EP1859436B1 - Transducteur a tige pour les utltrasons destine a produire un ultrason dans des liquides - Google Patents
Transducteur a tige pour les utltrasons destine a produire un ultrason dans des liquides Download PDFInfo
- Publication number
- EP1859436B1 EP1859436B1 EP06700984A EP06700984A EP1859436B1 EP 1859436 B1 EP1859436 B1 EP 1859436B1 EP 06700984 A EP06700984 A EP 06700984A EP 06700984 A EP06700984 A EP 06700984A EP 1859436 B1 EP1859436 B1 EP 1859436B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rod
- heat transfer
- transfer element
- ultrasonic resonator
- shaped ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 title claims description 7
- 238000002604 ultrasonography Methods 0.000 title claims description 4
- 239000000919 ceramic Substances 0.000 description 13
- 238000001816 cooling Methods 0.000 description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000004936 stimulating effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/004—Mounting transducers, e.g. provided with mechanical moving or orienting device
Definitions
- the liquid of the baths is excited with ultrasound.
- rod vibrators are used, which are either completely submerged, or reach only with the resonator in the bath.
- To the ultrasonic rod oscillator includes a resonator on which at least one end of an ultrasonic head is mounted and acts as a radiator.
- the head forms a housing in which the piezoelectric ultrasonic transducer is housed.
- the electrical converter consists of several piezoelectric ceramic discs.
- the Curie temperature of the ceramic discs is about 300 ° C. If the ceramic disks are heated up to this temperature or higher, the piezoelectric effect disappears irreversibly.
- the piezoelectric transducer is to operate in continuous operation, a clear safety margin must be maintained by the Curie temperature.
- the temperature at the surface of the ceramic converter may not exceed about 150 ° C.
- a permissible excess temperature of only 20 ° C remains.
- the ceramic piezoelectric transducer show a very high efficiency. However, the supplied electrical energy is not completely converted into ultrasonic energy, but leads in part to the heating of the converter.
- the ultrasonic energy to be generated by the transducer is thus limited by the excess temperature of the transducer.
- the piezoelectric transducer is cooled in the known devices substantially only via the mechanically coupled resonator, which consists of titanium. Titan is a bad conductor of heat. Other cooling practically does not take place because of ultrasonic reasons, the housing of the head is filled with air that forms an extremely poor heat conductor, so that the heat through the housing wall is practically not dissipated.
- the ultrasonic rod oscillator has a housing in a transducer element, with which a heat sink is thermally coupled.
- the heat sink is provided on its outside with a plurality of cooling fins extending in the longitudinal direction of the heat transfer element.
- the housing is traversed by air and has an inlet and a plurality of outlet openings through which cool air flows into the housing or escapes from it.
- US 3,772,538 A describes an ultrasonic vibrator comprising a housing, a transducer unit with piezoelectric ceramic discs, a rear acoustic resonator block attached to and accommodated together with the transducer unit inside the housing, and a front resonator in the form of a horn attached to the transducer unit is and protrudes from the housing.
- the rear resonator block is substantially sleeve-shaped and has a cylindrical outer peripheral surface, which is arranged at a significant distance to the inside of the housing.
- the housing is open to the atmosphere at the rear, and a fan is provided to introduce a flow of cooling air through the rear housing side and to drive it forward through the gap between the inside of the housing and the outside of the rear resonator block and the transducer unit.
- US 2003/0015218 A1 describes an ultrasonic cleaning device with a liquid cooled by a cooled ultrasonic transducer.
- the ultrasonic transducer is adhered to a substantially cylindrical heat transfer element, on the peripheral surface of which a circumferential liquid channel is formed.
- the heat transfer element is sealed against the surrounding housing by means of two O-rings which are located around the circumference of the heat transfer element on both axial sides of the liquid passage.
- connection ports for supplying and discharging cooling fluid to and from the fluid passage are arranged in the housing.
- the ultrasonic rod oscillator according to the invention has a resonator on which a coupling element of the piezoelectric transducer is coupled ultrasonically.
- the coupling element forms part of the housing wall at the same time.
- the attachment of the housing or the housing wall is located at a vibration node, so that the ultrasonic energy is fed exclusively into the resonator, while the housing itself remains virtually free of ultrasound.
- the piezoelectric transducer, together with the fastening device, on the coupling device has a length of about ⁇ / 4 and is thus too compact to be able to give off appreciably heat.
- a heat transfer element is coupled to the piezoelectric transducer.
- the heat transfer element is designed according to the one solution so that it forms, together with the inner wall of the housing, a very narrow air gap. The narrower the air gap, the smaller the thermal resistance of this air layer, i. the more heat can be transferred from the piezoelectric transducer to the housing and thus to the bath.
- the length of the heat transfer element is in the area which is integrated into the sound paths, chosen so that this does not disturb the acoustic conditions become.
- the heat transfer element has a length of ⁇ / 2, wherein it is connected immediately adjacent to an end face of the piezoelectric transducer.
- the heat transfer element may have a cylindrical shape or a prismatic, wherein the cross section is suitably star-shaped to obtain the largest possible area, can be discharged through the heat to the housing and thus to the bathroom.
- cup As a heat transfer element.
- the bottom is formed by the commonly used polished steel sheath which is interposed between the central nut and the piezoelectric transducer to mechanically fix it.
- the heat transfer element can not only be arranged on the end remote from the coupling part of the piezoelectric transducer. It has been found that the piezoelectric transducer does not reach its highest temperature directly in the region of the end remote from the resonator, but at a small distance in front of it. From this situation, it is advantageous if the heat transfer element is inserted into the piezoelectric transducer. For this purpose, the heat transfer element again has a length of ⁇ / 2.
- the heat transfer element has a large surface area, wherein the surface serving for the cooling is expediently oriented parallel to the flow path of the air due to the convection effect.
- Fig. 1 shows in a non-scale perspective view of an ultrasonic rod oscillator 1.
- the ultrasonic rod oscillator 1 includes a resonator 2 and a connected to the resonator 2 head 3.
- the resonator 2 is continuously cylindrical over its length with a constant diameter. At its end remote from the head 3, it has a conical tip 4.
- the head 3 is provided at its rear with a threaded pin 5 which is tubular and from which leads out an electrical cable 6, via which the electrical energy is fed into the head 3.
- the construction of the head is in Fig. 2 shown.
- To the head 3 include a connecting element 7, a piezoelectric transducer 8, a heat transfer element 9 and a cup-shaped housing cover 10th
- the connecting element 7 is a one-piece body made of titanium with a cylindrical extension 11 whose outer diameter corresponds to the outer diameter of the resonator 2.
- a blind hole 12 arranged coaxially with an internal thread. With the help of the blind bore 12 of the resonator 2 is attached to the connecting element.
- the connecting element 7 forms after the
- Extension 11 a flange 13, which merges via a recess in a threaded extension 14 and is the part of the housing of the head 3.
- the threaded extension 14 is tubular and surrounds a pin 15 which is mechanically fixedly connected to the cylindrical extension 11.
- a kind of membrane is formed to decouple the flange 13 and the thread 14 from the vibrations, which are fed by the piezoelectric transducer 8 in the extension 11 maximum.
- the connecting element 7 is a piece of titanium worked from the solid and thus in one piece.
- the projection 11 to the coaxial pin 15 forms a plane surface 16 on which the piezoelectric transducer 8 rests.
- the piezoelectric transducer 8 is composed in the embodiment shown from a total of 6 piezoelectric ceramic discs 17, between which electrodes 18 are inserted.
- the electrodes 18 are each provided on one side with terminal lugs 19, to which power supply lines 20 are connected.
- three of the terminal lugs 19, based on Fig. 2 up and a total of three down.
- Each lying on one side terminal lugs 19 are electrically connected in parallel, which, seen electrically, a two-pole results in the dining or stimulating AC voltage with a frequency ofmenerwiese greater than 25 kHz is fed.
- Both the ceramic discs 17 and the disc-shaped electrodes 18 are disc-shaped rings with flat end faces.
- the piezoelectric transducer 8 is substantially cylindrical with planar end faces.
- the heat transfer element 9 is designed in the form of a cylindrical tube with flat front end 22 and 23.
- the lateral surface 24 is cylindrical.
- a friction-reducing steel plate 25 On the side remote from the piezoelectric transducer 8 side of the heat transfer element 9 is a friction-reducing steel plate 25 which is pressed by means of a nut 26 against the piezoelectric transducer 8.
- the nut 26 is screwed onto a threaded pin 27 indicated by dashed lines, which is anchored at the other end in the pin 16 of the connecting element 7.
- Both the threaded pin 27 and the nut 26 are made of titanium, while the heat transfer element 9 is made of aluminum.
- the rightmost electrode 18 is an electrode, which is also the leftmost ceramic disk 17 at the same time fed.
- the heat transfer element 9 has between its two end faces 22 and 23 an acoustic length of ⁇ / 2.
- the length of the piezoelectric transducer 8, including the disc 25, the nut 26 and the pin 16, which extends to the housing wall, has a length of ⁇ / 4.
- the right end of the nut 26 is thus on a vibration at the resonant frequency.
- the housing cover 10 is, as shown, cup-shaped and is composed of a collar 28 and a cup bottom 29, from which the threaded pin 5 protrudes. At its free end, the collar 28 is provided with an internal thread 31 which is screwed in the assembled state with the thread 14.
- the collar 28 defines a cylindrical housing inner wall 32.
- the diameter defined by the housing inner wall 32 is slightly greater than the outer diameter of the outer peripheral surface 24 of the heat transfer element 9.
- the housing inner wall 32 is in place as shown in FIG Fig. 2 is illustrated by dashed lines 33.
- the inner wall 32 thus forms, with the outer peripheral surface 24, a narrow, cylindrical gap 34 having a thickness of between 0.5 mm and 5 mm and the length of the heat transfer element 9. As a result, the thermal resistance to the outside of the housing 10 is greatly reduced.
- the maximum outer diameter of the piezoelectric transducer 8, including the protruding terminal lugs 19, is smaller than the outer diameter of the heat transfer element 9 or the inner diameter of the interior 32 corresponds.
- the right end of the piezoelectric transducer 8 thus experiences a much better cooling than in the prior art.
- the right end would only be cooled to the extent that heat would be dissipated in the direction of the resonator 2 via the poorly heat conductive pin 27 made of titanium.
- the housing cup 10 is additionally used to transfer heat from the piezoelectric transducer 8 into the bath.
- the ceramic discs 17 are not good heat conductors.
- the arrangement after Fig. 2 will therefore show the maximum overtemperature in a range that is between the two Front ends of the piezoelectric transducer is, it is advantageous if the heat transfer element 9 according to Fig. 3 is inserted into the piezoelectric transducer 8.
- a total of four ceramic discs 17 are located between the heat transfer element 9 and the connecting element 7, while two ceramic discs 17 are arranged between the heat transfer element 9 and the washer 25.
- the thermal resistance in the embodiments of the Fig. 2 and 3 is determined by the area of the annular gap 34 and its thickness.
- the thermal resistance is inversely proportional to the area and proportional to the thickness.
- the thickness of the gap 34 can not be reduced for manufacturing reasons below a certain technical level, without the risk that the heat transfer element 9 touches the inside 32. This effect must be avoided at all costs, because otherwise ultrasonic energy would be coupled into the housing 10. With regard to the surface of the gap, there are also limits, because the head can not grow arbitrarily in diameter.
- Fig. 4 has the heat transfer element 9 the shape of a cup with a bottom 36 and a collar 37 on.
- the collar of the cup points away from the piezoelectric transducer 8, ie in FIG Fig. 4 to the right.
- the bottom 36 is located between the right end of the piezoelectric transducer 8 and the central fastening nut 26.
- the bottom 36 replaces the steel plate 25, ie the cup 37 is preferably at least in the region of the bottom 36 of the polished steel disc.
- the collar 37 is both cylindrical outside and inside, i. he limits a cylindrical interior.
- the housing cup 10 is provided deviating from the previous embodiment with an inwardly projecting cylindrical pin 38.
- the pin 38 is designed as a hollow structure, so that the bath liquid can circulate therein.
- the collar 28 of the housing cup 10 forms the cylindrical gap 34 with a small width, as in the embodiment of the Figures 2 and 3 .
- Another cylinder gap with similarly small gap width is formed between the cylindrical inner wall of the collar 37 and the pin 38th
- cup-shaped heat transfer element 9 is able to dissipate heat to the housing cup 10 and from there into the bath both on the outside and on the inside of the collar 37.
- FIG. 5 Another way to increase the area of the air gap between the heat transfer element 9 and the cup-shaped housing 10 illustrates Fig. 5 .
- the heat transfer element 9 is largely rotationally symmetrical, the heat transfer element 9 after Fig. 5 seen in cross-section on a star-shaped structure.
- Fig. 5 shows a section through the head 3 at right angles to the longitudinal axis or parallel to the axis along which propagate the ultrasonic waves, by the heat transfer element 9.
- the middle draw bolt 27 and the star-shaped heat transfer element 9. It is mentally from a Circular ring and from this outgoing triangular spikes together.
- the collar 28 of the housing 10 has an inner wall 32 which is complementary star-shaped.
- Such a structure can be produced for example by sinking EDM or by punching of corresponding slats.
- the embodiments of the Fig. 2 to 5 concern ultrasonic rod vibrators, which can be used fully submerged. In these bar vibrators, the head 3 is also in the bathroom.
- An ultrasonic rod oscillator has a heat transfer element that is thermally coupled well with the piezoelectric transducer. It ensures that the thermal resistance is reduced to the surrounding atmosphere or the housing and thus the bathroom with submerged rod vibrator.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Abstract
Claims (19)
- Transducteur à tige pour ultrasons (1) destiné à générer des ultrasons dans des liquides,
comprenant un boîtier (10, 13) qui délimite un espace intérieur et qui présente au moins une paroi extérieure (28, 29) dont la face interne (32) est tournée vers l'espace intérieur,
comprenant un dispositif convertisseur piézoélectrique (8) qui présente deux extrémités frontales et qui est logé dans le boîtier (10),
comprenant un résonateur (2) qui se trouve à l'extérieur du boîtier (10, 13), comprenant un élément de liaison (7) par l'intermédiaire duquel le dispositif convertisseur (8) est relié au résonateur (2) et qui dépasse au moins en partie d'une paroi extérieure (13) du boîtier (10, 13),
comprenant un élément de transmission de chaleur (9) qui est relié de manière thermiquement conductrice au convertisseur piézoélectrique (8) et qui présente au moins une surface extérieure (24) qui s'étend à proximité de la face interne (32) d'une paroi extérieure (28), en formant un interstice (34), afin de transmettre la chaleur dissipée du convertisseur piézoélectrique (8) à la paroi extérieure (28),
caractérisé en ce que
le transducteur à tige pour ultrasons (1) est submersible,
l'élément de transmission de chaleur (9) présente une longueur de 12 dans la direction parallèle à l'axe de vibration,
la surface extérieure (24) de l'élément de transmission de chaleur (9) et la face interne (32) du boîtier (10, 13) ont des formes qui sont adaptées l'une à l'autre, de manière à créer un interstice (34) sensiblement uniforme le long du pourtour, et
la largeur de l'interstice (34) est comprise entre 0,5 mm et 3 mm. - Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'espace intérieur présente une section transversale cylindrique.
- Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'élément de transmission de chaleur (9) est cylindrique sur sa face externe.
- Transducteur à tige pour ultrasons selon la revendication 2, caractérisé en ce que l'élément de transmission de chaleur (9) présente une forme prismatique qui est différente de la forme cylindrique.
- Transducteur à tige pour ultrasons selon la revendication 4, caractérisé en ce que l'élément de transmission de chaleur (9) présente une forme d'étoile.
- Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'espace intérieur présente une section transversale prismatique qui est différente de la forme cylindrique, la surface de base du prisme ayant, au moins approximativement, une forme d'étoile.
- Transducteur à tige pour ultrasons selon la revendication 6, caractérisé en ce que la surface de base en forme d'étoile se compose d'une surface centrale et de branches partant de cette surface centrale.
- Transducteur à tige pour ultrasons selon la revendication 7, caractérisé en ce que les branches ont des formes identiques entre elles.
- Transducteur à tige pour ultrasons selon la revendication 7, caractérisé en ce que, vues en coupe transversale, les branches sont à peu près triangulaires.
- Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que le boîtier (10, 13) présente une surface extérieure (28) cylindrique.
- Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce qu'une partie de boîtier (10) présente sensiblement la forme d'un pot (28, 29) cylindrique.
- Transducteur à tige pour ultrasons selon la revendication 11, caractérisé en ce que la partie de boîtier (10) comporte, dans le pot (28, 29) cylindrique, un insert qui délimite un espace intérieur prismatique.
- Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'élément de liaison (7) présente un collet (13, 14) dont le diamètre extérieur est supérieur à la largeur intérieure de l'espace intérieur.
- Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que le dispositif convertisseur piézoélectrique (8) est formé d'un certain nombre de disques piézoélectriques (17) disposés les uns à côté des autres et entre lesquels sont insérées des électrodes (18).
- Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que le dispositif convertisseur piézoélectrique (8) présente deux extrémités frontales, et en ce que l'élément de transmission de chaleur (9) est disposé sur une extrémité frontale.
- Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que le dispositif convertisseur piézoélectrique (8) présente deux parties qui sont montées en série sur le plan acoustique, et en ce que l'élément de transmission de chaleur (9) est inséré entre les deux parties.
- Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'élément de transmission de chaleur (9) présente la forme d'un pot, le fond (36) de l'élément de transmission de chaleur (9) en forme de pot étant couplé acoustiquement et de façon thermoconductrice à une face frontale du dispositif piézoélectrique (8).
- Transducteur à tige pour ultrasons selon la revendication 17, caractérisé en ce que le boîtier (10, 13) présente un renfoncement (38) qui avance dans l'espace intérieur de l'élément de transmission de chaleur (9) en forme de pot, en créant un interstice étroit.
- Transducteur à tige pour ultrasons selon la revendication 1, caractérisé en ce que l'élément de transmission de chaleur (9) présente au moins une surface qui oppose une résistance thermique plus faible à l'atmosphère environnante que le dispositif piézoélectrique (8).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PL06700984T PL1859436T3 (pl) | 2005-02-15 | 2006-01-13 | Prętowy wibrator ultradźwiękowy do wytwarzania ultradźwięków w cieczach |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005007056A DE102005007056A1 (de) | 2005-02-15 | 2005-02-15 | Ultraschall-Stabschwinger |
PCT/EP2006/000251 WO2006087053A1 (fr) | 2005-02-15 | 2006-01-13 | Transducteur a tige pour les utltrasons destine a produire un ultrason dans des liquides |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1859436A1 EP1859436A1 (fr) | 2007-11-28 |
EP1859436B1 true EP1859436B1 (fr) | 2012-07-11 |
EP1859436B8 EP1859436B8 (fr) | 2012-08-15 |
Family
ID=36529318
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06700984A Active EP1859436B8 (fr) | 2005-02-15 | 2006-01-13 | Transducteur a tige pour les utltrasons destine a produire un ultrason dans des liquides |
Country Status (10)
Country | Link |
---|---|
US (1) | US7688681B2 (fr) |
EP (1) | EP1859436B8 (fr) |
JP (1) | JP5243802B2 (fr) |
CN (1) | CN101142619B (fr) |
BR (1) | BRPI0607338B1 (fr) |
DE (1) | DE102005007056A1 (fr) |
DK (1) | DK1859436T3 (fr) |
ES (1) | ES2392946T3 (fr) |
PL (1) | PL1859436T3 (fr) |
WO (1) | WO2006087053A1 (fr) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005007056A1 (de) * | 2005-02-15 | 2006-08-24 | Dieter Weber | Ultraschall-Stabschwinger |
JP6424001B2 (ja) | 2010-10-04 | 2018-11-14 | ドクター ヒールシャー ゲーエムベーハー | 電気機械式複合高周波振動システム(vfhs)を締め付けるための装置及び方法 |
DE102012109405B4 (de) * | 2011-10-05 | 2020-11-12 | Dr. Hielscher Gmbh | Ultraschallsystem mit Ultraschallerzeuger, Resonator und Lichtquelle |
JP6270505B2 (ja) * | 2014-01-27 | 2018-01-31 | オリンパス株式会社 | 積層型超音波振動デバイス、積層型超音波振動デバイスの製造方法および超音波医療装置 |
DE102014210886A1 (de) | 2014-06-06 | 2015-12-17 | Weber Ultrasonics Gmbh | Ultraschall-Konverter |
CN104275329B (zh) * | 2014-10-24 | 2016-01-06 | 王峰 | 一种色谱柱或保护柱超声清洗装置 |
EP3101441B1 (fr) * | 2015-06-03 | 2018-05-16 | Pepperl + Fuchs GmbH | Convertisseur d'ultrasons |
DE202017100958U1 (de) | 2017-02-21 | 2017-03-06 | Weber Ultrasonics AG | Ultraschallschneidelement |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE124010C (fr) | ||||
US3689783A (en) * | 1971-03-11 | 1972-09-05 | David A Williams | Ultrasonic transducer with half-wave separator between piezoelectric crystal means |
US3772538A (en) * | 1973-01-08 | 1973-11-13 | Kane Corp Du | Center bolt type acoustic transducer |
DD124010A1 (fr) * | 1976-03-12 | 1977-02-02 | ||
EP0455837B1 (fr) * | 1990-03-09 | 1992-05-13 | Martin Walter Ultraschalltechnik GmbH | Résonnateur ultrasonore |
US6039059A (en) * | 1996-09-30 | 2000-03-21 | Verteq, Inc. | Wafer cleaning system |
DE19836229C1 (de) * | 1998-08-04 | 2000-03-23 | Hielscher Gmbh | Anordnung zur Wärmeableitung, insbesondere für Ultraschallwandler mit hoher Leistung |
GB0117881D0 (en) * | 2001-07-21 | 2001-09-12 | Rawson F F | Piezoelectric transducers |
US7287537B2 (en) * | 2002-01-29 | 2007-10-30 | Akrion Technologies, Inc. | Megasonic probe energy director |
US6924585B2 (en) * | 2002-09-23 | 2005-08-02 | The Crest Group, Inc. | Sleeved ultrasonic transducer |
DE102005007056A1 (de) * | 2005-02-15 | 2006-08-24 | Dieter Weber | Ultraschall-Stabschwinger |
-
2005
- 2005-02-15 DE DE102005007056A patent/DE102005007056A1/de not_active Ceased
-
2006
- 2006-01-13 ES ES06700984T patent/ES2392946T3/es active Active
- 2006-01-13 CN CN200680004937XA patent/CN101142619B/zh active Active
- 2006-01-13 EP EP06700984A patent/EP1859436B8/fr active Active
- 2006-01-13 US US11/884,332 patent/US7688681B2/en active Active
- 2006-01-13 WO PCT/EP2006/000251 patent/WO2006087053A1/fr active Application Filing
- 2006-01-13 DK DK06700984.5T patent/DK1859436T3/da active
- 2006-01-13 JP JP2007555468A patent/JP5243802B2/ja active Active
- 2006-01-13 PL PL06700984T patent/PL1859436T3/pl unknown
- 2006-01-13 BR BRPI0607338-7A patent/BRPI0607338B1/pt not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE102005007056A1 (de) | 2006-08-24 |
ES2392946T3 (es) | 2012-12-17 |
BRPI0607338A2 (pt) | 2010-03-23 |
PL1859436T3 (pl) | 2013-01-31 |
JP5243802B2 (ja) | 2013-07-24 |
CN101142619A (zh) | 2008-03-12 |
CN101142619B (zh) | 2011-06-08 |
BRPI0607338B1 (pt) | 2017-11-07 |
US20080212408A1 (en) | 2008-09-04 |
EP1859436A1 (fr) | 2007-11-28 |
WO2006087053A1 (fr) | 2006-08-24 |
EP1859436B8 (fr) | 2012-08-15 |
US7688681B2 (en) | 2010-03-30 |
JP2008529777A (ja) | 2008-08-07 |
DK1859436T3 (da) | 2012-10-15 |
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