EP1859436B1 - Transducteur a tige pour les utltrasons destine a produire un ultrason dans des liquides - Google Patents

Transducteur a tige pour les utltrasons destine a produire un ultrason dans des liquides Download PDF

Info

Publication number
EP1859436B1
EP1859436B1 EP06700984A EP06700984A EP1859436B1 EP 1859436 B1 EP1859436 B1 EP 1859436B1 EP 06700984 A EP06700984 A EP 06700984A EP 06700984 A EP06700984 A EP 06700984A EP 1859436 B1 EP1859436 B1 EP 1859436B1
Authority
EP
European Patent Office
Prior art keywords
rod
heat transfer
transfer element
ultrasonic resonator
shaped ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP06700984A
Other languages
German (de)
English (en)
Other versions
EP1859436A1 (fr
EP1859436B8 (fr
Inventor
Dieter Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to PL06700984T priority Critical patent/PL1859436T3/pl
Publication of EP1859436A1 publication Critical patent/EP1859436A1/fr
Publication of EP1859436B1 publication Critical patent/EP1859436B1/fr
Application granted granted Critical
Publication of EP1859436B8 publication Critical patent/EP1859436B8/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/004Mounting transducers, e.g. provided with mechanical moving or orienting device

Definitions

  • the liquid of the baths is excited with ultrasound.
  • rod vibrators are used, which are either completely submerged, or reach only with the resonator in the bath.
  • To the ultrasonic rod oscillator includes a resonator on which at least one end of an ultrasonic head is mounted and acts as a radiator.
  • the head forms a housing in which the piezoelectric ultrasonic transducer is housed.
  • the electrical converter consists of several piezoelectric ceramic discs.
  • the Curie temperature of the ceramic discs is about 300 ° C. If the ceramic disks are heated up to this temperature or higher, the piezoelectric effect disappears irreversibly.
  • the piezoelectric transducer is to operate in continuous operation, a clear safety margin must be maintained by the Curie temperature.
  • the temperature at the surface of the ceramic converter may not exceed about 150 ° C.
  • a permissible excess temperature of only 20 ° C remains.
  • the ceramic piezoelectric transducer show a very high efficiency. However, the supplied electrical energy is not completely converted into ultrasonic energy, but leads in part to the heating of the converter.
  • the ultrasonic energy to be generated by the transducer is thus limited by the excess temperature of the transducer.
  • the piezoelectric transducer is cooled in the known devices substantially only via the mechanically coupled resonator, which consists of titanium. Titan is a bad conductor of heat. Other cooling practically does not take place because of ultrasonic reasons, the housing of the head is filled with air that forms an extremely poor heat conductor, so that the heat through the housing wall is practically not dissipated.
  • the ultrasonic rod oscillator has a housing in a transducer element, with which a heat sink is thermally coupled.
  • the heat sink is provided on its outside with a plurality of cooling fins extending in the longitudinal direction of the heat transfer element.
  • the housing is traversed by air and has an inlet and a plurality of outlet openings through which cool air flows into the housing or escapes from it.
  • US 3,772,538 A describes an ultrasonic vibrator comprising a housing, a transducer unit with piezoelectric ceramic discs, a rear acoustic resonator block attached to and accommodated together with the transducer unit inside the housing, and a front resonator in the form of a horn attached to the transducer unit is and protrudes from the housing.
  • the rear resonator block is substantially sleeve-shaped and has a cylindrical outer peripheral surface, which is arranged at a significant distance to the inside of the housing.
  • the housing is open to the atmosphere at the rear, and a fan is provided to introduce a flow of cooling air through the rear housing side and to drive it forward through the gap between the inside of the housing and the outside of the rear resonator block and the transducer unit.
  • US 2003/0015218 A1 describes an ultrasonic cleaning device with a liquid cooled by a cooled ultrasonic transducer.
  • the ultrasonic transducer is adhered to a substantially cylindrical heat transfer element, on the peripheral surface of which a circumferential liquid channel is formed.
  • the heat transfer element is sealed against the surrounding housing by means of two O-rings which are located around the circumference of the heat transfer element on both axial sides of the liquid passage.
  • connection ports for supplying and discharging cooling fluid to and from the fluid passage are arranged in the housing.
  • the ultrasonic rod oscillator according to the invention has a resonator on which a coupling element of the piezoelectric transducer is coupled ultrasonically.
  • the coupling element forms part of the housing wall at the same time.
  • the attachment of the housing or the housing wall is located at a vibration node, so that the ultrasonic energy is fed exclusively into the resonator, while the housing itself remains virtually free of ultrasound.
  • the piezoelectric transducer, together with the fastening device, on the coupling device has a length of about ⁇ / 4 and is thus too compact to be able to give off appreciably heat.
  • a heat transfer element is coupled to the piezoelectric transducer.
  • the heat transfer element is designed according to the one solution so that it forms, together with the inner wall of the housing, a very narrow air gap. The narrower the air gap, the smaller the thermal resistance of this air layer, i. the more heat can be transferred from the piezoelectric transducer to the housing and thus to the bath.
  • the length of the heat transfer element is in the area which is integrated into the sound paths, chosen so that this does not disturb the acoustic conditions become.
  • the heat transfer element has a length of ⁇ / 2, wherein it is connected immediately adjacent to an end face of the piezoelectric transducer.
  • the heat transfer element may have a cylindrical shape or a prismatic, wherein the cross section is suitably star-shaped to obtain the largest possible area, can be discharged through the heat to the housing and thus to the bathroom.
  • cup As a heat transfer element.
  • the bottom is formed by the commonly used polished steel sheath which is interposed between the central nut and the piezoelectric transducer to mechanically fix it.
  • the heat transfer element can not only be arranged on the end remote from the coupling part of the piezoelectric transducer. It has been found that the piezoelectric transducer does not reach its highest temperature directly in the region of the end remote from the resonator, but at a small distance in front of it. From this situation, it is advantageous if the heat transfer element is inserted into the piezoelectric transducer. For this purpose, the heat transfer element again has a length of ⁇ / 2.
  • the heat transfer element has a large surface area, wherein the surface serving for the cooling is expediently oriented parallel to the flow path of the air due to the convection effect.
  • Fig. 1 shows in a non-scale perspective view of an ultrasonic rod oscillator 1.
  • the ultrasonic rod oscillator 1 includes a resonator 2 and a connected to the resonator 2 head 3.
  • the resonator 2 is continuously cylindrical over its length with a constant diameter. At its end remote from the head 3, it has a conical tip 4.
  • the head 3 is provided at its rear with a threaded pin 5 which is tubular and from which leads out an electrical cable 6, via which the electrical energy is fed into the head 3.
  • the construction of the head is in Fig. 2 shown.
  • To the head 3 include a connecting element 7, a piezoelectric transducer 8, a heat transfer element 9 and a cup-shaped housing cover 10th
  • the connecting element 7 is a one-piece body made of titanium with a cylindrical extension 11 whose outer diameter corresponds to the outer diameter of the resonator 2.
  • a blind hole 12 arranged coaxially with an internal thread. With the help of the blind bore 12 of the resonator 2 is attached to the connecting element.
  • the connecting element 7 forms after the
  • Extension 11 a flange 13, which merges via a recess in a threaded extension 14 and is the part of the housing of the head 3.
  • the threaded extension 14 is tubular and surrounds a pin 15 which is mechanically fixedly connected to the cylindrical extension 11.
  • a kind of membrane is formed to decouple the flange 13 and the thread 14 from the vibrations, which are fed by the piezoelectric transducer 8 in the extension 11 maximum.
  • the connecting element 7 is a piece of titanium worked from the solid and thus in one piece.
  • the projection 11 to the coaxial pin 15 forms a plane surface 16 on which the piezoelectric transducer 8 rests.
  • the piezoelectric transducer 8 is composed in the embodiment shown from a total of 6 piezoelectric ceramic discs 17, between which electrodes 18 are inserted.
  • the electrodes 18 are each provided on one side with terminal lugs 19, to which power supply lines 20 are connected.
  • three of the terminal lugs 19, based on Fig. 2 up and a total of three down.
  • Each lying on one side terminal lugs 19 are electrically connected in parallel, which, seen electrically, a two-pole results in the dining or stimulating AC voltage with a frequency ofmenerwiese greater than 25 kHz is fed.
  • Both the ceramic discs 17 and the disc-shaped electrodes 18 are disc-shaped rings with flat end faces.
  • the piezoelectric transducer 8 is substantially cylindrical with planar end faces.
  • the heat transfer element 9 is designed in the form of a cylindrical tube with flat front end 22 and 23.
  • the lateral surface 24 is cylindrical.
  • a friction-reducing steel plate 25 On the side remote from the piezoelectric transducer 8 side of the heat transfer element 9 is a friction-reducing steel plate 25 which is pressed by means of a nut 26 against the piezoelectric transducer 8.
  • the nut 26 is screwed onto a threaded pin 27 indicated by dashed lines, which is anchored at the other end in the pin 16 of the connecting element 7.
  • Both the threaded pin 27 and the nut 26 are made of titanium, while the heat transfer element 9 is made of aluminum.
  • the rightmost electrode 18 is an electrode, which is also the leftmost ceramic disk 17 at the same time fed.
  • the heat transfer element 9 has between its two end faces 22 and 23 an acoustic length of ⁇ / 2.
  • the length of the piezoelectric transducer 8, including the disc 25, the nut 26 and the pin 16, which extends to the housing wall, has a length of ⁇ / 4.
  • the right end of the nut 26 is thus on a vibration at the resonant frequency.
  • the housing cover 10 is, as shown, cup-shaped and is composed of a collar 28 and a cup bottom 29, from which the threaded pin 5 protrudes. At its free end, the collar 28 is provided with an internal thread 31 which is screwed in the assembled state with the thread 14.
  • the collar 28 defines a cylindrical housing inner wall 32.
  • the diameter defined by the housing inner wall 32 is slightly greater than the outer diameter of the outer peripheral surface 24 of the heat transfer element 9.
  • the housing inner wall 32 is in place as shown in FIG Fig. 2 is illustrated by dashed lines 33.
  • the inner wall 32 thus forms, with the outer peripheral surface 24, a narrow, cylindrical gap 34 having a thickness of between 0.5 mm and 5 mm and the length of the heat transfer element 9. As a result, the thermal resistance to the outside of the housing 10 is greatly reduced.
  • the maximum outer diameter of the piezoelectric transducer 8, including the protruding terminal lugs 19, is smaller than the outer diameter of the heat transfer element 9 or the inner diameter of the interior 32 corresponds.
  • the right end of the piezoelectric transducer 8 thus experiences a much better cooling than in the prior art.
  • the right end would only be cooled to the extent that heat would be dissipated in the direction of the resonator 2 via the poorly heat conductive pin 27 made of titanium.
  • the housing cup 10 is additionally used to transfer heat from the piezoelectric transducer 8 into the bath.
  • the ceramic discs 17 are not good heat conductors.
  • the arrangement after Fig. 2 will therefore show the maximum overtemperature in a range that is between the two Front ends of the piezoelectric transducer is, it is advantageous if the heat transfer element 9 according to Fig. 3 is inserted into the piezoelectric transducer 8.
  • a total of four ceramic discs 17 are located between the heat transfer element 9 and the connecting element 7, while two ceramic discs 17 are arranged between the heat transfer element 9 and the washer 25.
  • the thermal resistance in the embodiments of the Fig. 2 and 3 is determined by the area of the annular gap 34 and its thickness.
  • the thermal resistance is inversely proportional to the area and proportional to the thickness.
  • the thickness of the gap 34 can not be reduced for manufacturing reasons below a certain technical level, without the risk that the heat transfer element 9 touches the inside 32. This effect must be avoided at all costs, because otherwise ultrasonic energy would be coupled into the housing 10. With regard to the surface of the gap, there are also limits, because the head can not grow arbitrarily in diameter.
  • Fig. 4 has the heat transfer element 9 the shape of a cup with a bottom 36 and a collar 37 on.
  • the collar of the cup points away from the piezoelectric transducer 8, ie in FIG Fig. 4 to the right.
  • the bottom 36 is located between the right end of the piezoelectric transducer 8 and the central fastening nut 26.
  • the bottom 36 replaces the steel plate 25, ie the cup 37 is preferably at least in the region of the bottom 36 of the polished steel disc.
  • the collar 37 is both cylindrical outside and inside, i. he limits a cylindrical interior.
  • the housing cup 10 is provided deviating from the previous embodiment with an inwardly projecting cylindrical pin 38.
  • the pin 38 is designed as a hollow structure, so that the bath liquid can circulate therein.
  • the collar 28 of the housing cup 10 forms the cylindrical gap 34 with a small width, as in the embodiment of the Figures 2 and 3 .
  • Another cylinder gap with similarly small gap width is formed between the cylindrical inner wall of the collar 37 and the pin 38th
  • cup-shaped heat transfer element 9 is able to dissipate heat to the housing cup 10 and from there into the bath both on the outside and on the inside of the collar 37.
  • FIG. 5 Another way to increase the area of the air gap between the heat transfer element 9 and the cup-shaped housing 10 illustrates Fig. 5 .
  • the heat transfer element 9 is largely rotationally symmetrical, the heat transfer element 9 after Fig. 5 seen in cross-section on a star-shaped structure.
  • Fig. 5 shows a section through the head 3 at right angles to the longitudinal axis or parallel to the axis along which propagate the ultrasonic waves, by the heat transfer element 9.
  • the middle draw bolt 27 and the star-shaped heat transfer element 9. It is mentally from a Circular ring and from this outgoing triangular spikes together.
  • the collar 28 of the housing 10 has an inner wall 32 which is complementary star-shaped.
  • Such a structure can be produced for example by sinking EDM or by punching of corresponding slats.
  • the embodiments of the Fig. 2 to 5 concern ultrasonic rod vibrators, which can be used fully submerged. In these bar vibrators, the head 3 is also in the bathroom.
  • An ultrasonic rod oscillator has a heat transfer element that is thermally coupled well with the piezoelectric transducer. It ensures that the thermal resistance is reduced to the surrounding atmosphere or the housing and thus the bathroom with submerged rod vibrator.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

L'invention concerne un transducteur à tige pour les ultrasons comprenant un élément transmetteur de chaleur, qui est couplé selon une technique thermique avec un transducteur piézo-électrique. Ledit transducteur permet de diminuer la résistance à la chaleur de l'atmosphère environnante ou du logement et ainsi du bain dans un transducteur immergé.

Claims (19)

  1. Transducteur à tige pour ultrasons (1) destiné à générer des ultrasons dans des liquides,
    comprenant un boîtier (10, 13) qui délimite un espace intérieur et qui présente au moins une paroi extérieure (28, 29) dont la face interne (32) est tournée vers l'espace intérieur,
    comprenant un dispositif convertisseur piézoélectrique (8) qui présente deux extrémités frontales et qui est logé dans le boîtier (10),
    comprenant un résonateur (2) qui se trouve à l'extérieur du boîtier (10, 13), comprenant un élément de liaison (7) par l'intermédiaire duquel le dispositif convertisseur (8) est relié au résonateur (2) et qui dépasse au moins en partie d'une paroi extérieure (13) du boîtier (10, 13),
    comprenant un élément de transmission de chaleur (9) qui est relié de manière thermiquement conductrice au convertisseur piézoélectrique (8) et qui présente au moins une surface extérieure (24) qui s'étend à proximité de la face interne (32) d'une paroi extérieure (28), en formant un interstice (34), afin de transmettre la chaleur dissipée du convertisseur piézoélectrique (8) à la paroi extérieure (28),
    caractérisé en ce que
    le transducteur à tige pour ultrasons (1) est submersible,
    l'élément de transmission de chaleur (9) présente une longueur de 12 dans la direction parallèle à l'axe de vibration,
    la surface extérieure (24) de l'élément de transmission de chaleur (9) et la face interne (32) du boîtier (10, 13) ont des formes qui sont adaptées l'une à l'autre, de manière à créer un interstice (34) sensiblement uniforme le long du pourtour, et
    la largeur de l'interstice (34) est comprise entre 0,5 mm et 3 mm.
  2. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'espace intérieur présente une section transversale cylindrique.
  3. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'élément de transmission de chaleur (9) est cylindrique sur sa face externe.
  4. Transducteur à tige pour ultrasons selon la revendication 2, caractérisé en ce que l'élément de transmission de chaleur (9) présente une forme prismatique qui est différente de la forme cylindrique.
  5. Transducteur à tige pour ultrasons selon la revendication 4, caractérisé en ce que l'élément de transmission de chaleur (9) présente une forme d'étoile.
  6. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'espace intérieur présente une section transversale prismatique qui est différente de la forme cylindrique, la surface de base du prisme ayant, au moins approximativement, une forme d'étoile.
  7. Transducteur à tige pour ultrasons selon la revendication 6, caractérisé en ce que la surface de base en forme d'étoile se compose d'une surface centrale et de branches partant de cette surface centrale.
  8. Transducteur à tige pour ultrasons selon la revendication 7, caractérisé en ce que les branches ont des formes identiques entre elles.
  9. Transducteur à tige pour ultrasons selon la revendication 7, caractérisé en ce que, vues en coupe transversale, les branches sont à peu près triangulaires.
  10. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que le boîtier (10, 13) présente une surface extérieure (28) cylindrique.
  11. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce qu'une partie de boîtier (10) présente sensiblement la forme d'un pot (28, 29) cylindrique.
  12. Transducteur à tige pour ultrasons selon la revendication 11, caractérisé en ce que la partie de boîtier (10) comporte, dans le pot (28, 29) cylindrique, un insert qui délimite un espace intérieur prismatique.
  13. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'élément de liaison (7) présente un collet (13, 14) dont le diamètre extérieur est supérieur à la largeur intérieure de l'espace intérieur.
  14. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que le dispositif convertisseur piézoélectrique (8) est formé d'un certain nombre de disques piézoélectriques (17) disposés les uns à côté des autres et entre lesquels sont insérées des électrodes (18).
  15. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que le dispositif convertisseur piézoélectrique (8) présente deux extrémités frontales, et en ce que l'élément de transmission de chaleur (9) est disposé sur une extrémité frontale.
  16. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que le dispositif convertisseur piézoélectrique (8) présente deux parties qui sont montées en série sur le plan acoustique, et en ce que l'élément de transmission de chaleur (9) est inséré entre les deux parties.
  17. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'élément de transmission de chaleur (9) présente la forme d'un pot, le fond (36) de l'élément de transmission de chaleur (9) en forme de pot étant couplé acoustiquement et de façon thermoconductrice à une face frontale du dispositif piézoélectrique (8).
  18. Transducteur à tige pour ultrasons selon la revendication 17, caractérisé en ce que le boîtier (10, 13) présente un renfoncement (38) qui avance dans l'espace intérieur de l'élément de transmission de chaleur (9) en forme de pot, en créant un interstice étroit.
  19. Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'élément de transmission de chaleur (9) présente au moins une surface qui oppose une résistance thermique plus faible à l'atmosphère environnante que le dispositif piézoélectrique (8).
EP06700984A 2005-02-15 2006-01-13 Transducteur a tige pour les utltrasons destine a produire un ultrason dans des liquides Active EP1859436B8 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL06700984T PL1859436T3 (pl) 2005-02-15 2006-01-13 Prętowy wibrator ultradźwiękowy do wytwarzania ultradźwięków w cieczach

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005007056A DE102005007056A1 (de) 2005-02-15 2005-02-15 Ultraschall-Stabschwinger
PCT/EP2006/000251 WO2006087053A1 (fr) 2005-02-15 2006-01-13 Transducteur a tige pour les utltrasons destine a produire un ultrason dans des liquides

Publications (3)

Publication Number Publication Date
EP1859436A1 EP1859436A1 (fr) 2007-11-28
EP1859436B1 true EP1859436B1 (fr) 2012-07-11
EP1859436B8 EP1859436B8 (fr) 2012-08-15

Family

ID=36529318

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06700984A Active EP1859436B8 (fr) 2005-02-15 2006-01-13 Transducteur a tige pour les utltrasons destine a produire un ultrason dans des liquides

Country Status (10)

Country Link
US (1) US7688681B2 (fr)
EP (1) EP1859436B8 (fr)
JP (1) JP5243802B2 (fr)
CN (1) CN101142619B (fr)
BR (1) BRPI0607338B1 (fr)
DE (1) DE102005007056A1 (fr)
DK (1) DK1859436T3 (fr)
ES (1) ES2392946T3 (fr)
PL (1) PL1859436T3 (fr)
WO (1) WO2006087053A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005007056A1 (de) * 2005-02-15 2006-08-24 Dieter Weber Ultraschall-Stabschwinger
JP6424001B2 (ja) 2010-10-04 2018-11-14 ドクター ヒールシャー ゲーエムベーハー 電気機械式複合高周波振動システム(vfhs)を締め付けるための装置及び方法
DE102012109405B4 (de) * 2011-10-05 2020-11-12 Dr. Hielscher Gmbh Ultraschallsystem mit Ultraschallerzeuger, Resonator und Lichtquelle
JP6270505B2 (ja) * 2014-01-27 2018-01-31 オリンパス株式会社 積層型超音波振動デバイス、積層型超音波振動デバイスの製造方法および超音波医療装置
DE102014210886A1 (de) 2014-06-06 2015-12-17 Weber Ultrasonics Gmbh Ultraschall-Konverter
CN104275329B (zh) * 2014-10-24 2016-01-06 王峰 一种色谱柱或保护柱超声清洗装置
EP3101441B1 (fr) * 2015-06-03 2018-05-16 Pepperl + Fuchs GmbH Convertisseur d'ultrasons
DE202017100958U1 (de) 2017-02-21 2017-03-06 Weber Ultrasonics AG Ultraschallschneidelement

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE124010C (fr)
US3689783A (en) * 1971-03-11 1972-09-05 David A Williams Ultrasonic transducer with half-wave separator between piezoelectric crystal means
US3772538A (en) * 1973-01-08 1973-11-13 Kane Corp Du Center bolt type acoustic transducer
DD124010A1 (fr) * 1976-03-12 1977-02-02
EP0455837B1 (fr) * 1990-03-09 1992-05-13 Martin Walter Ultraschalltechnik GmbH Résonnateur ultrasonore
US6039059A (en) * 1996-09-30 2000-03-21 Verteq, Inc. Wafer cleaning system
DE19836229C1 (de) * 1998-08-04 2000-03-23 Hielscher Gmbh Anordnung zur Wärmeableitung, insbesondere für Ultraschallwandler mit hoher Leistung
GB0117881D0 (en) * 2001-07-21 2001-09-12 Rawson F F Piezoelectric transducers
US7287537B2 (en) * 2002-01-29 2007-10-30 Akrion Technologies, Inc. Megasonic probe energy director
US6924585B2 (en) * 2002-09-23 2005-08-02 The Crest Group, Inc. Sleeved ultrasonic transducer
DE102005007056A1 (de) * 2005-02-15 2006-08-24 Dieter Weber Ultraschall-Stabschwinger

Also Published As

Publication number Publication date
DE102005007056A1 (de) 2006-08-24
ES2392946T3 (es) 2012-12-17
BRPI0607338A2 (pt) 2010-03-23
PL1859436T3 (pl) 2013-01-31
JP5243802B2 (ja) 2013-07-24
CN101142619A (zh) 2008-03-12
CN101142619B (zh) 2011-06-08
BRPI0607338B1 (pt) 2017-11-07
US20080212408A1 (en) 2008-09-04
EP1859436A1 (fr) 2007-11-28
WO2006087053A1 (fr) 2006-08-24
EP1859436B8 (fr) 2012-08-15
US7688681B2 (en) 2010-03-30
JP2008529777A (ja) 2008-08-07
DK1859436T3 (da) 2012-10-15

Similar Documents

Publication Publication Date Title
EP1859436B1 (fr) Transducteur a tige pour les utltrasons destine a produire un ultrason dans des liquides
DE69211950T2 (de) Handstück für Ultraschallvorrichtung
DE975266C (de) Ein eine Materialabnahme bewirkendes Bearbeitungsgeraet
DE3888273T3 (de) Medizinischer Apparat zur Behandlung mit Ultraschall.
DE10125636B4 (de) Kühler für elektrische und/oder elektronische Bauteile
DE112007000829T5 (de) Kühler
DE2508175A1 (de) Ultraschallvorrichtung und verfahren zur verwendung eines stroemenden mediums in einer ultraschallvorrichtung und in einem arbeitsbereich um das vorstehende werkzeug der vorrichtung herum
DE3403429C2 (fr)
DE2004005A1 (de) Piezoelektrische Reinigungsvorrichtung
DE1439126B2 (de) Halter für mindestens ein Halbleiterbauelement
DE60201382T2 (de) Resonator für Ultraschallschweissen
EP2815638B1 (fr) Dispositif de refroidissement
DE69723922T2 (de) Vorrichtung mit durch Ultraschall erregtem Lötbad
EP2747218B1 (fr) Agencement de refroidissement pour matériaux solides à effet laser, agencement laser et procédé de refroidissement d'un matériau solide à effet laser
WO2015185315A1 (fr) Convertisseur à ultrasons
EP2847464B1 (fr) Dispositif et ensemble pour production d'un courant d'air
CH623701A5 (en) Piezoelectric ultrasonic high-power transducer.
DE202012010508U1 (de) Vorrichtung zur Beaufschlagung flüssiger Medien mitUltraschall durch eine Membran sowie Ultraschallsystem
DE202016106601U1 (de) Feinstzerkleinerer
DE29716405U1 (de) Wärmeübertragungskörper und -vorrichtung, insbesondere zum Kühlen von elektronischen Bauteilen
DE10013450A1 (de) Vorrichtung zur Erzeugung monodisperser Tropfen aus Flüssigkeiten hoher Temperatur
DE2145736C3 (de) Kuhlvorrichtung zur Kühlung von hochbelasteten elektronischen Halbleiterelementen mit einem flüssigen Kühlmittel
DE10151992B4 (de) Kühlelement zum Einsatz in schwingenden Systemen
DE2606997A1 (de) Ultraschall-geschwindigkeitstransformator
DE10331026B3 (de) Kühlelement und Verfahren zur Herstellung eines Kühlelements

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20070802

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20101215

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 566471

Country of ref document: AT

Kind code of ref document: T

Effective date: 20120715

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502006011706

Country of ref document: DE

Effective date: 20120830

REG Reference to a national code

Ref country code: DK

Ref legal event code: T3

REG Reference to a national code

Ref country code: SE

Ref legal event code: TRGR

REG Reference to a national code

Ref country code: NL

Ref legal event code: VDEP

Effective date: 20120711

REG Reference to a national code

Ref country code: ES

Ref legal event code: FG2A

Ref document number: 2392946

Country of ref document: ES

Kind code of ref document: T3

Effective date: 20121217

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

Effective date: 20120711

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121111

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120711

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120711

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120711

REG Reference to a national code

Ref country code: PL

Ref legal event code: T3

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121012

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121112

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120711

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120711

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120711

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120711

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120711

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120711

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20120711

26N No opposition filed

Effective date: 20130412

BERE Be: lapsed

Owner name: WEBER, DIETER

Effective date: 20130131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20121011

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502006011706

Country of ref document: DE

Effective date: 20130412

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130131

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130113

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: PL

Payment date: 20141231

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 20150121

Year of fee payment: 10

Ref country code: GB

Payment date: 20150123

Year of fee payment: 10

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20060113

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130113

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 11

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 566471

Country of ref document: AT

Kind code of ref document: T

Effective date: 20160113

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20160113

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160113

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160113

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 12

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160113

REG Reference to a national code

Ref country code: FR

Ref legal event code: PLFP

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DK

Payment date: 20180125

Year of fee payment: 13

Ref country code: ES

Payment date: 20180220

Year of fee payment: 13

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: SE

Payment date: 20180125

Year of fee payment: 13

Ref country code: IT

Payment date: 20180126

Year of fee payment: 13

Ref country code: TR

Payment date: 20180109

Year of fee payment: 13

REG Reference to a national code

Ref country code: DK

Ref legal event code: EBP

Effective date: 20190131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190114

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190131

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190113

REG Reference to a national code

Ref country code: ES

Ref legal event code: FD2A

Effective date: 20200309

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190114

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20190113

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240124

Year of fee payment: 19

Ref country code: CH

Payment date: 20240202

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20240123

Year of fee payment: 19