859180B2 (en)
EP (1) EP1868269B1 (en)
AT (1) ATE407468T1 (en)
DE (1) DE502006001508D1 (en)
DK (1) DK1868269T3 (en)
WO (1) WO2007144075A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9831070B1 (en) 2017-06-15 2017-11-28 Enercon Industries Corporation Surface treater with expansion electrode arrangement

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3133193A (en) * 1962-01-22 1964-05-12 Du Pont Corona discharge apparatus for the surface treatment of plastic resins
CA1042605A (en) 1977-06-07 1978-11-21 Evin Industries Ltd. Outerwear
DE3219538A1 (en) * 1982-05-25 1983-12-01 Softal Electronic GmbH, 2000 Hamburg DEVICE FOR THE ELECTRICAL PRE-TREATMENT OF NON-CONDUCTIVE FILMS
DE3622737C1 (en) * 1986-07-05 1987-10-08 Klaus Kalwar Process for the corona treatment of web-like materials and device for carrying out the process
DE9102438U1 (en) * 1991-03-01 1992-06-25 Röhm GmbH, 6100 Darmstadt Low pressure plasma generator
AU2001247685A1 (en) * 2000-03-30 2001-10-15 Tokyo Electron Limited Method of and apparatus for tunable gas injection in a plasma processing system

Also Published As

Publication number Publication date
US7859180B2 (en) 2010-12-28
US20090200911A1 (en) 2009-08-13
EP1868269A1 (en) 2007-12-19
ATE407468T1 (en) 2008-09-15
WO2007144075A1 (en) 2007-12-21
DE502006001508D1 (en) 2008-10-16
DK1868269T3 (en) 2009-01-12

Similar Documents

Publication Publication Date Title
DE102007030915A1 (en) Device for the treatment of surfaces with a plasma generated by means of an electrode via a solid dielectric by a dielectrically impeded gas discharge
EP3261769B1 (en) Method and device for fragmenting and/or weakening pourable material by means of high-voltage discharges
EP1847187A1 (en) Processing unit for processing at least one filter strip and device with at least two such processing units
DE102009060743B4 (en) Method and device for producing helices from wires
EP1868269B1 (en) Electrode assembly
DE102009012929B3 (en) Straightening roller system for leveling metallic goods e.g. metal strip, has straightening machine provided with straightening roller cartridge, and supporting rollers connected to straightening roller sets, which are adjustable
EP1620244A1 (en) Die for forming extrudates of viscoelastic materials (flared inlet)
EP1648063A1 (en) Corona treatment device for electrically insulating materials, particularly plastic foils
EP3066700A1 (en) Piezoelectric transformer and counter electrode
DE102012012467A1 (en) Device for applying fluid e.g. oil on movable multifilament thread, has inlet and outlet ports that are formed by short inclined fluid channels at perforated plate at specific inclination angle and having inclined orientation
DE102016013672A1 (en) Apparatus and method for planar or spatial bending of profiles by a rolling process
DE102004041374B4 (en) Pinstripe arrangement
EP2135830A1 (en) Device for continuous production of shells for stretched goods and deviation container for use in same
EP2105205B1 (en) Ionisation element and electrostatic filter
WO2011157425A1 (en) Apparatus for the continuous plasma treatment and/or plasma coating of a piece of material
DE1814238C2 (en) Roll calibration for fine iron, especially for wire rolling mills
EP1746696A1 (en) Cylindrical counter electrode of a Corona electrode system for Corona treatment of sheet materials with a limited strength; particularly foils
CH708920A1 (en) Deflection apparatus for a conveying system and a guiding element for a deflection.
AT405036B (en) METHOD AND SYSTEM FOR THE PRODUCTION OF NEW LANDWOOD, IN PARTICULAR STRIP AND / OR BAR MATERIAL
DE102013011968A1 (en) Electrical test device for electrical contact contacting of an electrical test specimen
EP3609818B1 (en) Rod network belt
EP2888053B1 (en) Method and device for fragmenting and/or weakening material by means of high-voltage pulses
DE102019128538B3 (en) Apparatus for forming physical plasma on a surface of an object
DE102020109119B4 (en) Test rail for solar cells
DE2311986C3 (en) Method and device for electrostatic staining

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR MK YU

17P Request for examination filed

Effective date: 20080221

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AKX Designation fees paid

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REF Corresponds to:

Ref document number: 502006001508

Country of ref document: DE

Date of ref document: 20081016

Kind code of ref document: P

REG Reference to a national code

Ref country code: DK

Ref legal event code: T3

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081214

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090203

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090103

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

26N No opposition filed

Effective date: 20090604

BERE Be: lapsed

Owner name: SOFTAL ELECTRONIC ERIK BLUMENFELD G.M.B.H. & CO. K

Effective date: 20090630

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090630

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20100226

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090630

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090630

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090613

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081204

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20100613

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090630

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090630

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100630

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100630

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20090613

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090304

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20100613

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20080903

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240516

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DK

Payment date: 20240620

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: TR

Payment date: 20240531

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20240628

Year of fee payment: 19